CN103794446A - System of angle measurement at vertical direction - Google Patents
System of angle measurement at vertical direction Download PDFInfo
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- CN103794446A CN103794446A CN201310507667.6A CN201310507667A CN103794446A CN 103794446 A CN103794446 A CN 103794446A CN 201310507667 A CN201310507667 A CN 201310507667A CN 103794446 A CN103794446 A CN 103794446A
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- vertical direction
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- angle measurement
- motion control
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Abstract
The invention relates to the technical field of angle measurement at the vertical direction, especially to the process that is applied to some sensitive angles of an ion implanter and is capable of precisely measuring the beam angle at the vertical direction based on precise structure control. The system comprises a beam blocking ring (1), a motor and transmission mechanism (2), a dosage controller (3) and a gear selection part (6) installed inside the controller, an I/V conversion and amplification part (7), an ADC conversion module (8), an NI system (4) and a motion control board card UMI-7774 (9) installed inside the system, a beam collection module PXI-7842R (10), a motion control card PXI-7352 (11), and an upper computer (5). According to the specification, the method for measuring the vertical-direction angle and control is explained in detail and the embodiment is given out.
Description
Technical field
The present invention relates to a kind of technical field of vertical direction angular surveying, be particularly applied in the technique of some angular-sensitive of ion implantor, and can accurately measure the line angle of vertical direction by accurate structure control.
Background technology
While entering into the technique of 45nm and following rank along with semiconductor production line, the window that product requires ion implantation angle is more and more less, for middle line injection device, the technique of some angular-sensitive, implant angle offset design angle 0.1 degree will cause product rejection.And at present the middle line ion implantor of our design can measure water square to line angle and the depth of parallelism, and by accurate structure control, can make implant angle in the horizontal direction be controlled in 0.1 degree, for vertical direction line angle, the function that can measure is not provided, therefore cannot quantizes the angular deviation of vertical direction.From the nearest process test data at Shanghai 28nm production line, the angle of vertical direction changes the deviation that not only can have influence on implant angle, and can be because angular deviation causes the deviation of overall dose, directly cause RS-matching not reach the requirement of production line, so, the function of adding vertical direction angular surveying for current middle line ion implantor is imperative, according to client's requirement, must add the function of vertical direction angular surveying, to meet the requirement of current middle line ion implantation technology.
Summary of the invention
Patent of the present invention is a kind of simple in structure, the reliable technique vertical direction angular surveying technology for some angular-sensitive of ion implantor of realization proposing for above-mentioned problems of the prior art.
Patent of the present invention is achieved through the following technical solutions:
A system for vertical direction angular surveying, comprises gear bundle cup (1), motor and transmission mechanism (2), Dose Controller (3) and inner gear selection part (6), I/V conversion and amplifier section (7), ADC modular converter (8), NI system (4) and inner motion control board UMI-7774 (9), line acquisition module PXI-7842R (10), motion control card PXI-7352 (11), host computer (5) thereof thereof.
Described host computer (5) is connected with NI system (4) by optical fiber; Motor (2) drives gear bundle cup (1) to rotate ± 11 ° by transmission mechanism; The line that gear bundle cup (1) gathers is passed to NI system (4) and draws through Dose Controller (3) by gathering cable; Line acquisition module PXI-7842R (10) is by FPGA cable and Dose Controller (3); Motion control board UMI-7774 (9) is connected with motion control card PXI-7352 (11) by data I/O cable; Motor line of codes, secondary coding line are connected with axle 3, the axle 4 of motion control board UMI-7774 (9) respectively.
Prior art relatively, the beneficial effect of circuit of the present invention is:
1. by the accurate structure control of gear bundle cup (1), can accurately measure the line angle of vertical direction, hardware is realized simple.
2. in the situation that sampling precision meets the demands, use the soft interruption line synchronous machine motion that makes to sample, make to control simple.
3. control circuit is simple and reliable, without destroying the existing motion controller structure and the circuit that are using operation, is realized control and the monitoring of motor (2) and secondary coding by remaining axle.
Accompanying drawing explanation
Fig. 1 is the theory diagram of vertical direction angle measurement system of the present invention;
Fig. 2, Fig. 3 are the control principle drawings that vertical direction angle measurement system of the present invention is implemented;
Fig. 4 is vertical direction angle measurement system of the present invention transmission and outward appearance
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is further introduced, but not as a limitation of the invention.
As shown in Figure 1: a kind of system of vertical direction angular surveying, comprises gear bundle cup (1), motor and transmission mechanism (2), Dose Controller (3) and inner gear selection part (6), I/V conversion and amplifier section (7), ADC modular converter (8), NI system (4) and inner motion control board UMI-7774 (9), line acquisition module PXI-7842R (10), motion control card PXI-7352 (11), host computer (5) thereof thereof.
Described host computer (5) is connected with NI system (4) by optical fiber; Motor (2) drives gear bundle cup (1) to rotate ± 11 ° by transmission mechanism; The line that gear bundle cup (1) gathers is passed to NI system (4) and draws through Dose Controller (3) by gathering cable; Line acquisition module PXI-7842R (10) is by FPGA cable and Dose Controller (3); Motion control board UMI-7774 (9) is connected with motion control card PXI-7352 (11) by data I/O cable; Motor line of codes, secondary coding line are connected with axle 3, the axle 4 of motion control board UMI-7774 (9) respectively.
2. as shown in Figure 2: in the time that host computer (5) sends the motion of control command signal control motor by optical fiber to NI system (4), when motor non operating state, mediate (vertical direction), motor is carried out to initialization action, look for corresponding reverse spacing position (11 °) at axle 3 places, now the coding of motor is classified as zero, secondary coding software returns 0, afterwards for secondary coding after avoiding repeatedly moving does not make zero and is greater than 90 at each this position encoded radio, now software correcting motor coding secondary coding value is proofreaied and correct is 0.As shown in Figure 3: send electric machine operation state order, motor is at the uniform velocity walked to+11 °, and pass through beam current signal of the every 0.2 ° of synchronous acquisition of sync break collection signal, gather altogether 100 beam current signal.Finally select part (6), I/V conversion and amplifier section (7), ADC modular converter (8) and send NI system (4) to through FPGA cable by Dose Controller (3) and inner gear thereof, the monitoring of drawing.
Its axis 3 connects motor coding and it is carried out accurately controlling and monitoring, and axle 4 connecting secondary codings are monitored it.
The specific embodiment of patent of the present invention elaborates the content of patent of the present invention.For persons skilled in the art, any apparent change of under the prerequisite that does not deviate from patent spirit of the present invention, it being done, all forms the infringement to patent patent of the present invention, will bear corresponding legal liabilities.
Claims (7)
1. a system for vertical direction angular surveying, is characterized in that: this system comprises gear bundle cup (1), motor and transmission mechanism (2), Dose Controller (3) and inner gear selection part (6), I/V conversion and amplifier section (7), ADC modular converter (8), NI system (4) and inner motion control board UMI-7774 (9), line acquisition module PXI-7842R (10), motion control card PXI-7352 (11), host computer (5) thereof thereof.
2. a kind of vertical direction angle measurement system as claimed in claim 1, is characterized in that: the gear of the line value Dose Controller (3) that gear bundle cup (1) gathers is selected (6), I/V conversion and amplified (7), ADC conversion (8) and be finally sent to NI system (4) by FPGA data cable.
3. a kind of vertical direction angle measurement system as claimed in claim 1, it is characterized in that: spacing, speed, the acceleration-deceleration of controlling motor by (11) motion control card PXI-7352, (9) motion control board UMI-7774 rotate motor between ± 11 °.
4. a kind of vertical direction angle measurement system as claimed in claim 1, it is characterized in that: (vertical direction) mediates when motor non operating state, when work, get ahead to spacing position (11 °), after at the uniform velocity walk to+11 °, and by the every 0.2 degree synchronous acquisition beam current signal of interrupt signal.
5. a kind of vertical direction angle measurement system as claimed in claim 1, it is characterized in that: motor drives transmission mechanism (secondary coding measurement) to require to rotate collection line according to expection by conveyer belt, motor is encoded and is classified as 0 in the time that initialization completes, and secondary coding software returns 0.
6. a kind of vertical direction angle measurement system as claimed in claim 1, is characterized in that: motor line of codes is monitored by axle 3, and secondary coding line is monitored by axle 4.
7. a kind of vertical direction angle measurement system as claimed in claim 1, is characterized in that: motor is coded in spacing position and is classified as 0, and secondary coding is greater than at 90 o'clock at the encoded radio of spacing position, and software correcting motor is encoded and secondary coding value is proofreaied and correct is 0.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310507667.6A CN103794446B (en) | 2013-10-24 | 2013-10-24 | A kind of system of vertical direction angular surveying |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310507667.6A CN103794446B (en) | 2013-10-24 | 2013-10-24 | A kind of system of vertical direction angular surveying |
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| Publication Number | Publication Date |
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| CN103794446A true CN103794446A (en) | 2014-05-14 |
| CN103794446B CN103794446B (en) | 2016-05-04 |
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| CN201310507667.6A Active CN103794446B (en) | 2013-10-24 | 2013-10-24 | A kind of system of vertical direction angular surveying |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108931808A (en) * | 2017-05-26 | 2018-12-04 | 北京中科信电子装备有限公司 | A kind of follow-on ion beam vertical angle measurement method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060033041A1 (en) * | 2004-08-12 | 2006-02-16 | Nanya Technology Corporation | Ion implantation monitor system and method thereof |
| CN101371328A (en) * | 2006-01-20 | 2009-02-18 | 瓦里安半导体设备公司 | Methods and apparatus for ion beam angle measurement in two dimensions |
| CN101436523A (en) * | 2007-10-17 | 2009-05-20 | 北京中科信电子装备有限公司 | Detection system and method for accurately measuring ion beam spot width |
| CN101764030A (en) * | 2008-12-04 | 2010-06-30 | 北京中科信电子装备有限公司 | System and method for controlling ion implantation dosage |
-
2013
- 2013-10-24 CN CN201310507667.6A patent/CN103794446B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060033041A1 (en) * | 2004-08-12 | 2006-02-16 | Nanya Technology Corporation | Ion implantation monitor system and method thereof |
| CN101371328A (en) * | 2006-01-20 | 2009-02-18 | 瓦里安半导体设备公司 | Methods and apparatus for ion beam angle measurement in two dimensions |
| CN101436523A (en) * | 2007-10-17 | 2009-05-20 | 北京中科信电子装备有限公司 | Detection system and method for accurately measuring ion beam spot width |
| CN101764030A (en) * | 2008-12-04 | 2010-06-30 | 北京中科信电子装备有限公司 | System and method for controlling ion implantation dosage |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108931808A (en) * | 2017-05-26 | 2018-12-04 | 北京中科信电子装备有限公司 | A kind of follow-on ion beam vertical angle measurement method |
| CN108931808B (en) * | 2017-05-26 | 2020-11-06 | 北京中科信电子装备有限公司 | Improved ion beam vertical angle measuring method |
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| CN103794446B (en) | 2016-05-04 |
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Effective date of registration: 20190725 Address after: 101111 No. 6 Xingguang Second Street, Tongzhou District, Beijing, 1 Building and 1 Floor Patentee after: Beijing Scintillation Section Zhongkexin Electronic Equipment Co., Ltd. Address before: 101111 No. 6 Xingguang Second Street, Tongzhou Optical-Mechanical Integration Industrial Base, Beijing Patentee before: Zhongkexin Electronic Equipment Co., Ltd., Beijing |