CN103646377B - Coordinate conversion method and device - Google Patents
Coordinate conversion method and device Download PDFInfo
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- CN103646377B CN103646377B CN201310703158.0A CN201310703158A CN103646377B CN 103646377 B CN103646377 B CN 103646377B CN 201310703158 A CN201310703158 A CN 201310703158A CN 103646377 B CN103646377 B CN 103646377B
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Abstract
The invention provides a coordinate conversion method and device, relating to the field of a wafer scriber and solving the problems of inexact mapping relationship, influence to quality and efficiency of an image processing algorithm and influence to precision of a machine. The coordinate conversion method comprises the steps of: regarding one point as an original point of a coordinate system, and obtaining a first workbench coordinate difference vector of a workbench from the original point to a first target position and a first image coordinate difference vector of an image of a processing object on the workbench from the original point to the first target position; obtaining a coordinate conversion matrix based on the first workbench coordinate difference vector and the first image coordinate difference vector; performing conversion between the coordinate of the workbench and the coordinate of the image of the processing object based on the coordinate conversion matrix. Pixels are determined through non-single-direction movement of the workbench of the wafer scriber, so that the problem of mapping between the image pixel coordinate and the workbench coordinate is solved, and the mapping precision is improved.
Description
Technical field
The present invention relates to scribing machine field, more particularly to a kind of coordinate transformation method and device.
Background technology
The visual identifying system of scribing machine is the real time image processing system based on computer, operating personnel or computer pair
The wafer image being displayed on screen is identified analysis, then carries out corresponding operating, and work is realized by the treatment to image
To the exact operations of actual wafer, this requires to put the corresponding positions that can be accurately positioned actual wafer by certain in image platform
Put, that is, realize the accurate mapping between image pixel coordinates system and stage coordinates system, the influence to accuracy of machines to pass
It is important.There is following technical problem in the prior art, mapping relations are inaccurate, have influence on the quality and effect of image processing algorithm
Rate, influences the precision of machine.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of coordinate transformation method and device, and solving mapping is forbidden
Really, the quality and efficiency of image processing algorithm are had influence on, the problem of the precision of machine is influenceed.
In order to solve the above-mentioned technical problem, a kind of coordinate transformation method provided in an embodiment of the present invention, wherein, including：
Origin with any as coordinate system, obtains the first work that workbench moves to first object position from the origin
The image of platform coordinate difference vector and the machining object being loaded on the workbench moves to the first object from the origin
First image coordinate difference vector of position；
According to the first stage coordinates difference vector and described first image coordinate difference vector, Coordinate Conversion square is obtained
Battle array；
According to the coordinate conversion matrix, carry out between the coordinate of the coordinate of the workbench and the image of the machining object
Conversion.
Wherein, the step that workbench moves to the first stage coordinates difference vector of first object position from the origin is obtained
Suddenly include：
Workbench is obtained with the origin as starting point, the first preset distance and in the y-axis direction is moved in the direction of the x axis
The coordinate of the first object position is reached after mobile second preset distance；
According to the workbench in the coordinate of the origin and the coordinate in the first object position, described the is obtained
One stage coordinates difference vector.
Further, obtained in the coordinate of the origin and the coordinate of the first object position according to the workbench
The step of obtaining the first stage coordinates difference vector is specially：
By formula：b1=(Δ x', Δ y')=(x'1-x'0,y'1-y'0) obtain the stage coordinates of workbench first
Difference vector；
Wherein, b1It is the first stage coordinates difference vector；
Δ x' is the coordinate difference of first object position and the x-axis direction of origin；
Δ y' is the coordinate difference of first object position and the y-axis direction of origin；
x1' for first object position workbench x-axis direction coordinate, y1' for first object position workbench y
The coordinate of direction of principal axis；
x'0It is workbench in the coordinate in origin x-axis direction, y'0It is workbench in the coordinate in origin y-axis direction.
Wherein, the image of the machining object being loaded on the workbench moves to the first object position from the origin
The first image coordinate difference vector the step of include：
Workbench is obtained with the origin as starting point, the first preset distance and in the y-axis direction is moved in the direction of the x axis
The coordinate of the first object position is reached after mobile second preset distance；
Image according to the machining object is obtained in the coordinate and the coordinate in the first object position of the origin
Described first image coordinate difference vector.
Further, the image according to the machining object is in the coordinate of the origin and the seat of the first object position
The step of mark, acquisition described first image coordinate difference vector, is specially：
By formula：a1=(Δ x, Δ y)=(x1-x0,y1-y0) obtain described first image coordinate difference vector；
Wherein, a1It is the first image coordinate difference vector；
Δ x is the coordinate difference of first object position and the x-axis direction of origin；
Δ y is the coordinate difference of first object position and the y-axis direction of origin；
x1It is the coordinate in the x-axis direction of the coordinate of the image of machining object, y1It is the y-axis direction of the coordinate of the image of machining object
Coordinate；
x0It is workbench in the coordinate in the x-axis direction of origin, y0It is workbench in the coordinate in the y-axis direction of origin.
Wherein, the origin with any as coordinate system, obtains workbench moves to first object position from the origin the
The image of one stage coordinates difference vector and the machining object being loaded on the workbench moves to described from the origin
After first image coordinate difference vector of one target location, also include：
Acquisition stage coordinates difference vector collection, including the first stage coordinates difference vector, the second stage coordinates are poor
The n-th stage coordinates difference vector of vector ...；And
Obtain image coordinate difference vector collection, including described first image coordinate difference vector, the second image coordinate difference vector ...
N-th image coordinate difference vector.
Preferably, according to the first stage coordinates difference vector and described first image coordinate difference vector, coordinate is obtained
The step of transition matrix obtains coordinate conversion matrix includes：
Coordinate conversion matrix is obtained according to Y=XA；
Wherein,
And, Y is stage coordinates difference vector matrix, and X is image coordinate difference vector matrix；
a1, a2, a3…anRespectively described first stage coordinates difference vector, the second stage coordinates difference vector ...
The n-th stage coordinates difference vector；
b1, b2, b3…bnRespectively described first image coordinate difference vector, the second image coordinate difference vector ... are described
N-th image coordinate difference vector；
A is the coordinate conversion matrix.
The corresponding embodiment of the present invention additionally provides a kind of coordinate transformation device, is applied to scribing machine, wherein, the coordinate
Conversion equipment includes：
Motion-control module, for the origin with any as coordinate system, obtains workbench and moves to first from the origin
First stage coordinates difference vector of target location and the image of the machining object being loaded on the workbench are from the origin
Move to the first image coordinate difference vector of the first object position；
First processing module, for according to the first stage coordinates difference vector and described first image coordinate difference to
Amount, obtains coordinate conversion matrix；
Second processing module, for according to the coordinate conversion matrix, carrying out the coordinate of the workbench and the processing
Conversion between the coordinate of the image of thing.
Further, the motion-control module includes：
Motion control unit, for obtaining workbench with the origin as starting point, moves the first pre- spacing in the direction of the x axis
From and move the coordinate that the first object position is reached after the second preset distance in the y-axis direction；
First acquisition unit, for according to the workbench in the coordinate of the origin and in the first object position
Coordinate, obtain the first stage coordinates difference vector.
Further, the motion-control module also includes：Second acquisition unit, for the image according to the machining object
In the coordinate and the coordinate in the first object position of the origin, described first image coordinate difference vector is obtained.
Above-mentioned technical proposal of the invention has the beneficial effect that：
In the solution of the present invention, it be some origin to be looked in a coordinate system, and workbench is moved into first object position from origin
Put place, so as to obtain the first image coordinate difference of the first stage coordinates difference vector of workbench and the image of machining object to
Amount, by the first stage coordinates difference vector and the first image coordinate difference vector, after obtaining coordinate conversion matrix, is operated platform
Coordinate and machining object image coordinate conversion, it is accurate that the coordinate of such workbench has with the coordinate of the image of machining object
Mapping relations, improve image processing algorithm quality and efficiency, while improve machine precision.
Brief description of the drawings
Fig. 1 is the basic step of transfer algorithm of the invention；
Fig. 2 is the schematic diagram of coordinate system of the invention 1；
Fig. 3 is the schematic diagram of coordinate system of the invention 2；
Fig. 4 is the schematic diagram of coordinate system of the invention 3；
Fig. 5 is that Pixel Dimensions of the invention measure pattern instance figure；
Fig. 6 is the basic block diagram of conversion equipment of the invention.
Specific embodiment
To make the technical problem to be solved in the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing and tool
Body embodiment is described in detail.
The present invention provides a kind of coordinate transformation method and device, and picture is determined by the non-unidirectional movement of scribing machine worktable
Element, solves the problems, such as to be mapped between image pixel coordinates and stage coordinates, improves the precision of mapping.
As shown in figure 1, coordinate transformation method provided in an embodiment of the present invention, wherein, including：
Step 1, the origin with any as coordinate system obtains workbench moves to first object position from the origin the
The image of one stage coordinates difference vector and the machining object being loaded on the workbench moves to described from the origin
First image coordinate difference vector of one target location；
Wherein, the coordinate system has x-axis and y-axis, and more described is any point in coordinate system, takes any point to pre-
If position movement, i.e. first object position；Described image is obtained by screen display.Taken original is in workbench
During point, alignd with origin by screen center's cross, obtain origin image coordinate and origin stage coordinates, then workbench is moved
First object position is moved, by screen center's cross and first object aligned in position, target location image coordinate and mesh is obtained
Cursor position stage coordinates, the x of corresponding coordinate, y-component are respective poor, then target location stage coordinates work with origin
Platform coordinate produces the first stage coordinates difference vector, target image coordinate and origin image coordinate produce the first image coordinate difference to
Amount.
Step 2, according to the first stage coordinates difference vector and described first image coordinate difference vector, obtains coordinate and turns
Change matrix；
Wherein, the first stage coordinates difference vector is converted to the first matrix, it is poor for second image coordinate to
Amount is converted to the second matrix, then by the first matrix and the second matrix, obtains coordinate conversion matrix.
Step 3, according to the coordinate conversion matrix, carries out the coordinate of the workbench and the seat of the image of the machining object
Conversion between mark.
Wherein, by by the first matrix, the second matrix and coordinate conversion matrix opening relationships, transition matrix being carried out into inverse fortune
Calculate, obtain the mapping relations between the coordinate of the coordinate of workbench and the image of machining object.
It is some origin to look in a coordinate system, workbench is moved at first object position from origin, by screen
Crux of heart gathers corresponding image coordinate and stage coordinates, obtains the first stage coordinates difference vector and the processing of workbench
First image coordinate difference vector of the image of thing, by the first stage coordinates difference vector and the first image coordinate difference to
Amount, after obtaining coordinate conversion matrix, is operated the conversion of the coordinate of the coordinate of platform and the image of machining object, such workbench
Coordinate has accurate mapping relations with the coordinate of the image of machining object, improves the quality and efficiency of image processing algorithm, for
The precision of machine is also improved largely.
It is as follows for the specific embodiment for mapping relations of the invention.
Two the three of rectangular coordinate system kinds of distribution situations analyses in plane.
Assuming that two rectangular coordinate systems are respectively the image coordinate system of stage coordinates system and machining object, the x-axis and y of image
Axial coordinate uses x, y to represent respectively, and the x-axis and y-axis coordinate of workbench use x', y' to represent respectively, and A is the coordinate conversion matrix, k
It is two proportionality coefficients of coordinate system.
As shown in Fig. 2 two coordinate origins overlap, X-axis overlaps, and Y-axis overlaps.
Image → workbench：
Workbench → image：
As shown in figure 3, two coordinate origins overlap, X-axis, Y-axis are misaligned, there is angle, θ deflection.
Image → workbench：
Workbench → image：
As shown in figure 4, two coordinate origins are misaligned, X-axis, Y-axis are misaligned, there is angle, θ deflection.
Image → workbench：
Workbench → image：
It will be appreciated that need the concrete operations of mobile work platform, thus the embodiment of the present invention coordinate transformation method
In, obtaining the step of workbench moves to the first stage coordinates difference vector of first object position from the origin includes：
Step 11, obtains workbench with the origin as starting point, the first preset distance is moved in the direction of the x axis and in y
The coordinate of the first object position is reached on direction of principal axis after mobile second preset distance；
Wherein, first preset distance and second preset distance can be identical length, or difference
Length, specific length needs sets itself according to technique, is completed to move by machine.
Step 12, according to the workbench in the coordinate of the origin and the coordinate in the first object position, obtains
Obtain the first stage coordinates difference vector.
By mobile x-axis direction and mobile y-axis direction, the coordinate data of image coordinate and stage coordinates is collected, so
The x values of the corresponding stage coordinates of image coordinate, y values and corresponding angle can be obtained, the degree of accuracy of mapping relations is improved,
Strengthen the practicality of cutting-up machine.
Preferably, in the coordinate transformation method of another embodiment of the present invention, according to the workbench in the origin
The step of coordinate and the coordinate of the first object position, acquisition the first stage coordinates difference vector, is specially：
Step 121, by formula：b1=(Δ x', Δ y')=(x'1-x'0,y'1-y'0) obtain the work of workbench first
Make platform coordinate difference vector；
Wherein, b1It is the first stage coordinates difference vector；
Δ x' is the coordinate difference of first object position and the x-axis direction of origin；
Δ y' is the coordinate difference of first object position and the y-axis direction of origin；
x1' for first object position workbench x-axis direction coordinate, y1' for first object position workbench y
The coordinate of direction of principal axis；
x'0It is workbench in the coordinate in origin x-axis direction, y'0It is workbench in the coordinate in origin y-axis direction.
It will be appreciated that the mapping relations in order to set up accurate image coordinate and stage coordinates, therefore the present invention
In the coordinate transformation method of embodiment, the image of the machining object being loaded on the workbench moves to described from the origin
The step of first image coordinate difference vector of one target location, includes：
Step 13, obtains workbench with the origin as starting point, the first preset distance is moved in the direction of the x axis and in y
The coordinate of the first object position is reached on direction of principal axis after mobile second preset distance；
Wherein, first preset distance and second preset distance can be identical length, or difference
Length, specific length needs sets itself according to technique, is completed to move by machine.
Step 14, the coordinate and the seat in the first object position of image according to the machining object in the origin
Mark, obtains described first image coordinate difference vector.
Preferably, in the coordinate transformation method of another embodiment of the present invention, the image according to the machining object is described
The step of coordinate of origin and the coordinate of the first object position, acquisition described first image coordinate difference vector, is specially：
Step 141, by formula：a1=(Δ x, Δ y)=(x1-x0,y1-y0) obtain described first image coordinate difference to
Amount；
Wherein, a1It is the first image coordinate difference vector；
Δ x is the coordinate difference of first object position and the x-axis direction of origin；
Δ y is the coordinate difference of first object position and the y-axis direction of origin；
x1It is the coordinate in the x-axis direction of the coordinate of the image of machining object, y1It is the y-axis direction of the coordinate of the image of machining object
Coordinate；
x0It is workbench in the coordinate in the x-axis direction of origin, y0It is workbench in the coordinate in the y-axis direction of origin.
In order to improve the accuracy of the mapping of image coordinate and stage coordinates, thus the embodiment of the present invention Coordinate Conversion
In method, the origin with any as coordinate system obtains the first work that workbench moves to first object position from the origin
The image of platform coordinate difference vector and the machining object being loaded on the workbench moves to the first object from the origin
After first image coordinate difference vector of position, also include：Step 15, obtains stage coordinates difference vector collection, including described the
One stage coordinates difference vector, second stage coordinates difference vector ... the n-th stage coordinates difference vector；And
Obtain image coordinate difference vector collection, including described first image coordinate difference vector, the second image coordinate difference vector ...
N-th image coordinate difference vector.
Wherein, obtaining the stage coordinates difference set and the method for described image coordinate difference set is, in a coordinate system to take more
Several points are referred to as the second target location, and the n-th target location of the 3rd target location ... moves to the second target from first object
Position obtains the second operating coordinates difference vector and the second image coordinate difference vector, and the 3rd is continued to move to from the second target location
Target location obtains the 3rd coordinate difference vector and the 3rd image coordinate difference vector ... moves to the n-th mesh from the (n-1)th target location
Cursor position obtains the n-th coordinate difference vector and the n-th image coordinate difference vector.
For taking several target locations, moved n times in x-axis direction respectively by making workbench, in the movement of y-axis direction more
N times, stage coordinates difference vector collection and image coordinate difference vector collection are obtained, when mobile number of times is more, precision is more accurate, but
Also to meet technique realization, n can take at least 10 times.So improve the accuracy of image coordinate and the mapping of stage coordinates.
In the coordinate transformation method of another embodiment of the present invention, according to the first stage coordinates difference vector and described
The step of first image coordinate difference vector, acquisition coordinate conversion matrix, includes：
Step 16, coordinate conversion matrix is obtained according to Y=XA；
Wherein,
And, Y is stage coordinates difference vector matrix, and X is image coordinate difference vector matrix；
a1, a2, a3…anRespectively described first stage coordinates difference vector, the second stage coordinates difference vector ...
The n-th stage coordinates difference vector；
b1, b2, b3…bnRespectively described first image coordinate difference vector, the second image coordinate difference vector ... are described
N-th image coordinate difference vector；
A is the coordinate conversion matrix.
By setting up stage coordinates difference vector matrix Y, image coordinate difference vector matrix X and coordinate conversion matrix A
Relation, is so easier computing and programs, by trying to achieve the inverse of matrix A, X matrix and the product of Y matrixes by mathematical algorithm
It is programmed, according to formula [x', y']=[x, y] A, tries to achieve matrix A, so that stage coordinates is sat with image pixel
Target mapping relations are more accurate.
Specific embodiment of the invention is exemplified below.
Virtual manufacture thing with unique objects is loaded into workbench, if target pattern is as shown in figure 5, by screen
Crux of heart aligns with B points, reads the corresponding image coordinate of B points（x0,y0）And stage coordinates（x'0,y'0）, then X-axis walk AB
Individual distance, Y-axis walks BD distance, i.e. working table movement to C points, and the cross on screen is aligned with C points, reads C points corresponding
Image coordinate（x1,y1）And stage coordinates（x1',y1'）, then the x of 2 points of B and C, y-component are respective under calculating image coordinate
Difference, constitutes new vectorial a=(Δ x, Δ y)=(x1-x0,y1-y0), b=(Δ x', Δ y') under same stage coordinates system
=(x'1-x'0,y1'-y'0), the process is constantly repeated, meet desired data set until collecting
I.e. x, y meet Y=XA.
Accordingly, as shown in fig. 6, the embodiment of the present invention also provides a kind of coordinate transformation device, scribing machine is applied to, its
In, the coordinate transformation device includes：
Motion-control module 61, for the origin with any as coordinate system, obtains workbench and moves to the from the origin
First stage coordinates difference vector of one target location and the image of the machining object being loaded on the workbench are from the original
Point moves to the first image coordinate difference vector of the first object position；
First processing module 62, for according to the first stage coordinates difference vector and described first image coordinate difference to
Amount, obtains coordinate conversion matrix；
Second processing module 63, for according to the coordinate conversion matrix, carrying out the coordinate of the workbench and adding with described
Conversion between the coordinate of the image of work thing.
The movement of workbench is controlled by motion-control module 61, the first stage coordinates difference vector is obtained and is loaded in
First image coordinate difference vector of the image of the machining object on the workbench, then first processing module 62 is according to the first work
Platform coordinate difference vector and the first image coordinate difference vector obtain coordinate conversion matrix, and Second processing module 63 is sat more than
Mark transition matrix, draws the relation of the conversion between the coordinate of the coordinate of workbench and the image of machining object, can so realize
Workbench and the accurate mapping relations of image of machining object, improve the precision of mapping, improve the precision of machine.
Further, in the coordinate transformation device of another embodiment of the present invention, the motion-control module 61 includes：
Motion control unit, for obtaining workbench with the origin as starting point, moves the first pre- spacing in the direction of the x axis
From and move the coordinate that the first object position is reached after the second preset distance in the y-axis direction；
First acquisition unit, for according to the workbench in the coordinate of the origin and in the first object position
Coordinate, obtain the first stage coordinates difference vector.
Further, in the coordinate transformation device of another embodiment of the present invention, the motion-control module 61 also includes：
Second acquisition unit, for the image according to the machining object in the coordinate of the origin and in the first object position
Coordinate, obtains described first image coordinate difference vector.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, on the premise of principle of the present invention is not departed from, some improvements and modifications can also be made, these improvements and modifications
Should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of coordinate transformation method, it is characterised in that including：
Origin with any as coordinate system, when workbench is in taken origin, is alignd by screen center's cross with origin,
Origin image coordinate and origin stage coordinates are obtained, then movable workbench is to first object position, by screen center ten
Word and first object aligned in position, obtain first object location drawing picture coordinate and first object position stage coordinates；And then obtain
Workbench is obtained to move to the first stage coordinates difference vector of first object position from the origin and be loaded in the work
The image of the machining object on platform moves to the first image coordinate difference vector of the first object position from the origin；
According to the first stage coordinates difference vector and described first image coordinate difference vector, coordinate conversion matrix is obtained；
According to the coordinate conversion matrix, turning between the coordinate of the coordinate of the workbench and the image of the machining object is carried out
Change.
2. coordinate transformation method according to claim 1, it is characterised in that obtain workbench and move to the from the origin
The step of first stage coordinates difference vector of one target location, includes：
Workbench is obtained with the origin as starting point, the first preset distance is moved in the direction of the x axis and is moved in the y-axis direction
The coordinate of the first object position is reached after second preset distance；
According to the workbench in the coordinate of the origin and the coordinate in the first object position, first work is obtained
Make platform coordinate difference vector.
3. coordinate transformation method according to claim 2, it is characterised in that according to the workbench the origin seat
Be marked with and the first object position coordinate, obtain the first stage coordinates difference vector the step of be specially：
By formula：b1=(Δ x', Δ y')=(x '1-x'0,y′1-y'0) obtain workbench the first stage coordinates difference to
Amount；
Wherein, b1It is the first stage coordinates difference vector；
Δ x' is the coordinate difference of first object position and the x-axis direction of origin；
Δ y' is the coordinate difference of first object position and the y-axis direction of origin；
x′1It is the coordinate in the x-axis direction of the workbench of first object position, y1' for first object position workbench y-axis side
To coordinate；
x'0It is workbench in the coordinate in origin x-axis direction, y'0It is workbench in the coordinate in origin y-axis direction.
4. coordinate transformation method according to claim 1, it is characterised in that the machining object being loaded on the workbench
The step of image moves to the first image coordinate difference vector of the first object position from the origin includes：
Workbench is obtained with the origin as starting point, the first preset distance is moved in the direction of the x axis and is moved in the y-axis direction
The coordinate of the first object position is reached after second preset distance；
Image according to the machining object obtains described in the coordinate and the coordinate in the first object position of the origin
First image coordinate difference vector.
5. coordinate transformation method according to claim 4, it is characterised in that the image according to the machining object is in the original
The step of coordinate of point and the coordinate of the first object position, acquisition described first image coordinate difference vector, is specially：
By formula：a1=(Δ x, Δ y)=(x1-x0,y1-y0) obtain described first image coordinate difference vector；
Wherein, a1It is the first image coordinate difference vector；
Δ x is the coordinate difference of first object position and the x-axis direction of origin；
Δ y is the coordinate difference of first object position and the y-axis direction of origin；
x1It is the coordinate in the x-axis direction of the coordinate of the image of machining object, y1It is the seat in the y-axis direction of the coordinate of the image of machining object
Mark；
x0It is workbench in the coordinate in the x-axis direction of origin, y0It is workbench in the coordinate in the y-axis direction of origin.
6. coordinate transformation method according to claim 1, it is characterised in that the origin with any as coordinate system, obtains work
Make platform to move to the first stage coordinates difference vector of first object position from the origin and be loaded on the workbench
Machining object image move to the first image coordinate difference vector of the first object position from the origin after, also wrap
Include：
Obtain stage coordinates difference vector collection, including the first stage coordinates difference vector, the second stage coordinates difference to
The n-th stage coordinates difference vector of amount ...；And
Obtain image coordinate difference vector collection, including described first image coordinate difference vector, second the n-th figure of image coordinate difference vector ...
As coordinate difference vector.
7. coordinate transformation method according to claim 6, it is characterised in that according to the first stage coordinates difference vector
With described first image coordinate difference vector, obtain coordinate conversion matrix the step of include：
Coordinate conversion matrix is obtained according to Y=XA；
Wherein,
And, Y is stage coordinates difference vector matrix, and X is image coordinate difference vector matrix；
a1, a2, a3…anRespectively described first stage coordinates difference vector, the second stage coordinates difference vector ... described
N stage coordinates difference vectors；
b1, b2, b3…bnRespectively described first image coordinate difference vector, the second image coordinate difference vector ... n-th figure
As coordinate difference vector；
A is the coordinate conversion matrix.
8. a kind of coordinate transformation device, is applied to scribing machine, it is characterised in that the coordinate transformation device includes：
Motion-control module, for the origin with any as coordinate system, when workbench is in taken origin, by screen
Crux of heart aligns with origin, obtains origin image coordinate and origin stage coordinates, then movable workbench to first object position
Put, by screen center's cross and first object aligned in position, obtain first object location drawing picture coordinate and first object position
Stage coordinates；And then obtain workbench from the origin move to the first stage coordinates difference vector of first object position with
And the image of the machining object being loaded on the workbench moves to the first image of the first object position from the origin
Coordinate difference vector；
First processing module, for according to the first stage coordinates difference vector and described first image coordinate difference vector, obtaining
Obtain coordinate conversion matrix；
Second processing module, for according to the coordinate conversion matrix, carrying out the coordinate and the machining object of the workbench
Conversion between the coordinate of image.
9. coordinate transformation device according to claim 8, it is characterised in that the motion-control module includes：
Motion control unit, for obtaining workbench with the origin as starting point, in the direction of the x axis move the first preset distance with
And the coordinate that the first object position is reached after the second preset distance is moved in the y-axis direction；
First acquisition unit, for according to the workbench in the coordinate of the origin and the seat in the first object position
Mark, obtains the first stage coordinates difference vector.
10. coordinate transformation device according to claim 8, it is characterised in that the motion-control module also includes：Second
Acquiring unit, for the image according to the machining object in the coordinate of the origin and the seat in the first object position
Mark, obtains described first image coordinate difference vector.
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| CN105678782A (en) * | 2016-01-22 | 2016-06-15 | 英华达（上海）科技有限公司 | Transformation method and system for image coordinate system and machinery coordinate system |
| CN105789079B (en) * | 2016-04-12 | 2018-04-24 | 朱干军 | A kind of location aided rebroadcast chip die mapping method |
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