CN103499848B - Laser micro thruster optical system and installation method thereof - Google Patents

Laser micro thruster optical system and installation method thereof Download PDF

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CN103499848B
CN103499848B CN201310404575.5A CN201310404575A CN103499848B CN 103499848 B CN103499848 B CN 103499848B CN 201310404575 A CN201310404575 A CN 201310404575A CN 103499848 B CN103499848 B CN 103499848B
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diffraction element
order aspheric
laser
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thruster
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徐亮
赵建科
初昶波
段亚轩
陈永权
张昊苏
周艳
杨菲
胡丹丹
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The invention belongs to the field of optics, and particularly relates to an optical system of a laser micro thruster and an installation method thereof, which are mainly used for developing the laser micro thruster in an attitude adjustment system of a space micro satellite. The laser micro thruster optical system comprises a semiconductor laser, a diffraction element high-order aspheric surface micro lens array and a target zone, wherein the semiconductor laser is arranged in the laser micro thruster; laser of the semiconductor laser forms a laser target surface through convergence of the high-order aspheric micro lens array of the diffraction element, the laser target surface is adjusted to coincide with a target zone during installation, and then the target zone is ablated to generate strong thrust. The invention has the advantages of volume, light weight, good focusing effect, simple debugging method, low energy consumption and the like.

Description

一种激光微推力器光学系统及其安装方法Optical system of laser micro thruster and installation method thereof

技术领域technical field

本发明属于光学领域,具体涉及一种激光微推力器光学系统及其安装方法,主要用于航天微小卫星姿态调整系统中激光微推力器的研制。The invention belongs to the field of optics, and in particular relates to an optical system of a laser micro-thruster and an installation method thereof, which are mainly used in the development of a laser micro-thruster in an attitude adjustment system of an aerospace micro-satellite.

背景技术Background technique

激光微推力器是一种新型的微推进系统,主要用于微型航天器的位置保持、姿态控制、引力补偿和轨道调整。本文研究的激光微推力器光学系统主要用于对高能激光的整型聚焦。以往的激光微推力器光学系统结构复杂、体积庞大,无法满足航天微小卫星的小型化、低功耗发展要求。因此,需要研究一种小型化、轻量化的光学系统,以满足微小卫星的研制要求。Laser micro-thruster is a new type of micro-propulsion system, which is mainly used for position maintenance, attitude control, gravity compensation and orbit adjustment of micro-spacecraft. The laser micro-thruster optical system studied in this paper is mainly used for the integral focusing of high-energy laser. The optical system of laser micro-thrusters in the past is complex in structure and bulky, which cannot meet the miniaturization and low power consumption development requirements of aerospace micro-satellites. Therefore, it is necessary to study a miniaturized and lightweight optical system to meet the development requirements of microsatellites.

目前,激光微推力器样机性能的关键集中在两点:提高光斑的功率密度和改进靶材性能,因此,这就要求激光微推力器光学系统应具有良好的聚焦性能。对于航天飞行器的推力技术光学系统主要有两种,第一种:通过抛物型聚光镜来实现激光聚焦烧蚀;第二种:通过多透镜组来实现激光器的光斑聚焦烧蚀。上述两种方法虽然在实际工程中已被广泛应用,但是仍然存在很多缺陷。第一种方法虽然对于航天飞行器来说其产生的推力很强,结构简单、易于实现,但是对于航天微星来说,首先要求微推力器的外形尺寸要小,然而采用这种方法必将使其外形尺寸加大,无法满足微星整体设计中小型化、轻量化的要求。第二种方法,虽然在很多微星上已陆续投入使用,然而多镜组的应用不仅光路复杂、调试也困难,聚焦效果始终不佳,导致系统能效降低。为了满足最终的使用,只能提高总的输入功率,从而使系统总的功耗增加,这样将大大降低了微星的在轨使用寿命。因此,上述两种方法急需进一步改进。At present, the key to the performance of the laser micro-thruster prototype is focused on two points: increasing the power density of the spot and improving the performance of the target. Therefore, this requires that the laser micro-thruster optical system should have good focusing performance. There are mainly two types of thrust technology optical systems for aerospace vehicles. The first type: laser focus ablation is achieved through parabolic condensers; the second type: laser spot focus ablation is achieved through multi-lens groups. Although the above two methods have been widely used in practical engineering, there are still many defects. Although the first method produces strong thrust for aerospace vehicles, has a simple structure and is easy to implement, for aerospace micro-satellites, it first requires that the size of the micro-thruster be small, but adopting this method will make it The enlarged external dimensions cannot meet the miniaturization and lightweight requirements of MSI's overall design. The second method, although it has been put into use on many MSIs, the application of multi-mirror groups is not only complicated in the optical path, but also difficult to debug, and the focusing effect is always poor, resulting in a decrease in system energy efficiency. In order to meet the final use, the total input power can only be increased, thereby increasing the total power consumption of the system, which will greatly reduce the on-orbit service life of the MSI. Therefore, the above two methods are in urgent need of further improvement.

综上所述,考虑到该课题的研究是用于对航天微小卫星研制的关键技术,该项技术的研究成功,将预示着国内航天微星微推力技术进入一个新的台阶。因此,开展激光微推力器光学系统的研究,将对我国航天卫星事业的发展起着推动性作用。To sum up, considering that the research on this topic is the key technology for the development of aerospace micro-satellites, the successful research of this technology will indicate that the domestic aerospace micro-satellite micro-thrust technology has entered a new level. Therefore, carrying out the research on the optical system of the laser micro-thruster will play a role in promoting the development of my country's aerospace satellite industry.

发明内容Contents of the invention

为了解决背景技术中的问题,本发明提供一种小型化、轻量化且聚焦效果好、调试方法简单、能耗小的一种激光微推力器光学系统及其安装方法。In order to solve the problems in the background technology, the present invention provides a laser micro-thruster optical system and its installation method that are miniaturized, lightweight, have good focusing effect, simple debugging method, and low energy consumption.

本发明的具体技术方案是:Concrete technical scheme of the present invention is:

一种激光微推力器光学系统,包括设置在激光微推力器内部的半导体激光器、衍射元件高次非球面微透镜阵列以及靶带;A laser micro-thruster optical system, including a semiconductor laser arranged inside the laser micro-thruster, a diffraction element high-order aspheric micro-lens array, and a target belt;

所述衍射元件高次非球面微透镜阵列安装在半导体激光器出射光线与靶带入射光线之间;所述半导体激光器出射光线通过衍射元件高次非球面微透镜阵列汇聚形成激光靶面;所述激光靶面与靶带相重合;The high-order aspheric microlens array of the diffraction element is installed between the outgoing light of the semiconductor laser and the incident light of the target belt; the outgoing light of the semiconductor laser is converged by the high-order aspheric microlens array of the diffraction element to form a laser target surface; the laser The target surface coincides with the target belt;

所述靶带在激光光线的作用下产生烧蚀;所述靶带采用黑墨水纸或双基药制成。The target band is ablated under the action of laser light; the target band is made of black ink paper or double base medicine.

基于上述的激光微推力器光学系统现提供该光学系统的安装方法,其特征在于,包括以下步骤:The installation method of this optical system is now provided based on the above-mentioned laser micro thruster optical system, it is characterized in that, comprises the following steps:

步骤1】衍射元件高次非球面微透镜阵列是由多个衍射元件非球面微透镜连接组成,该衍射元件高次非球面微透镜阵列的连接步骤是:Step 1] The diffractive element high-order aspheric microlens array is composed of a plurality of diffractive element aspheric microlenses connected. The steps for connecting the diffractive element high-order aspheric microlens array are:

步骤1.1)将第一个衍射元件高次非球面微透镜放置到组合测量仪的二维调整台上,通过组合测量仪的显微镜系统找到第一个衍射元件高次非球面微透镜放置的位置,并将该位置记录为初始位置;Step 1.1) Place the first diffraction element high-order aspheric microlens on the two-dimensional adjustment table of the combined measuring instrument, find the position where the first diffraction element high-order aspheric microlens is placed through the microscope system of the combined measuring instrument, and record this position as the initial position;

步骤1.2)通过二维调整台的移动,将第一个衍射元件高次非球面微透镜转移出显微镜系统的视场中心,然后将第二个衍射元件高次非球面微透镜放置到二维调整台上,并将第一个衍射元件高次非球面微透镜和第二个衍射元件高次非球面微透镜连接起来;Step 1.2) By moving the two-dimensional adjustment stage, the first diffraction element high-order aspheric microlens is transferred out of the center of the field of view of the microscope system, and then the second diffraction element high-order aspheric microlens is placed in the two-dimensional adjustment on the stage, and connect the first diffraction element high-order aspheric microlens with the second diffraction element high-order aspheric microlens;

步骤1.3)通过设置在组合测量仪上的监视器的成像来观察第二个衍射元件高次非球面微透镜的姿态,并调整第二个衍射元件高次非球面微透镜的姿态,保证第一个衍射元件高次非球面微透镜和第二个衍射元件高次非球面微透镜共焦面;Step 1.3) Observe the posture of the second diffraction element high-order aspheric microlens through the imaging of the monitor set on the combined measuring instrument, and adjust the posture of the second diffraction element high-order aspheric microlens to ensure the first The first diffraction element high-order aspheric microlens and the second diffraction element high-order aspheric microlens confocal surface;

步骤1.4)重复步骤1.2)和1.3),将所需的多个衍射元件高次非球面微透镜连接起来,在连接过程中需要通过监视器观察每一个衍射元件高次非球面微透镜的姿态从而调整每个衍射元件高次非球面微透镜的姿态,使得多个衍射元件高次非球面微透镜共焦面,最后形成衍射元件高次非球面微透镜阵列;Step 1.4) Repeat steps 1.2) and 1.3), connect the required multiple diffraction element high-order aspheric microlenses, and observe the attitude of each diffraction element high-order aspheric microlens through the monitor during the connection process. Adjusting the posture of each diffraction element high-order aspheric microlens, so that multiple diffraction element high-order aspheric microlenses have confocal surfaces, and finally form a diffraction element high-order aspheric microlens array;

步骤2】将激光推力器放置到二维调整台上,接着将半导体激光器、靶带安装至激光微推力器内,再将步骤1.4)中安装好的衍射元件高次非球面微透镜阵列设置在半导体激光器与靶带之间,利用组合测量仪的显微镜系统来调整,直至半导体激光器出射光线经过衍射元件高次非球面微透镜阵列汇聚之后形成的激光靶面与靶带相重合,靶带烧蚀,从而产生强大的推动力。Step 2] Place the laser thruster on the two-dimensional adjustment table, then install the semiconductor laser and the target tape into the laser micro thruster, and then set the high-order aspheric microlens array of the diffraction element installed in step 1.4) on the Between the semiconductor laser and the target tape, use the microscope system of the combined measuring instrument to adjust until the laser target surface formed after the light emitted by the semiconductor laser is converged by the high-order aspheric micro-lens array of the diffraction element coincides with the target tape, and the target tape is ablated , resulting in a strong impetus.

上述衍射元件高次非球面微透镜阵列是由多个衍射元件高次非球面微透镜通过胶接的方式连接。The above-mentioned diffraction element high-order aspheric microlens array is connected by a plurality of diffraction element high-order aspheric microlenses through adhesive bonding.

上述半导体激光器上安装有用于半导体激光器散热的半导体激光器靶条热沉。A semiconductor laser target bar heat sink for heat dissipation of the semiconductor laser is installed on the semiconductor laser.

本发明的有益效果是:The beneficial effects of the present invention are:

1.该激光微推力器光学系统及其安装方法,光学系统首次采用衍射元件高次非球面微透镜阵列,改变以了以往的激光微推力器光学系统设计方法,系统结构更简单、外形尺寸更小;1. The optical system of the laser micro-thruster and its installation method, the optical system adopts the high-order aspheric micro-lens array of the diffraction element for the first time, which changes the previous design method of the laser micro-thruster optical system, and the system structure is simpler and the external dimension is smaller Small;

2.该激光微推力器光学系统及其安装方法,光学系统的改进设计使其能效利用率更高,可大大降低卫星的功耗使用率,延长卫星的使用寿命;2. The laser micro-thruster optical system and its installation method, the improved design of the optical system makes its energy efficiency higher, which can greatly reduce the power consumption of the satellite and prolong the service life of the satellite;

3.该激光微推力器光学系统及其安装方法,改变了现有的光学系统装调理念,利用组合测量仪监测技术,来实时控制每个透镜的姿态位置,可快速调整各个透镜的相互位置,保证透镜阵列具有较好的一致性;3. The laser micro-thruster optical system and its installation method have changed the existing concept of optical system installation and adjustment, using combined measuring instrument monitoring technology to control the attitude and position of each lens in real time, and can quickly adjust the mutual position of each lens , to ensure that the lens array has good consistency;

4.该激光微推力器光学系统及其安装方法,在光学系统安装时,利用二维调整台可同时拼接多组透镜阵列,保证了多组透镜阵列的快速装调,提高了多组光学系统的装调效率。4. The optical system of the laser micro thruster and its installation method, when installing the optical system, multiple sets of lens arrays can be spliced at the same time by using the two-dimensional adjustment table, which ensures the rapid assembly and adjustment of multiple sets of lens arrays and improves the performance of the multi-set optical system. adjustment efficiency.

附图说明Description of drawings

图1激光微推力器光学系统结构示意图。Figure 1 Schematic diagram of the optical system of the laser microthruster.

图2激光微推力器光学系统安装图。Fig. 2 Installation diagram of the optical system of the laser micro thruster.

附图标记如下:The reference signs are as follows:

1-半导体激光器靶条热沉;2-半导体激光器;3-衍射元件高次非球面微透镜阵列;4-靶带;5-组合测量仪;6-显微镜系统;7-二维调整台;8-监视器。1-semiconductor laser target bar heat sink; 2-semiconductor laser; 3-diffraction element high-order aspheric microlens array; 4-target belt; 5-combined measuring instrument; 6-microscope system; 7-two-dimensional adjustment table; 8 - Monitor.

具体实施方式Detailed ways

以下对本发明的激光微推力器光学系统及其安装方法进行详述:The laser micro thruster optical system of the present invention and its installation method are described in detail below:

如图1所示,本发明中的激光微推力器光学系统主要包括设置在激光微推力器内部的半导体激光器2、衍射元件高次非球面微透镜阵列3以及靶带4;As shown in Figure 1, the laser micro-thruster optical system among the present invention mainly comprises the semiconductor laser 2 that is arranged on the inside of the laser micro-thruster, the diffraction element high-order aspheric micro-lens array 3 and the target belt 4;

衍射元件高次非球面微透镜阵列3安装在半导体激光器2出射光线与靶带入射光线之间;半导体激光器2出射光线通过衍射元件高次非球面微透镜阵列3汇聚形成激光靶面;激光靶面与靶带4相重合,此时靶带4烧蚀,既而产生强大的能量,用于提供激光微推力器所需的强大的推动力。The diffraction element high-order aspheric micro-lens array 3 is installed between the outgoing light of the semiconductor laser 2 and the incident light of the target belt; the outgoing light of the semiconductor laser 2 is converged by the high-order aspheric micro-lens array 3 of the diffraction element to form a laser target surface; the laser target surface When it coincides with the target band 4, the target band 4 is ablated at this time, thereby generating powerful energy, which is used to provide the powerful driving force required by the laser micro thruster.

另外,半导体激光器上安装有用于半导体激光器散热的半导体激光器靶条热沉。In addition, a semiconductor laser target bar heat sink for heat dissipation of the semiconductor laser is installed on the semiconductor laser.

特别的是,本发明中的靶带4通常采用黑墨水纸或双基药制成。In particular, the target tape 4 in the present invention is usually made of black ink paper or double base drug.

结合图2,本发明中激光微推力器光学系统的安装方法,包括以下步骤:In conjunction with Fig. 2, the installation method of laser micro-thruster optical system among the present invention, comprises the following steps:

首先是衍射元件高次非球面微透镜阵列的安装方法:The first is the installation method of the high-order aspheric microlens array of the diffraction element:

步骤1】衍射元件高次非球面微透镜阵列3是由多个衍射元件非球面微透镜连接组成,该衍射元件高次非球面微透镜阵列的连接步骤是:Step 1] The diffraction element high-order aspheric microlens array 3 is composed of a plurality of diffraction element aspheric microlenses connected, and the connection steps of the diffraction element high-order aspheric microlens array are:

步骤1.1)将第一个衍射元件高次非球面微透镜放置到组合测量仪5的二维调整台7上,通过组合测量仪8的显微镜系统6找到第一个衍射元件高次非球面微透镜放置的位置,并将该位置记录为初始位置;Step 1.1) Place the first high-order aspheric microlens of the diffraction element on the two-dimensional adjustment stage 7 of the combined measuring instrument 5, and find the first high-order aspheric microlens of the diffraction element through the microscope system 6 of the combined measuring instrument 8 the location where it was placed, and record that location as the initial location;

步骤1.2)通过二维调整台7的移动,将第一个衍射元件高次非球面微透镜转移出显微镜系统6的视场中心,然后将第二个衍射元件高次非球面微透镜放置到二维调整台7上并将第一个衍射元件高次非球面微透镜和第二个衍射元件高次非球面微透镜连接起来;Step 1.2) By moving the two-dimensional adjustment table 7, the first diffraction element high-order aspheric microlens is transferred out of the center of the field of view of the microscope system 6, and then the second diffraction element high-order aspheric microlens is placed on the second Dimensional adjustment table 7 and connect the first diffraction element high-order aspheric microlens with the second diffraction element high-order aspheric microlens;

步骤1.3)通过设置在组合测量仪5上的监视器8来观察第二个衍射元件高次非球面微透镜的姿态,调整第二个衍射元件高次非球面微透镜的姿态,保证第一个衍射元件高次非球面微透镜和第二个衍射元件高次非球面微透镜共焦面;Step 1.3) Observe the posture of the second diffraction element high-order aspheric microlens through the monitor 8 arranged on the combined measuring instrument 5, adjust the posture of the second diffraction element high-order aspheric microlens to ensure that the first The confocal surface of the diffraction element high-order aspheric microlens and the second diffraction element high-order aspheric microlens;

步骤1.4)重复步骤2.2)和2.3),将所需的多个衍射元件高次非球面微透镜连接起来,在连接过程中需要通过监视8器观察每一个衍射元件高次非球面微透镜的姿态从而调整每个衍射元件高次非球面微透镜的姿态,使得多个衍射元件高次非球面微透镜共焦面,最后形成衍射元件高次非球面微透镜阵列3;Step 1.4) Repeat steps 2.2) and 2.3) to connect the required multiple diffraction element high-order aspheric micro-lenses. During the connection process, it is necessary to observe the attitude of each diffraction element high-order aspheric micro-lens through a monitor Thereby adjusting the posture of each diffraction element high-order aspheric microlens, so that multiple diffraction element high-order aspheric microlenses have confocal surfaces, and finally form a diffraction element high-order aspheric microlens array 3;

步骤2】将激光推力器放置到二维调整台7上,接着将半导体激光器2、靶带4安装至激光微推力器内,再将步骤1.4)中安装好的衍射元件高次非球面微透镜阵列3设置在半导体激光器2与靶带4之间,利用组合测量仪5的显微镜系统6来调整,直至半导体激光器2出射光线经过衍射元件高次非球面微透镜阵列3汇聚之后形成的激光靶面与靶带4相重合,靶带4烧蚀,从而产生强大的推动力。Step 2] Place the laser thruster on the two-dimensional adjustment table 7, then install the semiconductor laser 2 and the target belt 4 into the laser microthruster, and then install the high-order aspheric microlens of the diffraction element installed in step 1.4) The array 3 is set between the semiconductor laser 2 and the target belt 4, and is adjusted by the microscope system 6 of the combined measuring instrument 5 until the laser target surface formed after the light emitted by the semiconductor laser 2 is converged by the high-order aspheric microlens array 3 of the diffraction element When it coincides with the target band 4, the target band 4 is ablated, thereby generating a strong driving force.

特别之处,本发明中的衍射元件高次非球面微透镜阵列是通过多个衍射元件高次非球面微透镜通过胶接的方式连接形成。In particular, the high-order aspheric microlens array of the diffraction element in the present invention is formed by connecting a plurality of high-order aspheric microlenses of the diffraction element through adhesive bonding.

通过采用衍射元件高次非球面透镜可有效的减少光学元件的使用数量,从而可使光学系统的外形尺寸减小,并可有效的提高光能利用率,其最终的光能利用率由以前的65%可提高至86%。By using the high-order aspheric lens of the diffraction element, the number of optical elements used can be effectively reduced, so that the overall size of the optical system can be reduced, and the utilization rate of light energy can be effectively improved. The final light energy utilization rate is improved by the previous 65% can be increased to 86%.

Claims (5)

1.一种激光微推力器光学系统,其特征在于:包括设置在激光微推力器内部的半导体激光器、衍射元件高次非球面微透镜阵列以及靶带;1. A laser micro-thruster optical system, characterized in that: comprise a semiconductor laser arranged inside the laser micro-thruster, a diffraction element high-order aspheric microlens array and a target band; 所述衍射元件高次非球面微透镜阵列安装在半导体激光器出射光线与靶带入射光线之间;所述半导体激光器出射光线通过衍射元件高次非球面微透镜阵列汇聚形成激光靶面;所述激光靶面与靶带相重合;The high-order aspheric microlens array of the diffraction element is installed between the outgoing light of the semiconductor laser and the incident light of the target belt; the outgoing light of the semiconductor laser is converged by the high-order aspheric microlens array of the diffraction element to form a laser target surface; the laser The target surface coincides with the target belt; 所述靶带在激光光线的作用下产生烧蚀;所述靶带采用黑墨水纸或双基药制成。The target band is ablated under the action of laser light; the target band is made of black ink paper or double base medicine. 2.一种激光微推力器光学系统的安装方法,其特征在于,包括以下步骤:2. A method for installing a laser micro-thruster optical system, comprising the following steps: 1】由于衍射元件高次非球面微透镜阵列是由多个衍射元件非球面微透镜连接组成,该衍射元件高次非球面微透镜阵列的连接步骤是:1] Since the diffraction element high-order aspheric microlens array is composed of multiple diffraction element aspheric microlenses, the connection steps of the diffraction element high-order aspheric microlens array are: 1.1)将第一个衍射元件高次非球面微透镜放置到组合测量仪的二维调整台上,通过组合测量仪的显微镜系统找到第一个衍射元件高次非球面微透镜放置的位置,并将该位置记录为初始位置;1.1) Place the first diffraction element high-order aspheric microlens on the two-dimensional adjustment table of the combined measuring instrument, find the position where the first diffraction element high-order aspheric microlens is placed through the microscope system of the combined measuring instrument, and record this position as the initial position; 1.2)通过二维调整台的移动,将第一个衍射元件高次非球面微透镜转移出显微镜系统的视场中心,然后将第二个衍射元件高次非球面微透镜放置到二维调整台上,并将第一个衍射元件高次非球面微透镜和第二个衍射元件高次非球面微透镜连接起来;1.2) Through the movement of the two-dimensional adjustment stage, the first diffraction element high-order aspheric microlens is transferred out of the center of the field of view of the microscope system, and then the second diffraction element high-order aspheric microlens is placed on the two-dimensional adjustment stage and connect the first diffraction element high-order aspheric microlens with the second diffraction element high-order aspheric microlens; 1.3)通过设置在组合测量仪上的监视器的成像来观察第二个衍射元件高次非球面微透镜的姿态,并调整第二个衍射元件高次非球面微透镜的姿态,保证第一个衍射元件高次非球面微透镜和第二个衍射元件高次非球面微透镜共焦面;1.3) Observe the posture of the high-order aspheric microlens of the second diffraction element through the imaging of the monitor set on the combined measuring instrument, and adjust the posture of the high-order aspheric microlens of the second diffraction element to ensure that the first The confocal surface of the diffraction element high-order aspheric microlens and the second diffraction element high-order aspheric microlens; 1.4)重复步骤1.2)和1.3),将所需的多个衍射元件高次非球面微透镜连接起来,在连接过程中需要通过监视器观察每一个衍射元件高次非球面微透镜的姿态从而调整每个衍射元件高次非球面微透镜的姿态,使得多个衍射元件高次非球面微透镜共焦面,最后形成衍射元件高次非球面微透镜阵列;1.4) Repeat steps 1.2) and 1.3) to connect the required high-order aspheric micro-lenses of the diffraction elements. During the connection process, it is necessary to observe the posture of each high-order aspheric micro-lens of the diffraction elements through the monitor to adjust The posture of each diffraction element high-order aspheric microlens makes the multiple diffraction element high-order aspheric microlenses confocal, and finally forms a diffraction element high-order aspheric microlens array; 2】将激光推力器放置到二维调整台上,接着将半导体激光器、靶带安装至激光微推力器内,再将步骤1.4)中的安装好的衍射元件高次非球面微透镜阵列设置在半导体激光器与靶带之间,利用组合测量仪的显微镜系统来调整,直至半导体激光器出射光线经过衍射元件高次非球面微透镜阵列汇聚之后形成的激光靶面与靶带相重合。2] Place the laser thruster on the two-dimensional adjustment table, then install the semiconductor laser and the target tape into the laser microthruster, and then set the high-order aspheric microlens array of the diffraction element installed in step 1.4) on the The gap between the semiconductor laser and the target tape is adjusted by the microscope system of the combined measuring instrument until the laser target surface formed after the light emitted by the semiconductor laser is converged by the high-order aspheric micro-lens array of the diffraction element coincides with the target tape. 3.根据权利要求1所述的激光微推力器光学系统,其特征在于:所述衍射元件高次非球面微透镜阵列是由多个衍射元件高次非球面微透镜通过胶接的方式连接。3. The laser micro-thruster optical system according to claim 1, characterized in that: the diffraction element high-order aspheric microlens array is connected by a plurality of diffraction element high-order aspheric microlenses through glue bonding. 4.根据权利要求2所述的激光微推力器光学系统的安装方法,其特征在于:所述衍射元件高次非球面微透镜阵列是由多个衍射元件高次非球面微透镜通过胶接的方式连接。4. the installation method of laser micro thruster optical system according to claim 2, is characterized in that: described diffraction element high-order aspheric microlens array is by a plurality of diffraction element high-order aspheric microlenses by bonding way to connect. 5.根据权利要求1或3所述的激光微推力器光学系统,其特征在于:所述半导体激光器上安装有用于半导体激光器散热的半导体激光器靶条热沉。5. The laser micro thruster optical system according to claim 1 or 3, characterized in that: a semiconductor laser target bar heat sink for heat dissipation of the semiconductor laser is installed on the semiconductor laser.
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