CN103691688B - Single multistage rinse-system of groove and rinse method - Google Patents
Single multistage rinse-system of groove and rinse method Download PDFInfo
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- CN103691688B CN103691688B CN201310686946.3A CN201310686946A CN103691688B CN 103691688 B CN103691688 B CN 103691688B CN 201310686946 A CN201310686946 A CN 201310686946A CN 103691688 B CN103691688 B CN 103691688B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses the multistage rinse-system of a kind of single groove, comprising: PLC control device, rinse bath and multistage connection groove, described rinse bath is communicated with multistage connection groove; Be provided with at least two separate slots in described multistage connection groove, described separate slot is equipped with outlet and entrance; Described rinse bath is connected with inlet pipeline and discharge pipe line respectively by pump, described inlet pipeline respectively with outlet and the fresh water orifice of each separate slot.Multiple continuous print rinse baths on production line, by the setting of multistage connection groove, are reduced into one by the present invention, and layout is more reasonable, decreases the space that production line takies; Workpiece only need put into a rinse bath can complete cleaning, eliminates the action of repeatedly to take out workpiece and to put into rinse bath, saves the operating time; Adopt multistage rinse-system, cleaning fluid recycling rate of waterused is high, and water consumption is few, is beneficial to environmental protection; Waste liquid discharge rate is few, decreases the workload of follow-up water treatment, reduces production cost.
Description
Technical field
The present invention relates to a kind of cleaning equipment, particularly the multistage rinse-system of one list groove and rinse method.
Background technology
On the surface-treatment lines such as plating, application, in order to not affect the operation of subsequent technique, ensureing follow-up processing quality, needing the workpiece to last operation processes to clean.Such as, need the acid solution on workpiece to clean up after pickling process, just can carry out electroplating work procedure; Need the electroplate liquid on workpiece to clean up after electroplating work procedure, just can carry out subsequent processing.
In prior art, need to arrange multiple rinse bath continuously between adjacent process groove, carried out the cleaning of workpiece, to ensure the quality of subsequent technique.This rinse-system that multiple rinse bath is set continuously, multiple rinse bath is all distributed on electroplating assembly line, and irrational layout causes production line long, needs to take a large amount of spaces to arrange rinse bath; Cleaning fluid recycling rate of waterused is lower, and cleaning process needs supplementary a large amount of fresh water, and wastewater discharge is also larger, is unfavorable for environmental protection, and the waste water of a large amount of discharge too increases the treating capacity of subsequent handling, adds production cost; Need in cleaning process repeatedly will be taken out by cleaning workpiece and put into next rinse bath, extend the operating time of matting.
Summary of the invention
(1) technical problem that will solve
The technical problem to be solved in the present invention is: in processes process, needs to clean workpiece, guarantees normally carrying out of subsequent handling; In cleaning workpiece process, how to improve the utilization rate of cleaning fluid, reduce water consumption and wastewater discharge, shorten scavenging period.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides the multistage rinse-system of a kind of single groove, comprising: PLC control device, rinse bath and multistage connection groove, described rinse bath is communicated with multistage connection groove; Be provided with at least two separate slots in described multistage connection groove, described separate slot is equipped with outlet and entrance; Described rinse bath is connected with inlet pipeline and discharge pipe line respectively by pump, described inlet pipeline respectively with outlet and the fresh water orifice of each separate slot; Described discharge pipe line is communicated with the entrance of each separate slot and Sewage treatment station respectively, and the junction of described inlet pipeline and discharge pipe line and the said equipment is equipped with valve; Described pump is all connected with described PLC control device with the control signal of valve.
Described rinse bath is also connected with storage tank, and described storage tank is communicated with discharge pipe line by valve.
Liquid level gauge is equipped with in described separate slot.
Conductivity gauge is provided with in one of them separate slot in described multistage connection groove.
Described valve is pneumatic operated valve or magnetic valve.
Described PLC control device is provided with HMI user-machine interface.
The rinse method of the multistage rinse-system of single groove, all cleaning fluid is filled in separate slot in multistage connection groove, described separate slot is defined as one-level separate slot, secondary separate slot ..., N level separate slot successively according to groove cleaning liquid inside concentration is descending, and wherein, N is the sum of separate slot; Be provided with conductivity gauge in N level separate slot, described rinse method comprises the following steps:
S1: workpiece to be cleaned is put into rinse bath, passes into rinse bath by the cleaning fluid in one-level separate slot and cleans, and the cleaning fluid after cleaning passes into Sewage treatment station;
S2: continue that the cleaning fluid in one-level separate slot is passed into rinse bath and clean, the cleaning fluid after cleaning passes in one-level separate slot, to promote the concentration of one-level separate slot cleaning fluid;
S3: the cleaning fluid in secondary separate slot is passed into rinse bath and cleans, the cleaning fluid after cleaning passes in one-level separate slot, and the liquid level to one-level separate slot rises to setting value;
S4: continue that the cleaning fluid in secondary separate slot is passed into rinse bath and clean, the cleaning fluid after cleaning passes in secondary separate slot;
S5: the order increased according to rank, carries out the operation of shape as step S3, S4 to follow-up separate slot successively; First the cleaning fluid in rear stage separate slot is passed into rinse bath to clean, the cleaning fluid after cleaning passes in the previous stage separate slot of described rear stage separate slot, and the cleaning fluid liquid level to previous stage separate slot rises to setting value; Then continue that the cleaning fluid in described rear stage separate slot is passed into rinse bath to clean, the cleaning fluid after cleaning passes in described rear stage separate slot;
S6: when N level separate slot carry out gestalt as the operation of step S4 after, passed into by fresh water in rinse bath, the cleaning fluid after cleaning replenishes in N level separate slot, and the liquid level to N level separate slot rises to setting value;
S7: stop passing into fresh water, and close the entrance of N level separate slot; Workpiece in rinse bath is sent to subsequent processing, waits for and cleaning next time.
Wherein, when the conductivity gauge in N level separate slot detects that the concentration of cleaning fluid exceeds setting range, extend the scavenging period of step S1, reduce the concentration of separate slot cleaning liquid inside step by step, and then make that the concentration of N level separate slot cleaning liquid inside reduces, electrical conductivity returns in the scope of setting.
In the cleaning operation of some processes, the cleaning fluid after step S1 cleaning can reuse, and passes in storage tank by the cleaning fluid after cleaning in step S1, conveniently supplements online.
(3) beneficial effect
Technique scheme tool has the following advantages: by the setting of multistage connection groove, and the multiple continuous print rinse baths on production line are reduced into one, and layout is more reasonable, decreases the space that production line takies; Workpiece only need put into a rinse bath can complete cleaning, eliminates the action of repeatedly to take out workpiece and to put into rinse bath, saves the operating time; Adopt multistage connection groove, cleaning fluid recycling rate of waterused is high, and water consumption is few, is beneficial to environmental protection; Waste liquid discharge rate is few, decreases the workload of follow-up water treatment, reduces production cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of production line when the multistage rinse-system of single groove specifically uses described in the embodiment of the present invention;
Fig. 2 is the structural representation of the multistage rinse-system of single groove described in the embodiment of the present invention.
Wherein, 1, technology groove one; 2, rinse bath; 3, technology groove two; 4, technology groove three; 5, multistage connection groove; 6, storage tank; 7, valve; 8, separate slot; 9, Sewage treatment station; 10, inlet pipeline; 11, discharge pipe line; 12, conductivity gauge; 13, liquid level gauge; A, fresh water interface.
Detailed description of the invention
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
In Fig. 1, production line is provided with three technology grooves, respectively: technology groove 1, technology groove 23 and technology groove 34, be provided with rinse bath between adjacent process groove.Rinse bath is connected with multistage connection groove by pipeline, or rinse bath is connected with multistage connection groove and storage tank simultaneously, can determine whether to need storage tank according to concrete technology; Rinse bath forms a multistage rinse-system of single groove together with multistage connection groove and PLC control device; PLC control device is provided with HMI user-machine interface, facilitates technical staff to carry out centralized Control and operation by man-machine interface.Hollow arrow in Fig. 1 represents and is plated workpiece moving direction on a production line: cleaned by the rinse bath 2 that cleaning workpiece out enters between technology groove 1 and technology groove 23 afterwards from technology groove 1, enter technology groove 23 after cleaning to process, processed laggard enter rinse bath 2 between technology groove 23 and technology groove 34 clean, enter technology groove 34 after cleaning and process.
Fig. 2 is the annexation schematic diagram of the multistage rinse-system of whole single groove, and the water inlet of rinse bath 2 is connected with inlet pipeline 10, and inlet pipeline 10 is connected with pump; The delivery port of rinse bath 2 is connected with discharge pipe line 11, and discharge pipe line 11 is also connected with pump.Be provided with at least two separate separate slots 8 in multistage connection groove 5, the concentration of each separate slot 8 cleaning liquid inside is all not identical; Separate slot 8 is defined as one-level separate slot 8, secondary separate slot 8 ..., N level separate slot 8 successively according to groove cleaning liquid inside concentration is descending, and wherein, N is the sum of separate slot; Each separate slot 8 is equipped with entrance and exit, and the entrance of separate slot 8 is all communicated with discharge pipe line 11 by valve 7, and the outlet of separate slot 8 is all communicated with inlet pipeline 10 by valve 7; Inlet pipeline 10 is also connected with fresh water interface A, and fresh water refers to the pure water or running water selected according to process requirements, and discharge pipe line 11 is also connected with storage tank 6 and Sewage treatment station 9 respectively by valve 7.Be equipped with in each separate slot 8 in liquid level gauge 13, N level separate slot 8 and be also provided with conductivity gauge 12; The measurement data of the control signal of said pump and valve 7 and liquid level gauge 13, conductivity gauge 12 is all connected to PLC control device.Hollow arrow in Fig. 2 represents the flow direction of liquid in pipeline.
The preferred electromagnetic pump of foregoing pump or air driven pump, valve 7 is pneumatic operated valve or magnetic valve preferably, and the cleaning way in rinse bath 2 can adopt fountain, embathe formula or other cleaning ways.
Embodiment one
The multistage rinse-system of single groove, comprise PLC control device, storage tank 6, multistage connection groove 5 and arrange rinse bath 2 on a production line, the nozzle of rinse bath 2 is connected with inlet pipeline 10, inlet pipeline 10 is connected with an electromagnetic pump; The delivery port of rinse bath 2 is connected with discharge pipe line 11, discharge pipe line 11 is connected with an electromagnetic pump.Be provided with two separate one-level separate slots 8 and secondary separate slot 8 in multistage connection groove 5, the concentration of lotion of one-level separate slot 8 is greater than the concentration of lotion of secondary separate slot 8; Two separate slots 8 are equipped with entrance and exit, and the entrance of separate slot 8 is all communicated with discharge pipe line 11 by magnetic valve, and the outlet of separate slot 8 is all communicated with inlet pipeline 10 by magnetic valve, be equipped with liquid level gauge 13, be also provided with conductivity gauge 12 in secondary separate slot 8 in two separate slots 8; Inlet pipeline 10 is also communicated with fresh water interface A, and fresh water refers to the pure water or running water selected according to process requirements; Discharge pipe line 11 is also connected with storage tank 6 and Sewage treatment station 9 respectively by magnetic valve.The measurement data of the control signal of above-mentioned magnetic valve and electromagnetic pump and liquid level gauge 13, conductivity gauge 12 all transfers to PLC control device; PLC control device is also provided with HMI user-machine interface.
The rinse method utilizing this equipment to carry out comprises the following steps:
S1: after being entered rinse bath 2 by cleaning part, the two pumps that PLC control device is opened the outlet solenoid valve of one-level separate slot 8 in multistage connection groove 5, the magnetic valve between discharge pipe line 11 with Sewage treatment station 9 and is connected with rinse bath 2, cleaning fluid in one-level separate slot 8 enters rinse bath 2, start cleaning, the waste liquid after cleaning enters Sewage treatment station 9 by drainpipe; Most of acid solution that workpiece carries or electrolyte can be drained by this process, prevent from, because a large amount of acid solution or electrolyte enter multistage connection groove 5, the concentration of cleaning fluid being risen overally, and this result must cause fresh water consumption to increase, and need to avoid occurring as far as possible;
S2:PLC control device cuts out the magnetic valve at Sewage treatment station 9, opens the inlet solenoid valve of one-level separate slot 8; Now the entrance and exit magnetic valve of one-level separate slot 8 is opened simultaneously, and the cleaning fluid after cleaning flows back to again in one-level separate slot 8; This operation, for bringing in first-stage tank by the acid solution that workpiece in rinse bath 2 carries or electrolyte, improves the concentration of lotion of first-stage tank;
The outlet solenoid valve of secondary separate slot 8 opened by S3:PLC control device, closes the outlet solenoid valve of one-level separate slot 8, cleans to liquid level gauge 13 and measures the liquid level of one-level separate slot 8 to setting value; In this process, in secondary separate slot 8, the cleaning fluid of low concentration is by adding in one-level separate slot 8 after rinse bath 2, and the cleaning fluid in first-stage tank returns to the volume before close to cleaning and concentration gradually;
S4:PLC control device controls the inlet solenoid valve of cutting out one-level separate slot 8, opens the inlet solenoid valve of secondary separate slot 8, cleaning a period of time;
S5:PLC control device controls the outlet solenoid valve of cutting out secondary separate slot 8, opens the magnetic valve between inlet pipeline 10 and fresh water interface A, cleans the liquid level arrival setting value to secondary separate slot 8;
S6:PLC control device cuts out the inlet solenoid valve of secondary separate slot 8, and closes the magnetic valve at fresh water interface A place, and the workpiece in rinse bath 2 is sent to subsequent processing, waits for and cleaning next time.
In cleaning process, the electrical conductivity of cleaning fluid measured in real time by conductivity gauge 12 in secondary separate slot 8, when measured value reaches setting value, PLC control device controls to increase the scavenging period of step S1 in cleaning next time, the cleaning fluid that in increase one-level separate slot 8, concentration is higher enters the amount at Sewage treatment station 9, cleaning fluid in secondary separate slot 8 is added in one-level separate slot 8, then the operation of step S5 is utilized to pass in secondary separate slot 8 by first time through the fresh water of rinse bath 2, reduce the concentration of two separate slot 8 cleaning liquid insides simultaneously, the electrical conductivity of secondary separate slot 8 cleaning liquid inside is made to return to normal range (NR).
Should be understood that, in this embodiment, the scavenging period that when scavenging period in step S1, S2, S4, secondary separate slot 8 cleaning fluid electrical conductivity are too high, step S1 increases, the data such as setting value of liquid level gauge 13 and conductivity gauge 12 in separate slot 8, need to determine according to the design parameter of concrete technology requirement and field apparatus.If condition is convenient, the flushing dose of rate-determining steps S1 also can be carried out by the mode of statistics cleaning fluid consumption.
Embodiment two
The difference of this embodiment and embodiment one is: separate slot 8 in multistage connection groove 5 number changes three into, and valve 7 adopts pneumatic operated valve, and air driven pump selected by the pump on inlet pipeline 10 and discharge pipe line 11, and all the other structures are identical with embodiment one.
The rinse method utilizing this equipment to carry out comprises the following steps:
S1: after being entered rinse bath 2 by cleaning part, two air driven pumps that PLC control device is opened the outlet pneumatic operated valve of one-level separate slot 8 in multistage connection groove 5, the pneumatic operated valve between discharge pipe line 11 with Sewage treatment station 9 and is connected with rinse bath 2, cleaning fluid in one-level separate slot 8 enters rinse bath 2, start cleaning, the waste liquid after cleaning enters Sewage treatment station 9 by drainpipe;
S2:PLC control device cuts out the pneumatic operated valve at Sewage treatment station 9, and open the inlet pneumatic valve of one-level separate slot 8, now the entrance and exit pneumatic operated valve of one-level separate slot 8 is opened simultaneously, and the cleaning fluid after cleaning flows back to again in one-level separate slot 8.
The outlet pneumatic operated valve of secondary separate slot 8 opened by S3:PLC control device, closes the outlet pneumatic operated valve of one-level separate slot 8, cleans liquid level to one-level separate slot 8 to setting value; In this process, the cleaning fluid in secondary separate slot 8 flows into one-level separate slot 8 by rinse bath, supplements the cleaning fluid in one-level separate slot 8;
S4:PLC control device controls the inlet pneumatic valve of cutting out one-level separate slot 8, opens the inlet pneumatic valve of secondary separate slot 8;
S5:PLC control device controls the outlet pneumatic operated valve of cutting out secondary separate slot 8, opens the pneumatic operated valve between inlet pipeline 10 and fresh water interface A, cleans the liquid level arrival setting value to secondary separate slot 8;
S6:PLC control device controls the inlet pneumatic valve of cutting out secondary separate slot 8, opens the inlet pneumatic valve of three grades of separate slots 8;
S7:PLC control device controls the outlet pneumatic operated valve of cut out three grades of separate slots 8, opens the pneumatic operated valve between inlet pipeline 10 and fresh water interface A, cleans the liquid level arrival setting value to three grades of separate slots 8;
S8:PLC control device cuts out the inlet pneumatic valve at three grades of separate slots 8 and fresh water interface A place, and the workpiece in rinse bath 2 is sent to subsequent processing, waits for and cleaning next time.
In cleaning process, the electrical conductivity of cleaning fluid measured in real time by conductivity gauge 12 in three grades of separate slots 8, when measured value reaches setting value, PLC control device controls to increase the flushing dose of step S1 in cleaning next time, cleaning fluid higher for concentration in one-level separate slot 8 is entered Sewage treatment station 9, cleaning fluid in secondary separate slot 8 is added in one-level separate slot 8, cleaning fluid in three grades of separate slots 8 adds in secondary separate slot 8, then utilize the operation of step S7 to enter clearly in three grades of separate slots 8 by first time through the fresh water of rinse bath 2, reduce the electrical conductivity of three grades of separate slots 8.
Should be understood that, in this embodiment, the scavenging period that when electrical conductivity of cleaning fluid is too high in scavenging period in step S1, S2, S4, S6, three grades of separate slots 8, step S1 increases, the data such as setting value of liquid level gauge 13 and conductivity gauge 12 in separate slot 8, all need to determine according to the design parameter of concrete technology requirement and field apparatus.Certainly, if condition is convenient, the flushing dose of rate-determining steps S1 also can be carried out by the mode of statistics cleaning fluid consumption.
Embodiment three
This embodiment and embodiment two use the identical multistage rinse-system of single groove.
The rinse method utilizing this equipment to carry out comprises the following steps:
S1: after being entered rinse bath 2 by cleaning part, two air driven pumps that PLC control device is opened the outlet pneumatic operated valve of one-level separate slot 8 in multistage connection groove 5, the pneumatic operated valve between discharge pipe line 11 with Sewage treatment station 9 and is connected with rinse bath 2, cleaning fluid in one-level separate slot 8 enters rinse bath 2, start cleaning, the waste liquid after cleaning enters storage tank 6 by drainpipe;
S2:PLC control device cuts out the pneumatic operated valve at Sewage treatment station 9, and open the inlet pneumatic valve of one-level separate slot 8, now the entrance and exit pneumatic operated valve of one-level separate slot 8 is opened simultaneously, and the cleaning fluid after cleaning flows back to again in one-level separate slot 8.
The outlet pneumatic operated valve of secondary separate slot 8 opened by S3:PLC control device, closes the outlet pneumatic operated valve of one-level separate slot 8, cleans liquid level to one-level separate slot 8 to setting value; In this process, the cleaning fluid in secondary separate slot 8 flows into one-level separate slot 8 by rinse bath, supplements the cleaning fluid in one-level separate slot 8;
S4:PLC control device controls the inlet pneumatic valve of cutting out one-level separate slot 8, opens the inlet pneumatic valve of secondary separate slot 8;
S5:PLC control device controls the outlet pneumatic operated valve of cutting out secondary separate slot 8, opens the pneumatic operated valve between inlet pipeline 10 and fresh water interface A, cleans the liquid level arrival setting value to secondary separate slot 8;
S6:PLC control device controls the inlet pneumatic valve of cutting out secondary separate slot 8, opens the inlet pneumatic valve of three grades of separate slots 8;
S7:PLC control device controls the outlet pneumatic operated valve of cut out three grades of separate slots 8, opens the pneumatic operated valve between inlet pipeline 10 and fresh water interface A, cleans the liquid level arrival setting value to three grades of separate slots 8;
S8:PLC control device cuts out the inlet pneumatic valve at three grades of separate slots 8 and fresh water interface A place, and the workpiece in rinse bath 2 is sent to subsequent processing, waits for and cleaning next time.
In cleaning process, the electrical conductivity of cleaning fluid measured in real time by conductivity gauge 12 in three grades of separate slots 8, when measured value reaches setting value, PLC control device controls to increase the flushing dose of step S1 in cleaning next time, cleaning fluid higher for concentration in one-level separate slot 8 is entered Sewage treatment station 9, cleaning fluid in secondary separate slot 8 is added in one-level separate slot 8, cleaning fluid in three grades of separate slots 8 adds in secondary separate slot 8, then utilize the operation of step S7 to enter clearly in three grades of separate slots 8 by first time through the fresh water of rinse bath 2, reduce the electrical conductivity of three grades of separate slots 8.
Because in some processes, the cleaning fluid after cleaning can also be reused, so enter in storage tank 6 by the cleaning fluid after cleaning in step S1, conveniently supplements online intrasystem cleaning fluid.
Should be understood that, in this embodiment, the scavenging period that when electrical conductivity of cleaning fluid is too high in scavenging period in step S1, S2, S4, S6, three grades of separate slots 8, step S1 increases, the data such as setting value of liquid level gauge 13 and conductivity gauge 12 in separate slot 8, all need to determine according to the design parameter of concrete technology requirement and field apparatus.Certainly, if condition is convenient, the flushing dose of rate-determining steps S1 also can be carried out by the mode of statistics cleaning fluid consumption.
As can be seen from the above embodiments, the multiple continuous print rinse baths 2 on production line, by the setting of multistage connection groove 5, are reduced into one by the present invention, and layout is more reasonable, the length decreasing production line and the space taken; Workpiece only need put into a rinse bath 2 can complete cleaning between two-step, eliminates the operation of repeatedly to take out workpiece and to put into rinse bath 2, saves the operating time; Adopt multistage connection groove 5, cleaning fluid recycling rate of waterused is high, and water consumption is few, is beneficial to environmental protection; Waste liquid discharge rate is few, decreases the workload of follow-up water treatment, reduces production cost.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and replacement, these improve and replace and also should be considered as protection scope of the present invention.
Claims (3)
1. the rinse method of the multistage rinse-system of single groove, all cleaning fluid is filled in separate slot in multistage connection groove, described separate slot is defined as one-level separate slot, secondary separate slot ..., N level separate slot successively according to groove cleaning liquid inside concentration is descending, and wherein, N is the sum of separate slot; Be provided with conductivity gauge in N level separate slot, described rinse method comprises the following steps:
S1: workpiece to be cleaned is put into rinse bath, passes into rinse bath by the cleaning fluid in one-level separate slot and cleans, and the cleaning fluid after cleaning passes into Sewage treatment station;
S2: continue that the cleaning fluid in one-level separate slot is passed into rinse bath and clean, the cleaning fluid after cleaning passes in one-level separate slot, to promote the concentration of one-level separate slot cleaning fluid;
S3: the cleaning fluid in secondary separate slot is passed into rinse bath and cleans, the cleaning fluid after cleaning passes in one-level separate slot, and the liquid level to one-level separate slot rises to setting value;
S4: continue that the cleaning fluid in secondary separate slot is passed into rinse bath and clean, the cleaning fluid after cleaning passes in secondary separate slot;
S5: the order increased according to rank, carries out the operation of shape as step S3, S4 to follow-up separate slot successively; First the cleaning fluid in rear stage separate slot is passed into rinse bath to clean, the cleaning fluid after cleaning passes in the previous stage separate slot of described rear stage separate slot, and the cleaning fluid liquid level to previous stage separate slot rises to setting value; Then continue that the cleaning fluid in described rear stage separate slot is passed into rinse bath to clean, the cleaning fluid after cleaning passes in described rear stage separate slot;
S6: when N level separate slot carry out gestalt as the operation of step S4 after, passed into by fresh water in rinse bath, the cleaning fluid after cleaning replenishes in N level separate slot, and the liquid level to N level separate slot rises to setting value; And
S7: stop passing into fresh water, and close the entrance of N level separate slot; Workpiece in rinse bath is sent to subsequent processing, waits for and cleaning next time.
2. the rinse method of the multistage rinse-system of single groove as claimed in claim 1, is characterized in that, in the cleaning operation of some processes, passes in storage tank by the cleaning fluid after cleaning in step S1, conveniently supplements online.
3. the rinse method of the multistage rinse-system of single groove as described in one of claim 1 or 2, it is characterized in that, when the conductivity gauge in N level separate slot detects that the concentration of cleaning fluid exceeds setting range, extend the scavenging period of step S1, reduce the concentration of separate slot cleaning liquid inside step by step, and then make that the concentration of N level separate slot cleaning liquid inside reduces, electrical conductivity returns in the scope of setting.
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| CN201310686946.3A CN103691688B (en) | 2013-12-13 | 2013-12-13 | Single multistage rinse-system of groove and rinse method |
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| CN201310686946.3A CN103691688B (en) | 2013-12-13 | 2013-12-13 | Single multistage rinse-system of groove and rinse method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS51133966A (en) * | 1975-05-15 | 1976-11-20 | Kawamoto Kogyo Kk | Multistage washing device |
| FR2772276B1 (en) * | 1997-12-12 | 2000-03-17 | Armand Bortoluzzi | PROCESS FOR THE CONTINUOUS TREATMENT OF STAINED AND / OR CONTAMINATED LIQUID RELEASES WITH MICROORGANISMS AND / OR BIOLOGICALLY ACTIVE SUBSTANCES AND INSTALLATION FOR IMPLEMENTING SAME |
| CN201280482Y (en) * | 2008-08-21 | 2009-07-29 | 惠州市雄越保环科技有限公司 | Automatic water purifier |
| CN201428162Y (en) * | 2009-07-24 | 2010-03-24 | 董晓凯 | Energy-saving and emission-reducing sewage clarifying circulating device |
| CN202823983U (en) * | 2012-08-08 | 2013-03-27 | 晶海洋半导体材料（东海）有限公司 | Multi-tank circulating silicon wafer cleaning machine |
| CN203610347U (en) * | 2013-12-13 | 2014-05-28 | 北京天正通表面工程技术有限公司 | Single-groove multi-stage bleaching system |
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Effective date of registration: 20180620 Address after: 056001 east side of Huaxiang Road, Langfang Development Zone, Langfang, Hebei Patentee after: Langfang Tian Zheng Tong automation equipment Co., Ltd. Address before: 100089 Beijing Haidian District Zizhu Road 81 hospital 10 place B 801 seat 801 Patentee before: BEIJING TIANZHENGTONG SURFACE ENGINEERING TECHNOLOGY CO., LTD. |