CN103794494B - 制造机电晶体管的方法 - Google Patents
制造机电晶体管的方法 Download PDFInfo
- Publication number
- CN103794494B CN103794494B CN201310524587.1A CN201310524587A CN103794494B CN 103794494 B CN103794494 B CN 103794494B CN 201310524587 A CN201310524587 A CN 201310524587A CN 103794494 B CN103794494 B CN 103794494B
- Authority
- CN
- China
- Prior art keywords
- janus
- parts
- electrode
- drain electrode
- source electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N99/00—Subject matter not provided for in other groups of this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/00246—Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00166—Electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
Claims (24)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/665,334 US8614136B1 (en) | 2012-10-31 | 2012-10-31 | Techniques for fabricating janus MEMS transistors |
US13/665,334 | 2012-10-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103794494A CN103794494A (zh) | 2014-05-14 |
CN103794494B true CN103794494B (zh) | 2017-01-04 |
Family
ID=49770059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310524587.1A Expired - Fee Related CN103794494B (zh) | 2012-10-31 | 2013-10-30 | 制造机电晶体管的方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8614136B1 (zh) |
CN (1) | CN103794494B (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102367589B (zh) * | 2011-09-15 | 2013-02-27 | 王利兵 | 一种二元金纳米粒子Janus组装体的制备方法 |
US9251978B2 (en) * | 2013-05-02 | 2016-02-02 | Globalfoundries Inc. | Techniques for fabricating Janus sensors |
US8962442B2 (en) * | 2013-07-12 | 2015-02-24 | International Business Machines Corporation | Janus complementary MEMS transistors and circuits |
MX2017008477A (es) * | 2014-12-24 | 2018-03-01 | Nat Res Council Canada | Dispositivo de seguridad dinámico. |
US9608082B2 (en) * | 2015-06-30 | 2017-03-28 | Infineon Technologies Ag | Electro-mechanical switching devices |
US9650242B2 (en) * | 2015-09-22 | 2017-05-16 | International Business Machines Corporation | Multi-faced component-based electromechanical device |
CN109182965B (zh) * | 2018-09-11 | 2020-08-14 | 哈尔滨工业大学(深圳) | 利用交流电场驱动及定向输运微纳米颗粒的系统与方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102234102A (zh) * | 2010-05-04 | 2011-11-09 | 果尚志 | 纳米粒子膜与其形成方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6984842B1 (en) | 1999-10-25 | 2006-01-10 | The Board Of Trustees Of The University Of Illinois | Silicon nanoparticle field effect transistor and transistor memory device |
WO2006137936A2 (en) | 2004-11-10 | 2006-12-28 | The Regents Of The University Of Michigan | Multi-phasic nanoparticles |
EP1763037A1 (en) | 2005-09-08 | 2007-03-14 | STMicroelectronics S.r.l. | Nanotube memory cell with floating gate based on passivated nanoparticles and manufacturing process thereof |
TW200811569A (en) | 2006-08-21 | 2008-03-01 | Prime View Int Co Ltd | E-ink display panel |
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2012
- 2012-10-31 US US13/665,334 patent/US8614136B1/en active Active
-
2013
- 2013-10-30 CN CN201310524587.1A patent/CN103794494B/zh not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102234102A (zh) * | 2010-05-04 | 2011-11-09 | 果尚志 | 纳米粒子膜与其形成方法 |
Also Published As
Publication number | Publication date |
---|---|
US8614136B1 (en) | 2013-12-24 |
CN103794494A (zh) | 2014-05-14 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20171103 Address after: Grand Cayman, Cayman Islands Patentee after: GLOBALFOUNDRIES INC. Address before: American New York Patentee before: Core USA second LLC Effective date of registration: 20171103 Address after: American New York Patentee after: Core USA second LLC Address before: American New York Patentee before: International Business Machines Corp. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170104 Termination date: 20181030 |
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CF01 | Termination of patent right due to non-payment of annual fee |