CN103631013A - Transmission and reflection dual-use micro-motor optical modulator and flat panel imagescope - Google Patents
Transmission and reflection dual-use micro-motor optical modulator and flat panel imagescope Download PDFInfo
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- CN103631013A CN103631013A CN201210299634.2A CN201210299634A CN103631013A CN 103631013 A CN103631013 A CN 103631013A CN 201210299634 A CN201210299634 A CN 201210299634A CN 103631013 A CN103631013 A CN 103631013A
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Abstract
Disclosed are a transmission and reflection dual-use micro-motor optical modulator and flat panel imagescope and a manufacturing method thereof. The optical modulator comprises a light splitter, integrated circuits and light switches, and can be equipped with a color filter and a necessary protective screen. The light splitter is used for leading an incident light uniformly distributed on an incident surface thereof to each of serially separated imaging points, and condensing the light of each imaging point on the incident surface of the light to only occupy a small part of the area of the imaging points. The remaining majority area of the imaging points is used for placing the integrated circuits and the light switches, and for controlling a final direction of the light to achieve control of the color and light intensity of the imaging points. A plurality of methods for designing and manufacturing the optical modulator and the light switches, and an automatic aligned spherical barrel structure used for placing a circular isolated ball on the optical modulator and applied for the light modulator or a general micro-motor structure to be connected with a protective screen thereof and to maintain a fixed distance therebetween are disclosed.
Description
Technical field
The present invention relates to a kind of transmission and the micromotor optical modulation device that reflects double-purpose type, be particularly useful for flat image and show.
Background technology
Liquid crystal pictorial display (LCD) and plasma video picture (PD) have replaced cathode-ray tube (CRT) video picture with very fast speed.Its main cause be the video boards of liquid crystal pictorial display and plasma video picture compared with cathode-ray tube (CRT) video picture want the many of book.Yet liquid crystal pictorial display and plasma video picture all utilize the energy effectively body.Such as, in liquid crystal pictorial display, polaroid used has just blocked 50 percent nonpolarized light, just the utilization factor of luminous energy has been fallen at the end to 50 percent once.And in equal video picture light intensity situation, plasma video picture will be sold the more energy of consumption than liquid crystal pictorial display.Now also have many about article and the patent as video picture application with micromotor device.Some micromotor device, such as the DLP of Texas Instruments, can be effectively applied to optical projection system, but be difficult to flat panel TV.If other micromotor device more has their difficulty for dull and stereotyped video picture.These difficulties, comprise video picture performance (as light source utilize rate variance and contrast low), the difficulty of production, and the reliability aspects of device, make these micromotor devices can not have business-like video picture application.Therefore be necessary newly, there is production cost low, and the dull and stereotyped video picture of performance better (high energy efficiency, high-contrast).
Summary of the invention
The invention provides the dull and stereotyped video picture device of a kind of novel microscopic electro-mechanical systems (MEMS) (or the dull and stereotyped imagescope of micromotor), effectively solved the defect of energy utilization rate variance in liquid crystal pictorial display and plasma video picture.This new dull and stereotyped imagescope to the utilization factor of light source close to absolutely.And it can use the complete black background space of a whole page, the contrast of video picture is more improved.The stock of the dull and stereotyped video picture device of this micromotor can be plastic plate, and production cost is also lower than liquid crystal pictorial display device.
Basic technical scheme of the present invention is: first make a light separation vessel, it makes equally distributed incident light on a plane of incidence, by the light bunching of each picture point (or video picture point) being become by very little one by one light hole (or a rule very narrow go out light slit) to emergent light out at exit facet (or claiming picture plane, transparent surface) after it.Each light hole with respect to a video picture point, but only accounts for some areas that video picture point is very little in picture plane.In picture plane, going out light slit and going out between light slit has very large area can be used for manufacturing and placement light switch and integrated circuit.Therefore in this imagescope, the circuit of integrated circuit wants large many compared with the circuit of the integrated circuit in liquid crystal pictorial display device.That also therefore will easily manufacture is many.
Then, (in picture plane) manufacturing integration circuit on light separation vessel.This integrated circuit becomes a part for light whole separator.But integrated circuit can be also the difference parts that are connected on light separation vessel.This integrated circuit is used for controlling and driving light switch.
After integrated circuit is made on light separation vessel, then manufacture in the above a plurality of microscopic electro-mechanical systems (MEMS) light switch (referred to as " micromotor light switch ", they are to be also manufactured on the exit facet of light separation vessel).This light switch is controlled the last trend by each light hole (or going out light slit) light out: or light trap is lived, or allow the free outgoing of light.This function has the liquid crystal in the liquid crystal pictorial display of being similar to.But be different from liquid crystal pictorial display, the present invention adopts micromotor light switch to control light, does not need polaroid.Polaroid generally blocks 50 percent light.This light switch can allow the whole free outgoing of light below it.Compare with liquid crystal pictorial display, the utilization factor of light is doubled.On the other hand, this way of being controlled the last trend of light by micromotor light switch, can the most effective light source of let us choice for use.This is different from again in plasma video picture and relies on the gas discharge that efficiency is not high luminous.Therefore, technical scheme of the present invention can more effectively be utilized energy than liquid crystal pictorial display and plasma video picture.
After this integrated circuit and micromotor light switch are all carried out, display screen is placed thereon.In order to protect micromotor light switch, technical solution of the present invention be to utilize circular separated bead self-aligned mechanism on the other hand.This circular separated bead self-aligned mechanism is to be also based upon on light separation vessel.It can allow the separated bead of small circle be placed on wherein.This bead is used for guaranteeing have certain fixed range between display screen and micromotor light switch, thereby be unlikely to make display screen and micromotor light switch to have directly, collides.After this display screen and dull and stereotyped imagescope connect together, there is the function of protection micromotor light switch.The large portion aspect long-pending (except the road warp at emergent light) of special this protection screen of technical solution of the present invention is helped black, thereby improves the contrast of video picture.
What in technical solution of the present invention, relate to is the micromotor light switch that has following characteristic about manufacturing on the other hand.These characteristics comprise: (1) is easy to driven (can with lower voltage, open it or close); (2) it can block light in off position effectively, in open mode, can effectively allow light pass through; (3) drive inertia little, on-off effect speed is fast.Present technique invention makes these characteristics be achieved by setting up asymmetric double-deck light switch (referred to as double-deck switch).The function of the ground floor of these double-deck switches is outside in alive situation, produces enough electrostatic attractions and is conducive to low voltage drive with the electrode under it.This one deck therefore and beneath electrode put very close to, can under certain angle scope, rotate around its rotation axis, generally make light switch or rest on open state, or resting on closed condition.Its rotation axis is connected with low layer (light separation vessel) by bearings post.The second layer of double-deck switch is to provide the switch function of light.Because so,, it is placed on the light hole (or going out light slit) in light separation vessel.With respect to ground floor, or with respect to its rotation axis, this second layer can be done asymmetricly.It can stop light, does not allow light go out and arrive observer from light hole (or going out light slit), but does not need to hide other place.Can reduce like this its quality and the moment of inertia of switch.Moreover, the barycenter of this second layer is positioned as close to again its rotation axis, to such an extent as to its moment of inertia is reduced more.In some cases, on the limit of each light hole (or going out light slit), can add again an auxiliary switch.This auxiliary switch only need to have ground floor, can make so double-deck switch do littlely when separately using it, to such an extent as to improve its on-off effect speed and the reaction velocity of whole optical modulation device.
The one side relating to again in technical solution of the present invention is on light separation vessel, to manufacture both view angle adjustment sheet.Because may be to be partial to a little certain direction from the angle of light hole (or going out light slit) light out, use scattering sheet light can be distributed to different angles.This both view angle adjustment sheet can be used for a part to be adjusted to different angles by light switch light out too.When using with scattering sheet, this both view angle adjustment sheet can be evenly distributed in different angles more by light simultaneously.The manufacture of this both view angle adjustment sheet can complete in the manufacture process of light switch simultaneously, does not need extra production cost.
What in technical solution of the present invention, relate to is on the one hand to use coloured color filter again, for can colorful visualization when using white light source.Coloured color filter can be on light separation vessel, or in light separation vessel; Or the other element of video picture screen, on light switch, or under light switch, or be placed at other suitable place.
The beneficial effect of the dull and stereotyped video picture device of micromotor of the present invention is that it has solved the defect of energy utilization deficiency in liquid crystal pictorial display and plasma video picture effectively.Have light source utilization factor high (being bordering on absolutely), contrast high (full black background), and the low performance of production cost, be specially adapted to dull and stereotyped video picture.
Accompanying drawing explanation
Figure 1A is the sectional schematic of an example of light separation vessel 100 of the present invention.In figure, light 110,110a, 111,112 and 113 are incident on the plane of incidence 105 of light separation vessel to plunder angle.The transparent surface 135 that goes out light slit is non-perpendicular with sightingpiston 205.
Figure 1B is the sectional schematic of another example of light separation vessel 100 of the present invention.The plane of incidence of light separation vessel has broached-tooth design.The transparent surface 135 that goes out light slit is vertical with sightingpiston 205.
Fig. 1 C is the sectional schematic of 100 another examples of light separation vessel of the present invention.The plane of incidence of light separation vessel has broached-tooth design.The transparent surface 135 that goes out light slit with sightingpiston 205 close to vertical.
Fig. 1 D is the sectional schematic of another example of light separation vessel 100 of the present invention.This light separation vessel is to sew on plating one coloured color filter 140 in the bright dipping of the light separation vessel of Fig. 1 C, then adds a thin flat plate 230.
Fig. 2 is that the matrix of 3 * 2 video picture points of light separation vessel 100 of the present invention is overlooked schematic diagram.Difform pane represents the light slit that of different colours.Each video picture o'clock is comprised of the branch of three different colours.
Fig. 3 is shaped with integrated circuit 150(on light separation vessel 200 of the present invention to include drive electrode 160L and 160R) cut-open view.
The cut-open view of the dull and stereotyped imagescope of micromotor of the present invention that Fig. 4 is simplified.It has light separation vessel, integrated circuit 150 and microscopic electro-mechanical systems (MEMS) the light switch 405 that is coated with coloured color filter 140.
Fig. 5 A is the cut-open view that light slit and micromotor light switch of light separation vessel of the present invention, to show the principle of work of imagescope of the present invention.Light switch is in "open" state.
Fig. 5 B is the cut-open view that light slit and micromotor light switch of light separation vessel of the present invention, to show the principle of work of imagescope of the present invention.Light switch is in "off" state.
Fig. 6 is the stereographic map of the micromotor light switch on light separation vessel of the present invention.
Fig. 7 A is the stereographic map that the present invention has the micromotor light switch that improves performance.
Fig. 7 B is the stereographic map of the bottom with micromotor light switch (having removed one deck above) in Fig. 7 A.
Fig. 8 A is the stereographic map that the micromotor light switch (Fig. 7 A) with improvement performance of the present invention adds both view angle adjustment sheet 460.
Fig. 8 B is that Fig. 8 A is at the cut-open view of cross section P-P '.It is the dull and stereotyped imagescope of micromotor of the present invention, adds both view angle adjustment sheet 460, to show the principle of work of imagescope of the present invention.Light switch is in "open" state.
Fig. 9 is the stereographic map that the present invention has two micromotor light switches.
Figure 10 A is the cut-open view that light slit and two micromotor light switches of light separation vessel of the present invention.Light switch is in "open" state.
Figure 10 B is the cut-open view that light slit and two micromotor light switches of light separation vessel of the present invention.Light switch is in "off" state.
Figure 11 A is the sectional schematic of the dull and stereotyped video picture device of micromotor of the present invention.Light is incident on the plane of incidence on light separation vessel to plunder angle.
Figure 11 B is the sectional schematic of the dull and stereotyped imagescope of micromotor of the present invention's application distribution of light device.Light is incident on the plane of incidence on light separation vessel to plunder angle by light distributor.
Figure 12 is that manufacture light switch is exemplary view with the technique journey of circular separated bead self-aligned mechanism.
Figure 13 is that another technique journey of manufacture light switch and circular separated bead self-aligned mechanism is exemplary view.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
The dull and stereotyped video picture device of a kind of novel micromachine can cause according to the inventive method described below.The dull and stereotyped imagescope of this micromotor can more effectively utilize luminous energy than liquid crystal pictorial display and plasma video picture.It also can use transparent plastic material to do base plate, therefore can be made to flexibility.
The aspect relating in technical solution of the present invention is to use microscopic electro-mechanical systems light switch (micromotor light switch) to control the light path in imagescope.Light switch can allow at the state of opening light below it does not suffer a loss passes through to arrive observer, at the state closing, the light below it all can be blocked again.In the situation that ambient light is very strong, according to the present invention, also can reflects sub-fraction light with microscopic electro-mechanical systems light switch and carry out video picture.
For ease of describing, first the picture plane of an imagescope is divided into a plurality of video picture points here.Each video picture point has a micromotor light switch.Obviously, this light switch itself will occupy the upper many plane spaces of video picture point.In the ordinary course of things, when light is incident on the back side of video boards equably, no matter this light switch is at what state, and itself all can block most light of each video picture point.It is a kind of special that another aspect of the present invention is manufactured, and has the light separation vessel of light-focusing function in the area of each video picture point.This light separation vessel is the equally distributed incident light in the video boards back side, by becoming by very little one by one light hole (or very narrow go out light slit) emergent light out at exit facet (picture plane) bunching of video boards after it.Each light hole (or going out light slit) corresponding to a video picture point, but only accounts for very little a part of area of a video picture point in picture plane.Most of surplus area in video picture point in picture plane just can be used for manufacturing and place micromotor light switch.
The light separation vessel with such light-ray condensing function is made by a transparent flat board, and it has the plane of incidence and the exit facet of light.First this transparent flat board is divided into the small size with respect to a series of video picture points.In the exit facet of each video picture point, make a light slit with certain depth.But the width of light slit only accounts for a less part for video picture point.Light enters this transparent plate at the plane of incidence to plunder angle, is directed to the surface (transparent surface) of these light slits.When the angle (with respect to the normal of light slit) that arrives these transparent surfaces when light is slightly less than the critical angle that can cause total reflection, this light just can be gone out from these transparent surfaces.And be to go out with the larger angle of the normal with respect to light slit.If the transparent surface of these light slits is with exit facet (picture plane) close to vertical, this emergent light also will be with close to going out perpendicular to the angle of exit facet.In some cases, light can only go out from these light slits.That is to say, at the equally distributed incident light of the plane of incidence of light separation vessel, on its exit facet, by bunching, become by the very little light that goes out light slit and go out one by one.The area that light is gone out light slit at the distribution area of each video picture point is determined.
This principle can be applied to the specific design of different light separation vessels.Below in conjunction with accompanying drawing, exemplifying several examples is further described this invention.Need statement, the application of the ultimate principle of this invention is not limited only to following lifted example.
First example as shown in Figure 1A.Incident light (110,110a, 111,112,113) is incident on to plunder angle θ (incident angle) on the plane of incidence 105 of light separation vessel, enters transparent medium 130.This transparent medium 130 can be general common used material, and as optical flat or optical plastic plate, its refractive index is generally more than 1.46.On one side of the exit facet of medium (light separation vessel), have a plurality of non-perpendicular (tilting a little) and go out light slit.Each bright dipping is sewed with two surfaces: transparent surface 135 and the back side 145.Light goes out by going out the transparent surface 135 of light slit.This transparent surface 135 that goes out light slit has a β angle with the exit facet (picture plane) 205 of light separation vessel.This β is defined as the angle of outlet of light slit.For convenience of description, introduce out again the pitch angle γ of the transparent surface of light slit here.Pitch angle γ is the formed angle of normal that transparent surface 135 with the exit facet 205 of light separation vessel of light slit.Pitch angle γ expresses the transparent surface of light slit with respect to the inclined degree of the normal of light separation vessel.The pitch angle γ of the angle of outlet β of light slit and light slit transparent surface is complementary angles.For the vertical light slit that goes out, angle of outlet β equals 90 degree, and pitch angle γ equals zero degree.In this example, γ is very little at pitch angle, but is not too little, is unlikely to cause the light with large incident angle to enter (for example light 110 and 110a enter medium with θ angle) after medium, and the transparent surface 135 that goes out light slit at this causes total internal reflection.Pitch angle γ neither be very large.Its size can guarantee when these light run into the transparent surface 135 of light slit, almost can just avoid producing total internal reflection on this surface.When these light arrive out the transparent surface 135 of light slit, meeting is almost to go out close to vertical angle with the exit facet of light separation vessel like this.At certain incidence angle θ with go out within the scope of the pitch angle γ of transparent surface of light slit, and emergent light (210,210a) by the exit facet at light separation vessel (picture plane) 205, with the normal with exit facet, form very little angle and go out.
If the refractive index of the transparent medium 130 of light separation vessel very low (such as lower than 1.414), or this transparent medium outside be filled with refractive index n than its lower other medium (such as, the refractive index of supposing the medium 130 of light separation vessel be 1.46 or more than, and the refractive index of other medium is less than the refractive index of the medium 130 of light separation vessel, but be but equal to or greater than 1.07), going out light slit can do vertically with exit facet, the pitch angle γ that is transparent surface can equal zero, and the angle of outlet β of light slit equals 90 degree.The incident light that those incidence angle θs are large, enters after the transparent medium 130 of light separation vessel, still can avoid total reflection and by transparent surface 135 outgoing that go out light slit.
An importance of this example is: although incident light is to be evenly distributed on the plane of incidence, emergent light is limited at only by very narrow going out light slit and go out.In Figure 1A, two bundle incident lights 110 and 110a are respectively at A and B dual-point entry medium.These 2 distances on the plane of incidence are s
i.Corresponding emergent light 210 and 210a are s in the distance of exit facet
e.Apart from s
emuch smaller than apart from s
i.That is to say, incident light is only become to go out by going out light slit by bunching.Consequently the exit facet at light separation vessel leaves a lot of spaces, can be in order to manufacturing integration circuit and microscopic electro-mechanical systems light switch.
With respect to certain angle of outlet β that goes out light slit, if incident light has certain angular distribution, emergent light also can have the distribution of certain angle accordingly.As in Figure 1A, the emergent light corresponding with incident light 111,112 and 113 is 211,212 and 213.Their angle is had nothing in common with each other.
Another example as shown in Figure 1B.Here, the plane of incidence 105 has broached-tooth design, and it is vertical with the exit facet of light separation vessel to go out light slit, or close to vertical (pitch angle γ equals zero or is bordering on zero).In the incidence angle θ of certain limit and the toe angle α of sawtooth (definition of the toe angle α of sawtooth as shown in Figure 1B), incident light 110 enters after medium 130, still can avoid total reflection and pass out the transparent surface of light slit.Equally, under the incidence angle θ of certain limit and the toe angle α of sawtooth, emergent light 210 is limited at too only by very narrow going out light slit and go out.
Two above examples, Figure 1A and Figure 1B, each can be applied respectively separately, but also can combine use, as shown in Figure 1 C.Here, light separation vessel is combined to form with the light slit that goes out that omits low dip by the plane of incidence 105 with broached-tooth design.In the ordinary course of things, Fig. 1 C more represents actual conditions.Even because will manufacture the vertical light slit (Figure 1B) that goes out, the transparent surface that the variation of production technology also may be used light slit slightly tilts with respect to the exit facet of light separation vessel.
Although the transparent surface 135 that goes out light slit should meet certain requirement with respect to the angle of the exit facet of light separation vessel, the back side 145 that goes out light slit does not have the same strict demand with respect to the angle of the exit facet of light separation vessel, as long as the width of face is sewed in bright dipping, is not to occupy area too much on exit facet too greatly and unnecessarily.And, the back side 145 that goes out light slit be do not need transparent.Depend on applicable cases, it can be reflexive, absorbefacient or transparent.An example is exactly that reflexive surface is made in the back side 145 that light slit, approximately becomes 75 degree (approximately becoming 15 degree with the normal of exit facet) with the exit facet of light separation vessel.When light out time, likely by the backside reflection of light slit, and forwards a little bit smaller angle to the angle that is greater than 15 degree with respect to the normal of exit facet from going out the transparent surface 135 of light slit.Like this, go out can do above narrower of light slit but be unlikely to lose the light of outgoing.
When light is only become and after going out, puts the last emergence angle that a very thin transparent plate can't change light by going out light slit on go out light slit again by bunching.Can significantly not have influence on the space distribution of emergent light on exit facet yet.This characteristic can be found out from Fig. 1 D.Fig. 1 D example illustrated is exactly on the example of Fig. 1 C, to have added the transparent plate of thin layer.Light 310 out and the angle of 310a from new exit facet 305, and the distance on exit facet between these two light, with corresponding from original exit facet 205 light 210 out and the angle of 210a, and between them, the distance on exit facet 205 is basic identical.Light is not changed by the character of bunching.This characteristic is way of great use.It has a selection to people when manufacturing integration circuit and microscopic electro-mechanical systems light switch: both these structures can be built directly in to (Figure 1A-1C) on transparent medium 130, and also can build another in and be placed on (Fig. 1 D) on the transparent plate 230 on medium 130.Because of this cause, if transparent plate 230 is employed, it is just counted as a part for light separation vessel.
The transparent plate thin with put one deck on go out light slit is similar, if sew on face in bright dipping, plates equably transparent material layer, and the emergence angle of light and the emergent light space distribution on exit facet can not be changed yet.This characteristic is also displayed in Fig. 1 D.In this figure 140 is exactly that representative is plated in the uniform transparent material layer that face is sewed in bright dipping.The emergence angle of light and the emergent light space distribution on exit facet can not have very large change because of this transparent material layer.That is to say, if penetrate the light in transparent medium 130 the insides with incidence angle θ, can from as shown in Figure 1 C go out light slit outgoing, it too can be from going out light slit outgoing as shown in Fig. 1 D so.The difference that goes out light slit of Fig. 1 C and Fig. 1 D is, the light slit that goes out of Fig. 1 D is to sew on and plated thin film transparent material 140 in the bright dipping of Fig. 1 C.This characteristic of emergence angle that film transparent material 140 does not change light also has its useful one side.Such as film transparent material 140 can be a coloured color filter.If each video picture point is divided into several video picture branches, in the bright dipping of the video picture branch with respect to different, sew on coloured color filter of plating different colours, just can utilize white light source in colorful visualization.About colorful visualization, also can be further described later.Film transparent material 140 can be also etching barrier sheet, in the production routine in order to manufacturing integration circuit and micromotor light switch afterwards, protects out light slit.So just, there is more material can be selected as transparent medium 130.For example, transparent medium 130 can be plastic material.In the production routine of manufacturing integration circuit and micromotor light switch, go out in light slit and may be filled photoresist afterwards.This photoresist finally will be eliminated.At this, remove in the process of photoresist, going out light slit can not be damaged.This can sew on and plate skim monox in bright dipping, or silicon nitride, or silit etc., as the rigid protective seam that goes out light slit.
In a side of the exit facet of transparent medium 130, manufacture a series of light slits that go out as described above, can be directed to by these and go out light slit and the separated light beam one by one that goes out being evenly incident on light on its plane of incidence, (overlook schematic diagram) as shown in Figure 2.Light, on exit facet, is gone out with the light slit of dash area by these.In Fig. 2, each video picture o'clock is comprised of the branch of three different colours (normally red, green, blue), by different shadow representation.The dotted line square in the lower right corner of figure represents a video picture point (the video picture branch that comprises three different colours).Figure can find out thus, and each bright dipping is sewn on the very little part area that only accounts for a video picture branch in picture plane.
The example of several light separation vessels, is a part of the present invention on the one hand above.But the more important thing is, these examples are to show ultimate principle of the present invention: utilize light separation vessel, by the light being evenly incident on the plane of incidence, be directed to by separated and very narrow one by one to go out light slit and go out.In the example of these light separation vessels, light is incident on the plane of incidence of light separation vessel to plunder angle, enter transparent medium, to be slightly smaller than the angle of critical angle, to penetrate and the transparent surface of light slit, then with the very little angle outgoing of the normal of the exit facet with respect to light separation vessel.This not only leaves most area on the exit facet of light separation vessel can be used for manufacturing integration circuit and micromotor light switch, also emergent light is limited in to a less angular distribution scope.Consequently can control with less micromotor light switch the route of emergent light, and this light switch can permanently not obstruct the light.This light switch can allow emergent light is unobstructed to be passed through, or light is blocked completely.The application of this ultimate principle, is not limited to above several examples.
After having had light separation vessel, integrated circuit just can be built thereon, near going out light slit but do not block out light slit place, as shown in Figure 3.Transistor in this integrated circuit can be thin film transistor (TFT) (TFT), is similar in liquid crystal pictorial display (LCD) used.In Fig. 3, there is thin film transparent material 140 to be plated in bright dipping and sew on.This film transparent material can be coloured color filter of different colours, can be also etching barrier sheet.In Fig. 3, a transparent plate is not placed on light separation vessel above.In a more general case, integrated circuit is to build the place of not blocking by light separation vessel light out in.Because as shown in Fig. 1 D, what we can have that a transparent plate is placed on out light slit becomes above a part for light separation vessel.Integrated circuit can more easily be built in this above flat board.If needed, the color filter of different colours also can more easily be plated in this above flat board.In the case, integrated circuit is just built in the place of not blocking out light slit on this flat board.Yet for simplicity's sake, following description is not put such transparent plate on supposition light separation vessel.But same description goes for using the light separation vessel that is placed with transparent plate.
First, different from liquid crystal pictorial display (LCD) is, in liquid crystal pictorial display, most of area of exit facet must be transparent (more strictly speaking, in alive situation, to a kind of polarized light, be transparent), therefore in order not obstruct the light, integrated circuit can only occupy very little a part of area of exit facet.The present invention uses light separation vessel, except go out light slit and its upper part should be transparent, other place above light separation vessel does not have transparent requirement.Therefore,, in Fig. 3 (also having later Fig. 4, Fig. 5, Fig. 8 B and Figure 10), for the sake of simplicity, integrated circuit 150 is covered with above light separation vessel except going out all places light slit.In concrete application, perhaps integrated circuit does not need to do so greatly.Therefore it can be built upon many different places above light separation vessel.And on the other hand, because there are a lot of areas can be used for building integrated circuit above light separation vessel, this integrated circuit is not just very high to the requirement of photoetching process.Compare with the integrated circuit of manufacturing in liquid crystal pictorial display, its producting process difficulty will be less, easier.In Fig. 3, in order to electrode 160L and 160R as starting micromotor light switch, built on integrated circuit.They also can be counted as a part for integrated circuit.
On integrated circuit or below, can have multiple different selection.Such as, before manufacturing integration circuit, on light separation vessel, can plate one deck reflective film, the light of not gone out by radiation for reclaiming those.In some cases, reclaim those light perhaps not bery important, and the contrast of raising video picture is more meaningful.For this purpose, can on light separation vessel, plate one deck absorbing membrane.But want these films, depend on the requirement to imagescope completely.If need these films, they can be coated with easily in the process of manufacturing integration circuit.Therefore, in Fig. 3, they are not significantly drawn.
After integrated circuit has been carried out, one deck absorbing membrane also can be plated in the major part place above it.For example, on electrode, the 160L in Fig. 3 (also having later Fig. 4, Fig. 5, Fig. 7, Fig. 8 and Figure 10) and plate one deck absorbing membrane above 160R.But wanting to do like this, is also to select according to the requirement of imagescope is gone.In certain structure, above integrated circuit, there is sub-fraction place can have certain reflective, as 170 in Fig. 3.In this point paraphrasing below, have clearer and more definite description.
A bit it should be noted that in addition, this integrated circuit also can be manufactured on other place in principle, be not shown in Fig. 3 directly build in light separation vessel above.Although in actual production, integrated circuit is manufactured on to other local and inconvenience.Such as, integrated circuit also can be built in other, is placed on (this display board finally will connect with light separation vessel) on the display board above light separation vessel.But do like this, integrated circuit and the electrode above light separation vessel are connected with electric wire.This is not obviously way easily, but can not affect the video picture performance of this optical modulation device.In other words, where integrated circuit is fabricated in, and is to be determined by the convenience of producing.If it is placed in the place in addition shown in picture Fig. 3, do not have influence on the application of ultimate principle involved in the present invention yet.
The micromotor light switch of manufacturing on light separation vessel exactly on the one hand more of the present invention.There is the micromotor switch of many different-formats to use.An example is clearly the switch that uses horizontal scale reflex kinematic, and the direction of its motion is parallel with the exit facet (picture plane) of light separation vessel, in bright dipping, sews on the interspersed operation of face.It can cover to obstruct the light (state that switch is closing) by going out light slit, also can sew on face from bright dipping and remove and allow light pass through (state that switch is leaving).The principle of work of this switch is easily understood, and is not just described further here.The another kind of switch swinging around hinge also can use.And this switch has been widely used in the DLP that image shows ，Ru TIX.Therefore, this switch can be used to illustrate the principle of work of optical modulator of the present invention.Meanwhile, there are several improved procedures about this switch also will to be described.Need statement, the application of ultimate principle of the present invention, is not limited to and uses described these several switches below.
What Fig. 4 showed is on light separation vessel, to manufacture the cut-open view that has micromotor light switch 405.Fig. 5 shows the principle of work of this micromotor light switch.Fig. 5 A shows that micromotor light switch, at the state of opening, can arrive observer by switch by going out light slit light out.Fig. 5 B shows that micromotor light switch is at the state closing, and light is blocked by switch.In this two figure (also having later figure), integrated circuit 150 is to be assumed to be to be manufactured on above light separation vessel.Micromotor light switch is after integrated circuit is caused, then manufactures on integrated circuit.(in some stereographic maps afterwards, as Fig. 6, Fig. 7 A, Fig. 7 B, Fig. 8 A and Fig. 9, integrated circuit is not revealed).Light switch shown in these figure is comprised of five parts: beneath support column 410, it is connected in light separation vessel, hinge 420, stressed 430 of static, upper strata support column 440 and light barrier 510.Switch can be around its hinge alive driving lower swing outside.Its stressed 430 of static can rest on one of two positions: otherwise will go out light slit opens and allows light pass through (switch on Fig. 4 left side, and Fig. 5 A), otherwise will go out light slit closes light trap to live (switch on Fig. 4 the right, and Fig. 5 B).Which of these two positions switch rest on earth, by driving signal deciding.
In order effectively to control light, (both can allow micromotor light switch at the state closing, light be blocked, can by light, pass through at the state of opening again), the physical dimension of micromotor light switch, as the length of light barrier 510 and height, need to meet certain requirement.Multifactorial impact generally permitted in these requirements, as the width w that goes out light slit and the depth D (see figure 4) of light separation vessel, light switch with go out the relative position of light slit, go out the angle of outlet β of light slit, the scope of incident angle γ, and the refractive index of transparent medium 130 etc.According to these factors, the physical dimension of the light switch meeting certain requirements can be calculated.But calculate, can only carry out according to certain design, but be difficult to make design itself optimization.To the designed several light switches with Optimal performance of the present invention be described below.These performances comprise: (1) moment of inertia as far as possible little (velocity of rotation is fast); (2) easily driven (being that driving voltage is low); (3) can effectively control light (both can light be blocked at the state closing, and can pass through by light at the state of opening again).
First it is to be noted, light switch as shown in Figures 4 and 5 (their stereographic map is as shown in Figure 6), and they and the relative position that goes out light slit just fully do not possess first performance (moment of inertia is as far as possible little).But it also likely meets a lot of practical applications.Why saying that it does not fully possess first performance, is because unnecessary excessive of the distance of its light barrier 510 and its hinge 420.Therefore light barrier is also unnecessary excessive to the contribution of the moment of inertia of light switch, can reduce like this velocity of rotation of light switch.
The light switch that designed one of the present invention has an above Optimal performance as shown in Figure 7 A.The main difference of the switch shown in it and Fig. 6 is stressed 430 of static and goes out the relative position of light slit different.Stressed 430 of static is (left side of figure) in the side that goes out light slit in Fig. 6, in Fig. 7 A, moved on to light slit before (figure before).(the position is here by diagram, and close reader's one side is for above).Light enters light separation vessel by the left side.The light barrier 510 of light switch is all the same in two figure with the relative position that goes out light slit.Light barrier 510 in Fig. 7 A is than the more close hinge 420 in Fig. 6.If other size of light switch (stressed 430 of static, hinge 420, height-upper strata support column 440 of light barrier 510 and light barrier) all the same in two figure, much smaller than shown in Fig. 6 of total moment of inertia of the light switch shown in Fig. 7 A, is achieved first Optimal performance (moment of inertia is little) of light switch so.
The function that static is stressed 430 be to provide in the situation that having voltage with it below the electrode power that attracts each other.Therefore it put with it below electrode (drive electrode) as far as possible close.Under same voltage and stressed 430 physical dimension, it is large that electrostatic attraction just can be tried one's best like this.In order further to strengthen electrostatic attraction, drive electrode can be done slightly higherly near a part for hinge.This just easily sees and draws in Fig. 7 B.This figure only shows stressed 430 structure below.A part of 401L of drive electrode below and the high part of 401R(electrode) be done than its side height some, more close stressed 430(of static above it is revealed in this figure).Electrostatic attraction is improved like this, and second Optimal performance (easily driven) of light switch is achieved.
In Fig. 7 A and 7B, 445 what represent is the rotation terminating point of light switch.These rotation terminating points can be done high part 401L and the different height of 401R with electrode.But in actual production, by rotating terminating point, do more easily also simplerly with the equally high meeting of high part of electrode.Because so these two structures can be used same set of process to complete simultaneously.It is more farther from hinge 420 than the high part of electrode that these rotate terminating points, to guarantee that stressed 430 of static can directly not contact with the high part of electrode below it when rotating.These rotate terminating points also will be from enough far away of hinge 420, to such an extent as to stressed of static can directly not contact with the electrode (the high part of electrode portion in addition divides – 160L and 160R) below it away from the part of hinge yet.In other words, stressed of these structure qualification static can only contact with rotating terminating point when rotating, and do not contact with other place.Be made with so several benefits: these rotate terminating point generally can keep there is identical voltage with stressed of static.Therefore at their touching position, there is no voltage difference.So also can reduce the slag thing being caused by electrostatic attraction in contact position and pile up, make the physics of contact position and chemical property easily be held stable.
Rotation terminating point can also be done has certain elasticity, makes it can store certain energy (potential energy).When actual production, each rotates terminating point is a pieces of elastic thin slice 447, as shown in the illustration of Fig. 7 B top.It is connected in one with above the perforation being connected (via) 446 below, outwards stretches.This illustration also demonstrates stressed 430 of static simultaneously and contacts on elastic sheet 447 with this rotation terminating point.Stressed of static is pressed on this elastic sheet, makes this thin slice have under pressure small being bent downwardly.After being added in the electrostatic attraction of stressed of static and being removed, this elastic sheet will recover original unbent state.In fact this elastic sheet is at this moment just as same spring.It will flick stressed of the static being pressed in above it.This significant reaction be conducive to overcome the sticky magnetic force (its major part may be Van der Waals for) being present between stressed of static and contact point.
Adjacent rotation terminating point structurally also can connect together.Such as rotate terminating points towards two of reader in Fig. 7 A and 7B, they can be at that one deck of thin slice 447, one side near the linking together of hinge, to increase the fastness of their integral body but can maintain the elasticity of thin slice.
A further aspect of the present invention is exactly to make an inside view scheduler.This is displayed in Fig. 8 A.Fig. 8 B be in Fig. 8 A along tangent plane P-P ', pass out the cut-open view of light slit.460 is inside view schedulers.Under it is pointed out that, support column 410, hinge 420, stressed 430 of static and upper strata support column 440 be in this tangent plane, thus only with dotted line, represent, to be conducive to understand them with light barrier 510 and to go out the relative position of light slit.The a part of light being reflected by light barrier 510, is reflected on surface 170.This surface is at same plane (the same height) with drive electrode (part at the end of electrode).Be reflected in the light on surface 170, on this surface, be again reflected (so this surperficial Ying Shi district has reflexive).In the situation that there is no visual angle scheduler, most of light will be gone out by one side (the right of Fig. 8 B).The result that this surely be.Under many circumstances, Yi Bian only from light out just useful (can observed person accept).Such as, hang TV on the wall, the light that nearly all court goes out above does not all have to use.Allow light go out from one side (down), be actually the superior function that other imagescope does not have.Yet, in many situations, generally need light evenly to go out from all directions.On imagescope, putting a light disperses sheet and contributes to reach this effect.But as shown in Figure 8, each video picture point put in one visual angle scheduler 460 also contribute to regulate from different directions the relative intensity of light out.If Fig. 8 A is as shown in Fig. 8 B, wherein originally with angle θ
1the light going out from the right, owing to there being visual angle scheduler, after 460 reflections of visual angle scheduler,
angle θ
2from the left side, go out.A part of light that reflector plate 460 just may go out from the right, becomes from the left side.Visual angle scheduler can be caused simultaneously in the production run of light switch, does not need extra production cost.Its relative position on the exit facet of light separation vessel can be according to application and design modifying.And if visual angle scheduler is made by two, as shown in Figure 8, that does is thinner for a slice 460, the swing that can bend right and left, is placed near a side that goes out light slit; Another sheet is thicker, can not bend right and left, with that thin a slice put very close to, but from going out light slit that side away from, so just likely between them, add a voltage, make that thin a slice slight curving to thicker a slice.So just likely by the voltage between them, adjust the light intensity that goes out from different directions.
Of the present invention is manufacture and use dual light switch more on the one hand.In some cases, not necessarily best selection of the light switch shown in Fig. 7 A and Fig. 7 B.Such as in large imagescope, each video picture point is larger, goes out light slit also wider.If each video picture point is only used a light switch as shown in Fig. 7 A and Fig. 7 B, switch may be done largerly (being that light barrier 510 may be larger), could when closing, completely light trap be lived.This likely makes switch do too greatly, makes the rotation of switch slack-off.This contradiction can solve with dual light switch as shown in Figure 9.Here, the light switch shown in the switch on the left side and Fig. 7 A is a sample, is double-deck switch, but can than independent use it time do littlely.The switch on the right is individual layer switch.It has stressed 430 of one deck static, but there is no light barrier 510 and upper strata support column 440 above.Stressed the right that is placed on out light slit of this static, a part of area has reflective function.
The state that the principle of work of this dual light switch is opened as Figure 10 A() and the state that closes of Figure 10 B() as shown in.These two figure are cut-open views that pass out light slit of Fig. 9.The same with Fig. 8 B, the beneath support column 410 of left side switch, hinge 420, stressed 430 of static and upper strata support column 440 be not in this tangent plane, so equally only represent with dotted line.The beneath support column 410 of the right switch also, not in this tangent plane, represents with dotted line too.At the state of opening of this dual light switch, a part of light directly arrives observer by switch; Another part light is reflected by the light barrier 510 of left side switch, then is reflected by the individual layer switch on the right, then arrives observer.At the state closing, these two switches block light together.It is also noted that, at the state of opening, light no longer arrives that one deck of drive electrode (surface 170 in Fig. 8 B) below.Therefore the whole black coating in the whole surface of that one deck of drive electrode.That switch on the right does not have upper strata support column 440 and light barrier 510.Its total moment of inertia is little, and velocity of rotation is fast.The switch on the left side can be done littlely when separately using it.Its total moment of inertia is also therefore and less, and velocity of rotation is accelerated.The long and is that, during with dual light switch, the speed when speed of switch compares with a switch is accelerated.
What the present invention also had manufactures each video picture point by several video picture branches and forms exactly on the one hand again, in order to reduce the effect of defect in video picture point.In general, according to the present invention, the imagescope of manufacturing should not have the defect problem of light switch.The number percent of finished product and reliability are all fully proved.The micromachine eyeglass that for example DLP of Texas Instruments uses is just similar as the example of light switch shown in the present.And the example of light switch shown in the present is more much bigger than the micromachine eyeglass of using in DLP, also more easily to manufacture, yield rate is therefore higher.Because in general, switch (or eyeglass) is less, and the precision requirement of manufacture is higher, is also more not easy finished product.Therefore on the contrary, switch (or eyeglass) is larger, and the precision requirement of manufacture is lower, also easier finished product.Imagescope of the present invention, is generally used for directly and watches, so the micromachine eyeglass of using in light on-off ratio DLP is much bigger.Such as, (this has been to have the resolution the same with photo to 300 video picture points of per inch.As the video picture of direct viewing, than this resolution, higher position is nonsensical again), each point has 85 microns, and this is greater than five times of micromachine eyeglass of DLP.In more application, video picture point can be much larger than 85 microns.In other words, general video picture point is at least the more than ten times of micromachine eyeglass of DLP.Therefore the present invention's light switch used can be tolerated much bigger production defect than the micromachine eyeglass of DLP and be unlikely to product to impact.However, some large defect still can affect the operation of light switch.For reducing the degree of impact of these defects, a large video picture point can be made by several little video picture branches and formed.Production defect may only can affect a branch in a video picture point.Compare with whole video picture point, a little video picture branch just becomes and is not very obvious.If this defective video picture branch is to rest on the position of " opening " and no longer rotate, also likely give its in addition signal (crying it is release signal), it is turned over and rest on the position of " pass ".So, this defective video picture branch just becomes more not obvious.Other good video picture branch still can work.The long and of doing is like this that the production defect of video picture point is confined to a video picture branch, makes the imagescope that likely becomes waste product become and can use.On the other hand, each video picture point is manufactured by several video picture branches and forms and each light switch can be done little much when there is no video picture branch, thereby velocity of rotation is accelerated.This is particularly useful for large video boards.
Of the present invention is exactly on the one hand that light switching surface is coated with to the material with certain reflection coefficient to one side of observer again, makes it can antireflection part light, to such an extent as to imagescope can utilize ambient light video picture.Each video picture point is comprised of the little video picture branch of several different colours, and different little video picture branch platings, with different coloured reflecting materials, facilitate the use ambient light and form color images, reduce the consumption of imagescope to energy.This, is particularly useful as mobile phone, camera etc. for portable electrical equipment.Because under strong daylight, as long as have once very the reflected light of fraction can be with imaging, so reflection coefficient is very not large.When using internal light source, this surfacing can too much and too much not affect again the contrast of imaging to reflection of light so in the ordinary course of things.
For video picture generally, that was described above utilizes internal light source transmission imaging, has the way of multiple colorful visualization.First, can adopt the different colours way of imaging in succession.According to this way, the light of different colours impinges upon on light separation vessel in succession.At each video picture point (or video picture branch), same light switch is used for controlling different colours light intensity.This principle and a lot of other imagescope are samples.But also can be with recited above, utilize the reflected colours video picture of daylight similar (different video picture branches is coated with different coloured reflecting materials there), in the different video picture branch of light separation vessel, be coated with different colored transparent material (coloured color filter).(each video picture point has at least three video picture branches).This carries slightly to some extent above.Such as, in Fig. 3 and Fig. 4, in the bright dipping of light separation vessel, sew on and be coated with coloured color filter.If there is a transparent thin board (Fig. 1 D, 230) above light separation vessel, this coloured color filter also can be plated in any one side of this transparent thin board.From light separation vessel light out, can not change because being coated with these coloured color filters.This coloured color filter can also be placed on many other places.Such as, which floor transparent material light separation vessel can consist of.Coloured color filter is placed in wherein, or near above, or near below, or in centre.Even also have exquisiter way, in different video picture branches, adopt different dichroic materials exactly.It can allow a kind of light of color pass through, and by the transparent material of the light reflected light line separator of other color.This light being reflected back is retracted, until it runs into the video picture branch (having there the another kind of dichroism material that can allow it pass through) that can allow it pass through.Versicolor like this light can be utilized fully.
After having had the main element of imagescope; after light separation vessel (being with or without coloured color filter), integrated circuit and light switch are made; just protection screen film (or protection screen) need to be put thereon, to protect each element, especially the micromotor light switch below it.This protection screen film can be dispersed sheet so that light is evenly distributed in all angles with light.When this protection screen film is installed, can damage light switch scarcely.For this object, another aspect of the present invention is built self-aligning exactly, for putting the structure of circular batching sphere.This circular batching sphere is placed on light separation vessel, under protection screen film, for remaining on, has a fixing distance between light separation vessel and protection screen film.Be unlikely to make protection screen film to encounter the light switch above light separation vessel.This on the one hand has more detailed description in the description about the manufacturing course of light switch in the back.
Finally, from light source light out, to plunder angle, be incident on light separation vessel, as shown in Figure 11 A.This light source 80 can be cold cathode fluorescent lamp pipe, or a plurality of light emitting diode.It is placed in the focal line of focus lamp.Light with parallel beam out, impinges upon on light separation vessel.In order to reduce the degree of depth of imagescope, can use distribution of light device, as shown in Figure 11 B.Distribution of light device has two surfaces: reflective surface 50 and part transparent surface 60.The transmission coefficient of part transparent surface 60 is done to such an extent that from left to right constantly increase progressively, and reflection coefficient from left to right constantly successively decreases.Any part below light separation vessel, all some light enters medium 130 by part transparent surface 60.Part light is returned distribution of light device.As the transmission coefficient of fruit part transparent surface 60 is done appropriately, so just likely make light by part transparent surface 60, enter light separation vessel equably, and the distance of reflective surface 50 and part transparent surface 60 can be done very littlely.
Structure for the circular batching sphere of self-aligning placement
Enumerate several relevant structures for the circular batching sphere of self-aligning placement below.For convenience of describing, we are called for short it for ball barrel structure.
This ball barrel structure, and use the object of circular batching sphere, be for the ease of protection screen film is installed on this display.Be unlikely to, in installation protection screen film, to cause the damage to micromotor light switch.This ball barrel structure, can allow small circular batching sphere enter this and determine in advance part, and not outside it.So just can make added protection screen film in the back, only can contact with circular batching sphere, and can not run into micromotor light switch.Below cited production routine, just in order more clearly to explain concept, seat and the function of relevant use ball barrel structure and circular batching sphere.Actual production program, can have with cited example a large amount of changes below.Such as, etch process will be cited below, to remove some local thin film coatings.The place of removing can be set by photoetching process.In actual production, perhaps people can use lift-off technique (lift off).According to this understanding, about the concept of ball barrel structure and circular batching sphere is just not limited to following example.
With reference to Fig. 3 and Fig. 4, when light separation vessel, integrated circuit 150, if comprise that the every video picture point of drive electrode 160L, 160R and one deck reflecting material 170(is used a double-deck light switch) all carried out after, micromotor light switch 405 just can be made on it.The basic manufacturing technology of this light switch has been widely used in semiconductor production industry, should this unnecessarily at this, be explained in detail.
Refer again to now Figure 12 a, the structure from the light barrier of imagescope below 510 by (stressed 430 of the static of light switch has been carried out) done state, is then done light blocking layer 510 and its support column 440 again.First, photoresist 550 is thereon plated, by illumination, is rinsed, for doing upper strata support column 440 and the 570 perforation imagings of ball barrel structure.It should be noted that, in general, these structures are not necessarily on same cut surface.But be the convenience of narration production run, these structures are by " folding exists " same drawing.Similarly, in Figure 12, the structure of light barrier below 510 is also not necessarily on same sectional plane.Such as, stressed 430 of hinge 420, the static, the beneath support column 410 that are marked in Figure 12 d are all rolled at same drawing.But in practical structures, stressed 430 of static may be at this sectional plane.It should be outside this drawing, therefore be represented by dotted lines.Equally, for the sake of simplicity, light separation vessel represents simply with dash area 200, and its concrete structure drawn.
At upper strata support column 440 and ball barrel structure 570, be perforated after imaging, 510 of light barriers are coated with.This also plates upper strata support column 440 and ball barrel structure 570 simultaneously simultaneously, and state is at this moment exactly as shown in Figure 12 a.At this moment circular batching sphere just can be placed on ball barrel structure 570 the insides, Figure 12 b.Unnecessary ball can be swept, and only the ball in structure 570 the insides can stay.Here it is, and why this structure is " self-aligning for putting the structure of circular batching sphere ".Another layer of photoresist 680 is coated with again, by illumination, is rinsed (Figure 12 b).And then use chemical dry corrosion, light barrier 510 and ball barrel structure 570 are separated completely.Afterwards, photoresist is eliminated.So just, completed the manufacture process (Figure 12 c) of this microelectromechanical structure.
Next step be exactly by the protection screen film 800 with light outlet window 850 be arranged on this microelectromechanical structure above, to protect these structures (Figure 12 d).Protection screen film can also done an outstanding structure 810 with respect to the place of each video picture point, it is contacted with the circular batching sphere below it.Can make like this protection screen film 800 and the distance of light barrier 510 add larger.In the situation that circular batching sphere itself is large not, owing to there being outstanding structure 810, also easily guarantee that light barrier 510, when rotating, is unlikely to encounter protection screen film.
In addition, can also above microelectromechanical structure, do at this internal protection layer, this as shown in figure 13.From Figure 13 a (it and Figure 12 a are duplicate) now, light barrier 510 has been coated with.Another layer of photoresist is coated with again, by illumination, is rinsed.But current illumination and flushing are only light barrier 510 imagings (support column 440 that comprises it).In chemical dry corrosion process subsequently, the ball barrel structure 570 that holds circular batching sphere is also etched.After this technique completes, then plate one deck photoresist.This photoresist and the photoresist that originally stayed (generally have some and stay on light barrier 510, also have more under light barrier and outside) link together, so or with 550 expressions.This one deck photoresist, by illumination, is rinsed.But be only at this moment the imaging of ball barrel structure.Then interior protection screen film 700 is coated with (Figure 13 b).Because this ball barrel structure is different from 570 in Figure 12 a and Figure 13 a a little, therefore and be designated as 670, to show this difference.At this moment circular batching sphere just can be placed in and be contained in ball barrel structure 670 the insides.Equally, unnecessary ball is swept, and only the ball in structure 570 the insides can stay.
Next step opens a window 760 exactly on interior protection screen film 700.This can be with completing with described identical way above, no longer state more.Afterwards, photoresist is eliminated too.So just, complete this and there is the manufacture process (Figure 13 c) of the microelectromechanical structure of interior protection screen film.By (Figure 12 d) described identical way with above, the outer protection screen film 800 with light outlet window 850 be installed in this microelectromechanical structure above, to protect these structures (Figure 13 d).
More than by several aspects of the present invention, with the formal description of example out.Should declare, these examples are only representative, and do not have a limitation.Do not violating under the prerequisite of essence spirit essence of the present invention and scope, can have example many and disclosed herein to change, but principle is being consistent.Such as, in the included scope of the present invention, can use the light switch with different (tool different structure) disclosed herein completely, or use the light separation vessel of different structure.Light switch can have than the some more aspects of example described here, or less aspect.Imagescope also can some other element, or other aspect.Moreover device of the present invention, except being applied to video picture, also can have other application, comprise as general light path switch, and be applied to assembling of microelectromechanical structure etc.Therefore, the spirit and scope of the present invention are not confined to several example disclosed herein, but are defined among claim.
Claims (15)
1. an optical modulator, comprising:
Light separation vessel, comprise: the transparent medium with first surface and second surface on the other side, and separated a plurality of light slit that goes out, described light separation vessel is the incident light impinging upon equably on its plane of incidence, on exit facet, with respect to bunching in the area of each video picture point, described, a plurality ofly goes out in light slit;
Be based upon a plurality of integrated circuit on described light separation vessel, in order to driving signal is provided to the light switch on each video picture point; With
Be based upon a plurality of micromotor light switches on described light separation vessel, when micromotor light switch can allow light pass through at the state of opening, and at the state closing, light blocked.
2. optical modulator according to claim 1, wherein, the first surface of described transparent medium has a flat plane of incidence, and its refractive index is more than 1.4, its second surface has a plurality of light slits that go out, and each bright dipping sewer has the angle of outlet that is less than 86 degree with the sightingpiston of described light separation vessel.
3. optical modulator according to claim 1, wherein, the first surface of described transparent medium has the plane of incidence of the toothing shape of a plurality of inclinations, and its second surface has a plurality of angles of outlet that become β degree with sightingpiston, when 86< β≤90, the leading edge of sawtooth
be not less than (β-86) degree.
4. optical modulator according to claim 1, wherein, described light separation vessel has a solid transparent flat board and is placed on out on light slit.
5. optical modulator according to claim 1, wherein, described light separation vessel has coloured color filter, and it is placed in the surface of described light separation vessel, or is embedded among described light separation vessel.
6. optical modulator according to claim 1, wherein, described integrated circuit is based upon between described light separation vessel and described micromotor light switch.
7. optical modulator according to claim 1, wherein, each video picture point has a plurality of video picture branches.
8. optical modulator according to claim 1, wherein, it is double-deck switch that each video picture point has a micromotor light switch at least.
9. optical modulator according to claim 1, wherein, it is double-deck switch that each video picture point has a micromotor light switch at least, and to have a micromotor light switch be individual layer switch.
10. optical modulator according to claim 7, wherein, it is double-deck switch that each video picture point has one group of micromotor light switch at least, and to have one group of micromotor light switch be individual layer switch, and each micromotor light switch is corresponding to a video picture branch in video picture point.
11. optical modulators according to claim 1, wherein, described micromotor light switch comprises:
A plurality of drive electrodes that form on integrated circuit;
The landing point of a plurality of light switches;
The support column of the light switch with electric conductivity of support column under a plurality of conducts;
A plurality of hinges with the light switch of electric conductivity;
A plurality of ground floors with the micromotor light switch of electric conductivity;
The support column above of a plurality of micromotor light switches; With
The second layer of a plurality of micromotor light switches,
Wherein, described ground floor is stressed of static, and the described second layer is light barrier,
Wherein, stressed of described static has towards the one side of incident light with towards observer's one side, and
I. when utilizing external light source video picture, towards observer's one side, there is light reflective;
Ii. when utilizing external light source video picture, towards observer's one side, there is coloured color filter of light; Or
Iii. when utilizing internal light source video picture, towards observer's one side, there is light antireflection,
Wherein, described light barrier has towards the one side of incident light with towards observer's one side, and
Iv. when utilizing external light source video picture, towards observer's one side, there is reflectivity;
V. when utilizing external light source video picture, towards observer's one side, there is coloured color filter; Or
Vi. when utilizing internal light source video picture, towards observer's one side, there is the antireflection of light.
12. optical modulators according to claim 1, wherein, described micromotor light switch has a light barrier to be placed on going out on light slit of light separation vessel, and its mass centre is near the hinge of light switch.
13. optical modulators according to claim 1, further comprise:
The protection screen of laying on described micromotor light switch top, described protection screen, except face is sewed in bright dipping, is coated with the light absorbing material of complete black antireflection to improve reproduced image contrast.
14. optical modulators according to claim 1, further comprise:
The protection screen of laying on described micromotor light switch top, when imagescope utilizes external light source video picture, described protection screen is coated with coloured color filter.
15. optical modulators according to claim 1, further comprise:
The protection screen of laying on described light separation vessel, described light separation vessel comprises:
I. how individual self-aligning for putting the ball barrel structure of circular batching sphere; With
Ii. be placed on that this is self-aligning for putting a plurality of miniature batching sphere among the ball barrel structure of circular batching sphere,
And described protection screen is connected with described light separation vessel by circular batching sphere.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210299634.2A CN103631013A (en) | 2012-08-21 | 2012-08-21 | Transmission and reflection dual-use micro-motor optical modulator and flat panel imagescope |
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| CN201210299634.2A CN103631013A (en) | 2012-08-21 | 2012-08-21 | Transmission and reflection dual-use micro-motor optical modulator and flat panel imagescope |
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| CN103631013A true CN103631013A (en) | 2014-03-12 |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7995263B1 (en) * | 2008-01-17 | 2011-08-09 | Ju-Ai Ruan | Transmission and reflection dual operational mode light processing device |
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2012
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US7995263B1 (en) * | 2008-01-17 | 2011-08-09 | Ju-Ai Ruan | Transmission and reflection dual operational mode light processing device |
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Application publication date: 20140312 |