CN103585824A - Centrifugal filter for oxide dust in crystal growing furnace - Google Patents
Centrifugal filter for oxide dust in crystal growing furnace Download PDFInfo
- Publication number
- CN103585824A CN103585824A CN201310548765.4A CN201310548765A CN103585824A CN 103585824 A CN103585824 A CN 103585824A CN 201310548765 A CN201310548765 A CN 201310548765A CN 103585824 A CN103585824 A CN 103585824A
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- CN
- China
- Prior art keywords
- tank body
- split cavity
- waste gas
- perforation
- gas outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 title claims abstract description 19
- 239000013078 crystal Substances 0.000 title claims abstract description 15
- 239000002912 waste gas Substances 0.000 claims abstract description 17
- 239000000843 powder Substances 0.000 claims description 17
- 238000000926 separation method Methods 0.000 abstract description 12
- 238000001914 filtration Methods 0.000 abstract description 5
- 239000007789 gas Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 3
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to a centrifugal filter for oxide dust in a crystal growing furnace. The centrifugal filter comprises a tank body and a filtering device, wherein a separation chamber with a conical structure is formed in the inner side wall, close to a second through hole, of the tank body; at least one gas inlet communicated with an inner cavity of the tank body is formed in an upper ring shape of the separation chamber; a waste gas outlet pipe with an L-shaped structure is connected to the outer side wall, close to the second through hole, of the tank body in an extending manner; a clean gas pipe communicated with a vacuum pump is arranged on the first through hole in a penetrating manner; the other end of the clean gas pipe is communicated with the front end part of the separation chamber; the waste gas outlet pipe is communicated with the separation chamber through the second through hole; the filtering device comprises a motor arranged outside the waste gas outlet pipe and a separation impeller connected to an output shaft of the motor; the separation impeller is arranged in the separation chamber. According to the centrifugal filter, the centrifugal impeller is adopted for performing high-speed rotary separation on oxide-containing waste gas, clean gas after separation is sucked through the vacuum pump, and the filtering effect is good.
Description
Technical field
The present invention relates to crystal growing furnace, especially a kind of crystal growing furnace oxide powder dust centrifugal type filter.
Background technology
In traditional crystal growing furnace, utilize filter to filter oxide powder dust, the filter using at present adopts screen pack, because screen pack is easily stifled, and filter unclean, oxide easily enters vavuum pump and causes vavuum pump lubricant pollution, thereby causes the vavuum pump decrease in efficiency that vacuumizes easy to wear.
Summary of the invention
The technical problem to be solved in the present invention is: in order to overcome the problem of above-mentioned middle existence, a kind of crystal growing furnace oxide powder dust centrifugal type filter is provided, and its project organization is reasonable and can avoid filtration totally not cause the phenomenon of vavuum pump lubricant pollution.
The technical solution adopted for the present invention to solve the technical problems is: a kind of crystal growing furnace oxide powder dust centrifugal type filter, comprise tank body and filter for splendid attire oxide powder dust, on described tank wall, laterally offer the first perforation and second perforation relative with the first perforation, near biperforate tank body madial wall, be provided with the split cavity of pyramidal structure, the upper annular of split cavity offers the air admission hole that at least one is connected with tank inner chamber, near extending the waste gas outlet pipe that is connected with L-type structure on biperforate tank body lateral wall, in the first perforation, place and be useful on the clean air pipe that is communicated with vavuum pump, the other end of clean air pipe is connected with the leading section of split cavity, waste gas outlet pipe is connected with split cavity by the second perforation, described filter comprises the motor and the separated impeller being connected on motor output shaft that is located at waste gas outlet pipe outside, separated impeller is located in split cavity.
In order to realize quick air inlet, the upper annular of described split cavity offers two air admission holes.
The invention has the beneficial effects as follows: described a kind of crystal growing furnace oxide powder dust centrifugal type filter, adopt the filter of this kind of design, solved a difficult problem that perplexs for many years industry, adopt centrifugal impeller that the waste gas with oxide is carried out to High Rotation Speed separation, after separated, clean gas is by vavuum pump suction, good filtration effect.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the present invention is further described.
Fig. 1 is the overall structure schematic diagram of a kind of crystal growing furnace oxide powder dust centrifugal type filter of the present invention.
Accompanying drawing acceptance of the bid note is described below: 1, tank body, 2, split cavity, 3, air admission hole, 4, waste gas outlet pipe, 5, clean air pipe, 6, motor, 7, separated impeller.
The specific embodiment
In conjunction with the accompanying drawings, the present invention is further detailed explanation.These accompanying drawings are the schematic diagram of simplification, basic structure of the present invention is only described in a schematic way, so it only show the formation relevant with the present invention.
A kind of crystal growing furnace oxide powder dust centrifugal type filter as shown in Figure 1, comprise tank body 1 and filter for splendid attire oxide powder dust, on tank body 1 sidewall, laterally offer the first perforation and second perforation relative with the first perforation, near biperforate tank body 1 madial wall, be provided with the split cavity 2 of pyramidal structure, the upper annular of split cavity 2 offers two air admission holes 3 with tank body 1 intracavity inter-connection, near extending the waste gas outlet pipe 4 that is connected with L-type structure on biperforate tank body 1 lateral wall, in the first perforation, place and be useful on the clean air pipe 5 that is communicated with vavuum pump, the other end of clean air pipe 5 is connected with the leading section of split cavity 2, waste gas outlet pipe 4 is connected with split cavity 2 by the second perforation, described filter comprises the motor 6 and the separated impeller 7 being connected on motor 6 output shafts that is located at waste gas outlet pipe 4 outsides, separated impeller 7 is located in split cavity 2, front end face at split cavity 2 is provided with positioning wedged block, the sidewall of clean air pipe 5 is provided with the locating fastener corresponding with locating convex block, clean air pipe 5 and split cavity 2 pass through locating fastener inlay card on positioning wedged block.
A kind of crystal growing furnace oxide powder dust centrifugal type filter of the present invention, when using this centrifugal type filter, oxide powder dust is carried out to separation, by motor 6, drive separated impeller 7 to rotate, due to the High Rotation Speed of separated impeller 7, utilize centrifugal principle, make oxide powder dust form released state, clean air after separation passes through the effect of vavuum pump from 5 sucking-offs of clean air pipe, and the waste gas with oxide of separating is discharged from waste gas outlet pipe 4.
The above-mentioned foundation desirable embodiment of the present invention of take is enlightenment, and by above-mentioned description, relevant staff can, within not departing from the scope of this invention technological thought, carry out various change and modification completely.The technical scope of this invention is not limited to the content on description, must determine its technical scope according to claim scope.
Claims (3)
1. a crystal growing furnace oxide powder dust centrifugal type filter, it is characterized in that: comprise tank body (1) and filter for splendid attire oxide powder dust, on described tank body (1) sidewall, laterally offer the first perforation and second perforation relative with the first perforation, near biperforate tank body (1) madial wall, be provided with the split cavity (2) of pyramidal structure, the upper annular of split cavity (2) offers the air admission hole (3) of at least one and tank body (1) intracavity inter-connection, near extending the waste gas outlet pipe (4) that is connected with L-type structure on biperforate tank body (1) lateral wall, in the first perforation, place and be useful on the clean air pipe (5) that is communicated with vavuum pump, the other end of clean air pipe (5) is connected with the leading section of split cavity (2), waste gas outlet pipe (4) is connected with split cavity (2) by the second perforation, described filter comprises the motor (6) and the separated impeller (7) being connected on motor (6) output shaft that is located at waste gas outlet pipe (4) outside, separated impeller (7) is located in split cavity (2).
2. crystal growing furnace oxide powder dust centrifugal type filter according to claim 1, is characterized in that: the upper annular of described split cavity (2) offers two air admission holes (3).
3. crystal growing furnace oxide powder dust centrifugal type filter according to claim 1, it is characterized in that: the front end face of described split cavity (2) is provided with positioning wedged block, the sidewall of clean air pipe (5) is provided with the locating fastener corresponding with locating convex block, and clean air pipe (5) and split cavity (2) pass through locating fastener inlay card on positioning wedged block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310548765.4A CN103585824B (en) | 2013-11-06 | 2013-11-06 | A kind of crystal growing furnace oxide powder dust centrifugal type filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310548765.4A CN103585824B (en) | 2013-11-06 | 2013-11-06 | A kind of crystal growing furnace oxide powder dust centrifugal type filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103585824A true CN103585824A (en) | 2014-02-19 |
| CN103585824B CN103585824B (en) | 2015-09-09 |
Family
ID=50076267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310548765.4A Expired - Fee Related CN103585824B (en) | 2013-11-06 | 2013-11-06 | A kind of crystal growing furnace oxide powder dust centrifugal type filter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103585824B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2202210Y (en) * | 1993-02-15 | 1995-06-28 | 河南省周口市实用机械研究所 | Dust-removing draught fan for boiler |
| CN2256762Y (en) * | 1996-05-23 | 1997-06-25 | 周亚素 | Dust filtering fan |
| CN101437596A (en) * | 2006-03-23 | 2009-05-20 | 埃西斯研究与发展有限公司 | Particle separator |
| JP2009262027A (en) * | 2008-04-23 | 2009-11-12 | Calsonic Kansei Corp | Gas-liquid separator |
| CN203598610U (en) * | 2013-11-06 | 2014-05-21 | 江苏华盛天龙光电设备股份有限公司 | Centrifugal filter for oxide dust of crystal growth furnace |
-
2013
- 2013-11-06 CN CN201310548765.4A patent/CN103585824B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2202210Y (en) * | 1993-02-15 | 1995-06-28 | 河南省周口市实用机械研究所 | Dust-removing draught fan for boiler |
| CN2256762Y (en) * | 1996-05-23 | 1997-06-25 | 周亚素 | Dust filtering fan |
| CN101437596A (en) * | 2006-03-23 | 2009-05-20 | 埃西斯研究与发展有限公司 | Particle separator |
| JP2009262027A (en) * | 2008-04-23 | 2009-11-12 | Calsonic Kansei Corp | Gas-liquid separator |
| CN203598610U (en) * | 2013-11-06 | 2014-05-21 | 江苏华盛天龙光电设备股份有限公司 | Centrifugal filter for oxide dust of crystal growth furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103585824B (en) | 2015-09-09 |
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| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150909 |