CN103768709A - Electrode pin header used for assembling nerve-cell microelectrode array - Google Patents

Electrode pin header used for assembling nerve-cell microelectrode array Download PDF

Info

Publication number
CN103768709A
CN103768709A CN 201410027692 CN201410027692A CN103768709A CN 103768709 A CN103768709 A CN 103768709A CN 201410027692 CN201410027692 CN 201410027692 CN 201410027692 A CN201410027692 A CN 201410027692A CN 103768709 A CN103768709 A CN 103768709A
Authority
CN
Grant status
Application
Patent type
Prior art keywords
electrode
pin header
electrode pin
needle
pin
Prior art date
Application number
CN 201410027692
Other languages
Chinese (zh)
Inventor
裴为华
赵珊珊
归强
陈弘达
Original Assignee
中国科学院半导体研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

The invention discloses an electrode pin header used for assembling a nerve-cell microelectrode array. The electrode pin header comprises a plurality of pin header bodies and a connection frame, wherein the pin header bodies are composed of three parts which are the front electrode pin header recording point, the middle insulating pin header body part and the rear pressure welding area; the rear ends of the pin header bodies are periodically and fixedly distributed on the connection frame, and the front ends of the pin header bodies are conical; the connection frame is used for fixing the pin header bodies, the fixed part of every two pin header bodies is provided with a V-shaped double-surface segmenting groove, and the total depth of the segmenting grooves is smaller than the thickness of the connection frame. The nerve-cell microelectrode array can be manufactured in batches through a silicon micro-processing technology, electrodes manufactured in batches can be flexibly assembled into electrodes having different electrode numbers and electrode lengths through electrode number selecting, aligning connecting, frame removing and the like according to different requirements of animal experiments.

Description

—种用于组装神经元微电极阵列的电极排针 - a kind of discharge electrode needle assembly neurons microelectrode array

技术领域 FIELD

[0001] 本发明涉及用于生物神经刺激与电信号检测的电极传感器设计及加工领域,更具体涉及在生物医学工程中用于组装神经元刺激及电信号记录电极阵列的电极排针。 [0001] The present invention relates to an electrode for sensor design and processing art electrical nerve stimulation and biological testing, and more particularly relates to an electrode pin for the assembly of biomedical engineering and electrical stimulation of neurons recording electrode array.

背景技术 Background technique

[0002] 阐明神经活动的基本过程是现代脑科学的目标之一。 [0002] The basic process of neural activity is one of the stated goals of modern brain science. 在分析神经细胞如何完成各种功能时,往往需要将可植入神经微电极植入不同的脑区来刺激或记录特殊的脑部位点。 When analyzing how neurons perform various functions, often require the implantation of implantable neural microelectrode different brain regions to stimulate or record a particular brain loci.

[0003] 目前,常用的神经微电极有金属丝电极、Michigan平面电极、Utah立体电极以及柔性的神经微电极等。 [0003] Currently, there are commonly used neural microelectrodes wire electrode, Michigan planar electrode, Utah perspective nerve electrodes and a flexible microelectrode like. 而金属丝电极,作为一种可以灵活组装的电极,神经生理学家可以在自己的实验室按实验需求组装电极。 The wire electrode as an electrode assembly may be flexible, you can press the experimental neurophysiologist needs electrode assembly in their own laboratories. 其制作成本也比较低。 Its production cost is relatively low. 其他几种电极由于制作工艺复杂,往往需要定制购买成品电极。 Several other electrode due to the complex production process, often require customization to purchase the finished electrode. 价格相对较高,且制作周期较长。 The price is relatively high, and a longer production cycle. 对于可以灵活组装的金属丝电极,由于采用手工制作,电极各批次的一致性不好,且电极点密度比较低。 For assembling the wire electrode can be flexible, since the handmade, good consistency batches electrode, and the electrode is relatively low dot density. 为了提高电极点密度而采用阵列排布时,组装很费时且间距难以精确控制。 In order to increase the dot density using an electrode arranged in an array, the assembly is very time consuming and difficult to accurately control the spacing.

发明内容 SUMMARY

[0004] 有鉴于此,本发明的主要目的在于提供一种用于组装神经元刺激和电信号记录微电极阵列的电极排针。 [0004] In view of this, the main object of the present invention is to provide a method of assembling an electrode pin electrical stimulation and recording of neurons microelectrode arrays for.

[0005] 本发明提供了一种用于组装神经元微电极阵列的电极排针,包括: [0005] The present invention provides a method of assembling an electrode pin neuronal microelectrode array, comprising:

[0006] 多个排针针体,其由三部分组成:前端电极排针记录点、中间绝缘针体部分和后端压焊区域;其后端周期性排列固定于连接框架上,其前端为锥形; [0006] The plurality of discharge needle body, which consists of three parts: the front end of the recording electrode pin points, the intermediate portion and the rear end of the needle insulating bonding region; periodically arranged rear end thereof fixed to the connecting frame, which is a front end cone;

[0007] 连接框架,其用于固定所述多个排针针体,且每两个排针针体固定的部分具有双面V形分割槽,所述分割槽的总深度小于连接框架的厚度。 [0007] connection frame, for fixing said plurality of rows of needle body, and the two fixing portions of each discharge needle having a double-sided V-shaped dividing grooves, the depth of the dividing groove is smaller than the total thickness of the connecting frame .

[0008] 通过本发明提出的上述电极排针,用户可以通过分割槽选择所需数目的电极排阵单元进行简单的贴片式组装,保证了电极组装的灵活性,满足不同实验的需求;同时,由于采用硅微加工工艺,电极的一致性较好;电极排阵单元通过链接框架连接在一起,可以实现整排组装微电极,简化了组装工作量。 [0008] The electrode pin proposed by the present invention, the user may select a simple patch electrode assembly of the required number of row array unit, to ensure the flexibility of the electrode assembly, to meet the needs of different experiments by dividing grooves; while , since silicon micromachining technology, better uniformity electrode; electrode array row cells connected together by a linking frame, the whole row can be achieved microelectrode assembly, simplifying the assembly work.

附图说明 BRIEF DESCRIPTION

[0009] 图1是本发明中用于组装神经元微电极阵列的电极排针的结构示意图。 [0009] FIG. 1 is a schematic view of the electrode pin neuronal microelectrode array of the present invention for assembling.

具体实施方式 Detailed ways

[0010] 为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明作进一步的详细说明。 [0010] To make the objectives, technical solutions, and advantages of the present invention will become more apparent hereinafter in conjunction with specific embodiments, and with reference to the accompanying drawings, the present invention will be further described in detail.

[0011] 请参阅图1所示,本发明提供一种用于组装神经微电极阵列的电极排针,通过从电极排针中选取合适数目的电极进行简单贴片式封装,即可制作完成神经微电极。 [0011] Please refer to FIG. 1, the present invention provides an electrode assembly pin neural microelectrode array for simple SMD package by selecting the appropriate number of electrodes from the electrode pin, the nerve can be finished microelectrode. 该组装完成的神经微电极既可以进行生物神经信号的提取,进而对所提取记录的神经信号分析研究;又可以对神经进行电刺激,从而实现对神经元活动的激励或者抑制。 Neural microelectrode may be assembled either the extracted biological neural signals, and further analysis of recorded neural signals extracted; and can nerve electrical stimulation in order to achieve the excitation of neuronal activity or inhibition. 该电极排针包括: The needle electrode assembly comprising:

[0012]多个排针针体结构10,整个针体10的支撑材料为硅,该针体结构为圆柱或者椭圆柱型,针体10前端为锥形,便于在体植入时插入组织内,所述针体结构数目大于I。 [0012] The plurality of discharge needle structure 10, the entire needle support material is silicon body 10, the needle structure is a cylindrical or oval cylindrical, needle distal end 10 is tapered to facilitate insertion within the tissue upon implantation , is greater than the number of the needle structure I. 支撑材料上覆盖金属层作为导电层,在金属层上选择性覆盖绝缘层,从而实现针体结构10。 The support material covering the metal layer as a conductive layer on the insulating layer covering the metal layer selectively, the needle structure 10 to achieve. 所述每一针体结构10由三个功能部分组成,分别为前端电极排针记录点11、中间绝缘针体部分12和后端压焊区域13。 Each of said needle structure 10 consists of three functional parts, namely the end of the electrode pin recording spot 11, and a rear portion 12 intermediate insulating bonding region 13 of the needle body. 电极排针记录点11为锥形,其材料为作为支撑材料的硅上沉积金属、导电聚合物或石墨烯,可以实现电信号的提取或刺激。 Recording dots electrode pin 11 is tapered, the material is deposited as a metal, or a conductive polymer as graphene on a silicon support material, the electrical signal may be implemented or stimulated extract. 针体绝缘部分12表层绝缘材料为高分子聚合物,通过分子沉积的方式实现,厚度均匀,起到绝缘的作用。 A needle body portion 12 insulating material is insulating polymer surface, is achieved by way of molecular deposition, a uniform thickness, function as insulation. 其绝缘层下有与11和13部分连接的金属层,该金属层沉积在支撑材料硅上。 11 and 13 has the connecting portion of the metal layer, the metal layer is deposited on a silicon support material its insulating layer. 后端压焊区域13表层为金属,沉积在支撑材料硅上,用于将电信号连接到外部接口上。 The rear end bonding surface area 13 is a metal, silicon deposited on a support material for connecting electrical signals to the external interface.

[0013] 一连接框架20,该连接框架20用于固定周期性排列的电极排阵针体10。 [0013] a connecting frame 20, the connecting frame 20 for fixing the needle electrode row array 10 arranged periodically. 连接框架20用来在制备和封装过程中固定和支撑电极,框架上每两个针体之间有预制的双面V型分割槽。 Connecting frame 20 for the manufacture of the packaging process and the double-sided V-shaped dividing groove between the fixed and the support of the preformed electrodes, each of the two needle body frame. 连接框20为硅材料,与针体10 —起,通过对硅片双面光刻进行掩膜形貌的定义,再经过湿法腐蚀后,形成针体10连接在连接框架20上的一体结构。 Connecting block 20 is a silicon material, a needle 10 - from, the double-sided silicon wafer by photolithography defined mask topography, and then after the wet etching, the needle structure 10 is formed integrally connected to the connecting frame 20 . 在排针组装时可实现整排组装,在固定连接好压焊区域13后,再将连接框架20用金刚石划片刀切割下,即可实现排阵针体10的电气隔离。 When the discharge needle assembly is assembled the whole row can be implemented in a fixed region connected after the pressure-welding 13, and then connected to the frame 20 by the dicing blade cutting the diamond, to achieve electrical isolation of the needle body 10 of the front row.

[0014] 多个双面V型分割槽21,该分割槽21位于连接框架20上。 The [0014] plurality of dividing the double-sided V-grooves 21, the dividing groove 20 connecting frame 21 is located. 每两个电极排阵针体10之间,都有分割槽21。 Between 10, dividing grooves 21 each have two rows of electrodes arrays needle. 该分割槽21方便用户选择排阵针体数目后从电极排针上取下。 After the dividing groove 21 facilitate the user to select the number of rows of front electrode needle is removed from the pin. 该双面V槽结构是通过对硅片进行双面光刻和湿法腐蚀后,与针体10和连接框架20同时形成。 The double-sided V-groove structure is formed by the silicon wafers sided photolithography and wet etching, and the connecting frame 10 and the needle body 20 is formed simultaneously. 双面V型分割槽21的总深度小于连接框架20的厚度,因此在方便排阵掰取的同时,保证排针阵列的整排连接。 Dividing total depth sided V-groove 21 is smaller than the thickness of the connecting frame 20, and thus to facilitate breaking the front row taken at the same time, to ensure that the entire row of pin array connector. 需要进行排针掰取时,利用镊子或者手术刀按压双面V型槽21,作为支撑硅材料的硅即可在V槽21处实现解理断裂,可选数目的电极实现从排针上掰取。 When the pin is required to take breaking, pressing with tweezers or a scalpel sided V-groove 21, a silicon support material is silicon cleavage fracture can be realized at the V-grooves 21, to achieve an optional number of electrodes from breaking pin take.

[0015] 本发明提出的上述用于组装神经元刺激和电信号记录微电极阵列的数量可选的线性电极排针采用普通的硅材料,且可以通过硅微加工工艺批量制备,这种批量制备的电极可以根据动物试验的不同需求,通过电极数量选取、对准连接和去除框架等几部简单地操作,灵活组装成具有不同数量和`电极长度的电极。 [0015] The number of linear electrodes optional pin for assembling electrical stimulation and recording of neurons microelectrode array of the present invention is made using ordinary silicon material, and may be, such a bulk silicon micromachining process Preparation by bulk the electrode according to the different needs of the animal tests, by selecting the number of electrodes, alignment of the connection and removal of the electrode frameworks having a different number and length of several electrodes `simple, flexible and assembled into.

[0016] 以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。 [0016] The foregoing specific embodiments of the object, technical solutions, and advantages of the invention will be further described in detail, it should be understood that the above descriptions are merely embodiments of the present invention, but not intended to limit the present invention, all within the spirit and principle of the present invention, any changes made, equivalent substitutions and improvements should be included within the scope of the present invention.

Claims (8)

  1. 1.一种用于组装神经元微电极阵列的电极排针,包括: 多个排针针体,其由三部分组成:前端电极排针记录点、中间绝缘针体部分和后端压焊区域;其后端周期性排列固定于连接框架上,其前端为锥形; 连接框架,其用于固定所述多个排针针体,且每两个排针针体固定的部分具有双面V形分割槽,所述分割槽的总深度小于连接框架的厚度。 An electrode pin for assembling neuronal microelectrode array, comprising: a plurality of rows of needle body, which consists of three parts: the front end of the recording electrode pin points, the intermediate portion and the rear end of the needle insulating bonding region ; periodically arranged rear end thereof fixed to the connecting frame, which is a tapered distal end; connection frame, for fixing said plurality of rows of needle body, and each of the two rows of needle fixing portion having a double-sided V the total depth of the dividing groove-shaped, the dividing groove is smaller than the thickness of the connecting frame.
  2. 2.如权利要求1所述的电极排针,其特征在于,所述多个排针针体和连接框架为一体,且材料为娃。 The electrode pin according to claim 1, wherein said needle body and a plurality of discharge integrally connected to the frame, and the material for the baby.
  3. 3.如权利要求2所述的电极排针,其特征在于,所述前端电极排针记录点的表层为金属、导电聚合物或石墨烯,用于电信号提取和/或刺激。 3. The electrode pin according to claim 2, wherein said surface layer distal electrode pin recording spot is a metal, a conductive polymer or graphene, for signal extraction and / or irritation.
  4. 4.如权利要求2所述的电极排针,其特征在于,所述后端压焊区域13表层为金属,用于将前端电极排针记录点提取和/或刺激的电信号连接到外部接口。 The electrode pin according to claim 2, characterized in that the rear end surface 13 is a metal bonding region, the tip electrode for electrical discharge point extraction pin recording and / or irritation to the external interface connector .
  5. 5.如权利要求1所述的电极排针,其特征在于,所述双面V型分割槽用于定义电极排阵掰取时的断裂位置。 The electrode pin according to claim 1, wherein said double-sided V-grooves for dividing the breaking point when breaking the front row electrodes define taken.
  6. 6.如权利要求1所述的电极排针,其特征在于,通过固定连接所述多个排针针体的压焊区域后,将连接框架去除实现所述电极排针的整排组装。 Said electrode pin as claimed in claim 1, wherein, after bonding the plurality of discharge regions through a needle body fixed to the connecting frame assembly implementing the removal of an entire row of pin electrodes.
  7. 7.如权利要求1所述的电极排针,其特征在于,所述排针针体的支撑材料为硅,支撑材料上覆盖有金属层,金属层上选择性覆盖有绝缘层。 The electrode pin according to claim 1, wherein said discharge needle support material is a silicon body, covered with a metal layer on a support material, is selectively covered with an insulating layer on the metal layer.
  8. 8.如权利要求1所述的电`极排针,其特征在于,所述排针针体为圆柱形或椭圆柱形。 The electrical `1 as claimed in claim electrode pin, wherein the pin is cylindrical or elliptical needle cylinder.
CN 201410027692 2014-01-21 2014-01-21 Electrode pin header used for assembling nerve-cell microelectrode array CN103768709A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201410027692 CN103768709A (en) 2014-01-21 2014-01-21 Electrode pin header used for assembling nerve-cell microelectrode array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201410027692 CN103768709A (en) 2014-01-21 2014-01-21 Electrode pin header used for assembling nerve-cell microelectrode array

Publications (1)

Publication Number Publication Date
CN103768709A true true CN103768709A (en) 2014-05-07

Family

ID=50561761

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201410027692 CN103768709A (en) 2014-01-21 2014-01-21 Electrode pin header used for assembling nerve-cell microelectrode array

Country Status (1)

Country Link
CN (1) CN103768709A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106037735A (en) * 2016-07-07 2016-10-26 苏州海神联合医疗器械有限公司 High-conductivity electrode applicable to electromyography-evoked potential equipment

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101112309A (en) * 2006-07-27 2008-01-30 中国科学院半导体研究所 Silicon V-shaped trough plate and method for assembling microfilament electrode array by using the silicon V-shaped trough plate
US20080177363A1 (en) * 2007-01-23 2008-07-24 Schouenborg Jens O Dissociating multi-channel electrode
CN101980406A (en) * 2010-10-08 2011-02-23 得意精密电子(苏州)有限公司 Method for manufacturing electric connector terminal
CN102305896A (en) * 2004-06-21 2012-01-04 卡普雷斯股份有限公司 A method for providing alignment of a probe
CN102348326A (en) * 2010-08-02 2012-02-08 鸿富锦精密工业(深圳)有限公司 Circuit board
JP4887482B2 (en) * 2005-02-28 2012-02-29 国立大学法人東北大学 Nerve implant devices
CN102512151A (en) * 2011-12-09 2012-06-27 中国科学院半导体研究所 Method for manufacturing three-dimensional nervus microelectrode
CN102830138A (en) * 2012-09-24 2012-12-19 中国科学院半导体研究所 Photoelectrode array for neuron stimulation and electric signal recording and preparing method of array

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102305896A (en) * 2004-06-21 2012-01-04 卡普雷斯股份有限公司 A method for providing alignment of a probe
JP4887482B2 (en) * 2005-02-28 2012-02-29 国立大学法人東北大学 Nerve implant devices
CN101112309A (en) * 2006-07-27 2008-01-30 中国科学院半导体研究所 Silicon V-shaped trough plate and method for assembling microfilament electrode array by using the silicon V-shaped trough plate
US20080177363A1 (en) * 2007-01-23 2008-07-24 Schouenborg Jens O Dissociating multi-channel electrode
CN102348326A (en) * 2010-08-02 2012-02-08 鸿富锦精密工业(深圳)有限公司 Circuit board
CN101980406A (en) * 2010-10-08 2011-02-23 得意精密电子(苏州)有限公司 Method for manufacturing electric connector terminal
CN102512151A (en) * 2011-12-09 2012-06-27 中国科学院半导体研究所 Method for manufacturing three-dimensional nervus microelectrode
CN102830138A (en) * 2012-09-24 2012-12-19 中国科学院半导体研究所 Photoelectrode array for neuron stimulation and electric signal recording and preparing method of array

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106037735A (en) * 2016-07-07 2016-10-26 苏州海神联合医疗器械有限公司 High-conductivity electrode applicable to electromyography-evoked potential equipment

Similar Documents

Publication Publication Date Title
Cheung Implantable microscale neural interfaces
US6678564B2 (en) Bio-implant and method of making the same
US4837049A (en) Method of making an electrode array
Buzsáki et al. Tools for probing local circuits: high-density silicon probes combined with optogenetics
Blanche et al. Polytrodes: high-density silicon electrode arrays for large-scale multiunit recording
Armstrong-James et al. Carbon fibre microelectrodes
US20040210122A1 (en) Electrical sensing and/or signal application device
US20030195601A1 (en) High-density array of micro-machined electrodes for neural stimulation
US6144883A (en) Method of making a cochlear electrode array with electrode contacts on medial side
US6624510B1 (en) Electrode array having a thin, flexible substrate
US6862805B1 (en) Method of making a cochlear electrode array having current-focusing and tissue-treating features
Hoogerwerf et al. A three-dimensional microelectrode array for chronic neural recording
Musallam et al. A floating metal microelectrode array for chronic implantation
US6304784B1 (en) Flexible probing device and methods for manufacturing the same
US20090177144A1 (en) Micromachined neural probes
US6892438B1 (en) Method of making a bio-probe
US20060135862A1 (en) Multielectrode array and system for recording and analyzing data or for stimulating tissue
Csicsvari et al. Massively parallel recording of unit and local field potentials with silicon-based electrodes
EP0319844B1 (en) Electrical connectors for brain-contact devices
BeMent et al. Solid-state electrodes for multichannel multiplexed intracortical neuronal recording
Mercanzini et al. In vivo electrical impedance spectroscopy of tissue reaction to microelectrode arrays
Boppart et al. A flexible perforated microelectrode array for extended neural recordings
Hetke et al. Silicon ribbon cables for chronically implantable microelectrode arrays
US4969468A (en) Electrode array for use in connection with a living body and method of manufacture
Krüger et al. Simultaneous recording with 30 microelectrodes in monkey visual cortex

Legal Events

Date Code Title Description
C06 Publication
C10 Entry into substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)