CN103777265A - Stackable narrowband filters for dense wavelength division multiplexing - Google Patents
Stackable narrowband filters for dense wavelength division multiplexing Download PDFInfo
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- CN103777265A CN103777265A CN201310364929.8A CN201310364929A CN103777265A CN 103777265 A CN103777265 A CN 103777265A CN 201310364929 A CN201310364929 A CN 201310364929A CN 103777265 A CN103777265 A CN 103777265A
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Abstract
The invention relates to stackable narrowband filters for dense wavelength division multiplexing. A plane-parallel optical window is the spacer of single-cavity filters in the stack used for DWDM applications. Highly reflective quarter-wave stacks are deposited on each side of the optical window and the single-cavity structure so obtained is diced to produce a plurality of filters. Because the single-cavity structure has the same thickness over the entire window area and the quarter-wave-stack deposition process is carried out throughout under the same conditions, each single-cavity filter fabricated from the optical window has the same transmission wavelength and is therefore readily stackable for DWDM applications. Alternatively, an optical window with a thickness equal to one half that required for the spacer of a single-cavity filter is coated on a single side. The window is then divided in multiple identical components that can be combined in pairs by placing them in optical contact so as to form individual single-cavity filters with the same transmission wavelength. The fine tuning of the transmission wavelength of the filters can be achieved by controlling the temperature of the spacer.
Description
Technical field
The present invention relates to the general field of telecommunications, and specifically, relate to the multilayer film optical filter using in the dense wave division multipurpose for telecommunications (DWDM).
Background technology
In optical communication, an optical fiber can carry many communication channels, and wherein, each channel has the carrier frequency of itself.The light of different frequency is integrated in optical fiber by the device that is called in the art multiplexer (" multiplexing (mux) "), and is split in different ports by the device that is called as demodulation multiplexer (" demultiplexing (de-mux) ") afterwards.Multiplexing and Deplexing apparatus conventionally utilizes and isolates interested wavelength such as the technology of film filter; In telecommunications, the frequency that these are set by the ITU of International Telecommunications Union electrical network.
The structure of normally used optical fiber based on so-called Fabry-Perot etalon, this Fabry-Perot etalon is made up of the transparent isolator with two reflecting surfaces conventionally.This isolator defines the chamber of etalon.For telecommunications application, isolator is the thin layer with the dielectric substance of the half-wave optical thickness that is tuned to interested transmission peak value wavelength, and reflecting surface is that to have peak value stacking at the quarter-wave of the broadband reflection rate at design wavelength place.Make quarter-wave heap superimposition dielectric isolation device therebetween with continuous deposition step, and two or more such wave filter can be deposited over top of each other discretely by so-called absentee layer, to form multicavity filter.
The quantity that Fig. 1 shows chamber is for the impact of passband shapes of common interference filter with 10nm FWHM.With FWHM unit from departing from of centre wavelength be
should note: actual FWHM is different in each case.As shown in fig. 1, the quantity in increase chamber has significant impact for the passband shapes with the desired characteristic of applying for telecommunications.Band steeper slopes, nearly band resistance (near-band rejection) improves, and passband peak value is more smooth, approaches square.Therefore, conventionally in each optical telecommunication wave filter, use the stacking of at least two Fabry-Perot etalons.
In theory, as long as optical thickness and the phase place of the stacking isolator of each half-wave are identical, the transmission peak wavelength in each chamber will be identical.But, because the transmission peak value wavelength of each etalon structure is for the structural minute differences sensitivity at isolator and reflecting surface, so the passband peak value of stacking etalon is not always aimed at, and consequent dichroic filter is often unsuitable for telecommunications application.Current, the isolator of the Fabry-Perot interferometer using in dense wave division multipurpose (DWDM) wave filter only has several micron thickness, but for some application, needs isolator larger.Because the inhomogeneous differences in transmission with following of consequent structure is inoperative for the manufacture of the conventional deposition method of so thicker isolator wave filter.Therefore, continue to need a kind of for the manufacture of such can stacking wave filter economy and practical method, and the invention provides a kind of alternative filter construction and its manufacture method that has overcome these problems.
Summary of the invention
The invention reside in following thought: the dielectric substance that uses plane parallel optics window rather than have a deposition of reflectance coating is used as the isolator at each the stacking wave filter for DWDM application.In the simplest embodiment, this optical window has half-wave thickness, and the quarter-wave of height of deposition reflection is stacking in each of its polished side.This optical window has the area more much bigger than simple filter, obtains thus large coated optics window, can produce many single cavity filters from it.Because consequent half isolator has identical thickness on whole window area, and under identical condition, run through and carry out the stacking deposition processes of quarter-wave everywhere, so there is the identical transmission peak wavelength in interested scope from each single chamber of optical window manufacture, and therefore easily can be stacking for DWDM application.
In another embodiment of the present invention, this optical window is selected has the thickness that equals the required half of half-wave plate, and is coated with the stacking reverberator of quarter-wave on one-sided.Because single deposition step, rather than for two required steps of the both sides of coated optics window, this has further eliminated the chance of the non-homogeneous in the structure of coating plate.Then this window is divided into multiple same parts, and the plurality of same parts can be by by their optics contact and combined in couples, to form independent single cavity filter with consequent half isolator and identical transmission peak wavelength.These wave filters can stackingly be applied for DWDM valuably similarly.
In arbitrary embodiment of the present invention, preferably use and the material of thermal distortion optical sensitive is made to this is stacking, make this transmission peak value can be maintained by the temperature control system that is coupled to wave filter the set point of expectation.Can use well heater with traditional feedback controling mode, for the energy source of this well heater, for measuring thermistor and the processor/controller of wave filter temperature, by tuning the transmission peak wavelength of this wave filter and maintain expect wavelength place.
By explanation of the present invention in the following description and the novel feature of specifically noting in the appended claims, various other advantages will become clear.Therefore,, in order to realize object as above, the present invention is made up of the feature that illustrates in the following drawings, absolutely proves and specifically note in the claims in the detailed description of preferred embodiment.But, such accompanying drawing and explanation only disclose can implement variety of way of the present invention more only.
Accompanying drawing explanation
Fig. 1 illustrates the impact of stacking identical film filter for the shape of the standardized transmissivity of measuring take full-width at half maximum (FWHM) as unit with respect to departing from of centre wavelength by it.
Fig. 2 is by the schematic cross-section of the Traditional Method Fabry-Perot-type film filter that sequentially deposition of reflective coating, dielectric isolation device and another reflectance coating are manufactured in transparent substrates.
Fig. 3 is the schematic cross-section of the fabry-perot filter constructed in accordance by deposition of reflective coating on the both sides of optical window.
Fig. 4 is by deposition of reflective coating on optical window one-sided and combines subsequently the schematic cross-section of the fabry-perot filter that two parts of cutting apart manufacture according to another embodiment of the invention with the etalon isolator of shaping filter.
The two-chamber of Fig. 5 diagram wave filter that be coupled by absentee layer, as shown in Fig. 3 or Fig. 4 is stacking.
Fig. 6 A, 6B and 6C diagram are suitable for manufacturing the single cavity structure that two-chamber is stacking or three chambeies are stacking with absentee layer.
Fig. 7 A, 7B and 7C diagram are suitable for manufacturing another single cavity structure that two-chamber is stacking or three chambeies are stacking with absentee layer.
Fig. 8 is the process flow diagram of the step that relates in an embodiment of processing of the present invention.
Fig. 9 is the process flow diagram of the step that relates in another embodiment of processing of the present invention.
Figure 10 is according to the schematically showing of wave filter of the present invention, wherein solid isolator with for fine tuning and maintain the temperature control system coupling of the transmission peak wavelength peak value of wave filter.
Embodiment
Referring to accompanying drawing, wherein, use similar label and symbol to run through and specify similar part everywhere.Fig. 2 schematically illustrates the structure member by sequentially depositing the conventional films wave filter 10 that each layer manufacture.First quarter-wave reflector coat 12 is deposited in transparent substrates 14, then deposits half-wave dielectric isolation device layer 16, then deposits another quarter-wave reflector layer 12.(those skilled in the art can recognize, the relative thickness of spacer layer and reflector coat does not proportionally illustrate, but for more easily diagram and clear, for stacking this relative thickness of exaggerating of reverberator) in the time producing multicavity filter, after depositing absentee layer between chamber, repeat this sedimentary sequence, this can cause the little difference in stacking chamber because of the bad and variation in mode of deposition during each production phase.As a result, the passband peak value possibility misalignment of stacking etalon, and wave filter is not suitable for telecommunications application.
In contrast to this, Fig. 3 shows according to the structure of the wave filter 20 of manufacture of the present invention.The plane parallel optics window 22 of being made up of body dielectric substance is replaced traditionally by the half-wave dielectric isolation device layer 16 that deposition forms on the first reflector layer 12.On the contrary, directly in every side of optical window 22, deposit quarter-wave stacking 12, produce thus complete single cavity filter.If the optical window size (area) more required than wave filter is much wide, single cavity filter that many cardinal principles are identical can be cut apart to obtain in the single chamber so producing.Because optical window is parallel and be resized to obtain half-wave optical isolator, so it has same thickness on whole window area, and each the single cavity filter obtaining from it has identical transmission peak wavelength.It should be noted that in fact, according to the FSR of wave filter, transmissison characteristic is periodically and is repetition, but for telecommunications object, interested is single transmission peak value wavelength; Therefore,, in order to simplify, only relate to this wavelength at this.
Can obtain comparable result to produce for the intermediate structure 32 of halfband filter etalon by the one-sided of coated optics window 30.Two such structures 32 can be bonded together along the surface of their uncoated 34, and then cut to manufacture the wave filter of given less size, as shown in Figure 4 as required.Alternatively, the optical window 20 of coating can be first cut, and be then joined together to obtain single cavity filter from two parts of uniform window.
For example, in the time of the isolator relatively thick (, 50 microns) of Fabry-Perot interferometer, it becomes manufacture it by deposition is impracticable and uneconomic, because the quality of the length of sedimentation time and very thick deposited film variation.It is more much bigger than the body material of same thickness that insertion loss becomes.For example, as below, for as shown in the form of Free Spectral Range (FSR)=400GHz, isolator thickness is 107 μ m for silicon, and is 250 μ m for BK7 glass.Therefore, use optical window to have advantages of very large as isolator.Do not need long deposition processes, and isolator automatically runs through and has the even attribute identical with the body material of window everywhere.
BK7 glass based on FSR and silicon isolator thickness
BK7
Silicon
Provide the wavelength-shift that changes dL according to the thickness of the isolator of Fabry-Perot etalon by relational expression below.
Displacement=wavelength × dL/L,
Wherein, L is the thickness of isolator.Free Spectral Range FRS=c/ (2nL).
Therefore, form above illustrates that the variation in thickness (dL) of isolator need to be retained as the minimum value at the order of magnitude of several nanometers, to have little the wavelength-shift that is enough to the filter stacks that is allowed for DWDM application.This can use plane parallel optics window as etalon isolator, rather than easily realizes by the deposition of isolator.Therefore, can be for the DWDM application stacking multiple wave filters that obtain from uniform window continuously, as long as control well the parallel of window.On the other hand, two Window matchs that extremely difficulty will separately produce in strict like this thickness tolerance.
And, in order to obtain two-chamber filter, can use simply for example thermal bonding or other conventional process to engage two single cavity filters.In fact, in the middle of can utilizing, absentee layer 40 is bonded together two of the chamber being made up of the window applying 20 large parts, as shown in Figure 5, and then cuts as required to manufacture the two-chamber filter 42 of given less size.This can carry out with single cavity filter of Fig. 4.Therefore, the present invention has avoided in the most difficult part of manufacturing in multicavity filter, control thickness and the independent halfband filter of coupling of isolator, make its stacking two or more cavity filters (, the peak value in all chambeies being aimed at along single wavelength) with single passband peak value that produce.As a result, performance of filter and output have been improved significantly by the present invention.
Preferably, on the one or more reflector layers that deposit, carry out the deposition of absentee layer on window.With reference to single chamber 20 of figure 3 in an embodiment shown in Fig. 6 A, one side of the structure of coating is further coated with dummy material completely, to form layer 44, and opposite side uses mask and is only partly coated with the absentee layer 46 that area is less during coating is processed.Then consequent structure can be cut, and by independent single cavity segment combination with only by reflector layer is contacted to form two-chamber or three cavity filters with the absentee layer so depositing, as shown in Fig. 6 B and 6C.
With reference to identical single chamber 20 of figure 3 in another embodiment shown in Fig. 7 A, an only side of the structure of coating is further coated with to dummy material, but only in the part in whole region, apply to form the layer 48 of dummy material with mask, and other parts that leave this region during coating is processed do not apply.Then consequent structure can be cut, and by independent single cavity segment combination with again by suitably reflector layer being contacted and forms two-chamber or three cavity filters with the absentee layer so depositing, as shown in Fig. 7 B and 7C.The preferred size of the part that obviously, apply depends on whether plan to manufacture two-chamber or three cavity filters.
Fig. 8 and 9 has summarized in each step relating to while manufacturing multicavity filter of making to process with two as above.The details of these various steps, is traditional and is known in the art such as cutting optical window and the consequent parts of joint.For example, the surface of uncoated of polishing of optical window in coating and before engaging preferably.
Use plane parallel optics window that another the valuable advantage that is better than usual wave filter manufacture method is provided.Because wave filter is made up of solid etalon chamber, this solid etalon chamber is by making such as separator materials silicon, that have temperature sensitive refractive index, and therefore this character can advantageously be developed to provide meticulous filter tuner.The wavelength of known transmission peak value is relevant to temperature change by following relation:
Δλ=λ[(dn/dT+n×α)/n]ΔT
Wherein λ is wavelength, and n is refractive index, and T is temperature, and dn/dT is the hot coefficient of refractive index, and α is thermal expansivity.For example,, at λ=1550nm place, for thering are n=3.5, α=2.6 × 10
-6/℃ and dn/dT=190 × 10
-6/ ℃ silicon, wavelength-shift Δ λ/Δ T is～88pm/ ℃ or～11GHz/ ℃.This means for the silicon chamber of FSR with 3.6nm, the temperature change of about 41 ℃ will cause the transmission peak value displacement of full FSR.Such heat sensitivity makes it possible to the transmission peak value that thermal tuning can stacking wave filter.
As shown in Figure 10, can be by coupling it to the two-chamber filter 42 that uses Fig. 5 in order to be illustrated in this by the little well heater 52(of source 54 energy supplies according to the thermal tuning system 50 of wave filter of the present invention) realize.Little thermistor 56 is also coupled to this wave filter, to follow the trail of its temperature for the object of feeding back by automatic processor/controller 58, this automatic processor/controller 58 is programmed to regulate power supply output, to the temperature of the etalon isolator of wave filter is maintained to correct level, provide the desired transmission peak value wavelength in interested scope.Preferably prevent heat sink 62 thermal loss of wave filter with thin layer insulator 60, and promote the temperature control that this is stacking.Preferably orientate this well heater and insulator one side of the behaviour area of departing from wave filter as, and on the opposition side of the optical axis A along wave filter, provide thus thermally-stabilised configuration.
Therefore, disclose a kind of plain mode to make it possible to make single cavity filter, this list cavity filter has and is suitable for stackingly applying the identical optical properties of cardinal principle of desirable multicavity filter to produce for DWDM.Although, to be believed that the most practical and preferred embodiment illustrate and described the present invention, can recognize, can make and departing from from it within the scope of the invention.For example, because the direct and predictable relation between material temperature and transmissivity, above serviceability temperature is as the heat control of having controlled parametric description.But, can be by monitoring transmission peak value wavelength and for FEEDBACK CONTROL object is used this parameter, with the optics thermal property of equivalents control material.Therefore, the invention is not restricted to details disclosed herein, but meet the full breadth of claim, to contain any and all equipment being equal to and method.
Claims (36)
1. making, for a method for the multicavity filter of telecommunications application, comprises step:
Selection has the plane parallel optics window of the thickness that is suitable for described application;
The both sides of optical window are coated with to quarter-wave reverberator stacking, to produce single cavity filter structure;
Be multiple independent single cavity filters by described single cavity filter structure cuts; And
Combine described in two or more single cavity filter stacking to produce multicavity filter.
2. method according to claim 1, wherein, the described thickness of described plane parallel optics window is corresponding to half isolator.
3. method according to claim 1, wherein, in combination, single cavity filter is with before producing the stacking described step of multicavity filter described in two or more, and at least one side of described single cavity filter structure is further coated with coating to form absentee layer.
4. method according to claim 3, wherein, the described thickness of described plane parallel optics window is corresponding to half isolator.
5. method according to claim 1, further comprises step: the described side of optical window described in polishing before described applying step.
6. method according to claim 5, wherein, the described thickness of described plane parallel optics window is corresponding to half isolator.
7. method according to claim 1, further comprises step: the described side of optical window described in polishing before described applying step; And wherein, in combination, single cavity filter is with before producing the stacking described step of multicavity filter described in two or more, and at least one side of described single cavity filter structure is further coated with coating to form absentee layer; And wherein, the described thickness of described plane parallel optics window is corresponding to half isolator.
8. method according to claim 1, wherein said optical window comprises optics heat-sensitive material, described method further comprises step: control the temperature of described material, so that described wave filter is operated with predetermined transmission peak value.
9. method according to claim 8, wherein said material is silicon.
10. making, for a method for the multicavity filter of telecommunications application, comprises step:
Selection has the plane parallel optics window of the half of the thickness that is suitable for described application;
One side of optical window is coated with to quarter-wave reverberator stacking;
The described optical window of so coating is divided into two or more parts;
By two described parts along its uncoated side engagement, to produce single cavity filter structure;
Be multiple independent single cavity filters by described single cavity filter structure cuts; And
Combine described in two or more single cavity filter stacking to produce multicavity filter.
11. methods according to claim 10, wherein, the described thickness of described plane parallel optics window is corresponding to the half of the thickness of half isolator.
12. methods according to claim 10, wherein, in combination, single cavity filter is with before producing the stacking described step of multicavity filter described in two or more, and at least one side of described single cavity filter structure is further coated with coating to form absentee layer.
13. methods according to claim 12, wherein, the described thickness of described plane parallel optics window is corresponding to the half of the thickness of half isolator.
14. methods according to claim 10, further comprise step: the described side of optical window described in polishing before described coating and engagement step.
15. methods according to claim 12, wherein, the described thickness of described plane parallel optics window is corresponding to the half of the thickness of half isolator.
16. methods according to claim 10, further comprise step: the described side of optical window described in polishing before described applying step; And wherein, in combination, single cavity filter is with before producing the stacking described step of multicavity filter described in two or more, and at least one side of described single cavity filter structure is further coated with coating to form absentee layer; And wherein, the described thickness of described plane parallel optics window is corresponding to half isolator.
17. methods according to claim 10, wherein said optical window comprises optics heat-sensitive material, described method further comprises step: control the temperature of described material, so that described wave filter is operated with predetermined transmission peak value.
18. methods according to claim 16, wherein said material is silicon.
19. 1 kinds of making are used for the method for the multicavity filter of telecommunications application, comprise step:
Selection has the plane parallel optics window of the half of the thickness that is suitable for described application;
One side of optical window is coated with to quarter-wave reverberator stacking;
The described optical window of so coating is divided into multiple independent structures;
By described independent structure to along its uncoated side engagement, to produce multiple single cavity filters;
Combine described in two or more single cavity filter stacking to produce multicavity filter.
20. methods according to claim 19, wherein, the described thickness of described plane parallel optics window is corresponding to the half of the thickness of half isolator.
21. methods according to claim 19, wherein, before described cutting step, the stacking coating that is further coated with of described quarter-wave reverberator is to form absentee layer.
22. methods according to claim 21, wherein, the described thickness of described plane parallel optics window is corresponding to the half of the thickness of half isolator.
23. methods according to claim 19, further comprise step: the described side of optical window described in polishing before described coating and engagement step.
24. methods according to claim 23, wherein, the described thickness of described plane parallel optics window is corresponding to the half of the thickness of half isolator.
25. methods according to claim 23, further comprise step: the described side of optical window described in polishing before described coating and engagement step; And before described cutting step, the stacking coating that is further coated with of described quarter-wave reverberator is to form absentee layer; And wherein, the described thickness of described plane parallel optics window is corresponding to the half of the thickness of half isolator.
26. methods according to claim 19, wherein said optical window comprises optics heat-sensitive material, described method further comprises step: control the temperature of described material, so that described wave filter is operated with predetermined transmission peak value.
27. methods according to claim 26, wherein said material is silicon.
28. 1 kinds of multicavity filters that produce by method according to claim 1.
29. 1 kinds of halfband filters that produce by method according to claim 7 are stacking.
30. 1 kinds of multicavity filters that produce by method according to claim 8.
31. 1 kinds of multicavity filters that produce by method according to claim 10.
32. 1 kinds of halfband filters that produce by method according to claim 16 are stacking.
33. 1 kinds of multicavity filters that produce by method according to claim 17 are stacking.
34. 1 kinds of multicavity filters that produce by method according to claim 19.
35. 1 kinds of halfband filters that produce by method according to claim 25 are stacking.
36. 1 kinds of multicavity filters that produce by method according to claim 26 are stacking.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/660,909 US20130155515A1 (en) | 2011-10-25 | 2012-10-25 | Stackable narrowband filters for dense wavelength division multiplexing |
| US13/660,909 | 2012-10-25 | ||
| US13/924,598 | 2013-06-23 | ||
| US13/924,598 US20130279006A1 (en) | 2011-10-25 | 2013-06-23 | Stackable narrowband filters for dense wavelength division multiplexing |
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| CN103777265A true CN103777265A (en) | 2014-05-07 |
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| CN201210593418.9A Pending CN103777281A (en) | 2012-10-25 | 2012-12-31 | Stackable narrowband filters for dense wavelength division multiplexing |
| CN201310364929.8A Pending CN103777265A (en) | 2012-10-25 | 2013-08-20 | Stackable narrowband filters for dense wavelength division multiplexing |
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| CN201210593418.9A Pending CN103777281A (en) | 2012-10-25 | 2012-12-31 | Stackable narrowband filters for dense wavelength division multiplexing |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107076899A (en) * | 2014-10-07 | 2017-08-18 | 德累斯顿工业技术大学 | Set direction interference optical wave filter |
| CN109814281A (en) * | 2017-11-20 | 2019-05-28 | 菲尼萨公司 | Tunable optical filter and its manufacturing method and tunable optical filter component |
| CN109891306A (en) * | 2016-11-01 | 2019-06-14 | 金定洙 | Wave length variable filter, optical receiver and method for optical reception using wave length variable filter |
| CN112578494A (en) * | 2019-09-30 | 2021-03-30 | 福州高意光学有限公司 | Tunable optical filter |
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| US20030081319A1 (en) * | 2001-10-31 | 2003-05-01 | Wei Te Chung Foxconn International, Inc | Tunable optical filter |
| CN1438506A (en) * | 2001-11-28 | 2003-08-27 | 日立金属株式会社 | Film wave-filter for optical multiplying device/demultiplying device |
| US6678093B1 (en) * | 2001-03-15 | 2004-01-13 | Cierra Photonics, Inc. | Optically coupled etalons and methods of making and using same |
| US20040080830A1 (en) * | 2002-10-25 | 2004-04-29 | Charles Leu | Niobium oxide and silicon dioxide thin film filter for dense wavelength division multiplexing |
| WO2004111717A1 (en) * | 2003-06-13 | 2004-12-23 | Nippon Telegraph And Telephone Corporation | Variable wavelength optical filter |
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| US6678093B1 (en) * | 2001-03-15 | 2004-01-13 | Cierra Photonics, Inc. | Optically coupled etalons and methods of making and using same |
| US20030081319A1 (en) * | 2001-10-31 | 2003-05-01 | Wei Te Chung Foxconn International, Inc | Tunable optical filter |
| CN1438506A (en) * | 2001-11-28 | 2003-08-27 | 日立金属株式会社 | Film wave-filter for optical multiplying device/demultiplying device |
| US20040080830A1 (en) * | 2002-10-25 | 2004-04-29 | Charles Leu | Niobium oxide and silicon dioxide thin film filter for dense wavelength division multiplexing |
| WO2004111717A1 (en) * | 2003-06-13 | 2004-12-23 | Nippon Telegraph And Telephone Corporation | Variable wavelength optical filter |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107076899A (en) * | 2014-10-07 | 2017-08-18 | 德累斯顿工业技术大学 | Set direction interference optical wave filter |
| CN109891306A (en) * | 2016-11-01 | 2019-06-14 | 金定洙 | Wave length variable filter, optical receiver and method for optical reception using wave length variable filter |
| CN109814281A (en) * | 2017-11-20 | 2019-05-28 | 菲尼萨公司 | Tunable optical filter and its manufacturing method and tunable optical filter component |
| US11194180B2 (en) | 2017-11-20 | 2021-12-07 | Il-Vi Delaware, Inc. | Optical adjustable filter sub-assembly |
| CN109814281B (en) * | 2017-11-20 | 2023-10-27 | 菲尼萨公司 | Dimmable filter, method of manufacturing the same, and dimmable filter assembly |
| CN112578494A (en) * | 2019-09-30 | 2021-03-30 | 福州高意光学有限公司 | Tunable optical filter |
| WO2021063013A1 (en) * | 2019-09-30 | 2021-04-08 | 福州高意光学有限公司 | Tunable optical filter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103777281A (en) | 2014-05-07 |
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