CN103612010A - 太阳能电池激光开孔波形 - Google Patents
太阳能电池激光开孔波形 Download PDFInfo
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Abstract
本发明涉及一种太阳能电池激光开孔波形，属于太阳能光伏电池制造领域，主要特点是将若干个单脉冲波形叠加在一个脉冲波形中，从而形成一个大的有多个能量峰值的多脉冲波形，本发明通过形成的多脉冲波形能很好的改善和解决以往一种单脉冲波形的缺点，采用温度逐渐递增的波形，能改善由于硅片急剧升温导致的热损伤；与单脉冲波形相比采用相同脉宽，但是多个脉冲叠加波形能匀化每个脉冲的不稳定因素，使热分布和光斑尺寸更加均匀，从而使形成的孔更加光滑更小的损伤和更加稳定的开孔尺寸。本发明在光伏电池领域应用广泛，激光刻边、激光掺杂、钝化介质膜烧蚀、MWT\IBC\LFC\薄膜电池等都可采用，由于各个工艺的差别，根据各自的工艺的需求可做相应调整。
Description
技术领域
本发明涉及一种太阳能电池激光开孔波形，属于太阳能光伏电池制造领域。
背景技术
降低生产成本、提高转换效率几乎是所有太阳能电池厂商迫切需要解决的问题，为此各类技术层出不穷，激光技术就是其中一种。目前很多太阳能电池工艺中如激光刻边、激光掺杂、钝化介质膜烧蚀、MWT\IBC\LFC\薄膜电池等都有用到激光技术。激光技术为优化太阳电池制造、提高转换效率发挥着越来越重要的作用。
目前光伏电池中使用的激光一般都采用YAG激光器以单脉冲输出波形，其中波形形状各异，有矩形方波也有高斯波形等。虽然有很多优点，但是也存在很多缺点，特别是在激光开孔工艺中，如激光烧蚀SiN/AlOx膜、MWT\IBC等工艺，由于这种单脉冲波形的能量范围一般为几个焦耳，高能量带来的熔融物在孔中的体积很大，产生较大的孔径误差容易出现锥形、孔尺寸重复性差等缺陷；另外由于升降温速度快容易造成热应力、损伤、微裂纹等缺陷；同时飞溅物对激光的吸收、光束的散焦等原因，使激光功率密度降低，使气化速度降低，由此熔融物增加造成溅污，甚至堵塞孔造成开孔失效。
发明内容
本发明的目的是提供一种太阳能电池激光开孔波形，解决现有单脉冲激光开孔采用矩形方波或高斯波形存在的上述不足，通过本发明使形成的孔更加光滑、更小的损伤和更加稳定的开孔尺寸。
本发明的目的是通过以下技术方案实现的，一种太阳能电池激光开孔波形，其特征是，将若干个单脉冲波形叠加在一个脉冲波形中，从而形成一个大的有多个能量峰值的多脉冲波形。
所述若干个单脉冲波形叠加为二至十个单脉冲波形。
所述多脉冲波形的脉宽为几个单脉冲波形脉宽的叠加。
所述每个单脉冲能量峰值逐渐递增或递减或交叉出现。
本发明通过形成的多脉冲波形能很好的改善和解决以往一种单脉冲波形的缺点，采用温度逐渐递增的波形，能改善由于硅片急剧升温导致的热损伤；与单脉冲波形相比采用相同脉宽，但是多个脉冲叠加波形能匀化每个脉冲的不稳定因素，使热分布和光斑尺寸更加均匀，从而使形成的孔更加光滑更小的损伤和更加稳定的开孔尺寸。本发明在光伏电池领域应用广泛，激光刻边、激光掺杂、钝化介质膜烧蚀、MWT\IBC\LFC\薄膜电池等都可采用，由于各个工艺的差别，根据各自的工艺的需求可做相应调整。
附图说明
图1为本发明多脉冲波形的图形之一；
图2为本发明多脉冲波形的图形之二；
图3为本发明多脉冲波形的图形之三；
图4为本发明多脉冲波形的图形之四。
具体实施方式
结合附图和实施例进步说明本发明，本发明是在单脉冲激光的基础上提出了一种新的激光波形，主要是将多个单脉冲波形叠加在一个脉冲波形中，如图1-4所示，是将二个单脉冲波形叠加在一个脉冲波形中，也可以将二至十个单脉冲波形叠加在一个脉冲波形中，从而形成一个大的有两个能量峰值的多脉冲波形，该多脉冲波形脉宽可根据工艺要求设置为两个单脉冲波形的叠加，每个单脉冲的能量峰值可根据工艺要求做调整，每个单脉冲能量峰值可以是逐渐递增或递减或交叉出现可根据工艺要求做调整。这种波形能很好的改善和解决以往一种单脉冲波形的缺点，采用温度逐渐递增的波形，能改善由于硅片急剧升温导致的热损伤；与单脉冲波形相比采用相同脉宽但是多个脉冲叠加波形能匀化每个脉冲的不稳定因素，使热分布和光斑尺寸更加均匀，从而使形成的孔更加光滑更小的损伤和更加稳定的开孔尺寸。该激光的波形的设计方法在光伏电池领域应用广泛，上面提到的激光刻边、激光掺杂、钝化介质膜烧蚀、MWT\IBC\LFC\薄膜电池等都有用到该激光波形设计方法，由于各个工艺的差别，根据各自的工艺的需求可做相应调整。
Claims (4)
1.一种太阳能电池激光开孔波形，其特征是，将若干个单脉冲波形叠加在一个脉冲波形中，从而形成一个大的有多个能量峰值的多脉冲波形。
2.根据权利要求1所述的太阳能电池激光开孔波形，其特征是，所述若干个单脉冲波形叠加为2-10个单脉冲波形。
3.根据权利要求1所述的太阳能电池激光开孔波形，其特征是，所述多脉冲波形的脉宽为几个单脉冲波形脉宽的叠加。
4.根据权利要求1所述的太阳能电池激光开孔波形，其特征是，所述每个单脉冲能量峰值逐渐递增或递减或交叉出现。
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106687419A (zh) * | 2014-07-08 | 2017-05-17 | 康宁股份有限公司 | 用于激光处理材料的方法和设备 |
| CN111438447A (zh) * | 2018-12-29 | 2020-07-24 | 东泰高科装备科技有限公司 | 一种薄膜开孔方法、太阳能电池封装膜及开孔方法 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106687419A (zh) * | 2014-07-08 | 2017-05-17 | 康宁股份有限公司 | 用于激光处理材料的方法和设备 |
| CN111438447A (zh) * | 2018-12-29 | 2020-07-24 | 东泰高科装备科技有限公司 | 一种薄膜开孔方法、太阳能电池封装膜及开孔方法 |
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