CN103645242B

CN103645242B - A kind of ionizing transducer based on discharge electric field with micro-gap polarization structure

Info

Publication number: CN103645242B
Application number: CN201310646172.1A
Authority: CN
Inventors: 侯中宇; 房茂波; 王孜; 王艳芳; 赵小林
Original assignee: Shanghai Jiaotong University
Current assignee: Shanghai Jiaotong University
Priority date: 2013-12-04
Filing date: 2013-12-04
Publication date: 2016-04-06
Anticipated expiration: 2033-12-04
Also published as: CN103645242A

Abstract

The invention discloses a kind of ionization type gas sensor based on discharge electric field with micro-gap polarization structure, comprise: external circuits electrode pair, polarization structure and big L/D ratio material, polarization structure is arranged at the region between external circuits electrode pair, and big L/D ratio material is at least arranged on parts in polarization structure and external circuits electrode pair.Sensor of the present invention operationally, only need to load lower voltage on external circuits electrode, just by the polarization of polarization structure, the electric field being enough to ionize target gas molecules can be produced between polarization structure and external circuits electrode, thus effectively reduces working sensor voltage.Compared with the minim gap structure in existing technology between external circuits electrode pair, effectively can prevent the pollutant such as dust, fiber to drop the instability and Problem of Failure that cause in minim gap, signal to noise ratio (S/N ratio) and susceptibility can be improved simultaneously.

Description

A kind of ionizing transducer based on discharge electric field with micro-gap polarization structure

Technical field

The present invention relates to a kind of ionizing transducer, particularly relate to a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure.

Background technology

The gaseous electronics signal that ionization type gas sensor is produced by gas molecule ionization realizes sensing, its main advantage is that response is fast, turnaround time is short and sensitive range is wide, be a kind of important to supplement to the sensor of other type, have important application prospect at numerous areas such as hazardous gas warning, toxic and harmful monitorings.

But in order to ionized gaseous molecules, need to apply high electric field, therefore, high voltage operation becomes the ubiquitous bottleneck problem of sensor of this type.

The literature search of prior art being found, in disclosed technical literature, for solving this bottleneck problem, mainly big L/D ratio material being covered electrode surface, and reduce the level of electrode gap to several microns to some tens of pm.

The paper 424th volume the 171 to 174 page delivered in 2003 at " Nature(nature) " as people such as AshishModi " Miniaturizedgasionizationsensorsusingcarbonnanotubes(uses micro-gas ionization sensor of carbon nano-tube) ".Carbon nano-tube is placed on the external circuits anode of sandwich electrode structure, is regulated the spacing of external circuits electrode by glass dielectric layer THICKNESS CONTROL.Electrode gap is controlled the lower operating voltage obtaining 130V 25 microns time.The limitation of this technology is as follows: the first, and the small―gap suture electrode of some tens of pm magnitude cannot avoid the pollutant such as dust, fiber to drop caused instability and Problem of Failure; The second, the air intake opening area of ionization air chamber is directly proportional to electrode gap, and electrode gap is less, and air inlet area is less, and sample signal strength is more weak, and reducing electrode gap reduction operating voltage is conflicting with improving signal to noise ratio (S/N ratio) and improving susceptibility; 3rd, greatly, processing cost is high for the glass dielectric layer in some tens of pm gap and the difficulty of processing of the aluminium sheet external circuits negative electrode parallel with external circuits anode.

For another example SeongjeenKim publishes thesis " CNTSensorsforDetectingGaseswithLowAdsorptionEnergybyIoni zation(is by the carbon nano tube sensor of the low energy of adsorption gas of ionization detection " at " Sensors(sensor) " the 6th phase 503-513 page in 2006.The Technical Design of this people such as technical scheme and Modi is structurally substantially similar, adopt the micropore air inlet sampling of millimeter magnitude length, carbon nano-tube is placed on the external circuits negative electrode of sandwich electrode structure, the ingenious anode linkage technique that utilizes has carried out wafer-level packaging by serving as the highly doped silicon chip of anodic-cathodic with the lux glass of sending serving as electrode gap adjustment simultaneously.Its technical limitation is: the first, and that serves as that electrode gap regulates sends that lux glass is thick reaches 500 microns, and operating voltage is too high; The second, micropore air inlet sampling is still little air inlet areal sampling.

For another example the people such as LLiao on " Nanotechnology(nanometer technology) " the 19th phase 175501 pages in 2008 publish thesis " gas sensor based on zinc oxide nanowire field ionization (FI) of the medium operating voltage high stable that AnovelgassensorbasedonfieldionizationfromZnOnanowires:mo derateworkingvoltageandhighstability(mono-kind is novel: medium operating voltage and high stability) ".Zinc paste big L/D ratio material is placed on external circuits anode, and copper flat board serves as external circuits negative electrode, and anodic-cathodic is capacity plate antenna configuration.Mainly there is the problem controlling difficulty compared with high working voltage and two electrode separations in this technology.

For another example the people such as ZhongyuHou on " AppliedPhysicsLetters(applied physics bulletin) " the 92nd phase 2235051 pages in 2008 publish thesis " Ionizationgassensingoftheionflowcurrentinamicrotripolare lectrodesystemwithcarbonnanotubes(is with the ion current electric current ionized gas sensing on micro-three-electrode system of carbon nano-tube) ".This technology adopts microelectrode structural system, silicon wet anisotropic is utilized to etch each assembly of sensor air chamber, according to the silicon air chamber component THICKNESS CONTROL electrode gap etched, the placement animating electrode of carbon nano-tube and the filtering electrode Altitude control in middle level are 15 microns, this technology solves the control problem of electrode gap preferably, but still the problem that the contamination that cannot overcome the suspension of the dust and fiber and so in little sample space and air was lost efficacy.

For another example the paper " MicrofabricatedBreathSensorbasedonCarbonNanotubesforResp irationMonitoring(is used for the micro-respiration transducer based on carbon nano-tube of Monitoring Rehabilitation) " delivered on " 20094thIEEEInternationalConferenceonNano/MicroEngineered andMolecularSystems(2009 the 4th IEEE receive/micro-engineering and molecular system international conference) " of the people such as HaiLiu.After this technology prepares electrode system by MEMS technology, then by electrophoresis plating carbon nano-tube is plated on Tongliang County's electrode and makes micro-respiration transducer.It is simple that this technology realizes technique, and operating voltage is less than 5V, samples sensitive.But topmost problem is electrode gap only has 10 microns, in manufacturing process, be difficult to carbon nano-tube to be arranged on the electrode pair of minim gap without short circuit, the problem that the contamination that simultaneously also cannot overcome the suspension of dust and fiber and so in air was lost efficacy.

For another example patent " the one-dimensional nanostructure polarization-enhancedischarge discharge electrode " (number of patent application: 201210468934.9) that in marquis, space, the luxuriant ripple in room are applied for.In this patent documentation, inventor applies for that the technical characteristic protected is: between external circuits electrode, arrange big L/D ratio material as Polarimetric enhancement structure, make it to be in substrate surface with external circuits electrode simultaneously.

For another example the people such as HaiLiu on " Nanotechnology(nanometer technology) " the 24th phase 175301 pages in 2013 publish thesis " Ahybridnanostructurearrayforgassensingwithultralowfieldi onizationvoltage(mono-kind is for the composite nanostructure of ultralow field ionization (FI) voltage gas sensing) ".According to describing in document, this technical literature attempts according to patent " one-dimensional nanostructure polarization-enhancedischarge discharge electrode " technology that disclosed data " Anionizationsensorschemeforultra-lowvoltageoperationusin gone-dimensionalnanostructures(mono-kind utilizes monodimension nanometer material for the ionization transducer structure of extra low voltage work) " is carried out on arXive website, therefore, the technical characteristic described in this technical literature is identical with patent " one-dimensional nanostructure polarization-enhancedischarge discharge electrode ".

Therefore, micron dimension small scale discharging gap technical scheme brings sample space narrow and small, the too high problem declined with signal to noise ratio (S/N ratio) of signal random element.Meanwhile, big L/D ratio material is also caused to be difficult to when avoiding short circuit, on the electrode pair being arranged on minim gap.The more important thing is, this electrode structure is very easily stain by the suspension of dust or fiber and so in air, causes component failure, thus greatly limit its application.

Summary of the invention

In view of above-mentioned defect of the prior art, technical matters to be solved by this invention is to provide a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure.Adopt the sensor of this structure can construct minim gap by polarization structure, thus between electrode pair, comparatively large, the on-load voltage of total body space is lower, at the local implementation minim gap highfield of discharge space.The requirement of ionized gaseous molecules under low-voltage condition can either be met, greatly can reduce the risk that big L/D ratio material causes short circuit again, and the probability that in air, impurity contamination lost efficacy is reduced greatly.

The principle of work of ionization type gas sensor is in object gas environment, manufacture the electric field that can cause gas ionization, by introducing big L/D ratio material as electrode, can produce such electric field under relatively much lower voltage.According to the polarization band theoretical model of big L/D ratio material, gas molecule is polarized by the non-uniform electric field of big L/D ratio surrounding materials, produces induced dipole moment and dielectrophoresis effect.On the one hand, polarized gas molecule issues the collision of raw coulomb at the interaction force field that autonomous induction dipole moment produces, and forms the metastable state that spontaneous electric dipole radiation cannot occur; On the other hand, under the effect of dielectrophoresis effect, by big L/D ratio material capture, and there is inelastic collision with it in polarized molecule, is excited to metastable state.These metastable particles are only producing near the region of electrode, therefore in whole discharge space, there is great concentration gradient, thus distribute in whole discharge space under the driving of diffusion process and come.Through the accumulation of musec order time, metastable particle can reach higher concentration, makes the electronic kinetic energy under low electric field intensity also can produce impact ionization, and uniform and stable self-maintained discharge process occurs.In order to the safe voltage at below 40V realizes said process, also need the level of the yardstick to several microns to tens microns reducing discharging gap.But such minim gap difficulty of processing is large, and very easily cause the short circuit of big L/D ratio material, in addition, under these conditions, suspension impersonal language common in air is all significantly higher than gap dimension, is easy to adhere to, be overlapped on electrode, causes instability and inefficacy.The invention provides a kind of new electrode structure: its technical characteristics is, the polarization structure of the conduction be not connected with external circuit is placed between two electrodes be connected with external circuit, can when electrode on-load voltage, by the polarization of electric field, induced charge is produced on polarization structure surface, thus electric field is produced between polarization structure and electrode, this adds increased the scope of discharge space, and reduce suspension in air and adhere to the probability of the short circuit caused.And, if polarization structure is designed to the array of multiple conductive unit composition, just can increase discharge space further, reduce the probability staiing short circuit.Described big L/D ratio material can be arranged at local or all surfaces of any one parts in external circuits electrode and polarization structure, or is arranged at the surface of whole parts.

Under self-maintained discharge condition, the principle of work of described sensor is the relation that gaseous conductance and gas chemistries exist, and this relation can show as in the test of various forms of volt-ampere, such as, under identical voltage conditions, the relation between electric current and gas componant can be expressed from the next:

I = Σ_{i = 1}^{N} I_{i}^{0} \exp {{&Integral;}_{0}^{D_{i}} n_{met} \cdot \frac{1}{\overset{&OverBar;}{λ}} \exp [\frac{1}{\overset{&OverBar;}{λ}} U_{ion} / \frac{V_{i}}{D_{i}} γ_{np} F_{np} (z) - β_{rec} - β_{ad}] \cdot dz}

Described by above formula is the electric current sum that electric current in whole electrode gap equals in N number of sub-gap, wherein, each polarization structure can form two sub-gaps, the initial current in i-th sub-gap can be by artificial means, such as ultraviolet radiation provides, also can only rely on the cosmic rays in physical environment to ionize to provide, the latter is certain to have certain randomness and spatial statistics distribution character.D _irepresent the equivalence electric discharge yardstick in i-th sub-gap, U _ionrepresent the arithmetic mean ionization energy of test gas, according to concentration weighted mean, V _ibe the equivalent on-load voltage in i-th gap, relevant with the geometric properties of polarization structure and external circuits electrode, and be subject to the control of impressed voltage. for mean free path, n _metfor metastable particle density, be the function of electrode system geometric properties and voltage-drop loading feature, p is air pressure, γ _npfor the equalization surface field enhancer of big L/D ratio material, F _npfor the normalization Electric Field Distribution function perpendicular to big L/D ratio material surface, β _recfor the positive ion of chemical composition various in gas and the recombination coefficient of electronics, β _adfor the electronegative molecules of chemical composition various in gas and the sticking coefficient of electronics.

In above-mentioned parameter, U _ion, n _met, β _rec, β _adfour parameters are the function of gas chemistries, and V _irelevant with on-load voltage V, therefore make the I-V characteristic of system relevant with gas componant.

The invention provides a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, it is characterized in that, comprise: the first external circuits electrode, the second external circuits electrode, polarization structure, big L/D ratio material and substrate, wherein, polarization structure is made up of conductor; Polarization structure is arranged between the first external circuits electrode and the second external circuits electrode; There is gas gap between first external circuits electrode and polarization structure, between the second external circuits electrode and polarization structure, there is gas gap; Big L/D ratio material is at least arranged at part surface or all surfaces of parts in the first external circuits electrode, the second external circuits electrode and polarization structure three parts, and the first external circuits electrode, the second external circuits electrode and polarization structure are arranged in substrate.

Big L/D ratio material refers to the powdery, sheet or the dough-like material that are made up of basic granules, the diameter of this basic granules is between 1 nanometer to 10 micron, length-diameter ratio is greater than 10, there is tubulose, wire, bar-shaped, needle-like or belt shape, further, the gross mass of this basic granules accounts for more than 10% in all particle gross masses of whole material.

The present invention is by macroscopical conductor structure, but not big L/D ratio material is arranged between external circuits electrode, and makes it to be in substrate surface with external circuits electrode.Compare " one-dimensional nanostructure polarization-enhancedischarge discharge electrode " patent documentation, 1-dimention nano functional structure is arranged at macroscopical conductor structure surface by technology of the present invention, like this, the geometry of polarization structure and and external circuits electrode between the key parameter such as spacing, more process technology means can be utilized to be controlled, and the control of the relative orientation between the big L/D ratio material of attachment on it and external circuits electrode can be made more versatile and flexible.In addition, technical characteristic of the present invention, polarization structure not necessarily will cover big L/D ratio material, and this can make it in sensor application, have larger structural design dirigibility.

Adopt ionizing transducer provided by the invention, minim gap can be constructed, at the local implementation minim gap highfield of discharge space, thus under the condition that gap is large, on-load voltage is low in-between the electrodes by polarization structure, ionized gaseous molecules, realizes gas sensing function.

Further, the first external circuits electrode is made up of single structure unit, or the first external circuits electrode is made up of multiple structural unit, is connected between multiple structural unit by conductive film.

First external circuits electrode is made up of multiple structural unit, when the impurity in gas falls into, not easily causes short circuit, reduce further the probability that impurity contamination lost efficacy, improves the reliability of ionizing transducer; There is gap between multiple structural unit simultaneously, increase sample space, thus strengthen the intensity of sampled signal, improve sensor signal to noise ratio (S/N ratio) and susceptibility.

Further, the second external circuits electrode is made up of single structure unit, or the second external circuits electrode is made up of multiple structural unit, is connected between multiple structural unit by conductive film.

Second external circuits electrode is made up of multiple structural unit, when the impurity in gas falls into, not easily causes short circuit, reduce further the probability that impurity contamination lost efficacy; There is gap between multiple structural unit simultaneously, increase sample space, thus strengthen the intensity of sampled signal, improve sensor signal to noise ratio (S/N ratio) and susceptibility.

Further, polarization structure is made up of single structure unit, or polarization structure is made up of multiple structural unit.

Polarization structure is made up of multiple structural unit, there is gap between multiple structural unit, gas is flowed in-between the electrodes smooth and easy, improves the efficiency of ventilation, thus strengthens the intensity of sampled signal, improves signal to noise ratio (S/N ratio) and the susceptibility of sensor.

Further, structural unit is cross section is the cuspidated column of one end tool.

Structural unit adopts cross section to be the cuspidated column of one end tool, the electric field produced is concentrated at tip place, thus the voltage be carried between the first external circuits electrode and the second external circuits electrode can be reduced further, make ionizing transducer ionized gaseous molecules at lower voltages, realize gas sensing function.

Further, cross section is the cuspidated column of one end tool be cross section is drop-shaped column.

Structural unit adopts cross section to be drop-shaped column, the electric field produced is concentrated at tip place, thus can reduce on-load voltage further; Simultaneously because drops two ends curvature is different, be conducive to gas flowing, improve the efficiency of ventilation, thus strengthen the intensity of sampled signal, improve signal to noise ratio (S/N ratio) and the susceptibility of sensor.

Further, the first external circuits electrode, polarization structure and the second external circuits electrode runs parallel are arranged.

Further, the first external circuits electrode, polarization structure and the second external circuits electrode are coaxially arranged.

First external circuits electrode, polarization structure and the second external circuits electrode are coaxially arranged, because loop configuration does not exist open boundary, the electric field produced everywhere is consistent, need not as the sensor of the electrode that be arranged in parallel, need to carry out particular design to border, the sensor coaxially arranging electrode is simpler in design and processing.

Further, big L/D ratio material by two dimensions below 500 nanometers, length-diameter ratio be greater than 10 tubulose, wire, bar-shaped, needle-like or banded structure nano material composition.

Further, substrate is insulator, or surface is provided with conductor or the semiconductor of insulator.

Compared with prior art, the ionizing transducer based on discharge electric field with micro-gap polarization structure provided by the invention has following beneficial effect:

(1) polarization structure is set between electrode pair, at the local implementation minim gap highfield of discharge space, thus when electrode pair on-load voltage is lower, such as, in the scope of 1.25V-40V, meet the condition of gas molecule ionization, realize gas sensing function;

(2) polarization structure is set between electrode pair, at the local implementation minim gap highfield of discharge space, make can there be larger gap between electrode pair, such as can be greater than 240 microns, the film film based on cheapness can be used as the micro fabrication of photo mask board to realize the manufacture of device architecture, thus reduce the difficulty of processing of sensor;

(3) big L/D ratio material is at least arranged at part surface or all surfaces of parts in the first external circuits electrode, the second external circuits electrode and polarization structure three parts, and all surfaces of electrode pair and polarization structure will be arranged at by big L/D ratio material, make the not easily short circuit of sensor, be easy to processing and use in reliability higher;

(4) polarization structure is set between electrode pair, can effectively prevent the pollutant such as dust, fiber from falling into instability that the minim gap between electrode pair causes and Problem of Failure, improves the reliability of sensor;

(5) electrode pair and polarization structure are made up of multiple structural unit, there is gap in multiple structural unit composition, when the pollutant such as dust, fiber falls into, not easily cause short circuit sensor, in addition owing to there is gap, gas flowing is more smooth and easy, thus improves scavenging efficiency, improves signal to noise ratio (S/N ratio) and the susceptibility of sensor;

(6) structural unit forming electrode pair and polarization structure is the cuspidated column of one end, cross section tool, and the electric field produced at tip place is concentrated, and can reduce the voltage be carried on electrode pair further.

In sum, sensor provided by the invention, can use less discharging gap, and need not worry the short circuit problem of big L/D ratio material, thus effectively reduces working sensor voltage.Meanwhile, effectively can prevent the pollutant such as dust, fiber to drop the instability and Problem of Failure that cause in minim gap, and therefore, it is possible to improve signal to noise ratio (S/N ratio) and susceptibility.

Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand object of the present invention, characteristic sum effect fully.

Accompanying drawing explanation

Fig. 1 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 1;

Fig. 2 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 2;

Fig. 3 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 3;

Fig. 4 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 4;

Fig. 5 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 5;

Fig. 6 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 6;

Fig. 7 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 7;

Fig. 8 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 8;

Fig. 9 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 9;

Figure 10 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 10;

Figure 11 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 11;

Figure 12 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 12;

Figure 13 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 13;

Figure 14 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of the embodiment of the present invention 14;

Figure 15 is the structural representation of the ionizing transducer based on discharge electric field with micro-gap polarization structure of embodiment of the present invention 15-17.

Embodiment

Embodiment 1:

As shown in Figure 1, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: copper first external circuits electrode 1, copper second external circuits electrode 2, copper polarization structure 3, big L/D ratio material 4 and substrate of glass 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at all surfaces of the first external circuits electrode 1 and the second external circuits electrode 2, and is arranged at the part surface of polarization structure 3; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.

Between first external circuits electrode 1 and polarization structure 3, there is the gas gap of 50 microns, between second external circuits electrode 2 and polarization structure 3, there is the gas gap of 50 microns, the gap between the first external circuits electrode 1 and the second external circuits electrode 2 is 2 millimeters.

First external circuits electrode 1 comprises two parts: the first, the array of multiple discrete structural unit 11 composition, the second, the conductive film 12 of syndeton unit 11.Structural unit 11 is the prism structure of 20 microns high, and the cross section that prism is parallel to substrate surface is shuttle shape, and one end has tip, adjacent discrete structural unit spacing 10 microns, and conductive film 12 is made up of 30 nano thickness chromium and 180 nano thickness gold above thereof.

Second external circuits electrode 2 comprises two parts: the first, the array of multiple discrete structural unit 21 composition, the second, the conductive film 22 of syndeton unit 21.Structural unit 21 is the prism structure of 20 microns high, and the cross section that prism is parallel to substrate surface is shuttle shape, and one end has tip, adjacent discrete structural unit spacing 10 microns, and conductive film 22 is made up of 30 nano thickness chromium and 180 nano thickness gold above thereof.

The structural unit of composition electrode pair is the cuspidated column of one end, cross section tool, and the electric field produced at tip place is concentrated, and can reduce the voltage be carried on electrode pair further.

The array that polarization structure 3 is made up of multiple discrete structural unit 31, array is made up of four row being parallel to the first external circuits electrode 1 and the second external circuits electrode 2, often between row, gas gap is minimum is 200 microns, often in row local array, the minimum spacing of unit is 50 microns, structural unit 31 is the prismatic structure of 20 microns high, and the cross section that prism is parallel to substrate surface is drops.

The structural unit of composition polarization structure is the cuspidated column of one end, cross section tool, and the electric field produced at tip place is concentrated, and can reduce the voltage be carried on electrode pair further.

One end, cross section cuspidated column of tool is drops column, and drops has different radius-of-curvature, is more conducive to gas flow clear and coherent smooth, improves gas exchange rate, thus improves signal to noise ratio (S/N ratio) and the susceptibility of sensor.

Device electrode and polarization structure use the micro fabrication manufacture based on photo mask board to realize.

Big L/D ratio material 4 is zinc oxide nano rod macroscopic body and multi-walled carbon nano-tubes macroscopic body, comprise three parts, Part I is 41, be specially multi-walled carbon nano-tubes macroscopic body, basic granules in macroscopic body in a tubular form, mean diameter 10 nanometer, average length 10 microns, length-diameter ratio (average length is divided by mean diameter) is 1000, is coated on all surfaces of each separate structure unit 11 of the first external circuits electrode 1; Part II is 42, be specially multi-walled carbon nano-tubes macroscopic body, basic granules in macroscopic body in a tubular form, mean diameter 10 nanometer, average length 30 microns, length-diameter ratio (average length is divided by mean diameter) is about 3000, is coated on all surfaces of each separate structure unit 21 of the second external circuits electrode 2; Part III is 43, be specially zinc oxide nano rod macroscopic body, basic granules in macroscopic body is bar-shaped, mean diameter 200 nanometer, average length 12 microns, length-diameter ratio is 60, is coated on the part surface on polarization structure 3 each separate structure unit 31 surface, specifically, be the top of polarization structure 3 each structural unit 31 upper surface and sidewall.For zinc oxide nano rod macroscopic body, the top of sidewall refers to 1/10th of each structural unit 31 height.

Be coated on the part surface on polarization structure 3 each separate structure unit 31 surface, all surfaces of polarization structure will be arranged at by big L/D ratio material, make sensor not easily short circuit, be easy to processing and in using reliability higher.

When the first external circuits electrode 1 of this sensor is connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, sensor is positioned in gas concentration buncher, and test target gas is the combination gas of acetone various concentration in atmosphere.The current difference that sensor produces due to the difference of acetone concentration in same electrical pressure, as the characteristic signal of identification gas, realizes gas sensing function.

Test front sensor device is exposed to be placed ten days in atmosphere, does not occur the short circuit phenomenon that the impurity such as dust cause.And do not have the contrast electrode of the same characteristic features gap size of polarization structure to occur showing difference significantly to have occurred impurity contamination.

Test result shows, under 5V voltage, sensor component has the current-responsive of 23nA to 80ppm acetone gas, 800ppm acetone gas is had to the current-responsive of 17nA.Sensor can realize the Concentration Testing of acetone gas under small voltage.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 5V voltage, sensor component has the current-responsive of 15nA to 200ppm acetone gas, 500ppm acetone gas is had to the current-responsive of 10nA.

The voltage being carried in electrode pair is 5V, under lower voltage conditions, meets the condition of gas molecule ionization, realizes gas sensing function.

Embodiment 2:

As shown in Figure 2, the technical scheme of the present embodiment is except following characteristics, all identical with embodiment 1: big L/D ratio material 4 is arranged at all surfaces of the first external circuits electrode 1, and be arranged at the part surface of polarization structure 3, specifically, for the top of polarization structure 3 each structural unit 31 upper surface and sidewall, be not arranged at the surface of the second external circuits electrode 2.In the sensor of the present embodiment, big L/D ratio material 4 is not arranged at the surface of the second external circuits electrode 2, the present invention does not require electrode pair and polarization structure all arrange big L/D ratio material, therefore processing is easier to, and be not easy to occur short circuit problem, be conducive to improving device yield and stability.

First external circuits electrode 1 of this sensor is connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2.Test result shows, under 5V voltage, sensor component has the current-responsive of 21nA to 80ppm acetone gas, 800ppm acetone gas is had to the current-responsive of 13nA, and sensor can realize the Concentration Testing of acetone gas under small voltage.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 5V voltage, sensor component has the current-responsive of 12nA to 300ppm acetone gas, 600ppm acetone gas is had to the current-responsive of 9nA.

Embodiment 3:

As shown in Figure 3, the technical scheme of the present embodiment is except following characteristics, all identical with embodiment 1: big L/D ratio material 4 is not arranged at the surface of the first external circuits electrode 1 and the second external circuits electrode 2, is only arranged at the part surface of polarization structure 3.

In the sensor of the present embodiment, be only arranged at the part surface of polarization structure 3, the present invention does not require electrode pair and polarization structure all arrange big L/D ratio material, does not require all surfaces being arranged at electrode pair or polarization structure yet, is therefore easier to processing.

First external circuits electrode 1 of this sensor is connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2.Test result shows, under 36V voltage, sensor component has the current-responsive of 28.4nA to 80ppm acetone gas, 200ppm acetone gas is had to the current-responsive of 24.5nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 36V voltage, sensor component has the current-responsive of 23nA to 100ppm acetone gas, 300ppm acetone gas is had to the current-responsive of 17nA.

Embodiment 4:

As shown in Figure 4, the technical scheme of the present embodiment is except following characteristics, all identical with embodiment 1: big L/D ratio material 4 is arranged at all surfaces of the first external circuits electrode 1 and the second external circuits electrode 2, is not arranged at the surface of polarization structure 3.

First external circuits electrode 1 of this sensor is connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2.Test result shows, under 36V voltage, sensor component has the current-responsive of 19.8nA to 80ppm acetone gas, 800ppm acetone gas is had to the current-responsive of 23.5nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 36V voltage, sensor component has the current-responsive of 21nA to 300ppm acetone gas, 500ppm acetone gas is had to the current-responsive of 17nA.

Embodiment 5:

As shown in Figure 5, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: copper first external circuits electrode 1, copper second external circuits electrode 2, copper polarization structure 3, big L/D ratio material 4 and substrate of glass 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at all surfaces of the first external circuits electrode 1; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.

Between first external circuits electrode 1 and polarization structure 3, there is the gas gap of 80 microns, between second external circuits electrode 2 and polarization structure 3, there is the gas gap of 80 microns, the gap between the first external circuits electrode 1 and the second external circuits electrode 2 is 240 microns.

First external circuits electrode 1 comprises two parts: the first, the array of multiple discrete structural unit 11 composition, the second, the conductive film 12 of syndeton unit 11.Structural unit 11 is the prism structure of 20 microns high, and the cross section that prism is parallel to substrate surface is shuttle shape, adjacent discrete structural unit spacing 10 microns, and conductive film 12 is made up of 30 nano thickness chromium and 180 nano thickness gold above thereof.

Second external circuits electrode 2 comprises two parts: the first, the array of multiple discrete structural unit 21 composition, the second, the conductive film 22 of syndeton unit 21.Structural unit 21 is the prism structure of 20 microns high, and the cross section that prism is parallel to substrate surface is shuttle shape, adjacent discrete structural unit spacing 10 microns, and conductive film 22 is made up of 30 nano thickness chromium and 180 nano thickness gold above thereof.

The single column array that polarization structure 3 is made up of multiple discrete structural unit 31, be parallel to the first external circuits electrode 1 and the second external circuits electrode 2, often in row local array, the minimum spacing of unit is 50 microns, structural unit 31 is the column structure of 30 microns high, and the cross section that prism is parallel to substrate surface is drops.

Big L/D ratio material 4 is multi-walled carbon nano-tubes macroscopic body, only include a part 41, be specially multi-walled carbon nano-tubes macroscopic body, basic granules in macroscopic body in a tubular form, mean diameter 8 nanometer, average length 12 microns, length-diameter ratio is 1500, is coated on all surfaces of each separate structure unit 11 of the first external circuits electrode 1.

First external circuits electrode 1 of this sensor is connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2.Test result shows, under 12V voltage, sensor component has the current-responsive of 25.9nA to 50ppm acetone gas, 600ppm acetone gas is had to the current-responsive of 22.7nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 12V voltage, sensor component has the current-responsive of 24.2nA to 300ppm acetone gas, 500ppm acetone gas is had to the current-responsive of 21.5nA.

Embodiment 6:

As shown in Figure 6, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: nickel matter first external circuits electrode 1, nickel matter second external circuits electrode 2, nickel matter polarization structure 3, big L/D ratio material 4 and substrate of glass 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at all surfaces of the first external circuits electrode 1; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.Substrate 5 has the monocrystalline silicon of 1 micron thickness silicon nitride for surface deposition.

Electrode pair and polarization structure both can adopt copper, and also can adopt nickel matter, the present invention does not limit this.

First external circuits electrode 1 is the sawtooth column structure of 30 microns high, and the first external circuits electrode 1 is made up of single structure unit.

Sawtooth is that one end, cross section has multiple tip, and the electric field produced at tip place is concentrated, and can reduce the voltage be carried on electrode pair further.

Second external circuits electrode 2 is rectangular structure of 30 microns high, and the second external circuits electrode 2 is made up of single structure unit.

Polarization structure 3 is the bilateral pectination of 30 microns high, is parallel to the first external circuits electrode 1 and the second external circuits electrode 2; Polarization structure 3 is made up of single structure unit; Cross section the widest part that bilateral pectination is parallel to substrate surface is 180 microns, and the narrowest place is 100 microns, and the minimum spacing of adjacent fingers is 30 microns.

Bilateral pectination is that two ends, cross section have multiple tip, and the electric field produced at tip place is concentrated, and can reduce the voltage be carried on electrode pair further.

In bilateral pectination, every a pair tooth can be arranged separately, and namely two ends, cross section have a most advanced and sophisticated structural unit, arrange gap therebetween, is conducive to gas flow clear and coherent smooth, improves gas exchange rate, thus improves signal to noise ratio (S/N ratio) and the susceptibility of sensor.

Big L/D ratio material 4 is multi-walled carbon nano-tubes macroscopic body, basic granules in macroscopic body in a tubular form, mean diameter 10 nanometer, average length 12 microns, length-diameter ratio is 1200, comprises two parts, Part I is 41, being coated on the part surface of each separate structure unit 11 of the first external circuits electrode 1, specifically, is the upper surface of each separate structure unit 11; Part II is 42, is coated on the part surface of each separate structure unit 21 of the second external circuits electrode 2, specifically, is the upper surface of each separate structure unit 21.

First external circuits electrode 1 of this sensor is connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2.Test result shows, under 12V voltage, sensor component has the current-responsive of 18.2nA to 200ppm acetone gas, 800ppm acetone gas is had to the current-responsive of 14.6nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 12V voltage, sensor component has the current-responsive of 16.2nA to 300ppm acetone gas, 500ppm acetone gas is had to the current-responsive of 11.5nA.

Embodiment 7:

As shown in Figure 7, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: copper first external circuits electrode 1, copper second external circuits electrode 2, copper polarization structure 3, big L/D ratio material 4 and substrate of glass 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at the part surface of the first external circuits electrode 1 and all surfaces of the second external circuits electrode 2; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.Substrate 5 is the Kapton of 10 micron thickness.

Between first external circuits electrode 1 and polarization structure 3, there is the gas gap of minimum 60 microns, between second external circuits electrode 2 and polarization structure 3, there is the gas gap of minimum 60 microns, the gap between the first external circuits electrode 1 and the second external circuits electrode 2 is 24 millimeters.

First external circuits electrode 1 is the sawtooth column structure of 30 microns high, is made up of single structure unit.

Second external circuits electrode 2 comprises two parts: the first, the array of multiple discrete structural unit 21 composition, the second, the conductive film 22 of syndeton unit 21.Structural unit 21 is the prism structure of 20 microns high, and the cross section that prism is parallel to substrate surface is shuttle shape, adjacent discrete structural unit spacing 15 microns, and conductive film 22 is made up of 30 nano thickness chromium and 180 nano thickness gold above thereof.

Polarization structure 3 is made up of two discrete structural units 31, and the spacing being parallel to the first external circuits electrode 1 and the second external circuits electrode 2, two discrete structural units 31 is 60 microns, and structural unit 31 is the rectangular structure of 30 microns high.

Big L/D ratio material 4 is zinc oxide nano rod macroscopic body and multi-walled carbon nano-tubes macroscopic body, comprise two parts, Part I is 41, is specially zinc oxide nano rod macroscopic body, and the basic granules in macroscopic body is wire, mean diameter 60 nanometer, average length 12 microns, length-diameter ratio is 200, is coated on the part surface of the first external circuits electrode 1, specifically, be the upper surface of the first external circuits electrode 1; Part II is 42, is specially multi-walled carbon nano-tubes macroscopic body, and in a tubular form, mean diameter 10 nanometer, average length 20 microns, length-diameter ratio is 2000 to the basic granules in macroscopic body, is coated on all surfaces of each separate structure unit 21 of the second external circuits electrode 2.

First external circuits electrode 1 of this sensor is connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2.Test result shows, under 36V voltage, sensor component has the current-responsive of 34nA to 100ppm acetone gas, 300ppm acetone gas is had to the current-responsive of 31.5nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 36V voltage, sensor component has the current-responsive of 32.2nA to 300ppm acetone gas, 500ppm acetone gas is had to the current-responsive of 27.6nA.

Embodiment 8:

As shown in Figure 8, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: nickel matter first external circuits electrode 1, nickel matter second external circuits electrode 2, nickel matter polarization structure 3, big L/D ratio material 4 and quartz glass substrate 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at the part surface of polarization structure 3; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.Substrate 5 is the printed circuit board (PCB) of glass fibre and epoxy resin composition.

Between first external circuits electrode 1 and polarization structure 3, there is the gas gap of 50 microns, between second external circuits electrode 2 and polarization structure 3, there is the gas gap of 50 microns, the gap between the first external circuits electrode 1 and the second external circuits electrode 2 is 1 millimeter.

First external circuits electrode 1 is the rectangular structure of high 30 microns, is made up of single structure unit.

The array that polarization structure 3 is made up of multiple discrete structural unit 31, array is made up of four row being parallel to the first external circuits electrode 1 and the second external circuits electrode 2, often between row, gas gap is minimum is 50 microns, often in row local array, the minimum spacing of unit is 50 microns, structural unit 31 is the column structure of 20 microns high, and the cross section that prism is parallel to substrate surface is drops.

Big L/D ratio material 4 is zinc oxide nano rod macroscopic body, basic granules in macroscopic body is wire, mean diameter 60 nanometer, average length 6 microns, length-diameter ratio is 100, only includes a part 43, be coated on the part surface on polarization structure 3 each separate structure unit 31 surface, specifically, be the top of polarization structure 3 each separate structure unit 31 upper surface and sidewall, the top of sidewall refers to 1/5th of structural unit 31 height.

First external circuits electrode 1 of this sensor is connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2.Test result shows, under 24V voltage, sensor component has the current-responsive of 30nA to 50ppm acetone gas, 200ppm acetone gas is had to the current-responsive of 24nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 24V voltage, sensor component has the current-responsive of 27nA to 300ppm acetone gas, 500ppm acetone gas is had to the current-responsive of 21nA.

Embodiment 9:

As shown in Figure 9, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: nickel matter first external circuits electrode 1, nickel matter second external circuits electrode 2, nickel matter polarization structure 3, big L/D ratio material 4 and quartz glass substrate 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at the part surface of the first external circuits electrode 1, second external circuits electrode 2 and polarization structure 3; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.Substrate 5 has 200 micron thickness stainless steels of 30 micron thickness teflon for surface attachment.

Adopt quartz glass substrate, because quartz glass is made up of pure quartz crystal, its surface resistivity is than glass height 1-2 order of magnitude, thus less on the impact of the feeble signal recorded, thus improves signal to noise ratio (S/N ratio) and the susceptibility of sensor.

Between first external circuits electrode 1 and polarization structure 3, there is the gas gap of 60 microns, between second external circuits electrode 2 and polarization structure 3, there is the gas gap of 60 microns, the gap between the first external circuits electrode 1 and the second external circuits electrode 2 is 180 microns.

First external circuits electrode 1 spends gear ring structure in 20 microns high, is made up of single structure unit.

Interior colored gear ring structure is that one end, cross section has multiple tip, and the electric field produced at tip place is concentrated, and can reduce the voltage be carried on electrode pair further.

Second external circuits electrode 2 is column structures of 20 microns high, is made up of single structure unit.

Polarization structure 3 is 20 microns of high circular ring structures, is made up of single structure unit.

First external circuits electrode 1, polarization structure 3 and the second external circuits electrode 2 are coaxial setting, because loop configuration does not exist open boundary, the electric field produced everywhere is consistent, need not as the sensor of the electrode that be arranged in parallel, need to carry out particular design to border, the sensor coaxially arranging electrode is simpler in design and processing.

Big L/D ratio material 4 is zinc oxide nano rod macroscopic body and multi-walled carbon nano-tubes macroscopic body, comprise three parts, Part I is 41, be specially multi-walled carbon nano-tubes macroscopic body, basic granules in macroscopic body in a tubular form, mean diameter 10 nanometer, average length 20 microns, length-diameter ratio is 2000, is coated on the upper surface of the first external circuits electrode 1; Part II is 42, be specially zinc oxide nano rod macroscopic body, basic granules in macroscopic body is needle-like, top cross-section mean diameter is 30 nanometers, average length 12 microns, length-diameter ratio is 400, is coated on the upper surface of the second external circuits electrode 2 and the top of sidewall, and the top of sidewall refers to 1/5th of structure 2 height; Part III is 43, be specially zinc oxide nano rod macroscopic body, basic granules in macroscopic body is needle-like, top cross-section mean diameter is 30 nanometers, average length 12 microns, length-diameter ratio is 400, is coated on the upper surface of polarization structure 3 and the top of sidewall, and the top of sidewall refers to 1/5th of structure 3 height.The method of multilayer wiring is adopted to be connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2 by the first external circuits electrode 1 of this sensor, sensor is positioned in gas concentration buncher, and test target gas is the combination gas of ethanol various concentration in atmosphere.The current difference that sensor produces due to the difference of concentration of alcohol in same electrical pressure, as the characteristic signal of identification gas, realizes gas sensing function.

Test front sensor device is exposed to be placed two weeks in atmosphere, does not occur the short circuit phenomenon that the impurity such as dust cause, but only has a row, so still there is certain wild effect due to polarization structure.Test result shows, under 36V voltage, sensor component has the current-responsive of 200nA to 100ppm alcohol gas, 300ppm alcohol gas is had to the current-responsive of 153nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 36V voltage, sensor component has the current-responsive of 137nA to 500ppm alcohol gas, 900ppm alcohol gas is had to the current-responsive of 90nA.

Embodiment 10:

As shown in Figure 10, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: copper first external circuits electrode 1, copper second external circuits electrode 2, copper polarization structure 3, big L/D ratio material 4 and substrate of glass 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at the part surface of the first external circuits electrode 1, second external circuits electrode 2; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.

Between first external circuits electrode 1 and polarization structure 3, there is the gas gap of 80 microns, between second external circuits electrode 2 and polarization structure 3, there is the gas gap of 80 microns, the gap between the first external circuits electrode 1 and the second external circuits electrode 2 is 300 microns.

First external circuits electrode 1 spends gear ring structure in 20 microns high, is made up of single structure unit

Big L/D ratio material 4 is zinc oxide nano rod macroscopic body and multi-walled carbon nano-tubes macroscopic body, comprise two parts, Part I is 41, be specially multi-walled carbon nano-tubes macroscopic body, basic granules in macroscopic body in a tubular form, mean diameter 8 nanometer, average length 12 microns, length-diameter ratio is 1500, is coated on the upper surface of the first external circuits electrode 1; Part II is 42, be specially zinc oxide nano rod macroscopic body, basic granules in macroscopic body is wire, mean diameter is 60 nanometers, average length 12 microns, length-diameter ratio is 200, is coated on the upper surface of the second external circuits electrode 2 and the top of sidewall, and the top of sidewall refers to 1/5th of electrode 2 height.

The method of substrate surface multilayer wiring is adopted to be connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2 by the first external circuits electrode 1 of this sensor, sensor is positioned in gas concentration buncher, and test target gas is the combination gas of ethanol various concentration in atmosphere.The current difference that sensor produces due to the difference of concentration of alcohol in same electrical pressure, as the characteristic signal of identification gas, realizes gas sensing function.Test front sensor device is exposed to be placed two weeks in atmosphere, does not occur the short circuit phenomenon that the impurity such as dust cause.Test result shows, under 40V voltage, sensor component has the current-responsive of 78nA to 100ppm alcohol gas, 400ppm alcohol gas is had to the current-responsive of 56nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 40V voltage, sensor component has the current-responsive of 64nA to 300ppm alcohol gas, 500ppm alcohol gas is had to the current-responsive of 43nA.

Embodiment 11:

As shown in figure 11, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: nickel matter first external circuits electrode 1, nickel matter second external circuits electrode 2, nickel matter polarization structure 3, big L/D ratio material 4 and substrate of glass 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at the part surface of the first external circuits electrode 1 and the second external circuits electrode 2; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.

Between first external circuits electrode 1 and polarization structure 3, there is the gas gap of 80 microns, between second external circuits electrode 2 and polarization structure 3, there is the gas gap of 80 microns, the gap between the first external circuits electrode 1 and the second external circuits electrode 2 is 1 millimeter.

The annular array that polarization structure 3 is made up of multiple discrete structural unit 31, array forms with 3 row loop configuration unit 31 of the coaxial line in the first external circuits electrode 1 and the second external circuits electrode 2, often between row, gas gap is minimum is 100 microns, often in row local array, the minimum spacing of unit is 50 microns, structural unit 31 is the column structure of 20 microns high, and the cross section that prism is parallel to substrate surface is drops.

Big L/D ratio material 4 is zinc oxide nano rod macroscopic body and multi-walled carbon nano-tubes macroscopic body, comprise three parts, Part I is 41, be specially multi-walled carbon nano-tubes macroscopic body, basic granules in macroscopic body in a tubular form, mean diameter 8 nanometer, average length 12 microns, length-diameter ratio is 1500, is coated on the upper surface of the first external circuits electrode 1; Part II is 42, be specially zinc oxide nano rod macroscopic body, basic granules in macroscopic body is wire, mean diameter is 60 nanometers, average length 12 microns, length-diameter ratio is 200, is coated on the upper surface of the second external circuits electrode 2 and the top of sidewall, and the top of sidewall refers to 2/5ths of electrode 2 height; Part III is 43, be specially zinc oxide nano rod macroscopic body, basic granules in macroscopic body is wire, mean diameter is 60 nanometers, average length 12 microns, length-diameter ratio is 200, is coated on each discrete structural unit 31 upper surface of external polarization structure 3 and the top of sidewall, and the top of sidewall refers to 2/5ths of each structural unit 31 height.

The method of substrate surface multilayer wiring is adopted to be connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2 by the first external circuits electrode 1 of this sensor, sensor is positioned in gas concentration buncher, and test target gas is the combination gas of ethanol various concentration in atmosphere.The current difference that sensor produces due to the difference of concentration of alcohol in same electrical pressure, as the characteristic signal of identification gas, realizes gas sensing function.Test front sensor device is exposed to be placed two weeks in atmosphere, does not occur the short circuit phenomenon that the impurity such as dust cause.Test result shows, under 9V voltage, sensor component has the current-responsive of 19nA to 80ppm alcohol gas, 200ppm alcohol gas is had to the current-responsive of 14.7nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 9V voltage, sensor component has the current-responsive of 13.8nA to 300ppm alcohol gas, 500ppm alcohol gas is had to the current-responsive of 11.3nA.

Embodiment 12:

As shown in figure 12, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: copper first external circuits electrode 1, copper second external circuits electrode 2, copper polarization structure 3, big L/D ratio material 4 and substrate of glass 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at the part surface of the first external circuits electrode 1, second external circuits electrode 2 and polarization structure 3; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.

First external circuits electrode 1 comprises two parts: the first, the array of multiple discrete structural unit 11 composition, the second, the conductive film 12 of syndeton unit 11.Structural unit 11 is the prism structure of 20 microns high, and the cross section that prism is parallel to substrate surface is shuttle shape, adjacent discrete structural unit spacing 50 microns, and conductive film 12 is made up of 30 nano thickness chromium and 180 nano thickness gold above thereof.

Second external circuits electrode 2 is structures of 20 microns high, and the cross section being parallel to substrate surface is outer colored gear-like.

Polarization structure 3 is 20 microns of high circular ring structures, and the cross section being parallel to substrate surface is inside and outside colored gear colyliform.

Big L/D ratio material 4 is zinc oxide nano rod macroscopic body and multi-walled carbon nano-tubes macroscopic body, comprise two parts, Part I is 41, be specially multi-walled carbon nano-tubes macroscopic body, basic granules in macroscopic body in a tubular form, mean diameter 10 nanometer, average length 10 microns, length-diameter ratio is 1000, is coated on the upper surface of the first external circuits electrode 1; Part II is 43, is specially zinc oxide nano rod macroscopic body, and the basic granules in macroscopic body is wire, mean diameter is 60 nanometers, average length 9 microns, and length-diameter ratio is 150, be coated on the upper surface of polarization structure 3 and the top of sidewall, the top of sidewall refers to 1/4th of structure 3 height.

The method of substrate surface multilayer wiring is adopted to be connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2 by the first external circuits electrode 1 of this sensor, sensor is positioned in gas concentration buncher, and test target gas is the combination gas of ethanol various concentration in atmosphere.The current difference that sensor produces due to the difference of concentration of alcohol in same electrical pressure, as the characteristic signal of identification gas, realizes gas sensing function.Test front sensor device is exposed to be placed two weeks in atmosphere, does not occur the short circuit phenomenon that the impurity such as dust cause.Test result shows, under 24V voltage, sensor component has the current-responsive of 7nA to 200ppm alcohol gas, 600ppm alcohol gas is had to the current-responsive of 2.4nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 24V voltage, sensor component has the current-responsive of 5nA to 300ppm alcohol gas, 500ppm alcohol gas is had to the current-responsive of 4.3nA.

Embodiment 13:

As shown in figure 13, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: copper first external circuits electrode 1, copper second external circuits electrode 2, copper polarization structure 3, big L/D ratio material 4 and substrate of glass 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at the part surface of the second external circuits electrode 2 and polarization structure 3; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.

Between first external circuits electrode 1 and polarization structure 3, there is the minimum gas gap of 50 microns, between second external circuits electrode 2 and polarization structure 3, there is the minimum gas gap of 50 microns, the gap between the first external circuits electrode 1 and the second external circuits electrode 2 is 300 microns.

First external circuits electrode 1 comprises two parts: the first, the array of multiple discrete structural unit 11 composition, the second, the conductive film 12 of syndeton unit 11.Structural unit 11 is the prism structure of 20 microns high, and the cross section that prism is parallel to substrate surface is drops, adjacent discrete structural unit spacing 50 microns, and conductive film 12 is made up of 30 nano thickness chromium and 180 nano thickness gold above thereof.

Second external circuits electrode 2 comprises two parts: the first, the array of multiple discrete structural unit 21 composition, the second, the conductive film 22 of syndeton unit 21.Structural unit 21 is the prism structure of 20 microns high, and the cross section that prism is parallel to substrate surface is drops, adjacent discrete structural unit spacing 20 microns, and conductive film 22 is made up of 30 nano thickness chromium and 180 nano thickness gold above thereof.

Polarization structure 3 is made up of the concentric circles annulated column 31 of two 20 microns high, and adjacent 31 at a distance of 100 microns.

Big L/D ratio material 4 is zinc oxide nano rod macroscopic body, basic granules in macroscopic body is bar-shaped, mean diameter 100 nanometer, average length 10 microns, length-diameter ratio is 100, only includes a part 42, be coated on the regional area of each discrete structural unit 21 of the second external circuits electrode 2, specifically, each discrete structural unit 21 upper surface of the second external circuits electrode 2 and the top of sidewall, the top of sidewall refers to 1/4th of structural unit 21 height

The method of substrate surface multilayer wiring is adopted to be connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2 by the first external circuits electrode 1 of this sensor, sensor is positioned in gas concentration buncher, and test target gas is the combination gas of ethanol various concentration in atmosphere.The current difference that sensor produces due to the difference of concentration of alcohol in same electrical pressure, as the characteristic signal of identification gas, realizes gas sensing function.Test front sensor device is exposed to be placed two weeks in atmosphere, does not occur the short circuit phenomenon that the impurity such as dust cause.Test result shows, under 12V voltage, sensor component has the current-responsive of 17nA to 200ppm alcohol gas, 600ppm alcohol gas is had to the current-responsive of 8nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 12V voltage, sensor component has the current-responsive of 6nA to 700ppm alcohol gas, 900ppm alcohol gas is had to the current-responsive of 4.3nA.

Embodiment 14:

As shown in figure 14, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: nickel matter first external circuits electrode 1, nickel matter second external circuits electrode 2, nickel matter polarization structure 3, big L/D ratio material 4 and quartz glass substrate 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at the part surface of the second external circuits electrode 2 and polarization structure 3; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.

Between first external circuits electrode 1 and polarization structure 3, there is the minimum gas gap of 50 microns, between second external circuits electrode 2 and polarization structure 3, there is the minimum gas gap of 50 microns, the gap between the first external circuits electrode 1 and the second external circuits electrode 2 is 800 microns.

First external circuits electrode 1 comprises two parts: the first, the array of multiple discrete structural unit 11 composition, the second, the conductive film 12 of syndeton unit 11.Structural unit 11 is the prism structure of 20 microns high, and the cross section that prism is parallel to substrate surface is drops, adjacent discrete structural unit spacing 60 microns, and conductive film 12 is made up of 30 nano thickness chromium and 180 nano thickness gold above thereof.

Second external circuits electrode 2 is column structures of 20 microns high.

Polarization structure 3 is annular arrays of multiple discrete structural unit 31 composition, and the cross section that prism is parallel to substrate surface is drops, and the minimum spacing of each ring is 100 microns, and adjacent discrete structural unit minimum spacing is 50 microns.

Big L/D ratio material 4 is zinc oxide nano rod macroscopic body and multi-walled carbon nano-tubes macroscopic body, comprise two parts, Part I 42, be specially multi-walled carbon nano-tubes macroscopic body, basic granules in macroscopic body in a tubular form, mean diameter 8 nanometer, average length 10 microns, length-diameter ratio is 1250, is coated on the upper surface of the second external circuits electrode 2; Part II is 43, be specially zinc oxide nano rod macroscopic body, basic granules in macroscopic body is wire, mean diameter 80 nanometer, average length 16 microns, length-diameter ratio is 200, is coated on each discrete structural unit 31 upper surface of external polarization structure 3 and the top of sidewall, and the top of sidewall refers to 1/4th of structural unit 31 height.

The method of substrate surface multilayer wiring is adopted to be connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2 by the first external circuits electrode 1 of this sensor, sensor is positioned in gas concentration buncher, and test target gas is the combination gas of ethanol various concentration in atmosphere.The current difference that sensor produces due to the difference of concentration of alcohol in same electrical pressure, as the characteristic signal of identification gas, realizes gas sensing function.Test front sensor device is exposed to be placed two weeks in atmosphere, does not occur the short circuit phenomenon that the impurity such as dust cause.Test result shows, under 24V voltage, sensor component has the current-responsive of 14nA to 100ppm alcohol gas, 500ppm alcohol gas is had to the current-responsive of 7.3nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 24V voltage, sensor component has the current-responsive of 11.8nA to 200ppm alcohol gas, 300ppm alcohol gas is had to the current-responsive of 9.6nA.

Embodiment 15:

As shown in figure 15, a kind of ionizing transducer based on discharge electric field with micro-gap polarization structure, comprising: copper first external circuits electrode 1, copper second external circuits electrode 2, copper polarization structure 3, big L/D ratio material 4 and substrate of glass 5; Wherein, polarization structure 3 is arranged between the first external circuits electrode 1 and the second external circuits electrode 2, and big L/D ratio material 4 is arranged at the part surface of polarization structure 3; First external circuits electrode 1, second external circuits electrode 2 and polarization structure 3 are arranged in substrate 5.

Between first external circuits electrode 1 and polarization structure 3, there is the minimum gas gap of 50 microns, between second external circuits electrode 2 and polarization structure 3, there is the minimum gas gap of 50 microns, the gap between the first external circuits electrode 1 and the second external circuits electrode 2 is 600 microns.

First external circuits electrode 1 comprises two parts: the first, the annular array of multiple discrete structural unit 11 composition, the second, the conductive film 12 of syndeton unit 11.Structural unit 11 is the prism structure of 20 microns high, and the cross section that prism is parallel to substrate surface is shuttle shape, adjacent discrete structural unit spacing 50 microns, and conductive film 12 is made up of 30 nano thickness chromium and 180 nano thickness gold above thereof.Second external circuits electrode 2 is column structures of 20 microns high.

Polarization structure 3 is annular arrays of multiple discrete structural unit 31 composition, and the cross section that prism is parallel to substrate surface is drops, and the minimum spacing of each ring is 100 microns, and adjacent discrete structural unit minimum spacing is 30 microns.

Big L/D ratio material 4 is zinc oxide nano rod macroscopic body, basic granules in macroscopic body is wire, mean diameter 80 nanometer, average length 16 microns, length-diameter ratio is 200, only include a part 43, be coated on each discrete structural unit 31 upper surface of external polarization structure 3 and the top of sidewall, the top of sidewall refers to 1/5th of structural unit 31 height.

The method of substrate surface multilayer wiring is adopted to be connected with negative pole with the calibrating terminal positive pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2 by the first external circuits electrode 1 of this sensor, sensor is positioned in gas concentration buncher, and test target gas is the combination gas of ethanol various concentration in atmosphere.The current difference that sensor produces due to the difference of concentration of alcohol in same electrical pressure, as the characteristic signal of identification gas, realizes gas sensing function.Test front sensor device is exposed to be placed two weeks in atmosphere, does not occur the short circuit phenomenon that the impurity such as dust cause.Test result shows, under 36V voltage, sensor component has the current-responsive of 28.3nA to 80ppm alcohol gas, 200ppm alcohol gas is had to the current-responsive of 26.1nA.

When the first external circuits electrode 1 of this sensor is connected with positive pole with the calibrating terminal negative pole of Agilent B2911A type volt-ampere characteristic test source table respectively with the second external circuits electrode 2, under identical test target and condition, under 36V voltage, sensor component has the current-responsive of 27nA to 100ppm alcohol gas, 300ppm alcohol gas is had to the current-responsive of 25.6nA.

Embodiment 16:

Except following characteristics, the big L/D ratio material that the present embodiment uses is identical with embodiment 15:

The first, the basic granules in the big L/D ratio material used is diameter 1 nanometer, average length 10 nanometer, length-diameter ratio are the Single Walled Carbon Nanotube of 10.

The second, the big L/D ratio material used is basic granules---Single Walled Carbon Nanotube and agglomerate form particle---, and ethyl cellulose molecular composition, wherein, the mass percent shared by Single Walled Carbon Nanotube is 10%.This big L/D ratio material is arranged on polarization structure 3 part surface by the method for screen printing sizing agent.

The device that above-mentioned processing technology is processed to form, has the operating voltage of 1.25V ~ 57.5V in atmosphere.Under 1.25V on-load voltage, in the mixed gas of 80ppm formaldehyde and air, its discharge current is 270.2nA; And in the mixed gas formed at 200ppm formaldehyde and air, its discharge current is 511.5nA.Electric current should be able to realize the sensing of the formaldehyde molecule to above-mentioned concentration mutually.

Embodiment 17:

The first, the basic granules in the big L/D ratio material used is maximum gauge 10 microns, the needle-like gallium arsenide structure of minimum diameter 5 nanometer, length 30 microns.

The second, the big L/D ratio material used is basic granules---needle-like gallium arsenide structure and agglomerate form particle---, and ethyl cellulose molecular composition, wherein, the mass percent shared by needle-like gallium arsenide structure is 70%.This big L/D ratio material is arranged on polarization structure 3 part surface by the method for screen printing sizing agent.

The device that above-mentioned processing technology is processed to form, has the operating voltage of 8.4V ~ 79.6V in atmosphere.Under 12V on-load voltage, in the mixed gas of 80ppm formaldehyde and air, its discharge current is 168.2nA; And in the mixed gas formed at 200ppm formaldehyde and air, its discharge current is 219.6nA.Electric current should be able to realize the sensing of the formaldehyde molecule to above-mentioned concentration mutually.

Embodiment 18:

Except following characteristics, the present embodiment is identical with embodiment 17:

Described substrate 5 is the monocrystalline silicon that there are 2 micron thickness thermal oxide layers on surface, and thickness is 250 microns.

The device that above-mentioned processing technology is processed to form, its sensor performance is identical with embodiment 17, but weight reduces by 26%, can with silicon solar cell circuit compatibility, can directly by solar cell for supplying power, for radio node.

Embodiment 19:

Described substrate 5 is Kaptons, and thickness is 30 microns.

The device that above-mentioned processing technology is processed to form, its sensor performance is identical with embodiment 17, but weight reduces by 96%, can compatible flexible circuit, may be used for the sensing system that requirement bio-compatibility is high.

The big L/D ratio material used in above-described embodiment is zinc oxide nano rod macroscopic body, Single Walled Carbon Nanotube macroscopic body, multi-walled carbon nano-tubes macroscopic body and gallium arsenide acicular texture macroscopic body, but the present invention does not limit and uses above big L/D ratio material, other big L/D ratio material can be used, such as: Single Walled Carbon Nanotube macroscopic body, double-walled carbon nano-tube macroscopic body, nanowires of gold macroscopic body, nickel nanowire macro body, magnesium oxide nanometer rod macroscopic body, gallium arsenide nanowire macro body, zinc oxide nano-belt macroscopic body, conducting polymer nanowire macro body, silicon carbide nanometer line macroscopic body, tin oxide nano-wire macroscopic body etc.

Gap in above-described embodiment between the first external circuits electrode 1 and the second external circuits electrode 2 is 240 microns-24 millimeters, but the upper limit of the present invention to gap does not limit, and the upper limit in gap depends on other factors in the processing of microclearance.

In above-described embodiment, test target gas is the mixed gas of acetone or alcohol various concentration in atmosphere, but it will be appreciated by those skilled in the art that: the ionizing transducer based on discharge electric field with micro-gap polarization structure provided by the invention, not only for the mixed gas of acetone or alcohol various concentration in atmosphere, because all gas molecule all can be ionized, therefore the mixed gas of all gas, after demarcating, all there is characteristic gas electrical signal, all can use ionizing transducer provided by the invention.

The experimental result of above-described embodiment shows, sensor of the present invention operationally, only need to load lower voltage on external circuits electrode, just can by the polarization of polarization structure, between polarization structure and external circuits electrode, produce the electric field being enough to ionize target gas molecules, thus effectively reduce working sensor voltage.Compared with the minim gap structure in existing technology between external circuits electrode pair, effectively can prevent the pollutant such as dust, fiber to drop the instability and Problem of Failure that cause in minim gap, can signal to noise ratio (S/N ratio) be improved simultaneously, promote susceptibility.

More than describe preferred embodiment of the present invention in detail.Should be appreciated that those skilled in the art just design according to the present invention can make many modifications and variations without the need to creative work.Therefore, all those skilled in the art, all should by the determined protection domain of claims under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment.

Claims

1. the ionizing transducer based on discharge electric field with micro-gap polarization structure, it is characterized in that, comprise: the first external circuits electrode, the second external circuits electrode, polarization structure, big L/D ratio material and substrate, wherein, described polarization structure is made up of conductor; Described polarization structure is arranged between described first external circuits electrode and described second external circuits electrode; There is gas gap between described first external circuits electrode and described polarization structure, between described second external circuits electrode and described polarization structure, there is gas gap; Described big L/D ratio material is at least arranged at part surface or all surfaces of parts in described first external circuits electrode, described second external circuits electrode and described polarization structure three parts, and described first external circuits electrode, described second external circuits electrode and described polarization structure are arranged in described substrate;

Described first external circuits electrode is made up of single structure unit, or described first external circuits electrode is made up of multiple structural unit, is connected between described multiple structural unit by conductive film;

Described second external circuits electrode is made up of single structure unit, or described second external circuits electrode is made up of multiple structural unit, is connected between described multiple structural unit by conductive film;

Described polarization structure is made up of single structure unit, or described polarization structure is made up of multiple structural unit;

The described structural unit of described first external circuits electrode, described second external circuits electrode and/or described polarization structure is cross section is the column that one end has one or more tip.

2. sensor as claimed in claim 1, it is characterized in that, described first external circuits electrode, described polarization structure and described second external circuits electrode runs parallel are arranged.

3. sensor as claimed in claim 1, it is characterized in that, described first external circuits electrode, described polarization structure and described second external circuits electrode are coaxially arranged.

4. sensor as claimed in claim 1, it is characterized in that, described substrate is insulator, or surface is provided with conductor or the semiconductor of insulator.