CN103543491A - Ultralow-loss high-bandwidth irradiation-resistance multimode fiber and manufacturing method thereof - Google Patents
Ultralow-loss high-bandwidth irradiation-resistance multimode fiber and manufacturing method thereof Download PDFInfo
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Abstract
The invention discloses an untralow-loss high-bandwidth irradiation-resistance multimode fiber and a manufacturing method thereof. The multimode fiber comprises a central layer without Ge doped, a fluorine doped quartz cladding layer, an impurity absorption quartz cladding layer and a quartz cladding layer in sequence from inside to outside. The refractive index of the central layer without Ge doped is in gradient refractive index distribution, and the distribution power exponent alpha is 1.7-2.3; the maximum value delta1%max of the relative refractive index difference of the central layer and the fluorine doped quartz cladding layer is 0.6%-1.2%; the refractive index of the fluorine doped quartz cladding layer is smaller than that of the impurity absorption quartz cladding layer; the refractive index of the impurity absorption quartz cladding layer is no smaller than that of the quartz cladding layer. According to the untralow-loss high-bandwidth irradiation-resistance multimode fiber and the manufacturing method thereof, the inner cladding structure, namely, the impurity absorption quartz cladding layer is adopted; compared with the inner cladding layer structure with only fluorine doped, the impurity absorption quartz cladding layer can absorb radiation received by a part of fibers in the area before irradiation rays reach the central layer through the cladding layers, structural defects, caused by irradiation, of the central layer are reduced, and therefore the irradiation-resistance capability of the fiber is improved.
Description
Technical field
The present invention relates to multimode optical fiber, be specifically related to the ultra-low loss high bandwidth multimode optical fiber of resistance to irradiation and manufacture method thereof.
Background technology
In recent years, although single-mode fiber becomes topmost demand kind in Optical Fiber Market, but multimode optical fiber is not substituted all the time, keeping the market demand of steady growth, its reason is just that the numerous characteristics of multimode optical fiber just in time can meet the use of light signal, Energy Transfer, LAN data transmission and optical device always.
Development along with multimode optical fiber technology, communication has been extended to the special extreme occasions such as Aero-Space, various high temperature, high pressure, irradiation by the application of multimode optical fiber, therefore need novel multimode optical fiber to change the attenuation coefficient that material component reduces optical fiber, reduce the performance degradation of optical fiber to environmental change, adapt to changing applied environment.
At present, multimode optical fiber technology is in the world optimized mainly for parameters such as bandwidth of an optical fiber, bending losss, as patent Chinese invention patent CN102692675A discloses a kind of graded index anti-bending multimode fiber (number of patent application: 201210167792.2), adopt germnium doped core district to coordinate many cladding structures to improve the bend loss properties of optical fiber when guaranteeing fiber bandwidth; European patent EP 1515169B1 discloses a kind of graded index multimode fiber and manufacture method thereof, and the method that adopts core district germanium phosphorus to mix is altogether optimized to improve bandwidth of an optical fiber for fiber cores district index distribution power exponent; US Patent No. 20130028564A1 discloses a kind of trench auxiliary type multimode optical fiber, adopts the auxiliary way utilization of covering of sinking to mix germanium graded index core district and adjusts fiber bandwidth.
Yet, technique scheme is all to adjust fiber cores district index distribution based on Ge-doped core district, because Ge-doped quartzy scattering coefficient is higher, therefore easily cause fibre loss higher, common Ge-doped graded index multimode fiber 850nm attenuation coefficient is all more than 2.5dB, its attenuation coefficient is also with environment temperature, radiation condition changes and changes, therefore, optimize graded index multimode fiber Xin district material component, the content that reduces Ge element in optical fiber is the effective way addressing the above problem, for this reason, Chinese invention patent 102768382A discloses a kind of radiation hardness multimode optical fiber (number of patent application: 201210130363.8) of high bandwidth, in this technical scheme, in optical fiber, undope Ge element and P elements to improve the radiation-resistant property of optical fiber, but adopt the mode of fibre core fluorine element gradient doping to realize the bandwidth that multimode optical fiber is higher, but this kind of scheme still makes emittance act directly on core district, thereby caused higher additional attenuation.
Summary of the invention
Technical matters to be solved by this invention is the problem that multimode optical fiber additional attenuation is higher.
In order to solve the problems of the technologies described above, the technical solution adopted in the present invention is to provide a kind of ultra-low loss high bandwidth multimode optical fiber of resistance to irradiation, and described multimode optical fiber from-inner-to-outer is followed successively by:
The undope sandwich layer of Ge element, its refractive index in gradient gradation type distributes, and distribution power exponent α is 1.7～2.3;
The fluorine quartzy covering that adulterates, the refractive index contrast maximal value Δ 1% of described sandwich layer and described fluorine-doped quartz covering
maxbe 0.6%～1.2%;
Absorb the quartzy covering of impurity, the refractive index of described fluorine-doped quartz covering is lower than the quartzy cladding index of described absorption impurity;
Quartzy covering, the refractive index of the quartzy covering of described absorption impurity is not less than the refractive index of described quartzy covering.
Above-mentioned multimode optical fiber, described sandwich layer radius is 20～40 μ m, and the quartzy cladding radius R2 of described doping is 22 μ m～58 μ m, and the radius R 3 of the quartzy covering of described absorption impurity is 25 μ m～59 μ m.
Above-mentioned multimode optical fiber, quartzy clad doped one or both of fluorine element and Ge element or P elements of having of described absorption impurity.
Above-mentioned multimode optical fiber, the quartzy covering of described doping and described quartzy covering refractive index contrast Δ 2% are-0.6%～-1.2%, the quartzy covering of described absorption impurity and quartzy covering refractive index contrast Δ 3% are 0.01%～0.2%.
Above-mentioned multimode optical fiber, described sandwich layer radius R 1 is 25 μ m, distribution power exponent α is 1.98; The adulterate radius R 2 of quartzy covering of described fluorine is 56 μ m, and with described quartzy covering refractive index contrast Δ 2% be-0.91, the refractive index contrast maximal value Δ 1% of described sandwich layer and described fluorine-doped quartz covering
maxbe 0.90%; The radius R 3 of the quartzy covering of described absorption impurity is 58 μ m, and with quartzy covering refractive index contrast Δ 3% be 0.05%.
Above-mentioned multimode optical fiber, the distribution power exponent α of described sandwich layer is 1.9～2.05.
Above-mentioned multimode optical fiber, the distribution power exponent α of described sandwich layer is 1.92～1.94.
Above-mentioned multimode optical fiber, the numerical aperture of described multimode optical fiber is 0.160～0.226.
Above-mentioned multimode optical fiber, described multimode optical fiber peripheral hardware optical fiber coating, described optical fiber coating is one or both of acryl resin coating, silicone rubber coating, polyimide coating, carbon coating or metallic coating.
Above-mentioned multimode optical fiber, described optical fiber coating is ultra-violet curing silicone rubber coating and high temperature resistant acryl resin coating, and monolateral thickness is 60 ± 5 μ m, and the working temperature of described multimode optical fiber is-40 ℃～+ 150 ℃.
Above-mentioned multimode optical fiber, described optical fiber coating is heat curing silicone rubber coating, and monolateral thickness is 20 ± 4 μ m, and the working temperature of described multimode optical fiber is-50 ℃～+ 150 ℃.
Above-mentioned multimode optical fiber, described optical fiber coating is heat curing polyimide coating, and monolateral thickness is 15 ± 3 μ m, and the working temperature of described multimode optical fiber is-50 ℃～+ 400 ℃.
Above-mentioned multimode optical fiber, described optical fiber coating is carbon coating, and monolateral thickness is 15 ± 3 μ m, and the working temperature of described multimode optical fiber is-50 ℃～+ 350 ℃.
Above-mentioned multimode optical fiber, described optical fiber coating is metallic coating, and monolateral thickness is 15 ± 3 μ m, and the fiber work temperature of described multimode optical fiber is-50 ℃～+ 600 ℃.
Above-mentioned multimode optical fiber, described metallic coating is made by the alloy of gold, silver, copper, aluminium or above-mentioned four kinds of metals.
Above-mentioned multimode optical fiber, the full injection bandwidth of described multimode optical fiber is more than 400MHz-km at 850nm wavelength; At 1300nm wavelength, be more than 400MHz-km, this wavelength bandwidth can reach 6915MHz-km.
Above-mentioned multimode optical fiber, described multimode optical fiber is less than 1.7dB/km in the place's loss of 850nm wavelength, in the place's loss of 1300nm wavelength, is less than 0.45dB/km.
The present invention also provides a kind of manufacture method of above-mentioned multimode optical fiber, comprises the following steps:
Utilize plasma enhanced chemical vapor deposition method to the pure quartz glass bushing pipe deposition of adulterating, wherein, in reacting gas silicon tetrachloride and oxygen, pass into fluorine-containing gas, introduce fluorine doping; Pass into germanium tetrachloride introducing Ge-doped, pass into phosphorous gas to introduce phosphorus doping;
Change the flow of impurity gas in mixed gas, deposition absorbs the quartzy covering of impurity, fluorine adulterate quartzy covering and sandwich layer successively;
Deposited rear melting and shortened solid mandrel into, the fluoro-alloyed quartz glass of then take makes preform as sleeve pipe adopts RIT technique, or adopts OVD or VAD outsourcing depositing operation to make preform at mandrel outer deposition surrounding layer;
Preform is placed in to wire-drawer-tower low-tension drawing optic fibre, at optical fiber surface coated fiber coat.
In said method, described fluoro-gas is C
2f
6, CF
4, SiF
4and SF
6any one or multiple, described phosphorous gas is POCl
3.
In said method, during deposition sandwich layer, SiCl
4gas flow is 38sccm, C
2f
6gas flow is 0sccm, and oxygen flow is 40sccm;
During the quartzy covering of dopant deposition, SiCl
4gas flow is 38sccm, C
2f
6gas flow is 9.0-17.9sccm;
When deposition absorbs the quartzy covering of impurity, SiCl
4gas flow is 38sccm, GeCl
4gas flow is 0-12.1sccm, C
2f
6gas flow is 0-16.4sccm, POCl
3gas flow is 0-12sccm, and oxygen flow is 40sccm.
The present invention, has following remarkable advantage:
(1) at assurance optical fiber, completely inject the in the situation that band being wider than 400MHz-km and sandwich layer is not carried out to Ge element doping, significantly reduce the attenuation coefficient of optical fiber, thereby adjust fiber core layer power exponent coefficient by the distribution of sandwich layer fluorine element doping gradient, can optimize bandwidth of an optical fiber;
(2) in optical fiber, introduced quartzy this inner cladding structure of covering of absorption impurity, the inner cladding structure that the simple fluorine of comparing adulterates, the radiation that it can be subject at this region absorption portion optical fiber before irradiation ray arrives sandwich layer by covering, thus the fault of construction that minimizing sandwich layer causes because of radiation improves the radiation hardness ability of optical fiber;
(3) except optical fiber adapts to part, possess good adaptive capacity to environment, coat of the present invention makes optical fiber have good resistance to irradiation, high temperature resistant and fatigue performance, and optical fiber can normally be used and steady operation under higher temperature environment and higher stress condition.
Accompanying drawing explanation
Fig. 1 is the ultra-low loss high bandwidth multimode optical fiber of resistance to irradiation schematic cross-section in the present invention;
Fig. 2 is the refractive index profile schematic diagram of the ultra-low loss high bandwidth multimode optical fiber of resistance to irradiation in the present invention.
Embodiment
In order conveniently to understand the present invention, first that the technical term centralized definition the present invention relates to is as follows:
Quartz liner: the substrate tube of tubulose, the glassy state oxidates of its inwall carrying PCVD chemical reaction;
Sleeve pipe: meet the quartz glass tube that certain Geometrical index and doping require;
Sandwich layer: occuping the core of cross section of optic fibre, is the region of the main leaded light of optical fiber;
Fluorine-doped quartz covering: the annular region that is close to sandwich layer in cross section of optic fibre;
Quartzy covering: the annular region that is close to fluorine-doped quartz covering in cross section of optic fibre;
Refractive index contrast:
Numerical aperture:
NA＝n
0×(2×Δ)
1/2；
N
iand n
0be respectively each corresponding part and adjacent outside covering in the refractive index of 1300nm wavelength;
Power law index distribution section: meet the index distribution form of power exponential function below, wherein, n
1refractive index for optical fiber axle center; R is the distance of leaving optical fiber axle center; A is fiber cores radius; α is distribution power exponent; Δ is core/bag refractive index contrast;
Below in conjunction with instructions and specific embodiment, the present invention is described in detail.
As shown in Figure 1 and Figure 2, sandwich layer, the fluorine that the ultra-low loss high bandwidth multimode optical fiber of resistance to irradiation from-inner-to-outer provided by the invention is followed successively by the Ge element that undopes adulterate quartzy covering, absorb the quartzy covering of impurity and quartzy covering, wherein, the refractive index of sandwich layer of Ge element of undoping is gradient gradation type index distribution, and distribution power exponent α is 1.7～2.3; The refractive index contrast maximal value Δ 1% of sandwich layer and fluorine-doped quartz covering
maxbe 0.6%～1.2%; The refractive index of fluorine-doped quartz covering is lower than absorbing the quartzy cladding index of impurity; The refractive index that absorbs the quartzy covering of impurity is not less than the refractive index of quartzy covering.
In the present invention, in sandwich layer without Ge element doping, guarantee that optical fiber possesses lower attenuation coefficient at 850nm and 1300nm window, simultaneously due to grade doping in optical fiber the Ge element that undopes when F element, therefore can guarantee that optical fiber possesses significantly improves the attenuation coefficient causing in the attenuation change that causes in the high during low temperature cycling was of optical fiber and radiation environment and changes in the situation of higher bandwidth, the absorption impurity covering that fluorine adulterates outside quartzy covering can absorption portion radiation dose, further reduces the radiation damage of fiber core layer.
In the present invention, sandwich layer radius is 25～31.25 μ m, and the fluorine quartzy cladding radius R2 that adulterates is 22 μ m～57 μ m, and the radius R 3 that absorbs the quartzy covering of impurity is 25 μ m～59 μ m.
Sandwich layer and the fluorine quartzy covering that adulterates passes into fluorine-containing gas aggradation and forms in silicon tetrachloride and oxygen, and therefore, its material is SiO
2-F-Cl; Absorb the quartzy covering of impurity doped with fluorine element and Ge element or P elements one or both, therefore, the material that absorbs the quartzy covering of impurity is SiO
2-F-Cl-Ge or SiO
2-F-Cl-P or SiO
2-F-Cl-Ge-P or SiO
2-Cl-Ge or SiO
2-Cl-P or SiO
2-Cl-Ge-P.
Be below several typical embodiment and detection data:
Wherein, detection method is: use source, cobalt-60 (that is, Co60 source) with the dose rate of 0.15Gy/s at the temperature of approximately 24 ℃ to fiber-optic illuminated 19 hours, accumulated dose is 5000Gy.Between the light period, use the radiation-induced decay that carrys out measuring optical fiber with wavelength 850 nanometers light.Can in following publication, obtain in table the equipment of plotting and more detailed contents of test process of attenuation incrementation data after radiation: Jochen Kuhnhenn, Stefan Klaus and Udo Weinand, Quality Assurance for Irradiation Tests of Optical Fibers:Uncertainty and Reproducibility, IEEE Transactions on Nuclear Science, Vol.56, No.4, August2009, at2160-2166.
By the test in upper table, the ultra-low loss high bandwidth multimode optical fiber of resistance to irradiation provided by the invention is than the conventional multimode optical fiber of same type, its attenuation coefficient significantly reduces, fiber bandwidth is up to 6915MHz-km simultaneously, simultaneously because optical fiber center core layer is not mixed germanium and is also designed with and absorbs impurity covering and specific coatings simultaneously, so it possesses better capability of resistance to radiation and heat-resisting ability.
The manufacture method of above-mentioned multimode optical fiber is as follows:
Pure quartz glass bushing pipe is fixed on to the deposition of adulterating on plasma enhanced chemical vapor deposition lathe, in reacting gas silicon tetrachloride and oxygen, pass into fluorine-containing gas, the doping of introduction fluorine, passing into germanium tetrachloride introduces Ge-doped, pass into phosphorous gas to introduce phosphorus doping, by microwave, make the reacting gas ionization in bushing pipe become plasma, and finally with the form of glass, be deposited on bushing pipe inwall;
According to doping requirement, change the flow of impurity gas in mixed gas, successively sedimentary inner envoloping layer and sandwich layer;
Concrete flow parameter is as shown in the table:
Sccm is volumetric flow rate unit, English full name: standard-state cubic centimeter per minute, meaning is: mark condition milliliter per minute.
After having deposited, with molten contracting lathe, deposited tube is melted and shortens solid mandrel into, the fluoro-alloyed quartz glass of then take makes preform as sleeve pipe adopts RIT technique, or adopts OVD or VAD outsourcing depositing operation to make preform at mandrel outer deposition surrounding layer;
Preform is placed in to wire-drawer-tower low-tension drawing optic fibre, at optical fiber surface coated fiber coat.
Optical fiber coating is one or both of acryl resin coating, silicone rubber coating, polyimide coating, carbon coating or metallic coating, when:
When optical fiber coating is ultra-violet curing silicone rubber coating and high temperature resistant acryl resin coating, monolateral thickness is 60 ± 5 μ m, and the working temperature of multimode optical fiber is-40 ℃～+ 150 ℃.
When optical fiber coating is heat curing silicone rubber coating, monolateral thickness is 20 ± 4 μ m, and the working temperature of multimode optical fiber is-50 ℃～+ 150 ℃.
When optical fiber coating is heat curing polyimide coating, monolateral thickness is 15 ± 3 μ m, and the working temperature of multimode optical fiber is-50 ℃～+ 400 ℃.
When optical fiber coating is carbon coating, monolateral thickness is 15 ± 3 μ m, and the working temperature of multimode optical fiber is-50 ℃～+ 350 ℃.
When optical fiber coating is metallic coating, monolateral thickness is 15 ± 3 μ m, and the fiber work temperature of multimode optical fiber is-50 ℃～+ 600 ℃.Metallic coating is made by the alloy of gold, silver, copper, aluminium or above-mentioned four kinds of metals.
In such scheme, the sandwich layer Ge element that undopes, distribution power exponent α is 1.9～2.05, can obtain higher bandwidth at 1300nm window.The sandwich layer Ge element that undopes, distribution power exponent α is 1.92～1.94, can obtain larger bandwidth at 1300nm window.
The present invention is not limited to above-mentioned preferred forms, and anyone should learn the structural change of making under enlightenment of the present invention, and every have identical or close technical scheme with the present invention, within all falling into protection scope of the present invention.
Claims (20)
1. the ultra-low loss high bandwidth multimode optical fiber of resistance to irradiation, is characterized in that, described multimode optical fiber from-inner-to-outer is followed successively by:
The undope sandwich layer of Ge element, its refractive index in gradient gradation type distributes, and distribution power exponent α is 1.7～2.3;
The fluorine quartzy covering that adulterates, the refractive index contrast maximal value Δ 1% of described sandwich layer and described fluorine-doped quartz covering
maxbe 0.6%～1.2%;
Absorb the quartzy covering of impurity, the refractive index of described fluorine-doped quartz covering is lower than the quartzy cladding index of described absorption impurity;
Quartzy covering, the refractive index of the quartzy covering of described absorption impurity is not less than the refractive index of described quartzy covering.
2. multimode optical fiber as claimed in claim 1, is characterized in that, described sandwich layer radius is 20～40 μ m, and the quartzy cladding radius R2 of described doping is 22 μ m～58 μ m, and the radius R 3 of the quartzy covering of described absorption impurity is 25 μ m～59 μ m.
3. multimode optical fiber as claimed in claim 1, is characterized in that, quartzy clad doped one or both of fluorine element and Ge element or P elements of having of described absorption impurity.
4. multimode optical fiber as claimed in claim 1, it is characterized in that, the quartzy covering of described doping and described quartzy covering refractive index contrast Δ 2% are-0.6%～-1.2%, and the quartzy covering of described absorption impurity and quartzy covering refractive index contrast Δ 3% are 0.01%～0.2%.
5. multimode optical fiber as claimed in claim 2, is characterized in that, described sandwich layer radius R 1 is 25 μ m, and distribution power exponent α is 1.98; The adulterate radius R 2 of quartzy covering of described fluorine is 56 μ m, and with described quartzy covering refractive index contrast Δ 2% be-0.91, the refractive index contrast maximal value Δ 1% of described sandwich layer and described fluorine-doped quartz covering
maxbe 0.90%; The radius R 3 of the quartzy covering of described absorption impurity is 58 μ m, and with quartzy covering refractive index contrast Δ 3% be 0.05%.
6. multimode optical fiber as claimed in claim 1, is characterized in that, the distribution power exponent α of described sandwich layer is 1.9～2.05.
7. multimode optical fiber as claimed in claim 1, is characterized in that, the distribution power exponent α of described sandwich layer is 1.92～1.94.
8. multimode optical fiber as claimed in claim 1, is characterized in that, the numerical aperture of described multimode optical fiber is 0.160～0.226.
9. multimode optical fiber as claimed in claim 1, is characterized in that, described multimode optical fiber peripheral hardware optical fiber coating, and described optical fiber coating is one or both of acryl resin coating, silicone rubber coating, polyimide coating, carbon coating or metallic coating.
10. multimode optical fiber as claimed in claim 9, is characterized in that, described optical fiber coating is ultra-violet curing silicone rubber coating and high temperature resistant acryl resin coating, and monolateral thickness is 60 ± 5 μ m, and the working temperature of described multimode optical fiber is-40 ℃～+ 150 ℃.
11. multimode optical fibers as claimed in claim 9, is characterized in that, described optical fiber coating is heat curing silicone rubber coating, and monolateral thickness is 20 ± 4 μ m, and the working temperature of described multimode optical fiber is-50 ℃～+ 150 ℃.
12. multimode optical fibers as claimed in claim 9, is characterized in that, described optical fiber coating is heat curing polyimide coating, and monolateral thickness is 15 ± 3 μ m, and the working temperature of described multimode optical fiber is-50 ℃～+ 400 ℃.
13. multimode optical fibers as claimed in claim 9, is characterized in that, described optical fiber coating is carbon coating, and monolateral thickness is 15 ± 3 μ m, and the working temperature of described multimode optical fiber is-50 ℃～+ 350 ℃.
14. multimode optical fibers as claimed in claim 9, is characterized in that, described optical fiber coating is metallic coating, and monolateral thickness is 15 ± 3 μ m, and the fiber work temperature of described multimode optical fiber is-50 ℃～+ 600 ℃.
15. multimode optical fibers as claimed in claim 14, is characterized in that, described metallic coating is made by the alloy of gold, silver, copper, aluminium or above-mentioned four kinds of metals.
16. multimode optical fibers as claimed in claim 1, is characterized in that, the full injection bandwidth of described multimode optical fiber is more than 400MHz-km at 850nm wavelength; At 1300nm wavelength, be more than 400MHz-km, this wavelength bandwidth can reach 6915MHz-km.
17. multimode optical fibers as claimed in claim 1, is characterized in that, described multimode optical fiber is less than 1.7dB/km in the place's loss of 850nm wavelength, in the place's loss of 1300nm wavelength, are less than 0.45dB/km.
The manufacture method of 18. multimode optical fibers as described in claim 1-17 item any one, is characterized in that, comprises the following steps:
Utilize plasma enhanced chemical vapor deposition method to the pure quartz glass bushing pipe deposition of adulterating, wherein, in reacting gas silicon tetrachloride and oxygen, pass into fluorine-containing gas, introduce fluorine doping; Pass into germanium tetrachloride introducing Ge-doped, pass into phosphorous gas to introduce phosphorus doping;
Change the flow of impurity gas in mixed gas, deposition absorbs the quartzy covering of impurity, fluorine adulterate quartzy covering and sandwich layer successively;
Deposited rear melting and shortened solid mandrel into, the fluoro-alloyed quartz glass of then take makes preform as sleeve pipe adopts RIT technique, or adopts OVD or VAD outsourcing depositing operation to make preform at mandrel outer deposition surrounding layer;
Preform is placed in to wire-drawer-tower low-tension drawing optic fibre, at optical fiber surface coated fiber coat.
19. manufacture methods as claimed in claim 18, is characterized in that, described fluoro-gas is C
2f
6, CF
4, SiF
4and SF
6any one or multiple, described phosphorous gas is POCl
3.
20. manufacture methods as claimed in claim 18, is characterized in that,
During deposition sandwich layer, SiCl
4gas flow is 38sccm, C
2f
6gas flow is 0sccm, and oxygen flow is 40sccm;
During the quartzy covering of dopant deposition, SiCl
4gas flow is 38sccm, C
2f
6gas flow is 9.0-17.9sccm;
When deposition absorbs the quartzy covering of impurity, SiCl
4gas flow is 38sccm, GeCl
4gas flow is 0-12.1sccm, C
2f
6gas flow is 0-16.4sccm, POCl
3gas flow is 0-12sccm, and oxygen flow is 40sccm.
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