CN103540910A - Spray header and reaction cavity - Google Patents
Spray header and reaction cavity Download PDFInfo
- Publication number
- CN103540910A CN103540910A CN201310517831.1A CN201310517831A CN103540910A CN 103540910 A CN103540910 A CN 103540910A CN 201310517831 A CN201310517831 A CN 201310517831A CN 103540910 A CN103540910 A CN 103540910A
- Authority
- CN
- China
- Prior art keywords
- spray header
- gas
- distribution plate
- gas distribution
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The invention discloses a spray header and a reaction cavity. The spray header comprises a top plate, a gas distributing plate and a cooling plate which are overlapped from top to bottom, wherein the gas distributing plate comprises a plurality of first through holes penetrating through the gas distributing plate; the lower surface of the gas distributing plate is provided with a plurality of depressions; the depressions are arranged in areas between adjacent first through holes; second through holes and third through holes penetrating through the cooling plate are formed in the cooling plate at intervals; the third through holes are communicated with the first through holes; the second through holes are communicated with the depressions. According to the spray header, the depressions and the through holes are formed in the gas distributing plate, so that a gas channel is formed by directly setting the through holes in the gas distributing plate, and welding is unnecessary, so that the structure of the whole spray header is simplified, and the manufacturing difficulty is obviously lowered.
Description
Technical field
The present invention relates to semi-conductor device technology field, particularly a kind of spray header and reaction chamber.
Background technology
From GaN(gan) rise of base third generation semiconductor material, blue-ray LED (photodiode) is succeeded in developing, and the luminous intensity of LED and white-light emitting efficiency improve constantly.LED is considered to the New Solid light source that the next generation enters general illumination field, therefore obtains extensive concern.
The manufacturing process of the white light LEDs of prior art is carried out conventionally in a reaction chamber having under temperature controlled environment.Conventionally, III clan source gas and group V source gas are passed into respectively in chemical vapour deposition reaction chamber, III clan source gas and group V source gas react on substrate, to form III-V family material film in reaction chamber.The spray header of prior art please refer to Fig. 1, comprise multi-layer gas chamber 1, for example comprise three, respectively the first air chamber from top to bottom, the second air chamber and the 3rd air chamber, or other quantity, isolated by porous plate 2 between reaction chamber, each reaction chamber is provided with gas pipeline 3, and described gas pipeline 3 adopts weldprocedure to link together with porous plate 2.A kind of spray header that for example US Patent No. 5871586 provides, its mode being by soldering is welded many tubules and porous plate.
But, the tubule of this spray header at least needs to weld with a porous plate, and, conventionally the quantity of tubule is very many, and such structure is very high to welding process requirement during fabrication, is easy to cause not prison welding solid, there is gas leakage or leakage, therefore, the complex structure of spray header of the prior art, is unfavorable for making.
Therefore, current spray header is also unreasonable, need to improve it.
Summary of the invention
The object of the present invention is to provide a kind of spray header and reaction chamber, to solve the problem of showerhead configuration complexity of the prior art.
For solving the problems of the technologies described above, the invention provides a kind of spray header, for providing reactant gases to conversion zone, wherein, described spray header comprises top board, gas distribution plate and the cooling plate of stacking setting from top to bottom; Described gas distribution plate comprises a plurality of the first through holes that run through described gas distribution plate, and the lower surface of described gas distribution plate has a plurality of depressions, and described depression is arranged on the region between adjacent described the first through hole; Described cooling plate is arranged at intervals with the second through hole and the third through-hole that runs through described cooling plate, and described third through-hole is connected with the first through hole, and described the second through hole is connected with described depression; The lower surface of described gas distribution plate and the laminating of described cooling plate upper surface make described depression and cooling plate surround the second gas diffusion chamber, and described the second through hole is communicated with the conversion zone of described the second gas diffusion chamber and cooling plate below; Between described top board and described gas distribution plate, limit the first gas diffusion chamber, the common conversion zone that is communicated with described the first gas diffusion chamber and cooling plate below of described the first through hole and third through-hole.
Accordingly, the invention provides a kind of reaction chamber, comprise: cavity, for pallet and the spray header of load substrates, described pallet is arranged at the bottom of described cavity, described spray header is arranged on the top of described cavity and is oppositely arranged with described pallet, between described pallet and described spray header, limit gas reaction area, described spray header is used for to described conversion zone output-response gas, and described spray header is spray header as above.
Spray header provided by the invention and reaction chamber, described spray header comprises the top board of stacking setting from top to bottom, gas distribution plate and cooling plate, described gas distribution plate comprises a plurality of the first through holes that run through described gas distribution plate, the lower surface of described gas distribution plate has a plurality of depressions, described depression is arranged on the region between adjacent described the first through hole, compared to existing technology, the present invention by arranging depression and through hole in gas distribution plate, avoided the situation that in prior art, gas passage need to weld with porous plate, but gas passage directly by being set in gas distribution plate, through hole is formed, and form gas diffusion chamber by the laminating of gas distribution plate and cooling plate, do not need to weld, the structure of whole spray header is simplified, make manufacture difficulty have obvious reduction.
Accompanying drawing explanation
Fig. 1 is the structural representation of the spray header of prior art;
Fig. 2 is the structural representation of the spray header of one embodiment of the invention;
Fig. 3 is the part-structure schematic diagram of the spray header of one embodiment of the invention;
Fig. 4 is the part-structure schematic diagram of the spray header of one embodiment of the invention.
Embodiment
Below in conjunction with schematic diagram, spray header of the present invention and reaction chamber are described in more detail, the preferred embodiments of the present invention have wherein been represented, should be appreciated that those skilled in the art can revise the present invention described here, and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
For clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the present invention chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example, according to the restriction of relevant system or relevant business, by an embodiment, change into another embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, with reference to accompanying drawing, with way of example, the present invention is more specifically described.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of the aid illustration embodiment of the present invention lucidly.
Core concept of the present invention is, a kind of spray header and reaction chamber are provided, in spray header, reduce as much as possible the use of weldprocedure, make described spray header adopt top board, gas distribution plate and the cooling plate that comprises stacking setting from top to bottom, described gas distribution plate comprises a plurality of the first through holes that run through described gas distribution plate, the lower surface of described gas distribution plate has a plurality of depressions, and described depression is arranged on the region between described adjacent through-holes.So, gas passage directly forms by through hole is set in gas distribution plate, and forms gas diffusion chamber by the laminating of gas distribution plate and cooling plate, does not need to weld, the structure of whole spray header is simplified, makes manufacture difficulty have obvious reduction.
Below in conjunction with the drawings and specific embodiments, spray header provided by the invention and reaction chamber are described in further detail.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying, only in order to convenient, the object of the aid illustration embodiment of the present invention lucidly.
Please refer to Fig. 2, the invention provides a kind of spray header, for providing reactant gases to conversion zone, described spray header comprises top board 10, gas distribution plate 11 and the cooling plate 12 of stacking setting from top to bottom; Described gas distribution plate 12 comprises a plurality of the first through holes 112 that run through described gas distribution plate 12 upper surfaces and lower surface, the lower surface of described gas distribution plate 11 has a plurality of depressions 111, and described depression 111 is arranged on the region between adjacent described the first through hole 112; Described cooling plate 12 is arranged at intervals with the second through hole 121 and the third through-hole 122 that runs through described cooling plate 12 upper surfaces and lower surface, and described third through-hole 122 is connected with the first through hole 112, and described the second through hole 121 is connected with described depression 111; The lower surface of described gas distribution plate 11 and the 12 upper surface laminatings of described cooling plate make described depression 111 surround the second gas diffusion chamber with cooling plate 12, and described the second through hole 121 is communicated with the conversion zone of described the second gas diffusion chamber and cooling plate 12 belows; Between described top board 10 and described gas distribution plate 111, limit the first gas diffusion chamber, described the first through hole 112 and the common conversion zone that is communicated with described the first gas diffusion chamber and cooling plate 12 belows of third through-hole 122.
Concrete, the material of described gas distribution plate 11 can be stainless steel, a plurality of depressions 111 of described gas distribution plate 11 can form by Cutting Process, for example milling, or spark discharge processing; Described the first through hole 112 can form by bore process.In the present embodiment, described depression 111 and the first through hole 112 are spaced, so that the quantity of the two is guaranteed, can be evenly distributed simultaneously, are conducive to being uniformly distributed of gas.
Further, described depression 111 can be to be for example " people " font, and described gas distribution plate 11 is divided into a plurality of uniform parts, for example, can be four-quadrant, eight quadrants etc.; Described " people " font depression 111 is evenly distributed in the various piece of described gas distribution plate 11, concrete, take circular gas distribution plate 11 as example, in every part, described depression 111 is uniformly distributed, and the top conllinear of each " people " font and being positioned on a radius.Described depression 111 can also be other shapes, for example, be long strip shape, or annular, or fold-line-shaped etc.Preferably, in described the second gas diffusion chamber, pass into the second gas, described the second gas is V family gas, for example, be ammonia.
Described top board 10 has depression 101 towards the one side of gas distribution plate 11, or described gas distribution plate 11 has depression towards the one side of top board 10, the rear first gas diffusion chamber that forms thereby described top board 10 and gas distribution plate 11 are fitted.In the present embodiment, adopt depression 101 to be arranged in top board.Preferably, in described the first gas diffusion chamber, pass into the first gas, described the first gas WeiIII family gas, for example, be MO gas.
Preferably, in the present invention, between described gas distribution plate 11 and cooling plate 12 for removably connecting.Please refer to Fig. 3, described gas distribution plate 11 is provided with a plurality of draw-in grooves 113 towards a side of cooling plate, described cooling plate 12 is provided with corresponding projection 123 towards a side of gas distribution plate, and described draw-in groove 113 and projection 123 fitted seal are so that described gas distribution plate 11 and cooling plate 12 stick together.As shown in Figure 3, described draw-in groove 113 can arrange between each first channel 112 and groove 111, and projection 123 is arranged on corresponding position, thereby can improve stopping property.In the present embodiment, described projection 123 is resilient material formation.Described resilient material comprises aluminium, copper, silica gel rubber and Teflon.
Further, please refer to Fig. 4, described gas distribution plate 11 edge is also provided with lockhole 114 for one week, described cooling plate 12 is provided with padlock 124 towards a lateral edges of gas distribution plate 11, and described padlock 124 snaps in described lockhole 114 so that described gas distribution plate 11 and cooling plate 12 stick together.
The gas distribution plate 11 and the cooling plate 12 that in the present embodiment, adopt are dismountable combining, and the first through hole 112 forms through bore process, not only make manufacture craft be simplified, reduced manufacture difficulty, can also be convenient to spray header to clean and change.
Above-described embodiment has represented structure of the present invention with form preferably, can be expected that, for removably connecting between gas distribution plate and cooling plate, can also be other forms, such as adopt mounting block (such as bolt etc.) at the two edge, the two is fixed, also be a feasible scheme, the present invention does not enumerate this, as long as adopt depression and harden to close, form gas diffusion chamber and in the edge of each depression (being sidewall), form through hole as gas passage, be included in the intent of the present invention.
In another embodiment, described gas distribution plate 11 can be to weld together with cooling plate 12, and because gas passage is mainly formed in the through hole in gas distribution plate, therefore to gas distribution plate 11 and the welding of cooling plate 12, can not make making processes too complicated merely.
Please continue to refer to Fig. 2, described cooling plate 12 can be the structure of hollow, thereby can pass into for example water coolant, cooling wet goods within it carries out cooling to the first gas diffusion chamber and the second gas diffusion chamber, the hollow space that is positioned at cooling plate 12 of described the second through hole 121 and third through-hole 122 can be the pipeline of access, the top and bottom of this pipeline and cooling plate 12 are fixed together, for example, can be to weld together.Because the first through hole 112 and third through-hole 122 are that laminating by gas distribution plate 11 and cooling plate 12 combines, therefore, in order further to improve stopping property, can between the first through hole 112 and third through-hole 122, increase metal o-ring, around the two junction one week.In another preferred embodiment, in described the first through hole 112, be inserted with the first flue, the hole wall laminating of the outer wall of described the first flue and described the first through hole 112, the lower end of described the first flue can also be stretched in third through-hole 122 and be positioned at the pipeline joint of the hollow space of cooling plate 12 with described third through-hole 122, also can, so that the first flue further extends, run through described third through-hole 122.Adopt this structure, make reactant gases pass through special flue (i.e. the first flue) rather than the first through hole 112 flows through, can protect the structure of the first through hole 112, gas distribution plate 11 and third through-hole 122, improve the life-span of gas distribution plate 11.
Based on above-mentioned spray header, the invention provides a kind of reaction chamber, comprise: cavity, for pallet and the spray header of load substrates, described pallet is arranged at the bottom of described cavity, described spray header is arranged on the top of described cavity and is oppositely arranged with described pallet, between described pallet and described spray header, limit gas reaction area, described spray header is used for to described conversion zone output-response gas; Described spray header is spray header as above.In order to guarantee the homogeneity of reaction, described pallet is rotated in the speed with 50-200 rev/min in reaction process, and preferred, the rotating speed of described pallet is 100-200 rev/min.
In sum, at spray header provided by the invention and comprising in the reaction chamber of described spray header, described spray header comprises the top board of stacking setting from top to bottom, gas distribution plate and cooling plate, described gas distribution plate comprises a plurality of the first through holes that run through described gas distribution plate, the lower surface of described gas distribution plate has a plurality of depressions, described depression is arranged on the region between described adjacent through-holes, compared to existing technology, the present invention by arranging depression and through hole in gas distribution plate, avoided the situation that in prior art, gas passage need to weld with porous plate, but gas passage directly by being set in gas distribution plate, through hole is formed, and form gas diffusion chamber by the laminating of gas distribution plate and cooling plate, do not need to weld, the structure of whole spray header is simplified, make manufacture difficulty have obvious reduction.
Obviously, those skilled in the art can carry out various changes and modification and not depart from the spirit and scope of the present invention invention.Like this, if within of the present invention these are revised and modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these change and modification.
Claims (13)
1. a spray header, for providing reactant gases to conversion zone, is characterized in that, described spray header comprises top board, gas distribution plate and the cooling plate of stacking setting from top to bottom; Described gas distribution plate comprises a plurality of the first through holes that run through described gas distribution plate, and the lower surface of described gas distribution plate has a plurality of depressions, and described depression is arranged on the region between adjacent described the first through hole; Described cooling plate is arranged at intervals with the second through hole and the third through-hole that runs through described cooling plate, and described third through-hole is connected with the first through hole, and described the second through hole is connected with described depression; The lower surface of described gas distribution plate and the laminating of described cooling plate upper surface make described depression and cooling plate surround the second gas diffusion chamber, and described the second through hole is communicated with the conversion zone of described the second gas diffusion chamber and cooling plate below; Between described top board and described gas distribution plate, limit the first gas diffusion chamber, the common conversion zone that is communicated with described the first gas diffusion chamber and cooling plate below of described the first through hole and third through-hole.
2. spray header as claimed in claim 1, is characterized in that, between described gas distribution plate and cooling plate for removably connecting.
3. spray header as claimed in claim 2, it is characterized in that, described gas distribution plate is provided with a plurality of draw-in grooves towards a side of cooling plate, described cooling plate is provided with corresponding projection towards a side of gas distribution plate, and described draw-in groove and projection fitted seal are so that described gas distribution plate and cooling plate stick together.
4. spray header as claimed in claim 3, is characterized in that, described projection is that resilient material forms.
5. spray header as claimed in claim 4, is characterized in that, described resilient material comprises aluminium, copper, silica gel rubber and Teflon.
6. spray header as claimed in claim 3, it is characterized in that, described gas distribution plate edge is also provided with lockhole for one week, and described cooling plate is provided with padlock towards a lateral edges of gas distribution plate, and described padlock snaps in described lockhole so that described gas distribution plate and cooling plate stick together.
7. spray header as claimed in claim 1, is characterized in that, described gas distribution plate and cooling plate weld together.
8. spray header as claimed in claim 1, is characterized in that, a plurality of depressions of described gas distribution plate form by Cutting Process, and described the first through hole forms by bore process.
9. spray header as claimed in claim 8, is characterized in that, described Cutting Process is milling, or spark discharge processing.
10. spray header as claimed in claim 1, it is characterized in that, described top board has depression towards the one side of gas distribution plate, or described gas distribution plate has depression towards the one side of top board, the rear first gas diffusion chamber that forms thereby described top board and gas distribution plate are fitted.
11. spray headers as claimed in claim 1, is characterized in that, described the first gas diffusion chamber passes into the first gas, and described the second gas diffusion chamber passes into the second gas, described the first gas WeiIII family gas, and described the second gas is V family gas.
12. spray headers as claimed in claim 1, is characterized in that, in described the first through hole, are inserted with the first flue, the hole wall laminating of the outer wall of described the first flue and described the first through hole.
13. 1 kinds of reaction chambers, comprise: cavity, for pallet and the spray header of load substrates, described pallet is arranged at the bottom of described cavity, described spray header is arranged on the top of described cavity and is oppositely arranged with described pallet, between described pallet and described spray header, limit gas reaction area, described spray header is used for to described conversion zone output-response gas; It is characterized in that, described spray header is the spray header as described in any one in claim 1-12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310517831.1A CN103540910A (en) | 2013-10-28 | 2013-10-28 | Spray header and reaction cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310517831.1A CN103540910A (en) | 2013-10-28 | 2013-10-28 | Spray header and reaction cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103540910A true CN103540910A (en) | 2014-01-29 |
Family
ID=49964746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310517831.1A Pending CN103540910A (en) | 2013-10-28 | 2013-10-28 | Spray header and reaction cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103540910A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108624865A (en) * | 2017-03-15 | 2018-10-09 | 汉民科技股份有限公司 | Detachable air injection device applied to semiconductor equipment |
| WO2021197200A1 (en) * | 2020-04-03 | 2021-10-07 | 北京北方华创微电子装备有限公司 | Gas distributor in semiconductor device and semiconductor device |
-
2013
- 2013-10-28 CN CN201310517831.1A patent/CN103540910A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108624865A (en) * | 2017-03-15 | 2018-10-09 | 汉民科技股份有限公司 | Detachable air injection device applied to semiconductor equipment |
| CN108624865B (en) * | 2017-03-15 | 2020-06-23 | 汉民科技股份有限公司 | Detachable air injection device applied to semiconductor equipment |
| WO2021197200A1 (en) * | 2020-04-03 | 2021-10-07 | 北京北方华创微电子装备有限公司 | Gas distributor in semiconductor device and semiconductor device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5863050B2 (en) | Gas shower head, manufacturing method thereof, and thin film growth reaction apparatus | |
| JP5184594B2 (en) | Light fixtures using light-emitting diodes | |
| CN103981485B (en) | Mask plate and manufacture method thereof | |
| CN105090887B (en) | LED lamp and its optical lens | |
| US20120313113A1 (en) | Photovoltaic organic light emitting diodes device and manufacturing method thereof | |
| CN103540910A (en) | Spray header and reaction cavity | |
| CN101621022A (en) | Combined type chip carrying disk and epitaxy machine platform thereof | |
| CN103540911A (en) | Manufacturing method of spray header | |
| US20130114243A1 (en) | Ceiling fixture | |
| CN110079790B (en) | Graphite base | |
| CN205504511U (en) | Liquid cooling module and LED device | |
| JP3171770U (en) | LED lighting fixture structure | |
| CN203653690U (en) | Spray head | |
| CN208197825U (en) | UV-LED curing light source system | |
| CN103526185A (en) | Spray head and reaction chamber | |
| CN103872221A (en) | Light-emitting device | |
| CN203800044U (en) | Lighting bar, and light source using same | |
| CN103556128A (en) | Close-coupled spray head and reaction chamber | |
| US10566513B1 (en) | LED circuit structure | |
| CN202454607U (en) | LED (light-emitting diode) heat radiating substrate | |
| CN202373621U (en) | Graphite boat for silicon wafer coating | |
| CN202382134U (en) | LED light source applicable to headlamp for vehicles and ships | |
| CN206929561U (en) | A kind of fixed structure of the COB ceramic substrates of UVLED light sources | |
| CN208058501U (en) | A kind of lamp string convenient for dismantling | |
| CN206739218U (en) | A kind of high efficiency and heat radiation and the LED single modules with shock-absorbing function |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140129 |