CN103698295A - Micro far infrared type gas concentration monitoring method and device - Google Patents
Micro far infrared type gas concentration monitoring method and device Download PDFInfo
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- CN103698295A CN103698295A CN201310718566.3A CN201310718566A CN103698295A CN 103698295 A CN103698295 A CN 103698295A CN 201310718566 A CN201310718566 A CN 201310718566A CN 103698295 A CN103698295 A CN 103698295A
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Abstract
The invention provides a micro far infrared type gas concentration monitoring method and device. According to the device, a dual wavelength infrared monitoring principle is adopted, a reasonable micro structure design is supplemented, a micro focus-free multiple reflection gas chamber is formed; the inner wall of the gas chamber is provided with a reflection film in a plating manner, so that the reflection on infrared light can be improved, enough information can be obtained by an infrared detector to reflect the concentration of monitored gas in a tiny space; a diaphragm and a window film are additionally arranged to converge a far infrared light source, so as to obtain far infrared light needed by measurement; the structure of a filtering net and a waterproof permeable film are adopted for performing filtering and waterproof protection, and the monitoring precision is guaranteed while the gas chamber and optical elements are also protected. The device is provided with data output pins and alarming output pins which can be used for outputting digital signals of the gas concentration and alarming signals of an open collector and is capable of meeting the demand of gas concentration alarming on hazardous occasions.
Description
Technical field
The invention belongs to gas concentration inspect field, be specifically related to a kind of miniature far infrared gas concentration inspect method and device, adopt microstructure, dual wavelength infrared monitoring principle, carry the gas concentration inspect method and the device that are applicable to far infrared band of digital signal processing and temperature compensation.
Background technology
Dual wavelength infrared-gas concentration monitor is one of focus of at present research, possesses following advantage: can measure multiple gases, measurement range is wide, highly sensitive, precision is high, good stability, there is good selectivity, reliability is high, the life-span is long.
Physical dimension requirement in a lot of fields to gas concentration inspect device is comparatively strict, and apparatus of the present invention have clear superiority in many places of installing and apply, and are the targets that developer pursues.At the air chamber structure design aspect of device, the focal reflection air chamber of many employings obtained the multiple reflections of infrared light in air chamber in the past, and infrared eye can be accessed is enough to reflect the signal intensity of tested gas concentration variation.But construct a focal reflection air chamber, need to carry out strict calculating and could obtain by Precision Machining, this has just increased the cost of development of air chamber.Conventionally, will be on small device integrated more complicated digital signal processing circuit, because the restriction in space is more difficult, people have to adopt complicated external circuit exploitation to reflect the concentration of tested gas, and this way has increased the cost of device secondary development.
Gas for uptake zone at far infrared band, is difficult to find suitable light source, by light source is designed, can meet the monitoring of far infrared region gas concentration.
Summary of the invention
The object of the present invention is to provide a kind of miniature far infrared gas concentration inspect method and device.This device adopts dual wavelength infrared monitoring principle, be aided with afocal multiple reflection air chamber of rational microstructure design forming, carry digital signal processing, temperature compensation, and there is digital signal output and OC warning output function, there is the advantages such as monitoring accuracy is high, reliable and stable, meet the needs of the concentration monitor of Far-infrared Absorption district gas.
The technical solution used in the present invention is: a kind of miniature far infrared gas concentration inspect device, and by waterproof ventilated membrane 1, shell 2, screen pack 3, air chamber wall I 4, air chamber wall II 5, air chamber wall III 6, liner 7, circuit board I 8,9,6 circuit pins 10 of circuit board II, far infrared light source 11, binary channels infrared eye 12 forms a whole.Its structure is: waterproof ventilated membrane 1 is close on shell 2, screen pack 3, air chamber wall I 4, air chamber wall II 5, air chamber wall III 6, liner 7, circuit board I 8, circuit board II 9, pack into successively within shell and bonding firmly, 6 circuit pins 10 are welded in circuit board II 9, and stretch out so that with outside being electrically connected to, far infrared light source 11 and binary channels infrared eye 12 are contained in circuit board I 8, and the space perfusion fluid sealant between circuit board I 8 and circuit board II 9 forms sealant 14, and bottom is used cover plate 15 to seal.Far infrared light source 11 is provided with diaphragm 16 and diaphragm 17 on it, by bonding, be fixed and seal, infrared light by diaphragm 17 in the perforate from diaphragm 16 by injecting air chamber.Far infrared light source 11 and binary channels infrared eye 12 are isolated by liner 7, and sending or receive infrared light by the reference light hole 20 in air chamber wall III 6, measurement light hole 21 and light source hole 22, binary channels infrared eye 12 is provided with reference optical filter 18 above and measures optical filter 19.Described reference optical filter 18 and measurement optical filter 19 are spike interference filter, can be by selecting the optical filter of different wave length to measure different gas, air chamber wall I 4, air chamber wall II 5 and air chamber wall III 6 form one without focus multiple reflection air chamber 24, air chamber wall I 4 forms the end face of air chamber, on it, there is air admission hole 23 to allow gas to enter air chamber, air chamber wall II 5 forms the sidewall of air chamber and air chamber space is provided, air chamber wall III 6 forms the bottom surface of air chambers and provides infrared light to enter and penetrate the hole of air chamber, air chamber internal face overgild reflectance coating is to increase reflectivity, the infrared light that far infrared light source 11 sends enters without in focus multiple reflection air chamber 24 by the light source hole 22 in air chamber wall III 6, having respectively reference light hole 20 above and measuring light hole 21 of the reference optical filter 18 of binary channels infrared eye 12 and measurement optical filter 19 forms reference channel and measures passage.Without focus multiple reflection air chamber 24, take up space less, make the space that device bottom is vacated can built-in more complicated signal processing circuit.
In circuit board I 8 and circuit board II 9, comprise the functional circuits such as signal amplification filtering, A/D conversion, data processing, light source driving, circuit board I 8 also comprises a hygrosensor, between two circuit boards, by electronics web member 13, connects each other.Device is equipped with 6 circuit pins 10 and is welded on circuit board II 9 and stretches out, be respectively Vd, GND, TX, RX, OC1, OC2, Vd, GND are to provide the pin of power supply access, TX, RX are the pin of sending and receiving digital signal, can externally export the numerical value of tested gas concentration and write the parameters such as temperature compensation and correction at zero point, OC1, OC2 are the pin of open collector output, pre-alarm and the alerting signal of gas concentration are provided respectively, and pre-alarm value can write according to actual user demand with alarming value after being connected TX, RX pin.
The different gas absorbing wavelength that takes on a different character, the infrared absorption of gas concentration and characteristic wave strong point is obeyed Lamber-beer law, is the theoretical foundation of infrared-gas monitoring.In practical application, the impact changing for fear of environmental factors such as light source ages, often adopts dual wavelength monitoring principle, selects a tested gas characteristic absorbing wavelength as measuring wavelength, another not by the wavelength of gas absorption as reference wavelength, carry out gas-monitoring.
According to above analysis, miniature far infrared gas concentration inspect method is: monitored gas, and through naturally diffusing into this device, through waterproof ventilated membrane 1, remove moisture, then filter through screen pack 3, from air admission hole 23, enter without focus multiple reflection air chamber 24.Without focus multiple reflection air chamber 24, by three parts, formed, air chamber wall I 4, air chamber wall II 5, air chamber wall III 6 forms a miniature space, reflectivity without focus multiple reflection air chamber 24 inside surface overgild reflectance coatings with increase infrared light, far infrared light source 11 sends infrared light by diaphragm 17, via the perforate of diaphragm 16 and the light source hole 22 of air chamber wall III 6, enter without focus multiple reflection air chamber 24, on the gold-plated reflectance coating inside surface without focus multiple reflection air chamber 24, through multiple reflections, arrive on binary channels infrared eye 12 after by tested gas absorption, the reference optical filter 16 of binary channels infrared eye 12 and measurement optical filter 17 are selected respectively the light of corresponding wavelength, output and light intensity have the voltage signal of light, functional circuit in circuit board I 8 and circuit board II 9 changes by the power of analytical voltage signal, obtain reflecting the absorption variables D of gas concentration information, just can obtain gas concentration information external output digit signals.
The measuring error of bringing for fear of temperature, sets up model of temperature compensation, voltage signal variation with temperature relation is compensated, to eliminate this error.The model of temperature compensation of setting up is passed through to gather under different temperatures, reference voltage and measuring voltage variation with temperature situation, and the temperature variant relation of the variables D that is absorbed, adopts fitting of a polynomial to obtain model of temperature compensation.According to set up model of temperature compensation, the real time temperature correction recording in conjunction with hygrosensor absorbs after variables D, by selecting several normal concentration measurement points as calibration point, set up the corresponding relation that absorbs variables D and concentration, adopt look-up table to obtain concrete gas concentration value.According to the needs of actual monitoring, pre-alarm value and the alarming value of setting device, when tested gas concentration surpasses setting value, by two open collector output OC1 and OC2 output pre-alarm or alerting signal.
The advantage that the present invention compares with prior art and technique effect are:
The present invention, by adopting dual wavelength infrared monitoring principle, is aided with rational microstructure design, designs a kind of miniature far infrared gas concentration inspect device.By adding diaphragm and diaphragm to converge far infrared light source, obtain measuring needed far red light.By forming one, without focus multiple reflection air chamber and at the gold-plated reflectance coating of air chamber inwall, increase infrared reflection of light, make infrared eye in small space can obtain enough information to reflect the concentration of tested gas.The structure that adopts screen pack to add waterproof ventilated membrane is filtered, waterproofing protection, when guaranteeing monitoring accuracy, also can protect air chamber and optical element.On device, provide data output pin and warning output pin, externally export gas concentration digital signal and open collector alerting signal, can adapt to the demand that hazardous area gas concentration is reported to the police.
A kind of miniature far infrared gas concentration inspect method of the present invention and device, can monitor multiple gases such as SO2, SF6, be field gas concentration inspect and the requisite gordian techniquies of reporting to the police such as oil, chemical industry, Mineral Engineering, it is applied and will be conducive to promote the safety and the safety that ensures relevant practitioner of these industries.
Accompanying drawing explanation
Fig. 1 is the structural representation of device of the present invention;
Fig. 2 is the part diagram of device of the present invention;
Fig. 3 is the light-source structure schematic diagram of device of the present invention;
Fig. 4 is light source and the detector installation diagram of device of the present invention;
Fig. 5 is the circuit pin schematic diagram of device of the present invention;
Fig. 6 is flow chart of data processing figure of the present invention;
In figure: 1. waterproof ventilated membrane, 2. shell, 3. screen pack, 4. air chamber wall I, 5. air chamber wall II, 6. air chamber wall III, 7. liner, 8. circuit board I, 9. circuit board II, 10.6 circuit pins, 11. far infrared light sources, 12. binary channels infrared eyes, 13. electronics web members, 14. sealants, 15. cover plates, 16. diaphragms, 17. diaphragms, 18. reference optical filters, 19. measure optical filter, 20. reference light holes, 21. measure light hole, 22. light source holes, and 23. air admission holes, 24. without focus multiple reflection air chamber.
Embodiment
Take SO2 and SF6 as example, the structure of the present embodiment as depicted in figs. 1 and 2, by waterproof ventilated membrane 1, shell 2, screen pack 3, air chamber wall I 4, air chamber wall II 5, air chamber wall III 6, liner 7, circuit board I 8, circuit board II 9,6 circuit pins 10, far infrared light source 11, binary channels infrared eye 12 forms a whole.Its structure is: waterproof ventilated membrane 1 is close on shell 2, screen pack 3, air chamber wall I 4, air chamber wall II 5, air chamber wall III 6, liner 7, circuit board I 8, circuit board II 9, pack into successively within shell and bonding firmly, 6 circuit pins 10 are welded in circuit board II 9, and stretch out so that with outside being electrically connected to, far infrared light source 11 and binary channels infrared eye 12 are contained in circuit board I 8, and the space perfusion fluid sealant between circuit board I 8 and circuit board II 9 forms sealant 14, and bottom is used cover plate 15 to seal.Air chamber wall I 4, air chamber wall II 5 and air chamber wall III 6 form one without focus multiple reflection air chamber 24, air chamber wall I 4 forms the end face of air chamber, on it, there is air admission hole 23 to allow gas to enter air chamber, air chamber wall II 5 forms the sidewall of air chamber and air chamber space is provided, air chamber wall III 6 forms the bottom surface of air chambers and provides infrared light to enter and penetrate the hole of air chamber, air chamber internal face overgild reflectance coating is to increase reflectivity, the infrared light that far infrared light source 11 sends enters in air chamber 24 by the light source hole 22 in air chamber wall III 6, having respectively reference light hole 20 above and measuring light hole 21 of the reference optical filter 18 of binary channels infrared eye 12 and measurement optical filter 19 forms reference channel and measures passage.As shown in Figure 3, for the needs of far infrared band monitoring, far infrared light source 11 is provided with diaphragm 16 and diaphragm 17 on it, by bonding, be fixed and sealed, infrared light by diaphragm 17 in the perforate from diaphragm 16 by injecting air chamber, described diaphragm is selected BaF2 diaphragm.As shown in Figure 4, far infrared light source 11 and binary channels infrared eye 12 are isolated by liner 7, and sending or receive infrared light by the reference light hole 20 in air chamber III 6, measurement light hole 21 and light source hole 22, binary channels infrared eye 12 is provided with reference optical filter 18 above and measures optical filter 19.Described reference optical filter 18 and measurement optical filter 19 are spike interference filter, can select for different measurement gas the optical filter of different wave length.Described the measurement optical filter 19 for SF6 gas concentration inspect and reference optical filter 18 are spike interference filter, the centre wavelength of measuring optical filter 19 is 10.55 μ m ± 80nm, half-band width is 90nm ± 20nm, the centre wavelength of reference optical filter 18 is 3.95 μ m ± 40nmm, and half-band width is 90nm ± 20nm; The centre wavelength of the measurement optical filter 19 of selecting for SO2 gas is 7.3 μ m ± 40nm, and half-band width is 200nm ± 30nm, and the centre wavelength of reference optical filter 18 is 3.95 μ m ± 20nm, and half-band width is 90nm ± 20nm.
Less without the shared space of focus multiple reflection air chamber 24, make the space that device bottom vacates can built-in more complicated circuit, in circuit board I 8 and circuit board II 9, comprise the functional circuits such as signal amplification filtering, A/D conversion, data processing, light source driving, circuit board I 8 also comprises a hygrosensor, between two circuit boards, by electronics web member 13, connects each other.Device is equipped with 6 circuit pins 10 and is welded on circuit board II 9 and stretches out, be respectively Vd, GND, TX, RX, OC1, OC2, it distributes as shown in Figure 5, Vd, GND is to provide the pin of power supply access, TX, RX is the pin of sending and receiving digital signal, can externally export the numerical value of tested gas concentration and write the parameters such as temperature compensation and correction at zero point, OC1, OC2 is the pin of open collector output, pre-alarm and the alerting signal of gas concentration are provided respectively, pre-alarm value and alarming value can freely arrange according to actual user demand, connecting TX, after RX pin, write.
During device work, monitored gas, through naturally diffusing into this device, through waterproof ventilated membrane 1, remove moisture, through screen pack 3, filter again, by air admission hole 23, entered without focus multiple reflection air chamber 24, without focus multiple reflection air chamber, by three parts, formed, air chamber wall I 4, air chamber wall II 5, air chamber wall III 6 forms a miniature space, air chamber inwall overgild reflectance coating, the infrared light that far infrared light source 11 sends is through diaphragm 17, by the hole in diaphragm 16 and air chamber wall III 6, enter air chamber, on the gold-plated reflectance coating surface without focus multiple reflection air chamber 24 through multiple reflections by tested gas absorption after by the reference light hole 20 in air chamber wall III 6 with measure light hole 21, arrive the reference optical filter 18 of binary channels detector 12 and measure on optical filter 19, reference optical filter 18 and measurement optical filter 19 are selected respectively the light of corresponding wavelength, output and light intensity have the voltage signal of light, functional circuit in circuit board I 8 and circuit board II 9 changes by the power of analytical voltage signal, obtain reflecting the absorption variables D of gas concentration information, just can obtain gas concentration information external output digit signals.
As shown in Figure 6, the measuring error of bringing for fear of temperature, sets up model of temperature compensation to flow chart of data processing, voltage signal variation with temperature relation is compensated, to eliminate this error.The model of temperature compensation of setting up is passed through to gather under different temperatures, reference voltage and measuring voltage variation with temperature situation, and the relation that the variables D that is absorbed changes with temperature T, adopts fitting of a polynomial to obtain model of temperature compensation:
by the absorption variables D under arbitrary temp T
tstandard value while compensating to 20 ℃ of environment temperatures
according to set up model of temperature compensation, the real time temperature recording in conjunction with hygrosensor, to absorbing variables D
tafter compensating, by selecting several normal concentration measurement points as calibration point, set up the absorption variable after temperature compensation
with the corresponding relation of concentration, adopt look-up table to obtain concrete gas concentration value.According to the needs of actual monitoring, pre-alarm value and the alarming value of setting device, when tested gas concentration surpasses setting value, by two open collector output OC1 and OC2 output pre-alarm or alerting signal, then can provide alerting signal and relevant control by external circuits or software.
The not detailed disclosed part of the present invention belongs to the known technology of this area.
Although above the illustrative embodiment of the present invention is described; so that those skilled in the art understand the present invention; but should be clear; the invention is not restricted to the scope of embodiment; to those skilled in the art; as long as various variations appended claim limit and definite the spirit and scope of the present invention in, these variations are apparent, all utilize innovation and creation that the present invention conceives all at the row of protection.
Claims (2)
1. a miniature far infrared gas concentration inspect device, it is characterized in that: by waterproof ventilated membrane (1), shell (2), screen pack (3), air chamber wall I (4), air chamber wall II (5), air chamber wall III (6), liner (7), circuit board I (8), circuit board II (9), 6 circuit pins (10), far infrared light source (11), binary channels infrared eye (12) forms a whole, its structure is: waterproof ventilated membrane (1) is close on shell (2), screen pack (3), air chamber wall I (4), air chamber wall II (5), air chamber wall III (6), liner (7), circuit board I (8), circuit board II (9), pack into successively within shell also bonding firm, 6 circuit pins (10) are welded in circuit board II (9), and stretch out so that with outside being electrically connected to, far infrared light source (11) and binary channels infrared eye (12) are contained in circuit board I (8), space perfusion fluid sealant between circuit board I (8) and circuit board II (9) forms sealant (14), bottom is used cover plate (15) to seal,
Far infrared light source (11) is provided with diaphragm (16) and diaphragm (17) on it, by bonding, be fixed and seal, infrared light by diaphragm (17) in the perforate from diaphragm (16) by injecting air chamber;
Far infrared light source (11) and binary channels infrared eye (12) are by liner (7) isolation, and send or receive infrared light by the reference light hole (20) in air chamber wall III (6), measurement light hole (21) and light source hole (22), binary channels infrared eye (12) is provided with reference optical filter (18) above and measures optical filter (19), described reference optical filter (18) and measurement optical filter (19) are spike interference filter, can be by selecting the optical filter of different wave length measure different gas;
Air chamber wall I (4), air chamber wall II (5) and air chamber wall III (6) form one without focus multiple reflection air chamber (24), air chamber wall I (4) forms the end face of air chamber, on it, there is air admission hole (23) to allow gas to enter air chamber, air chamber wall II (5) forms the sidewall of air chamber and air chamber space is provided, air chamber wall III (6) forms the bottom surface of air chamber and provides infrared light to enter and penetrate the hole of air chamber, air chamber internal face overgild reflectance coating is to increase reflectivity, the far red light that far infrared light source (11) sends enters without in focus multiple reflection air chamber (24) by the light source hole (22) in air chamber wall III (6), having respectively reference light hole (20) above and measuring light hole (21) of the reference optical filter (18) of binary channels infrared eye (12) and measurement optical filter (19) forms reference channel and measurement passage,
In circuit board I (8) and circuit board II (9), comprise signal amplification filtering, A/D conversion, data processing, the functional circuits such as light source driving, circuit board I (8) also comprises a hygrosensor, between two circuit boards, by electronics web member (13), connect each other, device is equipped with 6 circuit pins (10) and is welded on circuit board II (9) and stretches out, be respectively Vd, GND, TX, RX, OC1, OC2, Vd, GND is to provide the pin of power supply access, TX, RX is the pin of sending and receiving digital signal, can externally export the numerical value of tested gas concentration and write the parameters such as temperature compensation and correction at zero point, OC1, OC2 is the pin of open collector output, pre-alarm and the alerting signal of gas concentration are provided respectively, pre-alarm value can be connected TX with alarming value, after RX pin, according to actual user demand, write.
2. a miniature far infrared gas concentration inspect method, it is characterized in that, monitored gas, through naturally diffusing into this device, through waterproof ventilated membrane (1), remove moisture, passing through screen pack (3) filters again, from air admission hole (23), enter without focus multiple reflection air chamber (24), without focus multiple reflection air chamber (24), by three parts, formed, air chamber wall I (4), air chamber wall II (5), air chamber wall III (6) forms a miniature space, reflectivity without focus multiple reflection air chamber (24) inside surface overgild with increase infrared light, far infrared light source (11) sends infrared light by after the selection of diaphragm (17), via the perforate of diaphragm (16) and the light source hole (22) of air chamber wall III (6), enter air chamber, on the gold-plated inside surface without focus multiple reflection air chamber (24), through multiple reflections, arrive on binary channels infrared eye (12) after by tested gas absorption, the reference optical filter (16) of binary channels infrared eye (12) and measurement optical filter (17) are selected respectively the light of corresponding wavelength, output and light intensity have the voltage signal of light, functional circuit in circuit board I (8) and circuit board II (9) changes by the power of analytical voltage signal, obtain the absorption variables D of a reflection gas concentration, just can obtain gas concentration information external output digit signals,
The measuring error of bringing for fear of temperature, set up model of temperature compensation, voltage signal variation with temperature relation is compensated, to eliminate this error, the model of temperature compensation of setting up is by gathering under different temperatures, reference voltage and measuring voltage variation with temperature situation, the temperature variant relation of the variables D that is absorbed, adopt fitting of a polynomial to obtain model of temperature compensation, according to set up model of temperature compensation, the real time temperature correction recording in conjunction with hygrosensor absorbs after variables D, by selecting several normal concentration measurement points as calibration point, set up the corresponding relation that absorbs variables D and concentration, adopt look-up table to obtain concrete gas concentration value, according to the needs of actual monitoring, set pre-alarm value and alarming value, when tested gas concentration surpasses setting value, by two open collector output OC1 and OC2 output pre-alarm or alerting signal.
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| CN104007081A (en) * | 2014-05-29 | 2014-08-27 | 江苏物联网研究发展中心 | Gas detection device, gas detection system and gas detection method |
| CN104359852A (en) * | 2014-11-25 | 2015-02-18 | 云南无线电有限公司 | CO, CO2 and SO2 three-component infrared integrated gas sensor |
| CN109425512A (en) * | 2017-08-31 | 2019-03-05 | 南京锦冠汽车零部件有限公司 | A kind of infrared sensor detection tail gas sampling gas cell device |
| CN109477792A (en) * | 2016-07-11 | 2019-03-15 | 通用电气健康护理生物科学股份公司 | For measuring in solution the method for the absorptivity of substance and for this measuring device |
| CN109781651A (en) * | 2019-03-04 | 2019-05-21 | 宁波舜宇红外技术有限公司 | A kind of gas detection cell and infrared gas alarm |
| CN110646466A (en) * | 2019-08-30 | 2020-01-03 | 浙江大华技术股份有限公司 | Calibration method, system and equipment of semiconductor type gas sensor |
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| CN203658252U (en) * | 2013-12-20 | 2014-06-18 | 中国科学技术大学 | Miniature far-infrared gas concentration monitoring device |
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| CN104007081A (en) * | 2014-05-29 | 2014-08-27 | 江苏物联网研究发展中心 | Gas detection device, gas detection system and gas detection method |
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| CN109425512A (en) * | 2017-08-31 | 2019-03-05 | 南京锦冠汽车零部件有限公司 | A kind of infrared sensor detection tail gas sampling gas cell device |
| CN109781651A (en) * | 2019-03-04 | 2019-05-21 | 宁波舜宇红外技术有限公司 | A kind of gas detection cell and infrared gas alarm |
| CN110646466A (en) * | 2019-08-30 | 2020-01-03 | 浙江大华技术股份有限公司 | Calibration method, system and equipment of semiconductor type gas sensor |
| CN110646466B (en) * | 2019-08-30 | 2022-04-08 | 浙江大华技术股份有限公司 | Calibration method, system and equipment of semiconductor type gas sensor |
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| CN103698295B (en) | 2016-03-02 |
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