CN103400237A - System and method for managing Runcard made of semiconductor - Google Patents
System and method for managing Runcard made of semiconductor Download PDFInfo
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- CN103400237A CN103400237A CN2013103546997A CN201310354699A CN103400237A CN 103400237 A CN103400237 A CN 103400237A CN 2013103546997 A CN2013103546997 A CN 2013103546997A CN 201310354699 A CN201310354699 A CN 201310354699A CN 103400237 A CN103400237 A CN 103400237A
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Abstract
The invention discloses a system and method for managing a Runcard made of a semiconductor. The method comprises the following steps: experimental data are obtained by a workflow system from a manufacturing execution system, experimental data is checked and confirmed by the workflow system, and checking information is recorded by the workflow system; accurate experimental data after confirmation is written into an interface middle list by the workflow system; a Runcard establishment request is sent to a Runcard module (MES RC) of the manufacturing execution system through middleware by the workflow system; after the Runcard establishment request is received, the experimental data is obtained from the interface middle list and Runcard establishment operation is performed by the Runcard module (MES RC) of the manufacturing execution system, and establishment answering information is replied to the workflow system through the middleware so as to record state. According to the invention, risks brought by inputting inaccurate experimental data of the Runcard module of the manufacturing execution system can be reduced effectively, and the stability of the manufacturing execution system is improved.
Description
Technical field
The present invention, about a kind of semiconductor manufacturing execution system (Manufacturing Execution System is called for short MES) field, particularly relates to Runcard management system and method that a kind of semiconductor is manufactured.
Background technology
In semiconductor fabrication, for research and development experiment, process parameter adjustment or the process conditions correction of customer requirement, semiconductor foundry factory (IC Foundry) can produce a Runcard(traveler) describe corresponding information in detail, as semiconductor equipment numbering, wafer (Wafer) quantity, wafer numbering, processing procedure program (Recipe) or the information such as graticule (Reticle) for testing.
In early days, semiconductor foundry factory generally produces Runcard in the hard copy mode, and the Runcard of papery is placed in antistatic bag.Along with the development of semiconductor fabrication, nowadays, Runcard generally can generate and manage in Manufacturing Executive System MES.Yet Run Card module (the Manufacturing Execution System Run Card of existing manufacturing execution system, abbreviation MES RC) there is the problem that can not check to the experimental data of input confirmation record check information, can't guarantee the correctness of experimental data, thereby affect experimental result, have great risk.
Summary of the invention
The deficiency that exists for overcoming above-mentioned prior art, the Runcard management system and the method that provide a kind of semiconductor to manufacture are provided the present invention's purpose, can effectively reduce the incorrect risk of bringing of experimental data of input manufacturing execution system Run Card module (MES RC), improve the stability of manufacturing execution system.
For reaching above-mentioned and other purpose, the present invention proposes the Runcard management system that a kind of semiconductor is manufactured, and comprises at least:
Workflow system, obtain experimental data, it checked to confirmation, record check information, and it is write to the incoming interface middle table, then by Run Card module (MES RC) the transmission Runcard request to create of a middleware to manufacturing execution system;
The interface middle table, receive and store this Workflow system and confirm as correct experimental data;
Middleware, receive the Runcard request to create that this Workflow system sends, and this request is sent to the Runcard module (MES RC) of manufacturing execution system;
Manufacturing execution system, after its Runcard module MES RC receives this Runcard request to create message, from this interface middle table, obtain experimental data and carry out the Runcard establishment, and reply and create response message to this Workflow system recording status by this middleware.
Further, this Workflow system obtains experimental data by terminal computer.
Further, this Workflow system is from the most of experimental data of this manufacturing execution system automatic acquisition, then experimental data is checked and confirms and record check information by a plurality of designated persons.
Further, this interface middle table is stored in an oracle database.
Further, this middleware is TIBCO RV middleware.
Further, this MES RC, after this Runcard builds up merit, then sends to this Workflow system recording status by subsequent operation message by this middleware.
For reaching above-mentioned and other purpose, the Runcard management method that the present invention also provides a kind of semiconductor to manufacture, comprise the steps:
Step 1, Workflow system obtains experimental data and it is checked and confirms record check information from manufacturing execution system;
Step 2, Workflow system will be confirmed as correct experimental data and write the incoming interface middle table;
Step 3, Workflow system is by Runcard module (MES RC) the transmission Runcard request to create of middleware to manufacturing execution system;
Step 4, after the Runcard module of manufacturing execution system (MES RC) receives this Runcard request to create message, from this interface middle table, obtain experimental data and carry out the Runcard creation operation, and reply and create response message to this Workflow system recording status by this middleware.
Further, the experimental data that creates Runcard checks confirmation by Workflow system, guarantee the correctness of experimental data, by inspection, confirm experimental data, can effectively reduce the incorrect risk of bringing of experimental data of input manufacturing execution system Run Card module (MES RC), improve the stability of manufacturing execution system.
Further, after this Runcard created successfully, this Runcard module MES RC sent to this Workflow system recording status by subsequent operation message by this middleware.
Further, this middleware is TIBCO RV middleware.
Compared with prior art, Runcard management system and the method for a kind of semiconductor manufacture of the present invention are obtained experimental data by Workflow system, and inspection is confirmed as to correct experimental data and write the incoming interface middle table and send message, the Run Card creation module (MES RC) of manufacturing execution system is according to after receiving message, from the interface middle table, obtain experimental data and carry out Run Card creation operation, effectively reduced input manufacturing execution system Run Card(MES RC) the incorrect risk of bringing of experimental data, improved the stability of manufacturing execution system.
The accompanying drawing explanation
Fig. 1 is the system architecture diagram of the Runcard management system of a kind of semiconductor manufacture of the present invention;
Fig. 2 is the flow chart of steps of the Runcard management method of a kind of semiconductor manufacture of the present invention;
Fig. 3 is the workflow schematic diagram of the present invention's preferred embodiment.
Embodiment
Below by specific instantiation accompanying drawings embodiments of the present invention, those skilled in the art can understand other advantage of the present invention and effect easily by content disclosed in the present specification.The present invention also can be implemented or be applied by other different instantiation, and the every details in this instructions also can be based on different viewpoints and application, carries out various modifications and change not deviating under spirit of the present invention.
Fig. 1 is the system architecture diagram of the Runcard management system of a kind of semiconductor manufacture of the present invention.As shown in Figure 1, the Runcard management system that a kind of semiconductor of the present invention is manufactured, comprise: Workflow system 10, interface middle table 11, middleware 12, manufacturing execution system 13, Runcard module (MES RC) 14 at least.
wherein, Workflow system 10 obtains experimental data and it is checked and confirms record check information, and it is write to incoming interface middle table 11, then by middleware 12, to MES RC14, send Runcard request to create (CREATE_REQUEST message), in preferred embodiment of the present invention, can by terminal computer, on Workflow system 10, fill in experimental data by the user, most of experimental data can be passed through Workflow system 10 from automatic acquisition manufacturing execution system 13, then experimental data is checked and confirms and record check information by a plurality of designated persons, interface middle table 11 is confirmed as correct experimental data in order to receive and to store Workflow system 10, and namely Workflow system 10 will be confirmed as correct experimental data and write incoming interface middle table 11, and interface middle table 11 can be stored in an oracle database, middleware 12 receives the Runcard request to create that Workflow system 10 sends, and this request is sent to MES RC14, and in preferred embodiment of the present invention, middleware 12 is called for short TIBCO RV for TIBCO Rendezvous() middleware, MES RC14 is Runcard module (the Manufacturing Execution System Run Card of manufacturing execution system, abbreviation MES RC) after receiving message, from interface middle table 11, obtain experimental data and carry out Runcard and create (Create Run Card) operation, and by middleware 12(TIBCO RV) reply to create and reply (CREATE_REPLY) message to Workflow system 10 recording status, and in the Runcard(traveler) create successfully after, again by operation informations such as follow-up START/FINISH/DELETE/CANCEL by middleware 12(TIBCO RV) send to Workflow system 10 recording status.
Fig. 2 is the flow chart of steps of the Runcard management method of a kind of semiconductor manufacture of the present invention.As shown in Figure 2, the Runcard management method that a kind of semiconductor of the present invention is manufactured, comprise the steps:
Fig. 3 is the workflow schematic diagram of the present invention's preferred embodiment.Below will coordinate Fig. 3 to further illustrate the present invention.According to Fig. 3, the present invention's Runcard management method comprises following two parts:
Experimental data is filled in by first on Workflow system by terminal computer by the user, most of experimental data can be by Workflow system from manufacturing execution system (Manufacturing Execution System, be called for short MES) middle automatic acquisition, then experimental data is checked and confirms and record check information by a plurality of designated persons.
Second portion is by Workflow system, first will confirm as correct experimental data to write the incoming interface middle table, and is called for short TIBCO RV by TIBCO Rendezvous() middleware sends CREATE_REQUEST message to the Run Card module (MES RC) of manufacturing execution system.After the RunCard module of manufacturing execution system (MES RC) receives message, from the interface middle table, obtain experimental data and carry out Create Run Card operation, and reply REATE_REPLY message to the Workflow system recording status by TIBCO RV middleware.After the RunCard module of manufacturing execution system (MES RC) Create Run Card success, follow-up START/FINISH/DELETE/CANCEL operation information is sent to the Workflow system recording status by TIBCO RV middleware.
In sum, Runcard management system and the method for a kind of semiconductor manufacture of the present invention are obtained experimental data by Workflow system, and inspection is confirmed as to correct experimental data and write the incoming interface middle table and send message, the Run Card module (MES RC) of manufacturing execution system is according to after receiving message, from the interface middle table, obtain experimental data and carry out Run Card creation operation, effectively reduced input manufacturing execution system RunCard(MES RC) the incorrect risk of bringing of experimental data, improved the stability of manufacturing execution system.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not be used to limiting the present invention.Any those skilled in the art all can, under spirit of the present invention and category, modify and change above-described embodiment.Therefore, the scope of the present invention, should be as listed as claims.
Claims (9)
1. the Runcard management system manufactured of a semiconductor comprises at least:
Workflow system, obtain experimental data from manufacturing execution system, it checked to confirmation, record check information, and it is write to the incoming interface middle table, then by the Runcard module transmission Runcard request to create of a middleware to manufacturing execution system;
The interface middle table, receive and store this Workflow system and confirm as correct experimental data;
Middleware, receive the Runcard request to create that this Workflow system sends, and this request is sent to the Runcard module of manufacturing execution system;
The Runcard module, after receiving this Runcard request to create message, obtain experimental data and carry out the Runcard establishment from this interface middle table, and reply and create response message to this Workflow system recording status by this middleware.
2. the Runcard management system manufactured of a kind of semiconductor as claimed in claim 1, it is characterized in that: this Workflow system can obtain experimental data by terminal computer.
3. the Runcard management system manufactured of a kind of semiconductor as claimed in claim 1, it is characterized in that: this Workflow system can be from the most of experimental data of manufacturing execution system automatic acquisition, again experimental data is checked and confirms and record check information by a plurality of designated persons, guarantee the correctness of experimental data.
4. the Runcard management system manufactured of a kind of semiconductor as claimed in claim 1, it is characterized in that: this interface middle table is stored in an oracle database, be used to transmitting data.
5. the Runcard management system manufactured of a kind of semiconductor as claimed in claim 1, it is characterized in that: this middleware is TIBCO RV middleware, can receive and send message.
6. the Runcard management system manufactured of a kind of semiconductor as claimed in claim 1, it is characterized in that: after the Runcard module of this manufacturing execution system receives this Runcard request to create message, can automatically from this interface middle table, obtain experimental data and automatically perform the Runcard creation operation.
7. the Runcard management method that semiconductor is manufactured, comprise the steps:
Step 1, Workflow system obtains experimental data and it is checked and confirms record check information from manufacturing execution system;
Step 2, Workflow system will be confirmed as correct experimental data and write the incoming interface middle table;
Step 3, Workflow system is by the Runcard module transmission Runcard request to create of middleware to manufacturing execution system;
Step 4, after the Runcard module of manufacturing execution system receives this Runcard request to create message, from this interface middle table, obtain experimental data and carry out the Runcard creation operation, and reply and create response message to this Workflow system recording status by this middleware.
8. the Runcard management method manufactured of a kind of semiconductor as claimed in claim 7, it is characterized in that: the experimental data that creates Runcard checks confirmation by Workflow system, guarantees the correctness of experimental data.
9. the Runcard management method manufactured of a kind of semiconductor as claimed in claim 7, it is characterized in that: the RunCard module of this Workflow system and manufacturing execution system is communicated news by this middleware, after this Runcard created successfully, this Runcard module sent to this Workflow system recording status by subsequent operation message by this middleware.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2013103546997A CN103400237A (en) | 2013-08-14 | 2013-08-14 | System and method for managing Runcard made of semiconductor |
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| CN2013103546997A CN103400237A (en) | 2013-08-14 | 2013-08-14 | System and method for managing Runcard made of semiconductor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114500232A (en) * | 2022-01-24 | 2022-05-13 | 上海华力微电子有限公司 | Factory network middleware monitoring system |
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| CN1507007A (en) * | 2002-12-11 | 2004-06-23 | 台湾积体电路制造股份有限公司 | Runcard management system and method for semiconductor manuafcture |
| CN1507025A (en) * | 2002-12-12 | 2004-06-23 | 中芯国际集成电路制造（上海）有限公 | Mask measuring method for automatic file input |
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2013
- 2013-08-14 CN CN2013103546997A patent/CN103400237A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1507007A (en) * | 2002-12-11 | 2004-06-23 | 台湾积体电路制造股份有限公司 | Runcard management system and method for semiconductor manuafcture |
| CN1507025A (en) * | 2002-12-12 | 2004-06-23 | 中芯国际集成电路制造（上海）有限公 | Mask measuring method for automatic file input |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114500232A (en) * | 2022-01-24 | 2022-05-13 | 上海华力微电子有限公司 | Factory network middleware monitoring system |
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