CN103619598A

CN103619598A - Continuous ejection system including compliant membrane transducer

Info

Publication number: CN103619598A
Application number: CN201280030136.6A
Authority: CN
Inventors: M·F·鲍默尔; J·D·哈夫曼; H·V·潘查瓦格; J·M·葛瑞丝; Y·谢; Q·杨; D·P·特劳尔尼基特; J·A·莱本斯
Original assignee: Eastman Kodak Co
Current assignee: Eastman Kodak Co
Priority date: 2011-04-19
Filing date: 2012-04-16
Publication date: 2014-03-05
Also published as: WO2012145260A1; EP2699423A1

Abstract

A continuous liquid ejection system includes a substrate (110) and an orifice plate (315) affixed to the substrate. Portions of the substrate define a liquid chamber (310). The orifice plate includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the liquid chamber and is free to move relative to the liquid chamber. A compliant membrane (320) is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate. The compliant membrane includes an orifice (135). A liquid supply provides a liquid to the liquid chamber under a pressure sufficient to eject a continuous jet of the liquid through the orifice located in the compliant membrane of the orifice plate. The MEMS transducing member is selectively actuated to cause a portion of the compliant membrane to be displaced relative to the liquid chamber to cause a drop of liquid to break off from the liquid jet.

Description

The continuous injection system that comprises flexible membrane transducer

Technical field

The present invention relates generally to numerically controlled liquid injection system field, relates in particular to continuous liquid injection system field, and the liquid stream in described continuous liquid spraying system comes off for drop, in described drop at least some is deflected.

Background technology

Ink jet printing has become in digital control electronic printable field the outstanding competitor who generally acknowledges, and this is because for example its non-impact, low noise characteristic, its use common paper with and avoid ink powder transfer printing and photographic fixing.Inkjet printing mechanism can be according to dripping as required ink-jet (DOD) or the classification of continous inkjet (CIJ) technology.

The first technology, " drippage as required " (DOD) inkjet printing utilizes supercharging actuator, and for example heat, piezoelectricity or electrostatic actuator, provide the ink droplet that affects recording surface.A kind of drop technology as required of generally carrying out is used thermal actuator to spray the ink droplet from nozzle.The heater that is positioned at nozzle or approaches nozzle is fully heated to boiling by ink, forms the bubble that produces the internal pressure that is enough to spray ink droplet.This ink-jet form is commonly called " hot ink-jet (TIJ) ".

The second technology is commonly called " continuously " ink-jet (CIJ) and prints, and it uses the black source of pressurization, by forcing ink to produce by the ink continuous liquid injection stream of nozzle under pressure.Utilize drop to form mechanism and upset ink stream, liquid is sprayed and in foreseeable mode, be split into ink droplet.Continuous printing technique is used a thermostimulation for the liquid injection with heater, to form the drop that finally becomes printed droplets and non-print drop.By one in selective deflection printed droplets and non-print drop and catch non-print drop, print.Developed the whole bag of tricks for selective deflection of droplets, it comprises electrostatic deflection, air deflection and thermal deflection.

MEMS (MEMS) device is just becoming the low-cost compact device with broad field of application becoming more and more popular.Purposes comprises pressure sensor, accelerometer, gyroscope, loudspeaker, digital micromirror display device, microfluidic device, biology sensor, chemical sensor and other application.

MEMS transducer comprises actuator and sensor.In other words, they convert electrical signals to action conventionally, or they are converted to the signal of telecommunication by action.Their common use standard films and semiconductor processing are made.Along with the new design of exploitation, method and material, can expand purposes and the envelop of function of MEMS device.

The characteristic feature of MEMS transducer is to be anchored on substrate and above the cavity of substrate to extend.Three kinds of typical types of this transducer comprise a) cantilever beam, and it has the first end that is anchored and the second end of cantilever above described cavity; B) two ends are being anchored to two anchor beams of described substrate by the relative both sides of cavity; And c) be anchored the clamping plate of surrounding cavity periphery.Type c) be commonly called clamping film, but term film will be used to different meanings in this article, therefore use word clamping plate, to avoid confusion.

Sensor and actuator can be used to sensing or provide displacement or vibration.For example, in response to the cantilever end amount of deflection δ of stress σ by Si Tuoni (Stoney) formula:

δ=3σ(1-ν)L ²/Et ² (1)，

Wherein ν is Poisson's ratio, and E is Young's modulus, and L is beam length, and t is the thickness of cantilever beam.In order to increase the amount of deflection of cantilever beam, can use longer beam length, less thickness, higher stress, lower Poisson's ratio, or lower Young's modulus.The resonance resonant frequency of undamped cantilever vibration of beam is by following formula:

f=ω ₀/2π=(k/m) ^1/2/2π (2)，

Wherein k is spring constant, and m is quality.For the cantilever beam of fixed width w, spring constant k is by following formula:

k=Ewt ³/4L ³ (3)。

Can find out, the dynamic mass m of vibration cantilever beam is approximately 1/4th (ρ is the density of beam material) of actual mass ρ wtL,, therefore in several percentage, the resonance resonant frequency of undamped cantilever vibration of beam approximately:

f～(t/2πL ²)(E/ρ) ^1/2 (4)。

For lower resonance resonant frequency, can use lower Young's modulus, less thickness, longer length or larger density.Compare with the cantilever beam with comparable geometry and material, two anchor beams have the resonance resonant frequency of lower amount of deflection and Geng Gao conventionally.Clamping plate has even lower amount of deflection and even higher resonant frequency conventionally.

Material properties and geometry based on being generally used for MEMS transducer, amount of deflection can be limited, and same frequency range is also limited, therefore, the intended use of some type is disabled, or not with preferred energy efficiency degree, space compactness or reliability Work.For example, utilize the typical thin film transducer material for the undamped cantilever beam of fixed width, equation 4 explanations, for the beam with 1 to 2 micron thickness and about 20 microns of length, can obtain the resonant frequency of several megahertzes.But, for thickness, be approximately the beam of 1 micron, in order to obtain the resonant frequency of 1kHz, can need the length of about 750 microns.Not only this length grows to and surpasses expection, and the beam with this length and thickness is understood some fragility.In addition, typical MEMS transducer works independently.For some application, the independent operation of MEMS transducer can not provide desired performance range.Further, typical MEMS transducer designs does not provide the cavity of sealing, and the cavity of sealing can be useful for some fluid application.

When a kind of liquid and another kind of flowing fluid ratio compared with time, the thermostimulation of liquid, the thermostimulation of the ink for example spraying from DOD printing mechanism or the ink forming by CIJ printing mechanism is inconsistent.Some liquid attribute, for example, stability is different with respect to thermotonus with surface tension.

Therefore, liquid is differently affected by thermostimulation, and this often causes inconsistent drop to form, and this reduces quantity and type for the liquid formation of DOD printing mechanism or CIJ printing mechanism.

Therefore, continuing to provide liquid jet mechanism and injection method, it improves reliability or uniformity that the drop based on different liquids forms, and keeps the single nozzles of described mechanism to control simultaneously, so that increase is used for quantity and type that the liquid of these mechanisms forms.

Summary of the invention

According to an aspect of the present invention, continuous liquid spraying system comprises substrate and the jet orifice plate that is fixed to described substrate.The more than one part of substrate limits liquid chamber.Jet orifice plate comprises MEMS transduction assembly.The first of MEMS transduction assembly is anchored to described substrate.The second portion of MEMS transduction assembly extends at least a portion of described liquid chamber, and moves freely with respect to described liquid chamber.Flexible membrane is positioned and contacts with MEMS transduction assembly.The first of described flexible membrane covers MEMS transduction assembly, and the second portion of described flexible membrane is anchored to described substrate.Described flexible membrane comprises spray orifice.By being positioned at the spray orifice in the flexible membrane of jet orifice plate, under the pressure of continuous injection thing that is enough to atomizing of liquids, fluid Supplying apparatus provides liquid to liquid chamber.Described MEMS transduction assembly is selectively activated, and to cause a part for flexible membrane with respect to liquid chamber displacement, thereby impels drop to come off from liquid jet.

Accompanying drawing explanation

In the detailed description of the exemplary embodiment of the present of showing below, with reference to accompanying drawing, wherein:

Figure 1A is the top view of the embodiment of MEMS composite transducer, and Figure 1B is its viewgraph of cross-section, and described MEMS composite transducer comprises cantilever beam and the flexible membrane above cavity;

Fig. 2 is the viewgraph of cross-section that is similar to Figure 1B, and wherein cantilever beam is deflected;

Fig. 3 is the top view that is similar to the embodiment of Figure 1A, but has a plurality of cantilever beams above cavity;

Fig. 4 is the top view that is similar to the embodiment of Fig. 3, but cantilever beam is larger than its free end at the width of its anchored end;

Fig. 5 is the top view that is similar to the embodiment of Fig. 4, but add, comprises having difform second group of cantilever beam;

Fig. 6 is the top view that comprises another embodiment of variform two groups of different cantilever beams;

Fig. 7 is the top view that MEMS composite transducer comprises the embodiment of two anchor beams and flexible membrane;

Fig. 8 A is that the MEMS composite transducer of Fig. 7 is at its viewgraph of cross-section under deflection state not;

Fig. 8 B is the MEMS composite transducer of Fig. 7 viewgraph of cross-section under its deflection state;

Fig. 9 is the top view that MEMS composite transducer comprises the embodiment of two two anchor beams of intersection and flexible membrane;

Figure 10 is the top view that MEMS composite transducer comprises the embodiment of clamping plate and flexible membrane;

Figure 11 A is that the MEMS composite transducer of Figure 10 is at its viewgraph of cross-section under deflection state not;

Figure 11 B is the MEMS composite transducer of Figure 10 viewgraph of cross-section under its deflection state;

Figure 12 A is the viewgraph of cross-section that is similar to the embodiment of Figure 1A, but it is also included in the additional vias in described substrate;

Figure 12 B is the viewgraph of cross-section that is associated with the fluid ejector of structure shown in Figure 12 A;

Figure 13 is the top view that is similar to the embodiment of Figure 10, but flexible membrane also comprises hole;

Figure 14 is the viewgraph of cross-section of embodiment shown in Figure 13;

Figure 15 is the viewgraph of cross-section of additional structure details that the embodiment of the MEMS composite transducer that comprises cantilever beam is shown;

Figure 16 A is the viewgraph of cross-section that is similar to the embodiment of Fig. 6, but it also comprises the attachment piece extending in described cavity;

Figure 16 B is the viewgraph of cross-section that is similar to the embodiment of Figure 16 A, but attachment piece is on the opposing face of described flexible membrane;

Figure 17 A illustrates the general introduction of manufacture method to 17E;

Figure 18 A and 18B provide the additional detail of the layer of the part that can be MEMS composite transducer;

Figure 19 A is the schematic cross-sectional view of exemplary embodiment of the jet module of continuous liquid spraying system constructed in accordance;

Figure 19 B be exemplary embodiment as shown in Figure 19 A at droplet generator the schematic cross-sectional view when activateding position;

Figure 20 is the diagrammatic top view of another exemplary embodiment of the jet module of continuous liquid spraying system constructed in accordance;

Figure 21 A is the schematic cross-sectional view of the exemplary embodiment shown in Figure 20;

Figure 21 B is the schematic cross-sectional view that exemplary embodiment shown in Figure 20 that the droplet generator that forms for drop activates in plane is shown;

Figure 21 C is the schematic cross-sectional view that exemplary embodiment shown in Figure 20 that the droplet generator that forms for drop activates outside plane is shown;

Figure 22 is the schematic cross-sectional view of the exemplary embodiment of jet module, and it illustrates for drop forms and drop turns to droplet generator in out-of-plane actuating;

Figure 23 A is the schematic cross-sectional view of another exemplary embodiment of jet module, and it illustrates for drop forms and drop turns to droplet generator in out-of-plane actuating;

Figure 23 B is the schematic cross-sectional view of another exemplary embodiment of jet module, and it illustrates for drop forms and drop turns to droplet generator in out-of-plane actuating;

Figure 24 A is the schematic cross-sectional view of another exemplary embodiment of jet module, and it illustrates the drop that forms and increase for drop and turns to the droplet generator of control in out-of-plane actuating;

Figure 24 B is the schematic cross-sectional view of another exemplary embodiment of jet module, and it illustrates the drop that forms and increase for drop and turns to the droplet generator of control in out-of-plane actuating;

Figure 25-27B illustrates the exemplary embodiment of continuous liquid spraying system constructed in accordance;

Figure 28-30 illustrate another exemplary embodiment of continuous liquid spraying system constructed in accordance; And

Figure 31 illustrates and utilizes continuous liquid spraying system as herein described, the block diagram of the exemplary embodiment of the method for continuous injection liquid.

The specific embodiment

This description is especially for forming according to the element of a part for equipment of the present invention, or the element more directly coordinating with described equipment.Should be appreciated that the element that does not clearly illustrate or describe can adopt the known various forms of those skilled in the art.In following description and drawing, in all the likely places, use identical label to specify identical element.

For the sake of clarity, exemplary embodiment of the present invention is illustrated to illustrate, and not drawn on scale.Those of ordinary skill in the art can easily determine concrete size and the interconnection of the element of exemplary embodiment of the present invention.

As described herein, exemplary embodiment of the present invention provides the liquid being normally used in ink-jet print system injecting-unit.But, occurring many other application, it uses ink jet-print head to send need to be with the liquid (not being ink) of the meticulous metering of high spatial precision and deposition.Therefore, as described herein, term " liquid " and " ink " refer to any material that can be sprayed by following liquid injection system or liquid injection system parts.

Embodiments of the invention comprise various types of MEMS transducers, and it comprises MEMS transduction assembly and the flexible membrane that is positioned and contacts with MEMS transduction assembly.It should be noted that the size of MEMS parts is defined between 1 micron and 100 microns in some definition of MEMS structure.The some embodiment of characterization of size although it is so, but can suppose, and some embodiment can comprise the size outside described scope.

Figure 1A illustrates the top view of the first embodiment of MEMS composite transducer 100, and Figure 1B illustrates its (along A-A ') viewgraph of cross-section, wherein said MEMS transduction assembly is at first end 121, to be anchored into the cantilever beam 120 of the first surface 111 of substrate 110.The more than one part 113 of substrate 110 limits the outer boundary 114 of cavity 115.In the example of Figure 1A and 1B, cavity 115 is columniform substantially, and is the through hole that first surface 111 (part for MEMS transduction assembly is anchored into this surface) from substrate 110 extends to the second surface 112 relative with described first surface 111.In other embodiments, it is contemplated that other shapes of cavity 115, and cavity 115 does not extend to second surface 112 always.In other embodiments, it is also contemplated that cavity shape is not the cylindrical of circle symmetry.A part for cantilever beam 120 is extended above a part for cavity 115, and stops at the second end 122.The length L of described cantilever beam extends to free end 122 from grappling end 121.Cantilever beam 120 has the width w at first end 121 ₁with the width w at the second end 122 ₂.In the example of Figure 1A and 1B, w ₁=w ₂, but in other embodiment that are described below, be not above-mentioned situation.

The MEMS transducer with the anchor beam that is suspended in cavity top is well-known.The distinguishing characteristics of MEMS composite transducer 100 and conventional device is the flexible membrane 130 (example of MEMS transduction assembly) that is positioned and contacts with cantilever beam 120.Flexible membrane comprises the first 131 that covers MEMS transduction assembly, is anchored into second part 132 of the first surface 111 of substrate 110, and is suspended from cavity 115, and don't the third part 133 of contact MEMS transduction assembly.In the 4th region 134, remove flexible membrane 130, make its part that does not cover the MEMS transduction assembly of the first end 121 that approaches cantilever beam 120, to can electrically contact, as discussed in more detail below.In the example shown in Figure 1B, be anchored into the second portion 132 of flexible membrane 130 of substrate 110 by the peripheral boundary 114 around being anchored on cavity 115.In other embodiments, it is contemplated that second portion 132 can not extend around peripheral boundary 114 completely.

The part of the cantilever beam 120 extending above at least a portion of cavity 115 (comprising end 122) moves freely with respect to cavity 115.The common mobile type of cantilever beam is shown in Figure 2, the view of Fig. 2 and Figure 1B is similar, with more high magnification demonstration, but wherein the bracketed part of cantilever beam 120 upward deflects the amount of deflection (z direction is perpendicular to the x-y plane on the surface 11 of substrate 110) of δ=Δ z from the initial non-deflected position shown in Figure 1B.As will be discussed in further detail, for example, in actuation patterns, for example, by MEMS transductive material (piezoelectric, or marmem, or hot twin lamella material) provide such bending motion, when applying the signal of telecommunication, the reference material layer that MEMS transductive material adheres to respect to it expands or shrinks.During upward deflecting outside discharging cavity (by stopping this signal of telecommunication), at described MEMS transducer, relax to it not before inflection point, described MEMS transducer moves to described cavity from described cavity outside conventionally.The MEMS transducer of some type has the performance of driven turnover cavity, and can move freely turnover cavity.

Flexible membrane 130 is by MEMS transducer assemblies, and for example cantilever beam 120 deflections are large thereby the volumetric displacement providing (volumetric displacement) provides than (conventional equipment) cantilever beam not contacting with flexible membrane 130 by a deflection.The ideal characterisitics of flexible membrane 130 is that it has the Young's modulus more much smaller than the Young's modulus of typical MEMS transductive material, relatively large percentage elongation, good chemical resistance (for the compatibility with MEMS manufacturing process), high resistivity and the good adhesion to transducer and baseplate material before splitting.Some polymer, comprises some epoxy resin, can the fine flexible membrane 130 that is suitable for use as.Example comprises TMMR liquid resist or TMMF dry film, and both are all products that chemical industry company (Tokyo Ohka Kogyo Co.) answered in Tokyo.The Young's modulus of curing TMMR or curing TMMF is approximately 2GPa, in contrast, the Young's modulus of silica is approximately 70GPa, the Young's modulus of PZT piezoelectric patches is approximately 100GPa, the Young's modulus of platinum electrode is approximately 160GPa, and the Young's modulus of silicon nitride is approximately 300GPa.Therefore, the Young's modulus of typical MEMS transduction assembly is at least 10 times of Young's modulus of flexible membrane 130, more typically, is 30 times of Young's modulus of flexible membrane 130.The benefit of the low Young's modulus of flexible membrane is, the amount of deflection that described design allows flexible membrane to cover the part 131 of MEMS transduction assembly to it has the effect of ignoring, but approaching MEMS transduction assembly, does not directly contact easily deflection in the third part 133 of flexible membrane 130 of MEMS transduction assembly.And, because the Young's modulus of flexible membrane 130 is more much smaller than the Young's modulus of typical MEMS transduction assembly, for example, so if MEMS transduction assembly (, cantilever beam 120) and flexible membrane 130 there is comparable size, the resonant frequency of 130 pairs of MEMS composite transducers 100 of flexible membrane has slight influence.But, if MEMS transduction assembly is more much smaller than flexible membrane 130, the resonant frequency of MEMS composite transducer can obviously reduce.In addition, curing TMMR or the percentage elongation of curing TMMF before division are approximately 5%, and therefore, it can carry out large deflection and not damage.

In thering are MEMS composite transducer 100 families of one or more cantilever beams 120 as the MEMS transduction assembly of flexible membrane 130 coverings, there are many embodiment.Different embodiment in this family have different displacement between a plurality of cantilever beams 120 that extend above a part for cavity 115 or different resonant frequency or different coupling amounts, thereby are very suitable for various application.

Fig. 3 illustrates the top view of the MEMS composite transducer 100 with four cantilever beams 120, wherein four cantilever beams 120 are as MEMS transduction assembly, each cantilever beam 120 comprises the first end that is anchored into substrate 110, and above cavity 115 the second end 122 of cantilever.For simplicity, some details, the part 134 that for example flexible membrane is eliminated is not shown in Figure 3.In this example, the width w of the first end 121 of four cantilever beams 120 ₁(referring to Figure 1A) is all basic equal each other, and the width w of the second end 122 of four cantilever beams 120 ₂(referring to Figure 1A) is all basic equal each other.In addition, in the example of Fig. 3, w ₁=w ₂.Flexible membrane 130 comprise cover cantilever beam 120 first 131 (can be more clearly visible in Figure 1B), be anchored into the second portion 132 of substrate 110, and be suspended on cavity 115 and don't the third part 133 of contact cantilever beam 120.Flexible membrane 130 in this example provides certain coupling between different cantilever beams 120.In addition, for cantilever beam, be the embodiment of actuator, compared with the single cantilever beam 120 shown in Figure 1A, Figure 1B and Fig. 2, the effect that activates all four cantilever beams 120 produces the volume displacement of increase of flexible membrane 130 and more symmetrical displacement.

Fig. 4 illustrates the embodiment that is similar to Fig. 3, but for each in four cantilever beams 120, the width w of grappling end 121 ₁than the width w of cantilever end 122 ₂greatly.For cantilever beam 120, are embodiment of actuator, the effect that activates the cantilever beam of Fig. 4 provides the more volume displacement of flexible membrane 130, and this is because the greater part of flexible membrane directly contacts cantilever beam 120, and is supported by cantilever beam 120.As a result, in Fig. 4, be suspended on cavity 115 and don't little than in Fig. 3 of the third part 133 of the flexible membrane 130 of contact cantilever beam 120.This has reduced when cantilever beam 120 is deflected, the sag of chain between cantilever beam 120 in the third part 133 of flexible membrane 130.

Fig. 5 illustrates the embodiment that is similar to Fig. 4, wherein, and except thering is the first width w ₁than the second width w ₂an example of large cantilever beam group 120a(MEMS transduction assembly), outside, also there is the first width w ₁' equal the second width w ₂' second group of cantilever beam 120b(be alternately arranged between the element of first group).And the size of second group of cantilever beam 120b is less than first group of cantilever beam 120a, make the first width w ₁' than the first width w ₁little, the second width w ₂' than the second width w ₂little, and the distance (length) between the first end 121 being anchored and between free the second end 122 is also less for cantilever beam group 120b.When first group of cantilever beam 120a is used as actuator and second group of cantilever beam 120b and is used as sensor, such layout is favourable.

Fig. 6 illustrates the embodiment that is similar to Fig. 5, wherein has two

cantilever beam group

120c and 120d, and wherein the element of two groups is alternately arranged.Yet in the embodiment of Fig. 6, the length L of

cantilever beam

120c and 120d and L ' (distance from the first end 121 that is anchored to free the second end 122) are less by 20% than the dimension D of crossing over cavity 115 respectively.In this specific embodiment, the peripheral boundary 114 of cavity 115 is circular, and D is the diameter of cavity 115.In addition, in the embodiment of Fig. 6, for

cantilever beam

120c and 120d, length L and L ' differ from one another, the first width w ₁and w ₁' differ from one another, and the second width w ₂and w ₂' differ from one another.When the geometry of two groups of

cantilever beam

120c and 120d is used to the motion of flexible membrane 130 to be converted to the signal of telecommunication, such embodiment is useful, and it is desirable (referring to the equation 1,2 and 3 in background technology chapters and sections) for picking up different amount of deflections or picking up in different frequencies.

In the embodiment of Figure 1A and Fig. 3-6, cantilever beam 120 (example of MEMS transduction assembly) is arranged symmetrically with around circular cavity 115 radial basics.In many examples, this can be preferred Configuration Type, but in other embodiment, it is contemplated that and have Non-radial symmetric or non-circular cavity.For the embodiment that comprises a plurality of MEMS transduction assemblies as shown in Fig. 3-6, the flexible membrane 130 of crossing over cavity 115 provides the coupling to a certain degree between MEMS transduction assembly.For example, when comparing with single actuator, the actuator about Figure 4 and 5 discussion can coordinate above, so that larger adhesion and the more volume displacement of flexible membrane 130 to be provided.About the sensing element (motion is converted to the signal of telecommunication) of Fig. 5 and Fig. 6 discussion, can detect the motion of the zones of different of flexible membrane 130 above.

Fig. 7 illustrates the top view of the embodiment of the MEMS composite transducer that is similar to Figure 1A, but MEMS transduction assembly is the two anchor beams 140 that extend beyond cavity 115, and it has first end 141 and the second end 142 that is anchored to respectively substrate 110.As shown in the embodiment of Figure 1A and 1B, flexible membrane 130 comprises the first 131 that covers MEMS transduction assembly, be anchored into the second portion 132 of the first surface 111 of substrate 110, and be suspended from 115 and don't the third part 133 of contact MEMS transduction assembly.In the example of Fig. 7, the part 134 of flexible membrane 130 is removed from first end 141 and the second end 142 tops, to electrically contact with from first end 141 to the second end 142 delivered currents.

Two anchor beams 140 that Fig. 8 A illustrates MEMS composite transducer are at its viewgraph of cross-section during deflection state not, and it is similar to the viewgraph of cross-section at the cantilever beam 120 shown in Figure 1B.In this example, only at the second end 142 of grappling, remove the part 134 of flexible membrane 130, to electrically contact, thereby apply the voltage at (or sensing) MEMS transduction assembly two ends on the end face of MEMS transduction assembly, as will be described in detail below.Be similar to Figure 1A and 1B, cavity 115 is columniform substantially, and extends to the second surface 112 relative with first surface 111 from the first surface 111 of substrate 110.

Fig. 8 B illustrates the viewgraph of cross-section of two anchor beams 140 when its deflection state, and it is similar to the viewgraph of cross-section of cantilever beam 120 shown in figure 2.The part of crossing over two anchor beams 140 of cavity 115 extensions upward deflects, and leaves the not inflection point of Fig. 8 A, so it lifts the part 131 of flexible membrane 130.At two anchor beams 140 middle parts or the maximum deflection that approaches two anchor beams 140 middle parts be illustrated as δ=Δ z.

Fig. 9 illustrates the top view of the embodiment that is similar to Fig. 7 embodiment, but wherein a plurality of (for example, two) two anchor beams 140 are anchored into substrate 110 at its first end 141 and the second end 142.In this embodiment, two two anchor beams 140 are all crossed over the basic radial arrangement of circular cavity 115, and therefore, two pairs of anchor beams 140 are 143 intersected with each other in intersection region above cavity.It is contemplated that other embodiment, wherein a plurality of pairs of anchor beams do not intersect or cavity is not round each other.For example, two two anchor beams can be parallel to each other, and extend across rectangular enclosure.

Figure 10 illustrates the top view of the embodiment of the MEMS composite transducer that is similar to Figure 1A, extend, and the peripheral boundary 114 of surrounding cavity 115 is anchored into the clamping plate 150 of substrate 110 but MEMS transduction assembly is a part of crossing over cavity 115.Clamping plate 150 has circular peripheral boundary 151 and circular inner boundary 152, and therefore, it has annular shape.The same in the embodiment of Figure 1A and 1B, flexible membrane 130 comprises the first 131 that covers MEMS transduction assembly, be anchored into the second portion 132 of the first surface 111 of substrate 110, and be suspended from cavity 115 and don't the third part 133 of contact MEMS transduction assembly.In the 4th region 134, flexible membrane 130 is eliminated, and makes its part that does not cover MEMS transduction assembly, to can electrically contact, as discussed in more detail below.

Figure 11 A illustrates clamping plate 150MEMS composite transducer at its viewgraph of cross-section during deflection state not, and it is similar to the viewgraph of cross-section at the cantilever beam 120 shown in Figure 1B.Be similar to Figure 1A and 1B, cavity 115 is columniform substantially, and extends to the second surface 112 relative with first surface 111 from the first surface 111 of substrate 110.

Figure 11 B illustrates the viewgraph of cross-section of clamping plate 150 when its deflection state, and it is similar to the viewgraph of cross-section of cantilever beam 120 shown in figure 2.The part of crossing over the clamping plate 150 of cavity 115 extensions upward deflects, and leaves the not inflection point of Figure 11 A, so it lifts part 131 and the part in inner boundary 152 133 of flexible membrane 130.At inner boundary 152 or the maximum deflection that approaches inner boundary 152, be illustrated as δ=Δ z.

Figure 12 A illustrates the viewgraph of cross-section of the embodiment of MEMS transducer, and wherein said MEMS transducer has crosses over the cantilever beam 120 that the part of cavity 115 is extended, and its cavity is the through hole from the second surface 112 of substrate 110 to first surface 111.The same in the embodiment of Figure 1A and 1B, flexible membrane 130 comprise cover MEMS transduction assembly first 131, be anchored into the second portion 132 of the first surface 111 of substrate 110, and be suspended from cavity 115 and don't the third part 133 of contact MEMS transduction assembly.In addition, in the embodiment of Figure 12 A, substrate further comprises the second through hole 116 from the second surface 112 of substrate 110 to first surface 111, and wherein the second through hole 116 is positioned in the position that approaches cavity 115.In the example shown in Figure 12 A, do not have MEMS transduction assembly to extend above the second through hole 116.At compound MEMS transducer array, be listed in other embodiment that form on substrate 110, the second through hole 116 can be the cavity that adjoins MEMS composite transducer.

Configuration as shown in Figure 12 A can be used in fluid ejector 200 as shown in Figure 12 B.In Figure 12 B, partition walls 202 forms above the anchor portion 132 of flexible membrane 130.(not shown) in other embodiments, partition walls 202 forms in the region that flexible membrane 130 has been eliminated on the first surface 111 of substrate 110.Partition walls 202 limits chamber 201.Nozzle plate 204 forms above partition walls, and comprises the nozzle 205 that is arranged the second end 122 that approaches cantilever beam 120.Through hole 116 is connected to chamber 201 by fluid but not by fluid, is connected to the fluid feed device of chamber 115.Fluid is provided for cavity 201 by fluid feed device (through hole 116).When providing the signal of telecommunication to when being electrically connected the MEMS transduction assembly (cantilever beam 120) of region (not shown), the second end 122 of cantilever beam 120 and a part for flexible membrane 130 are upward deflected and are left cavity 115 (as shown in Figure 2), so that fluid drop is injected by nozzle 205.

Embodiment is as shown in figure 13 similar to the embodiment of Figure 10, and wherein MEMS transduction assembly is clamping plate 150, but in addition, flexible membrane 130 is included in cavity 115 centers or approaches the hole 135 at cavity 115 centers.As shown in figure 14, MEMS composite transducer is along horizontal layout, and at least a portion of MEMS composite transducer is movably in described plane.Especially, the clamping plate 150 in Figure 13 and 14 is configured and is radially expanded and shrinks, and causes hole 135 expand and shrink, as shown in double-head arrow.Such embodiment can be used to the droplet generator of continuous fluid injection apparatus, and wherein charging fluid source is provided for cavity 115, and hole 135 is nozzles.It is the controlled cleaving of droplet that the expansion in hole 135 and contraction stimulate the division of fluid stream.Alternatively, flexible passivating material 138 can form in a side of MEMS transductive material, and this side side formed thereon with the part 131 of flexible membrane 130 is relative.Together with the part 131 of flexible passivating material 138 and flexible membrane 130, provide MEMS transduction assembly (clamping plate 150) and be guided through the to a certain degree isolation of the fluid of cavity 115.

Various transduction mechanism and material can be used to MEMS composite transducer of the present invention.Some MEMS transduction mechanism is included in the not out-of-plane deflection of deflection MEMS composite transducer, and it comprises the bending motion as shown in Fig. 2, Fig. 8 B and Figure 11 B.Comprise that crooked transduction mechanism is provided by the MEMS transductive material 160 of contact reference material 162 conventionally, as being as shown in cantilever beam 120 in Figure 15.In the example of Figure 15, MEMS transductive material 160 is illustrated on the end face of reference material 162, but alternately, for example, according to whether (wanting to make MEMS transduction assembly, cantilever beam 120) bend in cavity 115 or cavity 115 is left in bending, and whether make MEMS transductive material 160 than the many of reference material 162 expansions or lack, reference material 162 can be on the end face of MEMS transductive material.

An example of MEMS transductive material 160 is high thermal expansion assemblies of thermal flexure bimorph.Titanium aluminium can be high thermal expansion assembly, for example, and as disclosed in the U.S. Patent No. 6561627 commonly assigned.Reference material 162 can comprise insulator, and for example silica or silica add silicon nitride.When titanium aluminium MEMS transductive material 160 is passed in current impulse, it makes titanium aluminium heat and expand.Reference material 160 is not from heating, and its thermal coefficient of expansion is less than the thermal coefficient of expansion of titanium aluminium, and therefore, titanium aluminium MEMS transductive material 160 expands with the speed faster than reference material 162.As a result, when MEMS transductive material 160 is heated, as the cantilever beam 120 configuring in Figure 15 can trend towards bending downward in cavity 115.Two moving thermal bend actuators can comprise two titanium aluminium MEMS transducing layers (deflector layer), and reference material layer is clipped between it, as described in commonly assigned U.S. Patent No. 6464347.Make respectively current impulse pass through upper deflecting device layer or lower deflector layer, can selectively be actuated into the deflection in cavity 115 or outside cavity.

Second example of MEMS transductive material 160 is marmems, for example Nitinol.Be similar to the example of thermal flexure bimorph, reference material 162 can be insulator, silica for example, or silica adds silicon nitride.When NiTi MEMS transductive material 160 is passed through in current impulse, it makes NiTi heating.The characteristic of marmem is, when marmem, large distortion occurs during by phase transformation.If described distortion is to expand, such distortion can cause large and precipitous expansion, and the not obvious expansion of reference material 162.As a result, when marmem MEMS transductive material 160 passes through its phase transformation, as the cantilever beam 120 configuring in Figure 15 can trend towards bending downward in cavity 115.Deflection meeting is more precipitous than the deflection of above-mentioned thermal flexure bimorph.

The 3rd example of MEMS transductive material 160 is piezoelectrics.Because piezoelectric can be used as actuator or sensor, so piezoelectric is particularly advantageous.In other words, the voltage that is applied to piezoelectric mems transductive material 160 two ends can cause expanding or shrink (according to described voltage, being positive or negative and piezoelectric modulus symbol is positive or negative), and wherein said voltage is applied on the conductive electrode (not shown) on two sides of piezoelectric mems transductive material conventionally.Although the voltage applying at piezoelectric mems transductive material 160 two ends causes expanding or shrinks, reference material 162 does not expand or shrinks, thereby causes respectively deflecting in cavity 115 or cavity 115 is left in deflection.Conventionally in the compound MEMS transducer of piezoelectricity, although can apply the unipolarity of the signal of telecommunication, therefore, piezoelectric does not trend towards becoming non-polar.It is possible between two piezoelectric material layers, accompanying reference material 162, thereby without piezoelectric depolarization just can being realized deflect in cavity 115 or the independent control of cavity 115 is left in deflection.And, give the expansion of MEMS transductive material 160 or shrink the signal of telecommunication that generation can be used to sense movement.There are various types of piezoelectrics.Wherein interested Yi Ge family comprises piezoelectric ceramics, for example lead zirconate titanate or PZT.

When MEMS transductive material 160 expands or shrink, at the graphic memory of MEMS composite transducer, at component motion, and there is component motion (for example crooked) outward in described plane.If the Young's modulus of MEMS transductive material 160 and reference material 162 and thickness are comparable, bending motion (as the situation in Fig. 2, Fig. 8 B and Figure 11 B) will be occupied an leading position.In other words, if MEMS transductive material 160 has thickness t ₁and if reference material has thickness t ₂, suppose that both have comparable Young's modulus, if t ₂>0.5t ₁and t ₂<2t ₁, bending motion can tend to occupy an leading position so.On the contrary, if t ₂<0.2t ₁, the athletic meeting in the plane of MEMS composite transducer (as the situation in Figure 13 and 14) is tended to occupy an leading position so.

Some embodiment of MEMS composite transducer 100 comprises attachment piece, to regulate for example resonant frequency (referring to the equation 2 in background technology).Piece 118 may be attached to for example part 133 of flexible membrane 130, and described part 133 is suspended on cavity 115 and don't with MEMS transduction assembly and contacts.In comprise the embodiment of a plurality of cantilever beams 120 (example configuration as shown in Figure 6) as shown in the viewgraph of cross-section of Figure 16 A, piece 118 extends below the part 133 of flexible membrane 130, and therefore, it is positioned in cavity 115.Alternately, piece 118 can be adhered to the reverse side of flexible membrane 130, as shown in Figure 16 B.If need large piece, the configuration of Figure 16 A can be particularly advantageous.For example, when cavity 115 is during by etching as described as follows, a part for silicon substrate 110 can be retained in original place.In such configuration, piece 118 extends the entire depth of cavity conventionally.In order to make the vibration of MEMS composite transducer the Impactor not 118 in the situation that, substrate 110 is installed in installed part (not shown) conventionally, and described installed part is included in cavity 115 depression below.For the configuration shown in Figure 16 B, by making the mode of the extra play patterning of flexible membrane 130 tops, can form attachment piece 118.

Describe the various example arrangement embodiment of MEMS composite transducer, thereby provided a description the background of manufacture method.Figure 17 A provides the general introduction of manufacture method to 17E.As shown in Figure 17 A, reference material 162 and transductive material 160 are deposited on the first surface 111 of substrate 110, and described substrate is silicon wafer normally.Further details about material and deposition process is provided below.Reference material 162 can be rear by deposition (as shown in Figure 17 A) first at deposition transductive material 160, or order can be reversed.In some cases, may not need reference material.Under any circumstance, can say that transductive material 160 is deposited over first surface 111 tops of substrate 110.Then, transductive material 160 is patterned and etching, so that as shown in Figure 17 B, transductive material 160 is retained in first area 171 and in second area 172 and is eliminated.Reference material 162 is also patterned and etching, so that as shown in Figure 17 C, reference material is retained in first area 171 and in second area 172 and is eliminated.

As shown in Figure 17 D, then, polymeric layer (for flexible membrane 130) is deposited over the first and second regions 171 and 172 tops, and is patterned, and polymer is retained in the 3rd region 173 and in the 4th region 174 and is eliminated.The part of the first area 171 that the 173a of first that polymer is retained is retained with transductive material 160 is consistent.The part of the second area 172 that the second portion 173b that polymer is retained is eliminated with transductive material 160 is consistent.The part of the first area 171 that the 174a of first that in addition, polymer is eliminated is retained with transductive material 160 is consistent.The part of the second area 172 that the second portion 174b that polymer is eliminated is eliminated with transductive material 160 is consistent.Then, from the second surface 112 (relative with first surface 111) of substrate 110 to first surface 111 etching cavitys 115, make to intersect with the first area 171 that transductive material 160 is retained in the peripheral boundary 114 of the cavity 115 of the first surface 111 of substrate 110, so that the first of transductive material 160 (in this example, the first end 121 that comprises cantilever beam 120) be anchored into the first surface 111 of substrate 110, and the second portion of transductive material 160 (the second end 122 that comprises cantilever beam 120) extends at least a portion of cavity 115.When thinking that the first of transductive material 160 is anchored into the first surface 111 of substrate 110, be to be understood that, transductive material 160 can directly contact (not shown) with first surface 111, or as shown in Figure 17 E, transductive material 160 can be anchored to first surface 111 indirectly by reference to material 162.Thereby produce MEMS composite transducer 100.

As shown in Figure 18 A, reference material 162 can comprise some layers.The ground floor 163 of silica can be deposited on the first surface 111 of substrate 110.The deposition of silica can be for example heat treatment, or it can be chemical vapour deposition (CVD) (comprising low pressure or plasma enhanced CVD).Silica is insulating barrier, and the second layer 164 of promotion silicon nitride is bonding.Silicon nitride can be deposited by LPCVD, and tensile stress component is provided, and it contributes to after cavity is etched away subsequently, and transductive material 160 retains the shape of substantially flat.The 3rd layer 165 of silica contributes to equilibrium stress, and promotes the bonding of optional bottom electrode layer 166, and for the situation of piezoelectric energy-conversion material 160, bottom electrode layer 166 is platinum (or titanium/platinum) normally.Platinum electrode layer is deposited by sputter conventionally.

Next step will describe piezoelectric ceramics transductive material, for example the deposition of transductive material 160 in the situation of PZT.A favourable configuration as shown in Figure 18 B, wherein, applies voltage at PZT transductive material 160 two ends from top electrodes 168 to bottom electrode 166.Expected Results on PZT transductive material 160 is along expansion or the contraction of x-y plane that is parallel to the surface 111 of substrate 110.As mentioned above, according to relative thickness and the rigidity of PZT transductive material 160 and reference material 162, such expansion or contraction can cause respectively deflecting in cavity 115, or deflect into outside cavity 115, or the motion in basic plane.In Figure 18 A and 18B, thickness not drawn on scale.Conventionally, for reference material 162, there is the bending application of the rigidity comparable with MEMS transductive material 160, reference material 162 is as transductive material 160, be deposited as about 1 micron of thickness, but for flat in-plane moving, as mentioned above, reference material thickness normally transductive material thickness 20% or still less.For PZT, horizontal piezoelectric coefficient d ₃₁and e ₃₁relatively large in amplitude (if polarized in relatively high electric field, it is larger and stable that it can be done).For directed PZT crystal makes horizontal piezoelectric coefficient d ₃₁and e ₃₁be the coefficient that expands or shrink about the voltage at transducing layer two ends with in x-y plane, (001) plane parallel of expectation PZT crystal is in x-y plane (being parallel to bottom platinum electrode layer 166, as shown in Figure 18 B).But, PZT material can tend to the material plane that its plane oriented parallel is deposited thereon in described material.When platinum bottom electrode layer 166 is deposited on silica, because platinum bottom electrode layer 166 has its (111) plane that is parallel to x-y plane conventionally, inculating crystal layer 167, for example lead oxide or lead titanates can be deposited over bottom electrode layer 166 tops, to (001) plane that deposits PZT transductive material 160 is thereon provided.Then, top electrode layer 168 (normally platinum) is passed through, and for example sputter is deposited over PZT transductive material 160 tops.

The deposition of PZT transductive material 160 can complete by sputter.Alternately, the deposition of PZT transductive material 160 can complete by sol-gel technology.In sol-gel technology, the precursor material that comprises the PZT particle in organic liquid is applied on the first surface 111 of substrate 110.For example, described precursor material can be applied on first surface 111 by rotary plate 110.Then, described precursor material is heated processing with some steps.In first step, described precursor material is dried at the first temperature.Subsequently, described precursor material is cleaved at the second temperature higher than the first temperature, to decompose organic principle.Then, the PZT particle of described precursor material crystallization at three temperature higher than the second temperature.Conventionally utilize a plurality of precursor material thin layers to complete by sol-gel technology and deposit PZT, to avoid the splitting of material of required final thickness.

For transductive material 160, be that deposition can complete by sputter for the titanium aluminium of thermal bend actuator or the embodiment of the marmem of Nitinol for example.In addition, the layer of top and bottom electrode layer 166 and 168 for example, and inculating crystal layer 167 does not require.

In order to make the material heap shown in Figure 18 A and 18B form pattern, photoresist mask is conventionally deposited on top electrode layer 168 and is formed pattern, to only cover those regions of expectation reserved materials.Then, at least some material layer by while etching.For example, utilize the plasma etching of the processing gas based on chlorine can be used to etching top electrode layer 168, PZT transductive material 160, inculating crystal layer 167 and bottom electrode layer 166 in single step.Alternately, single step can comprise wet etching.Depend on material, the remainder of reference material 162 can etching in single step.But, in certain embodiments, silicon oxide layer 163 and 165 and silicon nitride layer 164 can be in utilization subsequently etched in the plasma etch step of the processing gas based on chlorine.

Deposition can be passed through stacked film for the polymeric layer of flexible membrane 130, and for example TMMF completes, or has rotated on the liquid erosion resistant of for example above-mentioned TMMR of being called as.Owing to applying the polymeric layer for flexible membrane when transducer is still supported by substrate, thus can to described structure, apply TMMF or other stacked films by working pressure, and do not destroy the risk of transducer beam.The advantage of TMMR and TMMF is that they are can photoengraving pattern (photopatternable), therefore, does not need to apply additional photoresist.Epoxy polymer further has expectation mechanical property as above.

For etching cavity 115 (Figure 17 E), mask layer is applied on the second surface 112 of substrate 110.Described mask layer is patterned, and to expose second surface 112, baseplate material is removed in expectation herein.The part that is exposed not only can comprise the region of cavity 115, also comprises the region (referring to Figure 12 A and 12B) of the through hole 116 of fluid ejector 200.For the situation of the above-mentioned piece that leaves the bottom that adheres to flexible membrane 130 of discussing about Figure 16 A, the region of cavity 115 can be covered by annular patterns, to remove the region of ring-type, and retains the part of the substrate 110 that is attached to flexible membrane 130.For substrate 110, are embodiment of silicon, utilize deep reaction ion(ic) etching (DRIE) technique, the etching of vertical wall (part 113 of substrate 110, as comprise as shown in some viewgraph of cross-section of Figure 1B) is easy to be done.Conventionally, for the DRIE technique of silicon, use SF ₆as processing gas.

As mentioned above, an application of MEMS composite transducer 100 particularly suitables is droplet generator 395 in continuous liquid spraying system 300 (and, be commonly called drop and form mechanism).Below with reference to 19-31 and above-mentioned Figure 13 and 14, the exemplary embodiment of more detailed description continuous liquid spraying system.During the droplet generator 395 in being used as continuous liquid spraying system (drop form mechanism), MEMS composite transducer 100 will be included in the jet module 305 of continuous liquid spraying system 300 (will be described in more detail below).

General reference Figure 19 A-31 and above-mentioned Figure 13 and 14, jet module 305 comprises substrate 110 and jet orifice plate 315.The more than one part 110 of substrate limits liquid chamber 310.Jet orifice plate 315 comprises MEMS composite transducer 100, and it comprises MEMS transduction assembly (in some exemplary embodiment, being a MEMS transduction assembly) and flexible membrane 320.Jet orifice plate is fixed to substrate 110.Conventionally, flexible membrane 320 is a kind of flexible polymeric films made in above-mentioned polymer.But, flexible membrane 320 can be any one in flexible membrane as mentioned above, depends on the concrete application of imagination.

The first 121,151 of MEMS transduction assembly is anchored into substrate 110, and the second portion 122,152 of MEMS transduction assembly extends at least a portion of liquid chamber 310.The second portion 122,152 of MEMS transduction assembly is with respect to liquid chamber 310 freely-movables.In Figure 13,14,19A and 19B, MEMS transduction assembly comprises clamping plate 150.In Figure 20-23B, MEMS transduction assembly comprises cantilever beam 120.

Flexible membrane 320 is positioned and contacts MEMS transduction assembly.The first 131 of flexible membrane 320 covers MEMS transduction assembly, and the second portion 132 of flexible membrane 320 is anchored to substrate 110.Flexible membrane 320 comprises spray orifice 135.

Continuous liquid spraying system 300 (for example comprises fluid Supplying apparatus 325, at the liquid container 335 shown in Figure 25 and 28 and fluid pressure adjuster 370), be enough to shown in continuous injection thing 405(Figure 26 A and 29 of atomizing of liquids) pressure under, fluid Supplying apparatus 325, by being located in the spray orifice 135 (shown in Figure 19 A and 19B) of the flexible membrane 320 of jet orifice plate 315, provides liquid to liquid chamber 310.MEMS transduction assembly is selectively activated, and to impel a part for flexible membrane 320 with respect to liquid chamber 310 displacements, causes drop (shown in figure X and Y) to come off from liquid jet (shown in figure X and Y).

With reference to Figure 13,14,19A and 19B, MEMS composite transducer 100 comprises a MEMS transduction assembly of clamping plate 150 forms.The flexible membrane 320 of jet orifice plate 315 is initially positioned in plane, for example, in the plane of the direction of spraying perpendicular to the liquid jet by spray orifice 135 (utilizing arrow 330 to illustrate).In Figure 14, MEMS transduction assembly---clamping plate 150 is configured in the plane of flexible membrane 320 and activated.As mentioned above, MEMS transduction assembly moves mainly and carries out in the plane lacking reference material, or reference material has the rigidity less than MEMS transductive material.Because MEMS transduction assembly is the clamping plate 150 around spray orifice 135, so activate the geometry that (as shown in the arrow of Figure 14) adjusts spray orifice 135 in the plane of MEMS transduction assembly, cause drop to come off from liquid jet.In Figure 19 A and 19B, the plane that MEMS transduction assembly---clamping plate 150 is configured at flexible membrane 320 activated outward, and reference material has and is similar to the rigidity of transductive material as mentioned above.Droplet generator 395 illustrates in Figure 19 A static state.The expansion of MEMS transduction assembly or contraction impel flexible membrane 320 (and MEMS transduction assembly) to deflect into (as shown in Figure 19 B) in liquid chamber 310 or outside liquid chamber 310, cause drop to come off from liquid jet.MEMS clamping plate transduction assembly 150 illustrates in Figure 19 A static state, and activated in Figure 19 B, and flexible membrane 320 (and MEMS transduction assembly) deflects into outside liquid chamber 310.

With reference to figure 20-23B, MEMS composite transducer 100 comprises a plurality of MEMS transduction assemblies, a MEMS transduction assembly (as mentioned above) and similar the 2nd MEMS transduction assembly.Be similar to a MEMS transduction assembly, the first 121 of the 2nd MEMS transduction assembly is anchored to substrate 110.The second portion 122 of the 2nd MEMS transduction assembly extends at least a portion of liquid chamber 310.The second portion 122 of the 2nd MEMS transduction assembly can move freely with respect to liquid chamber 310.

Except it is with respect to being configured to of a MEMS transduction assembly (as mentioned above), flexible membrane 320 contact the 2nd MEMS transduction assembly that is positioned equally.The first 131 of flexible membrane covers the 2nd MEMS transduction assembly, and the second portion 132 of flexible membrane 320 is anchored to substrate 110.In Figure 20-23B, a MEMS transduction assembly is cantilever beam 120, and the 2nd MEMS transduction assembly is cantilever beam 120.The one MEMS transduction assembly and the 2nd MEMS transduction assembly are located by symmetrical with respect to the spray orifice 135 of flexible membrane 320.

When MEMS composite transducer 100 comprises a plurality of MEMS transduction assembly, when comparing with the jet module that does not comprise a plurality of MEMS transduction assemblies, the ability of jet module 305 increases.When configuration like this, jet module 305 only has that liquid jet from spraying by spray orifice 135 produces (formations) drop or from the liquid jet generation drop that sprays by spray orifice 135 and ability that the drop from the liquid jet spraying by spray orifice 135 is turned to.

With reference to figure 21A, 21B and 21C, when expectation only produces drop, a plurality of MEMS transduction assemblies of the spray orifice 135 symmetrical location with respect to flexible membrane 320 of MEMS composite transducer 100 are activated simultaneously.In the time of described a plurality of MEMS transduction assembly, activate and do not change by the track of the injected liquid jet of spray orifice 135.Generally, in the time of in the plane of the direction (as shown in arrow 330) that the initial position of jet orifice plate 315 sprays in the liquid jet perpendicular to by spray orifice 135, the track of liquid jet is perpendicular to jet orifice plate 315.

Droplet generator 395 illustrates in Figure 21 A static state.The actuating of a plurality of MEMS transduction assemblies is or the equidirectional in the plane with respect to flexible membrane 320 (as shown in Figure 21 B), or at the out-of-plane equidirectional with respect to flexible membrane 320 (as shown in Figure 21 C).Again, here the plane of indication be the flexible membrane 320 of wherein jet orifice plate 315 by the plane of initial alignment, the plane of the direction (utilizing arrow 330 to illustrate) of for example spraying perpendicular to the liquid jet by spray orifice 135.The same with clamping plate configuration recited above, in the plane of a plurality of MEMS transduction assemblies, activate the geometry of adjusting spray orifice 135, cause drop to come off from liquid jet.Alternately, by a plurality of MEMS transduction assemblies of expanding or shrinking the reference material with appropriate rigidity in out-of-plane actuating, cause flexible membrane 320 (and MEMS transduction assembly) to deflect in liquid chamber 310 or outside liquid chamber 310, impel drop to come off from liquid jet.MEMS transduction assembly 120 illustrates in Figure 21 A static state, and activates in Figure 21 C, and wherein flexible membrane 320 (and MEMS transduction assembly) deflects into outside liquid chamber 310.

With reference to figure 22-23B, when expectation produces drop and drop is turned to, a plurality of MEMS transduction assemblies of the spray orifice 135 symmetrical location with respect to flexible membrane 320 of MEMS composite transducer 100 are by simultaneously at different directions, and for example rightabout activates, or asynchronous actuating.Being actuated at outside the plane with respect to flexible membrane 320 of a plurality of MEMS transduction assemblies.Again, here the plane of indication be the flexible membrane 320 of wherein jet orifice plate 315 by the plane of initial alignment, the plane of the direction (utilizing arrow 330 to illustrate) of for example spraying perpendicular to the liquid jet by spray orifice 135.

By simultaneously at different directions, for example rightabout or asynchronous expansion or the plane of shrinking a plurality of MEMS transduction assemblies activate outward, cause flexible membrane 320 (and MEMS transduction assembly) to deflect in liquid chamber 310 or outside liquid chamber 310, this impels the deflection of injected liquid jet, and impels drop to come off from liquid jet.Except producing drop from liquid jet, by the plane of in a plurality of MEMS transduction assemblies or a plurality of MEMS transduction assembly, activate outward, the initial track of injected liquid jet is changed.

Generally, in the time of in the plane of the direction (as shown in arrow 330) that the initial position of jet orifice plate 315 sprays in the liquid jet perpendicular to by spray orifice 135, the initial track of liquid jet is perpendicular to jet orifice plate 315.For example, when a plurality of MEMS transduction assemblies are activated in the opposite direction simultaneously, the track of liquid jet is changed, the track that makes liquid jet with respect to the initial track of liquid jet or the initial position of jet orifice plate 315 in non-perpendicular angle.The drop coming off from the liquid jet of deflection is advanced along the track that is changed of liquid jet.In Figure 22, a pair of solid arrow illustrates a route that activates droplet generator, and a pair of dotted arrow illustrates another route that activates droplet generator.When a MEMS transduction assembly during by asynchronous actuating, similar result occurs with respect to the 2nd MEMS transduction assembly.In Figure 23 A, a MEMS transduction assembly is activated with solid arrow indicated direction by himself, or activates with the indicated direction of dotted arrow, so that the drop of realizing at first direction turns to.The 2nd MEMS transduction assembly is activated with solid arrow indicated direction by himself, or activates with the indicated direction of dotted arrow, so that the drop of realizing in second direction turns to.Therefore, drop turns to by the droplet generator of MEMS composite transducer 100 and jet module 305 and realizes.

Make the ability that drop turns to that several benefits are provided.For example, drop turns to and can be used to distinguish printed droplets and non-print drop.Alternately, straight not by the liquid jet of correcting that accumulation by dust, dirt or chip in jet orifice plate 315 causes or manufacturing defect in jet module 305 causes, drop turns to and can be used to keep print quality.

With reference to figure 24A and 24B and Fig. 3 above and 4, with respect to the symmetrical location of spray orifice 135, add for example cantilever beam 120 of MEMS transduction assembly respectively, can improve jet module 305 and control the ability that drops turn to.As shown in Figure 24 A and 24B, four MEMS transduction assemblies are included in jet orifice plate 315, and this provides at the orientation along each MEMS transduction assembly and the drop that adjoins the direction between MEMS transduction assembly and has turned to.

In addition, when the frequency response with the jet module shown in Figure 24 A is compared, the frequency response of the jet module shown in Figure 24 B increases, this is because compare with respect to taking with contact area of flexible membrane 320 with the MEMS transduction assembly shown in Figure 24 A, by taking and the more large area that contacts flexible membrane 320, the MEMS transduction assembly being included in jet orifice plate shown in Figure 24 B is reinforced jet orifice plate 315.

As mentioned above, the drop coming off from liquid jet is a plurality of drops of advancing along the first path.Continuous liquid spraying system 300 comprises deflection mechanism and catcher.The deflection mechanism selected drop in a plurality of drops of advancing along the first path with deflection that is positioned, makes described selected drop start to advance along the second path.Catcher is positioned to intercept a drop of advancing along in the first path and the second path.

Utilize the drop of the droplet generator generation of these types can use electrostatic deflection or gas flow deflection to carry out deflection.When electrostatic deflection is included in continuous liquid spraying system 300, deflection mechanism generally includes an electrode or two electrodes.When using an electrode, the electric charging of described electrode the selecteed drop of deflection, make the drop being deflected start to advance along the second path.When using two electrodes, the selecteed drop of the electric charging of the first electrode, and the selecteed drop of the second electrode deflection, make the drop being deflected start to advance along the second path.When gas flow deflection is included in continuous liquid spraying system 300, each drop in a plurality of drops has in first size and the second size, and deflection mechanism comprises gas flow, its at least deflection there is the drop of first size, make the drop with first size start to advance along the second path.These aspects of continuous liquid spraying system 300 will be described in more detail with reference to figure 25-30 below.

With reference to figure 25-27B, it illustrates and utilizes electrostatic deflection to come deflection to select the exemplary embodiment of the continuous liquid spraying system 300 of drop.Continuous liquid spraying system 300 comprises liquid container 335, and it is continuously pumped into printhead 375 by ink, the final for example continuous liquid stream of China ink, drop that produces of printhead 375.Continuous liquid spraying system 300 receives digitized image process data from image source, described image source is for example scanner, digital camera, computer or other digital data sources of raster image data are provided, with PDL form or other DID form summarized images data.View data from image source 340 is regularly sent to image processor 345.Image processor 345 image data processings, and comprise the memory for storing image data.Image processor 345 is raster image processor (RIP) normally.Described RIP or other types image processor 345 are converted to view data the image page-images of pixel mapping, for printing.View data in image processor 345 is stored in the video memory of image processor 345, and regularly sent to drop or boost controller 350, drop or boost controller 350 produce the electric boost pulse pattern changing in time, to impel stream of liquid droplets to form by being included in the liquid jet of each the nozzle bore ejection in jet module 305.These boost pulses are applied to the droplet generator associated with each spray orifice of jet module 305 (more than one) with reasonable time and suitable frequency.

The deflection mechanism 355 close fit work each other of jet module 305 and printhead 375, to determine liquid, for example whether black drop is printed on the appropriate location of recording medium 360 of the data appointment in video memory, or is deflected and is reclaimed by liquids recovery unit 365.The directed container 335 that returns of liquid in recovery unit 365.Under pressure, liquid is distributed back surfaces by jet module 305 in printhead 375 to the fluid passage in jet module 305, and it is included in chamber or the pumping chamber forming in silicon substrate.Alternately, liquid chamber forms in manifold sheet, and wherein silicon substrate is fixed to manifold sheet.Preferably from chamber through etching, groove or the hole by the silicon substrate of jet module 305 flows to its front surface to liquid, and a plurality of spray orifices are positioned at herein with associated droplet generator.The fluid pressure that is applicable to optimum operation depends on a number of factors, and it comprises the hydrodynamic attribute of spray orifice geometry and liquid.Under the control of pressure regulator 370, by exerting pressure to container 335, realize constant fluid pressure.

During liquid spraying, for example, in ink printed operating period, by recording medium carrier system 380, recording medium 360 moves with respect to printhead 375, wherein said recording medium carrier system 380 comprises a plurality of conveying rollers shown in Figure 25, and it is transferred control system 385 Electronic Control.Be preferably based on microprocessor and in a well-known manner the logic controller 390 of suitable programmed control signal is provided, for delivery of coordinating of control system 385 and pressure regulator 370 and boost controller 350.Boost controller 350 comprises drop controller, and it is provided for producing the driving signal from each drop of printhead 375, and drop is according to advancing to recording medium 360 from forming the view data that the video memory of a part for image processor 345 obtains.View data comprises raw image data, from image processing algorithm, generate to improve the additional view data of print image quality, or the data of correcting from drop displacement, the data that wherein drop displacement is corrected can generate from many sources, for example from jet module 305 liquid of each spray orifice ejection turn to wrong measurement result, this for printhead, characterize and image processing field in technical staff be well-known.Therefore, the information in image processor 345 is considered to the general data source that represents that drop sprays, the desired locations of the black drop that for example will be printed and the identification that will be collected those drops of recovery.

Depend on the application of expectation, for the different mechanical arrangements of receiver pipage control, be used.For example, when printhead 375 is pagewidth printhead 375, it is easily that recording medium 360 is moved through to static printhead 375.On the other hand, in scan type print system, with the motion of relative grating along an axle (main scanning direction) mobile print head 375 and be convenient along normal axis (sub scanning direction) movable recording media.

Drop forms pulse and is provided by the boost controller 350 that is commonly called drop controller, and drop forms pulse and normally by electric connector, be sent to the potential pulse of printhead 375, and this is well-known in field of signal transmissions.Once printed droplets forms, printed droplets advances to recording medium 360 through air, and strikes on the specific pixel region of recording medium 360, but not printed droplets is collected by following catcher.

With reference to figure 26A and 26B, it illustrates continuous liquid jet printing head 375.Droplet generator 395 impels drop 400 to come off from the liquid jet 405 of spraying by spray orifice 135.Select drop 400 for printed droplets 410 or non-print drop 415 depend on that drop is with respect to the stage that comes off of charge electrodes potential pulse, wherein charge electrodes potential pulse is applied in the charge electrodes 420 of a part that is deflection mechanism 425.Charge electrodes 420 is by charging pulse source 430 variable bias, and wherein charging pulse source 430 provides the periodicity charging pulse sequence with fixed frequency.

Charging pulse string preferably includes square voltage pulse, and it has with respect to printhead 375 is low levels of ground connection, and high level, and when drop 400 comes off, these level of fully setovering are to charge to drop 400.The example values scope of the potential difference between high level voltage and low level voltage is 50 to 200 volts, is more preferably 90 to 150 volts.Along with drop 400 comes off (as shown in Figure 3A) from charge electrodes 420 liquid jet above, when high level voltage or current potential are applied to charge electrodes 420 relatively, drop 400 obtains electric charge, and to catcher 435 deflections.The drop 415 that impacts the face 440 of catcher 435 forms liquid film 445 on the face 440 of catcher 435.

When drop 400,415 comes off from liquid jet 405, and the current potential of charge electrodes or more than one electrode 420 is provided while having the voltage of non-zero-amplitude or current potential, deflects.Then, drop 400 obtains and is retained in the lip-deep charge inducing of drop.Electric charge on single drop 400 has the polarity with the opposite charge of charge electrodes, and has the amplitude of the coupling capacity between the drop 400 depending on when voltage magnitude and charge electrodes and drop 400 depart from moment from liquid jet 405.Spacing between drop 400 when this coupling capacity depends in part on charge electrodes 420 and just coming off.Once be recharged drop 400, from liquid jet 405, depart from, drop 400 just approaches catcher face 440 and advances, and wherein catcher face 440 consists of conductor or dielectric conventionally.At the lip-deep electric charge of drop 400 or sensitive surface charge density electric charge (for the catcher 435 being formed by conductor), or induced polarization density electric charge (for the catcher 435 being formed by dielectric).In catcher 435, the charge generation of induction equals the Electric Field Distribution being produced by fictitious charge (polarity is contrary, and amplitude is identical), wherein fictitious charge in catcher 435, equal the distance of distance between catcher 435 and drop 400.In the art, these fictitious charges in catcher 435 are called as image charge.By catcher face 440, be applied to the power being recharged on drop 400 and equal the power being produced separately by described image charge, and therefore impel and be recharged drop 400 deflections and leave its path, and with to square being directly proportional and accelerating along the track towards catcher face 440 with the speed that drop mass is inversely proportional to of drop electric charge.In this embodiment, a part for the distribution of charges of induction composition deflection mechanism 425 on catcher 435.In other embodiments, deflection mechanism 425 comprises the one or more supplemantary electrodes that generate electric field, is wherein recharged drop through described electric field, to make to be recharged drop deflection.For example, the single bias electrode before the grounded part of catcher top is used and describes in US Patent No. 4245226.A pair of supplemantary electrode is used and describes in US Patent No. 6273559.

With reference to figure 26B, when the current potential of charge electrodes 420 is during low level relatively or zero, occur that drop 400 is from the separation point of liquid jet 405, now drop 400; 410 do not obtain electric charge.Drop 400,410 along normally not the track of deflection path advance, and clash into recording medium 360.

With reference to figure 27A and 27B, it illustrates the printhead 375 being similar to reference to described in figure 26A and 26B.But in this embodiment, deflection mechanism 425 also comprises away from (first) charge electrodes 420, is positioned at the second charge electrodes 420A of the opposite face that sprays array 405.The second charge electrodes 420A 430 receives identical charging pulse from charge pulse source with the first charge electrodes 420, and as the first charge electrodes 420, by the constant same potential that remains on.Add to be biased to the second charge electrodes 420A of the first charge electrodes 420 the same current potentials and produce between

charge electrodes

420 and 420A and there is the very region of uniform electric field.The placement of the drop separation point between these charge electrodes make drop charge and drop deflection subsequently very insensitive to the little variation of the little variation of the position that comes off with respect to charging electrode or electrode geometry.Therefore, this configuration is suitable for having the printhead 375 of long spray orifice 135 arrays very much.

Deflection mechanism 425 also comprises deflecting electrode 450.The deflecting electrode 450 being biased and the current potential between catcher face 440 produce the electric field that drop 400 must pass.The non-print drop 415 of charging is by this electric deflection, and impact catcher face 440.Figure 27 A and 27B also illustrate when drop 400 comes off, voltage or current potential in the corresponding time on charge electrodes 420 and the second charge electrodes 420A.The periodicity of the current potential on charging

electrode

420 and 420A is synchronizeed with the pulse-stimulating signal that is provided for the droplet generator 395 that is positioned at each spray orifice 135.

Alternately, utilize each charging electrode can realize electrostatic deflection, one of them electrode is associated with a corresponding spray orifice 135 of nozzle array.Separately associated electrode or as above with reference to described in figure 26A and 26B, charges separately and the selecteed drop of deflection, or as above with reference to described in figure 27A and 27B, in conjunction with the deflecting electrode separating, charges and the selecteed drop of deflection.The electrostatic deflection system of these types has been the U.S. Patent No. 7273270 that on September 25th, 2007 is authorized Katerberg; And describe in authorizing the people's such as Piatt U.S. Patent No. 7673976 on March 9th, 2010.

With reference to figure 28-30, it illustrates the exemplary embodiment of utilizing gas flow deflection to carry out the continuous liquid spraying system 300 of deflection of droplets.Continuous liquid spraying system 300 comprises image source 340, scanner for example, or raster image data are provided, with the computer of PDL form or other DID form summarized images data.View data is converted to halftoning bitmap image data by graphics processing unit 345, and graphics processing unit 345 is also stored in view data in memory.Data in a plurality of control circuit 455 reading images memories, and time dependent electric pulse is put on to droplet generator 395, each in droplet generator 395 is associated with the spray orifice of printhead 375.Between pulse in due course, be applied in, and be applied to suitable droplet generator 395, so that the drop coming off from continuous liquid ejecta forms a little at the correct position of the data appointment in video memory of recording medium 360.

Recording medium 360 printing medium induction systems 380 move with respect to printhead 375, and wherein recording medium carrier system 380 is by recording medium transport control system 385 Electronic Control, and recording medium transport control system 385 is controlled by microcontroller 390.At the recording medium carrier system 380 shown in Figure 28, be only schematic diagram, many different mechanical arrangements are possible.For example, in some applications, transfer roll is used as recording medium carrier system 380, to promote drop to the transfer of recording medium 360.Such transfer roll technology is well-known in the art.When printhead 375 is pagewidth printhead 375, it is most convenients that recording medium 360 is moved through to static printhead 375.When not excessive printhead 375 is scan type printhead, at printhead 375 in grating motion, along an axle (main scanning direction), move, and recording medium 360 is along normal axis (sub scanning direction) movement most convenient normally.

Under pressure, liquid, for example ink is comprised in fluid Supplying apparatus 335.At non-print state, owing to collecting the catcher 435 of drop for recovery unit 365 recovery, stream of liquid droplets can not arrive recording medium 360 continuously.Recovery unit 365 is repaired liquid, and is presented back container 335.Such recovery unit is well-known in the art.The fluid pressure that is applicable to optimum operation depends on a number of factors, and it comprises the attribute of spray orifice geometry and liquid.Under the control of fluid pressure adjuster 370, by exerting pressure to container 335, realize constant fluid pressure.Alternately, container 335 can be maintained at and not pressurize, or even under reduced pressure (vacuum), and pump is used to, under pressure, liquid is sent to printhead 375 from container 335.In this exemplary embodiment, pressure regulator 370 generally includes liquor pump control system.As shown in figure 28, catcher 435 is commonly referred to as the catcher type of " bladed " catcher.

Liquid, by being arranged in the fluid passage of jet module 305, is distributed by the back side of printhead 375.Preferably from etching, groove or the hole by the silicon substrate of printhead 375 flows to its front surface to liquid, and a plurality of spray orifices are positioned at described front surface with associated droplet generator.When printhead 375 is made by silicon, droplet generator control circuit 455 can integrate with printhead 375.Printhead 375 also comprises deflection mechanism, below with reference to Figure 29 and 30 more detailed description deflection mechanisms.

With reference to Figure 29, it illustrates the schematic diagram of continuous liquid jet printing head 375.The jet module 305 of printhead 375 is included in array or a plurality of nozzle bore 135 of the nozzle bore 135 forming in jet orifice plate 315.In Figure 29, jet orifice plate 315 is fixed to jet module 305.But as shown in figure 30, jet orifice plate 315 is parts of jet module 305.Liquid for example ink is injected by each spray orifice 135 of array, to form the ejecta 405 of liquid under pressure.In Figure 29, the array of spray orifice 135 or a plurality of spray orifice 135 extend to inside and outside this figure.

The data of a plurality of control circuit 455 reading images memories, and time dependent electric pulse is put on to each droplet generator 395, to form the drop 400 with first size (or volume) 465 and the drop with the second size (or volume) 470 from each liquid jet.In order to realize this point, jet module 305 comprises droplet generator as above (or droplet-shaped apparatus for converting) 395, when droplet generator 395 is activated, it disturbs each ejecta 405 of liquid, the ejecta 405 of ink for example, with the part of inducing each ejecta from ejecta come off and polymerization to form drop 465 and 470.A droplet generator 395 is associated with each spray orifice 135 of nozzle array.Utilize control circuit 455; it is known that time dependent electric pulse is put on to each droplet generator 395; wherein some aspect is described in following one or more patents, for example, on December 10th, 2002, authorize the U.S. Patent No. 6491362B1 of Jeanmaire; On April 29th, 2003, authorize the people's such as Jeanmaire U.S. Patent No. 6554410B2; On June 10th, 2003, authorize the people's such as Jeanmaire U.S. Patent No. 6575566B1; On July 8th, 2003, authorize the people's such as Jeanmaire U.S. Patent No. 6588888B2; On September 21st, 2004, authorize the U.S. Patent No. 6793328B2 of Jeanmaire; And the U.S. Patent No. 6851796B2 that authorizes the people such as Jeanmaire on February 8th, 2005.

When printhead 375 is when working, drop 465,470 forms with sizes or volume, for example, has the drop (droplet) 465 of first size or volume, and the drop (large drop) 470 with the second size or volume.The quality of large drop 470 is to the ratio of the quality of droplet 465 integer between 2 to 10 normally.The stream of liquid droplets 475 that comprises drop 465 and 470 is advanced along droplet path or track 480.

Printhead 375 also comprises gas flow deflection mechanism 485, and it guides gas flow 490, and for example air passes through gas flow conduit 515,520, and through a part that is commonly called the droplet trajectory 480 of deflecting region 495.Because gas flow 490 and drop 465,470 interact at deflecting region 495, it changes droplet trajectory.When drop 465,470 passes deflecting region 495, they are just being traveling in respect to deflected trajectory 480 not has on the certain angle change track of (being usually called as deflection angle).

Droplet 465 is affected by gas flow more easily than large drop 470, therefore, the droplet track 500 producing departs from large droplet trajectory 505.That is to say, the deflection angle of droplet 465 is greater than the deflection angle of large drop 470.Gas flow 490 provides enough drop deflections, therefore, impel enough departing from of droplet and large droplet trajectory, the intercepting that makes to be positioned is collected along a drop of advancing in track along the catcher 435 (shown in Figure 28 and 30) of a drop of advancing in droplet track 500 and large droplet trajectory 505, and allows the drop of following other tracks to clash into recording medium 360 (shown in Figure 28 and 30).

With reference to Figure 30, the positive pressure gas flow structure 510 of gas flow deflection mechanism 485 is positioned in the first side of droplet trajectory 480.Positive pressure gas flow structure 510 comprises the first gas flow conduit 515, and it comprises lower wall 525 and upper wall 530.Gas flow conduit 515 by the gas flow being provided by positive pressure sources 535 490 with guiding to inferior horn θXiang drop deflection district 495 (shown in Fig. 2) with respect to liquid jet 405 about 45o.Optionally (more than one) seal 540 provides the Fluid Sealing between jet module 305 and the upper wall 530 of gas flow conduit 515.

The upper wall 530 of gas flow conduit 515 does not need 495 extensions (as shown in figure 29) to drop deflection district.In Figure 30, upper wall 530 finishes at the wall 545 of jet module 305.The wall 545 of jet module 305 serves as a part for 495 upper walls 530 that finish in drop deflection district.

The negative pressure gas flow structure 550 of gas flow deflection mechanism 485 is positioned on second of droplet trajectory 480.Negative pressure gas flow structure 550 comprises the second gas flow conduit 520 being positioned between catcher 435 and upper wall 555, and it is discharged gas flow from deflecting region 495.The second conduit 520 is connected to negative source 560, and it contributes to eliminate the gas that flows through the second conduit 520.Optional seal 540 provides the Fluid Sealing between jet module 305 and upper wall 555.

As shown in Figure 30, gas flow deflection mechanism 485 comprises positive pressure sources 535 and negative source 560.The application-specific that but depends on expectation, gas flow deflection mechanism 485 only comprises in positive pressure sources 535 and negative source 560.

In operation, the gas being provided by the first gas flow conduit 515 is directed in drop deflection district 495, impel large drop 470 to follow large droplet trajectory 505, and droplet 465 is followed droplet track 500 this its.Be captured face portion 440 intercepting of device 435 of the drop 465 of advancing along droplet track 500 as shown in figure 30.Droplet 465 contact faces 440, and go forward side by side catcher 435 and plate 570 or the liquid return conduit 565 forming between catcher 435 and plate 570 to dirty from face 440.The liquid being collected or be recovered, or turn back to container 335 (shown in Fig. 1), for re-using or abandoning.Large drop 470 is walked around catcher 435, and advances to recording medium 360.Alternately, catcher 435 can be positioned and intercept the drop 470 of advancing along large droplet trajectory 505.Large drop 470 contact catchers 435, and flow into the liquid return conduit 565 that is arranged in catcher 435 or forms at catcher 435.The liquid being collected or be recovered for re-using, or be dropped.Droplet 465 is walked around catcher 435, and advances to recording medium 360.

As shown in figure 30, catcher 435 is commonly referred to as the catcher type of " wall attachment effect (Coanda) " catcher.But, " wall attachment effect " catcher shown in " bladed " catcher shown in Figure 28 and Figure 30 is interchangeable, and arbitrary can being used, common application choice on the estimation.Alternately, catcher 435 can be any suitable design, and it includes but not limited to porous area catcher, segmenting edge catcher, or any combination of above-mentioned catcher.

With reference to Figure 31, it illustrates the exemplary embodiment of the method for utilizing above-mentioned continuous liquid spraying system continuous injection liquid.Described method starts from step 600.

In step 600, provide continuous liquid spraying system.Described system comprises substrate, and the jet orifice plate that is fixed to substrate.The more than one part of substrate limits liquid chamber.Jet orifice plate comprises MEMS transduction assembly.The first of MEMS transduction assembly is anchored to substrate.The second portion of MEMS transduction assembly extends at least a portion of liquid chamber.The second portion of MEMS transduction assembly moves freely with respect to liquid chamber.Flexible polymeric film is positioned and contacts MEMS transduction assembly.The first of flexible polymeric film covers MEMS transduction assembly, and the second portion of flexible polymeric film is anchored to substrate.Flexible polymeric film comprises spray orifice.What step 600 was followed below is step 605.

In step 605, by being positioned in the spray orifice in the flexible polymeric film of jet orifice plate, under the pressure of continuous injection thing that is enough to atomizing of liquids, by fluid Supplying apparatus, provide liquid.What step 605 was followed below is step 610.

In step 610, by selective actuating MEMS transduction assembly, this impels a part for flexible polymeric film with respect to liquid chamber displacement, thereby causes drop to come off from liquid jet.What step 610 was followed below is step 615 and step 625.

In step 625, alternatively, the drop of formation is turned to by MEMS transduction assembly.What step 625 was followed below is step 615.

In step 615, drop is in a plurality of drops of advancing along the first path.Selected drop in a plurality of drops that the deflection mechanism deflection being properly positioned is advanced along the first path, makes described selected drop start to advance along the second path.What step 615 was followed below is step 620.

In step 620, the catcher intercepting being properly positioned is along a drop of advancing in the first path and the second path.

List of parts

100 MEMS composite transducers

110 substrates

The first surface of 111 substrates

The second surface of 112 substrates

The more than one part of 113 substrates (limiting the outer boundary of cavity)

114 outer boundaries

115 cavitys

116 through holes (fluid intake)

118

120 cantilever beams

121 (cantilever beam) grappling end

122 (cantilever beam) cantilever end

130 flexible membranes

The cover part of 131 flexible membranes

The anchor portion of 132 flexible membranes

133 are suspended from the part of the flexible membrane on cavity

The part that 134 flexible membranes are eliminated

135 (in flexible membrane) hole, spray orifice

138 flexible passivating materials

140 pairs of anchor beams

141 first grappling ends

142 second grappling ends

143 intersection regions

150 clamping plates

151 (clamping plate) outer boundary

152 (clamping plate) inner boundary

160 MEMS transductive materials

162 reference materials

163 (reference material) ground floor

164 (reference material) second layer

165 (reference material) the 3rd layer

166 bottom electrode layer

167 inculating crystal layers

168 top electrode layers

171 first areas (region that transductive material is retained)

172 second areas (region that transductive material is eliminated)

200 fluid ejectors

201 chambers

202 partition walls

204 nozzle plates

205 nozzles

300 continuous liquid spraying systems

305 jet modules

310 liquid chambers

315 jet orifice plate

320 flexible membranes

325 fluid Supplying apparatus

330 liquid spray arrow

335 liquid containers

340 image sources

345 image processors

350 boost controllers

355 deflection mechanisms

360 recording mediums

365 liquids recovery unit

370 pressure regulators

375 printheads

380 recording medium carrier systems

385 recording medium transport control systems

390 logic controllers

395 droplet generators

400 drops

405 liquid jet

410 printed droplets

415 non-print drops

420 charge electrodes

420A the second charge electrodes

425 deflection mechanisms

430 charging pulse sources

435 catchers

440 faces

445 liquid films

450 deflecting electrodes

More than 455 control circuit

460 fluid passages

465 drops

470 drops

475 stream of liquid droplets

480 tracks

485 gas flow deflection mechanisms

490 gas flows

495 deflecting regions

500 droplet tracks

505 large droplet trajectory

510 positive pressure gas flow structures

515 gas flow conduits

520 gas flow conduits

525 lower walls

530 upper walls

535 positive pressure sources

545 walls

550 negative pressure gas flow structures

555 upper walls

560 negative source

565 liquid return conduits

570 plates

600 provide continuous liquid spraying system

605 provide pressurized liquid

610 drops form

615 selecteed drop deflections

620 drop interceptings

625 optional drops turn to

Claims

1. a continuous liquid spraying system, it comprises:

Substrate, the more than one part of described substrate limits liquid chamber;

Be fixed to the jet orifice plate of described substrate, described jet orifice plate comprises:

MEMS transduction assembly, the first of described MEMS transduction assembly is anchored to described substrate, the second portion of described MEMS transduction assembly extends at least a portion of described liquid chamber, and the second portion of described MEMS transduction assembly moves freely with respect to described liquid chamber; And

The be positioned flexible membrane of the described MEMS transduction assembly of contact, the first of described flexible membrane covers described MEMS transduction assembly, and the second portion of described flexible membrane is anchored to described substrate, and described flexible membrane comprises spray orifice; And

Fluid Supplying apparatus, it provides liquid to described liquid chamber, by being positioned at the spray orifice in the flexible membrane of described jet orifice plate, described liquid is provided under the pressure of continuous injection thing that is enough to spray described liquid, described MEMS transduction assembly is selectively activatable, to impel a part for described flexible membrane with respect to described liquid chamber displacement, to impel drop to come off from described liquid jet.

2. system according to claim 1, described flexible membrane is positioned in plane, and wherein said MEMS transduction assembly is configured in the described plane of described flexible membrane and activated.

3. system according to claim 2, described MEMS transduction assembly is around described spray orifice, and the geometry of described spray orifice is adjusted in the actuating of wherein said MEMS transduction assembly.

4. system according to claim 1, described flexible membrane is positioned in plane, and the described plane that wherein said MEMS transduction assembly is configured at described flexible membrane activated outward.

5. system according to claim 1, described MEMS transduction assembly is a MEMS transduction assembly, described jet orifice plate comprises:

The 2nd MEMS transduction assembly, the first of described the 2nd MEMS transduction assembly is anchored to described substrate, the second portion of described the 2nd MEMS transduction assembly extends at least a portion of described liquid chamber, the second portion of described the 2nd MEMS transduction assembly moves freely with respect to described liquid chamber, described flexible membrane is positioned and contacts described the 2nd MEMS transduction assembly, the first of described flexible membrane covers described the 2nd MEMS transduction assembly, and the second portion of described flexible membrane is anchored to described substrate.

6. system according to claim 6, a wherein said MEMS transduction assembly and described the 2nd MEMS transduction assembly are located by symmetry with respect to the spray orifice of described flexible membrane.

7. system according to claim 6, described flexible membrane is positioned in plane, and a wherein said MEMS transduction assembly and described the 2nd MEMS transduction assembly are configured in the described plane of described flexible membrane and activated.

8. system according to claim 6, described flexible membrane is positioned in plane, and the described plane that a wherein said MEMS transduction assembly and described the 2nd MEMS transduction assembly are configured at described flexible membrane activated outward.

9. system according to claim 8, a wherein said MEMS transduction assembly and the 2nd MEMS transduction assembly activated at equidirectional.

10. system according to claim 8, a wherein said MEMS transduction assembly and the 2nd MEMS transduction assembly in the opposite direction activated.

11. systems according to claim 1, described drop is in a plurality of drops of advancing along the first path, described system further comprises:

Deflection mechanism, selecteed drop in its described a plurality of drops of advancing along described the first path with deflection that are positioned, makes described selecteed drop start to advance along the second path.

12. systems according to claim 11, described deflection mechanism comprises:

Electrode, its electric charging the selecteed drop of deflection, make the drop being deflected start to advance along described the second path.

13. systems according to claim 11, described deflection mechanism comprises:

The first electrode, the selecteed drop of its electric charging; And

The second electrode, the selecteed drop of its deflection, makes the drop being deflected start to advance along described the second path.

14. systems according to claim 11, each drop in described a plurality of drops has in first size and the second size, and described deflection mechanism comprises:

Gas flow, its at least deflection there is the drop of described first size, make the drop with described first size start to advance along described the second path.

15. systems according to claim 11, it further comprises:

Catcher, it is positioned to intercept a drop of advancing along in described the first path and described the second path.

16. systems according to claim 1, wherein said flexible membrane is flexible polymeric film.

The method of 17. 1 kinds of continuous injection liquid, it comprises:

Continuous liquid spraying system is provided, and described continuous liquid spraying system comprises:

Substrate, the more than one part of described substrate limits liquid chamber;

By being positioned in the spray orifice in the flexible membrane of described jet orifice plate, under the pressure of continuous injection thing that is enough to atomizing of liquids, utilize fluid Supplying apparatus that liquid is provided; And

The described MEMS transduction assembly of selective actuating, this impels a part for described flexible polymeric film with respect to described liquid chamber displacement, thereby causes drop to come off from described liquid jet.

18. methods according to claim 17, described flexible membrane is positioned in plane, and wherein selective actuating in the described plane that described MEMS transduction assembly is included in described flexible membrane activates described MEMS transduction assembly.

19. methods according to claim 18, described MEMS transduction assembly, around described spray orifice, wherein activates the geometry that described MEMS transduction assembly is adjusted described spray orifice.

20. methods according to claim 17, described flexible membrane is positioned in plane, and wherein the described MEMS transduction assembly of selective actuating is included in the described MEMS transduction assembly of the outer actuating of described plane of described flexible membrane.

21. methods according to claim 17, described MEMS transduction assembly is a MEMS transduction assembly, described jet orifice plate comprises:

The 2nd MEMS transduction assembly, the first of described the 2nd MEMS transduction assembly is anchored to described substrate, the second portion of described the 2nd MEMS transduction assembly extends at least a portion of described liquid chamber, the described second portion of described the 2nd MEMS transduction assembly moves freely with respect to described liquid chamber, described flexible membrane is positioned and contacts described the 2nd MEMS transduction assembly, the first of described flexible membrane covers described the 2nd MEMS transduction assembly, and the second portion of described flexible membrane is anchored to described substrate.

22. methods according to claim 21, a wherein said MEMS transduction assembly and described the 2nd MEMS transduction assembly are located by symmetry with respect to the spray orifice of described flexible membrane.

23. methods according to claim 22, described flexible membrane is positioned in plane, and described method further comprises:

In the described plane of described flexible membrane, selectively activate a described MEMS transduction assembly simultaneously and selectively activate described the 2nd MEMS transduction assembly.

24. methods according to claim 22, described flexible membrane is positioned in plane, and described method further comprises:

Outside the described plane of described flexible membrane, selectively activate a described MEMS transduction assembly simultaneously and selectively activate described the 2nd MEMS transduction assembly.

25. methods according to claim 24, wherein activate a described MEMS transduction assembly and simultaneously selectively activate described the 2nd MEMS transduction assembly and be included in equidirectional and activate a described MEMS transduction assembly and described the 2nd MEMS transduction assembly simultaneously.

26. methods according to claim 24, wherein activate a described MEMS transduction assembly and simultaneously selectively activate described the 2nd MEMS transduction assembly and further comprise by the opposite direction activate a described MEMS transduction assembly and described the 2nd MEMS transduction assembly, impel turning to of the described drop that comes off from described drop ejecta simultaneously.

27. methods according to claim 22, described flexible membrane is positioned in plane, and described method further comprises:

By selective of activating in a described MEMS transduction assembly and the 2nd MEMS transduction assembly outside the described plane of described flexible membrane, impel turning to of the described drop that comes off from described drop ejecta.

28. methods according to claim 17, described drop is in a plurality of drops of advancing along the first path, described method further comprises:

Deflection mechanism is provided; And

Utilize selecteed drop in described a plurality of drops that described deflection mechanism deflection advances along described the first path, make described selecteed drop start to advance along the second path.

29. methods according to claim 28, in described a plurality of drops that wherein deflection is advanced along described the first path, selecteed drop comprises and utilizes selecteed drop described in the electric charging of single electrode and deflection, makes the drop being deflected start to advance along described the second path.

30. methods according to claim 28, in described a plurality of drops that wherein deflection is advanced along described the first path, selecteed drop comprises and utilizes the described selecteed drop of the electric charging of the first electrode and utilize selecteed drop described in the second electrode deflection, makes the drop being deflected start to advance along described the second path.

31. methods according to claim 28, each drop in described a plurality of drop has in first size and the second size, in described a plurality of drops that wherein deflection is advanced along described the first path, selecteed drop comprises, utilize gas flow at least deflection there is the drop of described first size, make the drop with described first size start to advance along described the second path.

32. methods according to claim 28, it further comprises:

Utilize catcher intercepting along a drop of advancing in described the first path and described the second path.

33. methods according to claim 17, wherein selectively activate described MEMS transduction assembly and also impel turning to of the described drop that comes off from described liquid jet.

34. methods according to claim 17, wherein said flexible membrane is flexible polymeric film.