CN103574360A - Wavelength conversion device, reflection cup, light source, and manufacturing method of wavelength conversion device - Google Patents
Wavelength conversion device, reflection cup, light source, and manufacturing method of wavelength conversion device Download PDFInfo
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- CN103574360A CN103574360A CN201310481234.8A CN201310481234A CN103574360A CN 103574360 A CN103574360 A CN 103574360A CN 201310481234 A CN201310481234 A CN 201310481234A CN 103574360 A CN103574360 A CN 103574360A
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Abstract
The invention provides a wavelength conversion device, a light source applying the same, and a manufacturing method of the wavelength conversion device. The wavelength conversion device is used for receiving exciting light and is excited to emit excited light, and comprises a silicon wafer, wherein the silicon wafer comprises a main surface vertical to the crystal orientation of a silicon transistor (100), and also comprises a wavelength conversion layer, and square or rectangular openings are formed in the main surface; tapered pits are formed in the openings in a corrosion way, and the side wall of each tapered pit comprises four sides which are respectively vertical to the crystal orientation of a silicon crystal (111); the side wall and the bottom of each tapered pit are coated with reflective films, and the wavelength conversion layer is attached to the bottom of each tapered pit. According to the wavelength conversion device and the light source provided by the invention, the exciting light can finally enter the wavelength conversion layer as long as the exciting light enters the openings of the tapered pits at an appropriate incident angle, so that the dispersion of each exciting light spot is effectively avoided. Meanwhile, a reflection cup is integrally molded by silicon, and has very good reliability.
Description
Technical field
The present invention relates to light source field, particularly relate to the manufacture method of Wavelength converter, reflector and Wavelength converter.
Background technology
Current, light source technology has been applied to numerous areas, and applying maximum light sources is Halogen lamp LED and fluorescent lamp.The maximum problem of these light sources is luminance shortage.In recent years, LED light source development rapidly, utilizes blue LED to excite the yellow fluorescent powder that is coated on LED surface to produce white light, and this light source has started on market universal.But problem is that the power of single LEDs light source is lower, still has the problem of luminance shortage.
And high-luminance light source domain, conventional is high-pressure sodium lamp and xenon source, and such light source relies on ultrashort lamp arc and has very high brightness (energy density), but problem is its life-span, only has about 1000 hours, and use cost is very high.
Occurred at present a kind of semiconductor light sources, its structure as shown in Figure 1.The exciting light 121 that excitation source (not shown in FIG.) sends is incident in the refraction of lens 103 process lens 103 and focuses on phosphor powder layer 801 through the transmission of light splitting optical filter 111.Collimation being collected by lens 103 from the Stimulated Light 122 of phosphor powder layer 101 outgoing, through the reflection of light splitting optical filter 111 and finally outgoing.In this light source, light splitting optical filter 111 transmission exciting lights reflect Stimulated Light simultaneously, its role is to the light path of exciting light and Stimulated Light to be separated.If this light splitting optical filter not, thereby Stimulated Light will all cause serious light loss to the outgoing of excitation source direction.
In actual applications, often with a plurality of excitation sources, provide exciting light.Now the problem of this light source is, multi beam exciting light produces a plurality of light sources on phosphor powder layer 801, need the position of accurate each hot spot of adjusting to make it overlapping or mutually draw close, if do not add, control between each hot spot and may disperse, this will cause the degradation of energy of light source density.In actual production, the fine adjustment of hot spot is difficult to realize automation, so yield low cost is high, is not suitable for large batch of production.
Summary of the invention
The present invention proposes a kind of Wavelength converter, for receiving exciting light stimulated emission Stimulated Light, comprises silicon chip, and silicon chip comprises the first type surface perpendicular to silicon crystal <100> crystal orientation; On first type surface, have square or rectangular opening, in this opening internal corrosion, have conical pit, the sidewall of this conical pit comprises four faces, and these four faces are respectively perpendicular to the <111> crystal orientation of silicon crystal; Sidewall and the bottom of conical pit are coated with reflectance coating; Also comprise wavelength conversion layer, wavelength conversion layer depends on the bottom of conical pit.
The present invention also proposes a kind of light source, comprises excitation source, and excitation source is used for launching exciting light; Also comprise above-mentioned Wavelength converter, exciting light is incident in the opening of conical pit and is finally incident in wavelength conversion layer with special angle; Also comprise the light-dividing device between excitation source and Wavelength converter light path, for the light path of Stimulated Light that wavelength conversion layer is sent and the light path of the exciting light of incident, separate; Light-dividing device is light splitting optical filter, this light splitting optical filter transmission exciting light and reflection Stimulated Light, or reflection exciting light and transmission Stimulated Light; Or, light-dividing device is reflection unit with holes, this reflection unit has the reflecting surface of plane or curved surface, hole is positioned at reflecting surface, exciting light is from the hole transmission of reflection unit and be incident in the opening of conical pit, Stimulated Light is incident in reflecting surface, and the part being wherein incident in beyond the hole of reflecting surface is reflected; Or light-dividing device is small reflector, exciting light is incident in small reflector and by its reflection, is incident in the opening of conical pit, and most of Stimulated Light is from small reflector outgoing around.
The present invention also proposes a kind of light source, comprises excitation source, and excitation source is used for launching exciting light; Also comprise above-mentioned Wavelength converter, exciting light is incident in the opening of conical pit and is finally incident in wavelength conversion layer with special angle; From the light of the opening incident of conical pit, have the first angular range, the light in this angular range can and arrive wavelength conversion layer through conical pit, and the light outside this angular range can not pass conical pit; The first angular range is divided into inner region and outskirt, and the angle of outskirt is greater than the angle of inner region; Exciting light is incident in the opening of conical pit to belong to the incident angle of outskirt; Also comprise the light exit that is positioned at Wavelength converter light path rear end, the scope of light exit cover conical pit inner region emergent light optical channel and do not cover the optical channel of the outskirt emergent light of conical pit.
The present invention also proposes a kind of reflector, it is characterized in that, comprises silicon chip, and silicon chip comprises the first type surface perpendicular to silicon crystal <100> crystal orientation; On first type surface, there is square or rectangular opening, in this opening internal corrosion, there is bellmouth, this bellmouth penetrates silicon chip, and the sidewall of this bellmouth comprises four faces, and these four faces are respectively perpendicular to the <111> crystal orientation of silicon crystal and be all coated with reflectance coating.
The present invention also proposes a kind of Wavelength converter, be used for receiving exciting light stimulated emission Stimulated Light, comprise wavelength conversion layer and substrate, wavelength conversion layer comprises relative first surface and second, the first surface of wavelength conversion layer depends on the first surface of substrate, and the light that send for wavelength conversion layer on this surface has reflectivity; Also comprise above-mentioned reflector, this reflector is positioned at second side of wavelength conversion layer, and reflector has relative large mouthful and osculum, and the opening of reflector on silicon chip first type surface is large mouthful, bellmouth is osculum at the relative lip-deep opening of first type surface, and this low profile is to wavelength conversion layer; Exciting light is incident in the large mouthful of reflector and from the osculum outgoing of reflector and be finally incident in wavelength conversion layer, and the Stimulated Light that wavelength conversion layer sends or Stimulated Light are collected by the osculum of reflector with the remaining mixed light that there is no an absorbed exciting light and finally from the large mouth outgoing of reflector.
The present invention also proposes a kind of manufacture method of Wavelength converter, comprises the following steps:
A) at <100> Surface machining of silicon wafer mask pattern, the window portion of mask pattern is divided into square or rectangular, one side and this square or rectangular be parallel to <110> crystal orientation;
B) use anisotropic etchant to corrode this <100> silicon chip, make to form at least one etch pit at the silicon chip surface corresponding to window part of mask pattern;
C) in sidewall and the bottom of at least one etch pit, plate reflectance coating;
D) in the bottom of at least one etch pit, apply wavelength conversion layer.
In Wavelength converter of the present invention, reflector and light source, as long as exciting light is incident in the opening of conical pit with suitable incidence angle, just can finally be incident in wavelength conversion layer, this has effectively been avoided each to excite the dispersion of hot spot.Reflector is one-body molded by silicon simultaneously, and reliability is fine.
Accompanying drawing explanation
Fig. 1 has represented the structural representation of the light source of prior art;
Fig. 2 has represented the structural representation of the first embodiment of light source of the present invention;
Fig. 3 has represented the operation principle of reflector
Fig. 4 has represented the structural representation of another embodiment of light source of the present invention;
Fig. 5 has represented the structural representation of another embodiment of light source of the present invention;
Fig. 6 has represented the structural representation of another embodiment of light source of the present invention;
Fig. 7 a to 7d has represented a different views of giving an example of reflector piecemeal in the present invention;
Fig. 8 a to 8d has represented another different views of giving an example of reflector piecemeal in the present invention;
Fig. 9 a has represented the assembling top view of reflector of the present invention;
Fig. 9 b has represented the assembling top view of two adjacent reflectors;
Figure 10 a to 10d has represented another different views of giving an example of reflector piecemeal in the present invention;
Figure 11 a and 11b have represented two of assembling top view of reflector piecemeal of Figure 10 a to 10d for example;
Figure 12 a and 12b represented reflector and wavelength conversion layer in the present invention two kinds of position relationships for example;
Figure 13 a and 13b have represented two kinds of possible structures of wavelength conversion layer;
Figure 14 has represented the flow chart of a kind of painting method of wavelength conversion layer of the present invention;
Figure 15 has represented the structural representation of another embodiment of Wavelength converter of the present invention;
Figure 16 has represented the analogue data of the performance of Wavelength converter shown in Figure 15.
The specific embodiment
The structure of the light source of the first embodiment of the present invention as shown in Figure 2.This light source activation light source (not shown in FIG.) and Wavelength converter, this Wavelength converter comprises wavelength conversion layer 201 and substrate 202, wavelength conversion layer 201 comprises relative first surface and second.In Fig. 2, first surface is the left-hand face of wavelength conversion layer 201, and the second face is the right lateral surface of wavelength conversion layer.The first surface of wavelength conversion layer 201 depends on the first surface 202a of substrate, the light that this surface 202a sends for wavelength conversion layer 201 has reflectivity, so light (Stimulated Light that comprises the stimulated emission of wavelength conversion layer own from wavelength conversion layer towards substrate outgoing, and/or remaining exciting light) can be reflected back wavelength conversion layer by this first surface 202a, and final second outgoing from wavelength conversion layer.Therefore, due to the existence of substrate, all can be from its second outgoing from the light of wavelength conversion layer outgoing.Particularly point out, in the following description, the emergent light of wavelength conversion layer refers to the Stimulated Light of the stimulated emission of wavelength conversion layer own, or Stimulated Light and there is no the mixed light of absorbed remaining exciting light.
Wavelength converter also comprises that the sidewall that is positioned at second side of wavelength conversion layer is coated with the reflector 203 in reflecting layer, reflector has relative large mouth 203a and osculum 203b, osculum 203b is towards wavelength conversion layer 201, exciting light 221 is incident in the large mouthful 203a of reflector with special angle and from the osculum 203b outgoing of reflector and be finally incident in wavelength conversion layer 201, and the Stimulated Light that wavelength conversion layer 201 sends or Stimulated Light are collected by the osculum 203b of reflector with the remaining mixed light that there is no an absorbed exciting light and finally from the large mouth 203a outgoing of reflector.
The operation principle of reflector is carried out special explanation in Fig. 3.In Fig. 3, from the light of the large mouthful 303a incident of reflector 303 can not be all from the osculum 303b outgoing of reflector 303, this is to meet " optical extend conservation " principle in optics.The light that is incident in the large mouthful 303a of reflector 303 has the first angular range, and the light in this angular range can be through reflector 303 and from the osculum 303b outgoing of reflector, the light outside this angular range can not pass reflector 303.According to " optical extend conservation " principle, light beam is constant at large mouthful and the area at osculum place and the product of lighting angle Sine-squared of reflector, that is:
S
large mouthfulsin
2q
large mouthful=S
osculumsin
2q
osculum(1)
S in formula
large mouthfuland S
osculumrepresent respectively the area at large mouth and osculum place, Q
large mouthfuland Q
osculumrepresent respectively the luminous half-angle at large mouth and osculum place.
In the present embodiment, reflector for from large mouthful 203a, receive exciting light and by it from osculum 203b outgoing, simultaneously also for from osculum 203b reception Stimulated Light and by it from the outgoing of large mouth.Obviously, no matter which kind of acts on, and the lighting angle of osculum 203b place light is half-angle 90 degree to the maximum.Therefore specific to Fig. 3, the luminous half-angle in osculum 303b place is 90 degree, due to the area S of large mouthful 303a
large mouthfulbe greater than osculum 303b area S
osculum, so the luminous half-angle Q at large mouthful 303a place
large mouthfulmust be less than 90 degree.This should go to understand from two angles.On the one hand, this explanation from the half-angle of wavelength conversion layer transmitting be the Stimulated Light of 90 degree after reflector osculum is collected during from large mouthful of outgoing of reflector the half-angle of its light beam will be less than 90 degree, be that the angle of divergence is compressed, visible reflector has certain collimating effect to the light beam of osculum incident.For example, if the length of side of large mouthful of square is 2 times of the length of side of square osculum, from the luminous half-angle of the Stimulated Light of large mouthful of outgoing of reflector, will be 30 degree, 90 degree when from the incident of reflector osculum.On the other hand, this also illustrates the exciting light that is incident in large mouthful of reflector with special angle, and its incident angle can not exceed a specific angular range, and the exciting light that exceeds this angular range cannot be by the system of this reflector and from osculum outgoing.For example, in Fig. 3, low-angle light 321 can be directly through reflector and without any reflection, 322 of the light that angle is slightly large go out to be shot out from the osculum 303b of reflector through primary event, and angle compared with 323 of large light, the final large mouthful of 303a from anti-cup after multiple reflections has occurred in reflector and reflected again and can not pass reflector.This specific angular range of large mouthful is also calculated by formula (1) above, only need to set Q
osculumbe 90 degree, then bring the Area Ratio of large mouth and osculum into, just can obtain Q
large mouthful, this numerical value is exactly the maximum angle that large mouth can receive.
In the embodiment shown in Figure 2, also comprise the light-dividing device 211 between excitation source and Wavelength converter light path, for the light path of Stimulated Light 222 that wavelength conversion layer is sent and the light path of the exciting light of incident 221, separate.Specifically, light-dividing device 211 is light splitting optical filters, this light splitting optical filter transmission exciting light and reflection Stimulated Light.As we can see from the figure, if there is no light-dividing device 211, the light path of Stimulated Light 222 will overlap with exciting light 221, and Stimulated Light 222 will be incident in excitation source like this, and this will cause huge loss.Obviously in actual applications, light splitting optical filter reflection exciting light and transmission Stimulated Light are also fine.
Compare with the light-source structure shown in Fig. 1, with reflector, replaced lens in the present embodiment and collected Stimulated Light.Its benefit is, owing to being incident in exciting light that reflector is large mouthful as long as thereby angle is suitable for that be incident in wavelength conversion layer from the osculum outgoing of reflector surely and the corresponding position of osculum, this problem with regard to effectively having avoided the exciting light of a plurality of excitation source transmittings too to disperse at the formed hot spot of wavelength conversion layer: as long as control the large mouth that a plurality of exciting lights are incident in reflector, these exciting lights formed hot spot one on wavelength conversion layer is established a capital in the corresponding scope of osculum of reflector, this also helps these exciting lights and on wavelength conversion layer, forms uniform hot spot simultaneously, this light conversion efficiency to wavelength conversion layer is very helpful.Use another benefit of reflector to be, from major part the light of wavelength conversion layer outgoing first after the reflection of reflector sidewall again from large mouthful outgoing, this process has the effect of even light and shaping, makes from the light of large mouthful outgoing more evenly, and shape is identical with the shape of the large mouth of reflector.In general, large mouthful of reflector and the shape of osculum are identical, for example, be all circle or rectangle or square.This is very useful in practice, and for example, when the light that light source need to be sent focuses on a fibre bundle entrance, fibre bundle entrance is all circular, now uses reflector most effective with circular large mouthful; And in Projection Display, display chip is all rectangular, for example length-width ratio is the rectangle of 4:3 or 16:9, if now the large mouth of reflector is for having the rectangle of identical aspect ratio, system effectiveness is now the highest.
In the present embodiment, light-dividing device 211 is light splitting optical filter.In fact light-dividing device can also be other Optical devices, and other embodiment of the light source of Fig. 4 and Fig. 5 has shown giving an example of these light-dividing devices.For example, in Fig. 4, light-dividing device is reflection unit 411 with holes, this reflection unit 411 has the reflecting surface 411a of plane, hole 411b is positioned at reflecting surface 411a, exciting light 421 is from the hole 411b transmission of reflection unit and be incident in large mouthful of reflector, Stimulated Light 422 is incident in reflecting surface 411a, and the part being wherein incident in beyond the hole of reflecting surface is reflected.Therefore the area that accounts for reflecting surface 411a due to hole 411b is very little, and most of Stimulated Light can be reflected, and very little from the ratio of the Stimulated Light of hole 411b transmission, its loss is negligible.
In the light-source structure shown in Fig. 4, reflecting surface 411a is plane, and in fact reflecting surface can be also curved surface, and Stimulated Light just can realize other optics object when being reflected by this curved-surface reflection side like this, for example further collimation or focusing.
In the light-source structure shown in Fig. 5, light-dividing device is small reflector 511, and exciting light 521 is incident in small reflector 511 and by its reflection, is incident in the large mouth of reflector, and most of Stimulated Light 522 is from small reflector 511 outgoing around.The area ratio of light path that accounts for whole Stimulated Light due to the area of small reflector is very little, is therefore incident in small reflector by the Stimulated Light of its reflection seldom, and this part light loss often can be accepted.
Than the light-source structure shown in Fig. 2, the benefit of the light-source structure shown in Fig. 4 and Fig. 5 is, unabsorbed residual excitation light also can outgoing, and this part energy can not lose, helpful to the improved efficiency of light source.For example, exciting light is used blue light, and wavelength conversion layer is excited reflect yellow, the gold-tinted of Stimulated Light and remainingly there is no the mixed light outgoing of absorbed exciting light blue light and form white light now, and this has met a lot of application scenarios for the demand of white light.
In the light-source structure shown in Fig. 2, Fig. 4 and Fig. 5, all the light path of Stimulated Light and exciting light must be distinguished with light-dividing device, but in fact also light-dividing device can be do not used, this light source at Fig. 6 is explained in giving an example.
In the light-source structure shown in Fig. 6, wavelength conversion layer 601 depends on substrate 602, and 603 of reflectors are positioned at second (upper surface) side of wavelength conversion layer 601.Excitation source 604 and 605 is also fixed on substrate 602, and excitation source and wavelength conversion layer common substrate can be so that light-source structure be more compact like this.In fact, excitation source can be more than two, if desired many excitation sources, and preferred these excitation sources are centered around wavelength conversion layer 601 and make more compact structure around.
Due to excitation source and wavelength conversion layer common substrate, the exciting light that excitation source sends so just can not directly be incident in large mouthful of reflector.Take excitation source 604 as example.The exciting light 624 that excitation source 604 sends is incident in large mouthful of reflector through the reflection of speculum 607, the incidence angle of exciting light can be controlled.If have the first angular range from the light of the large mouthful incident of reflector, the light in this angular range can be through reflector and from the osculum outgoing of reflector, the light outside this angular range can not pass reflector.The concrete numerical value of this first angular range can obtain in formula (1) above and relevant explanation, no longer repeats herein.The first angular range is divided into inner region and outskirt, and the angle of outskirt is greater than the angle of inner region.The transmission direction of controlling exciting light makes it to belong to the incident angle of outskirt, be incident in the large mouth of reflector.
Light source in Fig. 6 also comprises the light exit 609 that is positioned at reflector 603 light path rear ends, the scope of light exit cover reflector inner region emergent light optical channel and do not cover the optical channel of the outskirt emergent light of reflector.
In the present embodiment, the first angular range of reflector is exactly to allow that light is from the angular range of osculum outgoing.The first angular range is divided into inner region and outskirt, and the angle of outskirt is greater than the angle of inner region.The exciting light that excitation source 604 sends is incident in the large mouth of reflector 603 after speculum 607 reflections, and its incident angle belongs to the outskirt of reflector; This part exciting light can and be incident in wavelength conversion layer 601 and produces Stimulated Light from the osculum outgoing of reflector; Stimulated Light or Stimulated Light and there is no the mixed light of absorbed residual excitation light from second outgoing collected by the osculum of reflector of wavelength conversion layer, all light of collecting are all able to outgoing from large mouthful of 403b of reflector.This part emergent light is divided into two parts according to angle difference: the part in inner region and the part in outskirt.The light exit 609(of this light source is expressed as lens 609 in the drawings) be positioned at reflector light path rear end, the scope of light exit cover reflector inner region emergent light optical channel and do not cover the optical channel of the outskirt emergent light of reflector.Specifically, the optical channel of inner region emergent light refers to the optical channel that the angle of emergence is less, and the optical channel of outskirt emergent light refers to the optical channel that the angle of emergence is larger.And light exit is positioned at the center of optical axis, so it can optionally cover from some small angle ranges of large mouthful of outgoing of reflector, therefore can make the angular range that light exit is corresponding consistent with the angular range of the inner region of reflector by controlling the size (being exactly the pore size of controlling lens 609 in the present embodiment) of light exit, the scope of light exit just covers the optical channel of the inner region emergent light of reflector, so just can make the emergent light of reflector inner region part be able to from light exit outgoing.
Easily understand, the lens at light exit place, except itself is exactly light exit, can also play other optical effect, for example further collimation or focusing.Certainly, if do not need these optical effects, light exit also can not arrange lens, for example, a clear plate glass is only set.
Therefore, the bore of light exit is corresponding to the optical channel (the namely inner region of reflector) of Stimulated Light, and it does not cover the optical channel (the namely outskirt of reflector) of exciting light, and the Stimulated Light that is so is just separated with the light path of exciting light.Although partially-excited light can be incident in excitation source by the outskirt of reflector, this part energy seldom, often negligible in practical application.For example, excitation source is used LASER Light Source, and the light beam of LASER Light Source is very narrow, and optical extend is very little, so the angular range of its shared outskirt is also very little, and this also just makes the ratio of the Stimulated Light of losing at outskirt very low.Certainly, using laser is preferred scheme as excitation source, and other light source also can be used.
In the practical application of described several light sources, reflector has several implementation methods in the above.After directly using ribbon moulding, plate a reflectance coating, but because the size of reflector is in the present invention less, ribbon is difficult to realize.Another kind is the reflector that adopts solid construction, the photoconductive tube of glass for example, and this large one end of bore, photoconductive tube one end bore is little, and light can be in sidewall generation total reflection when portion propagates within it, this has just formed a kind of reflector.Because the efficiency of total reflection approaches 100%, so the efficiency of the reflector of solid construction is very high, but also very high to the requirement of assembly technology, because must remain the smooth of its sidewall and there is no impurity.Finally, can also adopt the reflector of hollow-core construction.This reflector is to make like this: four speculums are cut into suitable shape, then at edge the reflector of bonding formation aperture square or rectangular.The problem of this reflector is, can not manufacture the reflector of circular bore, and this has just limited the range of application of light source.Meanwhile, thereby exciting light or Stimulated Light have sub-fraction, from the edge between speculum, spill by glue and absorb, when the energy of exciting light is very large, thereby glue aging inefficacy fast finally causes the disintegration of reflector.
Propose in the present invention a kind of manufacture method and structure of reflector of new hollow-core construction, it can solution must not manufacture the problem of the reflector of circular bore.In the present invention, reflector comprises at least two piecemeals, and each piecemeal comprises a reflection function face, and each reflection function face amalgamation is the reflector sidewall of complete together.Below, first the reflector with rectangular aperture illustrates, then the reflector with circular bore describes.
For the reflector of rectangular aperture, shown in the schematic diagram 7a to 7d of its each piecemeal.Wherein Fig. 7 a is front view, and the trapezoidal faces shown in figure is exactly reflection function face, and it is a face of rectangular aperture reflector sidewall.Fig. 7 b is right view, Fig. 7 c is top view, and Fig. 7 d is 3-D view, in Fig. 7 d, face 751 is reflection function face (being the face shown in Fig. 7 a), on this face, be coated with reflectance coating, the limit of large mouthful that its trapezoidal longer end 751a is reflector, a limit of the osculum that its trapezoidal shorter end 751b is reflector.
Utilize four such piecemeals, its reflection function face separately is mutually spliced and can obtain a complete reflector, as shown in Fig. 9 a.Fig. 9 a is the view that reflector looks over along its optical axis direction, and it is corresponding to the top view of each piecemeal.In figure, dash area is the top view of a piecemeal of reflector as shown in Figure 7 c, visible four similar piecemeals just can form at middle part the reflector of a square or rectangular, the corresponding reflector sidewall in one side that the reflection function face of each piecemeal is light-emitting window.Be appreciated that the reflector that will form square bore, the reflection function face of four piecemeals is identical, and if to form the reflector of rectangular bore, the reflection function face of relative two corresponding two piecemeals in limit of rectangle is identical.
Easily understand, in reflector, in each piecemeal, reflection function face is owing to being a part for reflector sidewall, and its shape is crucial; Simultaneously in each piecemeal of reflector, the other parts of reflection function face are unessential, because these parts do not have optic effect at all, its design is also to have suitable arbitrariness, and the profile of the bar shaped shown in Fig. 7 a to 7d is one and is not construed as limiting for example.
Reflector shown in Fig. 9 b is the extension of the reflector of Fig. 9 a.Fig. 9 b has represented two reflector 903a and 903b, and these two adjacent reflectors have a shared piecemeal, i.e. dash area in figure.Easily understand, concerning this piecemeal, it has two reflection function faces, is respectively a face of the sidewall of reflector 903a and 903b.The effect of two adjacent reflectors is: these two corresponding wavelength conversion layers of reflector have different compositions, for example use different material for transformation of wave length to make the color of Stimulated Light different, or it is different from the ratio of exciting light to have changed the use amount of material for transformation of wave length or Stimulated Light that working concentration makes outgoing, can select as required so suitable reflector and wavelength conversion layer to be positioned under exciting of exciting light, with this, control color or the colour temperature of emergent light.In this case, light source also comprises drive unit, for driving these at least two Wavelength converters jointly to move, the Wavelength converter of exciting light institute incident can be switched.The switchable effect that is appreciated that adjacent two reflectors has a shared piecemeal with it be feature independently, even without shared piecemeal, also can use method of the present invention to manufacture two adjacent reflectors.
The shape of reflection function face that is appreciated that each piecemeal of reflector in conjunction with Fig. 7 a to Fig. 7 d and Fig. 9 a with regard to final decision the effective reflector type of reflector.Fig. 7 a to 7d has represented a kind of reflector, and its bore is rectangle, and each face of its sidewall (the namely reflection function face of this each piecemeal of reflector) is plane.In fact, the reflection function face of each piecemeal of reflector can also be the curved surface of indent on optical axis direction, and as shown in Fig. 8 a to 8d, wherein Fig. 8 a is front view, and Fig. 8 b is left view, and Fig. 8 c is top view, and Fig. 8 d is 3-D view.Wherein easily see, reflection function face 851 is one, and at the curved surface of optical axis direction (being above-below direction in the drawings) indent, formed like this reflector is actually a compound optical collector, and the efficiency that it compares the reflector shown in Fig. 7 a to 7d is higher.
The following describes the reflector that adopts method of the present invention how to realize circular bore.Figure 10 a to Figure 10 d has represented a piecemeal of circular bore reflector, and wherein Figure 10 a is front view, and Figure 10 b is left view, and Figure 10 c is top view, and Figure 10 d is 3-D view.The reflection function face 1051 of this piecemeal is a part for the sidewall of circular bore reflector, and in fact it is also a part for a round platform sidewall.An edge 1051a of reflection function face 1051 is the partial arc of large mouthful of reflector, the partial arc that another edge 1051b on the other side is reflector osculum.Easily understand, with reference to the embodiment of figure 8a to 8d, in the reflector of Figure 10 a to 10d, the reflection function face of each piecemeal can be also the curved surface of indent on optical axis direction, and what form like this is the compound optical collector of circular bore, has higher efficiency.
Figure 11 a and Figure 11 b have represented the top view of two kinds of reflectors.Reflector shown in Figure 11 a is comprised of four piecemeals, and in figure, dash area represents one of them piecemeal, the corresponding reflector sidewall of the quartering that the reflection function face of each piecemeal is light-emitting window.Reflector shown in Figure 11 b is comprised of three piecemeals, and in figure, dash area represents one of them piecemeal, the corresponding reflector sidewall of trisection that the reflection function face of each piecemeal is light-emitting window.In the same way, reflector comprises n piecemeal, and n is more than or equal to 2, the corresponding reflector sidewall of n decile that the reflection function face of each piecemeal is light-emitting window.The reflection function face of each piecemeal is identical like this, and this is conducive to reduce the cost of processing.Certainly, the reflection function face of each piecemeal also can be different, as long as they can be spliced to form reflector mutually.Be appreciated that with reference to figure 9a and Fig. 9 b, Figure 11 a or Figure 11 b also can be for the manufacture of two adjacent reflectors, and this is repeat specification no longer.
So far the manufacture method that reflector of the present invention has solved traditional hollow-core construction reflector can not be manufactured the problem of circular bore reflector.Further, the manufacture method of reflector of the present invention can also solve the bad problem of reliability of traditional hollow-core construction reflector.In minute Wavelength converter of invention, also comprise clamping device, each piecemeal of reflector is relative with clamping device fixing respectively.For example clamping device is a flat board, retains large mouthful of slightly large hole of a relative aperture reflector on flat board, and each piecemeal of reflector is fixedly installed in the surrounding in this hole and makes large mouthful of reflector to aim at this hole.Certainly this just for example, can use multiple mechanical means or adhering method that each piecemeal is relative with clamping device fixing respectively in practical application.Like this, the seam crossing of each piecemeal does not just need bonding, has therefore just solved the problem of reliability.
Except using clamping device, can also use another kind of method to solve integrity problem, that is exactly that each piecemeal of reflector is individually fixed on the first surface of substrate or wavelength conversion layer second.Take the reflector shown in Fig. 7 d as example.Each piecemeal of this reflector also comprises an installed surface 752, the installed surface of each piecemeal of reflector is individually fixed on the first surface of substrate or wavelength conversion layer second, for example be stained with or adopt mechanical system to fix, so just do not need the part of other fixedly use, avoided using bonding agent at the seam crossing of each piecemeal yet simultaneously.Figure 12 a and Figure 12 b have represented to use in the situation of fixing means of this reflector, the position relationship that reflector is different from two kinds of wavelength conversion layer.In Figure 12 a, first wavelength conversion layer 1201 is coated on substrate 1202, then the installed surface of reflector 1,203 1252 is fixed on second of wavelength conversion layer.In Figure 12 b, first reflector 1203 is fixed on the first surface of substrate 1202, then wavelength conversion layer 1201 is coated on to the bottom of reflector 1203.These two kinds of methods are all fine.Wavelength converter in Figure 12 b, with respect to Figure 12 a, its benefit is to have saved material for transformation of wave length, and reflector be fixed on substrate 1202 also can be more firm.
May there is such problem in the Wavelength converter in Figure 12 b: the bottom surface of reflector 1203 very little during fabrication, and wavelength conversion layer is difficult to manufacture in its bottom.Through experiment inventor, solved this problem.The step following (with reference to the flow chart of Figure 14) of inventor institute using method:
(a) wavelength is changed to particle (for example fluorescent material) and be mixed to form slurry with carrier.Wherein carrier is in a liquid state, for carrying wavelength conversion particle.Carrier can be selected the material that silica gel, epoxy resin or waterglass etc. can be curing, also can select silicone oil etc. can be in following process removed material.
(b) slurry splashed into reflector and at the bottom of cup, form pulp layer.Can carry out by instrument and equipment the amount of the slurry that accurate control points enters.
(c) utilize acceleration generating apparatus, make substrate, reflector and pulp layer wherein all have acceleration a, acceleration a has at least one to be not less than 15m/s
2component perpendicular to the first surface of substrate and the direction of this component, be to point to pulp layer from substrate.Preferably, acceleration a is perpendicular to the first surface of substrate, and so effective acceleration is maximum.What acceleration generating apparatus was the most frequently used can select centrifugal device, and it makes substrate, reflector and pulp layer wherein rotate to produce centripetal acceleration a around an axle center, and pulp layer is with respect to the more close axle center of substrate.
(d) post processing forms wavelength conversion layer.The method of post processing is corresponding to different carrier in step (a), for example carrier is used silica gel or epoxy resin, post processing just need to be carried out ultraviolet light or be heating and curing, if carrier is used waterglass, post processing need to be carried out dry solidification, if and carrier is selected silicone oil, post processing refers to and increases temperature silicone oil oxidation removal.
Step (a) and (b) utilize carrier that wavelength is changed to particle and put into reflector, the amount of its medium wavelength conversion particle can accurately be controlled.Then by acceleration generating apparatus, produce acceleration a, this acceleration makes wavelength conversion particle sink fast and in bottom, form fine and close one deck, and then after post processing, forms wavelength conversion layer.The wavelength conversion layer forming like this, due to very fine and close, so thermal conductivity is fine, can very fast conducting heat on substrate.And in order further to improve the thermal conductivity of wavelength conversion layer, can also be in step (a), by heat conduction particle and/or flexible Heat Conduction Material changes particle with wavelength and carrier is mixed together.Heat conduction particle refers to the particle of high-termal conductivity, such as but not limited to diamond particles, aluminum nitride particle, alumina particle, silicon-carbide particle etc.Flexible Heat Conduction Material refers to Graphene or carbon fiber, and their softnesses and thermal conductivity are strong, easily between the particle of solid, forms the bridge of heat conduction.Preferably, wavelength conversion particle and/or heat conduction particle are spherical or elliposoidal, and the spacing between particle is minimum like this, and the thermal conductivity of the wavelength conversion layer forming is like this better.
In actual applications, may there is such demand: a kind of material for transformation of wave length can not meet the requirement of user to light, need two kinds of even more kinds of material for transformation of wave length to form wavelength conversion layer.Certainly the simplest method is exactly that different material for transformation of wave length is mixed, but this may bring a problem, be exactly between different wave length transition material, to occur the effect of absorption mutually, for example red fluorescence powder can absorb the green glow that green emitting phosphor sends.The light conversion efficiency of the reduction wavelength conversion layer that so certain meeting is serious.A kind of method of solution is, as shown in Figure 13 a, in light-struck region 1301 that is excited on wavelength conversion layer, comprising at least two adjacent subregion 1301a and 1301b, the material for transformation of wave length that this two sub regions is used is different.So both can use at least two kinds of material for transformation of wave length simultaneously, also can avoid occurring between them mutual absorption.In example shown in Figure 13 a, two region 1301a represent two kinds of regions of using different material for transformation of wave length, these two kinds of mutual cross arrangements in region with 1301b.And two region 1301a and 1302b in Figure 13 b represented another kind of arrangement mode.Be appreciated that arrangement mode is a lot, do not need to enumerate herein.Certainly should be in this way, the subregion of the two or more kinds of also can arranging.
In addition, in order to solve the integrity problem of reflector, the present invention also proposes another kind of method and manufactures reflector.In Wavelength converter as shown in figure 15, comprise substrate 1502, substrate is <100> silicon chip, and the <100> crystal orientation of silicon crystal is perpendicular to its surface, and this surface is called the first type surface of this silicon chip in the present invention.At first type surface, make mask (mask) figure, this mask graph comprises two parts, and a part is used mask material to cover silicon chip first type surface, and this part is called shield portions, other parts do not have mask material and silicon chip first type surface are exposed, and these parts are called window part.The mask material often using comprises silica and silicon nitride, but also can use other material.The method of manufacturing mask pattern is ripe semiconductor technology, first at silicon chip surface, plate complete mask material layer, apply again one deck photoresist thereon, after utilizing the masterplate of a special pattern to expose to this layer photoetching glue, using washing lotion that part photoresist is washed off and exposed portions serve mask material layer, finally in corrosive liquid, part mask material is being eroded and form mask pattern.Because this is ripe technique, do not need to be deep into the details of this technique herein, those skilled in the art easily understand the manufacture method of mask pattern.
In mask pattern of the present invention, window portion is divided into square or rectangular, one side and square or rectangular be parallel to <110> crystal orientation.<100> silicon chip with mask pattern is placed in anisotropic etchant and is corroded, and this corrosive liquid is generally alkali corrosion liquid, for example KOH corrosive liquid.This corrosive liquid does not almost have corrosiveness to mask material, but there is anisotropic corrosiveness for silicon materials, along very fast perpendicular to silicon chip surface (along <100> direction) corrosion rate, and very slow along the <111> direction corrosion rate of silicon.Have like this two effects, first only in the window portion of silicon chip surface, divide and corrode, and this corrodes formed etch pit and can expose <111> face.If according to the crystal structure knowledge of silicon known expose completely <111> face this etch pit be rectangular pyramid shape; If control etching time, will retain a plane in etch pit bottom, the <100> face that this plane is silicon chip, now etch pit is truncated rectangular pyramids shape.That the etch pit of truncated rectangular pyramids shape or the etch pit of rectangular pyramid shape are all referred to as conical pit in the present invention.Face 1503 in Figure 15 is <111> faces, and <111> direction is perpendicular to face 1503.Because face 1503 is crystal face, therefore very level and smooth, be optical surface; Same conical pit bottom surface <100> face is also optically smooth face.So just on silicon chip 1502, formed a reflector, reflector main body is above-mentioned conical pit, it has the bore of square or rectangular, its sidewall comprises four faces (in figure, face 1503 is wherein two), and these four faces are respectively perpendicular to the <111> crystal orientation of silicon crystal.
Because the angle of <111> face in silicon crystal and <100> face is fixed, be 54.7 degree as shown in FIG., so the sidewall elevation angle of reflector is namely specific.The now bottom of reflector and sidewall plating reflectance coating, because sidewall and bottom are all that reflectivity after optically smooth face so plated film is high.Then in the bottom of reflector, apply wavelength conversion layer 1501, just can realize a complete Wavelength converter.In this Wavelength converter, substrate and reflector are one, also do not have any bonding agent, so reliability are splendid.Because silicon is good Heat Conduction Material, therefore the heat conductivility of whole Wavelength converter is fine.Obviously, the wavelength conversion layer 1501 of reflector bottom can be used the method manufacture of Figure 14.
In the embodiment shown in fig. 15, conical pit bottom is plane <100> face, and this is that premature termination corrodes and the face of formation.In fact can make corrosion proceed, conical pit bottom does not have plane but a sharp end like this, during wavelength conversion layer is just filled at the bottom of this point yet.Such benefit is that etching time is very easy to control, because corrode automatically and stops at the end as long as corrosion produces point.
After forming etch pit, can use another kind of corrosive liquid to remove mask material, if what dysgenic word the existence of certain mask material has, also can not remove.
Use the problem of the method for silicon chip manufacture reflector to be, the elevation angle of reflector sidewall is 54.7 degree of fixing, and this has limited the design freedom of reflector.In fact, this reflector can not be accomplished optical extend conservation, can not keep the constant of brightness, and brightness meeting declines.What Figure 16 represented is the simulation that inventor does the performance of this reflector, abscissa in figure is that the high H of reflector and reflector bottom length of side L(are shown in the symbol mark in Figure 15) ratio, choose the light collection angle of 40 degree, observe and collect the percentage of light energy and the percentage of brightness.Wherein the high H of reflector is defined as the upper surface of wavelength conversion layer apart from the distance at reflector top, and the length of side of reflector bottom is defined as at least one length of side of the upper surface of wavelength conversion layer.From Figure 16, along with the increase of H/L, the energy of collecting is rising, but relative brightness occurs obviously to decline; And considering energy and brightness, the numerical value of H/L should be more than or equal to 0.3 and be less than or equal to 1.As seen from Figure 16, in actual applications, in the predetermined situation of reflector bottom size, it is highly very important for selecting, and need between efficiency of energy collection and brightness, do balance.Certainly this can select according to the requirement of actual conditions, it is 1 even larger for example in application, to brightness less demanding, can selecting H/L, now can realize higher efficiency, if and very high to brightness requirement, must sacrifice certain efficiency and exchange for, it is 0.3 even less for example selecting H/L.And the scope of the conventional H/L that takes into account efficiency and brightness is to be more than or equal to 0.5 and be less than or equal to 0.7.
In wavelength reforming unit shown in Figure 15, silicon chip is not corroded and wears, and is exactly therefore to use the bottom surface of etch pit as the substrate of wavelength conversion layer.If plated film just can be realized an independent reflector again after in fact silicon slice corrosion being worn.This reflector obviously also has the feature that reliability is high, also can with wavelength conversion layer and one independently substrate be used in conjunction with, this can understand completely in conjunction with embodiment above.
The foregoing is only embodiments of the invention; not thereby limit the scope of the claims of the present invention; every equivalent structure or conversion of equivalent flow process that utilizes description of the present invention and accompanying drawing content to do; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.
Claims (10)
1. a Wavelength converter, for receiving exciting light stimulated emission Stimulated Light, is characterized in that:
Comprise silicon chip, silicon chip comprises the first type surface perpendicular to silicon crystal <100> crystal orientation; On first type surface, have square or rectangular opening, in this opening internal corrosion, have conical pit, the sidewall of this conical pit comprises four faces, and these four faces are respectively perpendicular to the <111> crystal orientation of silicon crystal; Sidewall and the bottom of described conical pit are coated with reflectance coating;
Also comprise wavelength conversion layer, described wavelength conversion layer applies or is filled in the bottom of described conical pit.
2. Wavelength converter according to claim 1, is characterized in that, the ratio of at least one length of side of the degree of depth of described conical pit and conical pit bottom is more than or equal to 0.3 and be less than or equal to 1.
3. Wavelength converter according to claim 2, is characterized in that, the ratio of at least one length of side of the degree of depth of described conical pit and conical pit bottom is more than or equal to 0.5 and be less than or equal to 0.7.
4. a light source, is characterized in that:
Comprise excitation source, excitation source is used for launching exciting light;
Also comprise the Wavelength converter described in any one in claims 1 to 3, exciting light is incident in the opening of conical pit and is finally incident in wavelength conversion layer with special angle;
Also comprise the light-dividing device between excitation source and Wavelength converter light path, for the light path of Stimulated Light that wavelength conversion layer is sent and the light path of the exciting light of incident, separate;
Described light-dividing device is light splitting optical filter, this light splitting optical filter transmission exciting light and reflection Stimulated Light, or reflection exciting light and transmission Stimulated Light; Or,
Described light-dividing device is reflection unit with holes, this reflection unit has the reflecting surface of plane or curved surface, described hole is positioned at reflecting surface, described exciting light is from the hole transmission of reflection unit and be incident in the opening of conical pit, described Stimulated Light is incident in reflecting surface, and the part being wherein incident in beyond the hole of reflecting surface is reflected; Or,
Described light-dividing device is small reflector, and described exciting light is incident in small reflector and by its reflection, is incident in the opening of conical pit, and most of Stimulated Light is from small reflector outgoing around.
5. a light source, is characterized in that:
Comprise excitation source, excitation source is used for launching exciting light;
Also comprise the Wavelength converter described in any one in claims 1 to 3, exciting light is incident in the opening of conical pit and is finally incident in wavelength conversion layer with special angle; From the light of the opening incident of described conical pit, have the first angular range, the light in this angular range can and arrive wavelength conversion layer through conical pit, and the light outside this angular range can not pass conical pit; The first angular range is divided into inner region and outskirt, and the angle of outskirt is greater than the angle of inner region; Described exciting light is incident in the opening of conical pit to belong to the incident angle of outskirt;
Also comprise the light exit that is positioned at Wavelength converter light path rear end, the scope of light exit cover conical pit inner region emergent light optical channel and do not cover the optical channel of the outskirt emergent light of conical pit.
6. a reflector, is characterized in that: comprise silicon chip, silicon chip comprises the first type surface perpendicular to silicon crystal <100> crystal orientation; On first type surface, there is square or rectangular opening, in this opening internal corrosion, there is bellmouth, this bellmouth penetrates silicon chip, and the sidewall of this bellmouth comprises four faces, and these four faces are respectively perpendicular to the <111> crystal orientation of silicon crystal and be all coated with reflectance coating.
7. a Wavelength converter, for receiving exciting light stimulated emission Stimulated Light, is characterized in that:
Comprise wavelength conversion layer and substrate, wavelength conversion layer comprises relative first surface and second, and the first surface of described wavelength conversion layer depends on the first surface of substrate, and the light that send for wavelength conversion layer on this surface has reflectivity;
Also comprise reflector according to claim 6, this reflector is positioned at second side of wavelength conversion layer, reflector has relative large mouthful and osculum, the opening of reflector on described silicon chip first type surface is large mouthful, described bellmouth is osculum at the relative lip-deep opening of first type surface, and this low profile is to wavelength conversion layer; Described exciting light is incident in the large mouthful of reflector and from the osculum outgoing of reflector and be finally incident in wavelength conversion layer, and the Stimulated Light that wavelength conversion layer sends or Stimulated Light are collected by the osculum of reflector with the remaining mixed light that there is no an absorbed exciting light and finally from the large mouth outgoing of reflector.
8. a manufacture method for Wavelength converter, is characterized in that, comprises the following steps:
At <100> Surface machining of silicon wafer mask pattern, the window portion of mask pattern is divided into square or rectangular, one side and this square or rectangular be parallel to <110> crystal orientation;
Use anisotropic etchant to corrode this <100> silicon chip, make to form at least one etch pit at the silicon chip surface corresponding to window part of mask pattern;
Sidewall and bottom plating reflectance coating at described at least one etch pit;
In the bottom of described at least one etch pit, apply or fill wavelength conversion layer.
9. the manufacture method of Wavelength converter according to claim 8, is characterized in that, at step b) after also comprise step e) remove mask pattern.
10. the manufacture method of Wavelength converter according to claim 8, is characterized in that, steps d) can be decomposed into following sub-step:
D1, wavelength is changed to particle and liquid carrier is mixed to form slurry;
D2, slurry is splashed into etch pit and forms pulp layer at the end, hole;
D3, utilize acceleration generating apparatus, make silicon chip and pulp layer all have acceleration a, acceleration a has at least one to be not less than 15m/s
2component perpendicular to the direction of silicon chip surface and this component, be to point to pulp layer from etch pit bottom;
D4, post processing are to solidify or to remove carrier.
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| WO2018184310A1 (en) * | 2017-04-05 | 2018-10-11 | 深圳市绎立锐光科技开发有限公司 | Fluorescent module and light source system |
| WO2020057299A1 (en) * | 2018-09-20 | 2020-03-26 | 深圳光峰科技股份有限公司 | Light source system and projection equipment |
| WO2020063160A1 (en) * | 2018-09-25 | 2020-04-02 | 深圳光峰科技股份有限公司 | Wavelength conversion material of high thermal conductivity |
| WO2021248375A1 (en) * | 2020-06-10 | 2021-12-16 | 重庆康佳光电技术研究院有限公司 | Display back plate and manufacturing method therefor |
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