CN103364453A - Tin oxide-zinc oxide composite hollow microsphere air-sensitive sensing device and preparation method thereof - Google Patents
Tin oxide-zinc oxide composite hollow microsphere air-sensitive sensing device and preparation method thereof Download PDFInfo
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Abstract
The invention discloses a tin oxide-zinc oxide composite hollow microsphere air-sensitive sensing device and a preparation method thereof, wherein tin oxide-zinc oxide composite hollow microspheres are prepared by a template method; the air-sensitive sensing device is of an indirectly heated device structure; an alumina ceramic tube is taken as a carrier for the air-sensitive sensing device, a heater strip is arranged inside the ceramic tube, a gold electrode is attached on the outer surface of the ceramic tube, and electrodes are extracted from the two ends of the ceramic tube. The ceramic tube is coated with a tin oxide-zinc oxide composite hollow microsphere air-sensitive material, and then welded and packaged; consequently, an air-sensitive sensing device is obtained. The tin oxide-zinc oxide composite hollow microsphere air-sensitive sensing device has the advantages that the large-specific surface area metal oxide is used as the air-sensitive material so that the active vacancies of the material surface are greatly increased, and the response ratio and the response time of an air-sensitive sensor are increased. The air-sensitive sensing device provided by the invention is simple to fabricate, stable in performance, high in sensitivity; the air-sensitive sensing device is highly sensitive to ethanol at a working temperature and can be used for detecting ethanol.
Description
Technical field
The present invention relates to a kind of gas-sensitive sensor device and preparation method thereof, particularly relate to a kind of tin oxide-zinc paste compound hollow microballoon gas-sensitive sensor device and preparation method.
Background technology
The metal oxide semiconductor Nano-meter Materials as Gas Sensors is highly sensitive owing to having, response is fast, the advantages such as volume is little, method for making is simple, low price become the gas-sensitive sensor device optimal material.The gas sensitive of development of new and novel gas-sensitive sensor device become one of main direction of domestic and international semiconductor gas sensor development at present.
ZnO microsphere is owing to have adjustable pore passage structure, high-specific surface area and stronger ion-exchange performance, being conducive to reactant reacts in active sites in catalytic process, detection aspect to gases such as ethanol, acetone, formaldehyde has shown greatly application prospect, so the ZnO nano-structure material is widely used in the sensitive material of gas sensor; SnO
2Owing to ethanol is had good responsiveness, also becomes the only selection of gas sensor material.Yet independent zinc paste or stannic oxide materials are poor to gas-selectively, can fully utilize the advantage of bi-material by preparing tin oxide-zinc oxide composite, realize the preparation of the gas sensor highly sensitive, that the response time is short.Common report has ZnO/SnO at present
2Nuclear shell structure nano line, SnO
2The preparation of-ZnO composite powder and the application in gas-sensitive sensor device, the present invention proposes to use template synthesis SnO
2-ZnO complex microsphere, the micro-sphere structure of rule has larger specific surface area and surfactivity room, and a kind of gas sensor material and device of high-quality is provided for market.
Summary of the invention
In order to overcome the deficiencies in the prior art, the invention provides a kind of tin oxide-zinc paste compound hollow microballoon gas-sensitive sensor device and preparation method.
The preparation method of a kind of tin oxide-zinc paste compound hollow microballoon gas-sensitive sensor device is characterized in that, comprises the steps:
(1) organic template is dissolved in the organic solvent, adds the diethanolamine of zinc precursor body and 0.5 milliliter to 2.8 milliliters fully after the dissolving, or triethanolamine; Then at room temperature stir at least and obtained the zinc oxide precursor liquid solution in 3 hours;
(2) take by weighing the tin presoma by tin presoma and zinc precursor body mol ratio 1:10~1:1, place the zinc precursor liquid solution, stirred 2~4 hours, obtain tin-zinc compound precursor liquid solution;
(3) precursor solution is placed reactor, in 80~200 ℃ of reactions 12 hours to 24 hours;
(4) question response still temperature is down to room temperature, and milk-white coloured suspension is washed respectively 3~5 times with alcohol and water, obtains tin oxide-zinc paste compound hollow microballoon, places alcohol or water stand-by microballoon;
(5) alumina ceramic tube cleans up with deionized water, acetone, chloroform, dry for standby;
(6) suspending liquid with tin oxide-zinc paste compound hollow microballoon evenly spreads upon on the alumina ceramic tube of step (4), and ceramic pipe is encapsulated;
(7) wore out 3~15 days at 100~300 ℃ of lower electricity, make tin oxide-zinc paste compound hollow microballoon gas-sensitive sensor device.
Organic template described in the step (1) is triblock copolymer polyoxyethylene-poly-oxypropylene polyoxyethylene (P123), or di-block copolymer polystyrene-poly oxygen ethene or cetyl trimethyl ammonium bromide.
Organic solvent described in the step (1) is a kind of or its combination in absolute ethyl alcohol, normal butyl alcohol, the tetrahydrofuran.
Zinc precursor body described in the step (1) is a kind of in two water zinc acetates, zinc chloride, zinc nitrate hexahydrate, the Zinc vitriol.
Tin presoma described in the step (2) is tin chloride, or stannous chloride.
The weight ratio of zinc precursor body, organic template and the organic solvent described in the step (2) is 0.05~0.6:0.03~0.8:2~7.
The described washing methods of step (4) is centrifugal under 5000 ~ 15000 rev/mins of rotating speeds or the suction filtration method all can;
The described aging atmosphere of step (7) is air.
A kind of tin oxide-zinc paste compound hollow microballoon gas-sensitive sensor device is characterized in that, prepares according to above-mentioned each method.
The invention has the advantages that: utilize the large metal oxide microballoon of specific surface area to do gas sensitive, can greatly increase the active room of material surface; By preparation tin oxide-zinc paste compound hollow microballoon, can take full advantage of the advantage of bi-material, responsiveness and the response time of improving gas sensor; Device architecture is taked the heater-type structure, and surperficial gas sensitive can prepare uniform gas sensitive film by the coating of pasty state zinc paste compound hollow microballoon; The gas-sensitive sensor device that the present invention adopts is made simple, stable performance, highly sensitive, under working temperature ethanol is had very high sensitivity, can be used for the detection of ethanol.
Method of the present invention is to utilize hydro-thermal method to synthesize SnO
2-ZnO compound hollow microballoon is regulated its specific surface area by this table of microballoon size, and then is regulated and control its surfactivity room, makes it have higher responsiveness; Variation by Sn and Zn ratio improves gas-selectively, and device prepares the aspect, and gas sensitive is coated in the ceramic pipe surface, and preparation technology is simple, good reproducibility.The method preparation technology is simple, has improved response efficiency by improving material specific surface area and surfactivity room, has reduced response temperature, makes the application of nano material aspect gas sensor simpler.
Description of drawings
Fig. 1 is that ZnO of the present invention and SnO2 mol ratio are the SEM figure of the microballoon of 4:1, and as seen from the figure, microsphere diameter is between 2.5 ~ 3 microns.
Fig. 2 is the high power SEM figure of tin oxide of the present invention-zinc paste compound hollow microballoon.
Fig. 3 is the energy spectrogram of tin oxide of the present invention-zinc paste compound hollow microballoon, and the EDS power spectrum has confirmed that microballoon is tin oxide, zinc paste composite structure.
Fig. 4 is that tin oxide of the present invention-zinc paste compound hollow microballoon is to the air-sensitive response curve of the absolute ethyl alcohol of variable concentrations, the electrical response rate is up to 9, the variable concentrations response time, all in 10 s, the result showed that tin oxide-zinc paste compound hollow microballoon shows good ethanol response.
Embodiment
Embodiment 1: take by weighing the block polymer P123 of 2 g, be dissolved in the absolute ethyl alcohol of 25 ml; Add the zinc acetate of 0.43 g and the diethanolamine of 0.8 ml, stir under the room temperature and obtained the zinc precursor liquid solution in 3 hours; The stannous chloride that takes by weighing 0.12 g places the zinc precursor liquid solution, stirs 1 hour; The tin-zinc precursor solution is placed reactor, in 180 ℃ of reactions 24 hours; Use respectively alcohol and water centrifuge washing 3 times, obtain tin oxide-zinc paste compound hollow microballoon; Microballoon is dissolved in obtains pastel in the absolute ethyl alcohol; Alumina ceramic tube cleans up with deionized water, acetone, chloroform, and oven dry evenly is coated in the ceramic pipe surface with tin oxide-zinc paste compound hollow microballoon pastel, and welding electrode, encapsulation obtain gas sensor.Microsphere diameter is between 2.5~3 microns, and tin oxide-zinc paste compound hollow microballoon is that the electrical response rate of the ethanol of 50 ppm is 8 to concentration under 370 ℃.
Embodiment 2: take by weighing the block polymer polystyrene-poly oxygen ethene of 2.5 g, be dissolved in the absolute ethyl alcohol of 30 ml; Add the zinc acetate of 0.6 g and the diethanolamine of 0.8 ml, stir under the room temperature and obtained the zinc precursor liquid solution in 3 hours; The stannous chloride that takes by weighing 0.15 g places the zinc precursor liquid solution, stirs 1 hour; The tin-zinc precursor solution is placed reactor, in 180 ℃ of reactions 24 hours; Use respectively alcohol and water centrifuge washing 3 times, obtain tin oxide-zinc paste compound hollow microballoon; Microballoon is dissolved in obtains pastel in the absolute ethyl alcohol; Alumina ceramic tube cleans up with deionized water, acetone, chloroform, and oven dry evenly is coated in the ceramic pipe surface with tin oxide-zinc paste compound hollow microballoon pastel, and welding electrode, encapsulation obtain gas sensor.Utilizing the tin oxide of polystyrene-poly oxygen ethene preparation-zinc paste compound hollow microballoon diameter to be distributed between 1.5~3 microns, is that the electrical response rate of the ethanol of 50 ppm is 5.4 to concentration under 370 ℃.
Embodiment 3: take by weighing the block polymer P123 of 2 g, be dissolved in the deionized water of 30 ml; Add the zinc acetate of 0.1 g and the diethanolamine of 1 ml, stir under the room temperature and obtained the zinc precursor liquid solution in 3 hours; The stannous chloride that takes by weighing 0.45 g places the zinc precursor liquid solution, stirs 1 hour; The tin-zinc precursor solution is placed reactor, in 180 ℃ of reactions 24 hours; Use respectively alcohol and water centrifuge washing 3 times, obtain tin oxide-zinc paste compound hollow microballoon; Microballoon is dissolved in obtains pastel in the absolute ethyl alcohol; Alumina ceramic tube cleans up with deionized water, acetone, chloroform, and oven dry evenly is coated in the ceramic pipe surface with tin oxide-zinc paste compound hollow microballoon pastel, and welding electrode, encapsulation obtain gas sensor.Change the ratio thus obtained microsphere Size Distribution of tin and zinc in 2~3.5 micrometer ranges, gained ball wall is thinner, and broken microballoon is many, is that the electrical response rate of the ethanol of 50 ppm is 8.5 to concentration under 370 ℃.
Embodiment 4: take by weighing the block polymer polystyrene-poly oxygen ethene of 2.5 g, be dissolved in the deionized water of 30 ml; Add the zinc chloride of 0.32 g and the diethanolamine of 1 ml, stir under the room temperature and obtained the zinc precursor liquid solution in 4 hours; The stannous chloride that takes by weighing 0.15 g places the zinc precursor liquid solution, stirs 1 hour; The tin-zinc precursor solution is placed reactor, in 180 ℃ of reactions 12 hours; Use respectively alcohol and water centrifuge washing 3 times, obtain tin oxide-zinc paste compound hollow microballoon; Microballoon is dissolved in obtains pastel in the absolute ethyl alcohol; Alumina ceramic tube cleans up with deionized water, acetone, chloroform, and oven dry evenly is coated in the ceramic pipe surface with tin oxide-zinc paste compound hollow microballoon pastel, and welding electrode, encapsulation obtain gas sensor.Change the zinc precursor body to structure and the not impact of size of tin oxide-zinc paste compound hollow microballoon, the electrical response rate of gas sensor is constant.
Claims (9)
1. the preparation method of tin oxide-zinc paste compound hollow microballoon gas-sensitive sensor device is characterized in that, comprises the steps:
(1) organic template is dissolved in the organic solvent, adds the diethanolamine of zinc precursor body and 0.5 milliliter to 2.8 milliliters fully after the dissolving, or triethanolamine; Then at room temperature stir at least and obtained the zinc oxide precursor liquid solution in 3 hours;
(2) take by weighing the tin presoma by tin presoma and zinc precursor body mol ratio 1:10~1:1, place the zinc precursor liquid solution, stirred 2~4 hours, obtain tin-zinc compound precursor liquid solution;
(3) precursor solution is placed reactor, in 80~200 ℃ of reactions 12 hours to 24 hours;
(4) question response still temperature is down to room temperature, and milk-white coloured suspension is washed respectively 3~5 times with alcohol and water, obtains tin oxide-zinc paste compound hollow microballoon, places alcohol or water stand-by microballoon;
(5) alumina ceramic tube cleans up with deionized water, acetone, chloroform, dry for standby;
(6) suspending liquid with tin oxide-zinc paste compound hollow microballoon evenly spreads upon on the alumina ceramic tube of step (4), and ceramic pipe is encapsulated;
(7) wore out 3~15 days at 100~300 ℃ of lower electricity, make tin oxide-zinc paste compound hollow microballoon gas-sensitive sensor device.
2. the preparation method of tin oxide according to claim 1-zinc paste compound hollow microballoon gas-sensitive sensor device, it is characterized in that, organic template described in the step (1) is triblock copolymer polyoxyethylene-poly-oxypropylene polyoxyethylene (P123), or di-block copolymer polystyrene-poly oxygen ethene or cetyl trimethyl ammonium bromide.
3. the preparation method of tin oxide according to claim 1-zinc paste compound hollow microballoon gas-sensitive sensor device is characterized in that, the organic solvent described in the step (1) is a kind of or its combination in absolute ethyl alcohol, normal butyl alcohol, the tetrahydrofuran.
4. the preparation method of tin oxide according to claim 1-zinc paste compound hollow microballoon gas-sensitive sensor device, it is characterized in that the zinc precursor body described in the step (1) is a kind of in two water zinc acetates, zinc chloride, zinc nitrate hexahydrate, the Zinc vitriol.
5. the preparation method of tin oxide according to claim 1-zinc paste compound hollow microballoon gas-sensitive sensor device is characterized in that, the tin presoma described in the step (2) is tin chloride, or stannous chloride.
6. the preparation method of tin oxide according to claim 1-zinc paste compound hollow microballoon gas-sensitive sensor device, it is characterized in that the weight ratio of zinc precursor body, organic template and the organic solvent described in the step (2) is 0.05~0.6:0.03~0.8:2~7.
7. the preparation method of tin oxide according to claim 1-zinc paste compound hollow microballoon gas-sensitive sensor device is characterized in that, the described washing methods of step (4) is centrifugal under 5000 ~ 15000 rev/mins of rotating speeds or the suction filtration method all can.
8. the preparation method of tin oxide according to claim 1-zinc paste compound hollow microballoon gas-sensitive sensor device is characterized in that, the described aging atmosphere of step (7) is air.
9. tin oxide-zinc paste compound hollow microballoon gas-sensitive sensor device is characterized in that, prepares according to the described method of above-mentioned each claim.
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CN104391010A (en) * | 2014-11-19 | 2015-03-04 | 上海纳米技术及应用国家工程研究中心有限公司 | Cr2O3-ZnO composite nano material as well as preparation method and application thereof |
CN104977320A (en) * | 2015-06-03 | 2015-10-14 | 胡齐放 | Ceramic gas-sensitive sensor for alcohol detection |
CN105036180A (en) * | 2015-06-26 | 2015-11-11 | 上海纳米技术及应用国家工程研究中心有限公司 | Preparation method of tin oxide/zinc oxide nanometer flower-shaped composite material |
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CN106018706A (en) * | 2016-07-15 | 2016-10-12 | 上海纳米技术及应用国家工程研究中心有限公司 | Stannic oxide-loaded porous nickel oxide gas sensor material as well as preparation and application thereof |
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CN108717072A (en) * | 2018-05-15 | 2018-10-30 | 大连理工大学 | A kind of light activated formaldehyde gas sensor and its preparation process |
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