CN103470986A - High-stability wide-band ultraviolet light source emitting device realizing continuously adjustable wavelength - Google Patents
High-stability wide-band ultraviolet light source emitting device realizing continuously adjustable wavelength Download PDFInfo
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- CN103470986A CN103470986A CN2013104219259A CN201310421925A CN103470986A CN 103470986 A CN103470986 A CN 103470986A CN 2013104219259 A CN2013104219259 A CN 2013104219259A CN 201310421925 A CN201310421925 A CN 201310421925A CN 103470986 A CN103470986 A CN 103470986A
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Abstract
The invention provides a high-stability wide-band ultraviolet light source emitting device realizing the continuously adjustable wavelength. The high-stability wide-band ultraviolet light source emitting device comprises an integration ball, at least one ultraviolet light source, a collimator, a diffraction device, a gathering lens and a casing, wherein the integration ball comprises a light inlet and a light outlet, and is used for mixing light rays radiated from the light inlet and emitting out the light rays from the light outlet, the diffraction device comprises an optical grating, the optical grating is positioned at the other end of the collimator for reflecting parallel light transmitted by a plurality of mutually parallel light outlet pipes into parallel light in the preset direction, the gathering lens is used for gathering the parallel light in the preset direction, the optical grating and the gathering lens are arranged in the casing, the casing comprises an emergent slit, and the emergent slit is used for emitting emergent light gathered by the gathering lens. According to the embodiment of the invention, the continuous regulation on the spectrum center position and the spectrum band width of the emergent light can be realized in a wider ultraviolet wave band, and the interference generated by useless spectrum bands is effectively avoided, and in addition, the device also has the advantages that the structure is simple and reliable, the light path is stable, and the operation is simple.
Description
Technical field
The present invention relates to the spectrographic detection technical field, particularly the continuously adjustable high stable of a kind of wavelength broadband ultraviolet source emitter.
Background technology
Understanding one of the generation of specific molecular in low temperature plasma and basic method of loss rule, is by the characteristic spectral line of the absorption spectrum of research molecule.For typical CF4(carbon tetrafluoride) the gas low temperature capacitively coupled plasma, the discharge parameter of its core is roughly that electron density is 1015-1016m-3, electron temperature is 1-10eV, abundant emission spectrum is now arranged in 200～400nm wave-length coverage, each bands of a spectrum is in the wave-length coverage of a few nanometer to tens nanometers, mean can be in this wave band absorption spectrum, therefore, the ultraviolet source of a broadband (tens nanometers) need to be arranged.
Very wide when the luminous wave band of wideband light source, and while using the detection system of grating belt to detect full wave spectrum, the senior diffraction light of veiling glare or grating easily enters detector, affects result of detection.Meanwhile, ultraviolet light scatters on plasma discharge electrode or cavity can cause secondary proportional to luminous flux, thereby affects plasma parameter.Therefore, need the outgoing luminous energy of light source to be limited in certain bands of a spectrum scope.In addition, for different gas molecules, the position of its absorption band and width are also different, so when requiring the emergent light bands of a spectrum wider, its center and spectral bandwidth also should be regulated.Wideband light source commonly used has deuterium lamp and xenon lamp in the market.The deuterium lamp wave-length coverage is 170～400nm, and the wave-length coverage of xenon lamp is 180～2000nm, all meets the requirement in broadband, but the system that all bands of a spectrum is not limited and regulate.If use optical filter restriction bands of a spectrum, the width and the position that are difficult to accomplish to regulate continuously bands of a spectrum.Moreover, xenon lamp and deuterium lamp also have that energy consumption is large, luminous efficiency is low, the luminous defect such as stable not, and both all can launch very strong ultraviolet ray, has certain potential safety hazard.
LED because its volume is little, quality is light, it is low to consume energy, the life-span long and the characteristics such as stable luminescence, is widely used in recent years the spectrographic detection field.Yet single ultraviolet LED emission spectrum is the narrow-band spectrum of Gaussian, if can effectively widen the emission spectrum scope in conjunction with a plurality of ultraviolet LEDs.In addition, the LED lighting angle is very large, needs an effective light collecting device to improve the utilization rate of light.In sum, the molecular absorption spectrum in plasma environment measure to need a kind of in wider UV wavelength range continuously adjustable broad band light source device.
Summary of the invention
The present invention is intended at least one of solve the problems of the technologies described above.
For this reason, the object of the invention is to propose the continuously adjustable high stable of a kind of wavelength broadband ultraviolet source emitter, this device can be realized the band center position of emergent light and the continuous adjusting of spectral bandwidth in wider ultraviolet band, the interference of effectively avoiding useless bands of a spectrum to produce, and that this device also has is simple and reliable for structure, light path stable, advantage simple to operate.
To achieve these goals, embodiments of the invention have proposed the continuously adjustable high stable of a kind of wavelength broadband ultraviolet source emitter, comprise: integrating sphere, described integrating sphere comprises light inlet and light-emitting window, for the light that will be irradiated by described light inlet, mixed, and by described light-emitting window emission; At least one ultraviolet source, described at least one ultraviolet source is positioned at described light inlet; Collimator, an end of described collimator is connected with described light-emitting window, described collimator comprise a plurality of be parallel to each other go out light pipe; Diffraction instrument, described diffraction instrument comprises grating, described grating is positioned at the other end of described collimator, will be reflected into by described a plurality of directional lights that go out light pipes transmit that are parallel to each other the directional light of predetermined direction; Plus lens, described plus lens is for being converged the directional light of described predetermined direction; And housing, described grating and described plus lens are arranged in described housing, and described housing comprises exit slit, the emergent light after described exit slit is converged by described plus lens for emission.
According to the continuously adjustable high stable of the wavelength of embodiment of the present invention broadband ultraviolet source emitter, a plurality of ultraviolet sources have been adopted, effectively widen available spectral bandwidth, can on a device, meet the requirement to the absorptiometry of the bands of a spectrum of a plurality of diverse locations.In addition, the mode that this device employing integrating sphere and ultraviolet source are integrated utilizes the porous collimator to connect integrating sphere and grating simultaneously, has effectively improved the utilization rate of emergent light, can obtain the more uniform emergent light that distributes on the outgoing cross section simultaneously.In addition, the emitter of the embodiment of the present invention can be by regulating grating angle and exit slit width, realization is to the band center position of emergent light and the continuous adjusting of spectral bandwidth, be very easy in the plasma discharge environment measurement to the molecule absorption line spectrum, the interference of effectively having avoided useless bands of a spectrum to bring measurement, secondly, that this device also has advantages of is simple and reliable for structure, light path is stablized, installation and debugging and system easy to maintenance.
In addition, the continuously adjustable high stable of wavelength according to the above embodiment of the present invention broadband ultraviolet source emitter can also have following additional technical characterictic:
In an embodiment of the present invention, also comprise: semiconductor chilling plate, described semiconductor chilling plate is arranged on the light inlet of described integrating sphere, to regulate the temperature of described at least one ultraviolet source.
In an embodiment of the present invention, described at least one ultraviolet source is ultraviolet LED light source.
In an embodiment of the present invention, also comprise: fixture, described at least one ultraviolet source is arranged on described fixture, and guarantees good light sealing.
In an embodiment of the present invention, described a plurality of light pipe that goes out be parallel to each other is uniformly distributed along the horizontal and vertical of cross section of described collimator.
In an embodiment of the present invention, described collimator is connected with the light-emitting window sealing of described integrating sphere.
In an embodiment of the present invention, described diffraction instrument also comprises: the grating rotating disk, and described grating rotating disk is for regulating the reflection angle of described grating; The rotating disk knob, described rotating disk knob is for being controlled described grating rotating disk.
In an embodiment of the present invention, described diffraction instrument also comprises: the grating rotating disk, and described grating rotating disk is for regulating the reflection angle of described grating; Controller, described controller is for automatically controlling described grating rotating disk.
In an embodiment of the present invention, described exit slit is the adjustable exit slit of exit slit width.
In an embodiment of the present invention, described exit slit with described a plurality of be parallel to each other to go out light pipe parallel.
Additional aspect of the present invention and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present invention.
The accompanying drawing explanation
Above-mentioned and additional aspect of the present invention and advantage are from obviously and easily understanding becoming the description of embodiment in conjunction with following accompanying drawing, wherein:
Fig. 1 is the schematic diagram of the continuously adjustable high stable of wavelength broadband ultraviolet source emitter according to an embodiment of the invention;
Fig. 2 is the schematic diagram of the continuously adjustable high stable of wavelength broadband ultraviolet source emitter in accordance with another embodiment of the present invention; With
Fig. 3 is the cross sectional representation of the collimator of the continuously adjustable high stable of wavelength broadband ultraviolet source emitter according to an embodiment of the invention.
The specific embodiment
Below describe embodiments of the invention in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label means same or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center ", " vertically ", " laterally ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", orientation or the position relationship of indications such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second " be only for describing purpose, and can not be interpreted as indication or hint relative importance.
In description of the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be done broad understanding, for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be also to be electrically connected to; Can be directly to be connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can concrete condition understand above-mentioned term concrete meaning in the present invention.
Below in conjunction with accompanying drawing, describe in detail according to the continuously adjustable high stable of the wavelength of embodiment of the present invention broadband ultraviolet source emitter.
Fig. 1 is the schematic diagram of the continuously adjustable high stable of wavelength broadband ultraviolet source emitter according to an embodiment of the invention.As shown in Figure 1, in the continuously adjustable high stable of wavelength broadband ultraviolet source emitter 100(figure, do not mark according to an embodiment of the invention), comprising: integrating sphere 110, at least one ultraviolet source 120, collimator 130, diffraction instrument 140, plus lens 150 and housing 160.
Particularly, integrating sphere 110 comprises light inlet 111 and light-emitting window 112, for the light that will be irradiated by light inlet 111, mixed, and by light-emitting window 112 emissions.In an embodiment of the present invention, integrating sphere 110 is containers that provide light to mix at least one ultraviolet source 120.
At least one ultraviolet source 120 is positioned at the light inlet 111 of integrating sphere 110.Wherein, in one embodiment of the invention, preferably, at least one ultraviolet source 120 is for example ultraviolet LED light source, ultraviolet LED light source has advantages of safe and reliable, simple environmental protection and long-lived easy care.As a concrete example, at least one ultraviolet LED light source is the ultraviolet LED light source that a plurality of band centers position is close and bands of a spectrum are slightly overlapping, and it forms elementary broadband ultraviolet source, and the electric current of all ultraviolet LED light sources provides by constant-current source.The ultraviolet light of at least one ultraviolet LED light source emission enters integrating sphere 120 through light inlet 111, and many ultraviolet lights form the broadband ultraviolet light and penetrated by light-emitting window 112 after the interior mixing of integrating sphere 120, and light intensity is approximate equally distributed on exit facet.
One end of collimator 130 is connected with light-emitting window 112, collimator 130 comprise a plurality of be parallel to each other go out light pipe.Particularly, a plurality of be parallel to each other go out the horizontal and vertical distribution of light pipe along the cross section of collimator 130, for example, shown in Fig. 3.As a concrete example, preferably, collimator 130 is for example cellular collimator, a plurality ofly goes out light pipe perpendicular to the collimator cross section, and parallel mutually, and is uniformly distributed along cross section is horizontal and vertical.Cellular collimator, when making light output collimation, can also improve luminous flux.
In addition, in one embodiment of the invention, collimator 130 is connected with light-emitting window 112 sealings of integrating sphere 110, thereby can improve the utilization rate of light.
Diffraction instrument 140 comprises grating 141, and grating 141 is positioned at the other end of collimator 130, will be reflected into by a plurality of directional lights that go out light pipes transmit that are parallel to each other the directional light of predetermined direction.As a concrete example, grating 141 is for example reflective plane grating, and it can reflex to preset direction by a plurality of many parallel rays that go out light pipes transmit that are parallel to each other through collimator 130, makes it become many parallel rays of directive preset direction.Wherein, preset direction is preset by the user according to the actual requirements.
In addition, in one embodiment of the invention, diffraction instrument 140 also comprises: grating rotating disk 142 and rotating disk knob 143.Particularly, grating 141 is arranged on grating rotating disk 142, and grating rotating disk 142 is for regulating the reflection angle of grating 141.Rotating disk button 143 is connected with grating rotating disk 142, for grating rotating disk 142 is controlled.As a concrete example, as shown in Figure 1, rotating disk button 143 is for example manual knob, be that the user can be by this knob of manual rotation, to control 142 rotations of coupled grating rotating disk, thereby indirectly control the rotation of grating 141, to realize regulating continuously the reflection angle of grating 141, so that parallel rays reflexes to predetermined direction, thus the center of control outgoing bands of a spectrum.
On the other hand, as another specific embodiment, above-mentioned diffraction instrument 140 also comprises: grating rotating disk 142 and controller 144.Particularly, grating 141 is arranged on grating rotating disk 142, and grating rotating disk 142 is for regulating the reflection angle of grating 141.Controller 144 is connected with grating rotating disk 142, for grating rotating disk 142 is controlled automatically.In other words, as shown in Figure 2, with the rotating disk knob 143 in controller 144 alternate figures 1.Rotating disk knob 143 needs user's manual operation, and comparatively inconvenience, and write corresponding program in advance in controller 144, can automatically control grating rotating disk 142, thereby realize the automatic adjusting of grating 141 reflection angles, without manual operation, more convenient.
Plus lens 150 is converged for the directional light by predetermined direction.The parallel rays of the predetermined direction that in other words, 141 reflections obtain through grating is realized converging through after plus lens 150.
Grating 141 and plus lens 150 are arranged in housing 160, and housing 160 comprises exit slit 161, the emergent light after exit slit 161 is converged by plus lens 150 for emission.In one embodiment of the invention, exit slit 161 connects the exit slit of adjusting for the exit slit width, and as shown in Figure 1 or 2, exit slit 161 with a plurality of be parallel to each other to go out light pipe parallel.In other words, the width of exit slit 161 can be regulated continuously, thereby realizes the continuous adjusting to the outgoing spectral bandwidth of emergent light.
In addition, shown in Fig. 1 and Fig. 2, the continuously adjustable high stable of the wavelength of embodiment of the present invention broadband ultraviolet source emitter 100, also comprise: semiconductor chilling plate 170 and fixture 180.
Particularly, semiconductor chilling plate 170 is arranged on the light inlet 111 of integrating sphere 110, for regulating the temperature of at least one ultraviolet source 120, so that at least one ultraviolet source 120 is operated in constant low-temperature condition, what guarantee that ultraviolet source can be for a long time stable is luminous, improves its reliability.
At least one ultraviolet source 120 is arranged on fixture 180, and guarantee good light sealing, fixture 180 is for fixing at least one ultraviolet source 120, and as shown in Figure 1 or 2, fixture 180 is arranged on light inlet 111 places, so that light inlet 111 can be stablized, be positioned at reliably at least one ultraviolet source 120, to integrating sphere 110 emitting ultraviolet lights.In addition, it should be noted that in a concrete example, fixture 180 is integrated in light inlet 111 places of integrating sphere 120, thereby all emergent lights that can guarantee at least one ultraviolet source 120 emission can all enter integrating sphere 110, have fully improved the utilization rate of light.
According to the continuously adjustable high stable of the wavelength of embodiment of the present invention broadband ultraviolet source emitter, a plurality of ultraviolet LED light sources have been adopted, effectively widened available spectral bandwidth, can on a device, meet the requirement to the absorptiometry of the bands of a spectrum of a plurality of diverse locations, ultraviolet LED light source has safe and reliable simultaneously, simple environmental protection, the advantage of long-lived easy care.In addition, the mode that this device employing integrating sphere and ultraviolet LED light source are integrated utilizes the porous collimator to connect integrating sphere and grating simultaneously, has effectively improved the utilization rate of emergent light, and can obtain the more uniform emergent light that distributes on the outgoing cross section.In addition, to all ultraviolet LED light source, use semiconductor chilling plate to be lowered the temperature, can effectively realize high stable luminous for a long time of LED; Further, the emitter of the embodiment of the present invention can be by regulating grating angle and exit slit width, realization is to the band center position of emergent light and the continuous adjusting of spectral bandwidth, be very easy in the plasma discharge environment measurement to the molecule absorption line spectrum, the interference of effectively having avoided useless bands of a spectrum to bring measurement, secondly, that this device also has advantages of is simple and reliable for structure, light path is stablized, installation and debugging and system easy to maintenance.
In the description of this specification, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the characteristics of this embodiment or example description.In this manual, the schematic statement of above-mentioned term not necessarily referred to identical embodiment or example.And the specific features of description, structure, material or characteristics can be with suitable mode combinations in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that: in the situation that do not break away from principle of the present invention and aim can be carried out multiple variation, modification, replacement and modification to these embodiment, scope of the present invention is by claim and be equal to and limit.
Claims (10)
1. the continuously adjustable high stable of a wavelength broadband ultraviolet source emitter, is characterized in that, comprising:
Integrating sphere, described integrating sphere comprises light inlet and light-emitting window, for the light that will be irradiated by described light inlet, mixed, and by described light-emitting window emission;
At least one ultraviolet source, described at least one ultraviolet source is positioned at described light inlet;
Collimator, an end of described collimator is connected with described light-emitting window, described collimator comprise a plurality of be parallel to each other go out light pipe;
Diffraction instrument, described diffraction instrument comprises grating, described grating is positioned at the other end of described collimator, will be reflected into by described a plurality of directional lights that go out light pipes transmit that are parallel to each other the directional light of predetermined direction;
Plus lens, described plus lens is for being converged the directional light of described predetermined direction; And
Housing, described grating and described plus lens are arranged in described housing, and described housing comprises exit slit, the emergent light after described exit slit is converged by described plus lens for emission.
2. the continuously adjustable high stable of wavelength as claimed in claim 1 broadband ultraviolet source emitter, is characterized in that, also comprises:
Semiconductor chilling plate, described semiconductor chilling plate is arranged on the light inlet of described integrating sphere, to regulate the temperature of described at least one ultraviolet source.
3. the continuously adjustable high stable of wavelength as claimed in claim 1 broadband ultraviolet source emitter, is characterized in that, described at least one ultraviolet source is ultraviolet LED light source.
4. as the continuously adjustable high stable of the described wavelength of claim 1-3 any one broadband ultraviolet source emitter, it is characterized in that, also comprise:
Fixture, described at least one ultraviolet source is arranged on described fixture, and guarantees good light sealing.
5. the continuously adjustable high stable of wavelength as claimed in claim 1 broadband ultraviolet source emitter, is characterized in that, described a plurality of light pipes that go out that are parallel to each other are uniformly distributed along the horizontal and vertical of cross section of described collimator.
6. the continuously adjustable high stable of wavelength as claimed in claim 1 broadband ultraviolet source emitter, is characterized in that, described collimator is connected with the light-emitting window sealing of described integrating sphere.
7. the continuously adjustable high stable of wavelength as claimed in claim 1 broadband ultraviolet source emitter, is characterized in that, described diffraction instrument also comprises:
The grating rotating disk, described grating rotating disk is for regulating the reflection angle of described grating;
The rotating disk knob, described rotating disk knob is for being controlled described grating rotating disk.
8. the continuously adjustable high stable of wavelength as claimed in claim 1 broadband ultraviolet source emitter, is characterized in that, described diffraction instrument also comprises:
The grating rotating disk, described grating rotating disk is for regulating the reflection angle of described grating;
Controller, described controller is for automatically controlling described grating rotating disk.
9. the continuously adjustable high stable of wavelength as claimed in claim 1 broadband ultraviolet source emitter, is characterized in that, described exit slit is the adjustable exit slit of exit slit width.
10. the continuously adjustable high stable of wavelength as claimed in claim 1 broadband ultraviolet source emitter, is characterized in that, described exit slit with described a plurality of be parallel to each other to go out light pipe parallel.
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| CN201310421925.9A CN103470986B (en) | 2013-09-16 | 2013-09-16 | Wavelength continuously adjustable high stable broadband UV light source emitter |
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| CN201310421925.9A CN103470986B (en) | 2013-09-16 | 2013-09-16 | Wavelength continuously adjustable high stable broadband UV light source emitter |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104501952A (en) * | 2014-12-01 | 2015-04-08 | 北京振兴计量测试研究所 | Integrating sphere, light source, and parameter calibration method for ultraviolet-vacuum ultraviolet imaging spectrometer |
| CN105891163B (en) * | 2016-03-31 | 2018-10-09 | 华南理工大学 | The test device and method of long-persistence luminous intensity in 0.3 to 2 micron ranges |
| CN111895286A (en) * | 2020-07-15 | 2020-11-06 | 杭州电子科技大学 | High-brightness directional emergent long-afterglow luminous warning and illuminating device |
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| JPH06349451A (en) * | 1993-06-03 | 1994-12-22 | Fujitsu Ltd | Light source and liquid crystal display using it |
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| CN104501952A (en) * | 2014-12-01 | 2015-04-08 | 北京振兴计量测试研究所 | Integrating sphere, light source, and parameter calibration method for ultraviolet-vacuum ultraviolet imaging spectrometer |
| CN105891163B (en) * | 2016-03-31 | 2018-10-09 | 华南理工大学 | The test device and method of long-persistence luminous intensity in 0.3 to 2 micron ranges |
| CN111895286A (en) * | 2020-07-15 | 2020-11-06 | 杭州电子科技大学 | High-brightness directional emergent long-afterglow luminous warning and illuminating device |
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| CN103470986B (en) | 2015-07-29 |
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