CN103560100B - Air cleaning system and toilet - Google Patents
Air cleaning system and toilet Download PDFInfo
- Publication number
- CN103560100B CN103560100B CN201310502972.6A CN201310502972A CN103560100B CN 103560100 B CN103560100 B CN 103560100B CN 201310502972 A CN201310502972 A CN 201310502972A CN 103560100 B CN103560100 B CN 103560100B
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- Prior art keywords
- cleaning system
- air
- air outlet
- air cleaning
- exhibits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0039—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices
- B01D46/0047—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices for discharging the filtered gas
Abstract
The invention discloses a kind of air cleaning system and toilet, relate to air purifying process field, can avoid the air-flow of blower fan on product, to form turbulent flow and product quality is caused to harmful effect. This air cleaning system, comprise be provided with air outlet blower fan, be arranged at the filter of described air outlet below and be arranged at the Transmission region of described filter below, also comprise: be arranged on the guard mechanism between described blower fan and filter, described guard mechanism comprises the windshied part that can take down the exhibits and is connected in the control part of taking down the exhibits of described windshied part.
Description
Technical field
The present invention relates to air purifying process field, relate in particular to a kind of air cleaning system and toilet.
Background technology
Toilet is also referred to as dust free room, for ensure transportation environment or the technique of product at process of producing productThe clean level of environment. High for ensureing the clean level of toilet, be provided with in toilet to make local formationThe air cleaning system of rank clean area, particularly, as shown in Figure 1, this air cleaning in toiletSystem comprises the filter 2 of blower fan 1 and blower fan 1 below, and blower fan 1 is by top air intake and through filter2 send downwards with even wind speed at whole outlet air surface, and are pumped by the pore of below, toilet, to reachThe effect of better purifying space. The for example manufacturing process of substrate in display, as shown in Figure 2, toilet's 4 conductsSubstrate carries out the transportation environment before technique making, and first substrate is removed from get sheet chamber 5, through toilet 4Be transported in clean room 6 and clean, then, being transported to stop preparation in toilet 4, transport successively afterwardsTransport to vacuum transition chamber 7, vacuum chamber 8 and process cavity 9, finally in process cavity 9, substrate carry out technique systemDo.
But, as shown in Figure 1, in the time that product 10 transfers under the air outlet of blower fan 1, from blower fan 1The airflow strikes of sending with filter 2 forms turbulent flow to product 10, the direction that in Fig. 1, arrow points is air-flow,If now there is particle (Particle), can rest on product because turbulent flow cannot be blown away, bring work intoSkill chamber carries out when technique is made causing harmful effect to product quality.
Summary of the invention
The invention provides a kind of air cleaning system and toilet, can avoid air-flow shape on product of blower fanBecome turbulent flow and product quality is caused to harmful effect.
For solving the problems of the technologies described above, the present invention adopts following technical scheme:
On the one hand, provide a kind of air cleaning system, comprise be provided with air outlet blower fan, be arranged at described inThe filter of air outlet below and be arranged at the Transmission region of described filter below, also comprises:
Be arranged on the guard mechanism between described blower fan and filter,
Described guard mechanism comprises the windshied part that can take down the exhibits and is connected in the control part of taking down the exhibits of described windshied part.
Particularly, above-mentioned air cleaning system also comprises:
Be arranged at the optoelectronic switch in described Transmission region, for detection of upright Dui district under described air outletTerritory is no product, the control part of taking down the exhibits described in described optoelectronic switch is electrically connected on.
Particularly, described windshied part comprises multiple end to end patch unit, the wherein patch unit at two endsBe respectively fixed cell and active unit, described fixed cell is fixedly installed on the first edge of described air outletPlace;
In the time of collapsed state, every two adjacent patch unit doublings are adjacent to;
In the time of deployed condition, described active unit is positioned at the second edge of described air outlet, described first sideEdge place and the second edge place are positioned at respectively the relative both sides of described air outlet, make all patch unit pave intoThe plane of keeping out the wind.
Particularly, described multiple end to end patch unit comprises magnetic material;
The described control part of taking down the exhibits comprises and is positioned at the first electromagnet of described the first edge and is positioned at described Second EdgeSecond electromagnet at edge place;
The described control part of taking down the exhibits also comprises relay, the normally closed switch of described relay and described the first electromagnetEnergising solenoid series connection, the energising solenoid string of the normal open switch of described relay and described the second electromagnetConnection;
Described optoelectronic switch is electrically connected on the control end of described relay.
Alternatively, described windshied part is made up of rubber magnet material.
Alternatively, every two adjacent patch unit are passed through gemel connection.
Particularly, described filter comprises main filter screen and auxiliary filter screen, described in described main filter screen is positioned at, goes outAir port place, described auxiliary filter screen is positioned at described main filter screen around.
Particularly, the air outlet of described blower fan is provided with deflector around.
On the other hand, provide a kind of toilet, comprise above-mentioned air cleaning system.
Air cleaning system provided by the invention and toilet, stop that by the expansion of windshied part blower fan producesUprush, make product surface can not produce turbulent flow, thereby avoided product quality to cause harmful effect.In addition, the air-flow change that in the present embodiment, blower fan produces flows to backward air outlet air-flow blind area around and blows,Therefore avoided the vapor adhesion of air-flow blind area.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, below will be to implementingIn example or description of the Prior Art, the accompanying drawing of required use is briefly described, and apparently, the following describesIn accompanying drawing be only some embodiments of the present invention, for those of ordinary skill in the art, do not payingGo out under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of a kind of air cleaning system in prior art;
Fig. 2 is the structure distribution schematic diagram of each chamber in display base plate manufacturing process in prior art;
Fig. 3 is the structural representation of a kind of air cleaning system in the embodiment of the present invention;
Fig. 4 is the structural representation of the guard mechanism of air cleaning system in Fig. 3;
Fig. 5 is the structural representation of the windshied part of guard mechanism in Fig. 4 while packing up;
Fig. 6 be guard mechanism in Fig. 4 windshied part launch time structural representation;
Fig. 7 is the circuit diagram of the control part of taking down the exhibits of guard mechanism in Fig. 4.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clearlyChu, intactly description, obviously, described embodiment is only the present invention's part embodiment, instead ofWhole embodiment. Based on the embodiment in the present invention, those of ordinary skill in the art obtain all itsHe embodiment belongs to the scope of protection of the invention.
In existing toilet, blower fan produces wind vertically downward, because product can stop in toilet, because ofThe wind that this blower fan produces can directly blow product surface and form turbulent flow, has reduced the clean level of toilet, andParticle due to manual operation or toilet existence itself in air can blow off at product surface through blower fan, is withEntering process cavity carries out when technique is made causing harmful effect to product quality. The present invention is just based on above-mentioned skyA kind of new air cleaning system and toilet that gas purification techniques proposes.
As shown in Figure 3, the embodiment of the present invention provides a kind of air cleaning system, comprises and is provided with air outlet 11Blower fan 1, be arranged at the filter 2 of air outlet 11 belows and be arranged at filter 2 belows product passDefeated region, also comprises: be arranged on the guard mechanism 3 arranging between blower fan 1 and filter 2; As shown in Figure 4,Guard mechanism 3 comprises the windshied part 31 that can take down the exhibits and the control part 32 of taking down the exhibits that is connected in windshied part 31.
Particularly, in the time that Transmission to 11 times Founders of air outlet of blower fan 1 stop preparation to region, as figureShown in 4, the windshied part 31 that the control part 32 of taking down the exhibits is controlled guard mechanism 3 launches and forms the plane of keeping out the wind, and changesBlower fan produce air flow direction, air-flow cannot directly be passed through downwards, but walk around keep out the wind plane from aroundPass through; As shown in Figure 3, when product is not in the time that 11 times Founders of air outlet of blower fan 1 stop region, receiveThe windshied part of exhibition control part control guard mechanism 3 is packed up, and the air-flow that blower fan 1 is produced is still logical vertically downwardCross Transmission region and taken away by the pore of below, realizing normal air-cleaning function.
It should be noted that, above-mentioned windshied part is except the folding telescopic structure shown in Fig. 3 and Fig. 4, alsoCan be other structures, as long as can launch to form the plane of keeping out the wind, while packing up, not affect the air-flow that blower fan producesFlow to. For example, windshied part can be shutter.
Air cleaning system in the present embodiment, stops by the expansion of windshied part the vertical gas that blower fan producesStream, makes product surface can not produce turbulent flow, thereby has avoided product quality to cause harmful effect. In addition,Existing air cleaning system is located as air-flow blind area around fan outlet, there will be because of humidity control improperCause vapor adhesion, thereby reduce local clean level and can cause harmful effect to product quality, and this realityThe air-flow change of executing blower fan generation in example flows to backward air outlet air-flow blind area around and blows, and has therefore avoidedThe vapor adhesion of air-flow blind area.
Particularly, above-mentioned air cleaning system also comprises: the optoelectronic switch that is arranged at the said goods transmission region(not shown), has product, a described optoelectronic switch for detection of the right region of 11 times Founders of air outlet is noBe electrically connected on the above-mentioned control part 32 of taking down the exhibits. Two test sides of optoelectronic switch can be arranged at air outlet 11 just underThe relative both sides in Transmission path, side, for example a test side is positioned at top, Transmission region, anotherTest side is positioned at below, Transmission region, when optoelectronic switch detects 11 times Founders of air outlet, there is to product in regionWhen product, as shown in Figure 4, the control part 32 of taking down the exhibits is controlled windshied part 31 and is launched; As shown in Figure 3, work as photoelectricitySwitch detects when 11 times Founders of air outlet do not have product to region, and the control part control windshied part of taking down the exhibits is packed up.
Particularly, as shown in Figure 5 and Figure 6, above-mentioned windshied part 31 can comprise multiple end to end sheetsUnit, wherein the patch unit at two ends is respectively fixed cell 311 and active unit 312, fixed cell 311Be fixedly installed on the first edge of air outlet; In the time of collapsed state, every two adjacent patch unit doublingsBe adjacent to; In the time of deployed condition, active unit is positioned at the second edge of air outlet, above-mentioned the first edge withThe second edge place is positioned at respectively the relative both sides of air outlet, all patch unit is paved be one to keep out the wind flatFace.
Particularly, above-mentioned multiple end to end patch unit comprises magnetic material; The control part 32 of taking down the exhibits comprisesBe positioned at the first electromagnet A1 and the second electromagnet A2 that is positioned at above-mentioned the second edge of above-mentioned the first edge;As shown in Figure 7, the control part of taking down the exhibits also comprises relay K, the normally closed switch K1 of relay K and the first electromagnetismThe energising solenoid series connection of iron A1, the energising spiral shell of the normal open switch K2 of relay K and the second electromagnet A2Coil series connection; Above-mentioned optoelectronic switch S is electrically connected on the control end of relay K. When optoelectronic switch, S detectsUpright when region is not had to product under air outlet, optoelectronic switch S does not have output current, now relay KNormally closed switch K1 closure, the first electromagnet A1 produces magnetic, and normal open switch K2 disconnects, the second magnet A 2Nonmagnetic, as shown in Figure 5, make windshied part 31 pack up and be adsorbed in the first electromagnet A1 mono-side; Work as photoelectricitySwitch S detects that when Founder has product to region under air outlet, optoelectronic switch S output detections electric current is to relayThe control end of device K, now the normally closed switch K1 of relay K disconnects, and the first electromagnet S1 is nonmagnetic, normalK switch 2 closures, the second electromagnetism falls S2 and produces magnetic, and as shown in Figure 6, active unit 312 is adsorbedTo the second electromagnet A2 mono-side, windshied part 31 is launched.
Alternatively, windshied part 31 can be made up of rubber magnet material, because it has flexibility, is therefore convenient toDirectly be folded to form the telescopic folding structure shown in Fig. 5 and Fig. 6.
Alternatively, be folded to form telescopic folding structure except above-mentioned by the windshied part of being made by rubber magnet materialOutward, above-mentioned patch unit also can be made up of independent hard material, and every two adjacent patch unit are passed throughGemel connection, forms the telescopic folding structure described in Fig. 5 and Fig. 6 by hinged mode.
Particularly, as shown in Figure 3, above-mentioned filter 2 comprises main filter screen 21 and auxiliary filter screen 22, main mistakeFilter screen 21 is positioned at air outlet 11 places, and auxiliary filter screen 22 is positioned at main filter screen 21 around. Keep out the wind above-mentionedWhen portion launches, the air-flow that blower fan produces filters air by auxiliary filter screen 22 after being blocked and changing the flow directionAnd blow to product peripheral region.
Particularly, as shown in Figure 3, the air outlet 11 of blower fan 1 is also provided with deflector 12 around, furtherRestriction air-out flows to.
It should be noted that, above-mentioned multiple end to end patch unit can not be to be also made up of magnetic material,Now on fixed cell, be provided with magnetic material.
Air cleaning system in the present embodiment, stops by the expansion of windshied part the vertical gas that blower fan producesStream, makes product surface can not produce turbulent flow, thereby has avoided product quality to cause harmful effect. In addition,The air-flow change that in the present embodiment, blower fan produces flows to backward air outlet air-flow blind area around and blows, and therefore keeps awayExempt from the vapor adhesion of air-flow blind area.
The present embodiment provides a kind of toilet, comprises one or more above-mentioned air cleaning systems.
Structure and the operation principle of air cleaning system are same as the previously described embodiments, do not repeat them here.
Toilet in the present embodiment, stops by the expansion of windshied part the uprush that blower fan produces, and makesProduct surface can not produce turbulent flow, thereby has avoided product quality to cause harmful effect. In addition, this enforcementThe air-flow change that in example, blower fan produces flows to backward air outlet air-flow blind area around and blows, and has therefore avoided gasThe vapor adhesion of stream blind area.
Through the above description of the embodiments, those skilled in the art can be well understood to thisThe bright mode that can add essential common hardware by software realizes, and can certainly pass through hardware, but a lotIn situation, the former is better embodiment.
The above be only the specific embodiment of the present invention, but protection scope of the present invention is not limited toThis, any be familiar with those skilled in the art the present invention disclose technical scope in, can expect easilyChange or replace, within all should being encompassed in protection scope of the present invention. Therefore, protection scope of the present invention shouldProtection domain with described claim is as the criterion.
Claims (8)
1. an air cleaning system, comprise be provided with air outlet blower fan, be arranged at described air outlet belowFilter and be arranged at the Transmission region of described filter below, it is characterized in that, also comprise:
Be arranged on the guard mechanism between described blower fan and filter,
Described guard mechanism comprises the windshied part that can take down the exhibits and is connected in the control part of taking down the exhibits of described windshied part;
Described windshied part comprises multiple end to end patch unit, and wherein the patch unit at two ends is respectively solidOrder unit and active unit, described fixed cell is fixedly installed on the first edge of described air outlet;
In the time of collapsed state, every two adjacent patch unit doublings are adjacent to;
In the time of deployed condition, described active unit is positioned at the second edge of described air outlet, described first sideEdge place and the second edge place are positioned at respectively the relative both sides of described air outlet, make all patch unit pave intoThe plane of keeping out the wind.
2. air cleaning system according to claim 1, is characterized in that, also comprises:
Be arranged at the optoelectronic switch in described Transmission region, for detection of upright Dui district under described air outletWhether territory has product, the control part of taking down the exhibits described in described optoelectronic switch is electrically connected on.
3. air cleaning system according to claim 2, is characterized in that,
Described multiple end to end patch unit comprises magnetic material;
The described control part of taking down the exhibits comprises and is positioned at the first electromagnet of described the first edge and is positioned at described Second EdgeSecond electromagnet at edge place;
The described control part of taking down the exhibits also comprises relay, the normally closed switch of described relay and described the first electromagnetEnergising solenoid series connection, the energising solenoid string of the normal open switch of described relay and described the second electromagnetConnection;
Described optoelectronic switch is electrically connected on the control end of described relay.
4. air cleaning system according to claim 3, is characterized in that,
Described windshied part is made up of rubber magnet material.
5. air cleaning system according to claim 3, is characterized in that,
Every two adjacent patch unit are passed through gemel connection.
6. according to the air cleaning system described in any one in claim 1 to 5, it is characterized in that,
Described filter comprises main filter screen and auxiliary filter screen, and described main filter screen is positioned at described air outlet place,Described auxiliary filter screen is positioned at described main filter screen around.
7. air cleaning system according to claim 6, is characterized in that,
The air outlet of described blower fan is provided with deflector around.
8. a toilet, is characterized in that, comprises empty as claimed in any of claims 1 to 7 in one of claimsGas cleaning system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310502972.6A CN103560100B (en) | 2013-10-23 | 2013-10-23 | Air cleaning system and toilet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310502972.6A CN103560100B (en) | 2013-10-23 | 2013-10-23 | Air cleaning system and toilet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103560100A CN103560100A (en) | 2014-02-05 |
| CN103560100B true CN103560100B (en) | 2016-05-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310502972.6A Active CN103560100B (en) | 2013-10-23 | 2013-10-23 | Air cleaning system and toilet |
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| Country | Link |
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| CN (1) | CN103560100B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1541917A (en) * | 2003-04-14 | 2004-11-03 | ������������ʽ���� | Conveying appliance for plates |
| CN1576201A (en) * | 2003-07-08 | 2005-02-09 | 株式会社大福 | Plate-shaped work piece transporting apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8353986B2 (en) * | 2005-03-31 | 2013-01-15 | Tokyo Electron Limited | Substrate processing apparatus |
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2013
- 2013-10-23 CN CN201310502972.6A patent/CN103560100B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1541917A (en) * | 2003-04-14 | 2004-11-03 | ������������ʽ���� | Conveying appliance for plates |
| CN1576201A (en) * | 2003-07-08 | 2005-02-09 | 株式会社大福 | Plate-shaped work piece transporting apparatus |
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| Publication number | Publication date |
|---|---|
| CN103560100A (en) | 2014-02-05 |
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