CN103787261A - Integrated multi-channel energy harvesting micromechanical structure - Google Patents
Integrated multi-channel energy harvesting micromechanical structure Download PDFInfo
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- CN103787261A CN103787261A CN201410048344.XA CN201410048344A CN103787261A CN 103787261 A CN103787261 A CN 103787261A CN 201410048344 A CN201410048344 A CN 201410048344A CN 103787261 A CN103787261 A CN 103787261A
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Abstract
The invention discloses an integrated multi-channel energy harvesting micromechanical structure. The integrated multi-channel energy harvesting micromechanical structure comprises a wafer substrate and an energy harvesting unit. A lower electrode is grown on the upper surface of the wafer substrate. The energy harvesting unit is of a planar structure composed of a plurality of films and sequentially comprises a first insulating medium layer, an electret film layer, a second insulating medium layer and a conductive electrode layer from bottom to top, and the energy harvesting unit is fixed above the wafer substrate through stand columns to form a cantilever structure. The conductive electrode layer provides a low-loss carrier access for absorption of electromagnetic wave energy, and meanwhile the conductive electrode layer and the lower electrode form a capacitor structure. The structure is based on the integration idea, multiple energy harvesting modes are integrated on a single chip by means of micromechanical machining, and the structure can be suitable for various occasions and has the advantages of being high in survival coefficient and the like. The structure is simple in principle and structure, capable of being manufactured based on the traditional semiconductor machining technology, low in production cost and capable of being manufactured on a large area.
Description
Technical field
The present invention relates to a kind of integrated form multiple tracks collection of energy micro mechanical structure, relate in particular to a kind of collection of energy structure that can simultaneously collect electromagnetic energy and two kinds of micro-energy of ambient vibration energy, belong to energy collection technology.
Background technology
Collection of energy (Energy Harvesting) is also referred to as energy accumulation, and environment for use energy provides electric energy for miniature electric and electric device.Collection of energy module is caught milliwatt level energy from light, vibration, heat, radio wave or biogenetic derivation; Then, power supply is through overregulating and being stored in the equipment such as battery, efficient quick charge capacitor.In the time that needs use, energy discharges to offer external circuit continuation of the journey.The typical application example of this respect such as: mobile phone, exempt from charging remote controller, the clothes that can generate electricity, E label (or intelligent packaging), passive clock and watch, portable lighting, audiphone, non-transformer WSN, non-transformer Medical Devices and military installation etc.In recent years, why the research of micro-collection of energy receives increasing concern, is to use consumer electronics product kind more and more due to current people, charges and has become the problem of most consumer's headaches of allowing.Be a problem of needing solution badly the service time that how to extend electronic product.Micro-collection of energy provides the mode of a kind of " increasing income " to deal with the prolongation electronic product problem in cruising time, with respect to " throttling "---also reduce the mode of device power consumption, this approach likely finds the key of problem from source, reach the object of " effecting a permanent cure ".
Particularly, the energy in environment comprises luminous energy (sunshine, illumination light etc.), heat energy (temperature difference), sound (various noise), mechanical energy (various motion) etc.; In concrete applied environment, several energy likely exist simultaneously, such as in conventionally collecting solar energy, also can collect heat energy and wind energy, because the infrared one-tenth branch in solar spectrum causes significant heating effect, and the cross-ventilation that heating brings is the source of wind energy; Again such as in the temperature-difference thermoelectric of collector or animal body surface, human or animal's mechanical energy being accompanied by of moving also can be collected simultaneously.In addition, in some occasion, single collection of energy approach may become invalid due to the disappearance of energy source or reduction, becomes the burden of system, limits its applied environment.Therefore the energy collecting device that, development can be collected two or more energy simultaneously has significant realistic meaning.
Although it should be noted that the concept of collection of energy has proposed for a long time, many manufacturers have also carried out a lot of trials, but most product is also unsuccessful, trace it to its cause, the one, product practicality, portability are not strong, the 2nd, collect energy kind single, harvest energy is not enough.Analyzing the profound root of these reasons can find: in present stage, the Design and manufacture of the Conversion of Energy unit (or Sensitive Apparatus) of micro-collection of energy is important limiting factor; " hard defects " that the conversion efficiency of energy is not high, too single these two factors of the collectable energy of device become micro-collection of energy Sensitive Apparatus.Just because of this also becomes one of micro-collection of energy field problem of greatest concern for the research of Sensitive Apparatus Design and manufacture aspect in recent years.Wherein, the energy conversion efficiency that improves device mainly relies on new sensitive material system, optimised devices structure and design etc. the mode of finding, and the optimization of device architecture is also finally subject to the restriction of material behavior, be difficult in a short time realize and find new high performance material.Under existing situation, integrated multiple kinds of energy collection mechanism, widen energy acquisition source, realize multiple tracks energy acquisition integratedly very likely become a kind of method of fast, effectively dealing with problems.The miniaturization, hommization, practicality and the working stability that are accompanied by electronic product become a kind of inveteracy requirement, and developing multiple tracks energy collection technology by appropriate design will be one of important development direction of following micro-collection of energy.Likely bring the new growth point in micro-collection of energy field at the development pole of related direction.
At present, although it is very many to be engaged in the unit of micro-collection of energy both at home and abroad, most of research units only carried out more research aspect the collection of single energy.Along with the iterative method of research and the proposition of new demand, when having now the farsighted research unit of part or company notice to be invested to multiple kinds of energy, collect.Carry out the research that multiple kinds of energy collects simultaneously and becoming one of focus of domestic and international related fields research.Such as: the people such as gondola D.Carli have developed a kind of system of simultaneously collecting multiple environmental energy; Wherein every kind of energy is stored in battery by power management after independently collecting.The people such as the C.Park of California, USA university have studied the collection of energy management in the wireless sensing node of integrated wind energy, solar energy, heat energy and vibrational energy, to obtaining the collection of energy of maximum.
Analyzing the correlative study in current multiple tracks collection of energy field can find, many research of present stage lays particular emphasis on collects multiple kinds of energy simply to combine, and introduce power management and detection module, coordinate the collection mode of several energy simultaneously, also be that every kind of collection of energy mode takies an independent module, access EMS from input port separately respectively.And the research that multiple kinds of energy collection mode is carried out monolithic integration by thought based on the system integration also rarely has report.Based on the thought of the system integration, two or more collection of energy is integrated into same energy collection unit and is conducive to simplified system structure, improve the workability of device, overcome redundancy, improve capacity usage ratio of unit are etc.These advantages are directed to the service efficiency that improves current consumption product, expand its environment for use and have significant meaning.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art; the invention provides a kind of integrated form multiple tracks collection of energy micro mechanical structure; based on the thought of the system integration; manufacturing means by micromechanics, that multiple kinds of energy collection mode is carried out to monolithic is integrated, collects mainly for ubiquitous electromagnetic wave energy and mechanical vibrational energy in surroundings.
Technical scheme: for achieving the above object, the technical solution used in the present invention is:
A kind of integrated form multiple tracks collection of energy micro mechanical structure, comprises wafer substrate and energy collection unit; On the upper surface of described wafer substrate, growth has bottom electrode; Described energy collection unit is the planar structure being made up of plural layers, comprise successively from the bottom to top the first insulating medium layer, electret film layer, the second insulating medium layer and conductive electrode layer, described energy collection unit is fixed on the top of wafer substrate and is formed cantilever beam structure by column, when nature, energy collection unit is parallel with bottom electrode position; Described conductive electrode layer provides low-loss carrier path for electromagnetic wave energy absorbs, and described conductive electrode layer and bottom electrode form capacitance structure simultaneously.
In said structure: conductive electrode layer provides low-loss carrier path for electromagnetic wave energy absorbs, and can effectively absorb electromagnetic wave energy; Electret film layer is used for providing a constant potential, when cantilever beam is subject to the disturbance of external shock and when starting of oscillation, distance between cantilever beam and substrate changes, the capacitance structure that makes thus conductive electrode layer and bottom electrode form changes, cause that the charge inducing distribution in electrode changes and produces charge transport, utilizes this charge transport just cantilever beam can be vibrated to entrained mechanical energy and is converted into electric energy.In this structure, electromagnetic wave energy and mechanical vibrational energy can be absorbed simultaneously, can manage and store through special energy management unit subsequently.
Preferably, described energy collection unit is snail shape, specifically can be according to the electromagnetic wave specific design of CF, such as rectangular coil or round screw thread etc.
Preferably, the quantity of described energy collection unit is more than two, is arranged in wafer substrate top with array way.
Preferably, described the first insulating medium layer is carborundum, silica or hafnium oxide.
Preferably, described electret film layer is Teflon or ion implantation type silica.
Preferably, described the second insulating medium layer is carborundum, silica or hafnium oxide.
Preferably, described energy collection unit adopts semiconducter process preparation, such as methods such as the thin-film deposition in semiconductor technology, graphical, etchings.
Beneficial effect: integrated form multiple tracks collection of energy micro mechanical structure provided by the invention, based on the thought of the system integration, manufacturing means by micromechanics, that multiple kinds of energy collection mode is carried out to monolithic is integrated, collect mainly for ubiquitous electromagnetic wave energy and mechanical vibrational energy in surroundings, go for multiple occasion, such as sea, high-altitude or field, and in the various small-scales that use in daily life, portable, unmanned or wireless and passive electronic equipment, there is survival coefficient advantages of higher; And principle of the present invention and simple in structure, can prepare based on traditional semiconducter process, and production cost is low, can large area preparation.
Accompanying drawing explanation
Fig. 1 is plan structure schematic diagram of the present invention;
Fig. 2 is the plan structure schematic diagram of individual unit of the present invention;
Fig. 3 is the sectional structure schematic diagram of energy collection unit;
Fig. 4 is that the A-A of Fig. 2 is to cutaway view;
Fig. 5 is that the B-B of Fig. 2 is to cutaway view;
Fig. 6 is mechanical energy collection schematic diagram of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing, the present invention is further described.
Be a kind of integrated form multiple tracks collection of energy micro mechanical structure as shown in Figures 1 to 5, comprise wafer substrate 4 and energy collection unit 1; On the upper surface of described wafer substrate 4, growth has bottom electrode 3; The planar structure of described energy collection unit 1 for being formed by plural layers, comprise successively from the bottom to top the first insulating medium layer 14, electret film layer 13, the second insulating medium layer 12 and conductive electrode layer 11, described energy collection unit 1 is fixed on the top of wafer substrate 4 and is formed cantilever beam structure by column 2, when nature, energy collection unit 1 is parallel with bottom electrode 3 positions; Described conductive electrode layer 11 provides low-loss carrier path for electromagnetic wave energy absorbs, and simultaneously described conductive electrode layer 11 forms capacitance structure with bottom electrode 3.
Described energy collection unit 1 is snail shape, and is arranged in wafer substrate 4 tops in the mode of array;
Described energy collection unit 1 adopts semiconducter process preparation, the first insulating medium layer 14 is carborundum, silica or hafnium oxide, electret film layer 13 is Teflon or ion implantation type silica, and the second insulating medium layer 12 is carborundum, silica or hafnium oxide.
As shown in Figure 6, the schematic diagram of mechanical energy being collected for said structure, three duties of cantilever beam in figure, are provided, energy collection unit 1 is initial position, energy collection unit 1(1) and energy collection unit 1(2) be the amplitude maximum position of cantilever beam, in the time that energy collection unit 1 departs from initial position, just there is variation in the spacing between itself and bottom electrode 3, caused the variation of electric capacity, made the charge inducing on electrode produce motion, mechanical energy is converted to electric energy the most at last.
The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (7)
1. an integrated form multiple tracks collection of energy micro mechanical structure, is characterized in that: comprise wafer substrate (4) and energy collection unit (1); On the upper surface of described wafer substrate (4), growth has bottom electrode (3); The planar structure of described energy collection unit (1) for being formed by plural layers, comprise successively from the bottom to top the first insulating medium layer (14), electret film layer (13), the second insulating medium layer (12) and conductive electrode layer (11), described energy collection unit (1) is fixed on the top of wafer substrate (4) and is formed cantilever beam structure by column (2), when nature, energy collection unit (1) is parallel with bottom electrode (3) position; Described conductive electrode layer (11) provides low-loss carrier path for electromagnetic wave energy absorbs, and described conductive electrode layer (11) forms capacitance structure with bottom electrode (3) simultaneously.
2. integrated form multiple tracks collection of energy micro mechanical structure according to claim 1, is characterized in that: described energy collection unit (1) is snail shape.
3. integrated form multiple tracks collection of energy micro mechanical structure according to claim 1, is characterized in that: the quantity of described energy collection unit (1) is more than two, is arranged in wafer substrate (4) top with array way.
4. integrated form multiple tracks collection of energy micro mechanical structure according to claim 1, is characterized in that: described the first insulating medium layer (14) is carborundum, silica or hafnium oxide.
5. integrated form multiple tracks collection of energy micro mechanical structure according to claim 1, is characterized in that: described electret film layer (13) is Teflon or ion implantation type silica.
6. integrated form multiple tracks collection of energy micro mechanical structure according to claim 1, is characterized in that: described the second insulating medium layer (12) is carborundum, silica or hafnium oxide.
7. integrated form multiple tracks collection of energy micro mechanical structure according to claim 1, is characterized in that: described energy collection unit (1) adopts semiconducter process preparation.
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| CN101546965A (en) * | 2009-04-30 | 2009-09-30 | 厦门大学 | Plane vibration double-helix piezoelectric transducer based on MEMS |
| CN102176646A (en) * | 2011-03-02 | 2011-09-07 | 张宁 | Free micro-vibration generator of electret film |
| CN102291043A (en) * | 2011-08-16 | 2011-12-21 | 华中科技大学 | Helical spring type low-frequency piezoelectric energy arrester |
| CN202503456U (en) * | 2012-03-23 | 2012-10-24 | 东南大学 | Piezoelectricity-magnetoelectricity mixing energy harvesting device |
| CN102931878A (en) * | 2012-10-26 | 2013-02-13 | 北京理工大学 | Multi-cantilever broadband MEMS (micro-electromechanical system) piezoelectric energy harvester |
| CN102946212A (en) * | 2012-11-08 | 2013-02-27 | 清华大学 | Electrostatic vibration energy collection device driven by fringe filed |
| JP2013214932A (en) * | 2012-04-04 | 2013-10-17 | Sekisui Chem Co Ltd | Piezoelectric element |
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Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101546965A (en) * | 2009-04-30 | 2009-09-30 | 厦门大学 | Plane vibration double-helix piezoelectric transducer based on MEMS |
| CN102176646A (en) * | 2011-03-02 | 2011-09-07 | 张宁 | Free micro-vibration generator of electret film |
| CN102291043A (en) * | 2011-08-16 | 2011-12-21 | 华中科技大学 | Helical spring type low-frequency piezoelectric energy arrester |
| CN202503456U (en) * | 2012-03-23 | 2012-10-24 | 东南大学 | Piezoelectricity-magnetoelectricity mixing energy harvesting device |
| JP2013214932A (en) * | 2012-04-04 | 2013-10-17 | Sekisui Chem Co Ltd | Piezoelectric element |
| CN102931878A (en) * | 2012-10-26 | 2013-02-13 | 北京理工大学 | Multi-cantilever broadband MEMS (micro-electromechanical system) piezoelectric energy harvester |
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