CN103422062A - Vacuum sputtering coating equipment with forward and reverse rotation inner glass tube clamp - Google Patents
Vacuum sputtering coating equipment with forward and reverse rotation inner glass tube clamp Download PDFInfo
- Publication number
- CN103422062A CN103422062A CN201210157907XA CN201210157907A CN103422062A CN 103422062 A CN103422062 A CN 103422062A CN 201210157907X A CN201210157907X A CN 201210157907XA CN 201210157907 A CN201210157907 A CN 201210157907A CN 103422062 A CN103422062 A CN 103422062A
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- glass tube
- inner glass
- coating equipment
- vacuum sputtering
- sputtering coating
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Abstract
Vacuum sputtering coating equipment with forward and reverse rotation inner glass tube clamps is composed of a target seat 1, inner glass tube tool clamps 2, and control and transmission equipment, a power supply, and a shell body 3. The inner glass tube tool clamps 2 are evenly arranged around the axial lead of a film-plating machine like planets. When the inner glass tube tool clamps 2 revolve around the axial lead of the film-plating machine, and the inner glass tube tool clamps 2 also rotate around their own axial leads, namely rotation. The rotations of the inner glass tube tool clamps include forward rotations and reverse rotations, and furthermore, the angles of the forward rotations and reverse rotations can be adjusted.
Description
Technical field
The present invention relates to the vacuum sputtering coating equipment with rotating inner glass tube fixture.
Background technology
Existing all-glass vacuum thermal-collecting tube, the solar energy collection tube that comprises heat pipe and the integrated making of inner glass tube, there is high specific absorption and extremely low emittance, when obtaining gratifying solar collecting performance and heat-collecting temperature, also make the air drying temperature reach more than 230 ℃.High like this air drying temperature brings the heat-pipe working medium vapour pressure of integrated making too high and cause the problems such as bombing accident sometimes.
Summary of the invention
The objective of the invention is to provide the vacuum sputtering coating equipment with rotating inner glass tube fixture.
The present invention solves the technical scheme that its technical problem is taked: with target stand, inner glass tube frock clamp, control and transmission apparatus, power supply and housing, form a vacuum sputtering coating equipment with rotating inner glass tube fixture.But described filming equipment contains a rotating, is the inner glass tube frock clamp of planetary layout.
Beneficial effect of the present invention: make the inner glass tube frock clamp of filming equipment, separately around the Pivot Point Center line certain inscribed angle of reversion of becoming a full member, 220 degree inscribed angle for example, can the inner glass tube outside surface form about 140 degree inscribed angle without coating film area.So just can utilize the emittance of high-boron-silicon glass 92% itself, the air drying temperature of decrease heat collecting element.When using water as heat-pipe working medium, when the air drying temperature is 160 ℃, vapour pressure is 6 normal atmosphere, 29 normal atmosphere nearly than 230 ℃ of script air drying temperature reduce nearly 4/5ths, be less than for internal diameter borosilicate 3.3 inner glass tubes that 34 millimeters, wall thickness are greater than 1.6 millimeters, the integrated heat tube thermal-collecting tube of made can be realized anti-air drying.
The accompanying drawing explanation
Below in conjunction with drawings and Examples, the present invention is further described.
Fig. 1 is a schematic diagram of the vacuum sputtering coating equipment composite structure with rotating inner glass tube fixture.
1. target stands in figure; 2. inner glass tube frock clamp; 3. housing.
Embodiment
Fig. 1 provides one embodiment of the present of invention.
In Fig. 1, with target stand 1, inner glass tube frock clamp 2, control and transmission apparatus, power supply and housing 3, form a vacuum sputtering coating equipment with rotating inner glass tube fixture.Inner glass tube frock clamp 2 is done to arrange around the even capable heart shape of coating equipment axial line.Inner glass tube frock clamp 2 is rotation in the rotation of also doing around the Pivot Point Center line in the revolution of coating equipment axial line.The rotation of inner glass tube frock clamp 2 comprises and rotating and reverse, and the angle of described rotating can be regulated.
Claims (1)
1. with the vacuum sputtering coating equipment of rotating inner glass tube fixture, formed by target stand, inner glass tube frock clamp, control and transmission apparatus, power supply and housing, but it is characterized in that described filming equipment contains a rotating, is the inner glass tube frock clamp of planetary layout.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210157907XA CN103422062A (en) | 2012-05-18 | 2012-05-18 | Vacuum sputtering coating equipment with forward and reverse rotation inner glass tube clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210157907XA CN103422062A (en) | 2012-05-18 | 2012-05-18 | Vacuum sputtering coating equipment with forward and reverse rotation inner glass tube clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103422062A true CN103422062A (en) | 2013-12-04 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210157907XA Pending CN103422062A (en) | 2012-05-18 | 2012-05-18 | Vacuum sputtering coating equipment with forward and reverse rotation inner glass tube clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103422062A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109881170A (en) * | 2019-03-07 | 2019-06-14 | 厦门阿匹斯智能制造系统有限公司 | A kind of magnetic-controlled sputtering coating equipment and its film plating process |
| CN112723733A (en) * | 2020-12-22 | 2021-04-30 | 武汉锐科光纤激光技术股份有限公司 | Laser cutting device for cutting glass tube |
-
2012
- 2012-05-18 CN CN201210157907XA patent/CN103422062A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109881170A (en) * | 2019-03-07 | 2019-06-14 | 厦门阿匹斯智能制造系统有限公司 | A kind of magnetic-controlled sputtering coating equipment and its film plating process |
| CN112723733A (en) * | 2020-12-22 | 2021-04-30 | 武汉锐科光纤激光技术股份有限公司 | Laser cutting device for cutting glass tube |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20131204 Assignee: Shanghai Changyu Information Science & Technology Co., Ltd. Assignor: Xu Xiuping Contract record no.: 2012310000239 Denomination of invention: Vacuum sputtering coating equipment with forward and reverse rotation inner glass tube clamp License type: Common License Record date: 20121225 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: Taizhou City, Zhejiang province 317500 Wenling City Taiping Street South Road 109 Lane 7 Applicant after: Xu Xiuping Address before: 200050 No. 57, 1 Xuanhua Road, Shanghai, Changning District 402 Applicant before: Xu Xiuping |
|
| COR | Change of bibliographic data | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20131204 |