CN103817466A - Method for efficiently preparing graphene-reinforcing copper-based composite brazing filler metal at low temperature - Google Patents

Method for efficiently preparing graphene-reinforcing copper-based composite brazing filler metal at low temperature Download PDF

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CN103817466A
CN103817466A CN201410066482.0A CN201410066482A CN103817466A CN 103817466 A CN103817466 A CN 103817466A CN 201410066482 A CN201410066482 A CN 201410066482A CN 103817466 A CN103817466 A CN 103817466A
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graphene
powder
copper
temperature
hydrogen
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CN103817466B (en
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亓钧雷
张天琪
张丽霞
曹健
冯吉才
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Harbin Institute of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0244Powders, particles or spheres; Preforms made therefrom
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/30Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/302Cu as the principal constituent
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4417Methods specially adapted for coating powder

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
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Abstract

The invention relates to a method for preparing graphene-reinforcing copper-based composite brazing filler metal, in particular to a method for efficiently preparing the graphene-reinforcing copper-based composite brazing filler metal at a low temperature. The method aims to solve the problems that during preparation of the graphene-reinforcing copper-based composite brazing filler metal through a traditional method, the dispersibility of graphene is poor, the number of surface defects is large, the preparation temperature is high, and efficiency is low. The method comprises the steps that firstly, copper powder is placed in a plasma-reinforcing chemical vapor deposition vacuum device, hydrogen is fed into the vacuum device, and the temperature is maintained at a high temperature; secondly, argon and carbon source gas are fed into the vacuum device for deposition, and after deposition is over, feeding of the carbon source gas is stopped; finally, cooling is conducted until the temperature reaches the room temperature, so that grapheme/copper composite powder is obtained, next, metal powder or alloy power is evenly mixed with the grapheme/copper composite powder, and then the graphene-reinforcing copper-based composite brazing filler metal is obtained. The method is used for efficiently preparing the graphene-reinforcing copper-based composite brazing filler metal at a low temperature.

Description

A kind of efficient cryogenic is prepared the method for Graphene enhancing copper base composite soldering
Technical field
The present invention relates to prepare the method for Graphene enhancing copper base composite soldering.
Background technology
Soldering is the one of three large welding methods (melting welding, pressure welding, soldering), mainly to adopt to make solder than the low-melting metal material of mother metal, weldment and solder are heated to above to solder fusing point, lower than mother metal fusion temperature, utilize liquid solder to soak mother metal, fill play movement and realize with the counterdiffusion of mother metal phase the method that is connected weldment.In all extensive application of numerous areas such as machinery, motor, instrument, electronic technology.The performance indications such as the intensity of soldered fitting, hardness, heat resistance, corrosion resistance all have direct relation with solder, add the reinforcements such as particle, fiber, synusia and can effectively improve soldered fitting performance in solder.Along with scientific and technical development, nano material (as nano particle, nano wire, nanometer sheet etc.) strengthens solder as reinforcement and has become the study hotspot of welding field.
Graphene is a kind of new material of the individual layer laminated structure being made up of carbon atom.Due to the particularity of graphene-structured, compared with other materials, Graphene has outstanding electric property, thermal property and mechanical performance.Show huge application prospect in all many-sides such as electronic device, composite and electrochemical energy storage materials.There are some researches prove, in Sn-Ag-Cu solder, add graphene film prepared by 0.1% oxide-reduction method can significantly improve wettability and the mechanical property of solder.As can be seen here, Graphene has broad application prospects at aspects such as strengthening solder, raising solder performances.
At present, the preparation method that Graphene is conventional has three kinds of methods such as mechanical stripping method, redox graphite method, chemical vapour deposition technique.The Graphene quality that mechanical stripping method is prepared is high, but complex process, and productive rate is low, is difficult to practical application.Although redox graphite method has the features such as cost is low, output is large, technique is more complicated, and graphene-structured is destroyed seriously, blemish is extremely many, the poor-performings such as electricity and mechanics.Graphene size prepared by chemical vapour deposition technique is large, defect is few, but preparation temperature is higher and the time is long, efficiency is low, is difficult to practical application.
Due to preparation technology's restriction of grapheme material, cause Graphene to strengthen in the preparation method of composite soldering, there are two difficult points: (1) Graphene dispersion problem, tradition mechanical ball tribulation is to realize dispersed in composite soldering of Graphene, often realize the dispersed of Graphene by chemical modification method, technique is more complicated.(2) graphene-structured defect problem, requires and addition demand according to actual preparation technology, the Graphene that often adopts redox graphite method to obtain, and in composite soldering, graphene-structured defect is more for this reason.Due under higher temperature, the Graphene of structural failure very easily with composite soldering in active element react to each other, limited the extensive use of grapheme material in composite soldering.
Summary of the invention
The present invention will solve conventional method and prepare that the Graphene bad dispersibility, the blemish that when Graphene strengthens copper base composite soldering, exist are many, preparation temperature is high and inefficient problem, and provides a kind of efficient cryogenic to prepare the method for Graphene enhancing copper base composite soldering.
Efficient cryogenic is prepared a method for Graphene enhancing copper base composite soldering, specifically carries out according to following steps:
One, copper powder is placed in to plasma enhanced chemical vapor deposition vacuum plant, being evacuated to pressure is below 5Pa, pass into hydrogen take gas flow as 18sccm~22sccm, regulating vacuum pumping rate is 190Pa~210Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, and be in 40min, temperature to be heated up to most 500 ℃~700 ℃ under 190Pa~210Pa and hydrogen atmosphere at pressure, and be to be incubated 25min~35min at 500 ℃~700 ℃ in temperature;
Two, pass into argon gas and carbon-source gas, regulating the gas flow of hydrogen is 40sccm, argon gas flow is 80sccm, the gas flow of carbon-source gas is 1sccm~8sccm, and to regulate vacuum pumping rate be 800Pa~1000Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, then be 13.56MHz in depositing system radio-frequency power supply frequency, radio-frequency power is 190W~210W, pressure is that 800Pa~1000Pa and temperature are to deposit under 500 ℃~700 ℃ conditions, sedimentation time is 10s~300s, after deposition finishes, close radio-frequency power supply and heating power supply, stop passing into carbon-source gas, continue take the gas flow of hydrogen as 40sccm, argon gas flow is that 80sccm passes into hydrogen and argon gas, and to regulate vacuum pumping rate be 150Pa~200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, be under 150Pa~200Pa and hydrogen and argon gas atmosphere, to be 500 ℃~700 ℃ from temperature to be cooled to room temperature at pressure, obtain Graphene/copper composite powder,
Three, Graphene/copper composite powder of being prepared by metal dust or alloy powder and step 2 is put into ball mill, grinds and is stirred to powder and mix, and obtains Graphene and strengthens copper base composite soldering.
The invention has the beneficial effects as follows: 1, the present invention utilizes plasma reinforced chemical vapour deposition method (PECVD), can be by carbon source (CH by action of radio 4) resolve into very fast and there is mutually highly active carbon-based group, just can the short time through the catalytic reaction of metallic catalyst grow Graphene in metal surface.Can realize low temperature and effectively go out Graphene in the superficial growth of Cu powder.
2, the present invention utilizes plasma to strengthen action of radio, has not only avoided high temperature pyrolysis carbon-source gas, and has increased substantially carbon-source gas (CH 4) decomposition efficiency, pass into a small amount of carbon-source gas (CH 4) also can produce a large amount of activated carbon groups, thus effectively reduce preparation temperature, improved preparation efficiency.
3, method of the present invention is simple, and efficient, low cost, is convenient to suitability for industrialized production, and the quality that the Graphene of preparing strengthens Graphene in copper base composite soldering is high and dispersed, can effectively improve the performance of copper base composite soldering.
The present invention prepares the method for Graphene enhancing copper base composite soldering for a kind of efficient cryogenic.
Accompanying drawing explanation
Fig. 1 is the Raman spectrogram of Graphene/copper composite powder in embodiment mono-; 1 is D peak; 2 is G peak; 3 is 2D peak;
Fig. 2 is that in embodiment mono-, Graphene is transferred to SiO 2the light microscope figure of/Si substrate;
Fig. 3 is that in embodiment mono-, Graphene is transferred to SiO 2the Raman spectrogram of/Si substrate; 1 is D peak; 2 is G peak; 3 is 2D peak.
The specific embodiment
Technical solution of the present invention is not limited to the following cited specific embodiment, also comprises any combination between each specific embodiment.
The specific embodiment one: a kind of efficient cryogenic described in present embodiment is prepared the method for Graphene enhancing copper base composite soldering, specifically carries out according to following steps:
One, copper powder is placed in to plasma enhanced chemical vapor deposition vacuum plant, being evacuated to pressure is below 5Pa, pass into hydrogen take gas flow as 18sccm~22sccm, regulating vacuum pumping rate is 190Pa~210Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, and be in 40min, temperature to be heated up to most 500 ℃~700 ℃ under 190Pa~210Pa and hydrogen atmosphere at pressure, and be to be incubated 25min~35min at 500 ℃~700 ℃ in temperature;
Two, pass into argon gas and carbon-source gas, regulating the gas flow of hydrogen is 40sccm, argon gas flow is 80sccm, the gas flow of carbon-source gas is 1sccm~8sccm, and to regulate vacuum pumping rate be 800Pa~1000Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, then be 13.56MHz in depositing system radio-frequency power supply frequency, radio-frequency power is 190W~210W, pressure is that 800Pa~1000Pa and temperature are to deposit under 500 ℃~700 ℃ conditions, sedimentation time is 10s~300s, after deposition finishes, close radio-frequency power supply and heating power supply, stop passing into carbon-source gas, continue take the gas flow of hydrogen as 40sccm, argon gas flow is that 80sccm passes into hydrogen and argon gas, and to regulate vacuum pumping rate be 150Pa~200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, be under 150Pa~200Pa and hydrogen and argon gas atmosphere, to be 500 ℃~700 ℃ from temperature to be cooled to room temperature at pressure, obtain Graphene/copper composite powder,
Three, Graphene/copper composite powder of being prepared by metal dust or alloy powder and step 2 is put into ball mill, grinds and is stirred to powder and mix, and obtains Graphene and strengthens copper base composite soldering.
Involved efficient cryogenic in present embodiment is prepared the basic principle of Graphene enhancing copper base composite soldering: utilize plasma reinforced chemical vapour deposition method (PECVD), and can be by carbon source (CH by action of radio 4) resolve into very fast carbon-based group, these carbon-based groups have very high activity, just can the short time through the catalytic reaction of metallic catalyst grow Graphene in metal surface.Due to action of radio, not only avoid high temperature pyrolysis carbon-source gas in addition, and increased substantially carbon-source gas (CH 4) decomposition efficiency, pass into a small amount of carbon-source gas (CH 4) also can produce a large amount of activated carbon groups, thus effectively reduce preparation temperature, improved preparation efficiency.The selected copper of the present invention is as matrix, and because the solubility of carbon atom in copper is relatively low, therefore can adsorb the mode growing graphene from restriction by carbon atom, not only quality is high for the Graphene that this kind of mode forms, and good dispersion.The Graphene that should prepare in this way strengthens copper powders and makes copper base composite soldering, can make composite soldering obtain a series of outstanding character.
The beneficial effect of present embodiment is: 1, present embodiment is utilized plasma reinforced chemical vapour deposition method (PECVD), can be by carbon source (CH by action of radio 4) resolve into very fast and there is mutually highly active carbon-based group, just can the short time through the catalytic reaction of metallic catalyst grow Graphene in metal surface.Can realize low temperature and effectively go out Graphene in the superficial growth of Cu powder.
2, present embodiment utilizes plasma to strengthen action of radio, has not only avoided high temperature pyrolysis carbon-source gas, and has increased substantially carbon-source gas (CH 4) decomposition efficiency, pass into a small amount of carbon-source gas (CH 4) also can produce a large amount of activated carbon groups, thus effectively reduce preparation temperature, improved preparation efficiency.
3, the method for present embodiment is simple, and efficient, low cost, is convenient to suitability for industrialized production, and the quality that the Graphene of preparing strengthens Graphene in copper base composite soldering is high and dispersed, can effectively improve the performance of copper base composite soldering.
The specific embodiment two: present embodiment is different from the specific embodiment one: the copper powder purity described in step 1 is 99%~99.99%, particle diameter is 100nm~100 μ m.Other is identical with the specific embodiment one.
The specific embodiment three: present embodiment is different from one of specific embodiment one or two: the carbon-source gas described in step 2 is methane.Other is identical with the specific embodiment one or two.
The specific embodiment four: present embodiment is different from one of specific embodiment one to three: the metal dust purity described in step 3 is 99%~99.99%, particle diameter is 100nm~100 μ m; Described alloy powder purity is 99%~99.99%, and particle diameter is 100nm~100 μ m.Other is identical with the specific embodiment one to three.
The specific embodiment five: present embodiment is different from one of specific embodiment one to four: the metal dust described in step 3 is Sn powder, Ag powder, P powder or Mn powder.Other is identical with the specific embodiment one to four.
The specific embodiment six: present embodiment is different from one of specific embodiment one to five: the alloy powder described in step 3 is Sn-Ag powder or Ag-Zn powder.Other is identical with the specific embodiment one to five.
Adopt following examples to verify beneficial effect of the present invention:
Embodiment mono-:
A kind of efficient cryogenic described in the present embodiment is prepared the method for Graphene enhancing copper base composite soldering, specifically carries out according to following steps:
One, copper powder is placed in to plasma enhanced chemical vapor deposition vacuum plant, being evacuated to pressure is below 5Pa, pass into hydrogen take gas flow as 20sccm, regulating vacuum pumping rate is 200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, and be in 40min, temperature to be heated up to most 600 ℃ under 200Pa and hydrogen atmosphere at pressure, and be to be incubated 30min at 600 ℃ in temperature;
Two, pass into argon gas and CH 4, regulating hydrogen gas flow is that 40sccm, argon gas flow are 80sccm and CH 4gas flow is 2sccm, and to regulate vacuum pumping rate be 1000Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, then be 13.56MHz in depositing system radio-frequency power supply frequency, radio-frequency power is 200W, pressure is that 1000Pa and temperature are to deposit under 600 ℃ of conditions, sedimentation time is 60s, after deposition finishes, close radio-frequency power supply and heating power supply, stop passing into carbon-source gas, continue take hydrogen gas flow as 40sccm and argon gas flow passes into argon gas and hydrogen as 80sccm, and to regulate vacuum pumping rate be 200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, be under 200Pa and hydrogen and argon gas atmosphere, to be 600 ℃ from temperature to be cooled to room temperature at pressure, obtain Graphene/copper composite powder,
Three, Graphene/copper composite powder of being prepared by metal Sn powder and step 2 is put into ball mill, grinds and stirs 45min and mix to powder, obtains Graphene and strengthens copper base composite soldering.
Copper powder purity described in step 1 is 99.9%~99.95%, and particle diameter is 300 orders.
Metal Sn powder purity described in step 3 is 99.95%, and particle diameter is 300 orders.
As shown in Figure 1,1 is D peak to the Raman spectrogram of Graphene/copper composite powder of preparing in embodiment mono-; 2 is G peak; 3 is 2D peak; Optical maser wavelength is 488nm; The quality of materials that explanation obtains is as seen from the figure good;
Light microscope observation for Graphene can only be transferred to SiO by Graphene 2on/Si matrix, Graphene is transferred to SiO 2the light microscope figure of/Si substrate is as described in 2, and Graphene is transferred to SiO 2as described in Figure 3,1 is D peak to the Raman spectrogram of/Si substrate; 2 is G peak; 3 is 2D peak; After known transfer, there is no obvious mass defect, size homogeneous, does not have before shifting yet, and convenient transfer is also one of advantage of PECVD method.
The quality that the Graphene of preparing strengthens Graphene in copper base composite soldering is high and dispersed, can effectively improve the performance of copper base composite soldering.
Embodiment bis-:
A kind of efficient cryogenic described in the present embodiment is prepared the method for Graphene enhancing copper base composite soldering, specifically carries out according to following steps:
One, copper powder is placed in to plasma enhanced chemical vapor deposition vacuum plant, being evacuated to pressure is below 5Pa, pass into hydrogen take gas flow as 20sccm, regulating vacuum pumping rate is 200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, and be in 40min, temperature to be heated up to most 500 ℃ under 200Pa and hydrogen atmosphere at pressure, and be to be incubated 30min at 500 ℃ in temperature;
Two, pass into argon gas and CH 4, regulating hydrogen gas flow is that 40sccm, argon gas flow are 80sccm and CH 4gas flow is 2sccm, and to regulate vacuum pumping rate be 1000Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, then be 13.56MHz in depositing system radio-frequency power supply frequency, radio-frequency power is 200W, pressure is that 1000Pa and temperature are to deposit under 500 ℃ of conditions, sedimentation time is 90s, after deposition finishes, close radio-frequency power supply and heating power supply, stop passing into carbon-source gas, continue take hydrogen gas flow as 40sccm and argon gas flow passes into argon gas and hydrogen as 80sccm, and to regulate vacuum pumping rate be 200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, be under 200Pa and hydrogen and argon gas atmosphere, to be 500 ℃ from temperature to be cooled to room temperature at pressure, obtain Graphene/copper composite powder,
Three, Graphene/copper composite powder of being prepared by metal Sn powder and step 2 is put into ball mill, grinds and stirs 45min and mix to powder, obtains Graphene and strengthens copper base composite soldering.
Copper powder purity described in step 1 is 99.9%~99.95%, and particle diameter is 300 orders.
Metal Sn powder purity described in step 3 is 99.95%, and particle diameter is 300 orders.
Graphene size homogeneous in Graphene/copper composite powder that the present embodiment is prepared, defect is little, and Graphene major part is 1-3 layer.
The quality that the Graphene of preparing strengthens Graphene in copper base composite soldering is high and dispersed, can effectively improve the performance of copper base composite soldering.
Embodiment tri-:
A kind of efficient cryogenic described in the present embodiment is prepared the method for Graphene enhancing copper base composite soldering, specifically carries out according to following steps:
One, copper powder is placed in to plasma enhanced chemical vapor deposition vacuum plant, being evacuated to pressure is below 5Pa, pass into hydrogen take gas flow as 20sccm, regulating vacuum pumping rate is 200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, and be in 40min, temperature to be heated up to most 600 ℃ under 200Pa and hydrogen atmosphere at pressure, and be to be incubated 30min at 600 ℃ in temperature;
Two, pass into argon gas and CH 4, regulating hydrogen gas flow is that 40sccm, argon gas flow are 80sccm and CH 4gas flow is 8sccm, and to regulate vacuum pumping rate be 1000Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, then be 13.56MHz in depositing system radio-frequency power supply frequency, radio-frequency power is 200W, pressure is that 1000Pa and temperature are to deposit under 600 ℃ of conditions, sedimentation time is 10s, after deposition finishes, close radio-frequency power supply and heating power supply, stop passing into carbon-source gas, continue take hydrogen gas flow as 40sccm and argon gas flow passes into argon gas and hydrogen as 80sccm, and to regulate vacuum pumping rate be 200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, be under 200Pa and hydrogen and argon gas atmosphere, to be 600 ℃ from temperature to be cooled to room temperature at pressure, obtain Graphene/copper composite powder,
Three, Graphene/copper composite powder of being prepared by metal Sn powder and step 2 is put into ball mill, grinds and stirs 45min and mix to powder, obtains Graphene and strengthens copper base composite soldering.
Copper powder purity described in step 1 is 99.9%~99.95%, and particle diameter is 300 orders.
Metal Sn powder purity described in step 3 is 99.95%, and particle diameter is 300 orders.
Graphene size homogeneous in Graphene/copper composite powder that the present embodiment is prepared, defect is little, and Graphene major part is 1-3 layer.
The quality that the Graphene of preparing strengthens Graphene in copper base composite soldering is high and dispersed, can effectively improve the performance of copper base composite soldering.
Embodiment tetra-:
A kind of efficient cryogenic described in the present embodiment is prepared the method for Graphene enhancing copper base composite soldering, specifically carries out according to following steps:
One, copper powder is placed in to plasma enhanced chemical vapor deposition vacuum plant, being evacuated to pressure is below 5Pa, pass into hydrogen take gas flow as 20sccm, regulating vacuum pumping rate is 200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, and be in 40min, temperature to be heated up to most 600 ℃ under 200Pa and hydrogen atmosphere at pressure, and be to be incubated 30min at 600 ℃ in temperature;
Two, pass into argon gas and CH 4, regulating hydrogen gas flow is that 40sccm, argon gas flow are 80sccm and CH 4gas flow is 8sccm, and to regulate vacuum pumping rate be 1000Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, then be 13.56MHz in depositing system radio-frequency power supply frequency, radio-frequency power is 200W, pressure is that 1000Pa and temperature are to deposit under 600 ℃ of conditions, sedimentation time is 30s, after deposition finishes, close radio-frequency power supply and heating power supply, stop passing into carbon-source gas, continue take hydrogen gas flow as 40sccm and argon gas flow passes into argon gas and hydrogen as 80sccm, and to regulate vacuum pumping rate be 200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, be under 200Pa and hydrogen and argon gas atmosphere, to be 600 ℃ from temperature to be cooled to room temperature at pressure, obtain Graphene/copper composite powder,
Three, Graphene/copper composite powder of being prepared by metal A g powder and step 2 is put into ball mill, grinds and stirs 45min and mix to powder, obtains Graphene and strengthens copper base composite soldering.
Copper powder purity described in step 1 is 99.9%~99.95%, and particle diameter is 300 orders.
Metal A g powder purity described in step 3 is 99.95%, and particle diameter is 300 orders.
Graphene size homogeneous in Graphene/copper composite powder of preparing in the present embodiment, defect is less, and Graphene major part is 3-5 layer.
The quality that the Graphene of preparing strengthens Graphene in copper base composite soldering is high and dispersed, can effectively improve the performance of copper base composite soldering.
Embodiment five:
A kind of efficient cryogenic described in the present embodiment is prepared the method for Graphene enhancing copper base composite soldering, specifically carries out according to following steps:
One, copper powder is placed in to plasma enhanced chemical vapor deposition vacuum plant, being evacuated to pressure is below 5Pa, pass into hydrogen take gas flow as 20sccm, regulating vacuum pumping rate is 200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, and be in 40min, temperature to be heated up to most 700 ℃ under 200Pa and hydrogen atmosphere at pressure, and be to be incubated 30min at 700 ℃ in temperature;
Two, pass into argon gas and CH 4, regulating hydrogen gas flow is that 40sccm, argon gas flow are 80sccm and CH 4gas flow is 8sccm, and to regulate vacuum pumping rate be 1000Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, then be 13.56MHz in depositing system radio-frequency power supply frequency, radio-frequency power is 200W, pressure is that 1000Pa and temperature are to deposit under 700 ℃ of conditions, sedimentation time is 30s, after deposition finishes, close radio-frequency power supply and heating power supply, stop passing into carbon-source gas, continue take hydrogen gas flow as 40sccm and argon gas flow passes into argon gas and hydrogen as 80sccm, and to regulate vacuum pumping rate be 200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, be under 200Pa and hydrogen and argon gas atmosphere, to be 700 ℃ from temperature to be cooled to room temperature at pressure, obtain Graphene/copper composite powder,
Three, Graphene/copper composite powder of being prepared by metal A g powder and step 2 is put into ball mill, grinds and stirs 45min and mix to powder, obtains Graphene and strengthens copper base composite soldering.
Copper powder purity described in step 1 is 99.9%~99.95%, and particle diameter is 300 orders.
Metal A g powder purity described in step 3 is 99.95%, and particle diameter is 300 orders.
Graphene size homogeneous in Graphene/copper composite powder that the present embodiment is prepared, defect is few, and Graphene major part is more than 3 layers.
The quality that the Graphene of preparing strengthens Graphene in copper base composite soldering is high and dispersed, can effectively improve the performance of copper base composite soldering.

Claims (6)

1. efficient cryogenic is prepared Graphene and strengthens a method for copper base composite soldering, it is characterized in that a kind of efficient cryogenic prepares the method that Graphene strengthens copper base composite soldering and carry out according to following steps:
One, copper powder is placed in to plasma enhanced chemical vapor deposition vacuum plant, being evacuated to pressure is below 5Pa, pass into hydrogen take gas flow as 18sccm~22sccm, regulating vacuum pumping rate is 190Pa~210Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, and be in 40min, temperature to be heated up to most 500 ℃~700 ℃ under 190Pa~210Pa and hydrogen atmosphere at pressure, and be to be incubated 25min~35min at 500 ℃~700 ℃ in temperature;
Two, pass into argon gas and carbon-source gas, regulating the gas flow of hydrogen is 40sccm, argon gas flow is 80sccm, the gas flow of carbon-source gas is 1sccm~8sccm, and to regulate vacuum pumping rate be 800Pa~1000Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, then be 13.56MHz in depositing system radio-frequency power supply frequency, radio-frequency power is 190W~210W, pressure is that 800Pa~1000Pa and temperature are to deposit under 500 ℃~700 ℃ conditions, sedimentation time is 10s~300s, after deposition finishes, close radio-frequency power supply and heating power supply, stop passing into carbon-source gas, continue take the gas flow of hydrogen as 40sccm, argon gas flow is that 80sccm passes into hydrogen and argon gas, and to regulate vacuum pumping rate be 150Pa~200Pa by pressure control in plasma enhanced chemical vapor deposition vacuum plant, be under 150Pa~200Pa and hydrogen and argon gas atmosphere, to be 500 ℃~700 ℃ from temperature to be cooled to room temperature at pressure, obtain Graphene/copper composite powder,
Three, Graphene/copper composite powder of being prepared by metal dust or alloy powder and step 2 is put into ball mill, grinds and is stirred to powder and mix, and obtains Graphene and strengthens copper base composite soldering.
2. a kind of efficient cryogenic according to claim 1 is prepared the method for Graphene enhancing copper base composite soldering, it is characterized in that the copper powder purity described in step 1 is 99%~99.99%, and particle diameter is 100nm~100 μ m.
3. a kind of efficient cryogenic according to claim 1 is prepared the method for Graphene enhancing copper base composite soldering, it is characterized in that the carbon-source gas described in step 2 is methane.
4. a kind of efficient cryogenic according to claim 1 is prepared the method for Graphene enhancing copper base composite soldering, it is characterized in that the metal dust purity described in step 3 is 99%~99.99%, and particle diameter is 100nm~100 μ m; Described alloy powder purity is 99%~99.99%, and particle diameter is 100nm~100 μ m.
5. a kind of efficient cryogenic according to claim 1 is prepared the method for Graphene enhancing copper base composite soldering, it is characterized in that the metal dust described in step 3 is Sn powder, Ag powder, P powder or Mn powder.
6. a kind of efficient cryogenic according to claim 1 is prepared the method for Graphene enhancing copper base composite soldering, it is characterized in that the alloy powder described in step 3 is Sn-Ag powder or Ag-Zn powder.
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Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102329976A (en) * 2011-09-06 2012-01-25 上海交通大学 Preparation method of graphene reinforced metal-matrix composite
CN102385938A (en) * 2011-11-10 2012-03-21 电子科技大学 Metal matrix graphene composite electrical contact material and preparation method thereof
CN102383071A (en) * 2011-11-09 2012-03-21 哈尔滨工业大学 Method for preparing carbon nano tube enhanced titanium-base compound material by in-suit reaction
CN102628115A (en) * 2012-04-01 2012-08-08 昆明理工大学 Preparation method of carbon nano tube enhanced copper-based composite material
CN102925741A (en) * 2012-11-08 2013-02-13 镇江中孚复合材料有限公司 Copper base solid self-lubricating composite material and method for preparing the same
CN103183344A (en) * 2013-04-24 2013-07-03 哈尔滨工业大学 Method for low-temperature and efficient preparation of large-size graphene
US20130316167A1 (en) * 2012-05-25 2013-11-28 Empire Technology Developement LLC Copper substrate for deposition of graphene

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102329976A (en) * 2011-09-06 2012-01-25 上海交通大学 Preparation method of graphene reinforced metal-matrix composite
CN102383071A (en) * 2011-11-09 2012-03-21 哈尔滨工业大学 Method for preparing carbon nano tube enhanced titanium-base compound material by in-suit reaction
CN102385938A (en) * 2011-11-10 2012-03-21 电子科技大学 Metal matrix graphene composite electrical contact material and preparation method thereof
CN102628115A (en) * 2012-04-01 2012-08-08 昆明理工大学 Preparation method of carbon nano tube enhanced copper-based composite material
US20130316167A1 (en) * 2012-05-25 2013-11-28 Empire Technology Developement LLC Copper substrate for deposition of graphene
CN102925741A (en) * 2012-11-08 2013-02-13 镇江中孚复合材料有限公司 Copper base solid self-lubricating composite material and method for preparing the same
CN103183344A (en) * 2013-04-24 2013-07-03 哈尔滨工业大学 Method for low-temperature and efficient preparation of large-size graphene

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KIM Y,ETAL: "Strenghtening effect if single-atomic-layer graphene in metal-graphene nanolayered composites", 《NATURE COMMUNICATIONS》 *

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