CN103629913B - Vertical gravity center adjusting devices of revolution type rotary drier - Google Patents
Vertical gravity center adjusting devices of revolution type rotary drier Download PDFInfo
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- CN103629913B CN103629913B CN201210291210.1A CN201210291210A CN103629913B CN 103629913 B CN103629913 B CN 103629913B CN 201210291210 A CN201210291210 A CN 201210291210A CN 103629913 B CN103629913 B CN 103629913B
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- type rotary
- rotary drier
- revolution type
- balancing weight
- drive screw
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Abstract
The invention discloses vertical gravity center adjusting devices of a revolution type rotary drier. The vertical gravity center adjusting devices are installed at the two ends of a horizontal rotating shaft of the revolution type rotary drier and located on the outer sides of silicon wafer boxes. Each vertical gravity center adjusting device comprises an inner shell, an electromotor, a drive mechanism, a balancing weight, position sensors, a mass compensation block and a balancing device controller, wherein the inner shell is installed in an outer shell, the electromotor is installed at the bottom of the inner shell, the drive mechanism is connected with the electromotor, the balancing weight penetrates through a drive threaded rod of the drive mechanism, the position sensors are installed beside the drive threaded rod of the drive mechanism and used for detecting the position of the balancing weight, the mass compensation block is fixed to the top of the inner shell and into the outer shell, and the balancing device controller makes the electromotor control the balancing weight on the drive threaded rod to move through the drive mechanism. The vertical gravity center adjusting devices are installed on the horizontal rotating shaft of the revolution type rotary drier, balance weights are applied to the two ends of the rotating shaft in the vertical direction, and therefore the situations that in an existing revolution type rotary drier, due to the difference of placed positions of silicon wafers or the difference of the placed numbers of the silicon wafers, mechanical vibration is increased when the revolution type rotary drier rotates at high speed, and rotation is instable are avoided.
Description
Technical field
The present invention relates to field of semiconductor manufacture, particularly relate to a kind of revolution type rotary drier vertical center of gravity adjusting device.
Background technology
Revolution type rotary drier is by the two box silicon chip High Rotation Speeds to rotating shaft terminal, realizes the drying to silicon chip.Due to the difference of silicon chip silicon chip quantity and placement location in silicon box, cause the difference of rotating shaft terminal quality and position of centre of gravity.These differences result in high-speed rotation, and mechanical oscillation increase, and rotate unstable.
Existing revolution type Rotary drying machine technology utilizes lever principle, can only be balanced the of poor quality of rotation axis horizontal direction, but it is poor to overcome the vertical direction height of C.G. brought because of the difference of silicon chip placement location; Existing revolution type rotary drier mainly comprises (as shown in Figure 1A): a casing is built with feathering axis, the rotating shaft vertical with feathering axis, rotating shaft connects CD-ROM drive motor, PLC(programmable logic controller (PLC)) connect described motor by frequency converter, FA(equipment take-in portion, checks that information is sent to equipment and controls computer by position of silicon wafer/quantity) control computer by EC(equipment) connect PLC; The vertical direction height of C.G. difference that existing revolution type rotary drier cannot overcome the difference because of silicon chip placement location/quantity and bring (as shown in Figure 1B, in figure, G represents the position of centre of gravity of load), these differences result in high-speed rotation, and mechanical oscillation increase, and rotate unstable.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of vertical center of gravity adjusting device be installed on revolution type rotary drier water product rotating shaft, by implementing counterweight to rotating shaft terminal vertical direction, the upright position of adjustment balancing weight, the center of gravity of revolution type rotary drier rotating shaft terminal is on same Plane of rotation, ensures the stable of High Rotation Speed; Improve existing revolution type rotary drier because the difference of silicon chip placement location/quantity causes mechanical oscillation in high-speed rotation to increase, rotate unstable situation.
For solving the problems of the technologies described above, revolution type rotary drier vertical center of gravity adjusting device of the present invention, comprising:
Be installed on the inner housing in shell body;
Be installed on the motor bottom inner housing;
Connect the transmission mechanism of motor;
Be arranged in the balancing weight on the drive screw of described transmission mechanism;
Be installed on the position sensor (position sensor plays alarm function, whether moves out restriction position for monitoring balancing weight) for detecting balancing weight position of the drive screw side of transmission mechanism;
Be fixed on inner housing top, the mass compensation block in shell body;
Bascule controller, receive loading position of silicon wafer and the quantity information of the output of revolution type rotary drier programmable logic controller (PLC), calculate the number of steps of described motor, described motor is moved by the balancing weight on drive screw described in transmission mechanism control;
Described transmission mechanism comprises: the driving belt connecting described motor and driving pulley, is set in described drive screw upper driving belt pulley, is fixed on the pedestal bottom described inner housing, is installed vertically on the drive screw on described pedestal.
Wherein, described drive screw is for having externally threaded hollow cylinder structure, high 330mm, and hollow cylinder interior diameter is 8mm, and overall diameter is 10mm.
Wherein, described balancing weight quality is 1300 grams.
Wherein, described balancing weight is the cuboid with a through hole, and described through hole has the internal thread coordinated with described drive screw external screw thread.
Accompanying drawing explanation
Below in conjunction with accompanying drawing and detailed description of the invention, the present invention is further detailed explanation:
Figure 1A is the structural representation of existing revolution type rotary drier.
Figure 1B is the schematic diagram of existing revolution type rotary drier vertical direction height of C.G. difference, and G represents the position of centre of gravity of load;
Fig. 2 is the structural representation of revolution type rotary drier vertical center of gravity adjusting device embodiment of the present invention;
Fig. 3 is the schematic diagram that the embodiment of the present invention is arranged on revolution type rotary drier rotating shaft;
Fig. 4 is operation principle schematic diagram one of the present invention;
Fig. 5 is operation principle schematic diagram two of the present invention;
Description of reference numerals
1 is shell body
2 is inner housings
3 is motor
4 is drive screws
5 is balancing weights
6 is position sensors
8 is bascule controllers
9 is programmable logic controller (PLC)s
10 is driving belts
11 is pedestals
12 is driving pulleys
13 is revolution type rotary drier feathering axis
14 is silicon box
15 is vertical center of gravity adjusting devices
A-A is the direction of balancing weight motion
C is load 1
D is load 2
E is the position of silicon box the 13rd silicon chip placing 25 silicon chips
G is center of gravity
G1 is the gross weight of placing n sheet silicon chip
G2 is configuration block quality (equaling the gross mass 1300 grams of 25 silicon chips)
L is 12 total vertical heights of silicon chip
L1 places the vertical center of gravity height of n sheet silicon chip
L2 is configuration block vertical center of gravity height
X is the height of n sheet silicon chip center of gravity G
Detailed description of the invention
As shown in Figure 2, revolution type rotary drier vertical center of gravity adjusting device of the present invention, comprising:
Be installed on the inner housing 2 in shell body 1;
Be installed on the motor 3 bottom inner housing 2;
Connect the transmission mechanism of motor 3;
Be arranged in the balancing weight 5 on the drive screw 4 of described transmission mechanism;
What be installed on drive screw 4 side of transmission mechanism plays alarm function for the position sensor 6(position sensor detecting balancing weight 5 position, whether moves out restriction position for monitoring balancing weight);
Be fixed on inner housing 2 to push up, mass compensation block 7 in shell body 1, the effect of mass compensation block 7 regulates whole vertical center of gravity adjusting device center of gravity of (during without silicon chip load) when static balance, make vertical center of gravity adjusting device center of gravity when static balance be on certain plane of rotation, this plane of rotation is relevant to the installation site of vertical center of gravity adjusting device; During static balance, 25 silicon chips can be placed for silicon box, make the center of gravity of vertical center of gravity adjusting device self be in the disposal site place of silicon box the 13rd silicon chip.
Bascule controller 8, receive loading position of silicon wafer and the quantity information (loading position, the quantity of silicon chip in revolution type rotary drier silicon box) of the output of revolution type rotary drier programmable logic controller (PLC) 9, calculate the number of steps of described motor 3, make motor 3 move 5 by the balancing weight on transmission mechanism control drive screw 4;
Described transmission mechanism comprises: the driving belt 10 connecting motor 3 and driving pulley 12, is set in drive screw 4 upper driving belt pulley 12, is fixed on the pedestal 11 bottom inner housing 2, be installed vertically on the drive screw 4 on pedestal 11.
In the present embodiment, drive screw 4 is for having externally threaded hollow cylinder structure, high 330mm, and hollow cylinder interior diameter is 8mm, and overall diameter is 10mm; Balancing weight 5 is the cuboids with a through hole, and through hole has the internal thread coordinated with drive screw external screw thread, and balancing weight 5 quality is 1300 grams.
As shown in Figure 3, the embodiment of the present invention is arranged on revolution type rotary drier rotating shaft.
As shown in Figure 4, Figure 5, for embodiment operation principle of the present invention: the silicon box of revolution type rotary drier can place 25 silicon chips, 0 of vertical height position is made to be in the position of the 13rd silicon chip, then 12 total vertical heights of silicon chip are L, if putting into silicon chip quantity is n sheet, put continuously from a sheet, then the upright position of n sheet silicon chip center of gravity G is: x=[L-(a-1) L/12]-1/2* (n*L/12); Wherein, n≤25, L≤165mm, a≤24; Calculate balancing weight displacement by the upright position of silicon chip, make the silicon chip of rotating shaft terminal and the overall position of centre of gravity of balancing weight be on same Plane of rotation, i.e. the position of vertical height 0; If the gross mass of silicon chip is G1, G1=n sheet * 52 grams of every sheets; The height of vertical center of gravity is L1; Get gross mass=1300 gram that balancing weight quality G2 is 25 silicon chips; Vertical center of gravity height is L2; Calculate balancing weight height of C.G. position, just can obtain the distance of the required movement of balancing weight; The distance of movement required for balancing weight, bascule controller converses the number of steps that motor will export, thus drive balancing weight to move to specified position L2=G1*L1/G2, the center of gravity of revolution type rotary drier rotating shaft terminal is on same Plane of rotation.
Below through the specific embodiment and the embodiment to invention has been detailed description, but these are not construed as limiting the invention.Without departing from the principles of the present invention, those skilled in the art also can make many distortion and improvement, and these also should be considered as protection scope of the present invention.
Claims (4)
1. a revolution type rotary drier vertical center of gravity adjusting device, the two ends being installed on revolution type rotary drier feathering axis are positioned at the outside of silicon box, it is characterized in that, comprising:
Be installed on the inner housing in shell body;
Be installed on the motor bottom inner housing;
Connect the transmission mechanism of motor;
Be arranged in the balancing weight on the drive screw of described transmission mechanism;
Be installed on the position sensor for detecting balancing weight position of the drive screw side of transmission mechanism;
Be fixed on inner housing top, the mass compensation block in shell body;
Bascule controller, receive loading position of silicon wafer and the quantity information of the output of revolution type rotary drier programmable logic controller (PLC), calculate the number of steps of described motor, described motor is moved by the balancing weight on drive screw described in transmission mechanism control;
Described transmission mechanism comprises: the driving belt connecting described motor and driving pulley, is set in the driving pulley on described drive screw, is fixed on the pedestal bottom described inner housing, is installed vertically on the drive screw on described pedestal.
2. revolution type rotary drier vertical center of gravity adjusting device as claimed in claim 1, is characterized in that: described drive screw is for having externally threaded hollow cylinder structure, high 330mm, and hollow cylinder interior diameter is 8mm, and overall diameter is 10mm.
3. revolution type rotary drier vertical center of gravity adjusting device as claimed in claim 1, is characterized in that: described balancing weight quality is 1300 grams.
4. revolution type rotary drier vertical center of gravity adjusting device as claimed in claim 1, it is characterized in that: described balancing weight is the cuboid with a through hole, described through hole has the internal thread coordinated with described drive screw external screw thread.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210291210.1A CN103629913B (en) | 2012-08-16 | 2012-08-16 | Vertical gravity center adjusting devices of revolution type rotary drier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210291210.1A CN103629913B (en) | 2012-08-16 | 2012-08-16 | Vertical gravity center adjusting devices of revolution type rotary drier |
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| CN103629913A CN103629913A (en) | 2014-03-12 |
| CN103629913B true CN103629913B (en) | 2015-04-08 |
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| CN201210291210.1A Active CN103629913B (en) | 2012-08-16 | 2012-08-16 | Vertical gravity center adjusting devices of revolution type rotary drier |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1148126A (en) * | 1997-08-11 | 1999-02-23 | Fujikoshi Mach Corp | Polishing device |
| CN1408065A (en) * | 2000-03-01 | 2003-04-02 | 因泰斯特Ip公司 | Vertical counter balanced test head manipulator |
| CN101290478A (en) * | 2008-05-21 | 2008-10-22 | 上海微电子装备有限公司 | Balance mass movement device based on five-rod device and its control method |
| CN101511499A (en) * | 2006-07-26 | 2009-08-19 | 国际技术公司及国际技术公开有限公司 | Hooking device for moving systems of rolling cylinders |
| CN102192816A (en) * | 2010-02-16 | 2011-09-21 | 申克罗泰克有限责任公司 | Method and device for unbalance correction on a vehicle wheel |
| CN102244144A (en) * | 2011-06-28 | 2011-11-16 | 无锡先导自动化设备有限公司 | Automatic silicon wafer deviation-rectifying device |
-
2012
- 2012-08-16 CN CN201210291210.1A patent/CN103629913B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1148126A (en) * | 1997-08-11 | 1999-02-23 | Fujikoshi Mach Corp | Polishing device |
| CN1408065A (en) * | 2000-03-01 | 2003-04-02 | 因泰斯特Ip公司 | Vertical counter balanced test head manipulator |
| CN101511499A (en) * | 2006-07-26 | 2009-08-19 | 国际技术公司及国际技术公开有限公司 | Hooking device for moving systems of rolling cylinders |
| CN101290478A (en) * | 2008-05-21 | 2008-10-22 | 上海微电子装备有限公司 | Balance mass movement device based on five-rod device and its control method |
| CN102192816A (en) * | 2010-02-16 | 2011-09-21 | 申克罗泰克有限责任公司 | Method and device for unbalance correction on a vehicle wheel |
| CN102244144A (en) * | 2011-06-28 | 2011-11-16 | 无锡先导自动化设备有限公司 | Automatic silicon wafer deviation-rectifying device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103629913A (en) | 2014-03-12 |
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