CN103343325A - Anti-sagging device for magnetron sputtering door - Google Patents
Anti-sagging device for magnetron sputtering door Download PDFInfo
- Publication number
- CN103343325A CN103343325A CN2013103186332A CN201310318633A CN103343325A CN 103343325 A CN103343325 A CN 103343325A CN 2013103186332 A CN2013103186332 A CN 2013103186332A CN 201310318633 A CN201310318633 A CN 201310318633A CN 103343325 A CN103343325 A CN 103343325A
- Authority
- CN
- China
- Prior art keywords
- magnetron sputtering
- door
- support block
- sagging
- bolt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention provides an anti-sagging device for a magnetron sputtering door. The anti-sagging device consists of a support block, and step holes are formed in the support block; the diameter of a right-side hole is larger than that of a left-side hole, an inclined plane is close to the right side on the upper end surface of the support block and is inclined to the lower right corner, and the inclination angle of the inclined plane is 8-15 degrees. When being used, the anti-sagging device is fixed on a wall body of a magnetron sputtering chamber through a bolt, and when the magnetron sputtering door is closed, the lower end of the door moves upwards along the inclined plane to enable the door to be restored to the original position and further achieve a sealing effect. The device has the advantages of simple structure and convenience in use. The magnetron sputtering door is jointly supported by the support block and the bolt, so that the sagging of the magnetron sputtering door can be effectively prevented, and the sealing degree of the magnetron sputtering chamber can be further ensured after the door is closed.
Description
Technical field
The present invention relates to a kind of sag-resistant device, particularly a kind of magnetron sputtering door sag-resistant device.
Background technology
Magnetron sputtering technology is one of technology most widely used in the vacuum coating technology, magnetron sputtering method is under vacuum condition, ionization rare gas element, gaseous ion are under effect of electric field, and the bombardment metal targets makes atoms metal be deposited on a kind of Technology on the glass surface.And in traditional magnetron sputtering deposition line, because the material of magnetron sputtering door is metal, long-time switch can cause the magnetron sputtering student to be hung down because of the weight of door, thereby does not reach the effect of sealing.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of magnetron sputtering door sag-resistant device simple in structure, easy to use.
For solving the problems of the technologies described above, the invention provides a kind of magnetron sputtering door sag-resistant device, this sag-resistant device is back-up block, back-up block inside has stepped hole, wherein the diameter of right ports is greater than the diameter of left hole, the back-up block upper surface has one section inclined-plane on the right side, and described inclined-plane tilts to the lower right corner, and the angle of inclination is 8～15 degree.
For the purpose of the concise description problem, below magnetron sputtering door sag-resistant device of the present invention is all abbreviated as this device.
During use, this device is fixed by bolts on the body of wall of magnetron sputtering chamber, bolt head is positioned at right ports, the thread segment of bolt is positioned at the body of wall of magnetron sputtering chamber, and when closing the magnetron sputtering door, door lower end edge inclined-plane moves up, thereby make door return to the original position, reach sealing effectiveness.This device utilizes back-up block and bolt to bear the weight of magnetron sputtering door jointly, prevents that the magnetron sputtering student is vertical.
There is the step of protrusion upper end, described back-up block left side.When this device being installed on the body of wall of magnetron sputtering chamber, this step can carry on the boss of body of wall, thereby utilizes body of wall itself to reach the purpose that supports the magnetron sputtering door, can effectively alleviate the intensity that bolt is born, and prevents the life-time service bolt fracture.
The invention has the beneficial effects as follows: simple in structure, easy to use, utilize back-up block, bolt and body of wall to reach the purpose that supports the magnetron sputtering door jointly, prevent that effectively the magnetron sputtering student is vertical, thereby guarantee a tightness of shutting the back magnetron sputtering chamber.
Description of drawings
Fig. 1 is the front view of this device.
Fig. 2 is the A-A sectional view of Fig. 1.
Fig. 3 is the use view with this device.
Fig. 4 is the M portion enlarged view of Fig. 3.
Embodiment
Further specify the present invention below in conjunction with accompanying drawing and by preferred forms:
Magnetron sputtering door sag-resistant device, as depicted in figs. 1 and 2, this sag-resistant device is back-up block 1, described back-up block 1 inside has stepped hole, wherein the diameter of right ports 13 is greater than the diameter of left hole 12, and back-up block 1 upper surface has one section inclined-plane 11 on the right side, and inclined-plane 11 tilts to the lower right corner, the angle of inclination is 10 degree, and there is the step 14 of protrusion upper end, back-up block 1 left side.
During use, be fixed on this device on the body of wall b of magnetron sputtering chamber with bolt 2, bolt head is positioned at right ports 13, and the diameter of bolt head is greater than the diameter of left hole 12, and the thread segment of bolt is positioned at the body of wall b of magnetron sputtering chamber, step 14 carries on the boss c of body of wall b, as shown in Figure 3 and Figure 4, when closing magnetron sputtering door a, door a lower end edge inclined-plane 11 moves up, thereby make an a return to the original position, reach sealing effectiveness.This apparatus structure is simple, and is easy to use, utilizes the boss c of back-up block 1, bolt 2 and body of wall b to reach the purpose that supports magnetron sputtering door a jointly, prevents that effectively the magnetron sputtering student from hanging down, thereby guarantees that door closes the tightness of magnetron sputtering chamber behind a to the doorstep.
The above only is preferred forms of the present invention.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the principle of the invention, can also carry out some distortion or be equal to replacement technical scheme of the present invention, these also should be considered as belonging to protection scope of the present invention.
Claims (2)
1. magnetron sputtering door sag-resistant device, it is characterized in that: this sag-resistant device is back-up block, described back-up block inside has stepped hole, wherein the diameter of right ports is greater than the diameter of left hole, the back-up block upper surface has one section inclined-plane on the right side, described inclined-plane tilts to the lower right corner, and the angle of inclination is 8～15 degree.
2. magnetron sputtering door sag-resistant device as claimed in claim 1 is characterized in that: there is the step of protrusion upper end, back-up block left side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310318633.2A CN103343325B (en) | 2013-07-26 | 2013-07-26 | Anti-sagging device for magnetron sputtering door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310318633.2A CN103343325B (en) | 2013-07-26 | 2013-07-26 | Anti-sagging device for magnetron sputtering door |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103343325A true CN103343325A (en) | 2013-10-09 |
| CN103343325B CN103343325B (en) | 2015-01-21 |
Family
ID=49278150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310318633.2A Active CN103343325B (en) | 2013-07-26 | 2013-07-26 | Anti-sagging device for magnetron sputtering door |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103343325B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200992571Y (en) * | 2006-09-11 | 2007-12-19 | 柏腾科技股份有限公司 | Non-time-delay continuous vacuum process equipment |
| CN103109344A (en) * | 2010-07-09 | 2013-05-15 | Oc欧瑞康巴尔斯公司 | Magnetron sputtering apparatus |
| CN203360561U (en) * | 2013-07-26 | 2013-12-25 | 蚌埠雷诺真空技术有限公司 | Drooping-prevention device of magnetron sputtering door |
-
2013
- 2013-07-26 CN CN201310318633.2A patent/CN103343325B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200992571Y (en) * | 2006-09-11 | 2007-12-19 | 柏腾科技股份有限公司 | Non-time-delay continuous vacuum process equipment |
| CN103109344A (en) * | 2010-07-09 | 2013-05-15 | Oc欧瑞康巴尔斯公司 | Magnetron sputtering apparatus |
| US20130180850A1 (en) * | 2010-07-09 | 2013-07-18 | Oc Oerlikon Balzers Ag | Magnetron sputtering apparatus |
| CN203360561U (en) * | 2013-07-26 | 2013-12-25 | 蚌埠雷诺真空技术有限公司 | Drooping-prevention device of magnetron sputtering door |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103343325B (en) | 2015-01-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203360561U (en) | Drooping-prevention device of magnetron sputtering door | |
| CN206342829U (en) | A kind of fire-fighting equipment steel cylinder bracket | |
| CN103343325A (en) | Anti-sagging device for magnetron sputtering door | |
| CN102926622A (en) | Automatic outer horizontal sliding round window | |
| KR20160054366A (en) | fire rated window unit | |
| CN102967109A (en) | Structure for preventing refrigerator door from sagging | |
| CN205846479U (en) | A kind of electric power distributing cabinet with anti-electricity-theft device | |
| CN203783437U (en) | Fire resisting shutter guide groove device | |
| CN102383692A (en) | Door middle cross structure of ground spring door | |
| CN204360090U (en) | A kind of concealed projection screen | |
| CN203915844U (en) | Station is discharged in a kind of carbon-dioxide fire engine remote control peculiar to vessel | |
| CN203915843U (en) | Station arrangement is discharged in carbon-dioxide fire engine remote control peculiar to vessel | |
| CN203722084U (en) | Positive-voltage-type anti-explosion power distribution cabinet high in safety protection performance | |
| MY192432A (en) | Beverage supply device and door structure | |
| CN207301044U (en) | A kind of water quality biological toxicity on-line computing model babinet | |
| CN104405245B (en) | A kind of door-plate of interior band interlayer board device | |
| CN204614096U (en) | Multi-media display and automatic vending machine | |
| CN216565802U (en) | PLC cabinet for power control of industrial equipment | |
| CN204106903U (en) | A kind of Extinguisher case | |
| CN202990725U (en) | Automatic outwards-horizontal-sliding circular window | |
| WO2015051277A3 (en) | Method and apparatus to produce high density overcoats | |
| CN208432653U (en) | A kind of digital certificate batch meter with defencive function | |
| CN204460918U (en) | Refrigerator lamp box cover | |
| CN204352424U (en) | The structure of outdoor plain brick wall concealed installation fire hydrant box | |
| CN203722089U (en) | Temporary variable comprehensive distribution box |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |