CN103364872A - Composite waveguide device capable of realizing light blocking effect - Google Patents

Composite waveguide device capable of realizing light blocking effect Download PDF

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CN103364872A
CN103364872A CN2013103394937A CN201310339493A CN103364872A CN 103364872 A CN103364872 A CN 103364872A CN 2013103394937 A CN2013103394937 A CN 2013103394937A CN 201310339493 A CN201310339493 A CN 201310339493A CN 103364872 A CN103364872 A CN 103364872A
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waveguide
ion
film
composite
exchange
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CN103364872B (en
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陈抱雪
李家韡
周建忠
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Abstract

The invention discloses a composite waveguide device capable of realizing a light blocking effect and a preparation method. The composite waveguide device capable of realizing the light blocking effect comprises a glass substrate and ion exchange strip waveguides with variable thicknesses and gradually-changed refractive indexes are prepared on the upper surface layer of the glass substrate by adopting a selective secondary ion exchange technique; the ion exchange strip waveguides comprise an input waveguide, a composite waveguide and an output waveguide from left to right in sequence; the composite waveguide is a multi-mode strip waveguide of optical waves with the wave length of 632.8nm formed by a stopping waveguide and an As2S8 thin film located at a windowing region of a metal Al film; the input waveguide and the output waveguide are mutually communicated and connected through the stopping waveguide; the input waveguide and the output waveguide are ion exchange single-mode strip waveguides of the optical waves with the wave length of 632.8nm; the stopping waveguide stops the optical waves with the wave length of 632.8nm. The composite waveguide device capable of realizing the light blocking effect disclosed by the invention can effectively realize the light blocking effect and can also realize good butt joint with an optical fiber.

Description

A kind of composite waveguide device of realizing light blocking effect
Technical field
The present invention relates to a kind of composite waveguide device of realizing light blocking effect, belong to integrated optics and optical waveguide technique field.
Background technology
The arsenones amorphous semiconductor has the good transparency in infrared band territory, and optical non-linear effect exceeds two orders of magnitude than quartz glass, therefore receives publicity as a kind of long wavelength's nonlinear optical medium.As wherein 2S 3The average coordination number of amorphous semiconductor is very near critical coordination number, and structure and chemical property are more stable, at As 2S 3Realize on the glass optical fiber that the work such as optical kerr effect switch and optical nonlinearity loop catoptron have been reported (Bureau B etc.: J. Non-Cryst. Solids., Vol.345﹠amp; 346, p.276,2004; Hocde S etc.: J. Non-Cryst. Solids., Vol.274, p.17,2000; Nishii J etc.: J. Non-Cryst. Solids., Vol.140, p.199,1992; Asobe M etc.: J. Appl. Phys., Vol.77, p.5518,1995; Troles J etc.: Opt. Mater., Vol.25, p.231,2004; Asobe M etc.: Opt. Lett., Vol.18, p.1056,1993; Asobe M etc.: Electron. Lett., Vol.32, p.1396,1996).With As 2S 3Compare As 2S 8The covalent bonds average coordination number of amorphous structure is lower, a kind of underconstrained Flexible glass state semiconductor (Lyubin V M etc.: J Non Crystalline Solids, Vol.135, p.37,1991), the chemical bond defect state concentration that unusual electron configuration consists of is higher, there is several times energy level (P.K.Gupta:J. Non Crystalline Solids in the energy gap, Vol. 195, p.158,1996).Utilize the sublevel electronic transition to the signal Optical Absorption, we have reported at As 2S 8Film and the As for preparing with the light advocate approach 2S 8Realize the disconnected test of photoresistance (L.Zou, B.Chen etc.: Appl. Phy. Lett., Vol. 88, p.153510-1,2006) of light-luminous effect in the bar waveguide, this is As 2S 8Exclusive phenomenon is at As 2S 3In do not observe.As 2S 8The two ends of bar waveguide can consist of practical devices after must solidifying with fiber alignment, and this docking relates to guided wave and the coupling of the end face between the guided wave in the optical fiber in the optical waveguide.The end face coupling efficiency is except relevant with the mould mode field matching of two guided waves, also with the optical axis of two guided waves between space relative orientation relevant, ideal situation requires the optical axis of two guided waves strictly to aim at and keeping parallelism in the space.For this reason, must implement the grinding and polishing of Waveguide end face and fiber end face before the docking.Experiment shows that conventional optical grade abrasive polishing process can not be applicable to As 2S 8, because As 2S 8Not alkaline-resisting, do not cross the pass of multiple working procedure neutral and alkali solution.Because As 2S 8The end face quality of bar waveguide does not pass a test, and the end face coupling efficiency that improves waveguide and optical fiber becomes very difficult.
Summary of the invention
One of purpose of the present invention isIn order to solve As 2S 8The end face of bar waveguide is difficult to grinding and polishing, causes the very low problem of end face coupling efficiency of waveguide and optical fiber, propose and experimental study a kind of composite waveguide device of realizing light blocking effect and preparation method thereof.
Know-why of the present invention
A kind of composite waveguide device of realizing light blocking effect, this device is the coupled structure of composite waveguide and input waveguide and output waveguide.
Described composite waveguide is by chemcor glass cut-off waveguide, metallic spacer and As 2S 8Film laminated consists of, and this composite waveguide excites the multimode transmission, and the mould field distribution mainly concentrates on As 2S 8In the film, thereby can effectively realize light blocking effect;
The input end of composite waveguide and output terminal utilize the coupling of multimode interference principle realization and the waveguide of chemcor glass single mode bar, and composite waveguide becomes with basis set with the waveguide of chemcor glass single mode bar, consist of the composite waveguide device;
Because input waveguide and the output waveguide of composite waveguide device are single chemcor glass single mode bar waveguide, can adopt conventional grinding and polishing technology processing Waveguide end face.This composite waveguide device has reached not only can effectively realize light blocking effect, but also the effect that can well dock with optical fiber.
Technical scheme of the present invention
A kind of composite waveguide device of realizing light blocking effect comprises a glass substrate and the ion-exchange bar waveguide of adopting selectivity secondary ion switching technology to prepare the gradually changed refractive index of variation in thickness at this glass substrate upper epidermis;
The waveguide of described ion-exchange bar from left to right is followed successively by input waveguide, composite waveguide and output waveguide;
Described composite waveguide is the multimode bar waveguide of 632.8nm wavelength light wave, and the waveguide of described multimode bar namely upwards is followed successively by cut-off waveguide and the As that is positioned at the windowed regions of Al metal membrane from the upper epidermis of glass substrate 2S 8Film;
The thickness of the above-mentioned Al metal membrane of windowing is preferably 1.9
Figure 705724DEST_PATH_IMAGE001
M, the As that directly contacts with cut-off waveguide 2S 8The thickness of film is preferably 1.7
Figure 935848DEST_PATH_IMAGE001
M;
The windowed regions of described Al metal membrane is in the middle of Al metal membrane, and corresponding to directly over the cut-off waveguide, on the windowed regions of Al metal membrane, As 2S 8Film directly contacts the length of the windowed regions on the Al metal membrane and the length of Al metal membrane, As with the upper surface of cut-off waveguide 2S 8The length of film is consistent, is preferably 4.17mm;
The width of the windowed regions on the Al metal membrane is 2W, and wherein W is called the half width of windowed regions at technical term;
Described input waveguide and output waveguide connect leading to mutually by the cut-off waveguide in the composite waveguide, and the cut-off waveguide in input waveguide, output waveguide and the composite waveguide has identical width;
As in the described composite waveguide 2S 8The length of film is L 3+ 2(L 1+ L 2), L wherein 1Carry out the length of overlapping region for the windowed regions of described input waveguide or output waveguide and described Al metal membrane, L 2Be the length of the transitional region between described input waveguide or output waveguide and the described cut-off waveguide, L 3Be the length of cut-off waveguide, L wherein 1Be preferably 575
Figure 792946DEST_PATH_IMAGE001
M, L 2Be preferably 0.8
Figure 487232DEST_PATH_IMAGE001
M, L 3Be preferably 3mm; Wherein between input waveguide and the cut-off waveguide and the length between output waveguide and the cut-off waveguide be L 2Transitional region by ion-exchange sideways diffusion self-assembling formation, length L 2Relevant with ion-exchange temperature and time, be about 1
Figure 76477DEST_PATH_IMAGE001
The m magnitude;
Above-mentioned input waveguide and output waveguide are the ion-exchange single mode bar waveguide of 632.8nm wavelength light wave;
Above-mentioned cut-off waveguide ends 632.8nm wavelength light wave, does not support the guided mode transmission of 632.8nm wavelength light wave, and the above-mentioned composite waveguide that cut-off waveguide participates in consisting of is the multimode bar waveguide of 632.8nm wavelength light wave;
The windowed regions of Al metal membrane is corresponding to directly over the cut-off waveguide, at the windowed regions of Al metal membrane, As 2S 8Film directly contacts with the upper surface of cut-off waveguide, and the width of windowed regions is 2W, the length of windowed regions and the length of Al metal membrane, As 2S 8The length of film is consistent, and the width 2W of windowed regions is preferably 5
Figure 121793DEST_PATH_IMAGE001
M;
Described glass substrate is B270 optical glass, BK7 optical glass or K9 optical glass.
Above-mentioned a kind of composite waveguide device of realizing light blocking effect, since the buffer action of Al metal membrane, the As on the Al metal membrane 2S 8Therefore film does not act on optical waveguide, and the composite waveguide in above-mentioned a kind of composite waveguide device of realizing light blocking effect is the waveguide of multimode bar.632.8nm the incident light of wavelength encourages basic mode transmission in input waveguide, excite multimode at the incident end of composite waveguide, through L 1After the multiple-mode interfence transmission of length, pass through L 2The pattern phase adjusted in zone, light wave is coupled to L 3The zone, and optical field distribution mainly concentrates on As 2S 8Transmit in the film.L 3Be designed to input the mirror image distance of light field, because light channel structure is symmetrical, according to principle of reciprocity, light wave is coupled to the output waveguide outgoing after by composite waveguide.
Above-mentioned a kind of every technical parameter of the composite waveguide device of light blocking effect of realizing obtains by optimal design, design considers to adopt ion exchange technique to prepare the glass bar waveguide, selectable glass substrate comprises the optical glass such as B270, BK7 or K9, the present invention preferably adopts the B270 optical glass of SCHOTT company, and ion gun is 0.08%AgNO 3-99.92%NaNO 3Salt-mixture, Ag +Mol ratio be 0.0398%.
Experiment and theoretical analysis confirm, Ag +Mol ratio less than 0.05% the time, coefficient of diffusion
Figure 517002DEST_PATH_IMAGE002
With the surface refractive index increment
Figure 65795DEST_PATH_IMAGE003
By Ag +The approximate constant that mol ratio and ion-exchange temperature T determine, in the time of T=350 ℃,
Figure 879072DEST_PATH_IMAGE004
,
Figure 146105DEST_PATH_IMAGE005
, index distribution can be expressed as:
Figure 79426DEST_PATH_IMAGE006
(1)
Here, x and y are respectively the width of ion-exchange bar waveguide cross-section and the coordinate of the degree of depth;
Figure 748305DEST_PATH_IMAGE007
It is the refractive index of B270 optical glass substrate;
Figure 679352DEST_PATH_IMAGE008
It is the refractive index as the air of top covering;
Figure 168102DEST_PATH_IMAGE009
It is the width that metal mask is windowed;
Figure 170693DEST_PATH_IMAGE010
It is effective diffusion depth;
Figure 631761DEST_PATH_IMAGE011
It is ion-exchange time.
The width 2W that the windowed regions of ion-exchange bar waveguide is got in design is 5
Figure 796027DEST_PATH_IMAGE001
M, ion-exchange time are 60min, effectively diffusion depth d Eff=2.43
Figure 37652DEST_PATH_IMAGE001
M consists of single mode waveguide to the 632.8nm wavelength.
Structural design is got above-mentioned single mode waveguide as input waveguide and output waveguide, and for cut-off waveguide, except ion-exchange time foreshortened to 20min, other parameter was identical with input waveguide and output waveguide, effective diffusion depth d of cut-off waveguide Eff=1.40
Figure 578355DEST_PATH_IMAGE001
M.The thickness of the Al metal membrane of windowing of the upper surface of cut-off waveguide is 1.9
Figure 159509DEST_PATH_IMAGE001
M, complex index of refraction is 1.2-i7.0(
Figure 760255DEST_PATH_IMAGE012
=632.8nm).Cover As on the cut-off waveguide He on the Al metal membrane 2S 8Film consists of composite waveguide, As 2S 8The thickness of film gets 1.7
Figure 223597DEST_PATH_IMAGE001
M directly overlays the As of cut-off waveguide upper surface 2S 8The width of film is by 5 of Al metal membrane
Figure 567991DEST_PATH_IMAGE001
The m width of windowing limits, and L is got in design 2Be 0.8
Figure 236607DEST_PATH_IMAGE001
M, As 2S 8The refractive index of film is 2.3065(
Figure 742675DEST_PATH_IMAGE012
=632.8nm).
Above-mentioned design result shows, after each parameter of composite waveguide is selected through optimization, can be the technique preparation sufficient scale error tolerance is provided.
Above-mentioned a kind of preparation method who realizes the composite waveguide device of light blocking effect specifically comprises the steps:
(1), the pre-service of glass substrate
The cleaning of glass substrate adopts the ultrasonic vibration cavitation in conjunction with the brushless scrubbing method of chemical reaction, namely being followed successively by with the pH value is that 7 mild detergent cleaning 5min, 3 pure water cleaning 1min, acetone cleaning 5min, 2 pure water cleaning 1min, absolute ethyl alcohols cleaning 3min, IPA cleaning 2min, nitrogen dry up the surface, then in 130 ℃ of dry 30min;
(2), the ion-exchange bar waveguide of adopting selectivity secondary ion switching technology to prepare the gradually changed refractive index of variation in thickness, Ag is adopted in the ion-exchange waveguides preparation +-Na +Ion exchange technique
1., be the upper surface of glass substrate of the clean dried of 15mm in length, adopt conventional thermal evaporation vacuum coating technology to prepare metal A l film, its thickness is preferably 1.9
Figure 958892DEST_PATH_IMAGE001
M, metal A l film covers the upper surface of whole glass substrate, and conventional photoetching technique is adopted in windowing of metal A l film, and the width of windowed regions is 2W, and namely 2W is preferably 5
Figure 841398DEST_PATH_IMAGE001
M, windowed regions is exposed the upper surface of glass substrate, L 3The zone of=3mm is covered by metal A l film;
2., carry out the ion-exchange first time, the ion gun of for the first time ion-exchange is 0.08%AgNO 3-99.92%NaNO 3Mixed melting salt, ion-exchange temperature are 350 ℃, and constant temperature time is 40min;
3., adopt conventional photoetching cover lithography to window and get through L 3The zone, the width of windowed regions is 2W, namely 2W is preferably 5
Figure 131565DEST_PATH_IMAGE001
M, windowed regions is exposed the upper surface of glass substrate;
4., carry out the ion-exchange second time, ion gun and ion-exchange temperature are identical with for the first time ion-exchange, constant temperature time is 20min, forming this moment as the ion-exchange single mode bar waveguide of input waveguide, output waveguide and the length that is used for the structure composite waveguide is L 3Cut-off waveguide;
(3), adopt conventional photoetching cover lithography to remove the metal A l film of input waveguide and output waveguide both sides, the length of the metal A l film of windowing of reservation is L 3+ 2(L 1+ L 2), be preferably 4.17mm;
(4), use blade preventing glass substrate with the sharp edge of a knife to expose the zone after, adopt conventional thermal evaporation vacuum coating technology vacuum deposition As on the metal A l film of windowing that keeps 2S 8Film, its thickness is preferably 1.7
Figure 808534DEST_PATH_IMAGE001
M is at the windowed regions of Al metal membrane, As 2S 8Film directly contacts with the upper surface of cut-off waveguide, namely gets the composite waveguide device that can realize light blocking effect.
Above-mentioned a kind of composite waveguide device of realizing light blocking effect owing to can realize the disconnected operation of unsaturation photoresistance, therefore can be applied in the optical pulse coupling function such as realizing.
Beneficial effect of the present invention
Light blocking effect is As 2S 8The interactional phenomenon of exclusive light-light, in order to construct the fiber waveguide device with light blocking effect, must preparation As 2S 8The bar waveguide, reported prior art is at As 2S 8The light technology of selling off with uv light induction on the film prepares As 2S 8The bar waveguide, and realized light blocking effect.For As 2S 8The external systems such as bar waveguide and light source, detector couple together the formation practical devices, must finish in advance As 2S 8The curing of docking of bar waveguide two ends and input optical fibre and output optical fibre.This docking relates to guided wave and the coupling of the pattern end face between the guided wave in the optical fiber in the optical waveguide, the coupling efficiency of pattern end face coupling is except relevant with the coupling of the mould field distribution of two guided waves that participate in coupling, also with the optical axis of two guided waves between space relative orientation relevant, ideal situation requires the optical axis of two guided waves strictly to aim at and keeping parallelism in the space.For this reason, do docking and solidify the front necessary As of enforcement 2S 8The grinding and polishing of bar Waveguide end face and fiber end face.Experiment shows that conventional optical grade abrasive polishing process can not be applicable to As 2S 8The end surface grinding polishing of bar waveguide is because As 2S 8Material is not alkaline-resisting, does not cross the corrosion of the multiple working procedure neutral and alkali solution of grinding and polishing, and the result causes As 2S 8Two end face out-of-flatnesses of bar waveguide also the destructive breach can occur when serious.Owing to adopting the As of existing grinding and polishing technical finesse 2S 8The end face quality of bar waveguide does not pass a test, and improves As 2S 8The end face coupling efficiency of bar waveguide and optical fiber becomes very difficult.
A kind of composite waveguide device of realizing light blocking effect of the present invention has adopted the waveguide of vitreous ion-exchange single mode bar as input waveguide and output waveguide at device input end and output terminal, and the grinding and polishing of both ends of the surface does not relate to As 2S 8Material, the grinding and polishing technology that can continue to use existing vitreous material obtains smooth good end face, and one of beneficial effect of the present invention is the end face quality problems that solved the Butt-coupling requirement.
Yet, as two ions exchange single mode bar waveguide of input waveguide and output waveguide how with the As with light blocking effect 2S 8Waveguide realizes effectively becoming not have at present to supply the current programme of reference with basis set at the same substrate, and difficult point is that effective realization of light blocking effect requires the work light wave must be limited in as much as possible As 2S 8Transmit in waveguide or the film, how to be coupled into for As expeditiously as the photoconduction mould in two ion exchange single mode bars waveguide of input waveguide and output waveguide 2S 8Waveguide or film are key problem in technology.The present invention proposes and has realized a kind of by cut-off waveguide and the As that is positioned at metal A l film windowed regions 2S 8The composite waveguide structure that film consists of, this composite waveguide can be realized becoming with same basis set as two ions exchange single mode bar waveguide of input waveguide and output waveguide, realized the coupling of low-loss, high efficiency light wave transmissions by multimode interference principle between composite waveguide and input waveguide and the output waveguide, thereby beneficial effect of the present invention two is the waveguides of two vitreous ion-exchange single mode bars and the As with light blocking effect that solved as input waveguide and output waveguide 2S 8Waveguide realizes effectively being a problem with basis set at the same substrate.
In a word, a kind of composite waveguide device of realizing light blocking effect of the present invention has reached and not only can effectively realize light blocking effect, but also the beneficial effect that can well dock with optical fiber.
Description of drawings
The planar structure schematic diagram of the composite waveguide device of the light blocking effect realized of Fig. 1 a, embodiment 1;
Among Fig. 1 b, Fig. 1 a along B-B to cut-open view;
Among Fig. 1 c, Fig. 1 a along A-A to cut-open view;
The pattern schematic diagram of the Al metal membrane that is used for for the first time ion-exchange of gained in the preparation process of the composite waveguide device of the light blocking effect realized of Fig. 2 a, embodiment 1;
The pattern schematic diagram of the Al metal membrane that is used for for the second time ion-exchange of gained in the preparation process of the composite waveguide device of the light blocking effect realized of Fig. 2 b, embodiment 1;
In the preparation process of the composite waveguide device of the light blocking effect realized of Fig. 2 c, embodiment 1 removal of gained behind the metal A l film of input waveguide and output waveguide both sides, deposit As 2S 8Pattern schematic diagram behind the film;
Fig. 3, embodiment 1 gained a kind of realizes the local microphoto of the composite waveguide 7 in the composite waveguide device of light blocking effect;
The structural representation of Fig. 4, disconnected experiment is tested to the photoresistance of the composite waveguide device that can realize light blocking effect device;
A kind of disconnected experimental result of photoresistance that realizes the composite waveguide device of light blocking effect of Fig. 5, embodiment 1 gained;
Coupling efficiency relevant with composite waveguide, that adopt beam propagation method (BPM) emulation to obtain in the composite waveguide device of the light blocking effect realized of Fig. 6, embodiment 1 gained
Figure 246468DEST_PATH_IMAGE013
1With L 1Related situation;
Coupling efficiency relevant with composite waveguide, that adopt beam propagation method (BPM) emulation to obtain in the composite waveguide device of the light blocking effect realized of Fig. 7, embodiment 1 gained 1With L 2Related situation;
Coupling efficiency relevant with composite waveguide, that adopt beam propagation method (BPM) emulation to obtain in the composite waveguide device of the light blocking effect realized of Fig. 8, embodiment 1 gained
Figure 77338DEST_PATH_IMAGE013
1With As 2S 8The related situation of thickness h;
Insertion loss and the L of composite waveguide relevant with composite waveguide, that the emulation of employing beam propagation method (BPM) obtains in the composite waveguide device of the light blocking effect realized of Fig. 9, embodiment 1 gained 3Related situation;
The mould field distribution of the composite waveguide device of the light blocking effect realized that Figure 10 a, beam propagation method (BPM) emulation obtain is along L 3Change (L 3=3300
Figure 190788DEST_PATH_IMAGE001
M);
The mould field distribution of the composite waveguide device of the light blocking effect realized that Figure 10 b, beam propagation method (BPM) emulation obtain is along L 3Change (L 3=3400 M);
The mould field distribution of the composite waveguide device of the light blocking effect realized that Figure 10 c, beam propagation method (BPM) emulation obtain is along L 3Change (L 3=3500
Figure 278009DEST_PATH_IMAGE001
M);
The mould field distribution of the composite waveguide device of the light blocking effect realized that Figure 10 d, beam propagation method (BPM) emulation obtain is along L 3Change (L 3=3600
Figure 605086DEST_PATH_IMAGE001
M);
Beam propagation method (BPM) the emulation transmission result of the composite waveguide device of the light blocking effect realized of Figure 11, embodiment 1 gained.
Embodiment
Also by reference to the accompanying drawings the present invention is further set forth below by specific embodiment, but do not limit the present invention.
Embodiment 1
A kind of composite waveguide device of realizing light blocking effect, its structural representation is shown in Fig. 1 a, Fig. 1 b and Fig. 1 c;
Fig. 1 a is the vertical view that can realize the composite waveguide device of light blocking effect, from Fig. 1 a, can find out, the described composite waveguide device of light blocking effect of realizing comprises the ion-exchange bar waveguide that a glass substrate 6 and employing selectivity secondary ion switching technology prepare the gradually changed refractive index of variation in thickness, and the waveguide of described ion-exchange bar from left to right is followed successively by input waveguide 1, composite waveguide 7 and output waveguide 2;
Fig. 1 b be among Fig. 1 a along B-B to the structural representation of analysing and observe, from Fig. 1 b, can find out:
Described composite waveguide 7 is by cut-off waveguide 3 and be in As in the windowed regions of Al metal membrane 5 2S 8Film 43 forms, and being followed successively by from bottom to top cut-off waveguide 3 is 1.7 with the interior thickness of the windowed regions that is in Al metal membrane 5
Figure 889436DEST_PATH_IMAGE001
The As of m 2S 8Film 43, the length of cut-off waveguide 3 is 3mm, is in the interior As of windowed regions of Al metal membrane 5 2S 8The length of film 43 is the same with the length of Al metal membrane 5, is 4.17mm;
The length of described composite waveguide 7 is L 3+ L 1'+L 1+ L 2+ L 2', L wherein 1=L 1', carry out the length of overlapping region for the windowed regions of described input waveguide or output waveguide and described Al metal membrane;
L 2=L 2', be the length of the transitional region between described input waveguide or output waveguide and the described cut-off waveguide;
L 3Be the length of cut-off waveguide, L wherein 1=L 1', be 575
Figure 36384DEST_PATH_IMAGE001
M, L 2=L 2', be 0.8
Figure 766180DEST_PATH_IMAGE001
M, L 3Be 3mm;
It can also be seen that from Fig. 1 b described input waveguide 1 and output waveguide 2 connect leading to mutually by the cut-off waveguide 3 in the composite waveguide 7;
Above-mentioned input waveguide 1 and output waveguide 2 are the single mode bar waveguide of 632.8nm wavelength light wave;
Above-mentioned 3 pairs of 632.8nm wavelength of cut-off waveguide light wave ends, and does not support the guided mode transmission of 632.8nm wavelength light wave, and the composite waveguide 7 that cut-off waveguide participates in consisting of is the multimode bar waveguide of 632.8nm wavelength light wave;
Fig. 1 c be among Fig. 1 a along A-A to cut-open view, from Fig. 1 c, can find out, the windowed regions of Al metal membrane 5 is in the middle of Al metal membrane 5, and corresponding to directly over the cut-off waveguide 3, at the windowed regions of Al metal membrane 5, As 2S 8Film directly contacts with the upper surface of cut-off waveguide 3, and the width 2W of windowed regions is 5 M, length, the As of the length of windowed regions and Al metal membrane 5 2S 8The length of film 4 is consistent, is 4.17mm;
Al metal membrane 5 and As 2S 8Film 4 all is symmetrical in cut-off waveguide 3 and arranges, after Al metal membrane 5 is windowed, thereby forms such as the Al metal membrane 51 among Fig. 1 b, Al metal membrane 52, As 2S 8Film 41, As 2S 8Film 42 and at the As of the windowed regions of Al metal membrane 2S 8Film 43;
Above-mentioned glass substrate 6 is B270 optical glass.
Above-mentioned a kind of preparation method who realizes the composite waveguide device of light blocking effect specifically comprises the steps:
(1), the pre-service of glass substrate
The cleaning of B270 glass substrate 6 adopts the ultrasonic vibration cavitation in conjunction with the brushless scrubbing method of chemical reaction, namely being followed successively by with the pH value is that 7 mild detergent cleaning 5min, 3 pure water cleaning 1min, acetone cleaning 5min, 2 pure water cleaning 1min, absolute ethyl alcohols cleaning 3min, IPA cleaning 2min, nitrogen dry up the surface, then in 130 ℃ of dry 30min;
(2), the ion-exchange bar waveguide of adopting selectivity secondary ion switching technology to prepare the gradually changed refractive index of variation in thickness;
Ag is adopted in the ion-exchange waveguides preparation +-Na +Ion exchange technique, the coefficient of diffusion of ion-exchange
Figure 403015DEST_PATH_IMAGE002
With the surface refractive index increment
Figure 302838DEST_PATH_IMAGE003
Determine with following methods experiment:
Ion gun is 0.08%AgNO 3-99.92%NaNO 3Mixed melting salt, Ag +Mol ratio be 0.0398%.Ag +Mol ratio less than 0.5% the time, coefficient of diffusion
Figure 541052DEST_PATH_IMAGE002
With the surface refractive index increment
Figure 577141DEST_PATH_IMAGE003
By Ag +The approximate constant that mol ratio and ion-exchange temperature T determine.The ion-exchange temperature that experiment is adopted is constant to be 350 ℃, get respectively 4.5h, 3.5h, 2.5h and 1.5h swap time and prepared the gradually changed refractive index ion-exchange waveguides of four multimodes, under the 632.8nm wavelength, usefulness prism-coupled technology (R. Ulrich and R. Torge: Appl. Opt, Vol.12, p.2901,1973) and record the propagation constant of each rank transverse electric field guided mode (TE guided mode), the coefficient of diffusion that utilizes iteration and fitting method to obtain
Figure 203295DEST_PATH_IMAGE002
With the surface refractive index increment
Figure 324835DEST_PATH_IMAGE003
Be listed in the table below:
Figure 632319DEST_PATH_IMAGE014
Upper table shows the coefficient of diffusion that experiment adopting process condition obtains With the surface refractive index increment Be about respectively 4.09 * 10 -4(
Figure 397647DEST_PATH_IMAGE016
) and 0.019, can determine respectively thus the ion-exchange constant temperature time t of preparation ion-exchange single mode bar waveguide and cut-off waveguide;
1., be the upper surface of B270 optical glass substrate 6 of the clean dried of 15mm in length, adopt conventional thermal evaporation vacuum coating technology (vacuum tightness: 2 * 10 -5Pa, evaporation current: 25A) preparation thickness is 1.9 M, length are the metal A l film 5 of 4.17mm, and metal A l film 5 covers the upper surface of whole glass substrate 6, and conventional photoetching technique is adopted in windowing of metal A l film 5, and the width 2W that windows is 5
Figure 316241DEST_PATH_IMAGE001
M ends window and namely forms Al metal membrane 51, Al metal membrane 52 afterwards, and the upper surface of glass substrate 6, L are exposed in the zone of windowing 3The zone of=3mm is covered by metal A l film 5, does not relate to cut-off waveguide to guarantee for the first time ion-exchange, and the Al film 51 of the formation of namely windowing for the first time, the schematic diagram of Al metal membrane 52 are shown in Fig. 2 a;
2., carry out the ion-exchange first time, the ion gun of for the first time ion-exchange is 0.08%AgNO 3-99.92%NaNO 3Mixed melting salt, ion-exchange temperature are 350 ℃, and constant temperature time is 40min;
3., adopt conventional photoetching cover lithography to window and get through L 3The zone, the width 2W that windows is 5
Figure 284197DEST_PATH_IMAGE001
M, windowed regions is exposed the upper surface of glass substrate 6, and the Al film 51 of the formation of namely windowing for the second time, the schematic diagram of Al metal membrane 52 are shown in Fig. 2 b;
4., carry out the ion-exchange second time, ion gun and ion-exchange temperature are identical with for the first time ion-exchange, constant temperature time is 20min, and formation this moment is L as the ion-exchange single mode bar waveguide of input waveguide 1, output waveguide 2 with for the length of constructing composite waveguide 3Cut-off waveguide 3;
(3), adopt conventional photoetching cover lithography to remove the metal A l film of input waveguide 1 and output waveguide 2 both sides, the metal A l film 51 of reservation, the length of Al metal membrane 52 are 4.17mm;
(4), use blade preventing glass substrate with the sharp edge of a knife to expose the zone after, adopt conventional thermal evaporation vacuum coating technology (vacuum tightness: 5 * 10 -6Pa, evaporation current: 40A) vacuum deposition thickness is 1.7
Figure 550968DEST_PATH_IMAGE001
The As of m 2S 8Film, and the As of assurance formation 2S 8Film 41, As 2S 8Film 42 and at the As of the position of windowing of Al metal membrane 2S 8Film 43 its length are 4.17mm, namely get the composite waveguide device that can realize light blocking effect, removed the metal A l film of input waveguide 1 and output waveguide 2 both sides after, deposit As 2S 8Pattern schematic diagram behind the film is shown in Fig. 2 c.
Be that composite waveguide 7 is used sea light and learned the BM-17 phasecontrast microscope of instrument six factories and take with the local location of the composite waveguide device of the light blocking effect realized of above-mentioned gained, the picture of gained as shown in Figure 3, up and down two waveguides for subsequent use that waveguides are prophylactic tria error employing and the preparation of above-mentioned same method among Fig. 3, the spacing of the waveguide of waveguide for subsequent use and composite waveguide device is wide to reach 80
Figure 262573DEST_PATH_IMAGE001
M is each other without any optical interference.
Light blocking effect to the composite waveguide device of the light blocking effect realized of above-described embodiment 1 gained is tested, the structural representation of proving installation as shown in Figure 4, can realize light blocking effect the composite waveguide device both ends of the surface through grind and polishing after, end face with the 632.8nm single-mode fiber is coupled respectively, forms the style of conventional single core array behind the coupled end optical fiber insertion quartz glass capillary after adhesive solidification, the grinding.
One end of input end single-mode fiber is connected with the He-Ne laser instrument of 632.8nm wavelength, the input end Butt-coupling of the input waveguide 1 of the other end and composite waveguide device;
The output terminal Butt-coupling of one end of output terminal single-mode fiber and the output waveguide 2 of composite waveguide device, the other end is connected with light power meter.
The Butt-coupling of this input single-mode fiber-composite waveguide device-output single-mode fiber light path system adopts the automatic core-adjusting technology, in order to reduce Fresnel reflection, filled index-matching fluid (the product MO-633 of MORITEX company, the transmitance of 632.8nm wavelength light wave is 99%/mm) between fiber end face and the composite waveguide device end face.632.8nm wavelength He-Ne laser can be realized the guided mode of the composite waveguide device of light blocking effect through the excitation of input Single-Mode Fiber Coupling, guided wave is sent into light power meter (41 products A V6334A of the ministry of electronics industry) through the output single-mode fiber, shows by conventional oscillograph recording.Band gap is the adjustable 441.6nm wavelength He-Cd laser of power only, through multimode optical fiber coupling guiding, from sample surfaces irradiation As 2S 8Film, the light beam irradiates radius is about 2mm.Shutter release is used for control 441.6nm wavelength He-Cd laser shines the composite waveguide device that can realize light blocking effect through multimode optical fiber As 2S 8Irradiation time on the film.
In the situation that cut off 441.6nm wavelength He-Cd Ear Mucosa Treated by He Ne Laser Irradiation, record the output power of the 632.8nm wavelength light wave of above-mentioned light path with light power meter, the insertion loss of 632.8nm wavelength light wave of composite waveguide device that obtains the light blocking effect realized of embodiment 1 gained is 1.8dB.
Light blocking effect shows as the transmission of 632.8nm wavelength guide mode and is truncated at 441.6nm wavelength He-Cd Ear Mucosa Treated by He Ne Laser Irradiation place, removes 441.6nm wavelength He-Cd laser light amplitude photograph, and the 632.8nm Optical Waveguide Modes recovers transmission.Dynamic process can be interpreted as the self-trapping electronics of shallow energy level polaron that short wavelength's band gap light transports and consist of absorption to long wavelength's signal photon, proportional with the electron concentration that is pumped into gap internal trap energy level to the degree of absorption of long wavelength's flashlight, thus the 632.8nm flashlight to block the degree of depth relevant with the photon numbers of 441.6nm band gap light.
Fig. 5 is the test result of composite waveguide device light blocking effect, horizontal ordinate is the transmission time, ordinate is the through-put power of 632.8nm flashlight, the luminous power of He-Cd laser is 14mW, as can be seen from Figure 5, in case He-Cd laser is opened irradiation, 632.8nm the transmission of flashlight namely is blocked, along with the chronic exposure of He-Cd laser, the electron concentration that is pumped into gap internal trap energy level reaches capacity, and the transmission of 632.8nm flashlight is blocked by the degree of depth.Cut off He-Cd laser irradiation, gradually reinstatement of the transmission of 632.8nm flashlight this moment.
The coupling efficiency L of the input end of the composite waveguide in the composite waveguide device of the light blocking effect realized of above-described embodiment 1 gained 3The luminous power in zone and the ratio of input optical power 1Characterize, the results are shown in Figure 6, Fig. 6 and be the simulation result that the beam propagation method (BPM) of 632.8nm wavelength obtains,
Figure 532197DEST_PATH_IMAGE013
1With L 1Length relevant, at L 1Near=the 575m, the maximum coupling efficiency more than 90% is arranged, and to L 1Change has good desensitization.Zone of transition L 2By the sideways diffusion self-assembling formation, length is about 1
Figure 787729DEST_PATH_IMAGE001
The m magnitude, the simulation result of the beam propagation method of Fig. 7 (BPM) shows L 20.5～2.0
Figure 303024DEST_PATH_IMAGE001
When changing in the m scope
Figure 288297DEST_PATH_IMAGE013
1Almost constant.This results suggest is tolerant to the control of ion-exchange sideways diffusion.Because the sudden change of index distribution has occured in the porch of composite waveguide 7, and exciting of radiation mode is difficult to avoid coupling efficiency
Figure 598056DEST_PATH_IMAGE013
1With As 2S 8The thickness h of film 43 is also relevant, and Fig. 8 has provided the simulation result of beam propagation method (BPM), As 2S 8The thickness h of film 43 is 1.68～1.77
Figure 340884DEST_PATH_IMAGE001
Can obtain in the m scope to be about 91% coupling efficiency, provide to be about 0.1
Figure 394291DEST_PATH_IMAGE001
The film thickness monitoring franchise of m.
According to the above results, get L 1=575
Figure 234071DEST_PATH_IMAGE001
M, h=1.70
Figure 714731DEST_PATH_IMAGE001
The structure of m is further investigated insertion loss and the L of composite waveguide 7 of composite waveguide device of the light blocking effect realized of embodiment 1 gained 3Relevance, the simulation result of the beam propagation method of Fig. 9 (BPM) shows, around design length ± 600
Figure 210434DEST_PATH_IMAGE001
In the m span scope, insertion loss maintains about 1dB.In theory, since the multimode transmission, L 3There is the mould field distribution of cyclical movement in the zone, and the interference contrast of the multiple-mode interfence that this composite waveguide 7 structures provide is low, and the mould field distribution is along L 3Change little, effect is that insertion loss is to L 3Change responsive hardly.
The emulated data of beam propagation method (BPM) has provided the mould field distribution of guided mode of composite waveguide 7 of composite waveguide device of the light blocking effect realized of embodiment 1 gained along L 3The part sectional drawing of change can find out that from Figure 10 a, Figure 10 b, Figure 10 c and Figure 10 d the mould field distribution of guided mode mainly concentrates on As shown in Figure 10 a, Figure 10 b, Figure 10 c and Figure 10 d 2S 8The zone of film 43, and the mould field distribution is along L 3Change smaller.
In sum, a kind of composite waveguide device of realizing light blocking effect of the present invention can be realized the Butt-coupling with outside input optical fibre and output optical fibre well, insertion loss is 1.8dB, by the control to 441.6nm wavelength He-Cd laser irradiation, can realize significantly the light blocking effect to the transmission of 632.8nm flashlight.
Foregoing only is the basic explanation of the present invention under conceiving, and according to any equivalent transformation that technical scheme of the present invention is done, all should belong to protection scope of the present invention.

Claims (3)

1. the composite waveguide device that can realize light blocking effect is characterized in that the described composite waveguide device of light blocking effect of realizing comprises a glass substrate and the ion-exchange bar waveguide of adopting selectivity secondary ion switching technology to prepare the gradually changed refractive index of variation in thickness at this glass substrate upper epidermis;
The waveguide of described ion-exchange bar from left to right is followed successively by input waveguide, composite waveguide and output waveguide;
Described composite waveguide is the multimode bar waveguide of 632.8nm wavelength light wave, and the waveguide of described multimode bar namely upwards is followed successively by cut-off waveguide and the As that is positioned at the windowed regions of Al metal membrane from the upper epidermis of glass substrate 2S 8Film;
The windowed regions of described Al metal membrane is in the middle of Al metal membrane, and corresponding to directly over the cut-off waveguide, at the windowed regions of Al metal membrane, As 2S 8Film directly contacts the length of the windowed regions of Al metal membrane and the length of Al metal membrane, As with the upper surface of cut-off waveguide 2S 8The length of film is consistent, and the width of windowing is 2W;
Cut-off waveguide in described input waveguide, output waveguide and the composite waveguide has identical width, and described input waveguide and output waveguide connect leading to mutually by the cut-off waveguide in the composite waveguide;
Described input waveguide and output waveguide are the ion-exchange single mode bar waveguide of 632.8nm wavelength light wave;
Described cut-off waveguide ends 632.8nm wavelength light wave, does not support the guided mode transmission of 632.8nm wavelength light wave;
Described glass substrate is B270 optical glass, BK7 optical glass or K9 optical glass.
2. a kind of composite waveguide device of realizing light blocking effect as claimed in claim 1 is characterized in that described Al metal membrane thickness of windowing is 1.9 ì m, As 2S 8Film thickness is 1.7 ì m;
As in the described composite waveguide 2S 8The length of film and Al metal membrane is L 3+ 2(L 1+ L 2);
L wherein 1Carry out the length of overlapping region for the windowed regions of described input waveguide or output waveguide and described Al metal membrane;
L 2Length for the transitional region between described input waveguide or output waveguide and the described cut-off waveguide;
L 3Length for cut-off waveguide;
L wherein 1Be 575 ì m, L 2Be 0.8 ì m, L 3Be 3mm;
The width 2W of the windowed regions of Al metal membrane is 5 ì m;
As 2S 8The length of the windowed regions of the length of film, the length of Al metal membrane and Al metal membrane is 4.17mm.
3. a kind of preparation method who realizes the composite waveguide device of light blocking effect as claimed in claim 1 or 2 is characterized in that specifically comprising the steps:
(1), the pre-service of glass substrate
The cleaning of glass substrate adopts the ultrasonic vibration cavitation in conjunction with the brushless scrubbing method of chemical reaction, namely being followed successively by with the pH value is that 7 mild detergent cleaning 5min, 3 pure water cleaning 1min, acetone cleaning 5min, 2 pure water cleaning 1min, absolute ethyl alcohols cleaning 3min, IPA cleaning 2min, nitrogen dry up the surface, then in 130 ℃ of dry 30min;
(2), the ion-exchange bar waveguide of adopting selectivity secondary ion switching technology to prepare the gradually changed refractive index of variation in thickness, Ag is adopted in the ion-exchange waveguides preparation +-Na +Ion exchange technique
1., at the upper surface of the glass substrate of clean dried, adopt conventional thermal evaporation vacuum coating technology to prepare metal A l film, metal A l film covers the upper surface of whole glass substrate, conventional photoetching technique is adopted in windowing of metal A l film, the width of windowed regions is 2W, windowed regions is exposed the upper surface of glass substrate, L 3The zone covered by metal A l film;
2., carry out the ion-exchange first time, the ion gun of for the first time ion-exchange is 0.08%AgNO 3-99.92%NaNO 3Mixed melting salt, ion-exchange temperature are 350 ℃, and constant temperature time is 40min;
3., adopt conventional photoetching cover lithography to window and get through L 3Zone, the width of windowed regions are 2W, and windowed regions is exposed the upper surface of glass substrate;
4., carry out the ion-exchange second time, ion gun and ion-exchange temperature are identical with for the first time ion-exchange, constant temperature time is 20min, forming this moment as the ion-exchange single mode bar waveguide of input waveguide, output waveguide and the length that is used for the structure composite waveguide is L 3Cut-off waveguide;
(3), adopt conventional photoetching cover lithography to remove the metal A l film of input waveguide and output waveguide both sides, the length of the windowed regions of the metal A l film of reservation is L 3+ 2(L 1+ L 2);
(4), use blade preventing glass substrate with the sharp edge of a knife to expose the zone after, adopt conventional thermal evaporation vacuum coating technology vacuum deposition As 2S 8Film namely gets the composite waveguide device that can realize light blocking effect.
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Publication number Priority date Publication date Assignee Title
CN107490825A (en) * 2017-09-13 2017-12-19 吉林大学 Half hanging arsenones slab waveguide with superelevation stimulated Brillouin scattering gain and preparation method thereof

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
周霞等: ""B270_As_2S_8复合平面波导制备技术研究"", 《光学仪器》 *
张璡璟等: ""用于光阻断效应的B270_As_2S_8复合光波导的设计"", 《光学仪器》 *
王悠悠等: ""离子交换单模条波导的折射率分布控制与制备"", 《光学仪器》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107490825A (en) * 2017-09-13 2017-12-19 吉林大学 Half hanging arsenones slab waveguide with superelevation stimulated Brillouin scattering gain and preparation method thereof
CN107490825B (en) * 2017-09-13 2019-05-21 吉林大学 Half hanging arsenones slab waveguide with superelevation stimulated Brillouin scattering gain and preparation method thereof

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