CN103526167B - Sheet material filming equipment - Google Patents
Sheet material filming equipment Download PDFInfo
- Publication number
- CN103526167B CN103526167B CN201210234626.XA CN201210234626A CN103526167B CN 103526167 B CN103526167 B CN 103526167B CN 201210234626 A CN201210234626 A CN 201210234626A CN 103526167 B CN103526167 B CN 103526167B
- Authority
- CN
- China
- Prior art keywords
- rewinding
- unwinding
- sheet metal
- dancer
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of sheet material coating process equipment, especially a kind of sheet material filming equipment.Including housing, enclosure interior is provided with accommodation space；First unwinding and rewinding, are located at housing interior for coiling sheet metal to be coated and by rotating release sheet metal；Second unwinding and rewinding, are located in housing for receiving plating filmed metals sheet material rotate back to close at unwinding and rewinding；Target, is respectively arranged on the both sides of sheet metal operating path for sheet metal is carried out magnetron sputtering plating；On housing, the position corresponding to target is provided with hatch door.The present invention forms a sheet metal and is rolled onto the operating path of the second unwinding and rewinding by the first folding and unfolding, the both sides of the operating path that target is located at sheet metal carry out magnetron sputtering plating, make the compact conformation of internal part, machine volume is small and exquisite, running is the most controlled, greatly improve the quality of coating process, strengthen the endothermic effect of sheet material, improve the transformation efficiency of energy.
Description
Technical field
The present invention relates to a kind of sheet material coating process equipment, especially a kind of sheet material filming equipment.
Background technology
Owing to the Devoting Major Efforts To Developing of conventional energy resource utilizes, worldwide environmental pollution is caused to be on the rise.
A lot of countries have realized that solar energy, as regenerative resource, uses environmental resource persistently in the world
Benefit aspect for the mankind and will play the hugest effect.Have the China of abundant solar energy resources, in
Play formal enforcement " Renewable Energy Law ", meanwhile, country's Eleventh Five-Year Plan guiding principle on January 1st, 2006
Will the most using the development of renewable resource as a vital task, therefore solar heat device itself has huge
Big potential application value.In recent years, flat type solar heat collector has pressure-bearing energy due to it
Power is strong, and the features such as endotherm area is big, are that building integration combines optimal heat collector type.
And the core technology of flat type solar heat collector is that the absorber coatings of solar absorber surface, absorber coatings
Quality, decides the performance of whole heat collector.
Existing coating plating equipment is generally multiple vacuum chamber: charging locking and valve box, process chamber and
Play material room.The end of process chamber is directly in induction system.Various annexes can be placed in process chamber with
Realize various magnetic control environment and fixing controlled sputtering source.Each process chamber of this equipment can only be coated with
A kind of film layer, therefore being coated with multilayer solar heat absorbing coating when, it is necessary to multiple process chambers, respectively
Needing some vacuum sealing devices between chamber, active line is the longest, it is difficult to control, and quality is unstable, leads
Cause equipment cost is high, bulky.And the production efficiency of this plating equipment and yield rate also compare
Low.This above-mentioned technical problem, long-term existence, with plate-type solar industry, is not the most had
The solution of effect.
Summary of the invention
The present invention provide a kind of simple in construction, low cost, coating process quality easily controllable and stable too
Sun can heat-collecting plate core filming equipment.
To achieve these goals, the present invention adopts the following technical scheme that
It includes:
Housing, enclosure interior is provided with accommodation space；
First unwinding and rewinding, are located at housing interior for coiling sheet metal to be coated and by rotating release metal
Sheet material；
Second unwinding and rewinding, are located in housing for receiving plating filmed metals sheet material rotate back to close at unwinding and rewinding
On；
Target, is located at the both sides of sheet metal operating path for sheet metal is carried out magnetron sputtering plating；
On housing, the position corresponding to target is provided with hatch door.
In said structure, the operating path of sheet metal is provided with the rate of tension for regulating sheet metal
Dancer, the position manually or automatically controlling dancer realizes correction to plate；On described housing
It is provided with sensor, by the lifting of sensor detection dancer, the rotating speed of unwinding and rewinding is finely adjusted.
In said structure, the first unwinding and rewinding 2 and the second unwinding and rewinding 3 are respectively preinstalled with one section of sheet metal,
Reserved sheet material in sheet material two ends respectively with the first unwinding and rewinding 2 to be coated and the second unwinding and rewinding 3 connects, with
Realize the plated film to all sheet materials to be coated.In said structure, in described housing middle part be additionally provided with for
The enclosure of idle space in minimizing housing, enclosure both sides are provided with heater.
In said structure, described housing is upright shell, the first described unwinding and rewinding and the second unwinding and rewinding
Being located at above enclosure interior, described dancer is located at below enclosure interior, and described enclosure is located at gold
Belong to sheet material by the first unwinding and rewinding in the U-shaped path domain that dancer to the second unwinding and rewinding is formed, described
Target is located in the both sides inner walls relative with enclosure.In said structure, described housing is vertical
Housing, the first described unwinding and rewinding and the second unwinding and rewinding are located at below enclosure interior, the first described folding and unfolding
Being respectively provided with the first guide roller and the second guide roller above volume and the second unwinding and rewinding, described dancer is located at
Position between first unwinding and rewinding, the second unwinding and rewinding, the first guide roller and the second guide roller, described envelope
Close cabin and be located at the U-shaped path domain that sheet metal is formed through dancer to the second guide roller by the first guide roller
In, the U-shaped path domain that sheet metal is formed through the first guide roller to dancer by the first unwinding and rewinding neutralizes
Sheet metal is set in the U-shaped path domain that the first guide roller to the second unwinding and rewinding is formed respectively by dancer
Put one group of target.
In said structure, described housing is horizontal type shell, the first described unwinding and rewinding and the second unwinding and rewinding
Being located at enclosure interior one end, the enclosure interior other end is located at by described dancer, and described enclosure is located at
Sheet metal by the first unwinding and rewinding in the U-shaped path domain that dancer to the second unwinding and rewinding is formed, described
Target be located in the both sides inner walls relative with enclosure.
In said structure, described dancer is located on a horizontal or vertical dancer support, dancer
Can be relative to dancer support vertical or horizontal movement.
Owing to have employed said structure, the solar heat-collection plate core filming equipment of the present invention is in enclosure interior shape
Become a sheet metal to be rolled onto release and the path of recovery of the second unwinding and rewinding by the first folding and unfolding, target is located at
The both sides of the operating path of sheet metal carry out magnetron sputtering plating so that the compact conformation of internal part,
Machine volume is small and exquisite, and whole service process is the most controlled, greatly improves coating process
Quality, strengthens the endothermic effect of heat-absorbing plate core, improves the transformation efficiency of luminous energy.
Accompanying drawing explanation
Fig. 1 is the internal plane structural representation of first embodiment of the invention；
Fig. 2 is the perspective interior structural representation of first embodiment of the invention；
Fig. 3 is the internal plane structural representation of second embodiment of the invention；
Fig. 4 is the perspective interior structural representation of second embodiment of the invention；
Fig. 5 is the internal plane structural representation of third embodiment of the invention；
Fig. 6 is the perspective interior structural representation of third embodiment of the invention；
Fig. 7 is the internal plane structural representation of fourth embodiment of the invention；
Fig. 8 is the perspective interior structural representation of fourth embodiment of the invention；
Fig. 9 is the perspective interior structural representation of fifth embodiment of the invention.
Detailed description of the invention
Sheet material filming equipment provided in embodiments of the invention includes that housing, enclosure interior are provided with accommodating
Space；First unwinding and rewinding, are located at housing interior for coiling sheet metal to be coated and by rotating release gold
Belong to sheet material；Second unwinding and rewinding, are located in housing for receiving plating filmed metals sheet material rotate back to close at receipts
Unreel；Target, is located at the both sides of sheet metal operating path for sheet metal is carried out magnetron sputtering
Plated film；On housing, the position corresponding to target is provided with hatch door.
During work, the first unwinding and rewinding are rotated into the release of row metal sheet material, the sheet metal warp that release obtains
Carrying out magnetron sputtering plating when crossing target, then carried out reclaiming by the second unwinding and rewinding stand-by, concrete principle can
With reference to the magnetron sputtering technology of this area, explanation is not repeated herein.
Less owing to carrying out the universal thickness of the sheet metal of magnetron sputtering plating, generally 0.1-0.5 millimeter
Left and right, often occurs the lax or situation of gauffer in winding and running, causes by plated film
Surface irregularity, affects the effect of plated film, and in order to avoid above-mentioned situation occurs, the present invention is at sheet metal
Operating path be provided with the dancer of the rate of tension for regulating sheet metal, metallic plate is located at by dancer
On the operating path of material and deviate the plane at rotating shaft place of the first unwinding and rewinding and the second unwinding and rewinding so that floating
Action roller has the effect of a kind of tension to sheet metal, eliminates the lax and phenomenon of gauffer, it is ensured that the effect of plated film
Really.During use, the position manually or automatically controlling dancer realizes the correction to plate；And it is described
Housing is provided with sensor, is finely adjusted the rotating speed of unwinding and rewinding by the lifting of sensor detection dancer.
The plane at the rotating shaft place of the first unwinding and rewinding and the second unwinding and rewinding is deviate from, in order to right due to dancer
Sheet metal is rolled onto dancer by the first folding and unfolding and is led when the second unwinding and rewinding run by dancer
To so that overall operation process is more steady, is provided with guide roller on the operating path of sheet metal.
With embodiment, several different structure of the present invention is described in detail below in conjunction with the accompanying drawings.
Fig. 1 and Fig. 2 is the accompanying drawing of first embodiment of the invention, and as depicted in figs. 1 and 2, the present invention
Housing 1a described in one embodiment is upright shell, the first described unwinding and rewinding 2a and the second unwinding and rewinding
3a is located at housing 1a inner upper, and described dancer 4a is located at housing 1a lower inside, during housing is interior
Portion is provided with an enclosure 5a, enclosure 5a and reduces the idle space in housing, shortens the time vacuumized,
Enclosure 5a is located at sheet metal and is formed through dancer 4a to second unwinding and rewinding 3a by the first unwinding and rewinding 2a
U-shaped path domain in, enclosure 5a both sides are provided with heater 51a, described target 6a and are located at and seal
Close in both sides inner walls relative for cabin 5a.Moreover, sheet metal by the first unwinding and rewinding 2a to
Dancer 4a and further respectively had guide roller on the operating path of the second unwinding and rewinding 3a by dancer 4a
7a and 7a '.Operationally, sheet metal is discharged by the first unwinding and rewinding 2, by the first unwinding and rewinding 2a
Arriving dancer 4a through guide roller 7a, in this running, the target 6a on the inwall of side is to metal
Sheet material carries out a plated film, is then run to the second unwinding and rewinding 3a through guide roller 7a ' by dancer 4a,
In the process, the target 6a on opposite side inwall carries out a plated film to sheet metal, and last plated film is complete
The sheet metal become is recovered on the second unwinding and rewinding 3a, and coating process terminates, and is recovered in the second unwinding and rewinding 3a
On sheet metal can be stand-by as the vitals of heat-absorbing plate core.For the ease of changing target, this enforcement
In example, on housing 1a, the position corresponding to target is provided with hatch door 11a.The first unwinding and rewinding it are positioned in housing
It is provided with dividing plate 12a with the position below the second unwinding and rewinding.
Moreover, it is noted that due to sheet metal through the first unwinding and rewinding 2a to dancer 4a again
In the running of the second unwinding and rewinding 3a, when the metal material to be coated on the first unwinding and rewinding 2a arrives
When reaching the end, sheet metal end is strained in the first unwinding and rewinding, and whole service process terminates, so often
All some does not has plated film to be recovered on the second unwinding and rewinding 3a to the end of individual metal material volume, causes wave
Take, in order to avoid waste, in the present embodiment, the first unwinding and rewinding 2 and the second unwinding and rewinding 3 are respectively pre-installed
There is one section of sheet metal, in sheet material two ends respectively with the first unwinding and rewinding 2 to be coated and the second unwinding and rewinding 3
Reserved sheet material connects, to realize the plated film to all sheet materials to be coated.
Judgement and regulation to the state of dancer can be by manually carry out or automatically carry out, in order to realize
Automatic decision and control, the present embodiment also sets up a sensor 9a on housing, floating by sensor detection
The rotating speed of unwinding and rewinding is finely adjusted by the lifting of action roller, and the detection of sensor signal and execution are known technologies,
The most concrete principle launched explanation sensor and suggestion device or perform device.
Fig. 3 and Fig. 4 is the accompanying drawing of second embodiment of the invention, as shown in Figure 3 and Figure 4, the present invention's
In second embodiment, major part structure is identical with first embodiment with principle, and explanation is not repeated herein,
Being with the difference of first embodiment, the first described unwinding and rewinding 2b and the second unwinding and rewinding 3b is positioned at
Differentiated levels, after being designed as this structure, the first unwinding and rewinding 2b and the second unwinding and rewinding 3b is permissible
Closer to setting, it is possible to reduce the width of housing, make complete machine smaller and more exquisite.
Fig. 5 and Fig. 6 is the accompanying drawing of third embodiment of the invention, as shown in Figure 5 and Figure 6, the present invention's
In 3rd embodiment, major part structure is identical with first embodiment with principle, and explanation is not repeated herein,
It is with the difference of first embodiment, in first embodiment, the first unwinding and rewinding 2c and the second unwinding and rewinding
3c is rotating in same direction, and in the 3rd embodiment, the first unwinding and rewinding 2c and the second unwinding and rewinding 3c is to rotate backward,
All can realize the release of sheet metal and the effect of recovery.
Fig. 7 and Fig. 8 is the accompanying drawing of fourth embodiment of the invention, as shown in Figure 7 and Figure 8, the present invention's
In 4th embodiment, described housing 1d is upright shell, and the first described unwinding and rewinding 2d and second receives
Unreel 3d and be located at housing 1d lower inside, above the first described unwinding and rewinding 2d and the second unwinding and rewinding 3d
Being respectively provided with the first guide roller 7d and the second guide roller 7d ', described dancer 4d is located at the first folding and unfolding
Volume 2d, position between the second unwinding and rewinding 3d, the first guide roller 7d and the second guide roller 7d ', described
Enclosure 5d be located at sheet metal by the first guide roller 7d through dancer 4d to second guide roller 7d ' shape
In the U-shaped path domain become, enclosure both sides are provided with heater 51d, and sheet metal is by the first unwinding and rewinding 2d
With sheet metal by dancer 4d in the U-shaped path domain that the first guide roller 7d to dancer 4d is formed
It is respectively provided with one group of target in the U-shaped path domain that the first guide roller 7d to second unwinding and rewinding 3d is formed
6d and 6d '.Being additionally provided with guide roller 10d on the operating path of sheet metal, side is in the drawings by other
Parts are occluded, and not shown in figure, are provided with dividing plate 12d below the first unwinding and rewinding 2d and the second unwinding and rewinding 3d.
It addition, identical with first embodiment, in the 4th embodiment, dancer 4d is located at a vertical float roller
On support 8d, and on housing 1d, it is also provided with a sensor 9d, dancer support 8d and sensor
The effect of 9d is identical with the first to the 3rd embodiment with principle, and explanation is not repeated herein.
Fig. 9 is the accompanying drawing of fifth embodiment of the invention, as it is shown in figure 9, in the fifth embodiment of the present invention,
Described housing 1e is horizontal type shell, and the first described unwinding and rewinding 2e and the second unwinding and rewinding 3e is located at housing
The internal one end of 1e, described dancer 4e is located at the internal other end of housing 1e, and described enclosure 5e sets
In sheet metal by the first unwinding and rewinding 2e through U-shaped path model that dancer 4e to second unwinding and rewinding 3e is formed
In enclosing, described target 6e is located in the both sides inner walls relative with enclosure 5e.At sheet metal
Operating path on be additionally provided with guide roller 10e, 10e '.
Same, in the 5th enforcement, dancer 4e is located on a dancer support 8e, due to the present embodiment
Housing is horizontal type shell, and in shown the present embodiment, dancer support 8e is horizontal adjustment bracket, dancer
4e regulates rate of tension by horizontal movement on dancer support 8e, and be also provided with on housing 1e
One sensor 9e, the effect of dancer support 8e and sensor 9e and principle and above four embodiment phases
With, explanation is not repeated herein.
It addition, the 4th and the 5th embodiment, the first unwinding and rewinding and the second unwinding and rewinding are not it can also be provided that exist
Same level or the form rotated in the same direction or in opposite directions, as long as the release of sheet metal can effectively be realized
With reclaim.
The foregoing is only the preferred embodiments of the present invention, not thereby limit the scope of the claims of the present invention,
Every equivalent structure utilizing description of the invention and accompanying drawing content to be made or equivalence flow process conversion, or directly
Or indirectly it is used in other relevant technical fields, the most in like manner it is included in the scope of patent protection of the present invention.
Claims (3)
1. a sheet material filming equipment, it is characterised in that including:
Housing, enclosure interior is provided with accommodation space；
First unwinding and rewinding, are located at housing interior for coiling sheet metal to be coated and by rotating
Release sheet metal；
Second unwinding and rewinding, are located in housing for receiving plating filmed metals sheet material rotate recovery
In unwinding and rewinding:
Target, is located at the both sides of sheet metal operating path for sheet metal is carried out magnetic control
Sputter coating；
On housing, the position corresponding to target is provided with hatch door；Operating path at sheet metal
It is provided with the dancer of rate of tension for regulating sheet metal, manually or automatically controls to float
The position of roller realizes the correction to plate；Described housing is provided with sensor, by sensing
The rotating speed of unwinding and rewinding is finely adjusted by the lifting of device detection dancer；First unwinding and rewinding and second
One section of sheet metal, sheet material two ends respectively with the first folding and unfolding to be coated respectively it is preinstalled with in unwinding and rewinding
Reserved sheet material on volume and the second unwinding and rewinding connects, to realize the plating to all sheet materials to be coated
Film；In described housing, middle part is additionally provided with the enclosure of idle space in reducing housing,
Enclosure both sides are provided with heater；
Described housing is upright shell, and the first described unwinding and rewinding and the second unwinding and rewinding are located at
Below enclosure interior, above the first described unwinding and rewinding and the second unwinding and rewinding, it is respectively provided with first
Guide roller and the second guide roller, described dancer be located at the first unwinding and rewinding, the second unwinding and rewinding,
Position between first guide roller and the second guide roller, described enclosure is located at sheet metal
By the first guide roller in the U-shaped path domain that dancer to the second guide roller is formed, metal
The U-shaped path domain that sheet material is formed through the first guide roller to dancer by the first unwinding and rewinding neutralizes
The U-shaped path domain that sheet metal is formed through the first guide roller to the second unwinding and rewinding by dancer
In be respectively provided with one group of target.
2. sheet material filming equipment as claimed in claim 1, it is characterised in that: described shell
Body is horizontal type shell, and enclosure interior one end is located in the first described unwinding and rewinding and the second unwinding and rewinding,
The enclosure interior other end is located at by described dancer, described enclosure be located at sheet metal by
First unwinding and rewinding are in the U-shaped path domain that dancer to the second unwinding and rewinding is formed, described
Target
Material is located in the both sides inner walls relative with enclosure.
3. the sheet material filming equipment as according to any one of claim 1 or 2, its feature exists
In: described dancer is located on a horizontal or vertical dancer support, and dancer can phase
For dancer support vertical or horizontal movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210234626.XA CN103526167B (en) | 2012-07-06 | 2012-07-06 | Sheet material filming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210234626.XA CN103526167B (en) | 2012-07-06 | 2012-07-06 | Sheet material filming equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103526167A CN103526167A (en) | 2014-01-22 |
| CN103526167B true CN103526167B (en) | 2016-09-07 |
Family
ID=49928506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210234626.XA Expired - Fee Related CN103526167B (en) | 2012-07-06 | 2012-07-06 | Sheet material filming equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103526167B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110438467A (en) * | 2019-09-16 | 2019-11-12 | 林初赢 | A kind of winding magnetic control sputtering coating machine |
| CN112095087B (en) * | 2019-12-13 | 2022-06-14 | 深圳市中欧新材料有限公司 | Coating equipment with air isolation structure for production of conductive film |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2910966Y (en) * | 2006-03-24 | 2007-06-13 | 潘旭祥 | High speed winding multi-layered electric capacity thin film coating apparatus |
| CN202688422U (en) * | 2012-06-15 | 2013-01-23 | 杨宪杰 | Vertical coating equipment |
| CN202688421U (en) * | 2012-06-15 | 2013-01-23 | 杨宪杰 | Horizontal type coating equipment |
| CN202925089U (en) * | 2012-07-06 | 2013-05-08 | 杨宪杰 | Sheet coating equipment |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006060057A1 (en) * | 2006-12-19 | 2008-06-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Antimicrobial material and method for producing an antimicrobial material |
| KR20090071728A (en) * | 2007-12-28 | 2009-07-02 | 주식회사 디엠에스 | Sputtering system |
-
2012
- 2012-07-06 CN CN201210234626.XA patent/CN103526167B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2910966Y (en) * | 2006-03-24 | 2007-06-13 | 潘旭祥 | High speed winding multi-layered electric capacity thin film coating apparatus |
| CN202688422U (en) * | 2012-06-15 | 2013-01-23 | 杨宪杰 | Vertical coating equipment |
| CN202688421U (en) * | 2012-06-15 | 2013-01-23 | 杨宪杰 | Horizontal type coating equipment |
| CN202925089U (en) * | 2012-07-06 | 2013-05-08 | 杨宪杰 | Sheet coating equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103526167A (en) | 2014-01-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202688421U (en) | Horizontal type coating equipment | |
| CN103526167B (en) | Sheet material filming equipment | |
| CN108880409B (en) | Wind-solar complementary lithium battery all-in-one machine | |
| CN107046393B (en) | A kind of distributed elevation of building photovoltaic integrated elelctrochemical power generation storing up electricity integrated system | |
| CN107305951A (en) | A kind of zinc-bromine flow battery | |
| CN202688422U (en) | Vertical coating equipment | |
| CN107323290A (en) | A kind of electric automobile charging station and its charging method based on internet | |
| CN104332518A (en) | Frameless crystal silicon cell complete anti-PID light assembly and solar panel | |
| CN203188421U (en) | Intelligent elevation photovoltaic curtain wall | |
| CN102412603A (en) | Solar power generation and battery power storage integrated power supply plate and production technology thereof | |
| CN205316700U (en) | Energy -saving and environment -friendly solar water heater | |
| CN202925089U (en) | Sheet coating equipment | |
| CN204289480U (en) | The completely anti-PID light components of rimless type crystal silicon battery and cell panel | |
| CN207555451U (en) | It is a kind of to fit up with the headlamp with energy-saving environmental-protection function | |
| CN101566125A (en) | Door type self-return vertical shaft geomantic vehicle | |
| CN208563796U (en) | A kind of roof structure of the solar energy photovoltaic panel of adjustable-angle | |
| CN206395526U (en) | A kind of rolling-up mechanism for external protection sheet production | |
| CN109764466A (en) | A kind of solar wind-energy ventilator | |
| CN109245684A (en) | A kind of photovoltaic module water-cooling system | |
| CN210273930U (en) | Solar cell panel for new forms of energy convenient to adjustment inclination | |
| CN105552235B (en) | A kind of method for improving perovskite solar battery efficiency | |
| CN110205595A (en) | Intracavity magnetron sputtering apparatus and method | |
| CN206673870U (en) | A kind of distributed elevation of building photovoltaic integrated elelctrochemical power generation storing up electricity integrated system | |
| CN202170363U (en) | Sealing door for flat plate heat collection stripe horizontal film plating machine winding/unwinding room | |
| CN207160636U (en) | Glass sunlight house device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170904 Address after: 518000 Guangdong city of Shenzhen province Nanshan District Qianhai Shenzhen Hong Kong cooperation zone before the Bay Road No. 1 building 201 room A (located in Shenzhen Qianhai business secretary Co. Ltd.) Patentee after: Shenzhen nest parking Technology Co., Ltd. Address before: 523007 Guangdong city of Dongguan province Dongcheng District Qifeng road Cathay Building, room 815 Patentee before: Yang Xianjie |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160907 Termination date: 20180706 |