CN103781010B - The test device of silicon microphone - Google Patents
The test device of silicon microphone Download PDFInfo
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- CN103781010B CN103781010B CN201210413849.2A CN201210413849A CN103781010B CN 103781010 B CN103781010 B CN 103781010B CN 201210413849 A CN201210413849 A CN 201210413849A CN 103781010 B CN103781010 B CN 103781010B
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- silicon microphone
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Abstract
The present invention provides the test device of a kind of silicon microphone, and wherein, described silicon microphone includes: acoustic aperture and the first port, and described test device at least includes: the test cavity of upper end open；It is positioned at the acoustical generator of described test cavity bottom, for providing acoustical signal to described acoustic aperture；Having the test cell of the second port, and described acoustical generator has interval and at least side is arranged on the inwall of described test cavity, the acoustical signal for exporting based on described acoustical generator tests the job information of described silicon microphone；Wherein, described second port correspondence connects described first port；And the reflection cap being connected with described test cavity upper end, for the acoustical signal that described generator exports is reflected.Therefore, reflection cap is closed described test chamber body and is prevented from the outside noise interference to acoustical signal, so that described test device is common to any silicon microphone by the utilization of described test device.
Description
Technical field
The present invention relates to the test device of a kind of mike, particularly relate to the test device of a kind of silicon microphone.
Background technology
The test device of traditional silicon microphone is Open architecture, and it includes acoustical generator and test cell, wherein, described
Acoustical generator is attached to be positioned at the acoustic aperture of described silicon microphone side, and described test cell connects described silicon microphone by holding wire
The Wiring port of opposite side.Along with silicon microphone kind and the increase of shape, acoustic aperture and Wiring port need not according to design
Necessarily laying respectively at the both sides of described silicon microphone, for carrying on the back for sound formula silicon microphone, acoustic aperture and Wiring port are positioned at institute
Stating the homonymy carried on the back into sound formula silicon microphone, this makes existing test device acoustical generator and test cell to be simultaneously located at
The described homonymy carried on the back into sound formula silicon microphone.
Therefore utilize existing test device to carry on the back into sound formula silicon microphone test time, or described acoustic aperture is deviated from institute
State acoustical generator, in order to described test cell practices the described Wiring port of level；Or described back of the body is sling into sound formula silicon microphone, and makes
Described acoustic aperture and Wiring port are towards described acoustical generator, in order to described acoustic aperture directly receives the sound letter that described acoustical generator provides
Number.The shortcoming of above two mode is: owing to described test device is Open architecture, if described acoustic aperture deviates from described sending out
Sound device, the most described acoustic aperture is affected by the surrounding environment too big, the acoustical signal accepted of low quality, causes test result to be lost
Very, the yield rate of product is affected；If described acoustic aperture and Wiring port must be increased towards described acoustical generator, the most described test system
Add lifting elements with silicon microphone of slinging.
In order to adapt to a greater variety of silicon microphones produced from now on, need the test device to existing silicon microphone
Improve.
Summary of the invention
The shortcoming of prior art in view of the above, it is an object of the invention to provide the test dress of a kind of silicon microphone
Put, for solving the open various problems brought of test apparatus structure of the prior art.
For achieving the above object and other relevant purposes, the present invention provides the test device of a kind of silicon microphone, wherein, institute
Stating silicon microphone to include: acoustic aperture and the first port, described test device at least includes: the test cavity of upper end open；It is positioned at institute
State the acoustical generator of test cavity bottom, for providing acoustical signal to described acoustic aperture；There is the test cell of the second port, with institute
State acoustical generator and there is interval and at least side is arranged on the inwall of described test cavity, for exporting based on described acoustical generator
Acoustical signal test the job information of described silicon microphone；Wherein, described second port correspondence connects described first port；
And the reflection cap being connected with described test cavity upper end, for the acoustical signal that described generator exports is reflected.
Preferably, described test cavity is vertically arranged.
Preferably, described second port is positioned at the downside of described test cell.
Preferably, the interval of described test cell and described acoustical generator is more than the thickness of described silicon microphone.
Preferably, described first port is probe, and described second port is corresponding probe passage.
Preferably, the upper end of described test cavity and the junction of described reflection cap are additionally provided with sealing ring.
Preferably, described reflection cap at least includes with the connected mode of described test cavity: snaps connection, threaded.
Preferably, described reflection cap top is arc.
Preferably, the arc on the top of described reflection cap is parabola shaped or semicircle.
As it has been described above, the test device of the silicon microphone of the present invention, have the advantages that described test device utilizes
Reflection cap is closed described test chamber body and is prevented from the outside noise interference to acoustical signal, be effectively increased the standard of test
Exactness, so that described test device is common to any silicon microphone；It addition, particular for described first port and described acoustic aperture position
For the described silicon microphone of homonymy, by this test cavity vertically being placed and connecting in described test cavity upper end described
Reflection cap, it is possible to make described test device effectively utilize described reflection cap to provide acoustical signal to described acoustic aperture, it is to avoid existing
Acoustical generator in test device is opposing with described acoustic aperture, and makes the ropy problem of the acoustical signal that acoustic aperture received.
Accompanying drawing explanation
Fig. 1 is shown as the structural representation of the test device of the silicon microphone of the present invention.
Element numbers explanation
Detailed description of the invention
By particular specific embodiment, embodiments of the present invention being described below, those skilled in the art can be by this explanation
Content disclosed by book understands other advantages and effect of the present invention easily.
Refer to Fig. 1.It should be clear that structure depicted in this specification institute accompanying drawings, ratio, size etc., the most only in order to coordinate
Content disclosed in description, understands for those skilled in the art and reads, being not limited to the present invention enforceable
Qualifications, therefore do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size,
Do not affect under effect that the present invention can be generated by and the purpose that can reach, all should still fall at disclosed technology contents
Obtain in the range of containing.Meanwhile, in this specification cited as " on ", D score, "left", "right", " middle " and " one " etc.
Term, be merely convenient to understanding of narration, and be not used to limit the enforceable scope of the present invention, the change of its relativeness or
Adjust, changing under technology contents without essence, when being also considered as the enforceable category of the present invention.
As it is shown in figure 1, the present invention provides the test device of a kind of silicon microphone.Described silicon microphone 2 include acoustic aperture 22 and
First port 21.Preferably, described acoustic aperture 22 and the first port 21 are positioned at the homonymy of described silicon microphone 2.Described acoustic aperture 22 is used
In providing acoustical signal to described silicon microphone 2, described first port 21 is for providing power supply, test to described silicon microphone 2
Instruction, or export the test signal of described silicon microphone 2.Described first port 21 includes any to be connected with outside port
Port, it includes but not limited to: the chip pin in USB port, described silicon microphone 2, it is preferable that described first port 21 is
Probe.It can also be multiple that the quantity of described first port 21 can be one.
Described test device 1 includes: the test cavity 11 of upper end open, acoustical generator 12, test cell 13, reflection cap 14.
Described test cavity 11 is for placing the various test devices and described silicon microphone 2 testing described silicon microphone 2.
Its shape can be cylinder, cube etc..Described test cavity 11 can be flat on testboard, it is preferable that described test
Cavity 11 is vertically arranged.
Described generator is positioned at bottom described test cavity 11, for providing acoustical signal to described acoustic aperture 22.
Specifically, described generator sends the sound between 20～20000Hz according to test instruction to described silicon microphone 2
Signal.The most normal for the test signal testing the output of described silicon microphone 2.
There is the test cell 13 of the second port 131, and described acoustical generator 12 has interval and at least side is arranged at institute
State on test cavity 11 inwall, test the work of described silicon microphone 2 for acoustical signal based on the output of described acoustical generator 12
Make information；Wherein, described second port 131 is corresponding connects described first port 21.The quantity of described second port 131 is with described
The quantity of the first port 21 is corresponding, and the type of described second port 131 is consistent, preferably with the type of described first port 21
Ground, described first port 21 is probe, and described second port 131 is probe passage.It is further preferable that described test cavity 11 is
Being vertically arranged, described second port 131 is positioned at the downside of described test cell 13, described test cell 13 and described acoustical generator 12
Interval more than the thickness of described acoustical generator 12, in order to described silicon microphone 2 is suspended from described test cell 13 and described acoustical generator
Between 12.
Wherein, the mode of the medial wall that described test cell 13 is arranged on described test cavity 11 includes but not limited to: institute
The one end stating test cell 13 fixes in the medial wall of described test cavity 11；Or prolong in the middle part of the medial wall of described test cavity 11
Extending and be provided with groove at upper end open, described test cell 13 is provided with can be with the boss of described groove fit, the most described test
Cavity 11 sets up described test cell 13.
Specifically, described test cell 13 exports described test instruction to described acoustical generator 12, and based on described acoustical generator
The acoustical signal of 12 frequencies meeting described test instruction exported, tests the job information of described silicon microphone 2.Described
Job information includes any information that can reflect described silicon microphone 2 working condition, and it includes but not limited to: sensitivity, mistake
True degree, stability etc..
Such as, described test instruction is the acoustical signal of 200KHz frequency, and the most described test cell 13 is based on described
The acoustical signal of 200KHz receives the acoustic pressure of described silicon microphone 2 output, the job information such as voltage, and based on default sensitive
Degree algorithm, passes through received job information and calculates the described silicon microphone 2 work when receiving the acoustical signal of 200KHz
Make situation.
Described reflection cap 14 is connected with described test cavity 11 upper end, for being given by the acoustical signal that described generator sends
With reflection.
Wherein, described reflection cap 14 includes but not limited to the connected mode of the upper end of described test cavity 11: buckle is even
Connect, threaded.Such as, the outer of described reflection cap 14 is provided with telescopic projection, the inner side of described test cavity 11 upper end
Wall is provided with the groove corresponding with described projection, and to form buckle structure, the most described reflection cap 14 is by described buckle structure and institute
State test cavity 11 to connect.
Preferably, described reflection cap 14 is additionally provided with sealing ring with the junction of the upper end of described test cavity 11.Such as, institute
The medial wall of the upper end stating test cavity 11 is provided with female thread, is provided with sealing ring, outside described reflection cap 14 in described external screw thread
Side is provided with corresponding with described female thread and wider than described female thread external screw thread, then when described reflection cap 14 and described test
When cavity 11 upper end coordinates, the accessible described sealing ring of described external screw thread.
The shape of described reflection cap 14 can according to the position of described acoustical generator 12, described acoustic aperture 22 position depending on.Preferably
Ground, the upside of described reflection cap 14 is arc, it is further preferable that the arc of the upside of described reflection cap 14 be parabola shaped or
Semicircle.
In use, placing described acoustical generator 12 bottom described test cavity 11, tester or mechanical hand are first by be measured
The first port 21 second port 131 corresponding with described test cell 13 of silicon microphone 2 connect, then by described test cell
In 13 grooves inserting described test cavity 11 medial wall, then described reflection cap is fixed on the upper of described test cavity 11
End.The most described test cell 13 according to the operational order of described tester to described in being enclosed in described test device
Silicon microphone 2 is tested.
Wherein, described test cell 13 according to the operational order of described tester to being enclosed in described test device
Described silicon microphone 2 mode that carries out testing include but not limited to: send behaviour by wireless network to described test cell 13
Instruct；Or described test cell 13 is connected with human-computer interaction device, in order to receive the operational order of described tester.
In sum, the test device of silicon microphone of the present invention, described test device utilizes and is sealed by reflection cap
Close described test chamber body and be prevented from the outside noise interference to acoustical signal, be effectively increased the accuracy of test, so that institute
State test device and be common to any silicon microphone；It addition, be positioned at the institute of homonymy particular for described first port and described acoustic aperture
For stating silicon microphone, by this test cavity vertically being placed and connecting described reflection cap, energy in described test cavity upper end
Described test device is enough made effectively to utilize described reflection cap to provide acoustical signal to described acoustic aperture, it is to avoid in existing test device
Acoustical generator opposing with described acoustic aperture, and make the ropy problem of the acoustical signal that acoustic aperture received.So, the present invention is effective
Overcome various shortcoming of the prior art and have high industrial utilization.
The principle of above-described embodiment only illustrative present invention and effect thereof, not for limiting the present invention.Any ripe
Above-described embodiment all can be modified under the spirit and the scope of the present invention or change by the personage knowing this technology.Cause
This, have usually intellectual such as complete with institute under technological thought without departing from disclosed spirit in art
All equivalences become are modified or change, and must be contained by the claim of the present invention.
Claims (9)
1. a test device for silicon microphone, wherein, described silicon microphone includes: acoustic aperture and the first port, it is characterised in that
Described test device at least includes:
The test cavity of upper end open；
It is positioned at the acoustical generator of described test cavity bottom, for providing acoustical signal to described acoustic aperture；
There is the test cell of the second port, and described acoustical generator has interval and at least side is arranged at described test cavity
Inwall on, the acoustical signal for exporting based on described acoustical generator tests the job information of described silicon microphone；Wherein, institute
State the second port correspondence and connect described first port；And
The reflection cap being connected with described test cavity upper end, for being reflected the acoustical signal that described acoustical generator exports.
The test device of silicon microphone the most according to claim 1, it is characterised in that described test cavity is vertically arranged.
The test device of silicon microphone the most according to claim 2, it is characterised in that described second port is positioned at described survey
The downside of examination unit.
The test device of silicon microphone the most according to claim 3, it is characterised in that described test cell and described sounding
The interval of device is more than the thickness of described silicon microphone.
The test device of silicon microphone the most according to claim 1, it is characterised in that described first port is probe, institute
Stating the second port is corresponding probe passage.
The test device of silicon microphone the most according to claim 1, it is characterised in that the upper end of described test cavity and institute
The junction stating reflection cap is additionally provided with sealing ring.
7. according to the test device of the silicon microphone described in claim 1 or 6, it is characterised in that described reflection cap and described survey
The connected mode of examination cavity at least includes: snap connection, threaded.
The test device of silicon microphone the most according to claim 1, it is characterised in that described reflection cap top is arc.
The test device of silicon microphone the most according to claim 8, it is characterised in that the arc on the top of described reflection cap
For parabola shaped or semicircle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210413849.2A CN103781010B (en) | 2012-10-25 | 2012-10-25 | The test device of silicon microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210413849.2A CN103781010B (en) | 2012-10-25 | 2012-10-25 | The test device of silicon microphone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103781010A CN103781010A (en) | 2014-05-07 |
| CN103781010B true CN103781010B (en) | 2016-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210413849.2A Expired - Fee Related CN103781010B (en) | 2012-10-25 | 2012-10-25 | The test device of silicon microphone |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9485599B2 (en) * | 2015-01-06 | 2016-11-01 | Robert Bosch Gmbh | Low-cost method for testing the signal-to-noise ratio of MEMS microphones |
| CN106303879B (en) * | 2015-05-28 | 2024-01-16 | 钰太芯微电子科技（上海）有限公司 | Detection device and detection method based on time domain analysis |
| CN106291332B (en) * | 2016-09-30 | 2023-01-10 | 深圳市运泰利自动化设备有限公司 | FPC turntable testing machine |
| CN107172560B (en) * | 2017-06-28 | 2020-06-23 | 青岛海信移动通信技术股份有限公司 | Abnormity detection method for microphone in mobile terminal and mobile terminal |
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| EP0687130A2 (en) * | 1994-06-08 | 1995-12-13 | Matsushita Electric Industrial Co., Ltd. | Reverberant characteristic signal generation apparatus |
| WO2002001915A3 (en) * | 2000-06-30 | 2002-10-31 | Koninkl Philips Electronics Nv | Device and method for calibration of a microphone |
| CN101336011A (en) * | 2007-06-28 | 2008-12-31 | 纬创资通股份有限公司 | Microphone assembling test system and method thereof |
| CN102547547A (en) * | 2012-03-02 | 2012-07-04 | 歌尔声学股份有限公司 | Microphone test tool, test system and test method |
| CN102655628A (en) * | 2012-02-23 | 2012-09-05 | 北京航天计量测试技术研究所 | Device and method for detecting high sound pressure-phase shifting characteristic of microphone |
| CN202907182U (en) * | 2012-10-25 | 2013-04-24 | 上海耐普微电子有限公司 | Silicon microphone testing device |
-
2012
- 2012-10-25 CN CN201210413849.2A patent/CN103781010B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0687130A2 (en) * | 1994-06-08 | 1995-12-13 | Matsushita Electric Industrial Co., Ltd. | Reverberant characteristic signal generation apparatus |
| WO2002001915A3 (en) * | 2000-06-30 | 2002-10-31 | Koninkl Philips Electronics Nv | Device and method for calibration of a microphone |
| CN101336011A (en) * | 2007-06-28 | 2008-12-31 | 纬创资通股份有限公司 | Microphone assembling test system and method thereof |
| CN102655628A (en) * | 2012-02-23 | 2012-09-05 | 北京航天计量测试技术研究所 | Device and method for detecting high sound pressure-phase shifting characteristic of microphone |
| CN102547547A (en) * | 2012-03-02 | 2012-07-04 | 歌尔声学股份有限公司 | Microphone test tool, test system and test method |
| CN202907182U (en) * | 2012-10-25 | 2013-04-24 | 上海耐普微电子有限公司 | Silicon microphone testing device |
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| CN103781010A (en) | 2014-05-07 |
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