CN103447690A - Laser light path beam splitting system and method thereof - Google Patents
Laser light path beam splitting system and method thereof Download PDFInfo
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- CN103447690A CN103447690A CN2012101769106A CN201210176910A CN103447690A CN 103447690 A CN103447690 A CN 103447690A CN 2012101769106 A CN2012101769106 A CN 2012101769106A CN 201210176910 A CN201210176910 A CN 201210176910A CN 103447690 A CN103447690 A CN 103447690A
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- 230000010287 polarization Effects 0.000 claims abstract description 88
- 230000003287 optical effect Effects 0.000 claims description 43
- 239000000463 material Substances 0.000 claims description 5
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims description 5
- 230000000644 propagated effect Effects 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 239000010409 thin film Substances 0.000 abstract description 2
- 238000009966 trimming Methods 0.000 abstract 3
- 238000012545 processing Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
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- 239000006117 anti-reflective coating Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
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- 238000005111 flow chemistry technique Methods 0.000 description 1
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Abstract
The invention discloses a laser light path beam splitting system and a method thereof. The laser light path beam splitting system comprises at least one light beam polarization state trimming device and a beam splitting device. A lens group is clamped on the light beam polarization state trimming device and includes a TFP (thin film polarizer) lens and a reflector. The TFP lens is utilized to split beams and the light beam polarization state trimming device is turned to trim incident light polarization state reflected on the TFP lens, so that two light beam energy after beam splitting is balanced.
Description
[technical field]
The present invention relates to a kind of laser optical path beam splitting system and corresponding method.
[background technology]
Along with the development of laser technology, Laser Processing more and more becomes a kind of main flow processing mode.Simultaneously, the harsh processing request that materials processing and Excimer lithography, medical and beauty treatment, instrument and sensor market constantly propose, provide space and the environment of growing up to Laser Processing.
At present, for the multiaxis laser process equipment more than diaxon, for the ease of the individual difference of controlling, dwindling each between centers processing quality and reduce production costs etc., laser process equipment is usingd a laser instrument usually as laser source, and carries out light splitting to realize multiaxis processing in light path system.The light splitting mode of laser process equipment light path system has multiple, mainly because of optical maser wavelength and actual conditions different.Modal light splitting mode has the spectroscope light splitting, utilize different wave length laser and each crystalloid effect and the modes such as light splitting.
For the spectroscope light splitting, spectroscope can not fully guarantee that the energy of two light path systems reaches balance after light splitting.Require undemanding laser process equipment for each between centers capacity volume variance, this mode is both economical feasible; But, for accurately machined laser process equipment, the fine difference of each between centers energy will have a strong impact on processing quality, therefore the use of this light splitting mode is restricted.
For laser and each crystalloid effect and this class mode of light splitting is generally to be unable to do without electrical control, the additional structures such as cooling system also may be arranged in addition, for example AOM(Acousto-Optic Modulator) light splitting.This class light splitting mode need interact with crystal because of laser, and crystal meeting absorption portion laser energy itself, although there have cooling system to carry out crystal to be cooling, can not eliminate heat affecting fully.Heat affecting makes crystal produce thermal lensing effect and the broken beam quality, and fuel factor can have influence on the stability of beam energy after light splitting.Therefore, this its effect of class light splitting mode is also not ideal.
[summary of the invention]
After the imbalance of two light path system laser energies based on bringing after the light splitting of above-mentioned common light splitting mode, light splitting, the destroyed and energy stability of the beam quality phenomenon such as be affected, invented this laser optical path beam splitting system and light-splitting method thereof.
A kind of laser optical path beam splitting system provided by the present invention, it comprises at least one light polarization micromatic setting and a light-dividing device, clamping one lens set on described light polarization micromatic setting, this lens set comprises a TFP eyeglass and a speculum.
Wherein, described TFP eyeglass adopts ZnSe as base material.
Wherein, also comprise the optical receiver that corresponding described lens set arranges.
Wherein, this system also comprises some optical polarization eyeglasses.
Wherein, along the direction of propagation of light path, the transformational structure of a polarization state is set before described light polarization micromatic setting.
Corresponding said system, provide a kind of laser optical path light-splitting method: at first, by the light splitting of laser beam at least one light polarization micromatic setting of process and a light-dividing device, clamping one lens set on described light polarization micromatic setting, this lens set comprises a TFP eyeglass and a speculum, wherein light beam is after described TFP eyeglass, and transmitted light is propagated to described spectroscope, and described reverberation is by described mirror reflects.
Wherein, light beam, after described mirror reflects, and is absorbed by an optical receiver.
Wherein, in the process that laser beam is propagated to described light-dividing device at described light polarization micromatic setting, can be regulated by some optical polarization eyeglasses the polarization state of light beam.
Wherein, if incident beam is horizontal linear polarization or perpendicular linear polarization, adds a polarization converted structure along the direction of propagation of light beam in described light polarization micromatic setting and transform the light beam into the linearly polarized light beam that meets the TFP eyeglass.
This system and method thereof are mainly to utilize TFP(Thin Film Polarizers) eyeglass is to the basic total transmissivity of P-pol light beam and the basic total reflection function of S-pol light beam is carried out to light splitting to light beam.And, by rotary light beam polarization state micromatic setting, the incident light polarization state be incident on the TFP eyeglass is finely tuned, finally reach the balance of two beam energies after light splitting.
Generally, in order to meet some functional requirement, also can place a plurality of speculums, lens etc. and not take and change the ordinary optical eyeglass that the light beam polarization state is basic function between light polarization micromatic setting and light-dividing device.These eyeglasses can affect the light polarization be incident on the TFP spectroscope more or less.Now, can solve the unbalanced problem of two beam energies after the light splitting that adds these conventional eyeglasses to bring by rotating fine-regulating device.
[accompanying drawing explanation]
In conjunction with embodiment, the inventive method is further described with reference to the accompanying drawings.
Fig. 1 is the light polarization micromatic setting schematic diagram of laser optical path beam splitting system of the present invention and method thereof;
Fig. 2 is the fundamental diagram of laser optical path beam splitting system of the present invention and method thereof;
Fig. 3 is the light polarization transformational structure schematic diagram one of laser optical path beam splitting system of the present invention and method thereof;
Fig. 4 is the light polarization transformational structure schematic diagram two of laser optical path beam splitting system of the present invention and method thereof.
[specific embodiment]
The invention will be further described in conjunction with the embodiments with reference to the accompanying drawings.
For the more clear expression of purpose of the present invention, technical scheme and advantage, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only for explaining the present invention, is not intended to limit the present invention.
Embodiments of the invention 1 provide a kind of laser optical path beam splitting system, comprise at least one light polarization micromatic setting 100 and a light-dividing device 200.
Clamping one lens set on light polarization micromatic setting 100, this lens set comprises a TFP eyeglass 101 and a speculum 102.
This light polarization micromatic setting 100 also comprises the optical receiver 103 that corresponding lens set arranges.Because the TFP eyeglass can not be crossed 45 ° of linearly polarized light beams by a hundred per cent full impregnated, for this TFP eyeglass, incident beam is the P-pol light beam, and the optical receiver 103 that therefore corresponding lens set arranges, to absorb unnecessary laser.
This beam splitting system also comprises some optical polarization eyeglasses 300.It is arranged between light polarization micromatic setting 100 and light-dividing device 200, and it comprises that a plurality of speculums, lens etc. are not to change the not optical mirror slip of basic function of light beam polarization state.Particularly, specify big or small hot spot etc. in order to obtain specific optical path length or to meet, the middle lens that must have many reflecting optics for optic path and restraint for expansion, contracting etc., the reflective coating plated on these eyeglasses or antireflective coating can make the light beam after optical mirror slip 300 introduce additive phase.
In reality, implement in this light splitting procedure, although the TFP eyeglass on light-dividing device 200 to the transmitance of P-pol light beam FG and to the reflectivity of S-pol light beam FH all more than 98%, both can not be identical.Therefore, if be incident to incident beam on light-dividing device 11, be 45 ° of linearly polarized light beams two light path system energy complete equipilibriums after can not meeting light splitting; In addition, laser is transferred in the process of light-dividing device 200 through light polarization micromatic setting 100, specify big or small hot spot etc. in order to obtain specific optical path length and to meet, the middle lens that must have many reflecting optics for optic path and restraint for expansion, contracting etc., the reflective coating plated on these eyeglasses or antireflective coating can make the light beam after optical mirror slip 300 introduce additive phase, and then affect the polarization state of light beam.This impact makes light beam be incident on light-dividing device 200 with a certain non-45 ° of linear polarization state, is incident on light-dividing device 11 the energy complete equipilibrium that can not guarantee two light path systems after light splitting with this state.
Now, must can solve the unbalanced problem of two beam energies after the light splitting that adds these conventional eyeglasses to bring by 100 of rotating fine-regulating devices.
This beam splitting system also comprises polarization converted structure 400, before being arranged on light polarization micromatic setting 100, the incident beam that is horizontal linear polarization or perpendicular linear polarization for polarization state, will change at 45 ° or-45 ° of linearly polarized light beams through the light beam of this device, as shown in Figure 3
For circularly polarized light, the polarization converted structure is set according to the concrete condition of laser instrument inside light path.
Laser optical path beam splitting system based on above-mentioned, embodiment 2 correspondences provide a kind of laser optical path light-splitting method.
At first, by the light splitting of laser beam at least one light polarization micromatic setting 100 of process and a light-dividing device 200, clamping one lens set on light polarization micromatic setting 100, this lens set comprises a TFP eyeglass 101 and a speculum 102, wherein light beam is after a TFP eyeglass 101, transmitted light BD propagates to spectroscope 200, and reverberation BC is by speculum 102 reflections.
In implementing this method process, at first must judge the light beam polarization state of light path system. for the light beam that enters light polarization micromatic setting 100, be 45 ° or-45 ° of linearly polarized light beams, can directly be incorporated into the light path system light splitting that realizes the inventive method on light polarization micromatic setting 100 to light beam, as shown in Figure 1.
But, light beam because of TFP absolutely full impregnated cross 45 ° of linearly polarized light beams, for this TFP eyeglass, incident beam is the P-pol light beam, therefore, must increase mix, astigmatic receiver 103 to be to absorb unnecessary laser.
Pay particular attention to the plane of incidence of the TFP eyeglass 101 on light polarization micromatic setting 100, the i.e. transmission of beam reflection in Fig. 1 polarization direction that the ABC plane must be parallel to incident beam that forms; Be necessary for the Brewster angle for its incidence angle of light beam be incident on TFP eyeglass 1.Because the material of TFP eyeglass is ZnSe, its refractive index n to the 9.4um wavelength laser is that 2.41, GuBrewsterJiao is:
θ
Brewster＝tan
-1n=67.5°
In reality, implement in this light splitting procedure, although the TFP eyeglass on light-dividing device 200 to the transmitance of P-pol light beam and to the reflectivity of S-pol light beam all more than 98%, both can not be identical.Therefore, if be incident to incident beam on light-dividing device 200, be 45 ° of linearly polarized light beams two light path system energy complete equipilibriums after can not meeting light splitting; In addition, laser is transferred in the process of light-dividing device 200 through light polarization micromatic setting 100, centre must have many for the eyeglass of optic path or for meeting the optical mirror slip 300 of some functional requirement increase, and the meeting change more or less of these eyeglasses transfers to 45 ° of linear polarization polarized state of lights on light-dividing device 200.
Based on above two facts, we must finely tune light polarization micromatic setting 100, make to be incident to incident light on light-dividing device 200 with 45 °-β of certain polarization state incident, as shown in Figure 2, the balance of two light path system energy after supposing can meet light splitting fully under this polarization state.Under this polarization state, 45 °-β linear polarization incident light component 9 by the transmission of TFP eyeglass, supposes to see through e1 as the P-pol light beam, reflection e2, and e1 is much larger than e2; 45 °-β linear polarization incident light component 10 by the TFP lens reflecting, is supposed reflection E1 as the S-pol light beam, sees through E2, and E1 is much larger than E2.Must have:
e1+E2＝e2+E1
For example, toward finely tuning light polarization micromatic setting 100 α degree clockwise, now for light polarization micromatic setting 100, the plane of incidence 6 of its TFP eyeglass 101 and the polarization direction angle of 45 ° of linear polarization incident lights 4 are α.So, 45 ° of linear polarization incident light components 5 are as the S-pol light beam, and the overwhelming majority will be reflected onto on assorted, astigmatic receiver 3 and sponge, and 45 ° of linear polarization incident light components 7 are as the transmission of P-pol light beam and be incident on light-dividing device 200.When between fine setting light polarization micromatic setting 2 and light-dividing device 11 during without any optical mirror slip, 45 ° of linear polarization incident light components 7 are 45 °-β linearly polarized light,
α=β
When between fine setting light polarization micromatic setting 100 and light-dividing device 200, optical mirror slip being arranged,
β＝α+γ
The positive and negative of γ angle depends on optical mirror slip 300 is how to affect the light beam polarization state be incident on light-dividing device 11.In this example, if introduce clockwise polarization, get positive sign; Introduce counterclockwise polarization, get negative sign.
The incident beam that is horizontal linear polarization or perpendicular linear polarization for polarization state, can, by polarization converted structure of the front increase of light polarization micromatic setting 2, as shown in Figure 3, will change at 45 ° or-45 ° of linearly polarized light beams through the light beam of this device.
For circularly polarized light, design the polarization converted structure according to the concrete condition of laser instrument inside light path.
Claims (9)
1. a laser optical path beam splitting system, its feature comprises at least one light polarization micromatic setting and a light-dividing device, clamping one lens set on described light polarization micromatic setting, this lens set comprises a TFP eyeglass and a speculum.
2. laser optical path beam splitting system according to claim 1 is characterized in that: described TFP eyeglass adopts ZnSe as base material.
3. laser optical path beam splitting system according to claim 1 and 2, is characterized in that: also comprise the optical receiver that corresponding described lens set arranges.
4. laser optical path beam splitting system according to claim 1, it is characterized in that: this system also comprises some optical polarization eyeglasses.
5. laser optical path beam splitting system according to claim 1, is characterized in that: along the direction of propagation of light path, the transformational structure of a polarization state is set before described light polarization micromatic setting.
6. a laser optical path light-splitting method, it is characterized in that: at first, by the light splitting of laser beam at least one light polarization micromatic setting of process and a light-dividing device, clamping one lens set on described light polarization micromatic setting, this lens set comprises a TFP eyeglass and a speculum, wherein light beam is after described TFP eyeglass, and transmitted light is propagated to described spectroscope, and described reverberation is by described mirror reflects.
7. according to the laser optical path light-splitting method of claim 6, it is characterized in that: light beam, after described mirror reflects, and is absorbed by an optical receiver.
8. according to the laser optical path light-splitting method of claim 6 or 7, it is characterized in that: in the process that laser beam is propagated to described light-dividing device at described light polarization micromatic setting, can be regulated by some optical polarization eyeglasses the polarization state of light beam.
9. according to the laser optical path light-splitting method of claim 4, it is characterized in that: if incident beam is horizontal linear polarization or perpendicular linear polarization, adds a polarization converted structure along the direction of propagation of light beam in described light polarization micromatic setting and transform the light beam into the linearly polarized light beam that meets the TFP eyeglass.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1426236A (en) * | 2001-12-12 | 2003-06-25 | 大億科技股份有限公司 | Triple prism type projection display device |
| CN1485647A (en) * | 2002-09-27 | 2004-03-31 | Jds尤尼费斯公司 | Wave length selective laser beam divider |
| US20070041088A1 (en) * | 2005-08-22 | 2007-02-22 | Funai Electric Co., Ltd. | Optical pickup device |
| CN2938491Y (en) * | 2006-08-11 | 2007-08-22 | 北京国科世纪激光技术有限公司 | Multi-wavelength laser of coaxial light generation |
| CN101382664A (en) * | 2008-10-23 | 2009-03-11 | 高秀敏 | Polarization state non-uniform distribution light beam generating method and apparatus thereof |
| CN201576164U (en) * | 2009-11-13 | 2010-09-08 | 惠州市华阳多媒体电子有限公司 | Micro projector used for 3D display |
| CN101825703A (en) * | 2010-01-25 | 2010-09-08 | 华北电力大学（保定） | Improved pulsed laser distance measurement device and laser distance measurement method utilizing same |
| CN201754204U (en) * | 2010-06-22 | 2011-03-02 | 深圳市大族激光科技股份有限公司 | Laser splitting device and laser processing device |
| CN102252975A (en) * | 2011-03-25 | 2011-11-23 | 西北大学 | Forward degenerate four-wave mixing based isotope detection method with ultrahigh sensitivity |
-
2012
- 2012-05-31 CN CN201210176910.6A patent/CN103447690B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1426236A (en) * | 2001-12-12 | 2003-06-25 | 大億科技股份有限公司 | Triple prism type projection display device |
| CN1485647A (en) * | 2002-09-27 | 2004-03-31 | Jds尤尼费斯公司 | Wave length selective laser beam divider |
| US20070041088A1 (en) * | 2005-08-22 | 2007-02-22 | Funai Electric Co., Ltd. | Optical pickup device |
| CN2938491Y (en) * | 2006-08-11 | 2007-08-22 | 北京国科世纪激光技术有限公司 | Multi-wavelength laser of coaxial light generation |
| CN101382664A (en) * | 2008-10-23 | 2009-03-11 | 高秀敏 | Polarization state non-uniform distribution light beam generating method and apparatus thereof |
| CN201576164U (en) * | 2009-11-13 | 2010-09-08 | 惠州市华阳多媒体电子有限公司 | Micro projector used for 3D display |
| CN101825703A (en) * | 2010-01-25 | 2010-09-08 | 华北电力大学（保定） | Improved pulsed laser distance measurement device and laser distance measurement method utilizing same |
| CN201754204U (en) * | 2010-06-22 | 2011-03-02 | 深圳市大族激光科技股份有限公司 | Laser splitting device and laser processing device |
| CN102252975A (en) * | 2011-03-25 | 2011-11-23 | 西北大学 | Forward degenerate four-wave mixing based isotope detection method with ultrahigh sensitivity |
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Address after: 518000 5 / F, 1 / 2 / F, 14 / F, 17 / F, No.3 Factory building, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's CNC Technology Co.,Ltd. Address before: 518000 5 / F, 1 / 2 / F, 14 / F, 17 / F, No.3 Factory building, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. |