CN103560326A - 0.5THz corrugated horn antenna and preparation method using MEMS technology - Google Patents

Abstract

The invention relates to a 0.5THz corrugated horn antenna and a preparation method using an MEMS technology. The 0.5THz corrugated horn antenna and the preparation method using the MEMS technology are applicable to a terahertz-band imaging system or a short-distance terahertz communication system. The 0.5THz corrugated horn antenna comprises an expanded horn, V-shaped corrugated grooves, locating grooves and a step on the throat portion of the horn, wherein compared with a waveguide, the horn can improve radiation efficiency and rotation symmetry of a directional diagram; the V-shaped corrugated grooves are used for cutting off a surface current, the gain is effectively increased, and influence of metal structures around the 0.5THz corrugated horn antenna on the performance of the 0.5THz corrugated horn antenna can be reduced; the locating grooves can ensure accurate alignment when installation butt joint of the 0.5THz corrugated horn antenna is carried out; due to the step on the throat portion of the horn, the design freedom of the structure of the horn can be remarkably improved, influence of the alignment error between an upper layer silicon chip and a lower layer silicon chip on the performance of the 0.5THz corrugated horn antenna can be reduced, and the processing yield is improved. According to the thinking design, the 0.5THz corrugated horn terahertz antenna designed and obtained through the thinking is good in applicability, an array can be easily formed, and fixation and testing can be easily carried out. The 0.5THz corrugated horn antenna works within the 450GHz-530GHz frequency band, a standing wave of the 0.5THz corrugated horn antenna is lower than 1.6, the in-band gain is larger than 15dB, and the maximum gain can reach 16.6dB.

Description

A kind of 0.5THz corrugated horn and the method for utilizing MEMS technique to be prepared

Technical field

A kind of method that the present invention relates to 0.5THz corrugated horn and utilize MEMS technique to be prepared, is applicable to terahertz wave band imaging system or short distance Terahertz communication system.

Background technology

THz imaging technology is the key areas of Terahertz Technology application, can be applicable to airport security inspection, product Non-Destructive Testing etc.At present, Terahertz focal plane imaging technology is one of focus of studying for terahertz imaging in the world.The general antenna adopting of Terahertz focal plane imaging system has flat helical antenna, horn antenna, single-stage or dipole antenna.At terahertz wave band, electromagnetic wavelength is very little, and antenna and passive device absolute dimension are little, are limited to material behavior and preparation technology, adopts conventional machining technique cannot meet the design of labyrinth or fine structure completely.Although be easy in the printing class antenna techniques such as flat helical antenna realize, the directionality of its directional diagram is poor, the radiation gain of antenna is lower.Horn antenna, as a kind of antenna of high directionality, is easy to form the pencil beam that gain is larger.Domestic machining horn antenna, receives that the restriction of processing technology is difficult to cover the frequency range of 0.5THz at present.Though can prepare by accurate mechanical processing technique the horn antenna of 0.5THz abroad, but cost is very high.

Summary of the invention

The object of the invention is a kind of method in order to propose 0.5THz corrugated horn and to utilize MEMS technique to be prepared.

A kind of 0.5THz corrugated horn of the present invention, this antenna is a cuboid, two sides adjacent at cuboid respectively have a detent, upper surface center position at cuboid has horn structure, the below of horn structure is waveguide, between horn structure and waveguide, with step, be connected, in the both sides of horn structure, respectively have two wave grooves; Wave groove is V-arrangement;

A kind of MEMS of utilization technique of the present invention is prepared the method for 0.5THz corrugated horn, and step is:

1) upper surface at upper strata silicon chip adopts KOH anisotropic etching processing horn structure and " V " shape wave groove;

2) lower surface at upper strata silicon chip adopts DRIE lithography detent;

3) upper surface at lower floor's silicon chip adopts DRIE lithography detent;

4) respectively gold is spattered in the surface of the surface of upper strata silicon chip and lower floor's silicon chip;

5) utilize upper strata silicon chip and the lower floor's silicon chip that gold-gold bonding technique obtains step 4) to combine.

6) by scribing, antenna element is separated, obtain processed finished products.

Beneficial effect

The present invention has adequately and reasonably utilized domestic existing MEMS preparation technology, and realized and there is high accuracy, high consistency, and lower-cost 0.5THz horn antenna.The step proposing and ripple struction can promote antenna gain significantly, reduce the impact of metal environment on antenna performance around of mismachining tolerance and antenna simultaneously.

Antenna of the present invention has proposed a plurality of structures with beneficial effect: the loudspeaker of expansion, and compare with waveguide and can improve radiation efficiency and directional diagram rotational symmetry; " V " shape wave groove, truncated table surface current, can reduce the antenna impact of metal structure on antenna performance around when effectively improving gain; Detent, can guarantee the exactitude position of antenna when docking is installed; The step of loudspeaker throat, can significantly improve the design freedom of horn structure, reduces the impact of the bit errors of upper and lower two-layer silicon chip on antenna performance, improves processed finished products rate.Terahertz antenna applicability by above-mentioned thinking Design and implementation is wide, is easy to form array, is easy to fixing and test.

Antenna of the present invention is operated in 450GHZ～530GHZ frequency band, and antenna standing wave is less than 1.6, and in band, gain is greater than 15dB, and highest-gain can reach 16.6dB.

Accompanying drawing explanation

Fig. 1 is overall schematic of the present invention;

Fig. 2 is structural representation of the present invention;

Fig. 3 is cross-sectional view of the present invention;

Fig. 4 is the voltage standing wave ratio curve of the embodiment of the present invention in 450GHz～530GHz frequency band;

Fig. 5 is the maximum gain curve of the embodiment of the present invention in 450GHz～530GHz frequency band;

Fig. 6 a is that the preferred embodiment of the present invention is at the E of 470GHz frequency face directional diagram;

Fig. 6 b is that the preferred embodiment of the present invention is at the E of 500GHz frequency face directional diagram;

Fig. 6 c is that the preferred embodiment of the present invention is at the E of 530GHz frequency face directional diagram;

Fig. 7 a is that the preferred embodiment of the present invention is at the H of 470GHz frequency face directional diagram;

Fig. 7 b is that the preferred embodiment of the present invention is at the H of 500GHz frequency face directional diagram;

Fig. 7 c is that the preferred embodiment of the present invention is at the H of 530GHz frequency face directional diagram;

Fig. 8 a E face directional diagram when W and L change that is the present invention at 500GHz frequency;

Fig. 8 b H face directional diagram when W and L change that is the present invention at 500GHz frequency;

Embodiment

Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.

Embodiment:

As shown in Figure 1, Figure 2, Figure 3 shows, a kind of 0.5THz corrugated horn, this antenna is a cuboid (8mm * 8mm * 0.8mm), and two sides adjacent at cuboid respectively have a detent, is mainly used in the fixed card slot of reserved under integral process and antenna mounting bracket; Upper surface center position at cuboid has horn structure, and loudspeaker actinal surface is of a size of 1.34mm * 1.02mm, with the angle with 54.7 °, silicon chip plane, shrinks, and the length of loudspeaker is 0.4mm; The below of horn structure is waveguide, waveguide model WR2.2, cross sectional dimensions is 0.56mm * 0.28mm), length is 0.4mm; Between horn structure and waveguide, with step, be connected, in the both sides of horn structure, respectively have two V-arrangement wave grooves, notch size is respectively 1.25mm * 0.25mm and 1.75mm * 0.375mm, with the angle with 54.7 °, silicon chip plane, shrinks.

Utilize MEMS technique to be prepared a method for 0.5THz corrugated horn, step is:

1) upper surface at upper strata silicon chip adopts KOH anisotropic etching processing horn structure and " V " shape wave groove;

2) lower surface at upper strata silicon chip adopts DRIE lithography detent;

3) upper surface at lower floor's silicon chip adopts DRIE lithography detent;

4) respectively gold is spattered in the surface of the surface of upper strata silicon chip and lower floor's silicon chip;

5) utilize upper strata silicon chip and the lower floor's silicon chip that gold-gold bonding technique obtains step 4) to combine.

6) by scribing, antenna element is separated, obtain processed finished products.

It is the silicon chip of 400 μ m that upper strata silicon chip and lower floor's silicon chip all adopt thickness;

Individual antenna outside dimension after scribing is W=8mm * L=8mm.Antenna structure outer surface after completing is gold.

The antenna obtaining is tested, obtained stationary wave characteristic, gain characteristic and the directional diagram of the embodiment of the present invention, and be drawn on respectively in Fig. 4, Fig. 5, Fig. 6 and Fig. 7.

The antenna of this embodiment is operated in 450GHz～530GHz frequency range, and standing-wave ratio is less than 1.6.Curve as shown in Figure 4.

The gain of the antenna of this embodiment in working frequency range is all greater than 15.5dB, and maximum gain can reach 16.6dB.Curve as shown in Figure 5.

The E face of the antenna of this embodiment and H face directional diagram all show excellent directionality, and minor level is lower.Directional diagram is by shown in Fig. 6 and 7.

In the present invention, after scribing, adopt larger die size (W * L) can have sufficient structure to fix for antenna as individual antenna structure, simultaneously can the impact of very effective reduction antenna mounting bracket on antenna performance.And as can be seen from Figure 8, owing to adopting " V " shape wave groove can make the variation of die size to a certain extent on almost not impact of antenna radiation performance.

The foregoing is only preferred embodiment of the present invention, every equalization of doing within the scope of the claims in the present invention changes and modifies, and all should belong to the covering scope of the claims in the present invention.

Claims (2)

1. a 0.5THz corrugated horn, it is characterized in that: this antenna is a cuboid, two sides adjacent at cuboid respectively have a detent, upper surface center position at cuboid has horn structure, the below of horn structure is waveguide, between horn structure and waveguide, with step, be connected, in the both sides of horn structure, respectively have two wave grooves; Wave groove is V-arrangement.

2. utilize MEMS technique to be prepared a method for 0.5THz corrugated horn, it is characterized in that step is:

1) upper surface at upper strata silicon chip adopts KOH anisotropic etching processing horn structure and " V " shape wave groove;

2) lower surface at upper strata silicon chip adopts DRIE lithography detent;

3) upper surface at lower floor's silicon chip adopts DRIE lithography detent;

4) respectively gold is spattered in the surface of the surface of upper strata silicon chip and lower floor's silicon chip;

5) utilize upper strata silicon chip and the lower floor's silicon chip that gold-gold bonding technique obtains step 4) to combine.

6) by scribing, antenna element is separated, obtain processed finished products.

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