CN103483004A - Silicon carbide coating solution used on graphite surface and spraying technology thereof - Google Patents
Silicon carbide coating solution used on graphite surface and spraying technology thereof Download PDFInfo
- Publication number
- CN103483004A CN103483004A CN201210192605.6A CN201210192605A CN103483004A CN 103483004 A CN103483004 A CN 103483004A CN 201210192605 A CN201210192605 A CN 201210192605A CN 103483004 A CN103483004 A CN 103483004A
- Authority
- CN
- China
- Prior art keywords
- graphite
- silicon carbide
- solution
- coat
- spraying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
The invention relates to the technical field of graphite surface coatings, in particular to a silicon carbide coating solution used on a graphite surface and a spraying technology thereof. The solution is prepared by evenly mixing four materials comprising industrial silicon powder, graphite powder, graphite glue and a diluent, and is used for the spraying technology on the graphite surface. According to the spraying technology of the invention, the graphite surface is coated with a silicon carbide coating with a non-completely-dense structure, the silicon carbide coating can protect the graphite piece surface to a large extent, can reduce silicon vapor corrosion, can be used on the surfaces of main consumable material parts such as hydrogenation furnace heating rods for polysilicon, heat insulation barrels for monocrystalline silicon, heaters, crucibles and the like, can improve the life of the parts by 40% to 100% without increasing of the costs, and can significantly prolong the service life of the graphite parts.
Description
Technical field
The present invention relates to graphite surface coating technology field, specifically a kind of solution of the coat of silicon carbide for graphite surface and spraying coating process thereof.
Background technology
In China, the development of photovoltaic industry has driven such as polysilicon, the fast development of the silicon materials industries such as silicon single crystal.Production capacity in current China has occupied more than 50% of the world.In these industries, generally related to the environment of high temperature, so the main body thermal field structure all adopts import isostatic pressing formed graphite or domestic three high graphite at present.The resistance to elevated temperatures of graphite is good, but in the requirement of silicon single crystal and polysilicon industry graphite also improving, need them to there is the higher life-span, its chief reason be the price of photovoltaic industry in continuous decline, need the industry on each industrial chain to reduce costs.As main consumptive material, the raising in graphite life-span can, so that unit cost descends, be important industry subjects under discussion so how to improve the life-span of graphite field parts.
There has been high temperature CVD method coating carbon SiClx in industry at present, on the graphite guide shell of using at silicon single crystal, uses.By contrast, can make its life-span improve 30%.But this technology rests in Japan fully, in developed country's hands such as the U.S..Because the U.S. limits to the Chinese exports hi-tech, the domestic CVD coating reaction stove of can't having bought at present.
Summary of the invention
Purpose of the present invention is for overcoming the deficiencies in the prior art, a kind of solution of the coat of silicon carbide for graphite surface is provided, and a kind of low cost, easy-operating spraying coating process are done coat of silicon carbide to graphite surface, this coating does not need complete free of pinholes, but need with the graphite surface combination closely, can cover 99% with top surface area.
In order to achieve the above object, the present invention has designed a kind of solution of the coat of silicon carbide for graphite surface, it is characterized in that, this solution is formulated after adopting industrial silica fume, Graphite Powder 99, graphite glue and four kinds of raw material stirring of thinner evenly; Wherein, the proportioning of four kinds of raw materials is industrial silica fume: Graphite Powder 99: graphite glue: thinner=3: 3: 3: 1.
The granularity of described industrial silica fume below 50 orders, purity is more than 99.99%.
The ash content of described Graphite Powder 99 below 5ppm, granularity is 0.02 millimeter median.
The main component of described graphite glue is resol and Graphite Powder 99 mixture.
Described thinner is high purity alcohol.
A kind of spraying coating process of the solution of the coat of silicon carbide for graphite surface, is characterized in that, adopts following steps:
A, get the heavy caliber atomizer, after above-mentioned solution is packed into, the graphite member surface is sprayed;
B, spraying post-drying, bake out temperature is 180～220 ℃;
C, again at the graphite member surface spraying;
D, spraying post-drying, bake out temperature is 180～220 ℃;
E, the graphite member after twice spraying is put into to the vacuum oven roasting, intensification roasting 3 hours to 1400～1600 ℃, and, this temperature constant temperature calcining 1 hour, finally lower the temperature 6 hours to 300 ℃ and can blow-on use.
Spraying coating process of the present invention can apply at graphite surface the coat of silicon carbide of the non-complete dense structure of one deck, this coating can make the graphite piece surface be subject to provide protection significantly, reduce the corrosion of silicon steam, can be in hydrogenation furnace heating rod, the main consumptive material parts surface use such as insulated tank, well heater, crucible for silicon single crystal for polysilicon; In the situation that it is little to increase cost, can make these component lifes improve 40% to 100%, significant prolongation the work-ing life of graphite member.
Embodiment
In the present invention, for the coat of silicon carbide solution of graphite surface, it is formulated after adopting industrial silica fume, Graphite Powder 99, graphite glue and four kinds of raw material stirring of thinner evenly; Wherein, the proportioning of four kinds of raw materials is industrial silica fume: Graphite Powder 99: graphite glue: thinner=3: 3: 3: 1, the granularity of industrial silica fume below 50 orders, purity is more than 99.99%, the ash content of Graphite Powder 99 below 5ppm, granularity is 0.02 millimeter median, the main component of graphite glue is resol and Graphite Powder 99 mixture, and thinner is high purity alcohol.
Embodiment mono-:
In the present invention, for the spraying coating process of the coat of silicon carbide solution of graphite surface, it adopts following steps:
A, get the heavy caliber atomizer, after above-mentioned solution is packed into, the graphite member surface is sprayed;
B, spraying post-drying, bake out temperature is 180 ℃;
C, again at the graphite member surface spraying;
D, spraying post-drying, bake out temperature is 180 ℃;
E, the graphite member after twice spraying is put into to the vacuum oven roasting, intensification roasting 3 hours to 1400 ℃, and, this temperature constant temperature calcining 1 hour, finally lower the temperature 6 hours to 300 ℃ and can blow-on use.
Embodiment bis-:
In the present invention, for the spraying coating process of the coat of silicon carbide solution of graphite surface, it adopts following steps:
A, get the heavy caliber atomizer, after above-mentioned solution is packed into, the graphite member surface is sprayed;
B, spraying post-drying, bake out temperature is 220 ℃;
C, again at the graphite member surface spraying;
D, spraying post-drying, bake out temperature is 220 ℃;
E, the graphite member after twice spraying is put into to the vacuum oven roasting, intensification roasting 3 hours to 1600 ℃, and, this temperature constant temperature calcining 1 hour, finally lower the temperature 6 hours to 300 ℃ and can blow-on use.
Embodiment tri-:
In the present invention, for the spraying coating process of the coat of silicon carbide solution of graphite surface, it adopts following steps:
A, get the heavy caliber atomizer, after above-mentioned solution is packed into, the graphite member surface is sprayed;
B, spraying post-drying, bake out temperature is 200 ℃;
C, again at the graphite member surface spraying;
D, spraying post-drying, bake out temperature is 200 ℃;
E, the graphite member after twice spraying is put into to the vacuum oven roasting, intensification roasting 3 hours to 1550 ℃, and, this temperature constant temperature calcining 1 hour, finally lower the temperature 6 hours to 300 ℃ and can blow-on use.
Spraying coating process of the present invention can apply at graphite surface the coat of silicon carbide of the non-complete dense structure of one deck, this coating can make the graphite piece surface be subject to provide protection significantly, reduce the corrosion of silicon steam, can be in hydrogenation furnace heating rod, the main consumptive material parts surface use such as insulated tank, well heater, crucible for silicon single crystal for polysilicon; In the situation that it is little to increase cost, can make these component lifes improve 40% to 100%, significant prolongation the work-ing life of graphite member.
Claims (6)
1. the solution of the coat of silicon carbide for graphite surface, is characterized in that, this solution is formulated after adopting industrial silica fume, Graphite Powder 99, graphite glue and four kinds of raw material stirring of thinner evenly; Wherein, the proportioning of four kinds of raw materials is industrial silica fume: Graphite Powder 99: graphite glue: thinner=3: 3: 3: 1.
2. the solution of the coat of silicon carbide for graphite surface according to claim 1, is characterized in that, the granularity of described industrial silica fume below 50 orders, purity is more than 99.99%.
3. the solution of the coat of silicon carbide for graphite surface according to claim 1, is characterized in that, the ash content of described Graphite Powder 99 below 5ppm, granularity is 0.02 millimeter median.
4. the solution of the coat of silicon carbide for graphite surface according to claim 1, is characterized in that, the main component of described graphite glue is resol and Graphite Powder 99 mixture.
5. the solution of the coat of silicon carbide for graphite surface according to claim 1, is characterized in that, described thinner is high purity alcohol.
6. an application rights requires the spraying coating process of the 1 described solution of the coat of silicon carbide for graphite surface, it is characterized in that, adopts following steps:
A, get the heavy caliber atomizer, after above-mentioned solution is packed into, the graphite member surface is sprayed;
B, spraying post-drying, bake out temperature is 180～220 ℃;
C, again at the graphite member surface spraying;
D, spraying post-drying, bake out temperature is 180～220 ℃;
E, the graphite member after twice spraying is put into to the vacuum oven roasting, intensification roasting 3 hours to 1400～1600 ℃, and, this temperature constant temperature calcining 1 hour, finally lower the temperature 6 hours to 300 ℃ and can blow-on use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210192605.6A CN103483004A (en) | 2012-06-12 | 2012-06-12 | Silicon carbide coating solution used on graphite surface and spraying technology thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210192605.6A CN103483004A (en) | 2012-06-12 | 2012-06-12 | Silicon carbide coating solution used on graphite surface and spraying technology thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103483004A true CN103483004A (en) | 2014-01-01 |
Family
ID=49823667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210192605.6A Pending CN103483004A (en) | 2012-06-12 | 2012-06-12 | Silicon carbide coating solution used on graphite surface and spraying technology thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103483004A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105506735A (en) * | 2015-12-10 | 2016-04-20 | 江西赛维Ldk太阳能高科技有限公司 | Carbon material structural part for polycrystalline silicon ingots and preparation method of carbon material structural part |
| CN106431498A (en) * | 2016-09-05 | 2017-02-22 | 江苏协鑫特种材料科技有限公司 | Graphite/silicon carbide compact composite material preparation method |
| CN109232023A (en) * | 2018-08-31 | 2019-01-18 | 融铨半导体（苏州）有限公司 | A kind of preparation method of double coat of silicon carbide graphite load plates |
| CN110342960A (en) * | 2019-07-18 | 2019-10-18 | 平顶山市信瑞达石墨制造有限公司 | A kind of preparation process and enamel graphite cooker of enamel graphite cooker |
| CN111233515A (en) * | 2020-03-19 | 2020-06-05 | 北京晶龙特碳科技有限公司 | Method for preparing nano-graphite coating on surface of graphite product |
| CN112457058A (en) * | 2020-12-02 | 2021-03-09 | 福建康碳复合材料科技有限公司 | Preparation method of novel silicon-based coating on surface of carbon/carbon composite material for monocrystalline silicon straight pulling furnace |
| CN112624782A (en) * | 2020-12-11 | 2021-04-09 | 包头美科硅能源有限公司 | Application method of crucible edge coating |
| CN114571367A (en) * | 2022-03-16 | 2022-06-03 | 宁波市金象厨具有限公司 | Enamel double-bottom pot and preparation method thereof |
| CN115448752A (en) * | 2022-09-26 | 2022-12-09 | 攀钢集团研究院有限公司 | Method for prolonging service life of graphite crucible for vanadium-nitrogen alloy |
| CN116751079A (en) * | 2023-05-05 | 2023-09-15 | 昆明理工大学 | High-temperature-resistant abrasion hydrogenation furnace and coating preparation method thereof |
| CN116875932A (en) * | 2023-09-07 | 2023-10-13 | 北京智芯微电子科技有限公司 | Powder for plasma spraying, preparation method of surface coating, surface coating and application |
-
2012
- 2012-06-12 CN CN201210192605.6A patent/CN103483004A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105506735B (en) * | 2015-12-10 | 2017-12-26 | 江西赛维Ldk太阳能高科技有限公司 | A kind of polycrystalline silicon ingot casting carbon material structural member and preparation method thereof |
| CN105506735A (en) * | 2015-12-10 | 2016-04-20 | 江西赛维Ldk太阳能高科技有限公司 | Carbon material structural part for polycrystalline silicon ingots and preparation method of carbon material structural part |
| CN106431498A (en) * | 2016-09-05 | 2017-02-22 | 江苏协鑫特种材料科技有限公司 | Graphite/silicon carbide compact composite material preparation method |
| CN106431498B (en) * | 2016-09-05 | 2019-05-28 | 江苏协鑫特种材料科技有限公司 | A method of preparing graphite/carbon SiClx densified composite |
| CN109232023A (en) * | 2018-08-31 | 2019-01-18 | 融铨半导体（苏州）有限公司 | A kind of preparation method of double coat of silicon carbide graphite load plates |
| CN110342960B (en) * | 2019-07-18 | 2022-06-07 | 平顶山市信瑞达石墨制造有限公司 | Preparation process of enamel graphite cooker and enamel graphite cooker |
| CN110342960A (en) * | 2019-07-18 | 2019-10-18 | 平顶山市信瑞达石墨制造有限公司 | A kind of preparation process and enamel graphite cooker of enamel graphite cooker |
| CN111233515A (en) * | 2020-03-19 | 2020-06-05 | 北京晶龙特碳科技有限公司 | Method for preparing nano-graphite coating on surface of graphite product |
| CN112457058A (en) * | 2020-12-02 | 2021-03-09 | 福建康碳复合材料科技有限公司 | Preparation method of novel silicon-based coating on surface of carbon/carbon composite material for monocrystalline silicon straight pulling furnace |
| CN112624782A (en) * | 2020-12-11 | 2021-04-09 | 包头美科硅能源有限公司 | Application method of crucible edge coating |
| CN114571367A (en) * | 2022-03-16 | 2022-06-03 | 宁波市金象厨具有限公司 | Enamel double-bottom pot and preparation method thereof |
| CN115448752A (en) * | 2022-09-26 | 2022-12-09 | 攀钢集团研究院有限公司 | Method for prolonging service life of graphite crucible for vanadium-nitrogen alloy |
| CN116751079A (en) * | 2023-05-05 | 2023-09-15 | 昆明理工大学 | High-temperature-resistant abrasion hydrogenation furnace and coating preparation method thereof |
| CN116751079B (en) * | 2023-05-05 | 2024-01-26 | 昆明理工大学 | High-temperature-resistant abrasion hydrogenation furnace and coating preparation method thereof |
| CN116875932A (en) * | 2023-09-07 | 2023-10-13 | 北京智芯微电子科技有限公司 | Powder for plasma spraying, preparation method of surface coating, surface coating and application |
| CN116875932B (en) * | 2023-09-07 | 2023-12-05 | 北京智芯微电子科技有限公司 | Plasma spraying powder, surface coating preparation method, surface coating and application |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103483004A (en) | Silicon carbide coating solution used on graphite surface and spraying technology thereof | |
| CN204455202U (en) | A kind of cable annealing device | |
| CN108531078A (en) | ceramic surface material and surface coating | |
| CN102816519A (en) | Inorganic-organic high temperature-resistant coating and preparation method thereof | |
| CN103788733A (en) | High-emissivity high-temperature ceramic coating | |
| CN108485516A (en) | ceramic surface material and surface coating | |
| CN101648271B (en) | Preparation method of iron chromium aluminum sintered fiber felt | |
| CN103880477B (en) | Graphite product SiC coating process | |
| CN105693242A (en) | Low temperature corrosion resistant high temperature nano anticorrosion ceramic paint and preparation method thereof | |
| CN103046034B (en) | Method for matrix strengthening and surface coating of graphite guide cylinder for czochralski silicon single crystal | |
| CN105142250A (en) | Preparation method for semiconductor thermoelectric film | |
| CN104926371A (en) | Silicon steam corrosion resistant coating and preparation method thereof | |
| CN103757603B (en) | A kind of preparation method of zirconium diboride coating | |
| CN202734522U (en) | Novel electrofusion heat-preserving furnace with crucible | |
| CN201999983U (en) | Furnace body for pit-type carburizing furnace | |
| CN102850085A (en) | Method for preparation of graphite surface silicon carbide coating | |
| CN101565848B (en) | Method for making gradient silicon carbide coating by electrophoresis codeposition | |
| CN109439290B (en) | Environment-friendly organic heat carrier and preparation method thereof | |
| CN203123961U (en) | Combined printing and dyeing auxiliary reaction device | |
| CN206469691U (en) | A kind of solid oxide electrolysis fused salt heater | |
| CN108203565A (en) | Organic silicon high-temperature powder coating | |
| CN108774463B (en) | Ceramic high-energy-saving coating and preparation method and application thereof | |
| CN104058592A (en) | Method for preparing enamel coating and enamel coating prepared by using method | |
| CN204286116U (en) | A kind of smelting apparatus for the production of amorphous quartz | |
| CN203754781U (en) | Continuously-charging electric-heating crucible type low-boiling metal distillation furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140101 |