CN103645215A - Sensor module based on flexible substrate - Google Patents
Sensor module based on flexible substrate Download PDFInfo
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- CN103645215A CN103645215A CN201310680558.4A CN201310680558A CN103645215A CN 103645215 A CN103645215 A CN 103645215A CN 201310680558 A CN201310680558 A CN 201310680558A CN 103645215 A CN103645215 A CN 103645215A
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Abstract
The invention discloses a sensor module based on a flexible substrate. The sensor module comprises a sensor part and an antenna part, wherein the sensor part and the antenna part use flexible insulating materials as substrates, and are connected through a lead or a clamp, the sensor part is used for sensing an external sensitive signal, the antenna part is used for transmitting and receiving a wireless signal, and the sensor part and the antenna part are combined for realizing detection and transmission of the external sensitive signal under the wireless condition. According to the sensor module, by using the flexible insulating materials such as PI and PET as the substrates and using various microelectronic microprocessing methods, the sensor part and a wireless emitting part are made on the substrates and are combined with the substrates together so that the novel sensor module which is passive, wireless and foldable, is high in portability, and is assembled is formed.
Description
Technical field
The present invention relates to detection and the transmission technique field of sensor signal, especially a kind of sensor assembly based on flexible substrate for sensor signal detection and transmission.
Background technology
Along with social development and the raising of people's living standard, in fields such as food security, medical and health, for light, small-sized, flexible sensor, detect become more and more urgent.Along with the development of Internet of Things, society is also more and more higher for wireless interconnected requirement simultaneously, and wireless senser more and more receives publicity.Sensor based on rigid substrate is very ripe, and still, its application scenarios is subject to the restriction of substrate itself, cannot meet market demands, so flexible substrate has good development potentiality.
Current wireless transport module major part is all to produce once and form based on rigid substrate, can not after moulding, carry out the fine setting of parameter, making can be carried out the wireless transport module based on flexible substrate of small parameter perturbations after moulding, can realize a kind of module multiple use, and be easy to carry, have great importance.
Summary of the invention
(1) technical matters that will solve
In view of this, a kind of sensor assembly based on flexible substrate providing is provided fundamental purpose of the present invention, to realize the collapsible and portable high novel sensor module of passive and wireless.
(2) technical scheme
For achieving the above object, the invention provides a kind of sensor assembly based on flexible substrate, this sensor assembly comprises Sensor section and antenna part, the two all take flexible insulating material as substrate, and connect by wire or fixture, wherein, Sensor section is for the outside sensitive signal of perception, antenna part is for transmission and the reception of wireless signal, and the two is in conjunction with realizing under radio conditions the detection of outside sensitive signal and transmission.
In such scheme, this flexible insulating material is polyimide (PI), polyethylene terephthalate (PET) or special paper material, this special paper material be for example kraft and so on compared with hard paper prepared material.
In such scheme, this Sensor section is the various sensors of making on flexible insulating material substrate, the planar structure of these sensors is different, be at least circle, ellipse, square, rectangle or irregular figure, and all can bend to various shapes, to adapt to various test environment.
In such scheme, the described sensor of making on flexible insulating material substrate is gas sensor or humidity sensor.Described gas sensor is on flexible insulating material substrate, to produce two electrode strips, then between two electrode strips, makes air-sensitive coating.Described air-sensitive coating of making between two electrode strips, its sensitive membrane adopting is the potpourri of organic high molecular polymer, metal oxide or organic high molecular polymer and metal oxide; Its painting method adopting comprises a painting, dip-coating, thermal evaporation or printing.Described organic high molecular polymer is polypyrrole (PPy) or polyaniline (PANI), and described metal oxide is Mo
3, Sn
2, ZnO or Ni.
In such scheme, the size Control of this Sensor section at 50 microns * 50 microns to 1m * 1m.
In such scheme, this antenna part can bend to different shapes according to demand, and can under given configuration profile, finely tune, to realize the effect of optimum reception or transmission.This antenna part is electromagnetic horn, tours antenna or flexible antenna.
(3) beneficial effect
From technique scheme, can find out, the present invention has following beneficial effect:
1, the sensor assembly based on flexible substrate provided by the invention, owing to having adopted antenna, so realized radio characteristics, owing to sensor production can being become have the sensor of self-sustained oscillation characteristic, such as being to produce the components and parts such as inductance, electric capacity or resistance making sensor simultaneously, make it to have from start-oscillation characteristic, so realized sourceless characteristic, because antenna and sensor are based on having on the substrate of flexible characteristic, making it to have can crooked collapsible character, and then has realized the collapsible and portable high novel sensor module of passive and wireless.
2, the sensor assembly based on flexible substrate provided by the invention, because itself can convert the electromagnetic wave receiving to electric energy during antenna receiving signal, this electric energy produces the needed energy of response by the self-sustained oscillation on sensor, can in sensor flexible substrate, produce the electron devices such as inductance, electric capacity or resistance if desired has from start-oscillation characteristic integral body, feeding back to antenna transmission goes out again, so can be made into passive module, and then be applicable to be difficult to the particular surroundings of permanent power supply.
3, the sensor assembly based on flexible substrate provided by the invention, owing to being wireless module, is not subject to the constraint of outer lead, is convenient to the arrangement of module.
Accompanying drawing explanation
Fig. 1 a is the schematic diagram that utilizes the curling capacitor type gas sensor of two long linear structures making;
Fig. 1 b is by the schematic diagram after the structure helix-coil shown in Fig. 1 a;
Fig. 2 a is the schematic diagram of the electromagnetic horn X-Y scheme of a planar structure;
Fig. 2 b utilizes various piece in Fig. 2 a the schematic diagram of the electromagnetic horn obtaining after fixture integration;
Fig. 3 is the schematic diagram of another flexible antenna structure based on flexible substrate;
Fig. 4 is by the combine schematic diagram of the sensor assembly that forms of the structure shown in Fig. 1 b and Fig. 3.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
The present invention is to provide a kind of sensor assembly based on flexible substrate, it is substrate that this sensor assembly be take the flexible insulating materials such as PI, PET, utilize various microelectronics micro-processing methods, sensor and wireless transmit are partly made thereon and combined, form the novel sensor module of the collapsible and portable high assembling of passive and wireless.
Sensor assembly based on flexible substrate provided by the invention, comprise Sensor section and antenna part, the two all take flexible insulating material as substrate, and connect by wire or fixture, wherein flexible insulating material can be polyimide (PI), polyethylene terephthalate (PET) or special paper material etc., this special paper material be for example kraft and so on compared with hard paper prepared material, Sensor section is for the outside sensitive signal of perception, antenna part is for transmission and the reception of wireless signal, the two is in conjunction with realizing under radio conditions the detection of outside sensitive signal and transmission.
In the present invention, this sensor assembly is that to take the parameter of the electricity such as electric capacity or resistance be transducing signal output quantity, i.e. the perhaps variation of resistance etc. of sensor electrical, has caused the variation of concussion frequency, and then caused the variation of antenna transmission frequency.This sensor assembly is to take flexible antenna part as wireless transport module.Sensor section be take flexible insulating material as substrate, makes various special sensors, such as gas sensor, humidity sensor etc. on substrate.These special sensor plane structures can be different, can be the various patterns such as circle, ellipse, square, rectangle, irregular figure, and all can bend to various shapes, to adapt to various test environment, as the environment under less space.The size Control of whole device arrives within the scope of 1m * 1m at 50 microns * 50 microns.Antenna part is also to take flexible insulating material as substrate, and antenna can bend to different shapes according to demand, and can under given configuration profile, finely tune, to reach the effect that realizes optimum reception or transmission.
1, Sensor section:
The present invention be take capacitor type gas sensor as example, in flexible substrate, produce two electrode strips, then between two electrode strips, make air-sensitive coating, can obtain structure shown in Fig. 1 a, Fig. 1 a is the schematic diagram that utilizes the curling capacitor type gas sensor of two long linear structures making.For adapting to different test environments, the structural bending shown in Fig. 1 a can be become to shape as shown in Figure 1 b, Fig. 1 b is by the schematic diagram after the structure helix-coil shown in Fig. 1 a.
Wherein, the air-sensitive coating of making between the electrode in flexible substrate, its sensitive membrane adopting can select organic high molecular polymer as polypyrrole (PPy) or polyaniline (PANI); Metal oxide is as Mo
3, Sn
2, ZnO, Ni; Or both potpourris etc.According to surveyed gas, carry out Selective coating.Coating method comprises methods such as dripping painting, dip-coating, thermal evaporation, printing.
Than traditional plane sensitive membrane, owing to this capacitor type gas sensor can being bent to several different shapes to adapt to the space of test environment, unlike conventional sensors, be made in fixed pan or fixedly on curved surface, so this capacitor type gas sensor has three-dimensional responsive character, bring into play greatly the flexible characteristic of flexible substrate, can adapt to more test scene.
2, antenna part:
The present invention is that to take electromagnetic horn and tours antenna be example, utilizes flexible material as substrate, processes some simple strips or circular pattern (and contact conductor, for wireless transmission, do not need) on substrate, can large area manufacture.Afterwards, by several specific position (such as the position that need to play connection function in folding or crooked) perforates that need connection of substrate.In this device of needs, each corresponding hole is folding (manual folding, if device is less, can utilize the aid as auxiliary in tweezers etc. to together), with fixture, will each limit together be fixed, make it to link together, form the device three-dimensional spatial structure of using in concrete practical application.When not using this device, fixture can be taken off, device tiling is placed, or be rolled into tubular and shelve, to save space.Specifically as shown in Fig. 2 a, Fig. 2 b and Fig. 3.
Fig. 2 a is depicted as the electromagnetic horn X-Y scheme of a planar structure.Utilize shown in surface manufacturing process Cheng Shangtu after pattern, non-area of the pattern is cut out.When not using this device, its stacked depositing can be saved to space, especially for large-sized antenna; When needs are used this device, can be assembled the transmission of carrying out data, be about to after several parts utilize fixture to integrate to obtain the structure shown in Fig. 2 b.When not needing to use this device, fixture can be taken down, become the structure shown in Fig. 2 a.
Fig. 3 is another flexible antenna structure based on flexible substrate, and this structure is produced in two parts of antenna the tow sides of substrate.Wherein one side in use, connects to form a loop configuration by A, B bending two ends, make positive surface antenna for circular, and reverse side antenna is still linear pattern, then AB two ends is joined with sensor respectively.The size of ring can suitably regulate.When not in use, also can be kept flat, be saved space, especially for large-sized antenna.
3, Sensor section and antenna part is connected
Sensor section and two kinds of structures of antenna part are linked together and can form wireless sensor module provided by the invention.
The present invention is the structure shown in Fig. 1 b and Fig. 3 is combined into example, refers to Fig. 4.In Fig. 4, left side is folding capacitive transducer, and right side is crooked antenna, and the two is connected with wire B with wire A.
The contact of wire A or wire B and capacitive transducer and antenna junction is commonly referred to as electrode, and this electrode adopts metal electrode or has the non-metal electrode (as MWCNTS) of strong electric conductivity.The material that this electrode adopts can determine according to actual scene and to the location of product.If need the transmission line of better transport property and lower resistance, can adopt metal electrode, but the adhesive ability of metal electrode in flexible substrate is more weak, may need to grow multi-layered electrode or additive method are to improve adhesion.Non-metal electrode can better be attached on flexible substrate, but performance compared with metal electrode a little less than some.
In addition, also can adopt fixture that antenna part is connected with Sensor section, its function is the same with principle with being connected with wire, simply say exactly by after wire pin part in sky is partly aimed at sensor pin by clamp, just repeat no more here.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (10)
1. the sensor assembly based on flexible substrate, it is characterized in that, this sensor assembly comprises Sensor section and antenna part, the two all take flexible insulating material as substrate, and connect by wire or fixture, wherein, Sensor section is for the outside sensitive signal of perception, antenna part is for transmission and the reception of wireless signal, and the two is in conjunction with realizing under radio conditions the detection of outside sensitive signal and transmission.
2. the sensor assembly based on flexible substrate according to claim 1, is characterized in that, this flexible insulating material is polyimide, polyethylene terephthalate or special paper material.
3. the sensor assembly based on flexible substrate according to claim 1, it is characterized in that, this Sensor section is the various sensors of making on flexible insulating material substrate, the planar structure of these sensors is different, be at least circle, ellipse, square, rectangle or irregular figure, and all can bend to various shapes, to adapt to various test environment.
4. the sensor assembly based on flexible substrate according to claim 3, is characterized in that, the described sensor of making on flexible insulating material substrate is gas sensor or humidity sensor.
5. the sensor assembly based on flexible substrate according to claim 4, is characterized in that, described gas sensor is on flexible insulating material substrate, to produce two electrode strips, then between two electrode strips, makes air-sensitive coating.
6. the sensor assembly based on flexible substrate according to claim 5, it is characterized in that, described air-sensitive coating of making between two electrode strips, its sensitive membrane adopting is the potpourri of organic high molecular polymer, metal oxide or organic high molecular polymer and metal oxide; Its painting method adopting comprises a painting, dip-coating, thermal evaporation or printing.
7. the sensor assembly based on flexible substrate according to claim 6, is characterized in that, described organic high molecular polymer is polypyrrole or polyaniline, and described metal oxide is Mo
3, Sn
2, ZnO or Ni.
8. the sensor assembly based on flexible substrate according to claim 1, is characterized in that, the size Control of this Sensor section at 50 microns * 50 microns to 1m * 1m.
9. the sensor assembly based on flexible substrate according to claim 1, is characterized in that, this antenna part can bend to different shapes according to demand, and can under given configuration profile, finely tune, to realize the effect of optimum reception or transmission.
10. the sensor assembly based on flexible substrate according to claim 9, is characterized in that, this antenna part is electromagnetic horn, tours antenna or flexible antenna.
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| WO2015085537A1 (en) * | 2013-12-12 | 2015-06-18 | 中国科学院微电子研究所 | Sensor module based on flexible substrate |
| WO2016078496A1 (en) * | 2014-11-17 | 2016-05-26 | 江苏声立传感技术有限公司 | Antenna, sensor and wireless detection system |
| CN107179336A (en) * | 2016-03-10 | 2017-09-19 | 中国科学院苏州纳米技术与纳米仿生研究所 | Can pasting type ionic flexible humidity sensor, its preparation method and application |
| CN108414584A (en) * | 2018-03-05 | 2018-08-17 | 北京化工大学 | A kind of preparation method of flexible, wearable moisture sensor and its application in breathing detection |
| CN108627542A (en) * | 2017-03-23 | 2018-10-09 | 张家港康得新光电材料有限公司 | Flexible gas sensor and its production method |
| CN114137040A (en) * | 2021-11-26 | 2022-03-04 | 南京农业大学 | Foldable passive NFC flexible sensing device and manufacturing method and using method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015085537A1 (en) * | 2013-12-12 | 2015-06-18 | 中国科学院微电子研究所 | Sensor module based on flexible substrate |
| WO2016078496A1 (en) * | 2014-11-17 | 2016-05-26 | 江苏声立传感技术有限公司 | Antenna, sensor and wireless detection system |
| CN107179336A (en) * | 2016-03-10 | 2017-09-19 | 中国科学院苏州纳米技术与纳米仿生研究所 | Can pasting type ionic flexible humidity sensor, its preparation method and application |
| CN107179336B (en) * | 2016-03-10 | 2020-02-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Pasting type ionic flexible humidity sensor, and preparation method and application thereof |
| CN108627542A (en) * | 2017-03-23 | 2018-10-09 | 张家港康得新光电材料有限公司 | Flexible gas sensor and its production method |
| CN108414584A (en) * | 2018-03-05 | 2018-08-17 | 北京化工大学 | A kind of preparation method of flexible, wearable moisture sensor and its application in breathing detection |
| CN114137040A (en) * | 2021-11-26 | 2022-03-04 | 南京农业大学 | Foldable passive NFC flexible sensing device and manufacturing method and using method thereof |
| CN114137040B (en) * | 2021-11-26 | 2023-09-01 | 南京农业大学 | Foldable passive NFC flexible sensing device and manufacturing method and using method thereof |
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