CN103464414A - Jig for cleaning furnace tube equipment heat insulation sheets - Google Patents
Jig for cleaning furnace tube equipment heat insulation sheets Download PDFInfo
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- CN103464414A CN103464414A CN2013104162157A CN201310416215A CN103464414A CN 103464414 A CN103464414 A CN 103464414A CN 2013104162157 A CN2013104162157 A CN 2013104162157A CN 201310416215 A CN201310416215 A CN 201310416215A CN 103464414 A CN103464414 A CN 103464414A
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- support bar
- supporting seat
- conversion
- supporting
- groove
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- 238000009413 insulation Methods 0.000 title claims abstract description 52
- 238000004140 cleaning Methods 0.000 title claims abstract description 37
- 238000006243 chemical reaction Methods 0.000 claims description 53
- 230000000295 complement effect Effects 0.000 claims description 3
- 239000002253 acid Substances 0.000 abstract description 10
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 230000009286 beneficial effect Effects 0.000 description 5
- 230000003749 cleanliness Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The invention relates to a jig for cleaning furnace tube equipment heat insulation sheets. The jig comprises two supporting seats and three supporting rods, the supporting rods include a first supporting rod, a second supporting rod and a third supporting rod, two ends of the first supporting rod and two ends of the second supporting rod are correspondingly fixed to the vertical middles of two sides of the two supporting seats respectively, two ends of the third supporting rod are fixed to the vertical bottoms of the two supporting seats, and corresponding positions of the three supporting rods are respectively provided with one or a plurality of toothed clamp grooves. When cleaned, a plurality of furnace tube equipment heat insulation sheets can be placed into the toothed clamp grooves of the supporting rods and simultaneously cleaned, cleaning efficiency is improved, acid liquor is saved, the service time of the acid liquor is prolonged, machine maintenance time is shortened, and accordingly, energy production efficiency is improved.
Description
Technical field
The present invention relates to a kind of cleaning equipment of insulation sheet, be specifically related to a kind of tool for cleaning oven tube apparatus insulation sheet.
Background technology
In the design of equipment manufacturers, below the brilliant boat of 12 inches boiler tube equipment, by the multi-disc insulation sheet, filled.Its purpose has two, and one is the temperature of boiler tube port area in keeping reaction cavity, and second is the bottom at brilliant boat, has weight to press and drags, and reduces the center of gravity of brilliant boat, prevents that the position of brilliant boat from drifting about.In each periodic maintenance of equipment, brilliant boat and boiler tube insulation of equipment sheet all need to clean, and with this, keep and improve the particulate cleanliness factor of equipment.Because of the porch of the position of boiler tube insulation of equipment sheet in reaction cavity in reacting gas, therefore boiler tube insulation of equipment sheet cleans the quality that the quality of situation can directly have influence on the particulate cleanliness factor of equipment.In prior art, when cleaning oven tube apparatus insulation sheet, cleaning action is to be completed by special cleaning machine, but is confined to the size of the cleaning basket of cleaning equipment, the boiler tube insulation of equipment sheet that reaches 20 once can't be put down.At present, the mode of cleaning oven tube apparatus insulation sheet be boiler tube insulation of equipment sheet in one line be placed in and clean in basket, then be immersed in acid solution, because guaranteeing the effect of cleaning, boiler tube insulation of equipment sheet is each other without any overlapping or push; Take such method, once can only clean 8,20 boiler tube insulation of equipment sheets need just can wash for 3 times; Simultaneously, the frequency that acid solution in cleaning machine is changed is 15, need to change acid after cleaning 15 quartz, and boiler tube insulation of equipment sheet cleans once 5 hours consuming time.Like this, need the cost cleaning for boiler tube insulation of equipment sheet in 15 hours, this mode had not only been wasted acid solution but also consuming time, and the waste resource postpones the time of answering a pager's call again.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of multi-disc boiler tube insulation of equipment sheet that can make and cleans together, the tool for cleaning oven tube apparatus insulation sheet that improves cleaning efficiency and economize on resources.
The technical scheme that the present invention solves the problems of the technologies described above is as follows: a kind of tool for cleaning oven tube apparatus insulation sheet, comprise supporting seat, support bar, described supporting seat is provided with two, described support bar is provided with three, be respectively the first support bar, the second support bar, the 3rd support bar, the two ends of described the first support bar and described the second support bar are the corresponding vertical centre position, both sides that is fixed on described two supporting seats respectively, the two ends of described the 3rd support bar are fixed on the vertical bottom of described two supporting seats, offer respectively one or more dentation draw-in grooves on corresponding position on described three support bars.
The invention has the beneficial effects as follows: when cleaning oven tube apparatus insulation sheet, the dentation draw-in groove that multi-disc boiler tube insulation of equipment sheet can be placed in to support bar is cleaned simultaneously, improves cleaning efficiency, save acid solution, extend acid solution service time, shorten the board maintenance time, thereby improve production capacity efficiency.
On the basis of technique scheme, the present invention can also do following improvement.
Further, a kind of tool for cleaning oven tube apparatus insulation sheet also comprises the conversion rod, on described conversion rod, offer with described three support bars in the draw-in groove that is complementary of dentation draw-in groove, the two ends of described conversion rod lay respectively at the vertical middle and upper part of described two supporting seats.
Adopt the beneficial effect of above-mentioned further scheme to be: will change rod and unload when cleaning large scale boiler tube insulation of equipment sheet, will change rod and load onto when cleaning small size boiler tube insulation of equipment sheet, and go for cleaning the boiler tube insulation of equipment sheet of two kinds of different sizes.
Further, the middle and upper part of a described supporting seat is provided with a conversion hole, the middle and upper part correspondence of described another supporting seat is provided with a conversion groove, the described hole of changing is into through hole, on described another supporting seat, changes hole into groove, and described conversion groove has certain depth, its degree of depth is less than the thickness of its place supporting seat, one end of described conversion rod is stuck in described conversion groove, and the excellent other end of described conversion passes described conversion hole, and is fixed in described conversion hole by latch.
Adopt the beneficial effect of above-mentioned further scheme to be: adopt the mode of latch fixed conversion rod, be convenient to the conversion rod supporting seat on can switch freely, simple to operate, fast.
Further, described the first support bar, the second support bar are cylindric support bar, and described the 3rd support bar is square support bar.
Adopt the beneficial effect of above-mentioned further scheme to be: supporting seat bottom the 3rd support bar be square, its lower end contacts with ground, the stability of raising tool.
Further, one end of described the 3rd support bar is fixed therein on a supporting seat height overhead and is greater than described the 3rd support bar other end and is fixed on another supporting seat height overhead, and described the first support bar, the second support bar, conversion rod are parallel with described the 3rd support bar respectively.
Adopt the beneficial effect of above-mentioned further scheme to be: an end of the 3rd support bar is fixed therein on a supporting seat height overhead and is greater than described the 3rd support bar other end and is fixed on another supporting seat height overhead, support bar in tool and the high end of the excellent end of conversion are low like this, each the boiler tube insulation of equipment sheet that makes to erect in tool has certain inclination angle, thus the phenomenon of avoiding boiler tube insulation of equipment sheet mutually to draw close.
The accompanying drawing explanation
The structural representation that Fig. 1 is a kind of tool for cleaning oven tube apparatus insulation sheet of the present invention;
Fig. 2 is that a kind of tool for cleaning oven tube apparatus insulation sheet of the present invention unloads the excellent structural representation of conversion.
In accompanying drawing, the list of parts of each label representative is as follows:
1.1, the first supporting seat, the 1.2, second supporting seat, 1.3, the conversion hole, 1.4, the conversion groove, 1.5, latch, the 2.1, first support bar, the 2.2, second support bar, the 2.3, the 3rd support bar, 3, the dentation draw-in groove, 4, the conversion rod, 4.1, draw-in groove.
The specific embodiment
Below in conjunction with accompanying drawing, principle of the present invention and feature are described, example, only for explaining the present invention, is not intended to limit scope of the present invention.
As shown in Figure 1, a kind of tool for cleaning oven tube apparatus insulation sheet, comprise supporting seat, support bar, described supporting seat is provided with two, be respectively the first supporting seat 1.1, the second supporting seat 1.2, described support bar is provided with three, be respectively the first support bar 2.1, the second support bar 2.2, the 3rd support bar 2.3, described first supports, 2.1, the second support bar 2.2 is cylindric support bar, described the 3rd support bar 2.3 is square support bar, the two ends of described the first support bar 2.1 and described the second support bar 2.2 are corresponding respectively is fixed on described the first supporting seat 1.1, vertical centre position, the both sides of the second supporting seat 1.2, the two ends of described the 3rd support bar 2.3 are separately fixed at described the first supporting seat 1.1, the bottom of the second support bar 2.2, one end of described the 3rd support bar 2.3 is fixed on the second supporting seat 1.2 height overhead and is greater than described the 3rd support bar 2.3 other ends and is fixed on the first supporting seat 1.1 height overhead, at described the first support bar 2.1, the second support bar 2.2, offer respectively one or more dentation draw-in grooves 3 on corresponding position on the 3rd support bar 2.3.Described a kind of tool for cleaning oven tube apparatus insulation sheet also comprises conversion rod 4, on described conversion rod 4, offer with described three support bars in the draw-in groove 4.1 that is complementary of dentation draw-in groove, the two ends of described conversion rod 4 lay respectively at described the first supporting seat 1.1, the vertical middle and upper part of the second supporting seat 1.2, described the first supporting seat 1.1, the middle and upper part of the second supporting seat 1.2 correspondence respectively is provided with conversion hole 1.3, conversion groove 1.4, change hole 1.3 into through hole on described the first supporting seat 1.1, conversion groove 1.4 on described the second supporting seat 1.2 has certain depth, its degree of depth is less than the thickness of the second supporting seat 1.2, one end of described conversion rod 4 is stuck in conversion groove 1.4, the other end of described conversion rod 4 is through described conversion hole 1.3, and by latch 1.5, be fixed on described in conversion hole 1.3.Described the first support bar 2.1, the second support bar 2.2, conversion rod 4 are parallel with described the 3rd support bar 2.3 respectively.
When using a kind of tool for cleaning oven tube apparatus insulation sheet of the present invention to clean large-sized boiler tube insulation of equipment sheet, do not need to use conversion rod 4, as shown in Figure 2, Fig. 2 is that a kind of tool for cleaning oven tube apparatus insulation sheet unloads the excellent structural representation of conversion, boiler tube insulation of equipment sheet is stuck in the dentation draw-in groove 3 in the first support bar 2.1, the second support bar 2.2, the 3rd support bar 2.3, then multi-disc boiler tube insulation of equipment sheet endways being immersed in acid solution is together cleaned, when cleaning undersized boiler tube insulation of equipment sheet, insert conversion rod 4, when boiler tube insulation of equipment sheet is small size, the first support bar 2.1, the second support bar 2.2, the 3rd support bar 2.3 phase mutual edge distances are excessive, can not block undersized boiler tube insulation of equipment sheet, now install conversion rod 4, because the two ends of changing rod 4 lay respectively at described the first supporting seat 1.1, the vertical middle and upper part of the second supporting seat 1.2, conversion rod 4 lays respectively at the first supporting seat 1.1 from the first support bar 2.1 apart from being less than two ends, second support bar 2.2 in the second supporting seat 2.2 1 vertical centre positions of side is from the distance of the first support bar 2.1, so boiler tube insulation of equipment sheet just is stuck in the first support bar 2.1, in the dentation draw-in groove 3 of the 3rd support bar 2.3 and conversion rod 4, then multi-disc boiler tube insulation of equipment sheet endways being immersed in acid solution is together cleaned.
One end of described the 3rd support bar 2.3 is fixed on the second supporting seat 1.2 height overhead and is greater than described the 3rd support bar 2.3 other ends and is fixed on the first supporting seat 1.1 height overhead, described the first support bar 2.1, the second support bar 2.2, conversion rod 4 is parallel with described the 3rd support bar 2.3 respectively, like this, large scale boiler tube insulation of equipment sheet is stuck in described the first support bar 2.1, the second support bar 2.2, in the corresponding dentation draw-in groove 3 of the 3rd support bar 2.3, or small-sized tube insulation of equipment sheet is stuck in described the first support bar 2.1, in the corresponding dentation draw-in groove 3 of the 3rd support bar 2.3 and in the corresponding draw-in groove 4.1 of conversion rod 4, boiler tube insulation of equipment sheet has certain inclination angle in tool, avoid occurring the situation of mutually drawing close between two boiler tube insulation of equipment sheets.
The foregoing is only preferred embodiment of the present invention, in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (5)
1. the tool for cleaning oven tube apparatus insulation sheet, it is characterized in that: comprise supporting seat, support bar, described supporting seat is provided with two, described support bar is provided with three, be respectively the first support bar, the second support bar, the 3rd support bar, the two ends of described the first support bar and described the second support bar are the corresponding vertical centre position, both sides that is fixed on described two supporting seats respectively, the two ends of described the 3rd support bar are fixed on the vertical bottom of described two supporting seats, on described three support bars, on corresponding position, offer respectively one or more dentation draw-in grooves.
2. a kind of tool for cleaning oven tube apparatus insulation sheet according to claim 1, it is characterized in that: also comprise the conversion rod, on described conversion rod, offer with described three support bars in the draw-in groove that is complementary of dentation draw-in groove, the two ends of described conversion rod lay respectively at the vertical middle and upper part of described two supporting seats.
3. a kind of tool for cleaning oven tube apparatus insulation sheet according to claim 2, it is characterized in that: the middle and upper part of a described supporting seat is provided with a conversion hole, the middle and upper part correspondence of described another supporting seat is provided with a conversion groove, described conversion groove has certain depth, its degree of depth is less than the thickness of its place supporting seat, one end of described conversion rod is stuck in described conversion groove, the excellent other end of described conversion passes described conversion hole, and is fixed in described conversion hole by latch.
4. a kind of tool for cleaning oven tube apparatus insulation sheet according to claim 1 and 2, it is characterized in that: described the first support bar, the second support bar are cylindric support bar, and described the 3rd support bar is square support bar.
5. a kind of tool for cleaning oven tube apparatus insulation sheet according to claim 1 and 2, it is characterized in that: an end of described the 3rd support bar is fixed therein on a supporting seat height overhead and is greater than described the 3rd support bar other end and is fixed on another supporting seat height overhead, and described the first support bar, the second support bar, conversion rod are parallel with described the 3rd support bar respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310416215.7A CN103464414B (en) | 2013-09-12 | 2013-09-12 | A kind of tool for cleaning oven tube apparatus insulation sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310416215.7A CN103464414B (en) | 2013-09-12 | 2013-09-12 | A kind of tool for cleaning oven tube apparatus insulation sheet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103464414A true CN103464414A (en) | 2013-12-25 |
| CN103464414B CN103464414B (en) | 2016-04-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310416215.7A Active CN103464414B (en) | 2013-09-12 | 2013-09-12 | A kind of tool for cleaning oven tube apparatus insulation sheet |
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| Country | Link |
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| CN (1) | CN103464414B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06252123A (en) * | 1993-03-01 | 1994-09-09 | Sumitomo Sitix Corp | Method for cleaning wafer with vapor |
| US5908042A (en) * | 1996-06-29 | 1999-06-01 | Komatsu Electronic Metals Co., Ltd. | Basket for cleaning semiconductor wafers and method of cleaning semiconductor wafers using the same |
| CN200967049Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Bracket specially for cleaning solar battery silicon wafers |
| CN201098688Y (en) * | 2007-11-27 | 2008-08-13 | 万向硅峰电子股份有限公司 | Device for cleaning single-crystal silicon chip by using ultrasonic wave |
| CN201243010Y (en) * | 2008-07-25 | 2009-05-20 | 深圳市捷佳创精密设备有限公司 | Silicon chip flower basket |
| CN201644434U (en) * | 2009-11-26 | 2010-11-24 | 北京有色金属研究总院 | Flower basket applicable to multi-size wafer cleaning |
-
2013
- 2013-09-12 CN CN201310416215.7A patent/CN103464414B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06252123A (en) * | 1993-03-01 | 1994-09-09 | Sumitomo Sitix Corp | Method for cleaning wafer with vapor |
| US5908042A (en) * | 1996-06-29 | 1999-06-01 | Komatsu Electronic Metals Co., Ltd. | Basket for cleaning semiconductor wafers and method of cleaning semiconductor wafers using the same |
| CN200967049Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Bracket specially for cleaning solar battery silicon wafers |
| CN201098688Y (en) * | 2007-11-27 | 2008-08-13 | 万向硅峰电子股份有限公司 | Device for cleaning single-crystal silicon chip by using ultrasonic wave |
| CN201243010Y (en) * | 2008-07-25 | 2009-05-20 | 深圳市捷佳创精密设备有限公司 | Silicon chip flower basket |
| CN201644434U (en) * | 2009-11-26 | 2010-11-24 | 北京有色金属研究总院 | Flower basket applicable to multi-size wafer cleaning |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103464414B (en) | 2016-04-27 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee after: Wuhan Xinxin Integrated Circuit Co.,Ltd. Country or region after: China Address before: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee before: Wuhan Xinxin Semiconductor Manufacturing Co.,Ltd. Country or region before: China |
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| CP03 | Change of name, title or address |