CN103342331A - 一种硅微并联五杆机构 - Google Patents
一种硅微并联五杆机构 Download PDFInfo
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- CN103342331A CN103342331A CN2013102441822A CN201310244182A CN103342331A CN 103342331 A CN103342331 A CN 103342331A CN 2013102441822 A CN2013102441822 A CN 2013102441822A CN 201310244182 A CN201310244182 A CN 201310244182A CN 103342331 A CN103342331 A CN 103342331A
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 64
- 239000010703 silicon Substances 0.000 title claims abstract description 64
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 230000033001 locomotion Effects 0.000 claims abstract description 15
- 238000005485 electric heating Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000005516 engineering process Methods 0.000 abstract description 9
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 230000000712 assembly Effects 0.000 abstract 3
- 238000000429 assembly Methods 0.000 abstract 3
- 238000005459 micromachining Methods 0.000 abstract 1
- 150000003376 silicon Chemical class 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
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CN103342331A true CN103342331A (zh) | 2013-10-09 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104538544A (zh) * | 2015-01-15 | 2015-04-22 | 中国科学技术大学 | 一种电热致动器及其形成方法 |
CN107628587A (zh) * | 2017-09-21 | 2018-01-26 | 中国传媒大学 | 一种多级电热驱动大位移大转角mems执行器及其制造方法 |
CN111486207A (zh) * | 2020-04-26 | 2020-08-04 | 兰州城市学院 | 一种硅微六杆增力机构 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1733592A (zh) * | 2004-08-12 | 2006-02-15 | 大连理工大学 | 一种柔性电热驱动微夹钳 |
CN101269489A (zh) * | 2008-04-22 | 2008-09-24 | 大连理工大学 | 一种柔性结构电热驱动镍微夹钳 |
CN101286714A (zh) * | 2008-05-22 | 2008-10-15 | 上海交通大学 | V型梁复合材料电热微驱动器 |
CN101693366A (zh) * | 2009-06-11 | 2010-04-14 | 哈尔滨工业大学深圳研究生院 | 一种五自由度并联机器人机构 |
JP4451736B2 (ja) * | 2004-07-16 | 2010-04-14 | シャープ株式会社 | マイクロ共振装置、マイクロフィルタ装置、マイクロ発振器および無線通信機器 |
CN101717063A (zh) * | 2009-11-19 | 2010-06-02 | 大连理工大学 | 一种拓扑优化柔性微夹钳 |
CN202241279U (zh) * | 2011-09-22 | 2012-05-30 | 广西大学 | 一种含5r闭环子链的两自由度并联机构 |
CN102882307A (zh) * | 2012-09-06 | 2013-01-16 | 上海大学 | 基于凸轮机构的可调输出位移的直线微马达 |
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- 2013-06-20 CN CN201310244182.2A patent/CN103342331B/zh not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4451736B2 (ja) * | 2004-07-16 | 2010-04-14 | シャープ株式会社 | マイクロ共振装置、マイクロフィルタ装置、マイクロ発振器および無線通信機器 |
CN1733592A (zh) * | 2004-08-12 | 2006-02-15 | 大连理工大学 | 一种柔性电热驱动微夹钳 |
CN101269489A (zh) * | 2008-04-22 | 2008-09-24 | 大连理工大学 | 一种柔性结构电热驱动镍微夹钳 |
CN101286714A (zh) * | 2008-05-22 | 2008-10-15 | 上海交通大学 | V型梁复合材料电热微驱动器 |
CN101693366A (zh) * | 2009-06-11 | 2010-04-14 | 哈尔滨工业大学深圳研究生院 | 一种五自由度并联机器人机构 |
CN101717063A (zh) * | 2009-11-19 | 2010-06-02 | 大连理工大学 | 一种拓扑优化柔性微夹钳 |
CN202241279U (zh) * | 2011-09-22 | 2012-05-30 | 广西大学 | 一种含5r闭环子链的两自由度并联机构 |
CN102882307A (zh) * | 2012-09-06 | 2013-01-16 | 上海大学 | 基于凸轮机构的可调输出位移的直线微马达 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104538544A (zh) * | 2015-01-15 | 2015-04-22 | 中国科学技术大学 | 一种电热致动器及其形成方法 |
CN104538544B (zh) * | 2015-01-15 | 2017-03-01 | 中国科学技术大学 | 一种电热致动器及其形成方法 |
CN107628587A (zh) * | 2017-09-21 | 2018-01-26 | 中国传媒大学 | 一种多级电热驱动大位移大转角mems执行器及其制造方法 |
CN111486207A (zh) * | 2020-04-26 | 2020-08-04 | 兰州城市学院 | 一种硅微六杆增力机构 |
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CN103342331B (zh) | 2017-02-08 |
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Effective date of registration: 20181030 Address after: 450000 7, B District, 7 Dong Qing Street, Zhengzhou high tech Industrial Development Zone, Henan Patentee after: ZHENGZHOU ZHUOCHUANG INCUBATION TECHNOLOGY SERVICE Co.,Ltd. Address before: 450007 Henan University of Technology, 195 Zhongyuan West Road, Zhengzhou, Henan Patentee before: He'nan University of Technology |
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Effective date of registration: 20181218 Address after: Room 706, No. 7 B Dongqing Street, Zhengzhou High-tech Industrial Development Zone, Henan Province Patentee after: ZHENGZHOU YUNTU XINGCHUANG AGRICULTURAL TECHNOLOGY SERVICE Co.,Ltd. Address before: 450000 7, B District, 7 Dong Qing Street, Zhengzhou high tech Industrial Development Zone, Henan Patentee before: ZHENGZHOU ZHUOCHUANG INCUBATION TECHNOLOGY SERVICE Co.,Ltd. |
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Effective date of registration: 20210806 Address after: 201400 floor 1-2, No.7 Lane 1088, Mingcheng Road, Fengxian District, Shanghai Patentee after: Jinhongyu (Shanghai) Technology Co.,Ltd. Address before: Room 706, No. 7 B Dongqing Street, Zhengzhou High-tech Industrial Development Zone, Henan Province Patentee before: ZHENGZHOU YUNTU XINGCHUANG AGRICULTURAL TECHNOLOGY SERVICE Co.,Ltd. |
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