CN103632220B - Semiconductor packaging line bonding equipment organization method based on processing task capability matching - Google Patents

Abstract

The invention relates to a semiconductor packaging line bonding equipment organization method based on processing task capability matching, which belongs to the technical field of semiconductor production processes. The semiconductor packaging line bonding equipment organization method is characterized in that the semiconductor packaging line bonding equipment organization method includes the following steps: bonding process equipment is abstracted into a multi-row and multi-column equipment point array; the equipment organization relations between the points in the rows and the columns are represented by '0' and '1'; an organization relation matrix and an equipment organization matrix are established; organization relations are corrected, and incomplete relation information is supplemented; equipment organization closed position relation constraint check and equipment type and processed product type matching constraint check are carried out; according to the capacities provided by equipment organizations and the capacity required by a processing task, an equipment organization is matched with the processing task; according to a matching result of the processing task and the equipment organization, punishment and a function are established, and the matching result is quantified. The semiconductor packaging line bonding equipment organization method can correspondingly organize bonding equipment according to the capacities required by processing tasks, thus meeting the requirement for the dynamic matching relation between production operations and equipment resources.

Description

A kind of semiconductor packages wire bonding apparatus marshalling based on processing tasks ability coupling Method

Technical field

The present invention relates to a kind of semiconductor packages wire bonding apparatus grouping method based on processing tasks ability coupling, belong to Production process of semiconductor technical field.

Background technology

Semiconductor assembly and test technique comprise successively scribing, load, bonding, plastic packaging, deflashing, plating, printing, rib cutting, Shaping, visual examination, finished product test, packaging shipment etc..The conversion of its processing tasks form is mainly controlled by productive temp, and gives birth to Producing rhythm control requires the processing apparatus of long processing time many, and process time short processing apparatus are few, so can ensure that production Continuity.The process time that bond sequence requires on semiconductor package wiring is the longest, number of devices is most, each sub- equipment capacity Difference is big, and bonding apparatus management becomes emphasis, the difficult point of line management.Meeting dynamic of production operation and device resource On the basis of joining relation, improving bonding apparatus utilization rate becomes more difficult.These problems may limit semiconductor production enterprise The production capacity of industry, makes the complexity of line management increase.Traditional machine directly being carried out by field worker based on experience Grouping management, receives great challenge.

" for equipment that unit is organized into groups and the method " of Patent No. 200880024499.2, this disclosure of the invention one kind For the equipment of unit marshalling, " automatic grouping equipment for hot-rolled round steel " of Patent No. 201220055939.4, this disclosure of the invention The equipment that a kind of hot rolled circular steel is organized into groups automatically, this two patents are all that the carrying out laying particular emphasis on processing tasks is organized into groups, and mesh Front semiconductor packages wire bonding apparatus of also not studying enter the method that Mobile state is organized into groups.

On current practical semiconductor packaging line, bonding apparatus adopt fixing organizational systems using according to device subclass type, I.e. equipment group once it is determined that, comprise in equipment group fixation equipment, lead to the processing energy for certain type of lot of equipment group Power is also fixing, and the offer production capacity of such organizational systems equipment is unable to production capacity needed for good match processing lot, and equipment is organized into groups not Enable the Dynamic Matching and between processing tasks.

Content of the invention

The present invention be aiming at that the problems referred to above put forward it is therefore an objective to provide a kind of based on processing tasks ability coupling half Conductor encapsulates wire bonding apparatus grouping method, realizes the differentiated control to parallel machine on production line, reduces management scale, reduces life The complexity of producing line management.

Based on the equipment grouping method of processing tasks ability coupling, can be right according to the production task production capacity demand assigned Equipment is organized into groups, and effectively coordinates the raising utilization rate of equipment and installations of productive temp, adapts to the dynamic change of production task and resource capability Change.Wherein, propose following restriction to the equipment organized into groups to require:

(1) procedure calls of the equipment processing in a marshalling are identical.

(2) device type in marshalling should unanimously or can process the equipment of same type of product.

(3) for operative's control device, Grouping apparatus are adjacent equipment, also due to equipment can be by phase when putting The equipment of same type is put into the adjacent locations in workshop, so Grouping apparatus should be adjacent equipment.Grouping apparatus are constructed The equipment that other are organized into groups or the equipment do not organized into groups can not be closed to intra-zone by region, if such other equipment marshalling is no Method is operated, and also results in the confusion of production management aspect.

For achieving the above object, the technical scheme that the present invention solves technical problem is (shown in Fig. 1):

(1) setting equipment marshalling optimization aim, the marshalling of given equipment mate with processing tasks punish and.

(2) equipment that can organize into groups operation on production line is simplified to a point being expressed as on two dimensional surface, by this work The all devices point of sequence is abstracted into multiple lines and multiple rows equipment array.Shown in Fig. 2.

m_i,jThe equipment of the i-th row jth row representing, n represents in figure equipment maximum number of lines, i ∈ { 1 ..., n }, and m represents figure In equipment columns, j ∈ { 1 ..., m }, m represents apparatus matrices.For example: m in Fig. 2_1,1Represent the a01 equipment of the 1st row the 1st row.

$m=\left[\begin{array}{cccc}{m}_{\mathrm{1,1}}& m_{\mathrm{1,2}}& ...& m_{1,m}\\ m_{\mathrm{1,2}}& m_{\mathrm{2,2}}& ...& m_{2,m}\\ .& .& .& .\\ .& .& .& .\\ .& .& .& .\\ m_{n,1}& m_{n,2}& ...& m_{n,m}\end{array}\right]---\left(1\right)$

(3) will be connected with line between all devices, constitute a network structure with equipment as node.Between equipment Incidence relation represented with 0,1, onrelevant relation between " 0 " expression equipment, that is, two equipment not in one group, " 1 " represent set Relevant between standby, that is, two equipment are organized in one group, in finding best equipment grouping procedures, generate equipment at random Between incidence relation, shown in Fig. 3.

(4) set up equipment marshalling incidence relation matrix according to the incidence relation between equipment.

Represent the row incidence coefficient between the i-th row of jth row and the equipment of i+1,i∈{1,..., N-1 }, j ∈ { 1 ..., m }, constitute row incidence relation matrix lr；Row incidence coefficientWhen taking " 1 ", represent that jth row i-th row sets The standby equipment with jth row i+1 row is compiled as one group.

$\mathrm{lr}=\left[\begin{array}{cccc}{l}_{\mathrm{1,1}}^r& l_{\mathrm{1,2}}^r& ...& l_{1,m}^r\\ l_{\mathrm{2,1}}^r& l_{\mathrm{2,2}}^r& ...& l_{2,m}^r\\ \·& .& & .\\ \·& .& l_{i,j}^r& .\\ \·& .& & .\\ l_{n-\mathrm{1,1}}^r& l_{n-\mathrm{1,2}}^r& ...& l_{n-1,m}^r\end{array}\right]---\left(2\right)$

Represent the row incidence coefficient between the jth row of the i-th row and the equipment of jth+1,i∈{1,..., N }, j ∈ { 1 ..., m-1 }, constitute row incidence relation matrix lc.Row incidence coefficientWhen taking " 1 ", represent the i-th row jth row and the The equipment of i row jth+1 row is compiled as one group.

$\mathrm{lc}=\left[\begin{array}{cccc}{l}_{\mathrm{1,1}}^c& l_{\mathrm{1,2}}^c& ...& l_{1,m-1}^c\\ l_{\mathrm{2,1}}^c& l_{\mathrm{2,2}}^c& ...& l_{2,m-1}^c\\ \·& .& & .\\ \·& .& l_{i,j}^c& .\\ \·& .& & .\\ l_{n,1}^c& l_{n,2}^c& ...& l_{n,m-1}^c\end{array}\right]---\left(3\right)$

Represent equipment grouping information matrix with mg, the element mg in matrix_i,jRepresent the equipment m of the i-th row jth row_i,jVolume Group information attribute, organizes into groups expression matrix equipment by equipment and organizes into groups situation.

$\mathrm{mg}=\left[\begin{array}{ccccc}{\mathrm{mg}}_{\mathrm{1,1}}& {\mathrm{mg}}_{\mathrm{1,2}}& {\mathrm{mg}}_{\mathrm{1,3}}& ...& {\mathrm{mg}}_{1,m}\\ {\mathrm{mg}}_{\mathrm{1,2}}& {\mathrm{mg}}_{\mathrm{2,2}}& {\mathrm{mg}}_{\mathrm{2,3}}& ...& {\mathrm{mg}}_{2,m}\\ .& .& .& & .\\ .& .& .& ...& .\\ .& .& .& & .\\ {\mathrm{mg}}_{n,1}& {\mathrm{mg}}_{n,2}& {\mathrm{mg}}_{n,3}& ...& {\mathrm{mg}}_{n,m}\end{array}\right]---\left(4\right)$

According to the ranks incidence relation of equipment room, procession detects, the equipment that will be associated together is compiled as one group, gives one Individual interim marshalling number is it is assumed that a variable g_t, g_tRepresent the marshalling number of t-th equipment marshalling, and g_t∈{g₁,...,g_gn, t ∈ { 1,2 ..., gn }, gn represents the maximum marshalling number of all marshallings.

m_allRepresent all devices set, m_all={m_1,1,m_1,2,....,m_n,m,Expression equipment marshalling g_tEquipment Set, thenConstruction process as follows:

${\mathrm{mg}}_{i,j}=\left\{\begin{array}{cc}{g}_t& m_{i,j}\&element;m_{g_t}\\ 0& m_{i.j}\&notelement;m_{g_t}\end{array}\right.---\left(5\right)$

As equipment m_i,jBelong to marshalling g_tCluster tool, mg_i,jValue is g_t.According to above formula, equipment is organized into groups matrix Equipment grouping information mg in mg_i,jThe corresponding g in position_tIt is replaced.

(5) revise marshalling incidence relation

On the premise of meeting equipment marshalling rule, there is also the incomplete situation of grouping information, so to each equipment Marshalling carries out row, column detection, and relation organized into groups by corrective.

Row detection is to start to detect line n from the 1st row, to every a line, according to each two phase in marshalling this row of relation pair Adjacent equipment, whether detection incidence coefficient is correct, according to formula 6, the equipment marshalling g of the such as i-th row jth row_i,jWith the i-th row jth+1 The equipment marshalling g of row_i,j+1Equal, then equipment row incidence relation" 1 " should be taken, if " 0 " is it should by its set. Carry out n × (m-1) secondary detection check altogether.

$l_{i,j}^c=\left\{\begin{array}{cc}0& {\mathrm{mg}}_{i,j}\&notequal;{\mathrm{mg}}_{i,j+1}\\ 1& {\mathrm{mg}}_{i,j}={\mathrm{mg}}_{i,j+1}\end{array}\right.----\left(6\right)$

Row detection is to start m row is detected from the 1st row, to each row, according to each two phase in marshalling this row of relation pair Adjacent equipment, whether detection incidence coefficient is correct.According to formula 7, such as the equipment marshalling g of jth row i-th row_i,jWith jth row i+1 The equipment marshalling g of row_i+1,jEqual, then equipment row incidence relation" 1 " should be taken, if " 0 " is it should by its set. Carry out (n-1) × m detection check altogether.

$l_{i,j}^r=\left\{\begin{array}{cc}0& {\mathrm{mg}}_{i,j}\&notequal;{\mathrm{mg}}_{i+1,j}\\ 1& {\mathrm{mg}}_{i,j}={\mathrm{mg}}_{i+1,j}\end{array}\right.---\left(7\right)$

Row detection frequency n × (m-1), row detection number of times (n-1) × m, total degree ckn=2 (n × m)-(n+ of ranks detection m).

(6) equipment marshalling constraint detection

Equipment marshalling constraint detection, in addition it is also necessary to carry out equipment marshalling closing position before equipment marshalling is mated with processing tasks Put relation constraint detection and device type and the constraint detection of converted products type matching, then illustrate without meet the constraint condition This equipment marshalling result is unreasonable, if constraint detection is unreasonable, goes to step 3, regenerates new marshalling relation.

1) equipment marshalling detent position relation constraint detection

Equipment is organized into groups detent position relation constraint and is required can not comprise to be not belonging to this in the closed area of Grouping apparatus composition The equipment of equipment group, nor contain the equipment marshalling of another one independence, if comprised, show that equipment marshalling is unsatisfactory for Detent position relation constraint.If allowing this marshalling situation to exist, cause two equipment marshalling administrative staff's compasss of competency Overlap, can cause production management tissue disorder.

If judging whether in the range of the closure of equipment marshalling be this Grouping apparatus entirely, need to organize into groups matrix according to equipment Marshalling relation in g, after entering every trade detection and row detection, if detect the closure that in an equipment marshalling, all devices are constituted The equipment of non-marshalling is comprised then it is assumed that this equipment marshalling is unreasonable in region.This checking process needs according to ranks Testing result determines whether marshalling result is reasonable jointly.

n1_t=min{i|mg_i,j=g_t, i ∈ { 1 ..., n }, j ∈ { 1 ..., m } }, n1_tBe in the marshalling of t-th equipment Little line number.

n2_t=max{i|mg_i,j=g_t, i ∈ { 1 ..., n }, j ∈ { 1 ..., m } }, n2_tBe in the marshalling of t-th equipment Big line number.

m1_t,i=min{j|mg_i,j=g_t,i∈{n1_t,...,n2_t, j ∈ { 1 ..., m } }, m1_t,iIt is t-th equipment marshalling In i-th row minimum row number.

m2_t,i=max{j|mg_i,j=g_t,i∈{n1_t,...,n2_t, j ∈ { 1 ..., m } }, m2_t,iIt is t-th equipment marshalling In i-th row maximum row number.

${\mathrm{gz}}_{t,i,j}=\left\{\begin{array}{cc}1& {\mathrm{mg}}_{i,j}=g_t\\ 0& {\mathrm{mg}}_{i,j}\&notequal;g_t\end{array}\right.i\&element;\{{n1}_t...,{n2}_t\},j\&element;\{{m1}_t,...,{m2}_t\}---\left(8\right)$

Assume variable gz_t,i,j, when the marshalling phase of the grouping information of marshalling belonging to the i-th row jth row equipment and t-th marshalling Meanwhile, gz_t,i,jIt is equal to " 1 ", be otherwise equal to " 0 ".

$f_{t,i}=\left\{\begin{array}{cc}1& \underset{j={m1}_{t,i}}{\overset{{m2}_{t,i}}{\mathrm{\&sigma;}}}{\mathrm{gz}}_{t,i,j}=({m2}_{t,i}-{m1}_{t,i})\\ 0& \underset{j={m1}_{t,i}}{\overset{{m2}_{t,i}}{\mathrm{\&sigma;}}}{\mathrm{gz}}_{t,i,j}<({m2}_{t,i}-{m1}_{t,i})\end{array}\right.---\left(9\right)$

f_t,iWhether comprise to be not belonging to the equipment of t-th marshalling, by the i-th row in the i-th row representing t-th equipment marshalling The equipment sum that comprises with this row with the difference deducting minimum row number of maximum row number compare and judged, f_t,iIt is equal to " 1 " to represent not Comprise the equipment being not belonging to t-th marshalling；f_t,iIt is equal to " 0 " and represent the equipment comprising to be not belonging to t-th marshalling.

f_t ^r=0 represents the result by row detection for t-th equipment marshalling, f_t ^r=0 shows t-th equipment marshalling by row detection In do not wrap the situation that there are non-t Grouping apparatus in a line equipment being clipped in the middle.f_t ^r=1 shows t-th equipment marshalling by row detection In there is no the situation that there is not the equipment being not belonging to t-th marshalling in any a line equipment, or comprise to be not belonging to t-th marshalling Equipment row equipment organize into groups region edge.

f_t ^cRepresent the result by row detection for t-th equipment marshalling, f_t ^c=0 show the marshalling of t-th equipment by row detection not Wrap the situation that there are non-t Grouping apparatus in the row equipment being clipped in the middle.f_t ^c=1 shows that t-th equipment marshalling is not had as in row detection There is the situation that there are non-t Grouping apparatus in any row equipment, or the equipment that is listed in comprising non-t Grouping apparatus organizes into groups region Edge.

f_tT-th equipment representing organizes into groups the equipment whether comprising non-marshalling in constituted closed area.f_t=0 expression t The f of individual equipment marshalling_t ^rRow testing result and f_t ^cRow testing result determines that marshalling includes the equipment containing non-marshalling, f simultaneously_t=1 T equipment organizes into groups the equipment not comprising non-marshalling in constituted closed area.

$f=\left\{\begin{array}{cc}1& \underset{t=1}{\overset{\mathrm{gn}}{\mathrm{\&sigma;}}}{f}_t=\mathrm{gn}\\ 0& \underset{t=1}{\overset{\mathrm{gn}}{\mathrm{\&sigma;}}}{f}_t<\mathrm{gn}\end{array}\right.---\left(12\right)$

F represents that equipment marshalling result meets device location constraint, organizes into groups composition closed area when all devices and does not comprise The equipment of non-marshalling, f is equal to " 1 ".

If being unsatisfactory for equipment marshalling detent position relation constraint, this illustrates that the marshalling of this equipment is unreasonable.

Can also strengthen as convex set region, can not comprise the equipment of other marshallings with any two points line in design section Constraint.But need to allow recessed collection to exist according to practical application.

2) device type and converted products type matching constrain

Device type is with converted products model matching relationship it is simply that certain type product can be in certain type or some It is processed on the equipment of type.

Product type k_xRepresent, common kn product type, product type set k={ k_x|x∈{1,...,kn}}

Device type k_yRepresent, common kn device type, device type set k={ k_y|y∈{1,...,kn}}

Product type can be expressed as with device type matching relationship matrix kk

Matrix kk is device type and product type matching relationship matrix,It is that device type is mated with product type Relation.

Device type mates matrix mk with equipment

Matrix mk is device type and equipment matching relationship matrix, m_i,jRepresent the equipment of the i-th row jth row.

It is relation between device type and equipment,

One equipment can only belong to a device type

For device type k_y, the collection of the type equipment sharesRepresent.

$m_{k_y}=\left\{m_{i,j}\right|{\mathrm{mkl}}_{i,j{k}_y}=1\}$

Device type k_yCluster toolThere are following two qualifications: the set of any two types equipmentWithCommon factor be empty set, the union of all kinds cluster tool is the complete or collected works ms of equipment.

$m_{k_1}\&cup;m_{k_1}...\&cup;m_{k_{\mathrm{kn}}}=\mathrm{ms}$

Mk represents equipment and product type matching relationship matrix, is obtained by mk=mk kk.

Wherein equipment and product type matching relationshipDue to an equipment only There is a device type, $\underset{k_y=k_1}{\overset{{\mathrm{kk}}_n}{\mathrm{\&sigma;}}}{\mathrm{mkl}}_{i,j,k_y}=1,$ Therefore ${\mathrm{mkl}}_{i,j,k_x}\&element;\left\{\mathrm{0,1}\right\}.$

According to equipment and corresponding relation in product type matching relationship matrix, for product type k_x, this product class The cluster tool of type coupling is usedRepresent.

$m_{k_x}=\left\{m_{i,j}\right|{\mathrm{mkl}}_{i,j{k}_x}=1\}---\left(16\right)$

The equipment of distinct device type can be comprised in one marshalling, but according to device location relation, these are dissimilar Equipment must be adjacent equipment.

G is organized into groups for equipment_t, the cluster tool that comprises in this marshalling usesRepresent.

Set $m_{g_t}=\left\{m_{i,j}\right|{\mathrm{mg}}_{i,j}=g_t\}$

If organizing into groups g for arbitrary equipment_tWith product type k_x,Set up, then set Standby marshalling is met device type and is constrained with converted products type matching.

The corresponding device set of equipment marshallingDevice location relation constraint should be met, also to meet equipment marshalling with Converted products type matching constrains.

(7) equipment marshalling is mated with processing tasks

Equipment marshalling is mated with processing tasks, after computing device is organized into groups and is provided production capacity and processing tasks demand production capacity, According to comprise in equipment group device type and processing tasks and matching relationship, obtain processing tasks and mate knot with equipment is organized into groups Really.

1) equipment marshalling provides production capacity

Based on equipment and product type matching relationship matrix mk, build process velocity matrix v.It is defined as the i-th row jth Row equipment processes k_xThe process velocity of type products, unit: individual/minute, process time t is obtained by productive temp.

Matrix

The equipment marshalling based on product type for the construction provides ability matrix gga, represents that distinct device marshalling is produced for different The equipment processing ability that category type provides is different.

Wherein $g{a}_{t,k_x}=\left(\underset{i={\mathrm{nl}}_t}{\overset{{n2}_t}{\mathrm{\&sigma;}}}\underset{j=m{1}_t}{\overset{{m2}_t}{\mathrm{\&sigma;}}}{v}_{i,j,k_x}\right)t,i\&element;\{{n1}_t,...,{n2}_t\},j\&element;\{{m1}_t,...{,}_{m{2}_t}\}$

Expression equipment organizes into groups g_tProduce k_xThe working ability of type products, equal to all devices in group in preset time t Interior converted products quantity.

2) processing tasks demand production capacity

w_pIt is p-th processing tasks.Pn is that task is most, p ∈ { 1 ..., pn }.

Processing tasks sequence wp, sequence wp={ w_p|p∈{1,...,pn}}

The product type of p-th processing tasks is k_p, set up product type sequence kp of processing tasks.

Sequence kp={ k_p|p∈{1,...,pn}}

Construction product type k_xProcessing tasks sequence.

${\mathrm{wp}}_{k_x}=\left\{w_p\right|k_p=k_x,p\&element;\{1,...,\mathrm{pn}\},x\&element;\{1,...,\mathrm{kn}\}\},{\mathrm{wp}}_{k_x}\&subsetequal;\mathrm{wp}.$

gw_pIt is p-th processing tasks w_pRequired production capacity.Construction processing tasks production capacity demand sequence gw, gw={ gw_p|p∈ {0,...,pn}}.

3) processing tasks matching unit marshalling

Production equipment is organized into groups number sum and be should be greater than equal to the number of tasks sum needing distribution, i.e. gn >=pn.Product type k_xCorresponding Optional equipment marshalling number should be greater than equal to product type in processing tasks set being k_xNumber of tasks, that is, $\mathrm{card}\left({\mathrm{gg}}_{k_x}\right)\&greaterequal;\mathrm{card}\left({\mathrm{wp}}_{k_x}\right).$

Processing tasks requirement capability and equipment group ability matching sequence gamc={ < gw_p,gma_p> | p ∈ { 1 ..., pn } }, its Middle gma_pWith processing tasks requirement capability gw_pThe ability of the equipment group of coupling.

Pn processing tasks are distributed to equipment marshalling, needs task to need ability to be arranged from big to small according to task Sequence.Device-task set queue wp' after sequence.

Processing tasks production capacity requirement capability adjusts sequence gw'={ gw from big to small_p'|p'∈{0,...,pn}}

As p '₁＜ p '₂Then show

Processing tasks production capacity requirement capability adjusts the corresponding processing tasks requirement capability of sequence gw' and equipment from big to small Group ability mates set gamc'={ < gw_p',gma_p'> | p' ∈ { 1 ..., pn } }, wherein gma_p'With processing tasks demand after sequence Ability gw_p'The ability of the equipment group of coupling.

Sequence wp'={ w according to the processing tasks after the adjustment of production capacity demand_p'|p'∈{1,...,pn}}.w_p'It is according to product Can demand come pth ' individual position processing tasks, product type is k_p'.

Processing tasks sequence wp' corresponding product type sequence kp'={ k after adjustment_p'|p'∈{1,...,pn}}

According to equipment and product type matching relationship matrix mk, select to process this product by the product type of this task Equipment marshalling, construction equipment marshalling and the matching relationship matrix gk of product type.

Element gkl in matrix gk_t,xRepresent the matching relationship of product type and equipment marshalling, i.e. equipment marshalling g_tIn comprise Be the equipment meeting device type and product type matching relationship.

$\mathrm{gk}{l}_{t,k_x}=\left\{\begin{array}{cc}1& \underset{i={n1}_t}{\overset{{n2}_t}{\mathrm{\&pi;}}}\underset{j={m1}_t}{\overset{{m2}_t}{\mathrm{\&pi;}}}{\mathrm{mkl}}_{i,j,k_x}=1\\ 0& \underset{i={n1}_t}{\overset{{n2}_t}{\mathrm{\&pi;}}}\underset{j={m1}_t}{\overset{{m2}_t}{\mathrm{\&pi;}}}{\mathrm{mkl}}_{i,j,k_x}=0\end{array}\right.,i\&element;\{n{1}_t,...,{n2}_t\},j\&element;\{{m1}_t,...,{m2}_t\}---\left(21\right)$

In the unassigned task of original state equipment group, so whole as_t=1, according to processing tasks w_p'Product type k_p', the equipment marshalling being capable of converted products type is selected by the matching relationship matrix of product type and equipment marshalling.Product class Type k_xEquipment group selection set beConstruction processing tasks w_p'Equipment group selection setWork as k_x=k_p'When, wherein Comprise the equipment group that equipment group is unassigned task, so ${\mathrm{gg}}_{k_{p^{\&prime;}}}\&subsetequal;{\mathrm{gg}}_{k_x}.$

Set ${\mathrm{gg}}_{k_x}=\left\{g_t\right|{\mathrm{gk}}_{l_t,k_x}=1,a{s}_t=1,t\&element;\{1,...,\mathrm{gn}\}\}$

Set ${\mathrm{gg}}_{k{p}^{\&prime;}}=\left\{g_t\right|{\mathrm{gkl}}_{t,k_x}=1,a{s}_t=1,k_x=k_{p^{\&prime;}},t\&element;\{1,...,\mathrm{gn}\}\}$

Product type k_p'Processing tasks w_p'Selection equipment group setCalculateIn each equipment group processing Ability, foundationCorresponding device group production capacity set

Set $\mathrm{gh}{a}_{k_{p^{\&prime;}}}=\left\{{\mathrm{ga}}_{t,k_x}\right|\mathrm{gk}{l}_t,k_x=1,{\mathrm{as}}_t=1,k_x=k_{p^{\&prime;}},t\&element;\{1,...,\mathrm{gn}\}\},$ WhereinIt is equipment marshalling g_tProduce k_xThe working ability of type products.WhenBy processing tasks w_p'Distribute toMaximum processing energy in set The equipment group of powerWill task w_p'Match equipment group g_q,And the corresponding as of a row element in gk in order matrix_q=0, represent that this equipment group is distributed and appoint Business.When next task coupling, this equipment group is no longer participate in equipment and is mated with task.

After completing all processing tasks couplings, obtain the equipment group ability coupling set gamc' mating with gw' and wp'.

Mate set gamc' corresponding device group coupling set gmc' also can obtain with equipment group ability.

Coupling set gmc'={ < w_p',g_q>|p'∈{1,...,pn},q∈{1,...,gn}}

Assign order further according to task opportunity, adjust back original task and assign order, then can obtain and assign processing tasks The device group matching set gmc of order coupling.

Coupling set gmc={ < w_p,g_q>|_'p∈{1,...,pn},q'∈{1,...,gn}}

And then can obtain and the corresponding processing tasks demand of device group matching set gmc assigning processing tasks order coupling Ability mates set gamc with equipment group ability.

(8) equipment marshalling optimization aim

Punishment and function are set up by the matching result that processing tasks are organized into groups with equipment, quantifies matching result, if full Sufficient equipment organizes into groups optimizing index, then record marshalling result, otherwise goes to step 3 and again produces new equipment marshalling relation.

pc_p=max(0,gw_p-gma_p) p ∈ { 1,2, l, pn } (22)

Formula is processing tasks w_pThe production capacity that matching unit group provides is not enough；Wherein pc_pRepresent to mate with processing tasks p and set The difference that standby group production capacity is not enough, gw_pRepresent processing tasks p equipment needed thereby production capacity, gma_pRepresent the equipment that processing tasks p is mated The working ability that group can be provided by.

ec_p=max(0,gma_p-gw_p) (23)

Formula is processing tasks w_pMatching unit group provides the difference of production capacity redundancy；

$f_o=\underset{p=1}{\overset{\mathrm{pn}}{\mathrm{\&sigma;}}}({\mathrm{\&alpha;}}_p{\mathrm{pc}}_p+{\mathrm{\&beta;}}_p{\mathrm{ec}}_p),p\&element;\{\mathrm{1,2},...,\mathrm{pn}\}---\left(24\right)$

F in formula_oRepresent the punishment of device packets and processing tasks and, α_pRepresent that the production capacity deficiency for processing tasks p is punished Penalize power, β_pRepresent for processing tasks p production capacity redundancy power of punishment.

minf_oOptimization aim is device packets and processing tasks punishment and minimum, then get the equipment marshalling knot of optimum Really.

The present invention compared with prior art has following advantageous effect:

(1) change the situation of the fixing marshalling of bonding apparatus on semiconductor package wiring, can be according to assigning Production development to setting Standby organized into groups the Dynamic Matching it is achieved that equipment marshalling and processing tasks.

(2) in equipment grouping procedures, the equipment in marshalling, all in a complete UNICOM region, is easy to production line The management and control of staff.

(3) organized into groups according to the product type that device type can be processed, rather than relied solely on device type and carried out Marshalling, can carry out equipment marshalling according to the product type that processing tasks comprise, embodiment device marshalling construction is subject to processing task Drive characteristic, increases the flexibility of equipment marshalling.

(4) setting up equipment marshalling provides production capacity and processing tasks demand production capacity matching optimization index, better meets equipment Organize into groups the purpose mated with processing tasks it is ensured that dynamically organizing into groups result reasonability.

Brief description

Fig. 1 bonding apparatus grouping procedures schematic diagram；

Fig. 2 bonding apparatus to be grouped two dimensional surface schematic diagram；

Fig. 3 bonding apparatus incidence relation two dimensional surface schematic diagram；

The bonding apparatus based on incidence relation for the Fig. 4 organize into groups situation two dimensional surface schematic diagram；

The marshalling of Fig. 5 bonding apparatus and processing tasks matching process schematic diagram；

6 equipment marshalling falsenesses of Fig. 6 do not connect situation citing two dimensional surface schematic diagram

9 equipment marshalling falsenesses of Fig. 7 do not connect situation citing two dimensional surface schematic diagram

6 equipment marshalling falsenesses of Fig. 8 correction do not connect situation two dimensional surface schematic diagram

9 equipment marshallings of Fig. 9 comprise stand-alone device situation two dimensional surface schematic diagram

Other equipment marshalling situation two dimensional surface schematic diagram is comprised in the marshalling of Figure 10 equipment

Specific embodiment

Accompanying drawing referring to the present invention the present invention will be described in further detail in conjunction with specific embodiments, but this The protection domain of invention is not limited by specific embodiment institute, is defined by claims.In addition, with without prejudice to the present invention program On the premise of, easily any change of realization or change fall within this to those of ordinary skill in the art made for the present invention Within bright right.

, it is assumed that there are tri- kinds of device types of a, b, c, device name a01 to a04, b01 to b12, c01 arrive taking accompanying drawing 2 as a example C04, its equipment is put and is arranged for 4 row 5, n=4, m=5, and the product type of the required processing of present lot is a, bis- kinds of b.Converted products In the corresponding relation of unit type, a type product can be processed in a model device and b model device, and the product of b model can be in b Process in model device and c model device.The bonding apparatus marshalling that accompanying drawing 5 provides this case is shown with processing tasks matching process It is intended to.

The present invention comprises the following steps:

The first step: setting equipment marshalling optimization aim, given equipment marshalling is mated punishment and is 80 with processing tasks.

Second step: the equipment that can organize into groups operation on production line is simplified to a point being expressed as on two dimensional surface, by this The all devices point of individual operation is abstracted into multiple lines and multiple rows equipment array.N represents in figure equipment line number, and m represents the equipment row of in figure Number.As shown in Figure 2

$m=\left[\begin{array}{ccccc}{m}_{\mathrm{1,1}}& m_{\mathrm{1,2}}& m_{\mathrm{1,3}}& m_{\mathrm{1,4}}& m_{\mathrm{1,5}}\\ m_{\mathrm{2,1}}& m_{\mathrm{2,2}}& m_{\mathrm{2,3}}& m_{\mathrm{2,4}}& m_{\mathrm{2,5}}\\ m_{\mathrm{3,1}}& m_{\mathrm{3,2}}& m_{\mathrm{3,3}}& m_{\mathrm{3,4}}& m_{\mathrm{3,5}}\\ m_{\mathrm{4,1}}& m_{\mathrm{4,2}}& m_{\mathrm{4,3}}& m_{\mathrm{4,4}}& m_{\mathrm{4,5}}\end{array}\right]$

3rd step: build device type and product type matching relationship matrix kk according to hypothesis situation.

Can also be expressed as

Need structure device type to mate matrix with equipment, in order to seem convenient, mk is expressed as its matrix of transposition mk^t.

m_a={m_1,1,m_1,2,m_1,3,m_1,4Represent a type equipment set.

m_b={m_2,1,m_2,2,m_2,3,m_2,4,m_3,1,m_3,2,m_3,3,m_3,4,m_4,1,m_4,2,m_4,3,m_4,4Represent b type equipment collection Close.

m_c={m_5,1,m_5,2,m_5,3,m_5,4Represent c type equipment set.

Mk represents equipment and product type matching relationship matrix, is obtained by mk=mk kk.

In order to seem convenient, mk is expressed as its matrix mk of transposition^t

Matrix mk^tCan obtain processing cluster tool m of a type products_a

m_a={m_1,1,m_1,2,m_1,3,m_1,4,m_2,1,m_2,2,m_2,3,m_2,4,m_3,1,m_3,2,m_3,3,m_3,4,m_4,1,m_4,2,m_4,3,m_4,4}.

Matrix mk^tCan obtain processing cluster tool m of b type products_b

m_b={m_2,1,m_2,2,m_2,3,m_2,4,m_3,1,m_3,2,m_3,3,m_3,4,m_4,1,m_4,2,m_4,3,m_4,4,m_5,1,m_5,2,m_5,3,m_5,4}

If organizing into groups g for arbitrary equipment_tWith product type k_x,Set up, then Equipment marshalling is met device type and is constrained with converted products type matching, and that is, in arbitrary equipment marshalling, equipment can process k_xType Product.

Check whether equipment marshalling is met device type and constrained with converted products type matching below.

Equipment organizes into groups g₁Comprise cluster tool $m_{g_1}=\{m_{\mathrm{1,1}},m_{\mathrm{1,2}},m_{\mathrm{1,3}}{m}_{\mathrm{1,4}},m_{\mathrm{2,2}},m_{\mathrm{2,3}}\}$ , thenSet up.

Equipment organizes into groups g₂Comprise cluster tool $m_{g_2}=\{m_{\mathrm{2,1}},m_{\mathrm{3,1}},m_{\mathrm{4,1}},m_{\mathrm{5,1}}\}$ , thenSet up.

Equipment organizes into groups g₃Comprise cluster tool $m_{g_3}=\{m_{\mathrm{3,2}},m_{\mathrm{3,3}},m_{\mathrm{4,2}},m_{\mathrm{4,3}}\}$ , then

Set up.

Equipment organizes into groups g₄Comprise cluster tool $m_{g_4}=\{m_{\mathrm{5,2}},m_{\mathrm{5,3}},m_{\mathrm{5,4}}\}$ , thenSet up.

Equipment organizes into groups g₅Comprise cluster tool $m_{g_5}=\{m_{\mathrm{2,4}},m_{\mathrm{3,4}},m_{\mathrm{4,4}},m_{\mathrm{5,4}}\}$ , thenSet up.

Testing result explanation equipment marshalling is met device type and is constrained with converted products type matching.

As shown in figure 3, forming equipment marshalling number t=5.

4th step: will be connected with line between all devices, constitute a network structure with equipment as node.By equipment it Between incidence relation represented with 0,1, onrelevant relation between " 0 " expression equipment, that is, two equipment not in one group, " 1 " " 0 " table Show relevant between equipment, that is, two equipment are organized in one group.As shown in Figure 4.

5th step: set up equipment marshalling incidence relation matrix according to marshalling incidence relation.

Incidence relation matrix lc between row, the number in this incidence relation matrix takes " 1 ", represents the equipment of adjacent two row Compile as one group, matrix taking Fig. 4 as a example

$\mathrm{lc}=\left[\begin{array}{cccc}0& 1& 1& 0\\ 1& 0& 1& 0\\ 1& 0& 1& 0\\ 0& 1& 1& 0\end{array}\right]$

Incidence relation matrix lr between row, the number in this incidence relation matrix takes " 1 ", represents the equipment of adjacent rows Compile as one group, matrix taking Fig. 4 as a example

$\mathrm{lr}=\left[\begin{array}{ccccc}1& 0& 0& 0& 0\\ 1& 1& 1& 1& 1\\ 1& 0& 0& 0& 1\end{array}\right]$

In this organizational systems wherein matrix, element can be defined as incidence relation coefficient, and its value is " 0 ", " 1 " two Arbitrarily change in number, all can generate the equipment marshalling meeting the constraint of grouped location neighbouring relations, in this marshalling matrix, number takes " 1 " Represent that neighbouring device is compiled as one group.

Equipment marshalling matrix in Fig. 4 can be showed, the element that equipment organizes into groups in matrix mg is equipment marshalling number, 4 × 5 matrix tables as represented according to the marshalling relation of upper figure are as follows.

$\mathrm{mg}=\left[\begin{array}{ccccc}{g}_1& g_2& g_2& g_2& g_2\\ g_1& g_1& g_3& g_3& g_4\\ g_1& g_1& g_3& g_3& g_4\\ g_1& g_5& g_5& g_5& g_4\end{array}\right]$

The matrix of this equipment marshalling is equipment marshalling temporary code matrix corresponding with device relationships matrix.

5th step: revise marshalling incidence relation

This coded system there may exist false disconnected areas case, analyzes two exemplary first.

As shown in fig. 6, the incidence coefficient between equipment b07 and equipment b11 is " 0 ", that is, two adjacent set for the marshalling generating For not associating, the incidence coefficient of equipment c03 and equipment c04 is " 0 ", and also two neighbouring devices do not associate, but passes through equipment b07 Associate with equipment b08, equipment b08 is associated with equipment b12, equipment b12 is associated with equipment b11, then b07 is to associate with equipment b11 Relation, that is, this six equipment are in an equipment marshalling.

The marshalling generating is as shown in fig. 7, nine equipment of in figure are in an equipment is organized into groups.

Above-mentioned two situations are to meet matrix coder rule, but do not meet actual marshalling situation, so each will be passed through The interim marshalling number of marshalling mark, is then detected by rank scanning and revises disconnected region.N=4 in this example, m=5, ckn =2(n×m)-(n+m)=31.

If two nearby device marshallings number are identicals it is possible to revise " 0 " element in coding.Encoded by revising In " 0 " element after, revise the situation of false not connected region.Revise Scanning Detction at once to figure to find in same marshalling number Under, the incidence coefficient between equipment b07 and equipment b11 is " 0 ", but the interim marshalling number of this two equipment is identical, then Need for the incidence coefficient between equipment b07 and equipment b11 to be modified to " 1 ".Enter ranks correction Scanning Detction equipment c03 and equipment The incidence coefficient of c04 is " 0 ", then need for the incidence coefficient between equipment c03 and equipment c04 to be modified to " 1 " through revising such as Shown in Fig. 8.

6th step: equipment marshalling relation closing constraint

The said equipment organizational systems, are capable of the marshalling function of neighbouring device, but closed area to be overcome comprise non- The situation of marshalling.To analyze the situation of two kinds of closed areas first:

As shown in figure 9,9 equipment constitute an equipment marshalling, bag in the equipment marshalling of this closing by incidence relation Contain not equipment in any marshalling.If allowing this marshalling to set up, the working ability of this equipment is just wasted, when this When equipment is compiled in the marshalling of other equipment again, the administrative staff of its corresponding device marshalling, enter into this equipment marshalling custodian In member's compass of competency, production management tissue disorder can be caused.

As shown in Figure 10, above-mentioned 12 equipment constitute an equipment marshalling by incidence relation, and the equipment of this closing is compiled Contain in group, the equipment marshalling of another one independence.If allowing this marshalling situation to exist, cause two equipment marshallings Administrative staff's compass of competency is overlapping, can cause production management tissue disorder.

If judging to organize into groups whether region is correct, needing the marshalling relation being temporarily grouped according to equipment group in matrix g, pressing Row or column detects, if detecting that Grouping apparatus are all the closing UNICOM regions of adjacent connection, the region closing at this Inside occurs unconnected region.And the interim marshalling coding in this region is inconsistent with the marshalling that outside is closed, if Detect kind of situation then it is assumed that this marshalling is unreasonable, comprise the detection needs of non-Grouping apparatus in enclosed region simultaneously Detected and arranged detection, jointly determined whether marshalling is reasonable according to ranks testing result.

7th step: equipment marshalling is mated with processing tasks

According to Production requirement, three types equipment is according to position relationship constraint and converted products type and equipment matching relationship Constraint can weave into 5 kinds of equipment groups: a type, ab type, b type, bc type, c type, using four type equipment groups in example.5 kinds of equipment Group is according to device type and task type matching relationship: a type equipment group, ab type equipment group, b type equipment group can be processed a type and be produced Product；B type equipment group, bc type equipment group, c type equipment group can process b type product.

(1) equipment marshalling provides production capacity

Build process velocity matrix v

(2) processing tasks demand production capacity

Assume in the case of requirement is produced by below,

Processing tasks sequence wp={ a01, a02, b01, b02, b03 }；

Product type sequence kp={ a, a, b, b, b } of processing tasks；

Processing tasks production capacity demand sequence gw={ 1100,1800,900,1300,600 }；

Wp, kp, gw are given processing tasks information sequences.

When product type k_x=k₁Processing tasks sequence wp of=a_a={a01,a02}；

When product type k_x=k₂Processing tasks sequence wp of=b_b={b01,b02,b03}

According to processing tasks production capacity demand sequence gw' after processing tasks production capacity demand size adjustment order,

Sequence gw'={ 1800,1300,1100,900,600 }

According to processing tasks sequence wp' after processing tasks production capacity demand size adjustment order,

Sequence wp'={ a02, b02, a01, b01, b03 }

According to product type sequence kp' of processing tasks after processing tasks production capacity demand size adjustment order,

Sequence kp'={ a, b, a, b, b }

(3) processing tasks matching unit marshalling

Equipment marshalling and the matching relationship matrix gk of product type, in the unassigned task of original state equipment group, so as_t=1.

Drawn according to above-mentioned matrix analysis, in an initial condition, when product type k_xThe equipment group selection set gg of=a_a= {g₁,g₃,g₅}；When product type k_xThe equipment group selection set gg of=b_b={g₂,g₃,g₄,g₅}

By t=60s, in an initial condition:

When product type k_x=a, then have and meet product type a for equipment group production capacity set.

Sequence gga_a={ga_1,a=1710,ga_3,a=1284,ga_5,a=1050}；

When product type k_x=b, then have and meet product type b for equipment group production capacity set.

Sequence gga_b={ga_2,b=1350,ga_3,b=1224,ga_4,b=570,ga_5,b=1140}

Processing tasks are as shown in Figure 5 with device group matching process:

1. the product type of a02 is a, from gga_aMaximum working ability ga is selected in set_1,a=1710 equipment group g₁With it Coupling；

2. the product type of b02 is b, from gga_bMaximum working ability ga is selected in set_2,b=1350 equipment group g₂With it Coupling；

3. the product type of a01 is a, from gga_aNot selected maximum working ability ga before in set_3,a=1284 set Standby group g₃Matched, because equipment group g before₁Mate with processing tasks a02；

4. the product type of b01 is b, from gga_bNot selected maximum working ability ga before in set_5,b=1140 set Standby group g₅Matched, because equipment group g before₂Mate with processing tasks b02, equipment group g₃With processing tasks a01 Join；

5. the product type of b03 is b, from gga_bNot selected maximum working ability ga before in set_4.b=570 equipment Group g₄Matched, choose, because equipment group g before₂Mate with processing tasks b02, equipment group g₃With processing tasks a01 Coupling, equipment group g₅Mate with processing tasks b01.

Obtain the equipment group ability coupling set gamc' mating with mission requirements ability gw'.

Set gamc'={<1800,1710>,<1300,1350>,<1100,1284>,<900,1140>,<600,570>}

Mate set gamc' corresponding device group coupling set gmc' with equipment group ability.

Set gmc'={ < a02, g₁>,<b02,g₂>,<a01,g₃>,<b01,g₅>,<b03,g₄>}

Assign order further according to processing tasks, adjust back original task and assign sequentially, then with assign processing tasks sequentially The device group matching set gmc joining.

Set gmc={ < a01, g₃>,<a02,g₁>,<b01,g₅>,<b02,g₂>,<b03,g₄>}

With the device group matching set gmc corresponding equipment group working ability coupling set assigning processing tasks order coupling gamc.

Set gamc={<1100,1284>,<1800,1710>,<900,1140>,<1300,1350>,<600,570>}.

8th step: marshalling optimization aim

According to the production capacity demand matching unit group production capacity set that assigns a task,

Gamc={<1100,1284>,<1800,1710>,<900,1140>,<1300,1350>,<600,570>},

Production capacity deficiency power of punishment α further according to the processing tasks p being given_pWith processing tasks p production capacity redundancy power of punishment β_p.

p	1	2	3	4	5
						αp	0.2	0.2	0.2	0.2	0.2
βp	0.1	0.1	0.1	0.1	0.1

Production capacity redundancy can be accelerated to produce, but production capacity configuration is not enough, will postponement production, cause to drag the phase, so α_p≥2β_p.

Device packets and processing tasks punishment and f are calculated according to formula and given data_o=71.4.

Claims (5)

1. a kind of semiconductor packages wire bonding apparatus grouping method based on processing tasks ability coupling, methods described contains successively Following steps are:

Step 1: setting equipment marshalling optimization aim, the marshalling of given equipment mate with processing tasks punish and,

Step 2: the equipment that can organize into groups operation on production line is simplified to a point being expressed as on two dimensional surface, by this operation All devices be abstracted into multiple lines and multiple rows equipment lattice array,

Step 3: will between all devices with line connect, constitute a network structure with equipment as node, by the point of ranks it Between equipment marshalling relation use " 0 ", the numeral expression of " 1 ", generate new marshalling incidence relation,

Step 4: set up the incidence relation matrix of relation that can reflect marshalling and equipment marshalling matrix,

Step 5: revise marshalling incidence relation, incomplete incidence relation information between ranks in the same marshalling of supplement,

Step 6: equipment marshalling constraint detection, in addition it is also necessary to carry out equipment marshalling closing before equipment marshalling is mated with processing tasks Position relationship constraint detection and device type and the constraint detection of converted products type matching, then say without meet the constraint condition Bright this equipment marshalling result is unreasonable, goes to step 3,

Step 7: equipment marshalling is mated with processing tasks, and being organized into groups by computing device provides production capacity and processing tasks demand production capacity Afterwards, according to the matching relationship comprising device type and processing tasks in equipment group, processing tasks and mating that equipment is organized into groups are obtained As a result,

Step 8: equipment marshalling optimization aim, punishment and function are set up by the matching result that processing tasks are organized into groups with equipment, Quantify matching result, if meeting equipment marshalling optimizing index, record marshalling result, if be unsatisfactory for optimizing index to go to step Rapid 3 it is characterised in that: the equipment that can organize into groups operation is simplified to a point being expressed as on two dimensional surface, by the institute of this operation There is equipment point to be abstracted into multiple lines and multiple rows equipment array, set up equipment representing matrix, m_i,jThe equipment of the i-th row jth row representing, n table Equipment maximum number of lines in diagram, i ∈ { 1 ..., n }, m represent the equipment columns of in figure, j ∈ { 1 ..., m }, and m represents equipment square Battle array,

$m=\left[\begin{array}{cccc}{m}_{1,1}& m_{1,2}& ...& m_{1,m}\\ m_{1,2}& m_{2,2}& ...& m_{2,m}\\ \&centerdot;& \&centerdot;& \&centerdot;& \&centerdot;\\ \&centerdot;& \&centerdot;& \&centerdot;& \&centerdot;\\ \&centerdot;& \&centerdot;& \&centerdot;& \&centerdot;\\ m_{n,1}& m_{n,2}& ...& m_{n,m}\end{array}\right]---\left(1\right)$

Would indicate that on the 2 d plane picture of abstraction relation between equipment that equipment point line connects, constitute one with equipment as node Network structure, the incidence relation between equipment is represented with 0,1, onrelevant relation between " 0 " expression equipment, and that is, two equipment are not In one group, relevant between " 1 " expression equipment, that is, two equipment are organized in one group.

2. the semiconductor packages wire bonding apparatus grouping method being mated based on processing tasks ability according to claim 1, its It is characterised by:

Set up equipment marshalling incidence relation matrix according to the incidence relation between equipment,Represent the i-th row and the i+1 of jth row Row incidence coefficient between the equipment of row,I ∈ { 1 ..., n-1 }, j ∈ { 1 ..., m }, constitute row incidence relation Matrix lr；Row incidence coefficientWhen taking " 1 ", represent that jth row the i-th row equipment and the equipment of jth row i+1 row are compiled as one group,

Represent the row incidence coefficient between the jth row of the i-th row and the equipment of jth+1 row,I ∈ { 1 ..., n }, J ∈ { 1 ..., m-1 }, constitutes row incidence relation matrix lc, row incidence coefficientWhen taking " 1 ", represent the i-th row jth row and i-th The equipment of row jth+1 row is compiled as one group,

Represent equipment grouping information matrix with mg, the element mg in matrix_i,jRepresent the equipment m of the i-th row jth row_i,jMarshalling letter Breath, organizes into groups expression matrix equipment by equipment and organizes into groups situation,

$mg=\left[\begin{array}{ccccc}{\mathrm{mg}}_{1,1}& {\mathrm{mg}}_{1,2}& {\mathrm{mg}}_{1,3}& ...& {\mathrm{mg}}_{1,m}\\ {\mathrm{mg}}_{1,2}& {\mathrm{mg}}_{2,2}& {\mathrm{mg}}_{2,3}& ...& {\mathrm{mg}}_{2,m}\\ \&centerdot;& \&centerdot;& \&centerdot;& & \&centerdot;\\ \&centerdot;& \&centerdot;& \&centerdot;& & \&centerdot;\\ \&centerdot;& \&centerdot;& \&centerdot;& ...& \&centerdot;\\ {\mathrm{mg}}_{n,1}& {\mathrm{mg}}_{n,2}& {\mathrm{mg}}_{n,3}& ...& {\mathrm{mg}}_{n,m}\end{array}\right]---\left(4\right)$

According to the ranks incidence relation of equipment room, procession detects, the equipment that will be associated together is compiled as one group, gives one and faces When marshalling number it is assumed that a variable g_t, g_tRepresent the marshalling number of t-th equipment marshalling, and g_t∈{g₁,...,g_gn, t ∈ 1, 2 ..., gn }, gn represents the maximum marshalling number of all marshallings,

m_allRepresent all devices set, m_all={ m_1,1,m_1,2,....,m_n,m,Expression equipment marshalling g_tCluster tool,

${\mathrm{mg}}_{i,j}=\left\{\begin{array}{cc}{g}_t& m_{i,j}\&element;m_{g_t}\\ 0& m_{i,j}\&notelement;m_{g_t}\end{array}\right.---\left(5\right)$

As equipment m_i,jBelong to marshalling g_tCluster tool m_gt, mg_i,jValue is g_t, according to above formula, equipment is organized into groups in matrix mg Equipment grouping information mg_i,jThe corresponding g in position_tIt is replaced.

3. according to claim 2 a kind of based on processing tasks ability coupling semiconductor packages wire bonding apparatus marshalling side Method it is characterised in that: meet equipment marshalling rule on the premise of, revise grouping information incomplete marshalling situation, by right The marshalling of each equipment carries out row, column detection, and relation organized into groups by corrective,

Row detection is to start to detect line n from the 1st row, to every a line, sets according in marshalling this row of relation pair, each two is adjacent Standby, whether detection incidence coefficient is correct, according to formula 6, the equipment marshalling g of the such as i-th row jth row_i,jWith the i-th row jth+1 row Equipment marshalling g_i,j+1Equal, then equipment row incidence relation" 1 " should be taken, if " 0 " is it should by its set, enter altogether Row n × (m-1) secondary detection check,

$l_{i,j}^c=\left\{\begin{array}{cc}0& {\mathrm{mg}}_{i,j}\&notequal;{\mathrm{mg}}_{i,j+1}\\ 1& {\mathrm{mg}}_{i,j}={\mathrm{mg}}_{i,j+1}\end{array}\right.---\left(6\right)$

Row detection is to start m row is detected from the 1st row, to each row, sets according in marshalling this row of relation pair, each two is adjacent Standby, whether detection incidence coefficient is correct, according to formula 7, such as the equipment marshalling g of jth row i-th row_i,jWith jth row i+1 row Equipment marshalling g_i+1,jEqual, then equipment row incidence relation" 1 " should be taken, if " 0 " is it should by its set, enter altogether Row (n-1) × m detection check,

$l_{i,j}^r=\left\{\begin{array}{cc}0& {\mathrm{mg}}_{i,j}\&notequal;{\mathrm{mg}}_{i+1,j}\\ 1& {\mathrm{mg}}_{i,j}={\mathrm{mg}}_{i+1,j}\end{array}\right.---\left(7\right)$

Row detection frequency n × (m-1), row detection number of times (n-1) × m, total degree ckn=2 (n × m)-(n+m) of ranks detection.

4. the semiconductor packages wire bonding apparatus grouping method being mated based on processing tasks ability according to claim 2, its It is characterised by:

In addition it is also necessary to carry out equipment marshalling detent position relation constraint detection and equipment class before equipment marshalling is mated with processing tasks Without meet the constraint condition, type and the constraint detection of converted products type matching, then illustrate that this equipment marshalling result does not conform to Reason,

If judging whether in the range of the closure of equipment marshalling be this Grouping apparatus entirely, need to be organized into groups in matrix g according to equipment Marshalling relation, after entering every trade detection and row detection, if detecting the closed area that in the marshalling of equipment, all devices are constituted The equipment of non-marshalling is comprised then it is assumed that this equipment marshalling is unreasonable, this checking process needs to examine according to ranks in domain Survey whether rationally result determines marshalling result jointly,

n1_t=min i | mg_i,j=g_t, i ∈ { 1 ..., n }, j ∈ { 1 ..., m } }, n1_tIt is the minimum in t-th equipment marshalling Line number,

n2_t=max i | mg_i,j=g_t, i ∈ { 1 ..., n }, j ∈ { 1 ..., m } }, n2_tIt is the maximum in t-th equipment marshalling Line number,

m1_t,i=min j | mg_i,j=g_t,i∈{n1_t,...,n2_t, j ∈ { 1 ..., m } }, m1_t,iIt is in t-th equipment marshalling I-th row minimum row number,

m2_t,i=max j | mg_i,j=g_t,i∈{n1_t,...,n2_t, j ∈ { 1 ..., m } }, m2_t,iIt is in t-th equipment marshalling I-th row maximum row number,

${\mathrm{gz}}_{t,i,j}=\left\{\begin{array}{cc}1& {\mathrm{mg}}_{i,j}=g_t\\ 0& {\mathrm{mg}}_{i,j}\&notequal;g_t\end{array}\right.,i\&element;\{n{1}_t,...,n{2}_t\},j\&element;\{m{1}_t,...,m{2}_t\}---\left(8\right)$

Assume variable gz_t,i,j, when belonging to the i-th row jth row equipment, the grouping information of marshalling is identical with the marshalling number of t-th marshalling When, gz_t,i,jIt is equal to " 1 ", be otherwise equal to " 0 ",

$f_{t,i}=\left\{\begin{array}{cc}1& \underset{j=m{1}_{t,i}}{\overset{m{2}_{t,i}}{\&sigma;}}{\mathrm{gz}}_{t,i,j}=(m{2}_{t,i}-m{1}_{t,i})\\ 0& \underset{j=m{1}_{t,i}}{\overset{m{2}_{t,r}}{\&sigma;}}{\mathrm{gz}}_{t,i,j}<(m{2}_{t,i}-m{1}_{t,i})\end{array}\right.---\left(9\right)$

f_t,iWhether comprise to be not belonging to the equipment of t-th marshalling, by the i-th row in the i-th row representing t-th equipment marshalling The equipment sum that big row number is comprised with this row with the difference deducting minimum row number compares and is judged, f_t,iIt is equal to " 1 " expression not comprise It is not belonging to the equipment of t-th marshalling；f_t,iIt is equal to " 0 " and represent the equipment comprising to be not belonging to t-th marshalling,

f_t ^rRepresent the result by row detection for t-th equipment marshalling, f_t ^r=0 shows that t-th equipment marshalling is not comprised as in row detection There is the situation of non-t Grouping apparatus, f in middle a line equipment_t ^r=1 shows that t-th equipment marshalling is not had as in row detection There is not the situation of the equipment being not belonging to t-th marshalling in any a line equipment, or comprise the equipment being not belonging to t-th marshalling Row equipment organize into groups region edge,

f_t ^cRepresent the result by row detection for t-th equipment marshalling, f_t ^c=0 shows that t-th equipment marshalling is not comprised as in row detection There is the situation of non-t Grouping apparatus, f in a middle row equipment_t ^c=1 shows that t-th equipment marshalling is not had as in row detection There is the situation of non-t Grouping apparatus, or the side being listed in equipment marshalling region comprising non-t Grouping apparatus in any row equipment Edge,

f_tT-th equipment representing organizes into groups the equipment whether comprising non-marshalling in constituted closed area, f_t=0 expression sets for t-th The f of standby marshalling_t ^rRow testing result and f_t ^cRow testing result determines that marshalling includes the equipment containing non-marshalling, f simultaneously_t=1 expression T-th equipment organizes into groups the equipment not comprising non-marshalling in constituted closed area,

$f=\left\{\begin{array}{cc}1& \underset{t=1}{\overset{gn}{\&sigma;}}{f}_t=gn\\ 0& \underset{t=1}{\overset{gn}{\&sigma;}}{f}_t<gn\end{array}\right.---\left(12\right)$

F represents that equipment marshalling result meets device location constraint, organizes into groups composition closed area when all devices and does not comprise non-volume The equipment of group, f is equal to " 1 ",

Device type is constrained with converted products type matching

Product type k_xRepresent, common kn product type, product type set k={ k_x|x∈{1,...,kn}}

Device type k_yRepresent, common kn device type, device type set k={ k_y|y∈{1,...,kn}}

Product type can be expressed as with device type matching relationship matrix kk

Matrix kk is device type and product type matching relationship matrix,It is device type and product type matching relationship,

Device type mates matrix mk with equipment

Matrix mk is device type and equipment matching relationship matrix, m_i,jRepresent the equipment of the i-th row jth row,

It is relation between device type and equipment,

One equipment can only belong to a device type

For device type k_y, the collection of the type equipment sharesRepresent,

$m_{k_y}=\left\{m_{i,j}\right|{\mathrm{mkl}}_{i,j,k_y}=1\}$

Device type k_yCluster toolThere are following two qualifications: the set of any two types equipmentWithCommon factor be empty set, the union of all kinds cluster tool is the complete or collected works ms of equipment,

$m_{k_1}\&cup;m_{k_1}...\&cup;m_{k_{kn}}=ms$

Mk represents equipment and product type matching relationship matrix, is obtained by mk=mk kk,

Wherein equipment and product type matching relationshipDue to an equipment only one of which Device type,Therefore

According to equipment and corresponding relation in product type matching relationship matrix, for product type k_x, this product type coupling Cluster tool useRepresent,

$m_{k_x}=\left\{m_{i,j}\right|{\mathrm{mkl}}_{i,j,k_x}=1\}---\left(16\right)$

The equipment of distinct device type can be comprised, but according to device location relation, these are different types of to set in one marshalling Standby must be adjacent equipment,

G is organized into groups for equipment_t, the cluster tool that comprises in this marshalling usesRepresent,

Set

If organizing into groups g for arbitrary equipment_tWith product type k_x,Set up, then equipment is compiled Group is met device type and is constrained with converted products type matching,

The corresponding device set of equipment marshallingDevice location relation constraint should be met, also will meet equipment marshalling and processing Product type matching constraint.

5. the semiconductor packages wire bonding apparatus grouping method being mated based on processing tasks ability according to claim 1, its It is characterised by: equipment marshalling is mated with processing tasks, after computing device is organized into groups and is provided production capacity and processing tasks demand production capacity, According to the matching relationship comprising device type and processing tasks in equipment group, acquisition processing tasks mate knot with equipment is organized into groups Really,

1) equipment marshalling provides production capacity

Based on equipment and product type matching relationship matrix mk, build process velocity matrix v,It is defined as the i-th row jth row to set Standby processing k_xThe process velocity of type products, unit: individual/minute, process time t is obtained by productive temp,

Matrix

The equipment marshalling based on product type for the construction provides production capacity matrix gga, represents that distinct device marshalling is directed to different product class The equipment processing ability that type provides is different,

Wherein

Expression equipment organizes into groups g_tProduce k_xThe working ability of type products, equal to all devices in group in preset time t Converted products quantity,

2) processing tasks demand production capacity

w_pIt is p-th processing tasks, pn is that task is most, p ∈ { 1 ..., pn },

Processing tasks sequence wp, sequence wp={ w_p|p∈{1,...,pn}}

The product type of p-th processing tasks is k_p, set up product type sequence kp of processing tasks,

Sequence kp={ k_p|p∈{1,...,pn}}

Construction product type k_xProcessing tasks sequence

${\mathrm{wp}}_{k_x}=\left\{w_p\right|k_p=k_x,p\&element;\{1,...,pn\},x\&element;\{1,...,kn\}\},{\mathrm{wp}}_{k_x}\&subsetequal;wp,$

gw_pIt is p-th processing tasks w_pRequired production capacity, constructs processing tasks demand production capacity sequence gw, gw={ gw_p|p∈ { 0 ..., pn } },

3) processing tasks matching unit marshalling

Production equipment is organized into groups number sum and be should be greater than equal to the number of tasks sum needing distribution, i.e. gn >=pn, product type k_xCorresponding can Optional equipment marshalling number should be greater than equal to product type in processing tasks set being k_xNumber of tasks, that is,

Defining processing tasks demand production capacity provides production capacity matching sequence gamc={ < gw with equipment marshalling_p,gma_p>|p∈{1,..., Pn } }, wherein gma_pIt is and processing tasks demand production capacity gw_pThe equipment marshalling matching provides production capacity, is not carrying out matching operation Before, this collection is combined into sky,

Pn processing tasks are distributed to equipment marshalling, needs first processing tasks according to processing tasks demand production capacity from big to small It is ranked up, interim processing tasks sequence wp' after sequence,

Define interim processing tasks demand production capacity sequence gw'=after being adjusted from big to small according to processing tasks demand production capacity {gw_p'|p'∈{0,...,pn}}

As p '₁<p'₂, then show

Defining the interim processing tasks demand production capacity after processing tasks demand production capacity adjusts from big to small provides product with equipment marshalling Can coupling set gamc'={ < gw_p',gma_p'> | p' ∈ { 1 ..., pn } }, wherein gma_p' be with processing tasks demand production capacity from Arrive greatly processing tasks demand production capacity gw after little sequence is processed_p'The equipment marshalling matching provides production capacity, is not carrying out matching operation Before, this collection is combined into sky,

In the matching process, first set up the sequence wp'={ w of the interim processing tasks after the adjustment of processing tasks demand production capacity_p'|p' ∈ { 1 ..., pn } }, w_p'Be as desired production capacity come pth ' individual position processing tasks, product type is k_p',

Interim processing tasks sequence wp' corresponding interim products type sequence kp'={ k after adjustment_p'|p'∈{1,...,pn}}

According to equipment and product type matching relationship matrix mk, select to process setting of this product by the product type of this task Standby marshalling, the matching relationship matrix gk of construction equipment marshalling and product type,

Element gkl in matrix gk_t,xRepresent the matching relationship of product type and equipment marshalling, i.e. equipment marshalling g_tIn comprise is full Sufficient device type and the equipment of product type matching relationship,

${\mathrm{gkl}}_{t,k_x}=\left\{\begin{array}{cc}1& \underset{i=n{1}_t}{\overset{n{2}_t}{\mathrm{\&pi;}}}\underset{j=m{1}_t}{\overset{m{2}_t}{\mathrm{\&pi;}}}{\mathrm{mkl}}_{i,j,k_x}=1\\ 0& \underset{i=n{1}_t}{\overset{n{2}_t}{\mathrm{\&pi;}}}\underset{j=m{1}_t}{\overset{m{2}_t}{\mathrm{\&pi;}}}{\mathrm{mkl}}_{i,j,k_x}=0\end{array}\right.,i\&element;\{n{1}_t,...,n{2}_t\},j\&element;\{m{1}_t,...,m{2}_t\}---\left(21\right)$

Wherein as_tIt is equipment marshalling distribution processing tasks mark, if processing tasks distribute to the marshalling of this equipment, as_t=0, Under original state, equipment organizes into groups unassigned processing tasks, so whole as_t=1, according to interim processing tasks w_p'Product class Type k_p', the equipment marshalling being capable of converted products type, product is selected by the matching relationship matrix of product type and equipment marshalling Type k_xEquipment marshalling select set beConstruction processing tasks w_p'Equipment marshalling select setWork as k_x=k_p' When, wherein comprise the equipment marshalling that equipment marshalling is unassigned task, so

Set

Set

Product type k_p'Interim processing tasks w_p'Selection equipment grouping setsCalculateIn each equipment marshalling product Can, foundationCorresponding device marshalling provides production capacity set

SetWhereinIt is equipment marshalling g_tProduce k_xThe working ability of type products, whenBy processing tasks w_p'Distribute toIn set, maximum working ability sets Standby marshallingWill task w_p'Match equipment marshalling g_q,And the as in the element of q row in gk in order matrix_q=0, represent that the marshalling of this equipment is divided Join processing tasks, when next task coupling, the marshalling of this equipment is no longer participate in mating of equipment marshalling and processing tasks Journey,

After completing all processing tasks coupling, after adjusting from big to small according to processing tasks demand production capacity, obtain with interim gw' and The interim processing tasks demand production capacity of interim wp' coupling and equipment marshalling provide production capacity matching sequence gamc',

Organize into groups the interim processing tasks providing production capacity matching sequence gamc' corresponding with interim processing tasks demand production capacity with equipment Also can obtain with device group matching sequence gmc',

Matching sequence gmc'={ < w_p',g_q>|p'∈{1,...,pn},q∈{1,...,gn}}

Assign order further according to processing tasks, adjust back original task and assign order, then can obtain and assign order with processing tasks The processing tasks of coupling organize into groups matching sequence gmc with equipment,

Matching sequence gmc={ < w_p,g_q'>|p∈{1,...,pn},q'∈{1,...,gn}}

And then the processing tasks that can obtain assigning order coupling with processing tasks organize into groups the corresponding processing of matching sequence gmc with equipment Mission requirements production capacity provides production capacity matching sequence gamc with equipment marshalling.