CN103744178A - Dual-axis rotatable MEMS (micro-electromechanical system) microscope chip - Google Patents
Dual-axis rotatable MEMS (micro-electromechanical system) microscope chip Download PDFInfo
- Publication number
- CN103744178A CN103744178A CN201410000966.5A CN201410000966A CN103744178A CN 103744178 A CN103744178 A CN 103744178A CN 201410000966 A CN201410000966 A CN 201410000966A CN 103744178 A CN103744178 A CN 103744178A
- Authority
- CN
- China
- Prior art keywords
- axis
- broach
- travel
- comb teeth
- ing rest
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention discloses a dual-axis rotatable MEMS (micro-electromechanical system) microscope chip. The middle part of a grounding layer which is arranged above a substrate layer is provided with a cross cavity, a movable support is embedded inside the cross cavity, and a movable platform with a microscope fixed on the middle part is embedded into the movable support; the movable support is connected with the grounding layer through a Y-axis flexible hinge; the movable support is connected with the movable platform through an X-axis flexible hinge; an X-axis comb-tooth electrostatic brake device is arranged on the outer side of the movable support in the X-axis direction; a Y-axis comb-tooth electrostatic brake device is arranged on the inner side of the movable support in the Y-axis direction; both the bottom surfaces of the X-axis comb-tooth electrostatic brake device and the Y-axis comb-tooth electrostatic brake device are fixedly attached to the upper surface of the substrate layer; X-axis movable comb teeth are embedded with X-axis fixed comb teeth on the X-axis comb-tooth electrostatic brake device; Y-axis movable comb teeth are embedded with Y-axis fixed comb teeth on the Y-axis comb-tooth electrostatic brake device. The dual-axis rotatable MEMS microscope chip has the characteristics of simplicity in structure, convenience in control, high stability and high integration degree.
Description
Technical field
The invention belongs to field of micro electromechanical technology, be specifically related to a kind of double-axle rotating MEMS micro mirror chip.
Background technology
MEMS(Micro-Electro-Mechanical-Systerms) be to be applicable to micro-machined material by semiconductor material and other, form controlled mems structure, generally can be by the sensor of electricity, machinery, light (heat or piezoelectricity etc.), actuator and sample of signal and IC are integrated into chip piece system.Compare with conventional mechanical system, MEMS system possesses following advantage: (1) is microminiaturized and integrated: physical dimension is little, is easy to integratedly, and resulting devices size is generally grade.(2) low energy consumption and low cost: adopt integrated technique, energy consumption reduces greatly; And owing to adopting silicon micromachining technology and semiconductor integrated circuit technique, be easy to accomplish scale production, cost is low.(3) high precision and long-life: owing to adopting integrated form, sensor performance is even, each interelement configuration is coordinated, and coupling is good, does not need to proofread and correct to adjust, and has improved reliability.(4) dynamic is good: microminiaturized, quality is little, fast response time, natural frequency are high, has excellent dynamic perfromance.
MEMS micro mirror mainly relies on microdrive to promote movable micro mirror minute surface and rotates or translation, thereby the direction of propagation that changes incident light, can be widely used in the fields such as Wavefront aberration rectification in light exchange, spectrometric instrument, light projection imaging, uranology and the visual science in optical communication.Mems optical switch is that micro mechanical technology is in a new application of optical field.The photoswitch of MEMS fabrication techniques is that physical construction, micro-toucher and micro-optics is integrated on same substrate, and compact conformation, lightweight is easy to be extended to extensive optical cross connect switch matrix.Mems optical switch is considered to the staple product of optical communication network of future generation, and how can allow the more compact structure, weight of mems optical switch lighter, light path switches better effects if, needs the MEMS micro mirror that dependency structure is more simple, integrated level is higher and performance is more stable to realize.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of double-axle rotating MEMS micro mirror chip, its have simple in structure, control convenient, stability and the high feature of integrated level.
For addressing the above problem, the present invention is achieved by the following technical solutions:
A double-axle rotating MEMS micro mirror chip, it is mainly moved broach, X+ axle pad, X-axle pad, Y+ axle pad, Y-axle pad and GND pad and is formed by substrate layer, ground plane, cross-shaped cavity, travel(l)ing rest, movable platform, Y-axis flexible hinge, X-axis flexible hinge, micro mirror, Y-axis comb teeth-shaped electrostatic actuator, Y-axis fixed fingers, X-axis comb teeth-shaped electrostatic actuator, X-axis fixed fingers, the moving broach of y-axis shift, X-axis;
Ground plane is stacked and placed on the top of substrate layer; The middle part of ground plane offers the cross-shaped cavity of up/down perforation, and the oval-shaped travel(l)ing rest of class is embedded in cross-shaped cavity, and movable platform is embedded in travel(l)ing rest; Micro mirror is fixed on the middle part of movable platform, and the center of micro mirror and the center of travel(l)ing rest overlapping;
Travel(l)ing rest major axis two ends respectively reach out to be connected to Y-axis flexible hinge, and the other end of Y-axis flexible hinge is connected with ground plane; Travel(l)ing rest is suspended in cross-shaped cavity by these 2 Y-axis flexible hinges actively; Travel(l)ing rest minor axis two ends respectively extend internally and are connected to X-axis flexible hinge, and the other end of X-axis flexible hinge is connected with movable platform; Movable platform is suspended in travel(l)ing rest by these 2 X-axis flexible hinges actively;
X-axis comb teeth-shaped electrostatic actuator is arranged in the positive negative direction of X-axis in travel(l)ing rest outside, in X-axis comb teeth-shaped electrostatic actuator with X-axis fixed fingers; Y-axis comb teeth-shaped electrostatic actuator is arranged in the positive negative direction of Y-axis of travel(l)ing rest inner side, in Y-axis comb teeth-shaped electrostatic actuator with Y-axis fixed fingers; The bottom surface of X-axis comb teeth-shaped electrostatic actuator and Y-axis comb teeth-shaped electrostatic actuator is all affixed on the upper surface of substrate layer admittedly;
X-axis moves in the positive negative direction of X-axis that broach is arranged on travel(l)ing rest outside, and this X-axis move broach with in X-axis comb teeth-shaped electrostatic actuator with X-axis fixed fingers cooperatively interact and activity nested; The moving broach of y-axis shift is opened in the positive negative direction of Y-axis at movable platform two ends, and the moving broach of this y-axis shift with in Y-axis comb teeth-shaped electrostatic actuator with Y-axis fixed fingers cooperatively interact and activity nested;
X+ axle pad is fixed in the X-axis comb teeth-shaped electrostatic actuator being positioned in X-axis positive dirction, X-axle pad is fixed in the X-axis comb teeth-shaped electrostatic actuator being positioned in X-axis negative direction, Y+ axle pad is fixed in the Y-axis comb teeth-shaped electrostatic actuator being positioned in Y-axis positive dirction, Y-axle pad is fixed in the Y-axis comb teeth-shaped electrostatic actuator being positioned in Y-axis negative direction, and GND pad is fixed on ground plane.
In such scheme, the axis that 2 X-axis move broach is all overlapping with the major axis of travel(l)ing rest, and the axis of 2 moving broach of y-axis shift is all overlapping with the minor axis extended line of travel(l)ing rest.
In such scheme, X-axis move the upper surface of broach and the upper surface of the X-axis fixed fingers that coordinates with it on same level height; The upper surface of the upper surface of the moving broach of y-axis shift and the Y-axis fixed fingers coordinating with it thereof is on same level height.
In such scheme, 2 X-axis move broach and are outer comb structure, and 2 X-axis fixed fingers that match mutually are with it interior comb structure; 2 moving broach of y-axis shift are interior comb structure, and 2 Y-axis fixed fingers that match mutually are with it outer comb structure.
In such scheme, the broach thickness of the fixing comb of X-axis is greater than the broach thickness that X-axis moves broach; The broach thickness of the fixing comb of Y-axis is greater than the broach thickness of the moving broach of y-axis shift.
In such scheme, 2 X-axis flexible hinges and 2 Y-axis flexible hinges are all bicone, are two-end thickness gradually toward middle structure of reducing.
In such scheme, described ground plane is all square sheet, and now travel(l)ing rest major axis and minor axis are overlapping with 2 diagonal line of ground plane respectively.
Compared with prior art, the present invention has following features:
1) quiet electrically driven (operated) comb teeth-shaped actuating structure guarantees the stabilized driving of device.
2) Double rotation axle is positioned on chip diagonal line, reduces chip area, and integrated level is higher.
3) within Y-axis fixed fingers structure is positioned at micro mirror moving part drop shadow spread, can reduce the level of chip, reduce the step of difficulty of processing and minimizing technological process.
4) flexible hinge of twin shaft is biconial structure, has the both sides thickness that successively decreases gradually to centre, can strengthen the connection between fixed part and the movable part of micro mirror, does not affect again the angle of rotation.
5) adopt MEMS processing technology, guarantee the yield rate of processing, can realize batch production.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of double-axle rotating MEMS micro mirror chip.
Fig. 2 is the structural representation that removes a kind of double-axle rotating MEMS micro mirror chip after fixed fingers structure.
Fig. 3 is the structural representation that removes a kind of double-axle rotating MEMS micro mirror chip after GND face and rotatable micro mirror.
Fig. 4 is that a kind of double-axle rotating MEMS micro mirror chip powers up the cut-open view rotating to an angle.
Label wherein: 1, substrate layer; 2, ground plane; 3, cross-shaped cavity; 4, travel(l)ing rest; 5, movable platform; 6, Y-axis flexible hinge; 7, X-axis flexible hinge; 8, micro mirror; 9, Y-axis comb teeth-shaped electrostatic actuator; 10, Y-axis fixed fingers; 11, X-axis comb teeth-shaped electrostatic actuator; 12, X-axis fixed fingers; 13, the moving broach of y-axis shift; 14, X-axis moves broach; 15, X+ axle pad; 16, X-axle pad; 17, Y+ axle pad; 18, Y-axle pad; 19, GND pad.
Embodiment
A kind of double-axle rotating MEMS micro mirror chip, as Figure 1-3, mainly by substrate layer 1, ground plane 2, cross-shaped cavity 3, travel(l)ing rest 4, movable platform 5, Y-axis flexible hinge 6, X-axis flexible hinge 7, micro mirror 8, Y-axis comb teeth-shaped electrostatic actuator 9, Y-axis fixed fingers 10, X-axis comb teeth-shaped electrostatic actuator 11, X-axis fixed fingers 12, the moving broach 13 of y-axis shift, X-axis, move broach 14, X+ axle pad 15, X-axle pad 16, Y+ axle pad 17, Y-axle pad 18 and GND pad 19 and form.
Travel(l)ing rest 4 major axis two ends respectively reach out to be connected to Y-axis flexible hinge 6, and the other end of Y-axis flexible hinge 6 is connected with ground plane 2.Travel(l)ing rest 4 is suspended in cross-shaped cavity 3 actively by these 2 Y-axis flexible hinges 6.Travel(l)ing rest 4 minor axis two ends respectively extend internally and are connected to X-axis flexible hinge 7, and the other end of X-axis flexible hinge 7 is connected with movable platform 5.Movable platform 5 is suspended in travel(l)ing rest 4 actively by these 2 X-axis flexible hinges 7.Rotating shaft when described X-axis flexible hinge 7 and Y-axis flexible hinge 6 are micro mirror 8 generation transmission, therefore the determining positions of X-axis flexible hinge 7 and Y-axis flexible hinge 6 micro mirror 8 traveling comforts, in the present invention, 2 X-axis flexible hinges 7 are located along the same line, 2 Y-axis flexible hinges 6 are located along the same line, and above-mentioned 2 straight lines are perpendicular.In the preferred embodiment of the present invention, 2 X-axis flexible hinges 7 are overlapping with the minor axis of travel(l)ing rest 4, with the pair of horns line overlap of ground plane 2; 2 Y-axis flexible hinges 6 are overlapping, overlapping with another diagonal line of ground plane 2 with the major axis of travel(l)ing rest 4.In addition, 2 X-axis flexible hinges 7 and 2 Y-axis flexible hinges 6 can all be two ends and the consistent short strip shape of interior thickness, but in order to guarantee strength of joint and movable dirigibility, in the preferred embodiment of the present invention, 2 X-axis flexible hinges 7 and 2 Y-axis flexible hinges 6 are all bicone, are two-end thickness gradually toward middle structure of reducing.
X-axis comb teeth-shaped electrostatic actuator 11 is arranged in the positive negative direction of X-axis in travel(l)ing rest 4 outsides, in X-axis comb teeth-shaped electrostatic actuator 11 with X-axis fixed fingers 12.Y-axis comb teeth-shaped electrostatic actuator 9 is arranged in the positive negative direction of Y-axis of travel(l)ing rest 4 inner sides, in Y-axis comb teeth-shaped electrostatic actuator 9 with Y-axis fixed fingers 10.The bottom surface of X-axis comb teeth-shaped electrostatic actuator 11 and Y-axis comb teeth-shaped electrostatic actuator 9 is all affixed on the upper surface of substrate layer 1 admittedly.X-axis moves in the positive negative direction of X-axis that broach 14 is arranged on travel(l)ing rest 4 outsides, and this X-axis move broach 14 with in X-axis comb teeth-shaped electrostatic actuator 11 with X-axis fixed fingers 12 cooperatively interact and movable nested.The moving broach 13 of y-axis shift is opened in the positive negative direction of Y-axis at movable platform 5 two ends, and the moving broach 13 of this y-axis shift with in Y-axis comb teeth-shaped electrostatic actuator 9 with Y-axis fixed fingers 10 cooperatively interact and activity nested.Broach thickness and the broach thickness in fixed fingers on mobile broach can be consistent, but in order to guarantee static intensity of force, in the present invention, broach thin thickness in broach Thickness Ratio fixed fingers on mobile broach, the broach thickness that is the fixing comb of X-axis is greater than the broach thickness that X-axis moves broach 14, and the broach thickness of the fixing comb of Y-axis is greater than the broach thickness of the moving broach 13 of y-axis shift.Described mobile broach matches with the fixed fingers structure matching, and in the present invention, 2 X-axis move broach 14 and are outer comb structure, and 2 the X-axis fixed fingers 12 that match mutually are with it interior comb structure.2 moving broach 13 of y-axis shift are interior comb structure, and 2 the Y-axis fixed fingers 10 that match mutually are with it outer comb structure.Strictly controlled in order to guarantee micro mirror 8 angles of inclination, the axis that 2 X-axis move broach 14 is all overlapping with the major axis of travel(l)ing rest 4, and the axis of 2 moving broach 13 of y-axis shift is all overlapping with the minor axis extended line of travel(l)ing rest 4.Under non-power status, X-axis move the upper surface of broach 14 and the upper surface of the X-axis fixed fingers 12 that coordinates with it on same level height.The upper surface of the upper surface of the moving broach 13 of y-axis shift and the Y-axis fixed fingers 10 coordinating with it thereof is on same level height.That is to say,
Above-mentioned a kind of double-axle rotating MEMS micro mirror chip processes by following steps:
1) glass sheet and soi wafer are carried out to standard cleaning.
2) at SI silicon chip, use oxidation technology at the uniform dielectric film of surface heat growth one deck.
3) corrosion: the corrosion of the bottom surface SI layer after soi wafer etching.
4) bonding: the soi wafer after SI silicon chip and corrosion is bonded together, guarantees the stability of structure.
5) photoetching: mask pattern exposure is transferred on the photoetching offset plate figure of substrate surface.By multilayer photoetching and etching, reach project organization requirement.
6) etching: part silicon etch steps adopts DRIE silicon deep etching technique, the fine structures such as etching broach and flexible hinge.
7) metallization: the metallization process of the electrode pad of micromirror, guarantees the reflectivity of minute surface and the weld strength of pad.
8) scribing: the chip that full wafer wafer is cut into the size of designed size.
Claims (7)
1. a double-axle rotating MEMS micro mirror chip, it is characterized in that: mainly by substrate layer (1), ground plane (2), cross-shaped cavity (3), travel(l)ing rest (4), movable platform (5), Y-axis flexible hinge (6), X-axis flexible hinge (7), micro mirror (8), Y-axis comb teeth-shaped electrostatic actuator (9), Y-axis fixed fingers (10), X-axis comb teeth-shaped electrostatic actuator (11), X-axis fixed fingers (12), y-axis shift moves broach (13), X-axis moves broach (14), X+ axle pad (15), X-axle pad (16), Y+ axle pad (17), Y-axle pad (18) and GND pad (19) form,
Ground plane (2) is stacked and placed on the top of substrate layer (1); The middle part of ground plane (2) offers the cross-shaped cavity (3) of up/down perforation, and the oval-shaped travel(l)ing rest of class (4) is embedded in cross-shaped cavity (3), and movable platform (5) is embedded in travel(l)ing rest (4); Micro mirror (8) is fixed on the middle part of movable platform (5), and the center of the center of micro mirror (8) and travel(l)ing rest (4) is overlapping;
Travel(l)ing rest (4) major axis two ends respectively reach out to be connected to Y-axis flexible hinge (6), and the other end of Y-axis flexible hinge (6) is connected with ground plane (2); Travel(l)ing rest (4) is suspended in cross-shaped cavity (3) actively by these 2 Y-axis flexible hinges (6); Travel(l)ing rest (4) minor axis two ends respectively extend internally and are connected to X-axis flexible hinge (7), and the other end of X-axis flexible hinge (7) is connected with movable platform (5); Movable platform (5) is suspended in travel(l)ing rest (4) actively by these 2 X-axis flexible hinges (7);
X-axis comb teeth-shaped electrostatic actuator (11) is arranged in the positive negative direction of X-axis in travel(l)ing rest (4) outside, and X-axis comb teeth-shaped electrostatic actuator (11) is upper with X-axis fixed fingers (12); Y-axis comb teeth-shaped electrostatic actuator (9) is arranged in the positive negative direction of Y-axis of travel(l)ing rest (4) inner side, and Y-axis comb teeth-shaped electrostatic actuator (9) is upper with Y-axis fixed fingers (10); The bottom surface of X-axis comb teeth-shaped electrostatic actuator (11) and Y-axis comb teeth-shaped electrostatic actuator (9) is all affixed on the upper surface of substrate layer (1) admittedly;
X-axis moves in the positive negative direction of X-axis that broach (14) is arranged on travel(l)ing rest (4) outside, and this X-axis move broach (14) and X-axis comb teeth-shaped electrostatic actuator (11) upper with X-axis fixed fingers (12) cooperatively interact and activity nested; Y-axis shift moves in the positive negative direction of Y-axis that broach (13) is opened in movable platform (5) two ends, and the moving broach (13) of this y-axis shift and Y-axis comb teeth-shaped electrostatic actuator (9) upper with Y-axis fixed fingers (10) cooperatively interact and activity nested;
X+ axle pad (15) is fixed in the X-axis comb teeth-shaped electrostatic actuator (11) being positioned in X-axis positive dirction, X-axle pad (16) is fixed in the X-axis comb teeth-shaped electrostatic actuator (11) being positioned in X-axis negative direction, Y+ axle pad (17) is fixed in the Y-axis comb teeth-shaped electrostatic actuator (9) being positioned in Y-axis positive dirction, it is upper that Y-axle pad (18) is fixed on the Y-axis comb teeth-shaped electrostatic actuator (9) being positioned in Y-axis negative direction, and GND pad (19) is fixed on ground plane (2).
2. a kind of double-axle rotating MEMS micro mirror chip according to claim 1, it is characterized in that: the axis that 2 X-axis move broach (14) is all overlapping with the major axis of travel(l)ing rest (4), the axis of 2 moving broach (13) of y-axis shift is all overlapping with the minor axis extended line of travel(l)ing rest (4).
3. a kind of double-axle rotating MEMS micro mirror chip according to claim 1, is characterized in that: X-axis move the upper surface of broach (14) and the upper surface of the X-axis fixed fingers (12) that coordinates with it on same level height; Y-axis shift move the upper surface of broach (13) and the upper surface of the Y-axis fixed fingers (10) that coordinates with it on same level height.
4. a kind of double-axle rotating MEMS micro mirror chip according to claim 1, is characterized in that: 2 X-axis move broach (14) and are outer comb structure, and 2 the X-axis fixed fingers (12) that match mutually are with it interior comb structure; 2 moving broach (13) of y-axis shift are interior comb structure, and 2 the Y-axis fixed fingers (10) that match mutually are with it outer comb structure.
5. a kind of double-axle rotating MEMS micro mirror chip according to claim 1, is characterized in that: the broach thickness of the fixing comb of X-axis is greater than the broach thickness that X-axis moves broach (14); The broach thickness of the fixing comb of Y-axis is greater than the broach thickness of the moving broach (13) of y-axis shift.
6. a kind of double-axle rotating MEMS micro mirror chip according to claim 1, is characterized in that: 2 X-axis flexible hinges (7) and 2 Y-axis flexible hinges (6) are all bicone, is two-end thickness gradually toward middle structure of reducing.
7. a kind of double-axle rotating MEMS micro mirror chip according to claim 1, is characterized in that: described ground plane (2) is all square sheet, and now travel(l)ing rest (4) major axis and minor axis are overlapping with 2 diagonal line of ground plane (2) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410000966.5A CN103744178A (en) | 2014-01-02 | 2014-01-02 | Dual-axis rotatable MEMS (micro-electromechanical system) microscope chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410000966.5A CN103744178A (en) | 2014-01-02 | 2014-01-02 | Dual-axis rotatable MEMS (micro-electromechanical system) microscope chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103744178A true CN103744178A (en) | 2014-04-23 |
Family
ID=50501210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410000966.5A Pending CN103744178A (en) | 2014-01-02 | 2014-01-02 | Dual-axis rotatable MEMS (micro-electromechanical system) microscope chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103744178A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105607249A (en) * | 2015-12-21 | 2016-05-25 | 西安励德微系统科技有限公司 | Micro-torsion mirror driven by one-side unequal height comb teeth |
| WO2022213770A1 (en) * | 2021-04-09 | 2022-10-13 | 华为技术有限公司 | Electrostatic mems micromirror |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1490240A (en) * | 2002-10-18 | 2004-04-21 | ���ǵ�����ʽ���� | Two-dimensional excitation set and manufacturing method thereof |
| US20100103492A1 (en) * | 2008-10-29 | 2010-04-29 | Kabushiki Kaisha Topcon | MEMS-scanning mirror device and method for manufacturing the same |
| US7872394B1 (en) * | 2001-12-13 | 2011-01-18 | Joseph E Ford | MEMS device with two axes comb drive actuators |
| US20110136283A1 (en) * | 2001-12-13 | 2011-06-09 | Joseph E. Ford | Process for fabricating MEMS devices |
| CN203643683U (en) * | 2014-01-02 | 2014-06-11 | 桂林市光隆光电科技有限公司 | MEMS micro-mirror chip capable of double-axial rotation |
-
2014
- 2014-01-02 CN CN201410000966.5A patent/CN103744178A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7872394B1 (en) * | 2001-12-13 | 2011-01-18 | Joseph E Ford | MEMS device with two axes comb drive actuators |
| US20110136283A1 (en) * | 2001-12-13 | 2011-06-09 | Joseph E. Ford | Process for fabricating MEMS devices |
| CN1490240A (en) * | 2002-10-18 | 2004-04-21 | ���ǵ�����ʽ���� | Two-dimensional excitation set and manufacturing method thereof |
| US20100103492A1 (en) * | 2008-10-29 | 2010-04-29 | Kabushiki Kaisha Topcon | MEMS-scanning mirror device and method for manufacturing the same |
| CN203643683U (en) * | 2014-01-02 | 2014-06-11 | 桂林市光隆光电科技有限公司 | MEMS micro-mirror chip capable of double-axial rotation |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105607249A (en) * | 2015-12-21 | 2016-05-25 | 西安励德微系统科技有限公司 | Micro-torsion mirror driven by one-side unequal height comb teeth |
| CN105607249B (en) * | 2015-12-21 | 2018-06-26 | 西安励德微系统科技有限公司 | A kind of torsional micro-mirror of the not contour pivotal quantity in unilateral side |
| WO2022213770A1 (en) * | 2021-04-09 | 2022-10-13 | 华为技术有限公司 | Electrostatic mems micromirror |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Milanovic et al. | Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications | |
| US7079299B1 (en) | Staggered torsional electrostatic combdrive and method of forming same | |
| TWI411064B (en) | Microelectromechanical system | |
| US7329930B2 (en) | Micromechanical actuator with multiple-plane comb electrodes and methods of making | |
| CN206751385U (en) | MEMS micromirror devices and electric device | |
| US10281718B2 (en) | Scanning MEMS reflector system | |
| JP2006116696A (en) | Two-axis actuator and its manufacturing method | |
| JP2003127100A (en) | Electrostatic actuator | |
| US8816565B2 (en) | Two-dimensional comb-drive actuator and manufacturing method thereof | |
| US7898561B2 (en) | MEMS mirror system for laser printing applications | |
| CN110031966B (en) | Micro mirror and manufacturing method thereof | |
| CN111856430B (en) | Double-layer comb-tooth-driven MEMS scanning mirror for laser radar and preparation method | |
| JP2018041085A (en) | Micromechanical device and method for two-dimensional deflection of light | |
| KR100499146B1 (en) | Optical scanner with curved mirror and manufacturing method thereof | |
| CN203643683U (en) | MEMS micro-mirror chip capable of double-axial rotation | |
| CN103901609A (en) | Movable MEMS large turning angle blazed grating light modulator based on double-layer comb drive | |
| CN103744178A (en) | Dual-axis rotatable MEMS (micro-electromechanical system) microscope chip | |
| CN100570430C (en) | Little level crossing of the variable focal point of static driven and manufacture method thereof | |
| CN114408854A (en) | Two-dimensional micromechanical bidirectional torsion mirror array and manufacturing method thereof | |
| JP2005279863A (en) | Manufacturing method of actuator and actuator | |
| CN113671689A (en) | MEMS rotating mirror structure with large mirror surface | |
| JP3716241B2 (en) | MEMS device and optical attenuator, optical switch, and optical scanner using the same | |
| KR100492772B1 (en) | Scaning mirror with 2 degrees of freedom and manufacturing method thereof | |
| CN221101146U (en) | Micro-electromechanical system mirror device | |
| JP4126308B2 (en) | Electrostatic drive actuator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140423 |