CN103398686B - A kind of aperture aspherical optical elements Precision measurement platform Z axis counter weight device - Google Patents
A kind of aperture aspherical optical elements Precision measurement platform Z axis counter weight device Download PDFInfo
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- CN103398686B CN103398686B CN201310365963.7A CN201310365963A CN103398686B CN 103398686 B CN103398686 B CN 103398686B CN 201310365963 A CN201310365963 A CN 201310365963A CN 103398686 B CN103398686 B CN 103398686B
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- flow liquid
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Abstract
A kind of aperture aspherical optical elements Precision measurement platform Z axis counter weight device, relates to three coordinate measuring machine.If connect support plate, guide rail, slide block, Z axis moving parts, gauge head, bracing wire, measurement components, spill slide rail, balance weight assembly and control circuit, guide rail is located at and is connected on the left of support plate, Z axis moving parts is connected with slide block, gauge head is located on Z axis moving parts, be connected through the first bracing wire between Z axis moving parts with measurement components lower end, measurement components is positioned at and connects on the left of support plate, measurement components establishes housing, cell pressure part and piezoelectric sensor, spill slide rail is located at and is connected support plate upper end, balance weight assembly establishes magnetic flow liquid container, magnetic flow liquid and mass, magnetic flow liquid container is placed in and connects on the right side of support plate, magnetic flow liquid is contained in magnetic flow liquid container, mass immerses in magnetic flow liquid, mass upper end second bracing wire is connected with the housing upper end of measurement components, second bracing wire and spill slide rail are slidably matched, control circuit establishes chromacoder and electrode.
Description
Technical field
The present invention relates to three coordinate measuring machine, especially relate to a kind of aperture aspherical optical elements Precision measurement platform Z axis counter weight device.
Background technology
In three coordinate measuring machine, Z axis is often fixed on vertical direction.For avoiding Z axis moving component to break gauge head because falling voluntarily, steadily light when ensureing that moving component moves up and down simultaneously, reliably stablize during stopping, Z-axis mechanism design needs to add identical with moving component weight, an oppositely contrary balance device.In the design of balance device, must ensure that Z axis moving component is when any working position, the size and Orientation of equilibrant should remain constant (1, Zhang Guoxiong. three coordinate measuring machine [M], publishing house of University Of Tianjin, 1999,71-76).
Three coordinate measuring machine is in measuring process, owing to changing dissimilar measurement mechanism or detection platform, operationally Z axis moving parts need the to move up and down inconsistent steel wire two ends counterweight that causes of acceleration that produces is uneven, make linear electric motors power down on Z axis moving parts, have impact on measurement efficiency and the precision of three coordinate measuring machine.In order to ensure to detect stability and precision, need Real-time Balancing to act on the pulling force at steel wire two ends, thus reduce to be carried in the power on the dull and stereotyped linear electric motors of Z axis, prevent the appearance of power-down conditions.
Magnetic flow liquid is the suspended matter mixed by high magnetic permeability, low hysteresis small soft magnetic particles and non-magnetic liquid, belongs to controlled fluid.Magnetic flow liquid presents low viscous Newtonian fluid characteristic under zero magnetic field condition; When externally-applied magnetic field, there is the suspending liquid of mobility originally by " solidification "---namely fluid viscosity changes instantaneously, and when magnetic field is large time, viscosity is large, and time magnetic field is little, viscosity is little.This character changes and can realize between millisecond, and is reversible, can be applicable to three coordinate measuring machine, realizes self-adaptation counterweight.
Have not yet to see the aperture aspherical optical elements Precision measurement platform Z axis counter weight device about utilizing magnetic flow liquid to regulate and control to realize self-adaptation counterweight.
Summary of the invention
The object of this invention is to provide one and be mainly used in three coordinate measuring machine, when Z axis moving-member is in any working position, Z axis counterweight adaptive equalization can be realized, prevent linear electric motors power down on Z axis moving parts, ensure the aperture aspherical optical elements Precision measurement platform Z axis counter weight device detecting stability and precision.
The present invention is provided with and connects support plate, guide rail, slide block, Z axis moving parts, gauge head, the first bracing wire, measurement components, spill slide rail, balance weight assembly, the second bracing wire and control circuit;
Guide rail is located at and is connected on the left of support plate, slide block coordinates with slide, Z axis moving parts is connected with slide block, gauge head is located on Z axis moving parts, be connected by the first bracing wire between Z axis moving parts with measurement components lower end, measurement components is positioned at and connects on the left of support plate, measurement components comprises housing, cell pressure part and piezoelectric sensor, cell pressure part and piezoelectric sensor are all located in housing, cell pressure part exposes housing and coordinates with housing activity, the pressure head of cell pressure part is pressed on piezoelectric sensor, spill slide rail is located at and is connected support plate upper end, balance weight assembly comprises magnetic flow liquid container, magnetic flow liquid and mass, magnetic flow liquid container is placed in and connects on the right side of support plate, magnetic flow liquid is contained in magnetic flow liquid container, mass immerses in magnetic flow liquid, mass upper end is connected with the housing upper end of measurement components by the second bracing wire, second bracing wire and spill slide rail are slidably matched, control circuit comprises chromacoder and electrode, chromacoder input end is electrically connected with piezoelectric sensor, chromacoder output terminal is electrically connected with electrode, electrode is located at upper and lower two ends in magnetic flow liquid container.
Described first bracing wire and the second bracing wire are preferably steel wire.
Described chromacoder can comprise A/D converter, single-chip microcomputer, D/A converter and power amplifier; A/D converter input termination piezoelectric sensor output terminal, A/D converter output terminal connects single-chip microcomputer input end, and single-chip microcomputer exports termination D/A converter input end, and D/A converter exports termination power amplifier input, power amplifier output receiving electrode.
Compared with the prior art, beneficial effect of the present invention is as follows:
During use, aperture aspherical optical elements Precision measurement platform Z axis is in vertical direction, Z axis moving parts is connected with mass by steel wire, add a reverse equilibrant identical with Z axis motion platform weight, steadily light when ensureing that parts move up and down, reliably stablize during stopping, avoiding main shaft to fall voluntarily and break gauge head.Steel wire slides in concave tracks.Owing to changing dissimilar measurement mechanism or detection platform, operationally Z axis moving parts need the to move up and down inconsistent steel wire two ends counterweight that causes of acceleration that produces is uneven, make linear electric motors power down on Z axis moving parts, use the stable mass of gravity can not realize the self-adaptative adjustment changed steel wire Z axis moving parts end power, cause acting on the power instability on the dull and stereotyped linear electric motors of detection platform Z axis, cause motor power down, efficiency and precision are measured in impact.For this problem, the present invention propose for aperture aspherical optical elements Precision measurement platform Z axis counter weight device, can meet Z axis moving-member when any working position, the power acted on the dull and stereotyped linear electric motors of Z axis is constant, ensures the easy motion of detection platform not power down and Z axis.The present invention comprises sensor and detects, Real-time Feedback, mass controls three partial functions, according to the measuring-signal being connected to piezoelectric sensor between the first and second steel wires, measuring-signal is through the voltage signal required for chromacoder output electrode, magnetic field size is changed by regulation voltage size, real-time adjustment magnetic flow liquid is to the viscosity of mass in magnetic flow liquid, utilize magnetic flow liquid different to the viscosity of mass in different magnetic field, change the stressing conditions of mass in magnetic flow liquid, thus change mass to the acting force of steel wire according to equilibrium of forces, balance Z axis moving parts is due to the power change of mass change and the indefinite generation of motion brief acceleration, thus to reach the power of control action on the dull and stereotyped linear electric motors of Z axis be constant force, ensure the easy motion of detection platform not power down and Z axis.
Accompanying drawing explanation
Fig. 1 is the surface structure schematic diagram of the embodiment of the present invention.
Fig. 2 is the measurement components structural representation of the embodiment of the present invention.
Fig. 3 is the weighted member structures schematic diagram of the embodiment of the present invention.
Fig. 4 is the circuit block diagram of the piezoelectric sensor of the embodiment of the present invention, chromacoder and electrode.
Mark in Fig. 1 ~ 4 represents:
1-guide rail; 2-gauge head; 3-Z axle moving parts; 4-slide block; 5-screw; 6-first steel wire; 7-cell pressure part; 8-housing; 9-second steel wire; 10-spill slide rail; 11-chromacoder; 12-magnetic flow liquid container cover; 13-magnetic flow liquid container; 14-connects support plate; 15-piezoelectric sensor; 16-measuring piece lid; 17-battery lead plate; 18-magnetic flow liquid; 19-mass; 20-A/D converter; 21-single-chip microcomputer; 22-D/A converter; 23-power amplifier.
Embodiment
See Fig. 1 ~ 3, the present embodiment is provided with and connects support plate 14, guide rail 1, slide block 4, Z axis moving parts 3, gauge head 2, first steel wire 6, measurement components, spill slide rail 10, balance weight assembly, the second steel wire 9 and control circuit.
Guide rail 1 is located at and is connected on the left of support plate 14, slide block 4 and guide rail 1 are slidably matched, Z axis moving parts 3 is connected with slide block 4, gauge head 2 is located on Z axis moving parts 3, be connected by the first steel wire 6 between Z axis moving parts 3 with measurement components lower end, measurement components is positioned at and connects on the left of support plate 14, measurement components comprises housing 8, cell pressure part 7 and piezoelectric sensor 15, cell pressure part 7 and piezoelectric sensor 15 are all located in housing 8, cell pressure part 7 exposes housing 8 and coordinates with housing 8 is up and down, the pressure head of cell pressure part 7 is pressed on piezoelectric sensor 15, spill slide rail 10 is located at and is connected support plate 14 upper end, balance weight assembly comprises magnetic flow liquid container 13, magnetic flow liquid 18 and mass 19, magnetic flow liquid container 13 is located at and is connected on the right side of support plate 14, magnetic flow liquid 18 is contained in magnetic flow liquid container 13, mass 19 immerses in magnetic flow liquid 18, mass 19 upper end is connected with housing 8 upper end of measurement components by the second steel wire 9, second steel wire 9 is slidably matched with spill slide rail 10, control circuit comprises chromacoder 11 and electrode 17, chromacoder 11 input end is electrically connected with piezoelectric sensor 15, chromacoder 11 output terminal is electrically connected with electrode 17, electrode 17 is located at upper and lower two ends in magnetic flow liquid container 13.
See Fig. 4, described chromacoder 11 comprises A/D converter 20, single-chip microcomputer 21, D/A converter 22 and power amplifier 23; A/D converter 20 inputs termination piezoelectric sensor 15 output terminal, A/D converter 20 output terminal connects single-chip microcomputer 21 input end, single-chip microcomputer 21 exports termination D/A converter 22 input end, and D/A converter 22 exports termination power amplifier 23 input end, power amplifier 23 output terminal receiving electrode 17.Mark 5 in Fig. 1 is screw, and mark 12 is magnetic flow liquid container cover.
The gauge head 2 of aperture aspherical optical elements Precision measurement platform Z axis self-adaptation counter weight device is contained on Z axis moving parts 3, and the first steel wire 6 two ends connect Z axis moving parts 3 and cell pressure parts 15 respectively, second steel wire 9 two ends connect the mass 19 of measuring piece lid 16 and magnetic flow liquid container 13 inside respectively, cell pressure part 7 acts on piezoelectric sensor 15, mass 19 is immersed in magnetic flow liquid 18, electrode 17 is installed on the two ends up and down of magnetic flow liquid container 13, second steel wire 9 slides in spill slide rail 10, ensures that the second steel wire 9 slides more steady, in indefinite or Z axis moving parts 3 motion process of gauge head 2 quality on Z axis moving parts 3, acceleration of motion changes the change causing the first steel wire 6 acting force, acting force change easily makes to act on power on Z axis exercise stress linear electric motors and goes beyond the scope, cause motor power down, affect accuracy of detection, apparatus of the present invention are by the force signals of piezoelectric sensor 15 Real-time Collection Z axis moving parts, by chromacoder 11, force signals is converted to voltage signal V, real-time regulation output signal control electrode both end voltage V, thus control the magnetic field at battery lead plate 17 two ends in magnetic flow liquid container 13, magnetic fields is in magnetic flow liquid 18, low viscous Newtonian fluid characteristic is presented under zero magnetic field condition, when magnetic field is large time, viscosity is large, time magnetic field is little, viscosity is little, utilize magnetic flow liquid 18 different to the viscosity of mass 19 in different magnetic field, change the stressing conditions of mass 19 in magnetic flow liquid 18, thus change mass 19 to the acting force of the second steel wire 9 according to equilibrium of forces, balance Z axis moving parts 3 is due to the power change of mass change and the indefinite generation of motion brief acceleration, ensure that the power of final control action on Z axis exercise stress linear electric motors is constant force.Sensor is piezoelectric transducer 15, by chromacoder 11(as shown in Figure 4), wherein piezoelectric sensor 15 exports as voltage signal V, digital signal is converted into through A/D converter 20 process, be input to single-chip microcomputer 21, simultaneously single-chip microcomputer 21 exports with being the output digit signals of specific function relation with input signal, through D/A converter 22, output signal is converted into analog voltage signal, operational amplifier 23 exports analog voltage signal V to battery lead plate 17.Chromacoder 11 is fixed on above web joint 14; The relationship between quality of mass 19 and Z axis moving parts 3 and gauge head 2 need consider buoyancy under zero magnetic field of friction between guide rail and slide block, magnetic flow liquid and the force of sliding friction of the second steel wire 9 on spill slide rail 10, steel wire movement on spill slideway 10 can ensure that steel wire is steadily stressed, improves and measures accuracy of detection; The character of magnetic flow liquid 18 changes and can realize between millisecond, and be reversible, namely this instantaneity and reversibility are applied to aperture aspherical optical elements Precision measurement platform Z axis self-adaptation counter weight device, realize no matter aperture aspherical optical elements Precision measurement platform Z axis moving-member is when any working position, real-time change mass 19 acts on the power on the second steel wire 9, thus ensure that the power on the dull and stereotyped linear electric motors of Z axis is constant force, reach the adaptive equalization in aperture aspherical optical elements Precision measurement platform Z axis counter weight device.
Claims (3)
1. an aperture aspherical optical elements Precision measurement platform Z axis counter weight device, comprise Z axis moving parts, guide rail, slide block, measurement components and gauge head, slide block coordinates with slide; It is characterized in that, also comprise and connect support plate, the first bracing wire, spill slide rail, balance weight assembly, the second bracing wire and control circuit;
Guide rail is located at and is connected on the left of support plate, Z axis moving parts is connected with slide block, gauge head is located on Z axis moving parts, be connected by the first bracing wire between Z axis moving parts with measurement components lower end, measurement components is positioned at and connects on the left of support plate, measurement components comprises housing, cell pressure part and piezoelectric sensor, cell pressure part and piezoelectric sensor are all located in housing, cell pressure part exposes housing and coordinates with housing activity, the pressure head of cell pressure part is pressed on piezoelectric sensor, spill slide rail is located at and is connected support plate upper end, balance weight assembly comprises magnetic flow liquid container, magnetic flow liquid and mass, magnetic flow liquid container is placed in and connects on the right side of support plate, magnetic flow liquid is contained in magnetic flow liquid container, mass immerses in magnetic flow liquid, mass upper end is connected with the housing upper end of measurement components by the second bracing wire, second bracing wire and spill slide rail are slidably matched, control circuit comprises chromacoder and electrode, chromacoder input end is electrically connected with piezoelectric sensor, chromacoder output terminal is electrically connected with electrode, electrode is located at upper and lower two ends in magnetic flow liquid container.
2. a kind of aperture aspherical optical elements Precision measurement platform Z axis counter weight device as claimed in claim 1, it is characterized in that, described first bracing wire and the second bracing wire are steel wire.
3. a kind of aperture aspherical optical elements Precision measurement platform Z axis counter weight device as claimed in claim 1, it is characterized in that, described chromacoder comprises A/D converter, single-chip microcomputer, D/A converter and power amplifier; A/D converter input termination piezoelectric sensor output terminal, A/D converter output terminal connects single-chip microcomputer input end, and single-chip microcomputer exports termination D/A converter input end, and D/A converter exports termination power amplifier input, power amplifier output receiving electrode.
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| CN201310365963.7A CN103398686B (en) | 2013-08-20 | 2013-08-20 | A kind of aperture aspherical optical elements Precision measurement platform Z axis counter weight device |
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| CN201310365963.7A CN103398686B (en) | 2013-08-20 | 2013-08-20 | A kind of aperture aspherical optical elements Precision measurement platform Z axis counter weight device |
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| CN103398686B true CN103398686B (en) | 2015-12-23 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107543511A (en) * | 2016-06-29 | 2018-01-05 | 大族激光科技产业集团股份有限公司 | The flatness detecting system and its method of a kind of PCB equipment workbench |
| CN107491094B (en) * | 2017-07-04 | 2020-11-24 | 博众精工科技股份有限公司 | Method for precisely balancing Z-axis weight in real time |
| IT201900006274A1 (en) * | 2019-04-23 | 2020-10-23 | Nuovo Pignone Tecnologie Srl | Arrangement with sensor and method for measuring fouling or erosion or corrosion as well as machine monitoring fouling or erosion or corrosion |
| CN111324089A (en) * | 2020-03-04 | 2020-06-23 | 河源市凯航自动化科技有限公司 | Numerical control program converter of three-coordinate measuring machine |
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| CN85200790U (en) * | 1985-04-01 | 1985-12-20 | 詹泉耿 | Verticality metrical instrument,moving in three dimension |
| CN101769731A (en) * | 2010-01-26 | 2010-07-07 | 浙江大学 | Gravity balance device and method of flexible coordinate measuring machine based on magnetic rheologic fluid |
| CN102322812A (en) * | 2011-08-30 | 2012-01-18 | 合肥工业大学 | Small-Abbe-error three-dimensional measurement system |
| CN202501835U (en) * | 2012-03-16 | 2012-10-24 | 成都飞机设计研究所 | Vertical type linear displacement sensor scaling/calibrating device |
| CN103195858A (en) * | 2013-04-15 | 2013-07-10 | 沈阳航空航天大学 | Magnetorheological buffering unit structure based on impact load and control method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101204007B1 (en) * | 2009-04-17 | 2012-11-23 | 에스앤티모티브 주식회사 | Angular Displacement Sensor Using Magnetorheological Fluid And Displacement Sensing Apparatus Including The Same |
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2013
- 2013-08-20 CN CN201310365963.7A patent/CN103398686B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85200790U (en) * | 1985-04-01 | 1985-12-20 | 詹泉耿 | Verticality metrical instrument,moving in three dimension |
| CN101769731A (en) * | 2010-01-26 | 2010-07-07 | 浙江大学 | Gravity balance device and method of flexible coordinate measuring machine based on magnetic rheologic fluid |
| CN102322812A (en) * | 2011-08-30 | 2012-01-18 | 合肥工业大学 | Small-Abbe-error three-dimensional measurement system |
| CN202501835U (en) * | 2012-03-16 | 2012-10-24 | 成都飞机设计研究所 | Vertical type linear displacement sensor scaling/calibrating device |
| CN103195858A (en) * | 2013-04-15 | 2013-07-10 | 沈阳航空航天大学 | Magnetorheological buffering unit structure based on impact load and control method thereof |
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