CN103638895A - Preparation method of supported acid gas absorbent - Google Patents

Preparation method of supported acid gas absorbent Download PDF

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Publication number
CN103638895A
CN103638895A CN201310580186.8A CN201310580186A CN103638895A CN 103638895 A CN103638895 A CN 103638895A CN 201310580186 A CN201310580186 A CN 201310580186A CN 103638895 A CN103638895 A CN 103638895A
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China
Prior art keywords
acid gas
gas absorbent
preparation
support type
solution
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CN201310580186.8A
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Chinese (zh)
Inventor
朱颜
王仕华
许从应
王陆平
李英辉
马潇
王智
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QUANJIAO NANDA PHOTOELECTRIC MATERIAL CO., LTD.
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SUZHOU DANBAILI ELECTRONIC MATERIAL Co Ltd
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Priority to CN201310580186.8A priority Critical patent/CN103638895A/en
Publication of CN103638895A publication Critical patent/CN103638895A/en
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Abstract

The invention relates to a preparation method of a supported acid gas absorbent. The preparation method comprises following steps: loading of an alkali metal hydroxide, wherein spherical aluminum oxide carrier is added into a water solution of the alkali metal hydroxide for dipping, and an obtained mixture is filtered and dried; in-situ deposition and loading of an alkaline-earth metal salt solution, wherein the modified aluminum oxide is added into an alkaline-earth metal acetate solution for dipping, and an obtained mixed solution is filtered and dried; an obtained product is roasted in a muffle furnace; and phenolphtalein solution is added into the roasted product dropwise so as to obtain the pink acid gas absorbent. According to the preparation method, stepwise loading technology is adopted, porous aluminum oxide is taken as the carrier, the alkali metal hydroxide is loaded with priority, and the alkaline-earth metal salt solution is loaded after drying, and after roasting, selective dipping of phenolphtalein is performed, wherein phenolphtalein is used as an indicator. The supported acid gas absorbent is high in reaction activity, excellent in intensity, low in pulverulent ratio, and is beneficial for preparation of gases with ultra high purity. In addition, the supported acid gas absorbent possesses color rendering properties after phenolphthalein dipping, and when efficacy of the supported acid gas absorbent is lost, the color of the supported acid gas absorbent is changed from pink to colourless.

Description

The preparation method of support type acid gas absorbent
Technical field
The present invention relates to a kind of preparation method of support type acid gas absorbent, belong to inorganic material and synthesize and Industrial Catalysis technical field.
Background technology
In semiconductor preparation process, the trace acidic gaseous impurity that the carbon dioxide of take is master is having a strong impact on chip performance, therefore extra-high-speed pure gas product requires this class impurity content to be less than 1ppm conventionally.CO in common gas source 2not etc., except the common physical absorbents such as molecular sieve, industrial common chemical absorbent does not mainly comprise alkali metal hydroxide and alkaline earth oxide, as potassium hydroxide, NaOH or soda lime etc. for impurity and water content 1%~1ppm.Hydroxide flake potassium or the NaOH deliquescence that easily absorbs water, heat release is obvious and corrosivity is large, is not suitable for large-scale application.On the other hand, the soda lime that the calcium hydroxide of take is main component is widely used in surgical procedures and submarine, and absorbent is very beneficial for removing the great amount of carbon dioxide existing in moist closed environment, but granule strength is low, easily efflorescence.In high-purity gas preparation process, the efflorescence of soda lime not only causes solid particulate matter content in gas to increase, and the process of efflorescence simultaneously produces huge pressure drop in purification column, has potential safety hazard.
Summary of the invention
The object of the invention is to overcome the deficiency that prior art exists, a kind of preparation method of support type acid gas absorbent is provided.
Object of the present invention is achieved through the following technical solutions:
The preparation method of support type acid gas absorbent, comprises the following steps:
1) supporting of alkali metal hydroxide: ball-aluminium oxide carrier is added to the aqueous solution of alkali metal hydroxide, dipping, filtering drying;
2) in-situ deposition of alkaline-earth metal salt solution and supporting: the aluminium oxide after the modification of step 1) gained is added in Alkaline Earth Metal Acetate solution to dipping, filtering drying;
3) by step 2) products obtained therefrom calcines in Muffle furnace;
4) phenolphthalein test solution is splashed in step 3) products obtained therefrom, finally obtain pink acid gas absorbent.
Further, the preparation method of above-mentioned support type acid gas absorbent, step 1), described ball-aluminium oxide is Woelm Alumina, and particle diameter is 3~8 mm, and specific area is 150~380 m 2g -1, pore volume is 0.2~0.5 cm 3g -1.
Further, the preparation method of above-mentioned support type acid gas absorbent, the particle diameter of described ball-aluminium oxide is 3~5 mm, specific area is 250~350 m 2g -1, pore volume is 0.3~0.45 cm 3g -1.
Further, the preparation method of above-mentioned support type acid gas absorbent, step 1), described alkali metal hydroxide is lithium hydroxide, NaOH, potassium hydroxide, strontium hydroxide or its mixture.
Further, the preparation method of above-mentioned support type acid gas absorbent, step 2), described Alkaline Earth Metal Acetate solution is calcium acetate, magnesium acetate, barium acetate or its mixture.
Again further, the preparation method of above-mentioned support type acid gas absorbent, step 1) and step 2) in impregnation technology in shaking table, carry out, dip time is 24~48h.
Again further, the preparation method of above-mentioned support type acid gas absorbent, step 3), in Muffle furnace, calcining heat is 500~700 ° of C, and the time is 6~10h, and heating rate is 1~5 ℃ of min -1.
The substantive distinguishing features that technical solution of the present invention is outstanding and significant progressive being mainly reflected in:
The present invention adopts step load technique, with Woelm Alumina, makes carrier, the hydroxide of preferential carrying alkali metal, and drying and processing back loading alkaline-earth metal salt solution, optionally floods phenolphthalein test solution as indicator after calcining.This acid gas absorbent is optionally removed in inert gas, oxygen and common reducibility gas (hydrogen, CO or NO etc.), alkanes and hydride gas (as silane, ammonia, phosphine and arsine etc.), the carbon dioxide of existence, sulfur dioxide, hydrogen sulfide, hydrogen chloride and a small amount of water etc.This support type acid gas absorbent reactivity is high, intensity large, pulverization rate is extremely low, is conducive to the preparation of extra-high-speed pure gas, and meanwhile, the sample after phenolphthalein dipping has coloring function, and when product failure, absorbent color is become colorless by pink.
The specific embodiment
The present invention be take Woelm Alumina as carrier, and by step load, by NaOH or potassium hydroxide, and calcium oxide supports respectively granule interior, and resulting materials intensity is high, without obviously efflorescence, is applicable to very much the removing of a small amount of sour gas in gas source.In reactive adsorption process, calcium oxide preferentially reacts with water and generates active component calcium hydroxide, and further generates calcium carbonate with carbon dioxide reaction.And NaOH or potassium hydroxide have strengthened the absorption to water in absorbing carbon dioxide, promote the activation of calcium agent adsorbent.Preparation technology is simple, and each active component ratio is adjustable to be applicable to the purifying of different impurities content gas product-derived.
The preparation technology of support type acid gas absorbent is:
1) supporting of alkali metal hydroxide: ball-aluminium oxide carrier is added to the aqueous solution of alkali metal hydroxide, flood 24~48h, filtering drying in shaking table; Wherein, ball-aluminium oxide is Woelm Alumina, and particle diameter is 3~8 mm, and specific area is 150~380 m 2g -1, pore volume is 0.2~0.5 cm 3g -1; Preferably, particle diameter 3~5 mm, specific area 250~350 m 2g -1, pore volume 0.3~0.45 cm 3g -1.Alkali metal hydroxide is lithium hydroxide, NaOH, potassium hydroxide, strontium hydroxide or its mixture.
2) in-situ deposition of alkaline-earth metal salt solution and supporting: the aluminium oxide after the modification of step 1) gained is added in Alkaline Earth Metal Acetate solution, flood 24~48h in shaking table, filtering drying; Wherein, Alkaline Earth Metal Acetate solution is calcium acetate, magnesium acetate, barium acetate or its mixture.
3) by step 2) products obtained therefrom calcines in Muffle furnace, and calcining heat is 500~700 ° of C, and the time is 6~10h, and heating rate is 1~5 ℃ of min -1;
4) phenolphthalein test solution is splashed in step 3) products obtained therefrom, finally obtain pink acid gas absorbent.
embodiment 1
25 g NaOH are dissolved in 450 mL deionized waters, and stirring and dissolving, treats that temperature is down to room temperature and adds 450 g ball-aluminium oxides (granular size is 3~5mm, and specific surface is about 300 m 2g -1), in shaking table, flooding 24h, after particle filtering, in 150 degree baking ovens, dry a few hours are standby.Aluminium oxide after above-mentioned NaOH modification is added in the calcium acetate aqueous solution of 2.5 mol/L (liquor capacity 500 mL), in shaking table, floods 48h, after particle filtering in 150 degree baking ovens dry 8h.Aluminium oxide after above-mentioned modification is calcined in Muffle furnace, and calcination condition is 1.5 ℃ of min -1be warming up to 600 ° of C, and be incubated 10 h.
Phenolphthalein test solution is splashed in the sample after calcining and is dried in baking oven, obtain pink acid gas absorbent, sample has kept the intensity of original alumina particle.By ICP-OES, record Na in absorbent 2o content is 3.2wt%, and CaO is 10wt%, and this adsorbent can guarantee, in the situation that lower content moisture (<500 ppm) exists, sour gas is had to good assimilation effect.
embodiment 2(the maximum loading test of calcium oxide)
For the purifying of the both sexes gases such as phosphine, arsine, alkali metal oxide support be difficult for too high, therefore compared with high-adsorption-capacity, tested the maximum loading of calcium oxide for keeping.According to the method for embodiment 1, change calcium acetate salting liquid into saturated solution.After calcining, there is crystallization on products obtained therefrom surface, ICP-MS gained Na 2o content is 2wt%, and CaO is 13wt%.The enrichment of surface oxidation calcium easily produces solid particulate matter, pollute source of the gas, so preparation process should be noted activity component load quantity.
embodiment 3
Because calcium oxide is controlled by the content of water in gas to the assimilation effect of carbon dioxide, and NaOH has promoted the activity of calcium oxide to the strong absorption of water, therefore for the source of the gas that contains super low loading moisture (<5 ppm), NaOH ratio needs to increase.In the present embodiment, 80g NaOH is dissolved in 450 mL water, other remains unchanged, Na in products obtained therefrom 2o content is about 6wt%, and CaO is 8wt%, and the competitive Adsorption of NaOH has reduced the rate that supports of calcium oxide.This adsorbent is applicable to moisture lower than the adsorbing and removing of sour gas in 5ppm source of the gas.
comparative example 4
According to the method for embodiment 1, adopt the 5A molecular sieve of big or small 3-5 mm as carrier.25 g NaOH are dissolved in 450 mL deionized waters, stirring and dissolving, treats that temperature is down to room temperature and adds 450 g molecular sieve carriers, floods 24h in shaking table, after particle filtering, in 150 degree baking ovens, be dried a few hours and calcine in Muffle furnace, calcination condition is 1.5 ℃ of min -1be warming up to 600 ° of C, insulation 10 h.Resulting materials is with after potentiometric titration, and without significant change, it is lower to sour gas adsorption capacity for Preliminary detection.
In preparation technology, adopting Woelm Alumina is carrier, by step load technique, preferentially NaOH or potassium hydroxide is supported in particle duct, floods subsequently the salting liquid of alkaline-earth metal, and then calcining, selectively floods phenolphthalein test solution as indicator.
In sum, the present invention adopts step load technique, with Woelm Alumina, makes carrier, the hydroxide of preferential carrying alkali metal, and drying and processing back loading alkaline-earth metal salt solution, optionally floods phenolphthalein test solution as indicator after calcining.This acid gas absorbent is optionally removed in inert gas, oxygen and common reducibility gas (hydrogen, CO or NO etc.), alkanes and hydride gas (as silane, ammonia, phosphine and arsine etc.), the carbon dioxide of existence, sulfur dioxide, hydrogen sulfide, hydrogen chloride and a small amount of water etc.This support type acid gas absorbent reactivity is high, intensity large, pulverization rate is extremely low, is conducive to the preparation of extra-high-speed pure gas, and meanwhile, the sample after phenolphthalein dipping has coloring function, and when product failure, absorbent color is become colorless by pink.
It is to be understood that: the above is only the preferred embodiment of the present invention; for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.

Claims (7)

1. the preparation method of support type acid gas absorbent, is characterized in that comprising the following steps:
1) supporting of alkali metal hydroxide: ball-aluminium oxide carrier is added to the aqueous solution of alkali metal hydroxide, dipping, filtering drying;
2) in-situ deposition of alkaline-earth metal salt solution and supporting: the aluminium oxide after the modification of step 1) gained is added in Alkaline Earth Metal Acetate solution to dipping, filtering drying;
3) by step 2) products obtained therefrom calcines in Muffle furnace;
4) phenolphthalein test solution is splashed in step 3) products obtained therefrom, finally obtain pink acid gas absorbent.
2. the preparation method of support type acid gas absorbent according to claim 1, is characterized in that: step 1), and described ball-aluminium oxide is Woelm Alumina, and particle diameter is 3~8 mm, and specific area is 150~380 m 2g -1, pore volume is 0.2~0.5 cm 3g -1.
3. the preparation method of support type acid gas absorbent according to claim 2, is characterized in that: the particle diameter of described ball-aluminium oxide is 3~5 mm, and specific area is 250~350 m 2g -1, pore volume is 0.3~0.45 cm 3g -1.
4. the preparation method of support type acid gas absorbent according to claim 1, is characterized in that: step 1), described alkali metal hydroxide is lithium hydroxide, NaOH, potassium hydroxide, strontium hydroxide or its mixture.
5. the preparation method of support type acid gas absorbent according to claim 1, is characterized in that: step 2), described Alkaline Earth Metal Acetate solution is calcium acetate, magnesium acetate, barium acetate or its mixture.
6. the preparation method of support type acid gas absorbent according to claim 1, is characterized in that: step 1) and step 2) in impregnation technology in shaking table, carry out, dip time is 24~48h.
7. the preparation method of support type acid gas absorbent according to claim 1, is characterized in that: step 3), and in Muffle furnace, calcining heat is 500~700 ° of C, and the time is 6~10h, and heating rate is 1~5 ℃ of min -1.
CN201310580186.8A 2013-11-19 2013-11-19 Preparation method of supported acid gas absorbent Pending CN103638895A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113318698A (en) * 2021-06-29 2021-08-31 西安热工研究院有限公司 Alkali metal loaded ceramic catalytic filler and preparation method thereof
CN116159536A (en) * 2023-04-25 2023-05-26 格林斯达(北京)环保科技股份有限公司 Gas purifying material with indicating performance and preparation method and application thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1081398A (en) * 1992-07-20 1994-02-02 中国科学院上海冶金研究所 Effective carbon-dioxide absorbent and preparation method thereof
CN1307929A (en) * 2000-12-25 2001-08-15 化学工业部天津化工研究设计院 Preparation process of alumina adsorbant
CN101659877A (en) * 2008-08-29 2010-03-03 中国石油化工股份有限公司 Absorbent of H2S contained in hydrocarbon gases and use thereof
CN102658023A (en) * 2012-05-17 2012-09-12 东南大学 Carbon dioxide solid absorbent capable of effectively inhibiting active components from losing effect
CN102784630A (en) * 2012-07-25 2012-11-21 华中科技大学 Preparation method for calcium-based CO2 sorbent

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1081398A (en) * 1992-07-20 1994-02-02 中国科学院上海冶金研究所 Effective carbon-dioxide absorbent and preparation method thereof
CN1307929A (en) * 2000-12-25 2001-08-15 化学工业部天津化工研究设计院 Preparation process of alumina adsorbant
CN101659877A (en) * 2008-08-29 2010-03-03 中国石油化工股份有限公司 Absorbent of H2S contained in hydrocarbon gases and use thereof
CN102658023A (en) * 2012-05-17 2012-09-12 东南大学 Carbon dioxide solid absorbent capable of effectively inhibiting active components from losing effect
CN102784630A (en) * 2012-07-25 2012-11-21 华中科技大学 Preparation method for calcium-based CO2 sorbent

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113318698A (en) * 2021-06-29 2021-08-31 西安热工研究院有限公司 Alkali metal loaded ceramic catalytic filler and preparation method thereof
CN116159536A (en) * 2023-04-25 2023-05-26 格林斯达(北京)环保科技股份有限公司 Gas purifying material with indicating performance and preparation method and application thereof

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Application publication date: 20140319