CN103768709A - Electrode pin header used for assembling nerve-cell microelectrode array - Google Patents

Electrode pin header used for assembling nerve-cell microelectrode array Download PDF

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Publication number
CN103768709A
CN103768709A CN201410027692.9A CN201410027692A CN103768709A CN 103768709 A CN103768709 A CN 103768709A CN 201410027692 A CN201410027692 A CN 201410027692A CN 103768709 A CN103768709 A CN 103768709A
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China
Prior art keywords
needle
pricking
electrode
pin header
bodies
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Pending
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CN201410027692.9A
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Chinese (zh)
Inventor
裴为华
赵珊珊
归强
陈弘达
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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Priority to CN201410027692.9A priority Critical patent/CN103768709A/en
Publication of CN103768709A publication Critical patent/CN103768709A/en
Pending legal-status Critical Current

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  • Electrotherapy Devices (AREA)
  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)

Abstract

The invention discloses an electrode pin header used for assembling a nerve-cell microelectrode array. The electrode pin header comprises a plurality of pin header bodies and a connection frame, wherein the pin header bodies are composed of three parts which are the front electrode pin header recording point, the middle insulating pin header body part and the rear pressure welding area; the rear ends of the pin header bodies are periodically and fixedly distributed on the connection frame, and the front ends of the pin header bodies are conical; the connection frame is used for fixing the pin header bodies, the fixed part of every two pin header bodies is provided with a V-shaped double-surface segmenting groove, and the total depth of the segmenting grooves is smaller than the thickness of the connection frame. The nerve-cell microelectrode array can be manufactured in batches through a silicon micro-processing technology, electrodes manufactured in batches can be flexibly assembled into electrodes having different electrode numbers and electrode lengths through electrode number selecting, aligning connecting, frame removing and the like according to different requirements of animal experiments.

Description

A kind of for assembling the electrode pricking with needle of neuron microelectrode array
Technical field
The present invention relates to electrode sensor design and manufacture field for biological nerve stimulation and electrical signal detection, more specifically relate in biomedical engineering for assembling the electrode pricking with needle of neural stimulation and signal of telecommunication recording electrode array.
Background technology
Illustrating basic process of nervous activity is one of target of Modern brain science.Analyzing neurocyte while how completing various function, often needing that implantable nerve microelectrode is implanted to different Nao district stimulates or records special brain site.
At present, conventional nerve microelectrode has the nerve microelectrode of wire electrode, Michigan plane electrode, Utah stereo electrod and flexibility etc.And wire electrode, as a kind of electrode that can flexible assembling, neurophysiologist can be at the laboratory of oneself by experiment requirement groups loading electrode.Its cost of manufacture is also lower.Other several electrodes, due to complex manufacturing technology, often need customization to buy finished electrode.Price is relatively high, and fabrication cycle is longer.For wire electrode that can flexible assembling, because employing is made by hand, the concordance that electrode is each batch is bad, and electrode points density ratio is lower.While adopting array arrangement in order to improve electrode points density, assemble very time-consuming and spacing and be difficult to accurate control.
Summary of the invention
In view of this, main purpose of the present invention is to provide a kind of electrode pricking with needle that records microelectrode array for assembling neural stimulation and the signal of telecommunication.
The invention provides a kind ofly for assembling the electrode pricking with needle of neuron microelectrode array, comprising:
Multiple pricking with needle needle bodies, it is made up of three parts: front termination electrode pricking with needle measuring point, intermediate insulation needle body part and pressure welding region, rear end; Its rear end periodic arrangement is fixed on connecting frame, and its front end is taper;
Connecting frame, it is for fixing described multiple pricking with needle needle bodies, and every two fixing parts of pricking with needle needle body have two-sided V-arrangement slot segmentation, and the total depth of described slot segmentation is less than the thickness of connecting frame.
The above-mentioned electrode pricking with needle proposing by the present invention, user can select requisite number object electrode row array unit to carry out simple SMD assembling by slot segmentation, has guaranteed the motility of electrode assembling, meets the demand of different experiments; Meanwhile, owing to adopting bulk silicon process, the concordance of electrode is better; Electrode row array unit links together by link framework, can realize whole row and assemble microelectrode, has simplified assembly working amount.
Accompanying drawing explanation
Fig. 1 is for assembling the structural representation of electrode pricking with needle of neuron microelectrode array in the present invention.
The specific embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
Refer to shown in Fig. 1, the invention provides and a kind ofly carry out simple paster type encapsulation for assembling the electrode pricking with needle of nerve microelectrode array by the electrode of choosing suitable number from electrode pricking with needle, nerve microelectrode can complete.The nerve microelectrode that this assembling completes both can carry out the extraction of biological neural signal, and then the nerve signal of extract record is analyzed and researched; Can carry out electricity irritation to nerve again, thereby realize excitation or inhibition to neuron activity.This electrode pricking with needle comprises:
Multiple pricking with needle needle structures 10, the backing material of whole needle body 10 is silicon, and this needle structure is cylinder or elliptic cylinder, and needle body 10 front ends are taper, are convenient to insert in tissue in the time that body is implanted, and described needle structure number is greater than 1.On backing material, covering metal layer is as conductive layer, and on metal level, selectivity covers insulating barrier, thereby realizes needle structure 10.Described each needle structure 10 is made up of three funtion parts, is respectively front termination electrode pricking with needle measuring point 11, intermediate insulation needle body part 12 and pressure welding region, rear end 13.Electrode pricking with needle measuring point 11 is taper, and its material is as plated metal, conducting polymer or Graphene on the silicon of backing material, can realize extraction or the stimulation of the signal of telecommunication.Needle body insulated part 12 top layer insulant are high molecular polymer, realize by the mode of molecule deposition, and even thickness, plays the effect of insulation.Under its insulating barrier, have the metal level being connected with 11 and 13 parts, this metal level is deposited on backing material silicon.13 top layers, pressure welding region, rear end are metal, are deposited on backing material silicon, for the signal of telecommunication is connected to external interface.
One connecting frame 20, the electrode row array needle body 10 that this connecting frame 20 is arranged for fixed cycle property.Connecting frame 20 is used for fixing and support electrode in preparation and encapsulation process, has prefabricated two-sided V-type slot segmentation on framework between every two needle bodies.Connection box 20 is silicon materials, together with needle body 10, by silicon slice dual-surface lithography being carried out to the definition of mask pattern, then after wet etching, forms needle body 10 and is connected to the integrative-structure on connecting frame 20.In the time that pricking with needle is assembled, can realize whole row's assembling, be fixedly connected with behind pressure welding region 13, then by under connecting frame 20 use diamond scribing cutter cuttings, can realize the electrical isolation of row array needle body 10.
Multiple two-sided V-type slot segmentations 21, this slot segmentation 21 is positioned on connecting frame 20.Between every two electrode row array needle bodies 10, there is slot segmentation 21.This slot segmentation 21 facilitates user to select to take off from electrode pricking with needle after row array needle body number.This two-sided V groove structure is by silicon chip is carried out after dual surface lithography and wet etching, forms with needle body 10 and connecting frame 20 simultaneously.The total depth of two-sided V-type slot segmentation 21 is less than the thickness of connecting frame 20, therefore, in facilitating row array to break to get, guarantees that the whole row of pricking with needle array connects.Need to carry out pricking with needle and break while getting, utilize tweezers or scalpel to press two-sided V-type groove 21, can realize cleavage fracture at V groove 21 places as the silicon that supports silicon materials, selectable number electrode is realized and is broken and get from pricking with needle.
The above-mentioned optional lineation electrode pricking with needle of quantity that records microelectrode array for assembling neural stimulation and the signal of telecommunication that the present invention proposes adopts common silicon materials, and can be by bulk silicon process preparation in batches, electrode prepared by this batch can be according to zooperal different demands, choose, aim at several portions such as connection and removal framework by number of electrodes and operate simply, flexible assembling becomes to have the electrode of varying number and electrode length.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.

Claims (8)

1. for assembling an electrode pricking with needle for neuron microelectrode array, comprising:
Multiple pricking with needle needle bodies, it is made up of three parts: front termination electrode pricking with needle measuring point, intermediate insulation needle body part and pressure welding region, rear end; Its rear end periodic arrangement is fixed on connecting frame, and its front end is taper;
Connecting frame, it is for fixing described multiple pricking with needle needle bodies, and every two fixing parts of pricking with needle needle body have two-sided V-arrangement slot segmentation, and the total depth of described slot segmentation is less than the thickness of connecting frame.
2. electrode pricking with needle as claimed in claim 1, is characterized in that, described multiple pricking with needle needle bodies and connecting frame are integrated, and material is silicon.
3. electrode pricking with needle as claimed in claim 2, is characterized in that, the top layer of described front termination electrode pricking with needle measuring point is metal, conducting polymer or Graphene, extracts and/or stimulates for the signal of telecommunication.
4. electrode pricking with needle as claimed in claim 2, is characterized in that, 13 top layers, pressure welding region, described rear end are metal, is connected to external interface for the signal of telecommunication front termination electrode pricking with needle measuring point being extracted and/or stimulate.
5. electrode pricking with needle as claimed in claim 1, is characterized in that, described two-sided V-type slot segmentation is broken the fracture position while getting for defining electrode row array.
6. electrode pricking with needle as claimed in claim 1, is characterized in that, by being fixedly connected with behind the pressure welding region of described multiple pricking with needle needle bodies, connecting frame is removed to the whole row's assembling that realizes described electrode pricking with needle.
7. electrode pricking with needle as claimed in claim 1, is characterized in that, the backing material of described pricking with needle needle body is silicon, is coated with metal level on backing material, and on metal level, selectivity is coated with insulating barrier.
8. electrode pricking with needle as claimed in claim 1, is characterized in that, described pricking with needle needle body is cylindrical or elliptical cylinder-shape.
CN201410027692.9A 2014-01-21 2014-01-21 Electrode pin header used for assembling nerve-cell microelectrode array Pending CN103768709A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106037735A (en) * 2016-07-07 2016-10-26 苏州海神联合医疗器械有限公司 High-conductivity electrode applicable to electromyography-evoked potential equipment
CN114209332A (en) * 2021-12-31 2022-03-22 武汉衷华脑机融合科技发展有限公司 Neural interface system

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CN101112309A (en) * 2006-07-27 2008-01-30 中国科学院半导体研究所 Silicon V-shaped trough plate and method for assembling microfilament electrode array by using the silicon V-shaped trough plate
US20080177363A1 (en) * 2007-01-23 2008-07-24 Schouenborg Jens O Dissociating multi-channel electrode
CN101980406A (en) * 2010-10-08 2011-02-23 得意精密电子(苏州)有限公司 Method for manufacturing electric connector terminal
CN102305896A (en) * 2004-06-21 2012-01-04 卡普雷斯股份有限公司 A method for providing alignment of a probe
CN102348326A (en) * 2010-08-02 2012-02-08 鸿富锦精密工业(深圳)有限公司 Circuit board
JP4887482B2 (en) * 2005-02-28 2012-02-29 国立大学法人東北大学 Nerve implant device
CN102512151A (en) * 2011-12-09 2012-06-27 中国科学院半导体研究所 Method for manufacturing three-dimensional nervus microelectrode
CN102830138A (en) * 2012-09-24 2012-12-19 中国科学院半导体研究所 Photoelectrode array for neuron stimulation and electric signal recording and preparing method of array

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102305896A (en) * 2004-06-21 2012-01-04 卡普雷斯股份有限公司 A method for providing alignment of a probe
JP4887482B2 (en) * 2005-02-28 2012-02-29 国立大学法人東北大学 Nerve implant device
CN101112309A (en) * 2006-07-27 2008-01-30 中国科学院半导体研究所 Silicon V-shaped trough plate and method for assembling microfilament electrode array by using the silicon V-shaped trough plate
US20080177363A1 (en) * 2007-01-23 2008-07-24 Schouenborg Jens O Dissociating multi-channel electrode
CN102348326A (en) * 2010-08-02 2012-02-08 鸿富锦精密工业(深圳)有限公司 Circuit board
CN101980406A (en) * 2010-10-08 2011-02-23 得意精密电子(苏州)有限公司 Method for manufacturing electric connector terminal
CN102512151A (en) * 2011-12-09 2012-06-27 中国科学院半导体研究所 Method for manufacturing three-dimensional nervus microelectrode
CN102830138A (en) * 2012-09-24 2012-12-19 中国科学院半导体研究所 Photoelectrode array for neuron stimulation and electric signal recording and preparing method of array

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106037735A (en) * 2016-07-07 2016-10-26 苏州海神联合医疗器械有限公司 High-conductivity electrode applicable to electromyography-evoked potential equipment
CN114209332A (en) * 2021-12-31 2022-03-22 武汉衷华脑机融合科技发展有限公司 Neural interface system

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Application publication date: 20140507