CN103370553A - Bearing arrangement for rapidly rotating shafts of vacuum pumps - Google Patents

Bearing arrangement for rapidly rotating shafts of vacuum pumps Download PDF

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Publication number
CN103370553A
CN103370553A CN2012800093202A CN201280009320A CN103370553A CN 103370553 A CN103370553 A CN 103370553A CN 2012800093202 A CN2012800093202 A CN 2012800093202A CN 201280009320 A CN201280009320 A CN 201280009320A CN 103370553 A CN103370553 A CN 103370553A
Authority
CN
China
Prior art keywords
bearing
holding member
outer race
pump case
abutment face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012800093202A
Other languages
Chinese (zh)
Inventor
汉斯·维绍特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of CN103370553A publication Critical patent/CN103370553A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/06Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
    • F16C27/066Ball or roller bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/05Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056Bearings
    • F04D29/059Roller bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/66Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/04Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
    • F16C35/06Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
    • F16C35/07Fixing them on the shaft or housing with interposition of an element
    • F16C35/077Fixing them on the shaft or housing with interposition of an element between housing and outer race ring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00Engines or pumps
    • F16C2360/44Centrifugal pumps
    • F16C2360/45Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rolling Contact Bearings (AREA)
  • Support Of The Bearing (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Mounting Of Bearings Or Others (AREA)

Abstract

Bearing arrangement for rapidly rotating shafts of vacuum pumps, in particular turbomolecular pumps, having two bearing elements (12) which mount the shaft (10). At least one of the two bearing elements (12) has a bearing (16) having a bearing outer ring (20) which surrounds the rolling bodies (22). A damping element (32) is arranged between a pump housing (14) and the bearing outer ring (20). Furthermore, a holding element (28) which fixes the at least one damping element (32) is connected to the pump housing (14).

Description

The bearing means of axle that is used for the quick rotation of vacuum pump
Technical field
The present invention relates to a kind of for vacuum pump, the bearing means of the axle of the quick rotation of turbomolecular pump especially.In addition, the present invention relates to a kind of the have vacuum pump of corresponding bearing means, macromolecule vacuum pump especially.
Background technique
Pump shaft, such as the supporting of the rotor shaft of turbomolecular pump usually via rolling bearing, especially ball bearing is realized in pump case.For being known that between outer race and pump case, at least one the radially damping in two pump bearing spares is provided with damping member.Be typically provided with one or two damping ring of the cross section with rectangle as damping member.Especially, because the tolerance of the hardness of the fluctuation of damping ring and fluctuation can be created in the contact between the outer shroud of pump case and bearing.This causes damage of bearings.Because the outer shroud of bearing is pushing through at damping ring when mounted in the radial direction, can cause in addition the oblique position of outer shroud.Described oblique position also causes the damage of bearing.Be applied in hardness and tolerance aspect have high-quality damping ring and/or application have other for example the damping ring of the cross section of pincushion will be expensive.
Summary of the invention
The objective of the invention is, a kind of pump bearing spare is provided, wherein reduce the risk of damage of bearings and/or improve installability.
According to the present invention, the solution of described purpose is by a kind of according to claim 1 for vacuum pump, the especially bearing means realization of the axle of the quick rotation of turbomolecular pump.
The bearing element that has two supporting axles according to the bearing means of axle of the quick rotation for the supporting vacuum pump of the present invention.In two bearing elements at least one constitutes rolling bearing and has the outer race that surrounds rolling element.The second bearing can constitute rolling bearing equally, or for example also constitutes magnetic bearing.
Be supported with therein between the outer shroud of the pump case of axle of pump and bearing and be provided with at least one damping member.Preferably, damping member consists of circlewise, and surrounds outer race.Particularly preferably be the set-up mode that two or more damping members that consist of equally circlewise are arranged side by side in the axial direction.Particularly preferably be, at least one, preferably all damping members have cross section rectangle, especially foursquare.According to the present invention, the fixing holding member via being connected with pump case of at least one damping member is realized.This has the significant advantage according to the present invention: simplified installation.
Especially possible is, after bearing is installed holding member is set, wherein preferably realizes the distortion radially of at least one damping member by the installation holding member.Because the distortion radially of at least one damping member keeps the radial force of outer race to be applied on the outer race.By arrange can be after bearing be installed the holding member of installation possible be to determine the size of at least one damping member, so that outer race can be encased in the pump case in the situation that does not have large energy consumption.This advantage that has is, do not have when mounted axial force or only a small amount of responsive to axial force at least one damping member.Thus, also especially reduce outer race with respect to the longitudinal axis of axle or the danger of tilting with respect to the longitudinal axis of the bearing inner ring that is provided with in case of necessity.Possible is to cause the distortion of the restriction of at least one damping member by holding member, so that the responsive to axial force that limits is to outer race in addition.Thus, especially can compensate the tolerance of the material behavior of damping member at least and/or fluctuation and then reduce the risk of damage of bearings.
In the preferred improvement project of at least one in two bearing elements of bearing means, pump case has abutment face.At this, abutment face is set to, so that at least one damping member especially on the axial direction of axle, is arranged between holding member and the abutment face.Therefore, in preferred form of implementation, abutment face is axial abutment face, namely can transmit or bear the abutment face of the axial force that is relevant to the axle longitudinal axis.
Preferably, abutment face is formed in the pump case by especially annular depressed part.At this, depressed part is preferably outwardly open, so that can be inserted into the depressed part from the outside in simple mode at least one damping member is installed.Then, depressed part can seal in the axial direction by holding member.
In another preferred improvement project of the present invention, holding member has the especially bump of annular.The bump of described annular preferably extends basically in the axial direction, so that the bump of described annular extend in the depressed part in the mounted state of holding member.At this, in preferred improvement project, at least one, the damping member of structure is arranged between the abutment face of the bump of holding member and pump case especially circlewise.The bump of the especially annular of holding member can be used for holding member is felt relieved in pump case simultaneously.Holding member for example is fixed on the pump case realizes by the bolt that especially axially arranges.
In order to improve the heat radiation from rolling bearing, preferably at outer race and holding member, especially be provided with cavity between the bump of holding member, described cavity preferably is filled with the medium of transferring heat, the oiling agent of transferring heat especially.
In another particularly preferred form of implementation of the present invention, holding member additionally is used for the rigid bearing outer shroud.To this, holding member preferably has the protuberance that radially points to axle.Holding member, especially the protuberance of holding member has axial abutment face, indirectly or directly abuts on the described axial abutment face at installment state middle (center) bearing outer shroud.Preferably, at this, additionally between outer race and holding member, be provided with axial damping member for axial damping.Described axial damping member is posted by the axial outside of outer race and is posted by the protuberance of holding member in particularly preferred form of implementation axial abutment face.
As long as rolling bearing additionally has bearing inner ring, described bearing inner ring preferably is fixed on the axle.This can realize thus, and bearing inner ring presses to the shaft shoulder in the axial direction via fixed element.In case of necessity, also can abandon bearing inner ring, wherein the working surface that usually consists of by bearing inner ring of rolling element directly forms by the outside of axle.
The second bearing element of the axle of supporting vacuum pump for example can constitute magnetic bearing.Preferably, described rolling bearing has outer race, and described outer race is supported by at least one with being arranged on damping member damping between pump case and the outer race.At this, at least one damping member is fixed via corresponding holding member again.Described bearing also can advantageously be improved as mentioned with setting forth.
In addition, the present invention relates to a kind of vacuum pump, especially have the turbomolecular pump of the rotor element that is carried by bearing.Have a plurality of independent discoidal rotor element that comprise respectively a plurality of rotor blades at turbomolecular pump rotor element.Between described independent discoidal rotor element, be provided with the vaned stator component of same tool.Axle is supported in the pump case of surrounding rotor element, and wherein bearing means consists of as indicated abovely according to the present invention.
Description of drawings
Below, elaborate with reference to the accompanying drawings the present invention by means of preferred form of implementation.
Accompanying drawing illustrates one half-sectional view in two bearing meanss.
Embodiment
Vacuum pump has axle 10, and described bearing carries unshowned rotor element.Axle 10 wherein schematically shows clutch shaft bearing element 12 in the accompanying drawings by two bearing element supportings.Especially the bearing element of the other end of supporting axle 10 preferably can consist of corresponding to bearing element 12.By two bearing elements, axle 10 is bearing in the pump case 14.Bearing element 12 has with interior ring 18, outer shroud 20 and is arranged on the bearing 16 of the rolling element 22 between two bearer rings 18,20.Interior ring 18 is fixed on the axle 10 by means of fixed element 24, interior ring 18 is pressed against the convex shoulder 26 of axle 10 in described fixed element.Fixed element 24 for example is pressed on the bearer ring 18 indirectly or directly by the rotor fixing part that is connected with axle.
The fixing of outer race 20 realized via holding member 28.Especially the holding member 28 that constitutes ring cover is connected with pump case 14 via the bolt 30 that schematically shows.
Especially for outer race 20 is radially carried out damping, in the illustrated embodiment, be provided with two damping members 32.In the illustrated embodiment, two damping members 32 consist of circlewise and surround outer race 20 fully.In the illustrated embodiment, the damping member that consists of in the same manner has basically foursquare cross section.
For by means of holding member 28 fixing damping member 32 axially, pump case has abutment face 34.In the illustrated embodiment, abutment face 34 consists of by the depressed part 36 that is arranged in the pump case 14.Abutment face 34 consists of circlewise, and surrounds axle 10.Abutment face 34 is basically radially directed.
Holding member 28 with longitudinal axis 38 Rotational Symmetry ground formation has annular bump 40 in the illustrated embodiment, and described bump extend in the depressed part 36.Bump 40 presses to two damping members 32 in the illustrated embodiment in the axial direction.Therefore, by being installed, holding member 28 realizes damping member 32 is pressed together in the axial direction.This causes that damping member is in the radial direction distortion.Thus, realize radially rigid bearing outer shroud 20.Because just cause the distortion of damping member by holding member 28 is installed, thus the installation of bearing simplified, because between the inboard of the outside of outer race 20 and damping member 32, only have low the friction.
In addition, holding member 28 has protuberance 42, and it is radially inside again that described protuberance is relevant to bump 40, namely arranges in the direction towards axle 10.Protuberance 42 preferably consists of equally circlewise.Consist of the axial abutment face 44 of pointing to outer race 20 by protuberance 42.Between the axial abutment face 44 of the distolateral and protuberance 42 of outer race 20, be provided with axial damping member 46.Therefore, by the described preferred form of implementation of holding member 28, not only realize the fixing of two damping members 32 and distortion, but also realize in the axial direction fixing of outer race 20.In case of necessity, also can realize thus the axial tensioning of bearing.
For heat is discharged, between the bump 40 of outer race 20 and holding member 28, be provided with cavity 48 from bearing 16.Described cavity is filled with the medium of heat conduction, the fat of for example heat conduction.

Claims (14)

1. one kind is used for vacuum pump, the bearing means of the axle of the quick rotation of turbomolecular pump especially, and described bearing means has
The bearing element (12) of two described axles of supporting (10), at least one in wherein said two bearing elements (12) has:
With the bearing (16) of the outer race (20) that surrounds rolling element (22),
At least one is arranged on the damping member (32) between pump case (14) and the described outer race (20), and
The holding member (28) of described at least one damping member (32) that be connected with described pump case (14), fixing.
2. bearing means according to claim 1 is characterized in that, described pump case (14) has abutment face (34), so that described at least one damping member (32) is arranged between described holding member (28) and the described abutment face (34).
3. bearing means according to claim 2 is characterized in that, described abutment face (34) is formed in the described pump case (14) by especially annular depressed part (36).
4. bearing means according to claim 3 is characterized in that, described holding member (28) has the bump (40) that consists of especially circlewise, extend in the described depressed part (36) at bump described in the mounted state.
5. bearing means according to claim 4, it is characterized in that, described at least one damping member (32) that consists of especially circlewise is arranged between the described abutment face (34) of the described bump (40) of described holding member (28) and described pump case (14).
6. according to claim 4 or 5 described bearing meanss, it is characterized in that, consisting of between described outer race (20) and described bump (40) has the medium that preferably is filled with transferring heat, the cavity (48) that consists of especially circlewise.
7. according to claim 1 to one of 6 described bearing meanss, it is characterized in that, described holding member (28) is additionally fixed described outer race (20).
8. bearing means according to claim 7 is characterized in that, described holding member (28) has the protuberance (42) that radially points to described axle (10) to be used for fixing described outer race (20).
9. according to claim 7 or 8 described bearing meanss, it is characterized in that, the especially described protuberance of described holding member (28) (42) has axial abutment face (44), indirectly or directly abuts on the described axial abutment face at outer race described in the mounted state (20).
10. according to claim 7 to one of 9 described bearing meanss, it is characterized in that, between described outer race (20) and the especially described protuberance of described holding member (28) (42), be provided with axial damping member (46).
11. to one of 10 described bearing meanss, it is characterized in that according to claim 1, described bearing (16) has the bearing inner ring (18) that is fixed on the described axle (10).
12. according to claim 1 to one of 11 described bearing meanss, it is characterized in that, described the second bearing element has: with the bearing (16) of the outer race (20) that surrounds rolling element (22), at least one is arranged on damping member (32) between pump case (14) and the described outer race (20) and the holding member (28) of fixing described at least one damping member (32) that is connected with described pump case (14).
13. bearing means according to claim 12 is characterized in that, at least one in 11 improved the second bearing element according to claim 2.
14. a vacuum pump, turbomolecular pump especially, described vacuum pump have the carrying rotor element axle (10), surround the pump case (14) of described rotor element and two according to claim 1 to one of 13 described bearing meanss (12).
CN2012800093202A 2011-02-16 2012-02-09 Bearing arrangement for rapidly rotating shafts of vacuum pumps Pending CN103370553A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE202011002794.5 2011-02-16
DE202011002794U DE202011002794U1 (en) 2011-02-16 2011-02-16 Bearing arrangement for fast rotating shafts of vacuum pumps
PCT/EP2012/052164 WO2012110384A1 (en) 2011-02-16 2012-02-09 Bearing arrangement for rapidly rotating shafts of vacuum pumps

Publications (1)

Publication Number Publication Date
CN103370553A true CN103370553A (en) 2013-10-23

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2012800093202A Pending CN103370553A (en) 2011-02-16 2012-02-09 Bearing arrangement for rapidly rotating shafts of vacuum pumps

Country Status (5)

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EP (1) EP2676043A1 (en)
JP (1) JP2014506981A (en)
CN (1) CN103370553A (en)
DE (1) DE202011002794U1 (en)
WO (1) WO2012110384A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105257696A (en) * 2014-07-11 2016-01-20 罗伯特·博世有限公司 Main shaft support device with support device and laterally movable rotary bearing
CN114423943A (en) * 2019-09-19 2022-04-29 大陆-特韦斯贸易合伙股份公司及两合公司 Motor-driven assembly for vehicle
EP4215769A1 (en) * 2022-01-21 2023-07-26 Siemens Aktiengesellschaft Bearing element, machine and method for controlling a bearing element

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014204608A1 (en) * 2014-03-12 2015-09-17 BSH Hausgeräte GmbH vacuum cleaner fan
JP6772721B2 (en) * 2015-10-23 2020-10-21 株式会社島津製作所 Vacuum pump
JP7327132B2 (en) * 2019-12-06 2023-08-16 株式会社島津製作所 Vacuum pump

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DE102007037792A1 (en) * 2007-08-10 2009-02-12 Oerlikon Leybold Vacuum Gmbh Pump bearing assembly
CN101595307A (en) * 2007-01-29 2009-12-02 爱德华兹有限公司 Vacuum pump

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Publication number Priority date Publication date Assignee Title
CN105257696A (en) * 2014-07-11 2016-01-20 罗伯特·博世有限公司 Main shaft support device with support device and laterally movable rotary bearing
CN105257696B (en) * 2014-07-11 2020-03-06 罗伯特·博世有限公司 Spindle bearing with a support device and a laterally displaceable pivot bearing
CN114423943A (en) * 2019-09-19 2022-04-29 大陆-特韦斯贸易合伙股份公司及两合公司 Motor-driven assembly for vehicle
CN114423943B (en) * 2019-09-19 2023-09-19 大陆汽车科技有限公司 Motor-driven assembly for a vehicle
EP4215769A1 (en) * 2022-01-21 2023-07-26 Siemens Aktiengesellschaft Bearing element, machine and method for controlling a bearing element

Also Published As

Publication number Publication date
WO2012110384A1 (en) 2012-08-23
DE202011002794U1 (en) 2012-06-06
JP2014506981A (en) 2014-03-20
EP2676043A1 (en) 2013-12-25

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Address after: Cologne, Germany

Applicant after: LEYBOLD Co. Ltd.

Address before: Cologne, Germany

Applicant before: Oerlikon Leybold Vacuum GmbH

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Application publication date: 20131023