CN103808990A - Capacitive probe device with function of reducing electric field distortion - Google Patents

Capacitive probe device with function of reducing electric field distortion Download PDF

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Publication number
CN103808990A
CN103808990A CN201410079496.6A CN201410079496A CN103808990A CN 103808990 A CN103808990 A CN 103808990A CN 201410079496 A CN201410079496 A CN 201410079496A CN 103808990 A CN103808990 A CN 103808990A
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electric field
electron beam
probe device
cavity structure
ring
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CN201410079496.6A
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CN103808990B (en
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阮存军
李庆生
李崇山
姜波
李彦峰
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Institute of Electronics of CAS
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Institute of Electronics of CAS
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Abstract

The invention provides a capacitive probe device with the function of reducing electric field distortion. The capacitive probe device comprises a cylindrical vacuum cavity structure, an insulating ceramic barrel fixed to the inner side of the vacuum cavity structure, an annular electron beam induction ring which is made of a metal conducting material and is fixed to the middle of the inner side of the insulating ceramic barrel, annular electric field improving rings which are made of a metal conducting material, fixed to the upper portion and the lower portion of the inner side of the insulating ceramic barrel, insulated from the electron beam induction ring, and equipotential with the vacuum cavity structure, and a lead adapting assembly which is used for leading an induction signal of the electron beam induction ring out of the vacuum cavity structure. In the capacitive probe device, the electric field improving rings which are insulated from the electron beam induction ring are arranged on both sides of the electron beam induction ring, thereby greatly reducing the electric field distortion on the edges of both sides of the electron beam induction ring, and making an electron field more uniform.

Description

There is the capacitive probe device that reduces electric field distortion function
Technical field
The present invention relates to vacuum electronics technical field, measure the capacitive probe structure of electron beam speed system, relate in particular to a kind of capacitive probe device that reduces electric field distortion function that has.
Background technology
Electron tube be a class in vacuum or gas medium, utilize electron beam and high-frequency electromagnetic field interactions and realize microwave power and amplify and the active electronic device of translation function.Nowadays, electron tube is widely used in fields such as radar, electronic countermeasure, guidance and satellite communications.Along with the development of electron tube technology, various electron beam measuring systems are arisen at the historic moment.
Fig. 1 is the structural representation of prior art capacitive probe device and associated components.As shown in Figure 1, the front end of capacitive probe, by ring flange 200 and Devices to test, as electron gun, klystron, gyrotron etc., is connected, and its rear end is connected with plane blind flange 500 with connecting pipe 400 by insulating ceramics 300.This capacitive probe 100 comprises: vacuum cavity structure 110, and it is simultaneously as external electrode; Electron beam inductance loop 130, it is as interior electrode.Wherein, between this vacuum cavity structure 110 and electron beam inductance loop 130, have insulating ceramics cylinder 120, both have formed electric capacity, and electron beam inductance loop 130 is connected to vacuum cavity structure 110 outsides by wire 151.Utilize capacitive probe to measure the induced voltage V (t) of electron beam, and on plane blind flange 500, measure beam current I (t), and then just can be calculated by following formula the average axial velocity v (t) of electron beam:
v(t)=k·I(t)/V(t) (1)
Wherein, this induced voltage V (t) obtains by vacuum cavity electrode induction in capacitive probe for electron beam; K is the constant coefficient being determined by the structure of capacitive probe and metering circuit.
But realizing in process of the present invention, applicant finds that prior art capacitive probe device exists following technological deficiency:
(1) because electron beam inductance loop and insulating ceramics have certain thickness, therefore before and after inductance loop, just there is larger non-radial electric field in edge, the distortion that this has just increased the voltage waveform of measuring on electron beam inductance loop, makes result of detection and subsequent calculations all bring larger error;
(2) because the lead-in wire of electron beam inductance loop is drawn separately from posterior edges, this has aggravated electric field distortion, and lead-in wire is easily subject to the bombardment of stray electron simultaneously, has reduced the accuracy that probe is surveyed;
(3) the vacuum insulation feed head being positioned on vacuum cavity is conventional ceramic electrode, and its outer lead joint is exposed in space, is easily subject to the various electromagnetic interference in space, even makes signal flood.
Summary of the invention
(1) technical matters that will solve
In view of above-mentioned technical matters, the invention provides a kind of capacitive probe device that reduces electric field distortion function that has, to reduce the induction field distortion of electron beam inductance loop, improve the measuring accuracy of electron beam axial velocity.
(2) technical scheme
The present invention has the capacitive probe device that reduces electric field distortion function and comprises: vacuum cavity structure 110, is tubular; Insulating ceramics cylinder 120, is fixed on the inner side of vacuum cavity structure 110; Electron beam inductance loop 130, in the form of a ring, is prepared by metallic conduction material, is fixed on the middle part of insulating ceramics cylinder 120 inner sides; At least one electric field improves ring, in the form of a ring, is prepared by metallic conduction material, is fixed on top or the bottom of insulating ceramics cylinder 200 inner sides, and this electric field improves ring and insulate with electron beam inductance loop 300, with vacuum cavity structure 110 equipotentials; And lead-in wire adapter assembly 150, for being drawn outside vacuum cavity structure 110 by the induced signal of electron beam inductance loop 130.
(3) beneficial effect
Can find out from technique scheme, the present invention has the capacitive probe device that reduces electric field distortion function and has following beneficial effect:
(1) increased in the both sides of electron beam inductance loop with the electric field of the metal material of its insulation and improved ring, thereby greatly reduced electron beam inductance loop both sides of the edge electric field distortion, made electric field more even;
(2) vacuum insulation feed head passes from vacuum cavity outer wall and insulating ceramics cylinder, and soldering middle side part outside electron beam inductance loop, thereby can not have influence on the Electric Field Distribution of electronic induction ring, avoid lead-in wire to be subject to the bombardment of stray electron in vacuum cavity simultaneously;
(3) in probe lead adapter assembly, the periphery of vacuum insulation feed head has outer electro-magnetic shielding cover, simultaneously, the external coaxial shielding plug of vacuum insulation feed head, make probe adapter assembly have good anti-space Electromagnetic Interference ability, the accuracy and the good anti-interference of transmitting procedure that guarantee the induced voltage of probe detection, improve measuring accuracy greatly.
Accompanying drawing explanation
Fig. 1 is the structural representation of prior art capacitive probe device and associated components;
Fig. 2 is the structural representation according to the embodiment of the present invention with the capacitive probe device that reduces electric field distortion function.
[main element]
100-capacitive probe device;
110-vacuum cavity structure; 120-insulating ceramics cylinder;
130-electron beam inductance loop; Before 141-, electric field improves ring;
After 142-, electric field improves ring; The 150-adapter assembly that goes between;
151-vacuum insulation feed head; The outer electro-magnetic shielding cover of 152-;
153-coaxial shielding plug;
200-ring flange;
300-insulating ceramics;
400-connecting pipe;
500-plane blind flange.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.It should be noted that, in accompanying drawing or instructions description, similar or identical part is all used identical figure number.The implementation that does not illustrate in accompanying drawing or describe is form known to a person of ordinary skill in the art in affiliated technical field.In addition, although the demonstration of the parameter that comprises particular value can be provided herein, should be appreciated that, parameter is without definitely equaling corresponding value, but can in acceptable error margin or design constraint, be similar to corresponding value.The direction term of mentioning in embodiment, for example " on ", D score, 'fornt', 'back', " left side ", " right side " etc., be only the direction with reference to accompanying drawing.Therefore, the direction term of use is to be not used for limiting the scope of the invention for explanation.
The present invention has in the capacitive probe device that reduces electric field distortion function, adopts various measures and reduces the electric field distortion of electron beam inductance loop, and object is the accuracy that guarantees that electron beam axial velocity is measured.
In one exemplary embodiment of the present invention, provide a kind of capacitive probe device that reduces electric field distortion function that has.Fig. 2 is the structural representation according to the embodiment of the present invention with the capacitive probe device of small electric field distortion function.Please refer to Fig. 2, this capacitive probe device 100 comprises: vacuum cavity structure 110, be tubular, and it is simultaneously as external electrode; Insulating ceramics cylinder 120, is fixed on the inner side of vacuum cavity structure 110; Electron beam inductance loop 130, in the form of a ring, is prepared by metallic conduction material, is fixed on the middle part of insulating ceramics cylinder 120 inner sides; Front electric field improves ring 141 and rear electric field improves ring 142, in the form of a ring, is prepared by metallic conduction material, be fixed on the upper and lower of insulating ceramics cylinder 200 inner sides, and both and electron beam inductance loop 300 insulate, and both are electrically connected to vacuum cavity structure 110, and with its equipotential; Lead-in wire adapter assembly 150, for being drawn outside vacuum cavity structure 110 by the induced signal of electron beam inductance loop.
Each ingredient that below the present embodiment is had to a capacitive probe device that reduces electric field distortion function is elaborated.
Please refer to Fig. 2, the front end of vacuum cavity structure 110 is connected to Devices to test by ring flange 200, and as electron gun, klystron, gyrotron etc., its rear end is connected in plane blind flange 500 by insulating ceramics 300 and connecting pipe 400.Wherein, these vacuum cavity structure 110 earthing potentials.
Vacuum cavity structure 110, ring flange 200, connecting pipe 400 and plane blind flange 500 are prepared by non-magnetic rustproof Steel material.The alumina ceramic material preparation that insulating ceramics 300 use vacuum seal performances are good.
In the inner side of vacuum cavity structure 110, soldering fixed insulation ceramic cylinder 120.The size of this insulating ceramics cylinder 120 determined by the internal diameter of vacuum cavity structure 110 and the external diameter of electron beam inductance loop 130, and it is made up of the good aluminium oxide ceramics of vacuum seal performance equally.In the inner side of this insulating ceramics cylinder 120, be processed with three groove shape structures, be respectively used to place above-mentioned front electric field and improve ring 141, electron beam inductance loop 130 and rear electric field improvement ring 142.
It should be noted that, this insulating ceramics cylinder 120 can be one-body molded preparation, can be also after moulding, to be assembled respectively by various piece, and the present invention does not limit this.
In three groove shape structures of insulating ceramics cylinder 120 inner sides, soldering is fixed with front electric field improvement ring 141, electron beam inductance loop 130 and rear electric field improvement ring 142 respectively.Wherein, electron beam inductance loop 130 is made up of oxygenless copper material, its ring wall very thin thickness and very even, and inwall is through polishing, and smooth finish is very high.Electron beam inductance loop 130 and vacuum cavity structure are respectively as interior electrode and the external electrode of the present embodiment capacitive probe device.
In the present embodiment, front electric field improves ring 141 and rear electric field improves ring 142 by oxygenless copper material preparation, is annular, and its internal diameter is identical with the internal diameter of electron beam inductance loop 130.And this front electric field improves ring 141 and rear electric field improves ring 142 and electron beam inductance loop 130 electrical isolations, and is all connected in vacuum cavity structure 110, with its equipotential.And the axial distance L that electric field improves between ring and electron beam inductance loop meets: 0.2mm≤L≤2mm.Preferably, L=0.5mm.
In the capacitive probe structure of prior art, in centre position, its electric field is more satisfactory electric field to electron beam inductance loop, and in its edge, will produce axial electric field.And in the present embodiment, owing to having increased in the above and below of electron beam inductance loop 130, front electric field improves ring 141 and rear electric field improves ring 142, these two electric fields improve ring, change the Electric Field Distribution in electron beam inductance loop 130 edges, reduce the non-radial electric field of edge, thereby greatly reduce both sides of the edge electric field distortion, made the electric field of electron beam inductance loop 130 more even.
For the signal that electron beam inductance loop 130 is responded to is drawn outside vacuum cavity structure 110, the present embodiment capacitive probe device also comprises lead-in wire adapter assembly 150.Please refer to Fig. 2, this lead-in wire adapter assembly 150 comprises:
Vacuum insulation feed head 151, is installed in vacuum cavity structure 110, and its inner wire, through vacuum cavity structure 110 and insulating ceramics cylinder 120, is brazed in the outside at electron beam inductance loop 130 middle parts;
Outer electro-magnetic shielding cover 152, be fixed in vacuum cavity structure 110 and with ground good contact, be shielded from the periphery that vacuum insulation feed head (151) stretches out described vacuum cavity structure (110) part, wherein, vacuum insulation feed head 151 insulate with vacuum cavity structure 110, electro-magnetic shielding cover 152, with external pelivimetry circuit signal line good contact, this vacuum insulation feed head 151 and outer electro-magnetic shielding cover 152 form a structure that is similar to BNC connector;
Coaxial shielding plug 153, its inside conductor is connected in the inner wire of vacuum insulation feed head 151, and its screen layer and ground good contact, cause extraneous test testing apparatus for the induced signal that electron beam inductance loop 130 is obtained.
In the capacitive probe device of prior art, by the wire that vacuum cavity structure 110 inner sides are exposed, the signal of electron beam inductance loop 130 is drawn, like this, the existence of wire has increased the weight of the distortion of electron beam inductance loop electric field, and the accuracy of the signal of this wire transmission can not be protected.And in the present embodiment, the inner wire of vacuum insulation feed head 151 is brazed in the middle part in electron beam inductance loop 130 outsides, neither can affect electron beam inductance loop Electric Field Distribution, can not be subject to the bombardment of stray electron in vacuum cavity, so greatly improve the induction voltage waveform of oxygen-free copper inductance loop detection electron beam yet.
In addition, in the present embodiment, the part of stretching out vacuum cavity structure 110 at vacuum insulation feed head 151 arranges outer electro-magnetic shielding cover 152, adopt coaxial shielding plug 153 signal transmissions simultaneously, the screen layer good contact of outer electro-magnetic shielding cover 152, coaxial shielding plug 153 is to ground, thereby to greatest extent avoided being subject to by electron beam inductance loop signal the interference of external electromagnetic ripple, there is good anti-space Electromagnetic Interference ability, the accuracy that guarantees the induced voltage of probe detection, improves the detection accuracy of electron beam axial velocity measuring system greatly.
So far, by reference to the accompanying drawings the present embodiment be have been described in detail.Describe according to above, those skilled in the art should have the capacitive probe device that reduces electric field distortion function to the present invention and have clearly understanding.
In addition, the above-mentioned definition to each element and method is not limited in various concrete structures, shape or the mode in embodiment, mentioned, and those of ordinary skills can change simply or replace it, for example:
(1) except non-magnetic rustproof Steel material, vacuum cavity structure 110 can also be used other metal materials, as oxygenless copper material preparation.And except alumina material, insulating ceramics cylinder 120 can also be prepared as polytetrafluoroethylmaterial material with other insulating material;
(2) described coaxial shielding plug, except BNC connector structure, can be also other forms of coaxial fitting structure, for example: N connector;
(3), except brazing mode, electric field improves ring and can also for example be fixed on, on insulating ceramics cylinder, by other modes: Laser Welding (LBW).
In sum, the invention provides a kind of capacitive probe device that reduces electric field distortion function that has, greatly improve the induction voltage waveform of surveying, and shield the space electromagnetic interference (EMI) that probe lead wire post is subject to, the electron beam induced voltage precision detecting is greatly enhanced, there is extremely strong application value.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.

Claims (10)

1. there is a capacitive probe device that reduces electric field distortion function, it is characterized in that, comprising:
Vacuum cavity structure (110), is tubular;
Insulating ceramics cylinder (120), is fixed on the inner side of vacuum cavity structure 110;
Electron beam inductance loop (130), in the form of a ring, is prepared by metallic conduction material, is fixed on the middle part of described insulating ceramics cylinder (120) inner side;
At least one electric field improves ring, in the form of a ring, prepared by metallic conduction material, be fixed on top or the bottom of described insulating ceramics cylinder (200) inner side, this electric field improves ring and described electron beam inductance loop (130) insulation, with described vacuum cavity structure (110) equipotential; And
Lead-in wire adapter assembly (150), for being drawn outside described vacuum cavity structure (110) by the induced signal of described electron beam inductance loop (130).
2. capacitive probe device according to claim 1, is characterized in that, described electric field improves ring to be prepared by oxygenless copper material, and its internal diameter is identical with the internal diameter of described electron beam inductance loop (130).
3. capacitive probe device according to claim 1, is characterized in that, described electric field improves ring and comprises:
Front electric field improves ring (141) and rear electric field improves ring (142), is individually fixed in the upper and lower of described insulating ceramics cylinder (200) inner side.
4. capacitive probe device according to claim 3, is characterized in that, the axial distance L that described electric field improves between ring and described electron beam inductance loop meets: 0.2mm≤L≤2mm.
5. capacitive probe device according to claim 4, is characterized in that, described L=0.5mm.
6. capacitive probe device according to claim 3, it is characterized in that, have three groove shape structures in the inner side of described insulating ceramics cylinder (120), described front electric field improves ring (141), electron beam inductance loop (130) and rear electric field improvement ring (142) and is placed in respectively in these three groove shape structures.
7. capacitive probe device according to claim 6, it is characterized in that, described front electric field improves ring (141), electron beam inductance loop (130) and rear electric field improvement ring (142) and is brazed in respectively in three groove shape structures of described insulating ceramics cylinder (120).
8. according to the capacitive probe device described in any one in claim 1 to 7, it is characterized in that, described lead-in wire adapter assembly (150) comprising:
Vacuum insulation feed head (151), be installed in described vacuum cavity structure (110), its inner wire, through described vacuum cavity structure (110) and insulating ceramics cylinder (120), is brazed in the outside at described electron beam inductance loop (130) middle part; And
Outer electro-magnetic shielding cover (152), be fixed on described vacuum cavity structure (110) upper and with ground good contact, be shielded from vacuum insulation feed head (151) and stretch out the periphery of described vacuum cavity structure (110) part.
9. capacitive probe device according to claim 8, is characterized in that, described lead-in wire adapter assembly also comprises:
Coaxial shielding plug (153), its inside conductor is connected in the inner wire of described vacuum insulation feed head (151), its screen layer and ground good contact, cause extraneous testing apparatus for the induced signal that described electron beam inductance loop (130) is obtained.
10. according to the capacitive probe device described in any one in claim 1 to 7, it is characterized in that, described vacuum cavity structure (110) is prepared by non-magnetic rustproof Steel material, and described insulating ceramics cylinder (120) is prepared by alumina ceramic material.
CN201410079496.6A 2014-03-06 2014-03-06 There is the capacitive probe device reducing electric field distortion function Expired - Fee Related CN103808990B (en)

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CN103808990B CN103808990B (en) 2016-09-21

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1394042A (en) * 1972-05-31 1975-05-14 Varian Associates Electron collector having means for reducing secondary electron interference in a linear beam microwave tube
CN101752168A (en) * 2008-12-03 2010-06-23 中国科学院电子学研究所 Double-layer electrode for multi-level depressed collector and preparation process thereof
CN101800145A (en) * 2010-04-20 2010-08-11 安徽华东光电技术研究所 Collecting electrode used for traveling wave tube and manufacture method thereof
KR101156569B1 (en) * 2010-12-09 2012-06-20 국방과학연구소 Muti donut type wideband small e-field probe for analyzing target iemi

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1394042A (en) * 1972-05-31 1975-05-14 Varian Associates Electron collector having means for reducing secondary electron interference in a linear beam microwave tube
CN101752168A (en) * 2008-12-03 2010-06-23 中国科学院电子学研究所 Double-layer electrode for multi-level depressed collector and preparation process thereof
CN101800145A (en) * 2010-04-20 2010-08-11 安徽华东光电技术研究所 Collecting electrode used for traveling wave tube and manufacture method thereof
KR101156569B1 (en) * 2010-12-09 2012-06-20 국방과학연구소 Muti donut type wideband small e-field probe for analyzing target iemi

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
姜波等: "基于容性感应探针的强流电子注轴向速度测量系统的研究", 《真空科学与技术学报》 *

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