CN103717996B - There is the optical measuring system of filter cell for extracting electromagnetic radiation - Google Patents
There is the optical measuring system of filter cell for extracting electromagnetic radiation Download PDFInfo
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- CN103717996B CN103717996B CN201280037200.3A CN201280037200A CN103717996B CN 103717996 B CN103717996 B CN 103717996B CN 201280037200 A CN201280037200 A CN 201280037200A CN 103717996 B CN103717996 B CN 103717996B
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Abstract
The present invention relates to a kind of coordinate for determining multiple point, specifically for the optical measuring system of range measurement, more specifically, geodetic apparatus, coordinate measuring machine or scanning means.Described measurement system includes: radiation source (52,53), this radiation source has the electromagnetic radiation of transmitting wavelength for launching, with reception unit, this reception unit has filter cell (51), this filter cell for extracting the electromagnetic radiation limited in wave-length coverage according to principle of interference, with detector (56), this detector is by can being arranged by this mode that described detector (56) are detected by means of the described radiation that described filter cell (51) extract.And, described filter cell (51) includes at least two mirror element, described at least two mirror element at least can be partially reflective and construct by multilamellar mode, wherein, described mirror element is oriented generally parallel to each other, and two adjacent mirror elements are at each occurrence around chamber, and relative to each other presses specific range setting, wherein, according to the refractive index in described chamber and optical thickness is limited according to the described distance between described mirror element.It is provided with the optical thickness for changing described optical thickness and changes device, so that changing the wave-length coverage extracted of described filter cell (51), more specifically, wherein said optical thickness changes device and has the actuation means of the position for changing described mirror element, and/or for changing the adjustable refractive index device of the refractive index in described chamber, more specifically, wherein, described optical thickness is continuous variable during operation.
Description
Technical field
The present invention relates to the optical measuring system of coordinate for determining multiple point, this optical measuring system includes radiation source
With the reception unit of the filter cell having for extracting electromagnetic radiation by restriction wave-length coverage, utilize optical measurement system
System uses filter cell to extract electromagnetic radiation, and corresponding method.
Background technology
For measuring an impact point, from ancient times, just there is known many geodetic apparatus.In this case,
Record direction or angle, and generally also to record the distance from measurement apparatus to this impact point, and specifically, one
Play ground and detect the absolute position of this measurement apparatus and datum mark that may be present, as space criteria data.
The well-known example of this geodetic apparatus includes: theodolite, tacheometric pole, total powerstation, and also wraps
Including laser scanner, it is embodied as by land and aerial modification.A kind of geodetic apparatus according to prior art
Such as it is described in publication document EP 1686350.This device has angle based on electrically-sensor, and
And when appropriate, there is the range measurement function permitting determining direction and distance for selected target.In this case,
Angle and distance variable are determined by the internal reference system of this device, and when appropriate, it is necessary to external reference system group
Close, determine carrying out absolute position.
Modern total powerstation has for further digital processing the microprocessor that stores detected measurement data.This device
Be generally of compact and integrated design, wherein, coaxial distance measuring component, also with calculate, control and store singly
Unit is typically found in a device.According to this application, total powerstation is additionally equipped with the locking (targeting) of mechanization
Or aim at (sighting) device, and (retroeflector (such as, omnidirectional's prism) is being used as destination object
In the case of) it is used for the device that automatic target is sought and followed the tracks of.As man-machine interface, total powerstation can have electronical display
Control unit (usually has the microprocessor computing unit of electronic data storage device structure), and it has display and input
Device (such as, keyboard).The measurement data detected by mode based on electrically-sensor is fed to display and controls single
Unit so that may determine that the position of impact point, shows alternately through display control unit and stores.
For aiming at (sighting) or locking the impact point that (targeting) is to be measured, the earth of general type
Measurement apparatus (such as total powerstation) includes telescopic sight (for example, such as optical telescope), as aiming at dress
Put.This telescopic sight generally can be around vertical axis and around the horizontal tilt axis of base portion relative to measurement apparatus
Rotate, so that this telescopic sight can be directed at point to be measured by pivoting and tilt.Modem devices except
Beyond optical viewing channel, it is also possible to have the camera for detecting image, described camera is integrated into collimation telescope
In tool, and the most coaxially or being directed at by parallel mode, wherein, specifically, described detection image can be by
It is expressed as showing on the display of control unit and/or for the display of peripheral unit that remotely controls (for example,
Such as data logger) on real time imaging.In this case, the optical system of this sighting device can have manually
Focusing (such as, for changing the regulation screw of the position of Focused Optical system), or can have auto-focusing,
Wherein, focal position is such as changed by servomotor.By way of example, this in geodetic apparatus
Plant sighting device to be described in EP 2219011.Telescopic sight automatic for geodetic apparatus
Focusing mechanism is such as known according to DE 19710722, DE 19926706 or DE 19949580.And, greatly
The structure of the general telescopic sight of ground measurement apparatus passes through in publication document EP 1081459 or EP 1662278
The mode of example is disclosed.
Owing to course of the beam is combined with usually used as observing passage and be used for measuring both, thus, this
Device needs described course of the beam to use the telescopical structure with special high-accuracy optical system to come with high cost
The Technology design of the mode produced.And, the additional separation of distance-measuring device sends and receives passage and for this
The additional image plane of wavelength can provide for coaxial EDM.
Even if because generally providing 30 times of optical zoom multiplying powers, but destination object (such as, have target label (as
Omnidirectional's prism) plummet bar, it is normally used for geodesic survey purpose) also cannot be enough with naked eyes based on sighting device
Take accurate aim, thus conventional measurement devices had at that time as standard, for the prism as target reflector
Automatic Target Following function (ATR: " automatic target detection ").To this end, another separates ATR light source (such as, light
Fibre coupled laser diode, it such as launches the electromagnetism of the wavelength having in the infra-red range being preferably at 850nm
Radiation), and the most attached to the specific ATR detector (such as, CMOS area sensor) of described wavelength sensitive
It is integrated in telescope with adding.
Under the background of the fine aiming function of ATR, ATR measurement beam is in this case along the optics of sighting device
The direction of guidance axis is launched, and retroreflection at target reflector, and institute's reflected beam is by ATR sensor
Detection.According to optical target axle relative to the deviation of the alignment of prism, in this case, institute's reflected radiation is at ATR
Position of collision on sensor deviates (that is, retroreflection at prism also relative to central sensor regional location
ATR measurement beam pip on ATR area sensor is not positioned at the center of ATR area sensor, and thus,
Do not collide the desired location such as limited based on the calibration as the position corresponding to optical laying axle).
The most this situation, then the alignment of sighting device in such a way, somewhat readjusts with maneuver mode, i.e.
The ATR measurement beam of retroreflection at prism highly precisely collides the sensor region on ATR area sensor
(that is, the horizontal and vertical angle of sighting device changes the most iteratively and adapts to, until the center of pip at center
Till overlapping with the desired location on ATR area sensor).Alternatively, retroreflection ATR measurement beam exists
The residual deviation between the point of impingement and the center of sensor region on ATR area sensor can also be with calculation
Considering, and be converted into angle, it adds the solid detected by means of angle transducer pointed to guidance axis accordingly
Angle.
In addition to the fine aiming function of ATR, Automatic Target Following function can also in a similar manner and utilize phase
There is provided with ATR assembly (such as ATR light source and ATR detector).
Range measurement or the weakening of Automatic Target Following may such as cause because of stray radiation at this, wherein, except
Being limited beyond the radiation of feature by having of radiation emission, another interference radial component can also collide this detector
(for detection by radiation emission and the radiation reflected), and cause measured value to deviate.
Environment or ambient light thus result in being not intended to impact or weakening of measurement apparatus.By means of optical semiconductor sensor
(such as, PSD) or the direction of area sensor (such as, CCD or CMOS) or position measurement can be such as
By the spurious background photo damage of impact detector.This such as causes because the amendment light on sensor is distributed or because of sensor
The change of electronic operation point and the off-centring that induces.
Measurement apparatus including spectrum narrowband radiation source (such as laser diode) is cut by means of suitable in some cases
Stop wave filter or band filter and provide largely suppression and receive the probability of the ambient light on passage.First
First, laser instrument is by the spectral region less than 1nm, with the narrowest band transmission.But, such as laser diode
The laser instrument calculated have the disadvantage that, i.e. its centre wavelength is different from sample to sample；And, most
Transmitting wavelength in semiconductor laser diode depends on operating point (forward current) and chip temperature.
This optical band pass filter being usually arranged as interference filter with detector upstream side has wide spectrum and sets
The effect of meter.But as a result, ambient light cannot most preferably suppress.
This shortcoming is similarly applicable to include that the coordinate of the optical pickocff for measuring multiple coordinate measuring point is surveyed
Amount machine.
Coordinate measuring machine (for Examined effect assembly about their shape and their yardstick) has in this case
Have can in measurement space the moveable measurement head of movement.To this end, as is known, coordinate measuring machine can be by structure
Making as gantry structure or joint arm, by means of it, this measurement head freely can move along three directions (X, Y, Z)
Dynamic, and wherein, measure head position and thus the position on the workpiece by this measurement head optical measurement permissible
Determine continuously and accurately in this measurement space.
And, weakening above-mentioned can be such as generating the noncontacting measurement of the three-dimensional statement on the surface of object
Occur in the case of optical scanner.These scanning means are usually designed to laser scanner, and wherein, transmitting has
Limit the laser emission of wavelength and reflect at this object.By means of detector, wherein, the most exclusive
Ground detection also measures the light with phase co-wavelength, and distance and orientation measurement thus can be performed by a resolved way.?
In this case, laser beam can guide on line wiring ground on a surface.
It is known that the distance-measurement module of the multiple light sources including having different emission, for example, as can be from
DE 19840049 understands.Here, applying according to this measurement, one or the other laser is in same common detector
Place is directed；In this case, the interference filter of receptor upstream side is configured to have the double of two launch windows
Interference filter.This has the shortcoming the most most preferably suppressing ambient light.For spectrally-optically different and in public affairs
Receive altogether at unit for the situation of the multichannel transmitting element of orientation, suppression stray radiation and mutual channel crosstalk
Problem increases along with number of channels.
Prior art discloses at least two method for solving stray radiation problem.First, by wave filter by
The mode receiving optics that is arranged on detector upstream side course of the beam in, i.e. by the row limiting wave-length coverage
Its electromagnetic radiation (the narrowest frequency band) can be passed through this wave filter and collide this detector.As is known,
Wave filter for the purpose has predetermined transmission behavior.And, this radiation source with high expenditure for transmittings wavelength electric
On son and thermally stabilisation, i.e. specifically, by cooling or the heating of this radiation source, and provide constant voltage
With electric current and press limiting temperature operation.This appointment sending and receiving apparatus needs constructivity expenditure and the energy of high level
Consume.
Second method proposes and uses two wave filter, a high pass filter and a low pass filter, wherein,
These wave filter are arranged after another along course of the beam one, and are achieved in relatively good limiting filtering device effect
Really.These wave filter can additionally tilt relative to course of the beam, thus, enables and realizes the change that filter rows is,
And thus change the radiation of incidence.This arrangement such as can be recognized from DE 10121288.This arrangement relevant
The shortcoming of structure is polarity effect occur during this wave filter tilts.
Both solution methods additionally illustrate space-intensive in the high complexity of corresponding measurement apparatus and structure
The shortcoming of structure.In addition, it is desirable to radiation source or the extremely complex control of tiltable wave filter or regulation, purpose exists
In the optimum detection that can guarantee continuously under suitable wavelength.
Summary of the invention
Therefore, it is an object of the present invention to provide a kind of for a system measured, it allows more accurate and more reliable survey
Measure multiple measurement point, and can prop up out with less structure and realize.
The present invention relates to a kind of coordinate for determining multiple point, specifically for the optical measurement system of range measurement
System, more specifically, geodetic apparatus, coordinate measuring machine or scanning means, this optical measuring system includes: spoke
Penetrating source, this radiation source has the electromagnetic radiation of transmitting wavelength for launching, and receives unit, and this reception unit has:
Filter cell, this filter cell is used for extracting, according to principle of interference, the electromagnetic radiation limited in wave-length coverage, and
Detector, this detector is by being examined by described detector by means of the described radiation that described filter cell extracts
This mode surveyed is arranged.And, described filter cell includes at least two mirror element, described at least two mirror
Parts are at least partly reflections and construct by multilamellar mode, and wherein, described mirror element is oriented generally parallel to each other,
And two adjacent mirror elements are at each occurrence around chamber, and relative to each other press specific range setting.At this
In situation, according to the refractive index in described chamber and limit optical thickness according to the described distance between described mirror element.Institute
Stating filter cell and include that optical thickness changes device, this optical thickness changes device and is used for changing described optical thickness,
Thus change the wave-length coverage extracted of described filter cell, more specifically, wherein said optical thickness changes dress
Put the actuation means with the position for changing described mirror element, and/or for changing the described refractive index in described chamber
Adjustable refractive index device, more specifically, wherein, described optical thickness is continuous variable during operation.Institute
State filter cell and thus can be designed as above-mentioned tunable interference filter.
In this case, described optical thickness changes the parts that device composition is following, i.e. by means of these parts, can
To change described optical thickness by aiming mode.In this, actuation means, such as, electrostatic can be here set
Actuator, it can cause the position change of described mirror element, and thus, cause the distance between described mirror to change.
To this end, described actuator such as can press limiting mode deflection by means of control signal.And, described adjustable refractive index
Device such as can have such medium, i.e. the refractive index of this medium can be by means of applying the restriction to this medium
Voltage and change.Described medium such as can be embodied as by gas, liquid or polymer.And, described
Adjustable refractive index device can have control subelement, and the regulation of this control subelement can be used to regulate and change given an account of
The refractive index of matter to induction signal or voltage.
Tunable interference filter is based on dielectric coated mirror, and wherein, at least one described layer can be for described optics
Thickness regulates.Optical thickness is understood as that, it is intended that layer thickness and the product of refractive index.Substantially any contemplate
Spectral filter curve can realize by means of the plural layers coating being made up of electromagnetic transparent material.Simplest can
Tuning interference or band filter are based on fabry-perot filter, and it is again provided with plural layers coating.Transmission
Or reflectivity curve is advantageously according to electro-mechanical adjustment mechanism (for example, such as piezoelectricity, electrostatic or magnetic actuator system)
Change or shift.Can realize according to electrostatic principle with the displacement interfering accuracy；In this case, such as,
The distance between the position of interval body plate or two main reflectors of Fabry-Perot structure can be changed.And, thoroughly
Penetrate or reflectivity curve can change according to the change of described refractive index.
By means of tunable optic filter, can solve as mentioned above to deviate spectral window, can shift or variable transmission wavelength
Or the problem of receptor curve, but the problem also solving multi-wavelength device.Thus, according to the present invention, tunable interference
Wave filter is desirably integrated in optical measuring system, more particularly for distance and orientation measurement.Can described in utilizing
Tuning interference filter, it is desirable to ambient light or exterior light are kept away from corresponding detector unit.Specifically, for bag
For the situation of the device including multiple light source, this have suppression ambient light (such as, from addition to wishing light source its
The light of its all light source) advantage that can realize by the mode being equal to single channel system.
Specifically, this principle may be adapted to laser sensor, such as EDM (range measurement), ATR (automatic target
Point is measured) or power searching (target homing), such as tacheometric pole, total powerstation, laser scanner, laser with
Track instrument or alternatively, for rotary laser or the receptor that controls for building machinery.Sunlight, ambient light or exterior light
Thus can be by means of current (using this function when) optimal tuning interference filter from corresponding receiver
Trip side leaches.Because the transmitting wavelength of laser diode can change from sample to sample, and, its wavelength is permissible
Shift, so spectrum tunable bandpass filters in this case may be used because of temperature and operating point (electric current existed)
To center to the respective wavelength of this laser instrument, with the transmission of optimization wave filter.Exterior light thus can be largely
On stopped by the narrow transmission curve of this tunable optic filter.
More specifically, according to the present invention, described measurement system can include regulating unit, and wherein, described regulation is single
Unit changes device with described optical thickness in such a way and interacts, i.e. described optical thickness, more specifically,
Distance variable between described mirror element or mirror element to be understood to dielectric multilayer parts, more specifically
Ground is said, automatically changes, so that described wave-length coverage of extracting is positioned at around the transmitting wavelength being launched radiation.Thus,
In described measurement system, such as, in total powerstation or laser scanner, the useful wavelength of described wave filter can be by
It is adjusted to so that wavelength to be filtered is corresponding to the wavelength of the described radiation emission actually by described system.
More specifically, according to the present invention, described regulation unit can be by described optical thickness according to described detector
This mode that detection regulates and described optical thickness change device and described detector interacts.By means of this
Regulation, for example, it is possible to change the wave-length coverage of described filter cell continuously so that in all cases it is possible to
The minima of detection radiation at described detector.If in this case, such as, the decline of described radiant intensity is borrowed
Help described detector find out, the distance between the most described dielectric multilayer parts and/or the institute in described wave filter
The refractive index stating chamber can change, and more specifically, wherein, this distance is variable on wide in range distance range, until super
Till going out predetermined minimum value or threshold value.
And, according to the present invention, described optical thickness can be exceeded by the measured value detected by means of described detector
Limit threshold value, more specifically, reach this mode of maximum, and change device by means of described optical thickness and adjust
Joint.The corresponding change of the optical characteristics of the medium in described mirror distance and/or described chamber thus can be for following purpose
Realize, i.e. for respective wavelength or during the drift of respective wavelength, keep described wave filter optimal (
The purpose of extractability greatly).
And, according to the present invention, described extract wave-length coverage can according to represent extract maximum centre wavelength and
Limit according to extracting the margin of tolerance that level Wavelength distribution limits, around described centre wavelength.According to described filtering
The design of device unit, can limit the concrete of described wave filter and change extraction behavior (transmission and/or reflex behavior), its
In, the proportional level of radiation to be extracted can change according to radiation wavelength (extracting level Wavelength distribution), i.e. can carry
The proportional parts taking radiation depends on the respective wavelength of described radiation.
It addition, according to the present invention, described filter cell can be designed to transmissive and maybe can reflect, more specifically,
Wherein, described filter cell can extract the electromagnetic radiation in wave-length coverage described in can realizing at described wave filter
Reflection or this mode of transmission design.
And, in the context of the present invention, can be according to can be by means of described for the extraction wavelength being extracted radiation
Optical thickness changes the change of the described optical thickness that device performs, more specifically, by means of described detector
Measurement derive.Described measurement system thus can additionally allow to determine by means of described filter cell
The wavelength detected on the detector.To this end, such as, the distance between described mirror element is in specific distance range
Changing, this scope is demarcated according to the structural design of described filter cell, or left and right in described distance range
Mobile.Simultaneously, it is achieved by means of the measurement (such as, ionization meter) of described detector, and in all cases
Measured intensity distribution is given the mirror element distance being adjusted.According to the data generated in this case, it may be determined that
There is the maximum of intensity of correlation distance value, and as according to this distance value as a result, it is possible to reduce described wave filter
The wavelength (extraction wavelength) thus limited and detected radiation wavelength.Refractive index for described chamber, it is also possible to
Use similar procedure.In this case, such as, the voltage of described refractive index, described wave filter are determined by change
Absorbance press controlled manner change.
And, according to the present invention, the part by the electromagnetic radiation of described radiation emission can be as reference beam
By beam coupling output (coupling-out) parts coupling output, and reference wavelength can pass through sensor measurement.
In this case, this mode that described optical thickness can be positioned in extracted wave-length coverage by described reference wavelength
Regulate according to measured reference wavelength.This arrangement can allow the corresponding essence launching wavelength of described radiation source
True, continuously determine.Then, this reference wavelength can be used to adjust for described filter cell.Described distance or folding
The rate of penetrating can be by the wave-length coverage extracted thus limiting its centre wavelength and being at least generally correspond with described reference wavelength
This mode and regulate based on this.Thus, the wave-length coverage extracted of described wave filter can be according to described base
Locating tab assembly updates continuously.
And, described detector can be designed as photodiode, CMOS or PSD area sensor, and/
Or described measurement system can include having another at least one another radiation source launching wavelength.
And, according to the present invention, described optical thickness can be by means of the electricity applied to described optical thickness change device
Control signal, preferably voltage regulate, and wherein, described optical thickness can come according to the control signal value applied
Regulation.The regulation of the position of described mirror element or displacement (with transmission or reflection behavior thus) are the most preferably with machine
Electrically realize.To this end, can drive by aiming mode according to the actuator in changing device at described optical thickness
Move, and described mirror can move by means of described actuator.Hope distance between described mirror thus can be passed through
Apply stop voltage or signal specific regulates.It addition, described chamber or medium in described chamber refractive index with
Sample can regulate by applying electric control signal.
According to the present invention, more specifically, described chamber can have optically-variable medium, and this optically-variable medium has
Refractive Index of Material, more specifically, wherein, described medium is embodied as by electroactive polymer, and described
Refractive Index of Material can be by means of described electric control signal, more specifically, presses limiting mode by applying voltage
Change so that described optical thickness is also so that described wave-length coverage of extracting changes.By means of its optical characteristics example
Such as this material that can regulate according to the amplitude of the voltage being present at this material, thus can realize will be for dry
Disturb the transmutability of the described wave-length coverage that wave filter extracts.
More specifically, according to the present invention, described system can include data base, in this data base, stores tool
There are the distance between described mirror element and the allocation table of respective wavelength scope, more specifically, wherein, store and depend on
The described respective wavelength scope of the refractive index in described chamber.
It addition, according to the present invention, described distance and/or the described refractive index in described chamber between described mirror element are permissible
According to regulate by means of the restriction wavelength that described allocation table extracts.
According to the present invention, it addition, in described tables of data, can store for described radiation source be used for determine described
Launch the parametrization of wavelength, and the described refractive index in described distance between described mirror element and/or described chamber is permissible
Regulating according to parameterized parameter, more specifically, parametrization represents the electricity of described transmitting wavelength and described radiation source
Stream and/or the dependency of temperature.
Thus, it is possible, firstly, to the mirror distance thus limited and the distribution that can extract wave-length coverage are stored in described data
In storehouse.Thus, such as can regulate desired wavelength by means of the particular adjustments of the described distance between described mirror element
Or wave-length coverage.Alternatively or it addition, distance between the refractive index in described chamber, described mirror element and described
The relation between wave-length coverage can be extracted can obtain in the database.And, for this purpose, can store
The control signal of corresponding demand, and thus can change desired wavelength model by means of corresponding driving of described wave filter
Enclose.And, be arranged on the described radiation source in described measurement system can in described data base or table parametrization, just
It is to say, stores and allow to set up launched wavelength and the electric current being present at described radiation source and/or described radiation
The distribution of the relation between the temperature in source.The wave-length coverage of described filter cell thus can based on forward current and/
Or source temperature regulates, and it is changed to accommodate described transmitting wavelength.
The invention still further relates to use filter cell in optical measuring system, this optical measuring system includes: at least two
Individual mirror element, described at least two mirror element at least partly can reflect and construct by multilamellar mode, wherein, described mirror
Parts are oriented generally parallel to each other, and two adjacent mirror elements are in all cases around chamber, and relative to one another
Arrange by specific range, and, according to the refractive index in described chamber and according to the described distance limit between described mirror element
Determine optical thickness.And, described filter cell has optical thickness and changes device, and this optical thickness changes device
For changing described optical thickness, so that changing the wave-length coverage extracted of described filter cell, more specifically,
Wherein said optical thickness changes device and has the actuation means of the position for changing described mirror element, and/or is used for
Change the adjustable refractive index device of the described refractive index in described chamber.More specifically, in this case, described optics
Thickness can continuous variable during operation.In this case, described filter cell is at the seat for determining multiple point
Optical measuring system (more specifically, geodetic apparatus, the coordinate of mark (specifically for range measurement)
Measuring machine or scanning means) middle use, to extract the electromagnetic radiation in described restriction wave-length coverage according to principle of interference.
Another aspect of the present invention is to provide a kind of for more specifically, surveys by means of geodetic apparatus, coordinate
Amount machine or scanning means determine the coordinate of multiple point, specifically for the measuring method of range measurement, this measurement
Method comprises the following steps: launches and has the electromagnetic radiation launching wavelength, extracts restriction wavelength model according to principle of interference
Electromagnetic radiation in enclosing, and the described radiation of Detection and Extraction.And, extract described electromagnetic radiation by means of wave filter
Unit realizes, and wherein, described filter cell includes at least two mirror element, and described at least two mirror element is at least
Part can reflect and construct by multilamellar mode, and wherein, described mirror element is oriented generally parallel to each other, and two phases
Adjacent mirror element is in all cases around chamber, and presses specific range setting relative to one another, and, according to described chamber
Refractive index and define optical thickness according to the described distance between described mirror element.Described optical thickness changes,
Result causes, and changes the wave-length coverage extracted of described filter cell so that described transmitting wavelength is positioned at and described can carry
Take in wave-length coverage, more specifically, wherein, change the described position of described mirror element and/or change described refraction
Rate is implemented, and is more specifically realized continuously.
Accompanying drawing explanation
Below, based on the specific illustrative embodiment schematically illustrated in accompanying drawing, the most by way of example,
The system according to the present invention and the method according to the invention are described in more detail, also discuss the further of the present invention
Advantage.More specifically, in the drawings:
Fig. 1 a-b shows the centre wavelength deviation between laser emission and wave filter in all cases；
Fig. 2 shows the spectral characteristic of long pass filter；
The wavelength of radiation that Fig. 3 a-b respectively illustrates the function as temperature and power, that launched by laser diode
Drift；
Fig. 4 a-b shows the first embodiment of tunable interference filter；
Fig. 5 shows the second embodiment of the tunable interference filter with spring；
Fig. 6 shows the typical transmission curves of Fabry-Perot interference filter；
Fig. 7 shows that the dielectric layer for the wave filter with spectrum specific distribution constructs；
Fig. 8 shows the transmission curve of the different tunable interference filter controlled under voltage；
Fig. 9 a-b respectively illustrate in all cases according to the present invention, there is one and two laser beam sources can
The application of tuning interference filter；
Figure 10 shows according to the present invention, the measurement for range measurement such as with tunable interference filter
The optical configuration of device；
Figure 11 show according to the present invention, such as range measurement and the measurement apparatus of orientation measurement (ATR)
Another embodiment of optical configuration；
Figure 12 shows according to the present invention, the application of interference filter for building machinery control.
Detailed description of the invention
Fig. 1 a shows the centre wavelength deviation between laser emission and spectrum narrowband wave filter.In this case,
Curve 11,12 represents the intensity distributions launching laser emission in all cases.If this laser emission collision spectrum
Narrow band interference filter, the most thus can realize the radiation transmission T with specific wavelength.Wave-length coverage 22 is (typically
There is the full width at half maximum (FWHM) under 60nm, 10nm or 1nm (=FWHM)) according to the filtering depending on respective wavelength
The transmission behavior (being represented by curve 21) of device limits, and wherein, central wavelength lambda 3 represents the center of this scope 22.
Commercial laser diodes and narrow band interference filter all have the +/-5nm representative center wavelength offset to +/-10nm.
Curve 11 such as shows the emission spectrum of laser diode at 20 DEG C, and curve 12 shows the transmitting at 50 DEG C
Spectrum.And, this wave filter illustrates the transmission distribution at λ 3 with central homology wavelength.Illustrate respectively swashs
The emission wavelength lambda 1 of optical diode radiation, λ 2 are not up to designed to the transmitted wave of the wave filter of band filter at this
Long scope 22.Therefore, in the current situation, the radiation from laser diode can not be transmitted through this wave filter,
And such as can not be delivered to be arranged on the detector in downstream.And, for the bandwidth purport of the filtering of laser emission
The most narrowly formed, it is therefore intended that largely filter or allow transmission to only exist in and limit reasonably sharply
Light in wave-length coverage (more particularly a, wavelength).
Fig. 1 b shows the spectrum behavior 23 of notch filter.Between Laser emission 11 and the active region of wave filter
Spectrum deviation occurs again.Utilize such wave filter, extracting without the help of limiting wavelength of useful radiation
Transmission but by reflection, there is the light of described wavelength and realize.This notch filter or resistance wave filter are used as
Spectral selection reflector, in order to exclusive useful radiation is transferred to detector.Arrow 24 indicates the effect of wave filter
The displacement of scope, it will cause the reflection of laser emission.After this displacement, the transmitted wave length of this laser emission is in
In the wave-length coverage that notch filter works.
Fig. 2 shows the spectral characteristic 25 of long pass filter.Such wave filter is based on (same, with above-mentioned
Filter type be similar to) multi-beam interference principle.Under the simple scenario of bi-material layers structure, such as, optics is thick
Spend the identical the highest and low-refraction TiO2/SiO2 layer that has, long logical, the short logical or Rotating fields of band elimination filter
Can be substantially made up of dielectric mirror.In the simplest case, the optical thickness of film layer is defined as on value identical,
So that being pi/2 by the phase shift of the partial wave of this layer.The method can be used with combined refractive index, film thickness and design wavelength
NH*lH=nL*lL=λ o/4 expresses, and wherein, λ o represents design wavelength, and nH, nL represent the refraction of bi-material
Rate, and lH, lL represent corresponding membrane thickness.And, H can represent the λ o/4 layer that is made up of high-index material
Optical thickness, and L can represent the corresponding λ o/4 layer being made up of low-index material.This dielectric mirror is also set
It is calculated as Prague (Bragg) reflector.In this case, the displacement in this reflectivity curve can be according to layer thickness
Or the change of refractive index of at least one layer realize.If change two or more layer of distance, then example simultaneously
As the reflected range of notch filter can be shifted or short or that long pass filter is in bigger wave-length coverage spectrum limit
Edge, without greatly changing filter characteristic.The layer order of the dielectric filter being made up of bi-material layers structure is generally
Along with the seriality of layer thickness is specified.There is design wavelength lambda o=that can utilize two scalable layer thickness regulations
The notch filter of 550nm such as can be expressed as follows: [0.3lH, 1lL, 0.6lH, 10.5lL,
(0.6lH,xlL)^2,0.6lH,10.5lL,0.3lH].If " x " is such as adjusted to 10.8 from 9.8, then in notch filter
Cardiac wave length changes over 615nm from 585nm continuously.
There is also the probability of combination long pass filter and short bandpass filter, as it as a result, it is possible to achieve specific wavelength
The transmission of the radiation under scope is extracted.Filtering light under relative narrower wave-length coverage can be by the conjunction of this two classes wave filter
Suitable combination realizes.In this case, an edge of Band Limiting Filter effect is caused by long pass filter, and
Other edge is caused by the second additional filter.Additionally illustrate the spectrum of laser emission 11, its central wavelength lambda 4
Slightly offset relative to the max transmissive ability of wave filter.
Fig. 3 a, Fig. 3 b respectively illustrate in all cases the function as temperature and power, by laser diode
The wave length shift 26 of the radiation launched.In this case, Fig. 3 a shows sending out about semiconductor laser diode
The curve 26 of the intrinsic temperature drift of ejected wave length.For when the semi-conducting material of such as GaAs and InGaP,
The wavelength of laser diode can drift about because of the spectrum change of internal gain distribution, such as, and 0.3nm/ DEG C.It addition,
The centre wavelength of laser diode can change according to the corresponding working condition of production batch, such as, until 0.8%.
Both effects cause such shortcoming, such as, in the device with specified for temperature ranges-30 DEG C to+70 DEG C, and should
The centre wavelength of laser can deviate until +/-20nm.If laser diode excites along with chopping and additionally grasps
Make, then they trend towards having until the multimodes emitting of 3nm.In order to realize receiving filter in previous device
Effectively highly transmissive, therefore, interference filter must have wide transmission curve and (reach the FWHM of 60nm, FWHM
=full width at half maximum (FWHM)).And, semiconductor laser diode can also have the weak wave length shift depending on forward current.
Laser power P can regulate by means of this forward current.This laser power can be used for such as surveying at automatic target
Signal Matching in amount device, wherein, it especially can control the destination object (reflector on cmos sensor
Target) brightness of image.Fig. 3 b exemplified with semiconductor laser diode, for the different merits for this diode
The drift launching wavelength of rate regulation P1, P2, P3, P4.
Fig. 4 a and 4b schematically illustrates the first embodiment of simple tunable interference filter 30, Fig. 4 a
Show the plane graph of this wave filter and Fig. 4 b shows the cross-sectional view of this wave filter.Interference filter 30 can be by
Being configured to Fabry-Perot interferometer, it relates to such structure, i.e. this structure includes being arranged in light school district 35
And each other by two low-losses reflecting mirror 31a, the 31b limiting distance 32 location.In order to realize that there is low optical damage
Mirror 31a, 31b of consumption, that is, not absorbing, they can be designed as vapor deposition dielectric multilayer.
In the simplest case, these mirrors can be made up of the quarter-wave bag of structure (HL) ^q, wherein, and q indicating double-layer
(HL) quantity.The optical thickness of the λ o/4 layer that abbreviation H instruction is made up of high-index material, and L instruction
The corresponding λ o/4 layer being made up of low-index material.Utilize form [(HL) ^q, x*Lair, (HL) ^q] phase shift multiple structure,
Wherein, the two bragg mirror (HL) ^q is separated from one another by chamber, and it can realize the narrowest band transmission filter.
In this case, this chamber can be designed as the air gap 40.In this case, this narrow transmission curve is permissible
Spectrally shift along with the change of air gap width.Specifically, this chamber can be provided with changeable refractive index
Medium.In this embodiment, therefore, additionally can be (such as, logical by means of the change of the refractive index of this medium
Cross applying stop voltage) realize the change of transmission curve.The width (FWHM) of this transmission curve is high according to two
Quantity q of the layer of degree reflexive mirror limits, and FWHM width reduces along with the layer of higher amount.Along with repetition
Multiple Fabry-Perot structure [(HL) ^q, L, (HL) ^q] and different q values, this transmission curve can be adjusted to more
Narrow and more smooth, particularly in transmission range.One exemplary double resonator structure can represent with [(HL) ^q,
x1*Lair,(HL)^q]/(HL)^q,x2*Lair,(HL)^q].For when this structure, it is preferred that in order to
The purpose of wavelength regulation, two interval body x1 and x2 must change simultaneously.
Shown in Fig. 4 a and 4b, regulation and mirror element are formed by means of the air gap 40 for simple Fabry-Perot
The chamber of wave filter.Distance 32 between two mirrors 31a, 31b can be changed by limiting mode, and wave filter 30
Centre wavelength thus can be displaced to shorter or longer wavelength.This interference filter 30 such as can utilize
MEMS technology realizes.Utilizing micromechanical, the miniaturization advantage in this device structure produces together with cost benefit
Can reach.Now, during electric tunable parts 41/42 additionally can be integrated in regulation and mirror element.Have optical
The silicon wafer of energy is for instance suitable as carrier material 33, this material transmissive wavelength more than 1200nm.Glass is brilliant
Sheet (quartz glass) or piezoid are suitable to the wavelength under visible ray or near infrared ray.There is the mirror limiting spectral reflectivity
Layer 31a, 31b are applied to described carrier board 33, wherein, the air gap 40 between two mirrors 31a, 31b or
Specific optical media can form main chamber.It addition, be provided with for by this carrier apply electric control signal or
Regulate or the electrode 43 of command range 32 by applying stop voltage.
Resonance wavelength R of the Fabry-Perot resonator with highly transmissive is positioned at the λ R=2*nc*d/m of position.?
In this case, " nc " is the refractive index of spacer material, and " d " is the distance 32 between two many layer mirrors.This is humorous
The order " m " that shakes is greater than the integer equal to 1 (>=1).Along with the increase of " m ", short transmission peak wavelength thus can be realized.
In order to the bigger tuning range obtained in micromechanics interferometer, specifically, the first order or relatively low can be selected
Order m.As a result, this design may be adapted to many tolerance application.
And, the full width at half maximum (FWHM) (FWHM) of transmission maximum is FWHM=2*nc*d/m2/ F, wherein, " F " generation
The fineness (finesse) in this chamber of table.Owing to technically controlling defect, thus, true transmission maximum is typically smaller than
100%.Specifically, this is because of the surface defect occurred during the regulation of moveable mirror 31a, 31b or plate or displacement
And cause.During movement, the parallel alignment between two mirrors 31a, 31b can stand wedge error；And,
This runner plate by means of spring 36 bigger deflection or bending in the case of can further be strained, this can cause mirror
The deformation of 31a, 31b.Carry out from by zero-bit parallel alignment mirror element 31a, 31b, two mirror elements 31a, 31b
Even if also aiming to be understood in the case of these deformation and/or wedge error be directed at the most generally parallel to each other.Fig. 5
Show the second embodiment of the tunable interference filter with this spring 36.The effective fineness F in chamber by
This can be limited to medium value to high level.Specifically seek the fineness with the value more than 50 for tolerance device.
Fig. 6 shows the typical transmission curves 27 of Fabry-Perot interference filter, wherein, the transmission of this wave filter
Rate T is represented as the function of wavelength X.Here, transmission peak value repeatedly occurs (being respectively directed to ripple on wave length calibration
Long λ c1, λ c2, λ c3), and it is configured to the first approximation close to peak value by Lorentz.It addition, at λ c1
The transmission maximum of neighbouring (the first order) is exemplified with full width at half maximum (FWHM) 28 (FWHM).
Fig. 7 shows that the possible dielectric layer for the tunable optic filter with spectrum specific distribution constructs 37.By
Two relative mirror element 31a, 31b of two Bragg reflector compositions are arranged on substrate 38 in all cases,
And allow to by means of the dielectric layer structure 37 illustrated by amplification mode first low-loss filtering incident illumination 44,
So that the light only limited in wave-length coverage manifests 45 from wave filter.Secondly, the layer structure 37 of specific change allows to
Determine the light to filter or to extract.
Fig. 8 shows and controls voltage (0V-63V) for difference, has condenser type according to the structure according to Fig. 5
The transmission curve 27 of the tunable interference filter (MEMS) of actuator.In this exemplary embodiment, transmission
Window is displaced to more short wavelength along with controlling the increase of voltage, and this is due to the distance in chamber between sequence of layer more than two
Reduce and occur.Along with the voltage increased, therefore, the transmission of this wave filter can become less, such as, because phase
Deviation (wedge error) for flatness and the depth of parallelism can go out in the case of the larger row of reflector panel enters distance
Existing.As a result, the transmission on this fineness and the thus transmission of wave filter or two mirror surfaces can be reduced by the quality of filtering
This mode change, and thus more light is absorbed by this wave filter.
Fig. 9 a, Fig. 9 b respectively illustrate in all cases according to the present invention, there is one and two laser beam sources
The application of tunable interference filter.Fig. 9 a shows the transmitting of the laser diode with main emission wavelength lambda LD
Spectrum 28.And, exemplified with the filtering spectrum 29a of tunable interference filter, wherein, the interference ripple of this wave filter
Length can be regulated by the electric control signal (voltage) that applying limits.In order to can the narrowest and effectively filter
The radiation that ripple or extraction are launched by laser diode, being present in the voltage at wave filter can change in such a way
Become, i.e. the transmission peak value limited by this filter characteristic generally comprises the spectrum 28 of this diode.Should by applying
Voltage, this peak value can shift, so that the centre wavelength of the filtering spectrum 29b of interference filter is the most corresponding
In emission wavelength lambda LD, and thus can realize optimum filtering or transmission.
Fig. 9 b shows emission wavelength lambda LD1 of two laser diodes and λ LD2 and wave filter in all cases
Interference spectrum 29a.Interference spectrum 29a presses light or the light of wavelength X LD2 of filter wavelength λ LD1 in all cases
The displacement 39 of this mode in this case can be again by means of applying or changing voltage and the mirror of wave filter
The change of the gained change of the distance between parts and/or the refractive index in chamber realizes.This application examples of this wave filter
As may be adapted to use two different lasing light emitters together with common reception device.Then, interference spectrum 29a, 29b can root
It is adjusted to corresponding laser wavelength lambda LD1, λ LD2 according to laser emission to be measured.Thus, by two radiation source connection
Close the course of the beam used is arranged tunable interference filter can be used for the first radiation effectively filtering and for
Both the filtering of the second radiation, and therefore, it is intended that about the low constructivity and the expenditure that generate optical component.
Figure 10 show according to the present invention, such as utilizing tunable interference filter 51 to carry out range measurement
The optical configuration 50 of measurement apparatus (more specifically, theodolite, total powerstation or laser scanner),
And, two laser diodes 52,53 are arranged in the apparatus as radiation source, and sends out in all cases
Penetrate characteristic laser emission, and (being launched radiation in this case can be for them to use public course of the beam 54
Wavelength dramatically different).This light is directed on object 55 via mirror, focusing and/or expansion optical unit, more specifically
Ground is said, is directed on reflector, and reflects from this object 55.Reflected light is successively by means of optical configuration 50
Detection, and it is transferred to the spoke being designed to detect both the first laser diode 52 and the second laser diode 53
The detector 56 penetrated.It addition, tunable interference filter 51 is arranged on detector 56 upstream side, wherein, filtering
Device 51 can according to Fig. 4 a, 4b, one of 5 be embodied as.The radiation that wave filter 51 to be passed through extracts can be passed through
The interference spectrum (according to Fig. 9 b) of single change wave filter 51 regulates.In this case, by the side of example
Formula, respective wavelength can obtain for each diode 52,53 under qualifications (such as, temperature, electric current)
Know, and store within the system.Thus setting out, wave filter can cross the spy around these known laser wavelength
Wavelength range, and simultaneously, by means of detector 56, institute's receiving intensity can be measured, and thus can find
Suitable adjustable for measurement processing.Specifically, reference beam in all cases can be according to being launched radiation coupling
Close output, and the wavelength of this beam can be measured continuously by means of another detector.Then, wave filter 51 is permissible
Regulate according to the corresponding wavelength measured.To this end, for example, it is possible to provide allocation table, its foundation can pass through wave filter
51 wavelength extracted and for this purpose relation applied between the voltage of wave filter 51 (or mirror element and folding
Penetrate the distance between rate).And, specifically, continuously, it may be determined that the temperature of generating laser 52,53 and
The electric current existed, and this mode that can filter in a suitable manner by the corresponding radiation launched of wave filter 51 and borrow
Help stored distribution function or table changes.
Figure 11 show according to the present invention, more specifically, including three lasing light emitters 52,53,58 and two
The optical configuration 50 of the measurement apparatus measuring (ATR) for range measurement and automation direction of detector 56,59
Another embodiment, wherein, detector 59 can be designed as PSD, CCD or CMOS, and can be by
For automatization's target following.The radiation launched by laser instrument 52,53,58 is different according to wavelength, and by such as
Under this mode guide, i.e. be used for radiating by public course of the beam 54, and laser beam be at all situations
Under at object 55 reflect.Correspondingly, tunable interference filter 51,57 be successively set on two detectors 56,
The upstream side of 59, in order to filter out incident distributional environment light, and prevent its collision on detector 56,59.By
In the drift behavior of laser diode 52,53,58, thus, wavelength to be filtered can pass through tuning filtering
Distance between the mirror surface of device regulates.This regulation such as can be extracted for the wave filter to be passed through according to Fig. 9 b
Two wavelength or be based solely on the wave length shift according to Fig. 9 a and realize.
Figure 12 shows according to the present invention, the application of scalable interference filter for building machinery control.?
In this case, generating laser 61 is positioned at land, and for receiving connecing of the radiation launched by emitter 61
Receive device 62 to be arranged on building machinery 63.Receptor 62 has tunable interference filter.Thus, example is passed through
Mode, receptor 62 can be by continuously adjusting interference spectrum, specifically, by temperature domination mode change
The drift of transmitting radiation to adapt to, such that it is able to be reliably kept away from environmental radiation.
It is obvious that these diagrammatic illustration are only symbolically exemplified with possible illustrative embodiments.According to the present invention, different
Method equally combination with one another, with for range measurement method and apparatus combine, and with according to prior art
Measurement apparatus combination.
Claims (32)
1., for determining an optical measuring system for the coordinate of multiple point, this optical measuring system includes:
Radiation source (52,53,58), this radiation source for transmitting have transmitting wavelength (λ 1, λ 2, λ 4,
λ LD, λ LD1, λ LD2) electromagnetic radiation, and
Receiving unit, this reception unit has:
Filter cell (51,57), this filter cell is for extracting restriction wavelength according to principle of interference
Electromagnetic radiation in scope (22), and
Detector (56,59), this detector is by carrying by means of described filter cell (51,57)
The described radiation taken can be arranged by this mode that described detector (56,59) are detected,
It is characterized in that,
Described filter cell (51,57) including:
At least two mirror element (31a, 31b), described at least two mirror element be at least partly reflection and by
Multilamellar mode constructs, and wherein, described mirror element (31a, 31b) is oriented generally parallel to each other, and two adjacent mirrors
Parts (31a, 31b) are at each occurrence around chamber (40), and relative to each other press specific range (32)
Arrange, wherein, according to the refractive index of described chamber (40) and according to the institute between described mirror element (31a, 31b)
State distance (32) and limit optical thickness, and
Optical thickness changes device, and this optical thickness changes device and is used for changing described optical thickness, thus changes
The wave-length coverage extracted (22) of described filter cell (51,57).
Optical measuring system the most according to claim 1,
It is characterized in that,
Described measurement system includes regulating unit, and wherein, described regulation unit presses this side that described optical thickness is variable
Formula and described optical thickness change device and interact so that the described transmitting wavelength of the described radiation launched (λ 1, λ 2,
λ 4, λ LD, λ LD1, λ LD2) it is positioned at and described can extract wave-length coverage (22).
Optical measuring system the most according to claim 1,
It is characterized in that,
Described optical measuring system is designed to range measurement.
Optical measuring system the most according to claim 1,
It is characterized in that,
Described optical measuring system is embodied as geodetic apparatus, coordinate measuring machine or scanning means.
Optical measuring system the most according to claim 1,
It is characterized in that,
Described optical thickness changes device and has the actuation means of the position for changing described mirror element (31a, 31b),
And/or it is used for changing the adjustable refractive index device of the described refractive index in described chamber (40).
Optical measuring system the most according to claim 1,
It is characterized in that,
Described optical thickness is continuous variable during operation.
Optical measuring system the most according to claim 2,
It is characterized in that,
Described regulation unit changes device by this mode that described optical thickness is the most variable with described optical thickness
Interact.
Optical measuring system the most according to claim 2,
It is characterized in that,
Described regulation unit and described optical thickness change device and described detector (56,59) interacts so that
Described optical thickness can regulate according to the detection of described detector (56,59).
Optical measuring system the most according to claim 1 and 2,
It is characterized in that,
Described optical thickness can by means of described optical thickness change device regulate so that by described detector (56,
59) measured value detected is beyond limiting threshold value.
Optical measuring system the most according to claim 9,
It is characterized in that,
The measured value detected by described detector (56,59) reaches maximum.
11. optical measuring systems according to claim 1 and 2,
It is characterized in that,
Described wave-length coverage (22) of extracting is according to representing the centre wavelength (λ 3) extracting maximum and according to extracting level
The margin of tolerance that Wavelength distribution limits, around described centre wavelength (λ 3) limits.
12. optical measuring systems according to claim 1 and 2,
It is characterized in that,
Described filter cell (51,57) be designed to transmission or reflection.
13. optical measuring systems according to claim 12,
It is characterized in that,
Described filter cell (51,57) is designed such that described in realization to extract the electromagnetism in wave-length coverage (22)
The reflection of radiation or transmission.
14. optical measuring systems according to claim 1 and 2,
It is characterized in that,
Extraction wavelength for the described radiation extracted can perform according to changing device by means of described optical thickness
The change of described optical thickness derive.
15. optical measuring systems according to claim 14,
It is characterized in that,
The change of described optical thickness can perform by means of the measurement of described detector (56,59).
16. optical measuring systems according to claim 1 and 2,
It is characterized in that,
A part for the described electromagnetic radiation launched by described radiation source (52,53,58) can be coupled defeated by beam
Go out parts coupling to export as reference beam, and reference wavelength can pass through sensor measurement, and described optical thickness
Can regulate according to the described reference wavelength measured so that described reference wavelength is positioned at the described wave-length coverage (22) of extraction
In.
17. optical measuring systems according to claim 1 and 2,
It is characterized in that,
Described detector (56,59) is designed to photodiode, CMOS or PSD area sensor,
And/or, described measurement system includes having another at least one another radiation source launching wavelength.
18. optical measuring systems according to claim 1 and 2,
It is characterized in that,
Described optical thickness can regulate by means of the electric control signal applying to change device to described optical thickness, its
In, described optical thickness can regulate according to the control signal value applied.
19. optical measuring systems according to claim 18,
It is characterized in that,
Described electric control signal includes voltage.
20. optical measuring systems according to claim 18,
It is characterized in that,
Described chamber (40) has optically-variable medium, and this optically-variable medium has Refractive Index of Material.
21. optical measuring systems according to claim 20,
It is characterized in that,
Described medium is realized by electroactive polymer, and described Refractive Index of Material can be believed by means of described electric control
Number change by limiting mode.
22. optical measuring systems according to claim 20,
It is characterized in that,
Described Refractive Index of Material can be changed by limiting mode by applying voltage, thus changes described optical thickness.
23. optical measuring systems according to claim 1 and 2,
It is characterized in that,
Described system includes data base, in this data base, stores and has between described mirror element (31a, 31b)
Distance (32) and the allocation table of respective wavelength scope (22).
24. optical measuring systems according to claim 23,
It is characterized in that,
In the database, the described respective wavelength scope (22) of the refractive index depending on described chamber (40) is stored.
25. optical measuring systems according to claim 23,
It is characterized in that,
Described distance (32) between described mirror element (31a, 31b) and/or the described refraction of described chamber (40)
Rate can be according to regulate by means of the restriction wave-length coverage (22) that described allocation table extracts.
26. optical measuring systems according to claim 23,
It is characterized in that,
In the database, store for described radiation source (52,53,58) be used for determine described transmitted wave
The parametrization of long (λ 1, λ 2, λ 4, λ LD, λ LD1, λ LD2), and described mirror element (31a, 31b) it
Between described distance (32) and/or the described refractive index of described chamber (40) can adjust according to described parameterized parameter
Joint.
27. optical measuring systems according to claim 26,
It is characterized in that,
Described parametrization represents described transmitting wavelength (λ 1, λ 2, λ 4, λ LD, λ LD1, λ LD2) and described radiation
The electric current in source (52,53,58) and/or the dependency of temperature.
28. 1 kinds of measuring methods being used for determining the coordinate of multiple point, this measuring method comprises the following steps:
Transmitting has the electromagnetic radiation of transmitting wavelength (λ 1, λ 2, λ 4, λ LD, λ LD1, λ LD2),
The electromagnetic radiation limited in wave-length coverage (22) is extracted according to principle of interference, and
The described radiation of Detection and Extraction,
It is characterized in that,
Extract described electromagnetic radiation to realize by means of filter cell (51,57), wherein,
Described filter cell (51,57) includes at least two mirror element (31a, 31b), described at least two
Mirror element at least can be partially reflective and construct by multilamellar mode, and wherein, described mirror element (31a, 31b) is the biggest
Cause parallel-oriented, and two adjacent mirror elements (31a, 31b) are at each occurrence around chamber (40), and
Relative to each other press specific range (32) to arrange, wherein, according to the refractive index of described chamber (40) and according to described
Described distance (32) between mirror element (31a, 31b) limits optical thickness, and
Described optical thickness is changed, and result causes, the extracted wavelength model of described filter cell (51,57)
Enclose (22) and be varied so that described transmitting wavelength can extract wave-length coverage (22) described in being positioned at.
29. measuring methods according to claim 28,
It is characterized in that,
Described measuring method is designed to range measurement.
30. measuring methods according to claim 28,
It is characterized in that,
Described measuring method performs by means of geodetic apparatus, coordinate measuring machine or scanning means.
31. measuring methods according to claim 28,
It is characterized in that,
Change the position of described mirror element (31a, 31b) and/or change described refractive index and be implemented.
32. measuring methods according to claim 28,
It is characterized in that,
Change the position of described mirror element (31a, 31b) and/or change described refractive index and be continuously achieved.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP11175392.7 | 2011-07-26 | ||
| EP11175392A EP2551635A1 (en) | 2011-07-26 | 2011-07-26 | Optical measurement system with filter unit for extracting electromagnetic radiation |
| PCT/EP2012/064606 WO2013014190A1 (en) | 2011-07-26 | 2012-07-25 | Optical measuring system with filter unit for extracting electromagnetic radiation |
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| CN103717996A CN103717996A (en) | 2014-04-09 |
| CN103717996B true CN103717996B (en) | 2016-11-30 |
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|---|---|---|---|---|
| EP2120082A1 (en) * | 2007-02-13 | 2009-11-18 | Olympus Corporation | Variable spectral element |
| CN101965498A (en) * | 2008-03-06 | 2011-02-02 | 特里伯耶拿有限公司 | Geodetic apparatus and method for controlling it |
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