CN103746072B - A kind of graphical giant magnetoresistance composite material method for manufacturing thin film - Google Patents
A kind of graphical giant magnetoresistance composite material method for manufacturing thin film Download PDFInfo
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- CN103746072B CN103746072B CN201410035813.4A CN201410035813A CN103746072B CN 103746072 B CN103746072 B CN 103746072B CN 201410035813 A CN201410035813 A CN 201410035813A CN 103746072 B CN103746072 B CN 103746072B
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Abstract
The invention provides a kind of graphical giant magnetoresistance composite material method for manufacturing thin film。First pass through photoetching method on Woelm Alumina filter membrane, form required figure, then the method utilizing vacuum filtering carbon nanotube suspension forms graphing carbon nanotube array in template, directly liquid polymer is placed on filter membrane afterwards, filter membrane is removed after solidification, namely CNT is transferred to polymeric body surface, forms graphing carbon nanotube/polymer composites thin film。In this process by regulating carbon nano tube suspension concentration and filtering solution volume, it is thus achieved that the carbon nano-tube film of different densities, and then realize the scalable of thin film giant magnetoresistance effect, be widely applied prospect in flexible magnetic sensor field。
Description
Technical field
The invention belongs to micro-nano system and manufacture field, particularly relate to a kind of graphing carbon nanotube/polymer composites method for manufacturing thin film with giant magnetoresistance effect。
Background technology
Giant magnetoresistance effect is a kind of quantum mechanical effects, refer to the resistivity of magnetic material when there being external magnetic field than the phenomenon that there is great variety during without external magnetic field。Development along with technology of Internet of things, various high-performance giant magneto-resistance sensors play an increasingly important role in fields such as automobile, biology, space flight, automatizatioies, the fast development of especially various intelligence wearable devices so that the flexible giant magneto-resistance sensor of preparation becomes important development trend。
At present, many being interlaminated by ferromagnetic material and nonferromagnetic material of giant magnetoresistive thin film is formed by stacking, and when the magnetic moment of ferromagnetic layer is parallel to each other, carrier is minimum with the scattering of spin dependence, and material has minimum resistance；When the magnetic moment of ferromagnetic layer is antiparallel, the scattering with spin dependence is the strongest, and the resistance of material is maximum。Upper and lower two-layer is ferromagnetic material, and intermediate course is nonferromagnetic material。The direction of ferromagnetic material magnetic moment is to be controlled by the external magnetic field being added to material, thus less magnetic field can also obtain bigger resistance variations。But, this giant magnetoresistive material film is owing to preparing with metal material, and complicated process of preparation on the one hand, cost is high；On the other hand, prepared giant magnetic resistance is not flexible, it is difficult to use in flexible circuit。Patent CN200910105114.1 discloses a kind of carbon nano-tube/polymer composite material with giant magnetoresistance effect, its cardinal principle is to form separate CNT distribution in the polymer, under the action of a magnetic field, there is the CNT of one-dimensional nano structure due to spin-tunnel effect generation quantum tunneling, enable electronics through the insulating polymer CNT, form conductive channel, produce magnetoresistance。This invention is primarily related to one and has giant magnetoresistance effect body material composition, it does not have the preparation method announcing parameter and structure-controllable。The solution etc. of the integration problem of the control of CNT uniformity in practical application, the preparation of graphical sensitive thin film layer, the control of magnetosensitive characteristic parameter, repeatable manufacture and sensor is required for exploring new preparation technology。Given this, based on photoetching and vacuum filter method, form the composite material film preparation method that CNT is distributed and giant magnetoresistance characterisitic parameter is controlled, the Magnetic sensitive films of any accurate shape can not only be formed, and manufacture process has repeatability, provide new method for novel flexible Magnetic Sensor manufacture
Summary of the invention
A kind of method that it is an object of the invention to provide graphical giant magnetoresistance composite material film preparation, utilizes photoetching and vacuum filter method, it is achieved giant magnetoresistive thin film prepare graphical, magnetosensitive parameter is controlled and preparation process is repeatable。
The invention discloses a kind of graphical giant magnetoresistance composite material method for manufacturing thin film, first pass through light to be engraved on Woelm Alumina filter membrane and form required figure, then the method utilizing vacuum filtering carbon nanotube suspension forms graphing carbon nanotube film in template, directly liquid polymer is placed on carbon nano-tube film afterwards, filter membrane is removed after solidification, namely CNT is transferred to polymeric body surface, forms graphing carbon nanotube/polymer composites thin film。
Present invention process is simple, easy to operate。Compared with prior art, achieve the preparation of graphical giant magnetoresistance composite material thin film, by the probability of change carbon nano tube suspension concentration control CNT separate distribution in the composite and spacing to each other, and then adjust material giant magnetoresistance effect characterisitic parameter, meanwhile, whole preparation process has good repeatability。
Accompanying drawing explanation
Fig. 1 is the graphical giant magnetoresistance composite material thin film preparation process schematic diagram of the present invention: (a) carries out photoetching on Woelm Alumina filter membrane, and wherein 1 is photoresist, 2 Woelm Alumina filter membranes；B () vacuum filtering carbon nanotube suspension, wherein 3 carbon nano tube suspension, 4 is vacuum environment；C () forms graphing carbon nanotube film, wherein 5 is carbon nano pipe array；D () forming polymer, wherein 6 is mould, 7 liquid polymers；E () forms giant magnetoresistance composite material, wherein 8 is carbon nano-tube/polymer composite material, and 9 is polymeric matrix。
Fig. 2 is embodiment of the present invention graphic structure, and wherein 10 is CNT/PDMS composite, and 11 is PDMS matrix。
Detailed description of the invention
The specific embodiment of the invention is prepare CNT/dimethyl siloxane (PDMS) figure shown in Fig. 2, and key step includes:
(1) standard photolithography process is utilized to form the figure shown in Fig. 2。
(2) SWCN is placed in dimethylformamide (DMF) solution and within 8 hours, forms the suspension of CNT with the ultrasonic Homogeneous phase mixing that carries out of 80W。Then, as shown in Fig. 1 (b), the method that vacuum filters is utilized not have the graphics field deposition of carbon nanotubes of photoresist。
(3) as shown in Fig. 1 (c), Woelm Alumina filter membrane forms carbon nano-tube film, by the regulable control filtration time to vacuum。
(4) as shown in Figure 1 (d) shows, filter membrane is placed in mould, directly liquid polydimethylsiloxane (PDMS) is placed on carbon nano-tube film, carry out the solidification of 4 hours at 60 c。
(5), after removing mould and filter membrane, namely CNT is transferred to PDMS matrix surface, forms patterned CNT/PDMS composite material film。So, by changing volume or the carbon nanotube concentration of filtering solution, it is possible to obtain have the composite material film of different giant magnetoresistance characterisitic parameter。
Claims (2)
1. a graphical giant magnetoresistance composite material method for manufacturing thin film, it is characterized in that being engraved on Woelm Alumina filter membrane by light forms desirable pattern, then the method utilizing vacuum filtering carbon nanotube suspension forms graphing carbon nanotube array in template, directly liquid polydimethylsiloxane is placed on filter membrane afterwards, filter membrane is removed after solidification, namely CNT is transferred to polymeric body surface, forms graphing carbon nanotube/polymer composites thin film。
2. giant magnetoresistance composite material method for manufacturing thin film as claimed in claim 1, it is characterized in that the probability by changing carbon nano tube suspension concentration or the separate distribution in the composite of carbon nano tube suspension fixing fabric structure CNT and spacing to each other, and then adjust material giant magnetoresistance effect characterisitic parameter。
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| CN201410035813.4A CN103746072B (en) | 2014-01-26 | 2014-01-26 | A kind of graphical giant magnetoresistance composite material method for manufacturing thin film |
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| CN201410035813.4A CN103746072B (en) | 2014-01-26 | 2014-01-26 | A kind of graphical giant magnetoresistance composite material method for manufacturing thin film |
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| CN103746072B true CN103746072B (en) | 2016-06-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108263106A (en) * | 2016-12-30 | 2018-07-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | The graphic method of nano material |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110092349B (en) * | 2018-01-27 | 2022-08-16 | 清华大学 | Preparation method of suspended two-dimensional nano material |
| CN110092351B (en) | 2018-01-27 | 2022-08-16 | 清华大学 | Method for transferring two-dimensional nano material by using carbon nano tube film |
| CN110092350A (en) | 2018-01-27 | 2019-08-06 | 清华大学 | Utilize the method for carbon nano-tube compound film transfer two-dimension nano materials |
| CN112010259B (en) * | 2019-05-31 | 2024-03-29 | 中国科学技术大学 | Method for transferring porous PDMS film in organ chip |
| CN110482528B (en) * | 2019-08-23 | 2022-02-18 | 哈尔滨工业大学 | Preparation method of carbon nanotube/ferroferric oxide composite sponge with negative giant magnetoresistance performance |
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| CN102821554A (en) * | 2012-08-27 | 2012-12-12 | 中国科学院理化技术研究所 | Flexible circuit suction filtration forming method |
| WO2013044094A2 (en) * | 2011-09-21 | 2013-03-28 | Georgia Tech Research Corporation | Methods for reducing thermal resistance of carbon nanotube arrays or sheets |
| CN103482602A (en) * | 2013-09-09 | 2014-01-01 | 中国科学院合肥物质科学研究院 | Carbon nanotube-based biomimetic material with micro-nano branch structure and preparation method for same |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2013044094A2 (en) * | 2011-09-21 | 2013-03-28 | Georgia Tech Research Corporation | Methods for reducing thermal resistance of carbon nanotube arrays or sheets |
| CN102821554A (en) * | 2012-08-27 | 2012-12-12 | 中国科学院理化技术研究所 | Flexible circuit suction filtration forming method |
| CN103482602A (en) * | 2013-09-09 | 2014-01-01 | 中国科学院合肥物质科学研究院 | Carbon nanotube-based biomimetic material with micro-nano branch structure and preparation method for same |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108263106A (en) * | 2016-12-30 | 2018-07-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | The graphic method of nano material |
| CN108263106B (en) * | 2016-12-30 | 2019-07-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | The graphic method of nano material |
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