CN103668083B - Chiller and vacuum evaporation equipment - Google Patents
Chiller and vacuum evaporation equipment Download PDFInfo
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- CN103668083B CN103668083B CN201310684824.0A CN201310684824A CN103668083B CN 103668083 B CN103668083 B CN 103668083B CN 201310684824 A CN201310684824 A CN 201310684824A CN 103668083 B CN103668083 B CN 103668083B
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- cooling
- chiller
- evaporation
- vacuum evaporation
- vacuum
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Abstract
The embodiment of the invention discloses a kind of chiller and vacuum evaporation equipment, the cooling procedure of vacuum evaporation equipment evaporation source can be accelerated, reduce vacuum evaporation equipment cooling required time, be effectively improved the service efficiency of vacuum evaporation equipment.The chiller of the embodiment of the present invention, for the evaporation source of cooling vacuum evaporated device, chiller includes: several cooling units；Driver element, is used for driving cooling unit to be coated with evaporation source；Being arranged at the cooling tube within cooling unit, cooling tube includes at least one coolant charging aperture and at least one coolant discharging opening.
Description
Technical field
The present invention relates to cooling system, particularly relate to a kind of chiller and vacuum evaporation equipment.
Background technology
As the important Preparation equipment of the one in OLED display preparation process, vacuum evaporation equipment is used for
In vacuum environment, by material heating evaporation to substrate.Therefore, its service efficiency of vacuum evaporation equipment can be right
The preparation technology of OLED display runs well and produces impact.
As a rule, as a example by existing vacuum evaporation equipment, its evaporation process can be described as material to be filmed
Matter is as in vacuum environment and add, thus makes material evaporation to be filmed or distillation, and then in substrate
Superficial growth becomes membrane structure.Therefore, prior art vacuum evaporation equipment is after completing an evaporation process, logical
Evaporation source naturally cools to room temperature often to need the long period to wait, the most just can open vacuum chamber and be replaced
The actions such as material filler, and carry out evaporation process next time.
However, it is found by the inventors that at least there are the following problems in prior art: due to prior art vacuum evaporation
Equipment needs to wait evaporation source natural cooling after completing an evaporation process, and source to be evaporated naturally cools to room
Wen Houcai can open vacuum chamber, and the cooling effectiveness of existing evaporation source natural cooling is relatively low, needs to expend
Long period, eventually cause vacuum evaporation equipment using effect low.
Summary of the invention
Embodiments of the invention provide a kind of chiller and vacuum evaporation equipment, can accelerate vacuum evaporation
The cooling procedure of equipment evaporation source, reduces vacuum evaporation equipment cooling required time, is effectively improved vacuum evaporation
The service efficiency of equipment.
For solving above-mentioned technical problem, embodiments of the invention adopt the following technical scheme that
A kind of chiller, for the evaporation source of cooling vacuum evaporated device, described chiller includes:
Several cooling units；
Driver element, for being coated with described evaporation source by cooling unit described in carriage drive；
Being arranged at the cooling tube within described cooling unit, described cooling tube includes that at least one coolant feeds
Mouth and at least one coolant discharging opening.
Preferably, described cooling tube is zigzag in the arrangement shape within described cooling unit.
Preferably, described cooling tube is u-shaped in the arrangement shape within described cooling unit, annular,
Any one or a few in zigzag.
Further, described chiller also includes: refrigeration compressor, and described refrigeration compressor is for institute
State press-in coolant in cooling tube.
Further, described coolant include cooling down in water, liquid carbon dioxide, ethanol any one or
Several.
On the other hand, the embodiment of the present invention additionally provides a kind of vacuum evaporation equipment, including described above cold
Radiator cooler.
A kind of chiller of embodiment of the present invention offer and vacuum evaporation equipment, wherein set in chiller
It is equipped with cooling unit, driver element and is arranged at the cooling tube within cooling unit.At vacuum evaporation equipment
After completing evaporation process, drive cooling unit cladding evaporation source, thus accelerate the cooled of vacuum evaporation equipment
Journey, improves the service efficiency of this vacuum evaporation equipment.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to enforcement
In example or description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that, describe below
In accompanying drawing be only some embodiments of the present invention, for those of ordinary skill in the art, do not paying
On the premise of going out creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
The structural representation of a kind of chiller that Fig. 1 provides for the embodiment of the present invention；
Fig. 2 is one of arrangement schematic diagram of cooling tube in embodiment of the present invention chiller；
Fig. 3 is the two of the arrangement schematic diagram of cooling tube in embodiment of the present invention chiller.
Detailed description of the invention
A kind of chiller of embodiment of the present invention offer and vacuum evaporation equipment, can accelerate vacuum evaporation
The cooling procedure of equipment evaporation source, reduces vacuum evaporation equipment cooling required time, is effectively improved vacuum evaporation
The service efficiency of equipment.
In below describing, in order to illustrate rather than in order to limit, it is proposed that such as particular system structure, interface,
The detail of technology etc, in order to thoroughly cut and understand the present invention.But, those skilled in the art should be clear
Chu, can also realize the present invention in the other embodiments do not have these details.In other situation,
Omit the detailed description to well-known device, circuit and method, in order to avoid unnecessary details hinders this
The description of invention.
Below in conjunction with following accompanying drawing, the embodiment of the present invention is described in detail.
Embodiments of the invention provide a kind of chiller, as it is shown in figure 1, this chiller includes at least one
Individual cooling unit 1, for driving the driver element (not shown in figure 1) of cooling unit 1 and be arranged at cold
But the cooling tube 2 within unit 1.It should be noted that for example, driver element can by guide rail and
The position of carriage drive cooling unit 1 is moved, and its concrete type of drive can be by technical staff according to evaporation source 10
Determine with the mated condition of cooling unit 1.
Further, cooling tube 2 is arranged at the inside of cooling unit 1.Concrete, such as, such as Fig. 2 institute
Showing, cooling tube 2 is the arrangement shape of zigzag in the inside of cooling unit 1, thus in cooling unit 1
It is uniformly distributed；Or, as it is shown on figure 3, cooling tube 2 is in the arrangement of the inside indention of cooling unit 1
Shape.Certainly, cooling tube 2 can also be in other arrangement shape inside cooling unit 1, such as: U-shaped
Shape, annular etc..It should be noted that in actual preparation process, cooling tube 2 is at cooling unit 1
The shape of internal arrangement could be arranged to arbitrary shape, as long as cooling tube 2 is evenly distributed on cooling unit 1
Internal.Certainly, any one cooling unit 1 can also arrange many cooling tubes 2, thus enter one
Step accelerates the cooling effect of cooling unit.
Need to add is that, the cooling tube 2 of foregoing description includes at least one coolant charging aperture
21 and at least one coolant discharging opening 22(with reference to Fig. 1, and in Fig. 1, cooling tube 2 includes a cooling
Liquid charging aperture 21 and a coolant discharging opening 22).
Its work process of a kind of chiller provided the embodiment of the present invention further once describes.
Wherein, as a example by chiller structure as shown in Figure 1.When vacuum evaporation equipment is at evaporation process,
Technical staff may utilize drive unit drives cooling unit 1, so that cooling unit 1 is set from vacuum evaporation
Standby evaporation source 10.Now chiller does not work, and vacuum evaporation equipment utilizes evaporation source 10 to heat, and enters
And complete to be treated as the heating evaporation operation of membrane material.
Further, after evaporation process terminates, technical staff may utilize drive unit drives cooling unit 1,
So that cooling unit 1 is coated with the evaporation source 10 of vacuum evaporation equipment.It should be noted that due to vacuum
The shape of its evaporation source 10 of evaporated device and the shape of cooling unit 1 have a multiple possible situation, therefore,
A kind of example it is only used as shown in Fig. 1.Those skilled in the art are it is ensured that cooling unit 1 and evaporation
When source 10 shape is mutually matched and cooling unit 1 can contact evaporation source 10, the cooling effect of chiller
Most preferably.
Now, after driving cooling unit 1 to be coated with evaporation source 10, due to the cooling tube within cooling unit 1
In 2, circulation has coolant, and therefore the heat of evaporation source 10 can be taken away by coolant rapidly, thus effectively
Shorten the cooling procedure of vacuum evaporation equipment.It should be noted that the cooling dress that the embodiment of the present invention provides
Put and can separate with evaporation source after cooling completes, consequently facilitating open vacuum chamber and complete the operation being correlated with, example
It is replaced substrate as: technical staff can open vacuum chamber or changes the technique such as evaporation material of evaporation source
Step.
Additionally, as a kind of preferred implementation of the embodiment of the present invention, described chiller also includes system
Cold compressor.Refrigeration compressor can be used for when cooling vacuum evaporated device needs cooling, intrinsic pressure to cooling tube
Enter coolant, by improving the circulation rate of coolant, improve the cooling effect of chiller further.
Wherein, coolant can be cooling water, liquid carbon dioxide, ethanol and other can be used for circulating cold
But with required liquid, do not repeat at this.
A kind of chiller that the embodiment of the present invention provides, is wherein provided with cooling unit, drives in chiller
Moving cell and be arranged at the cooling tube within cooling unit.After vacuum evaporation equipment completes evaporation process,
Drive cooling unit cladding evaporation source, thus accelerate the cooling procedure of vacuum evaporation equipment, improve this vacuum and steam
The service efficiency of coating apparatus.
On the other hand, the embodiment of the present invention additionally provides a kind of vacuum evaporation equipment, in this vacuum evaporation equipment
The chiller mentioned including above-described embodiment.Wherein, the chiller included about vacuum evaporation equipment
Its structure and work process, can be to the description that should refer in above-described embodiment about chiller；And vacuum
Other structure division of evaporated device is referred to prior art, does not repeats them here.
A kind of chiller of embodiment of the present invention offer and vacuum evaporation equipment, wherein set in chiller
It is equipped with cooling unit, driver element and is arranged at the cooling tube within cooling unit.At vacuum evaporation equipment
After completing evaporation process, drive cooling unit cladding evaporation source, thus accelerate the cooled of vacuum evaporation equipment
Journey, improves the service efficiency of this vacuum evaporation equipment.
The above, the only detailed description of the invention of the present invention, but protection scope of the present invention is not limited to
This, any those familiar with the art, in the technical scope that the invention discloses, can readily occur in
Change or replacement, all should contain within protection scope of the present invention.Therefore, protection scope of the present invention should
It is as the criterion with described scope of the claims.
Claims (6)
1. a chiller, for the evaporation source of cooling vacuum evaporated device, it is characterised in that described cold
Radiator cooler includes:
Several cooling units, and the global shape of described cooling unit and described evaporation source is mutually matched；
Driver element, is used for driving described cooling unit to be coated with described evaporation source from side to cool down described evaporation
Evaporation material in source and described evaporation source；
Being arranged at the cooling tube within described cooling unit, described cooling tube includes that at least one coolant feeds
Mouth and at least one coolant discharging opening.
Chiller the most according to claim 1, it is characterised in that described cooling tube is in described cooling
Arrangement shape within unit is zigzag.
Chiller the most according to claim 1, it is characterised in that described cooling tube is in described cooling
Arrangement shape within unit is any one or a few in annular, U-shaped, zigzag.
Chiller the most according to claim 1, it is characterised in that described chiller also includes:
Refrigeration compressor, described refrigeration compressor is for being pressed into coolant in described cooling tube.
Chiller the most according to claim 4, it is characterised in that described coolant include cool down water,
Any one or a few in liquid carbon dioxide, ethanol.
6. a vacuum evaporation equipment, it is characterised in that include as described in claim 1-5 Arbitrary Term is cold
Radiator cooler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310684824.0A CN103668083B (en) | 2013-12-13 | 2013-12-13 | Chiller and vacuum evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310684824.0A CN103668083B (en) | 2013-12-13 | 2013-12-13 | Chiller and vacuum evaporation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103668083A CN103668083A (en) | 2014-03-26 |
| CN103668083B true CN103668083B (en) | 2016-10-19 |
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ID=50306842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310684824.0A Active CN103668083B (en) | 2013-12-13 | 2013-12-13 | Chiller and vacuum evaporation equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN103668083B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117966103B (en) * | 2024-02-04 | 2024-06-18 | 浙江晟霖益嘉科技有限公司 | Evaporation vacuum equipment production line |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07118836A (en) * | 1993-10-19 | 1995-05-09 | Matsushita Electric Ind Co Ltd | Vacuum deposition device |
| WO2008120610A1 (en) * | 2007-03-30 | 2008-10-09 | Tokyo Electron Limited | Deposition source unit, deposition apparatus and temperature control apparatus for deposition source unit |
| JP2012207263A (en) * | 2011-03-29 | 2012-10-25 | Hitachi High-Technologies Corp | Vapor deposition method, and vapor deposition apparatus |
| TWI425105B (en) * | 2011-09-20 | 2014-02-01 | Ind Tech Res Inst | Evaporation device and evaporation apparatus |
| CN203270022U (en) * | 2013-05-17 | 2013-11-06 | 合肥科晶材料技术有限公司 | Long-distance adjustable quick heating/cooling type evaporation furnace |
| CN203284453U (en) * | 2013-06-25 | 2013-11-13 | 四川虹视显示技术有限公司 | Vacuum evaporation source |
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2013
- 2013-12-13 CN CN201310684824.0A patent/CN103668083B/en active Active
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| Publication number | Publication date |
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| CN103668083A (en) | 2014-03-26 |
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