CN103337434B - Electronic generator, its manufacture method and its testing apparatus - Google Patents
Electronic generator, its manufacture method and its testing apparatus Download PDFInfo
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- CN103337434B CN103337434B CN201210121248.4A CN201210121248A CN103337434B CN 103337434 B CN103337434 B CN 103337434B CN 201210121248 A CN201210121248 A CN 201210121248A CN 103337434 B CN103337434 B CN 103337434B
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Abstract
The invention discloses a kind of electronic generator, its manufacture method and testing apparatus thereof, described electronic generator comprises: base, the first and second support bars, fixing glue and filament, described manufacture method comprises the following steps: step S10, and coiling filament makes filament have spire; Step S20, makes described first and second support bars be connected with described base respectively by described fixing glue and described first and second support bars are non-intersect; Step S30, makes the two ends of described filament be connected with described first and second support bars respectively.According to the embodiment of the present invention for mass spectrometric low power dissipation electron generator, can work under low energy consumption, energy savings, reduces costs.And the filament with spire can better concentrate heat, improves the efficiency of filament emission electronics, reduces filament preheating time, improves the performance of filament.In addition, fixing glue can improve the stability that filament is installed, and filament is stablized and is arranged on base.
Description
Technical field
The present invention relates to mass spectrometer manufacture technology field, particularly a kind of testing apparatus for mass spectrometric low power dissipation electron generator, its manufacture method and this electronic generator.
Background technology
According to thermionic emission effect (also known as Edison effect), at room temperature, metal surface only has the kinetic energy of minute quantity electronics to exceed work function, and the electronics of effusion is very little.General when metal temperature rises to a certain degree, the number of electrons that kinetic energy exceedes work function has and increases, and a large amount of electronics is overflowed by metal.EI source is suitable for filament according to this principle work.First, filament two ends need by certain big current, the power that autophage is certain; Secondly, filament will produce heat after powered up, and temperature raises.Electrical current is larger, and the power of autophage is larger, and temperature is higher, when temperature acquires a certain degree (general more than 2000 DEG C), starts outside electron emission.The filament power consumption in the EI source of prior art is high, can not play energy-conservation effect.
Summary of the invention
The present invention is intended at least one of solve the problems of the technologies described above.
For this reason, one object of the present invention is to propose a kind of low in energy consumption and manufacture method for mass spectrometric low power dissipation electron generator that electron emission efficiency is high.
Another object of the present invention is to propose a kind of electronic generator adopting above-mentioned manufacture method obtained.
Another object of the present invention is the testing apparatus proposing the electronic generator adopting this manufacture method to obtain.
According to the manufacture method for mass spectrometric low power dissipation electron generator of the embodiment of the present invention, described electronic generator comprises: base, the first and second support bars, fixing glue and filament.Comprise the following steps: step S10, filament described in coiling makes described filament have spire; Step S20, makes described first and second support bars be connected with described base respectively by described fixing glue and described first and second support bars are non-intersect; Step S30, makes the two ends of described filament be connected with described first and second support bars respectively.
According to the manufacture method for mass spectrometric low power dissipation electron generator of the embodiment of the present invention, filament has spire, and the first support bar is connected with base respectively by fixing glue with the second support bar.Thus, the resistance with the filament of spire is larger.Make the power of filament less, filament can be worked under low energy consumption, and energy savings, reduces costs.And the filament with spire can better concentrate heat, improves the efficiency of filament emission electronics, reduces filament preheating time, improves the performance of filament.In addition, fixing glue can improve the stability that filament is installed, and filament is stablized and is arranged on base.
In addition, the manufacture method for mass spectrometric low power dissipation electron generator according to the above embodiment of the present invention, can also have following additional technical characteristic:
Manufacture method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention, described step S10 comprises: step S101, chooses the filament with predetermined length and the first predetermined diameter; Step S102, selects the column with the second predetermined diameter, and be wrapped in by filament in described column and make described filament have spire and the first and second connecting portions, wherein, described spire has predetermined pitch and the number of turns; Step S103, takes out described column.
Manufacture method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention, described step S20 comprises: step S201, makes described base has axis and is parallel to each other and the first and second installing holes spaced a predetermined distance; Step S202, installs described first and second support bars respectively and described first and second support bars is parallel to each other in described first and second installing holes; Step S203, arranges described fixing glue to fix described first and second support bars on described base between described first installing hole and described first support bar and between described second installing hole and described second support bar; Step S204, cools after the sub-assembly of described base, fixing glue and the first and second support bars is heated the scheduled time at a predetermined temperature.
Manufacture method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention, described electronic generator also comprises the catch with opening, before carrying out step S30, also have step S40: on the described first or second support bar, install described catch.
Manufacture method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention, described step S40 comprises: step S401, make the first end of described catch be welded on described first and support upper and described catch and described second support bar spaced a predetermined distance, wherein, the opening of described catch is between described first and second support bars; Step S402, cleans described electronic generator and dries.
Manufacture method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention, described step S30 comprises: step S301, the first and second connecting portions of described filament is connected respectively and the opening of the spire of described filament and described catch is corresponding with described first and second support bars; Step S302, welds described filament and the first and second connecting portions of described filament is welded on described first and second support bars respectively.
Manufacture method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention, described fixing glue is glue, described base is ceramic base and described filament is rhenium tungsten filament, and described first and second support bars and described catch are stainless steel material and make.
According to the electronic generator of the embodiment of the present invention, be adopt obtained by the manufacture method for mass spectrometric low power dissipation electron generator according to the above embodiment of the present invention.
According to the testing apparatus for mass spectrometric low power dissipation electron generator of the embodiment of the present invention, comprising: electronic generator according to the above embodiment of the present invention; First power supply, the two ends of described first power supply are connected with the first and second support bars of described electronic generator respectively; Second source, one end of described second source is connected with the first or second support bar of described electronic generator; Receive filament; Ammeter; 3rd power supply, wherein, the first end of described ammeter is connected with the first end of described reception filament and the second end is connected with the first end of described 3rd power supply, the second end ground connection of described 3rd power supply; And vacuum chamber, described electronic generator and described reception filament are oppositely disposed in described vacuum chamber.
According to the testing apparatus for mass spectrometric low power dissipation electron generator of the embodiment of the present invention, first power supply makes electronic generator produce electronics, second source makes electronic generator and receives between filament to have higher potential difference, so that the electronics that electronic generator produces moves to reception filament.3rd power supply makes device reaction sensitive, and result is precise and stable.Structure is simple, easy to operate.
Testing apparatus for mass spectrometric low power dissipation electron generator according to an embodiment of the invention, described first power supply is adjustable direct voltage source, and described second source is-70V voltage source.
Additional aspect of the present invention and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become obvious and easy understand from accompanying drawing below combining to the description of embodiment, wherein:
Fig. 1 is the schematic diagram for mass spectrometric low power dissipation electron generator according to an embodiment of the invention;
Fig. 2 is the schematic diagram of the filament for mass spectrometric low power dissipation electron generator in Fig. 1;
Fig. 3 is the schematic diagram of the sub-assembly of the base for mass spectrometric low power dissipation electron generator, fixing glue and the first and second support bars in Fig. 1;
Fig. 4 is the schematic diagram for mass spectrometric low power dissipation electron generator according to another embodiment of the present invention;
Fig. 5 is the flow chart of the manufacture method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention;
Fig. 6 is the flow chart of the step S10 of the affected method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention;
Fig. 7 is the flow chart of the step S20 of the manufacture method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention;
Fig. 8 is the flow chart of the step S40 of the manufacture method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention;
Fig. 9 is the flow chart of the step S30 of the manufacture method for mass spectrometric low power dissipation electron generator according to an embodiment of the invention;
Figure 10 is the schematic diagram for the testing apparatus for mass spectrometric low power dissipation electron generator according to an embodiment of the invention;
Figure 11 is that the power-electron stream for mass spectrometric low power dissipation electron generator and existing electronic generator according to an embodiment of the invention contrasts schematic diagram; With
Figure 12 is that the resistance-electron stream for mass spectrometric low power dissipation electron generator and existing electronic generator according to an embodiment of the invention contrasts schematic diagram.
Embodiment
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not limitation of the present invention being interpreted as.
In describing the invention, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", orientation or the position relationship of the instruction such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore limitation of the present invention can not be interpreted as.
In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance.
In describing the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, connect integratedly, also can be removably connect; Can be mechanical connection or electrical connection, also can be the connection of two element internals; Can be directly be connected, also indirectly can be connected by intermediary, for the ordinary skill in the art, the concrete meaning of above-mentioned term can be understood as the case may be.
Simply describe according to of the present invention for mass spectrometric low power dissipation electron generator with reference to the accompanying drawings.
As Figure 1-4, according to of the present invention for mass spectrometric low power dissipation electron generator, comprising: base 10, first support bar 21, second support bar 22, fixing glue 30 and filament 40.
Specifically, the first support bar 21 and the second support bar 22 respectively along the vertical direction (namely upper and lower direction) be as shown in Figure 1 arranged on base 10, the first support bar 21 and the second support bar 22 interval on base 10 is arranged.
Fixing glue 30 is equipped with, to improve the first support bar 21 and the stability between the second support bar 22 and base 10 between first support bar 21 and base 10 and between the second support bar 22 and base 10.
The first end of filament 40 (namely as shown in Figure 1 one end) is left connected with described first support bar 21, and the second end of filament 40 (namely as shown in Figure 1 one end) is to the right connected with described second support bar 22.
Describe the manufacture method for mass spectrometric low power dissipation electron generator according to the embodiment of the present invention with reference to the accompanying drawings in detail.
As shown in figures 5-9, according to the manufacture method for mass spectrometric low power dissipation electron generator of the embodiment of the present invention, comprise the following steps.
Step S10, coiling filament 40 makes filament 40 have spire 41.Specifically, as shown in Figure 6, the filament 40 of predetermined length and the first predetermined diameter is chosen.Select the column of the second predetermined diameter, be wrapped in by filament 40 in column and make filament have spire 41 and the first connecting portion 42 and the second connecting portion 43, wherein, spire 41 has predetermined pitch and the number of turns.Take out column.There is the filament 40 of spire 41 as described in Figure 2.
Step S20, makes the first support bar 21 be connected with base 10 respectively by fixing glue 30 with the second support bar 22, the first support bar 21 and the second support bar 22 non-intersect.Specifically, as shown in Figure 7, make base 10 has axis to be parallel to each other and the first installing hole spaced a predetermined distance and the second installing hole.First support bar 21 is installed in the first installing hole, the second support bar 22 is installed in the second installing hole, the first support bar 21 and the second support bar 22 are parallel to each other.Fixing glue 30 is provided with, to fix the first support bar 21 and the second support bar 22 on base 10 between the first installing hole and the first support bar 21 and between the second installing hole and the second support bar 22.Cool after the sub-assembly of base 10, fixing glue 30, first support bar 21 and the second support bar 22 is heated the scheduled time at a predetermined temperature, be illustrated in figure 3 the schematic diagram of the sub-assembly that base 10, fixing glue 30, first support bar 21 and the second support bar 22 are combined into.
According to one embodiment of present invention, can also comprise catch 50, as shown in Figure 4, catch 50 is connected with the first support bar 21 or the second support bar 22, and is connected with the second support bar 22 with the first support bar 21 when catch 50 is different.Catch 50 has opening, and opening is corresponding with filament 40 to make electronics launch along the outward opening of catch 50.Thus, before carrying out step S30, also there is step S40.
Step S40, the first support bar 21 or the second support bar 22 install catch 50.Specifically, as shown in Figure 8, the first end of catch 50 is welded on described first support bar 21, and catch 50 and the second support bar 22 are spaced a predetermined distance, wherein, the opening of catch 50 is between the first support bar 21 and the second support bar 22.Cleaning electronic generator is also dried
Step S30, makes the two ends of filament 40 be connected with the second support bar 22 with the first support bar 21 respectively.Specifically, as shown in Figure 9, the first connecting portion 42 of filament 40 is connected with the first support bar 21, and the second connecting portion 43 of filament 40 is connected with the second support bar 22, and the spire 41 of filament 40 is corresponding with the opening of catch 50.Welding filament 40 makes the first connecting portion 42 of filament 40 be welded on the first support bar 21, and the second connecting portion 43 points is welded on the second support bar 22.Be illustrated in figure 4 the schematic diagram for mass spectrometric low power dissipation electron generator completed.
According to one embodiment of present invention, fixing glue 30 is glue, and base 10 is ceramic base, and filament 40 is rhenium tungsten filament, and the first support bar 21 and the second support bar 22 and catch 50 are stainless steel material and make.Thus, electronic generator according to the present invention is made to have insulation and resistance to elevated temperatures preferably.
According to the manufacture method for mass spectrometric low power dissipation electron generator of a specific embodiment of the present invention, comprise the following steps:
1, coiling filament 40 makes it have spire 41.Filament 40 and a diameter of choosing predetermined length are the draw point of 1mm, by clockwise or counterclockwise filament 40 is wrapped on draw point, make filament have spire 41 and the first connecting portion 42 and the second connecting portion 43, wherein, the spire 41 of filament 40 has predetermined pitch and the number of turns.According to formula P=U
2/ R, when U (voltage) is identical, R (resistance) is larger, and P (power) is less.Known, when resistance increases, consumed power will reduce.The filament 40 with spire 41 can improve the resistance of filament 40, better can concentrate heat simultaneously, improves the efficiency of filament.
2, the sub-assembly be made up of base 10, first support bar 21, second support bar 22 and fixing glue is made.By fixing glue 30, first support bar 21 and the second support bar 22 are fixed on base 10, make the first support bar 21 vertical with base 10 respectively with the second support bar 22, and the first support bar 21 and the second support bar 22 upper end (namely as shown in Figure 1 one end) are upwards concordant.After sub-assembly installation, place it in 12-24 hour under room temperature condition, then, be placed on heated baking more than 12 hours under 150 DEG C of hot conditionss, and Slow cooling, solidify preferably to make fixing glue 30.
3, catch 50 with opening is installed.After sub-assembly completes, catch 50 is installed, the upper surface of catch 50 is flushed (as shown in Figure 1) with the upper end of the first support bar 21 and the second support bar 22, ensures that the geometric center of the opening of catch 50 is alignd with the geometric center of the first support bar 21 and the second support bar 22.First support bar 21 welds catch 50, and makes catch 50 and the second support bar 22 spaced a predetermined distance.Electronic generator electric welding completed, puts it in ultrasonic cleaning pond and cleans 1 hour, and dry under being placed in the high temperature of predetermined temperature.
4, the filament with spire is installed.Be welded on the first support bar 21 by the first connecting portion 42 of filament, the second connecting portion 43 is welded on the second support bar 22.And make the spire 41 of filament concordant with the opening of catch 50, make the center of the opening of the corresponding catch 50 of the spire 41 of filament 40.
Describe in detail with reference to the accompanying drawings according to the embodiment of the present invention for the checkout gear for mass spectrometric low power dissipation electron generator.
As shown in Figure 10, according to the testing apparatus for mass spectrometric low power dissipation electron generator of the embodiment of the present invention, comprising: electronic generator A, the first power supply B, second source C, receive filament D, ammeter E, the 3rd power supply F and vacuum chamber G.
Specifically, electronic generator A for according to previous embodiment of the present invention for mass spectrometric low power dissipation electron generator manufacture method obtained by electronic generator.
The two ends of the first power supply B are connected with the second support bar 22 with first support bar 21 of electronic generator A respectively.In other words, the positive pole of the first power supply B is connected with first support bar 21 of electronic generator A, and the negative pole of the first power supply B is connected with second support bar 22 of electronic generator A.Or the positive pole of the first power supply B is connected with second support bar 22 of electronic generator A, the negative pole of the first power supply B is connected with first support bar 21 of electronic generator A.
One end of second source C is connected with first support bar 21 of electronic generator A or the second support bar 22.That is, the output of second source C is connected with first support bar 21 of electronic generator A, or the output of second source C is connected with second support bar 22 of electronic generator A.
The first end of ammeter E (namely as shown in Figure 10 one end) is upwards connected with the first end receiving filament D, and second end of ammeter E (namely downward as shown in Figure 10 one end) is connected with the first end of the 3rd power supply F, the second end ground connection of the 3rd power supply F.In other words, the positive pole of the 3rd power supply F is connected with the input of ammeter E, the minus earth of the 3rd power supply F, and the output of ammeter E is connected with the first end receiving filament D.The first end of wherein said reception filament refers to: the left end of reception filament D as shown in Figure 10 or right-hand member.
Electronic generator A is oppositely disposed in vacuum chamber G with reception filament D.
According to the embodiment of the present invention for the testing apparatus for mass spectrometric low power dissipation electron generator, first power supply B makes electronic generator A produce electronics, second source C makes electronic generator A and receives between filament D to have higher potential difference, so that the electronics that electronic generator A produces moves to receive filament D.3rd power supply F makes device reaction sensitive, and result is precise and stable.Structure is simple, easy to operate.
According to one embodiment of present invention, the first power supply B is adjustable direct voltage source, and second source F is-70V voltage source.Thus, the amount of electrons that the adjustable electronic generator A of the first power supply B produces, so that repeated detection.Second source F makes electronic generator A and receives between filament D to have higher potential difference, is convenient to the electron emission extremely reception filament D that electronic generator A produces.
Simply describe according to the course of work for the checkout gear for mass spectrometric low power dissipation electron generator of the present invention with reference to the accompanying drawings.
Electronic generator A and reception filament D is placed in 10
-7-10
-6in the vacuum chamber G of mbar.Regulate second source C to make it provide the voltage of-70V to electronic generator A, make electronic generator A and receive between filament D to have higher potential difference, the electronics being convenient to electronic generator A generation moves to from electronic generator A and receives filament D.Regulate the first power supply B, when the flowing across electric current and acquire a certain degree of electronic generator A, electronic generator A starts outside electron emission.Under the effect of second source, the electronics that electronic generator A launches moves to and receives filament D.Electron stream will be produced between 3rd power supply E and reception filament D.Now, the size of electron stream can be read by ammeter E.Regulate the first power supply B can draw the electron stream of different size.Regulate the first power supply B to make electronic generator A have different voltage and currents, calculate electronic generator A consumed power in varied situations.
Figure 11 is that the power-electron stream for mass spectrometric low power dissipation electron generator and existing electronic generator according to an embodiment of the invention contrasts schematic diagram.Wherein, X is the power-electron stream schematic diagram of existing electronic generator, and Y is the power for mass spectrometric low power dissipation electron generator according to an embodiment of the invention-electron stream schematic diagram.
Figure 12 is that the resistance-electron stream for mass spectrometric low power dissipation electron generator and existing electronic generator according to an embodiment of the invention contrasts schematic diagram.Wherein, Z is the resistance-electron stream schematic diagram of existing electronic generator, and W is the resistance for mass spectrometric low power dissipation electron generator according to an embodiment of the invention-electron stream schematic diagram.
As in Figure 11 and 12, diagram P is power, and diagram R is resistance, and diagram E is electron stream.This is understandable for those of ordinary skill in the art.
Obviously can be drawn by accompanying drawing 11 and 12: when producing identical electron stream, be less than the power consumption of the electronic generator than prior art according to the power consumption of electronic generator of the present invention.Energy savings, reduces costs.This is understandable for those of ordinary skill in the art.
In the description of this specification, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present invention or example.In this manual, identical embodiment or example are not necessarily referred to the schematic representation of above-mentioned term.And the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.
Although illustrate and describe embodiments of the invention, those having ordinary skill in the art will appreciate that: can carry out multiple change, amendment, replacement and modification to these embodiments when not departing from principle of the present invention and aim, scope of the present invention is by claim and equivalents thereof.
Claims (8)
1. for a manufacture method for mass spectrometric low power dissipation electron generator, described electronic generator comprises: base, the first and second support bars, and fixing glue and filament, is characterized in that, comprises the following steps:
Step S10, filament described in coiling makes described filament have spire;
Step S20, makes described first and second support bars be connected with described base respectively by described fixing glue and described first and second support bars are non-intersect;
Step S30, makes the two ends of described filament be connected with described first and second support bars respectively;
Described electronic generator also comprises the catch with opening, before carrying out step S30, also have step S40: on the described first or second support bar, install described catch;
Wherein, described step S30 comprises:
Step S301, makes the first and second connecting portions of described filament be connected with described first and second support bars respectively and the opening of the spire of described filament and described catch is corresponding;
Step S302, welds described filament and the first and second connecting portions of described filament is welded on described first and second support bars respectively.
2. the manufacture method for mass spectrometric low power dissipation electron generator according to claim 1, it is characterized in that, described step S10 comprises:
Step S101, chooses the filament with predetermined length and the first predetermined diameter;
Step S102, selects the column with the second predetermined diameter, and be wrapped in by filament in described column and make described filament have spire and the first and second connecting portions, wherein, described spire has predetermined pitch and the number of turns;
Step S103, takes out described column.
3. the manufacture method for mass spectrometric low power dissipation electron generator according to claim 2, it is characterized in that, described step S20 comprises:
Step S201, makes described base has axis and is parallel to each other and the first and second installing holes spaced a predetermined distance;
Step S202, installs described first and second support bars respectively and described first and second support bars is parallel to each other in described first and second installing holes;
Step S203, arranges described fixing glue to fix described first and second support bars on described base between described first installing hole and described first support bar and between described second installing hole and described second support bar;
Step S204, cools after the sub-assembly of described base, fixing glue and the first and second support bars is heated the scheduled time at a predetermined temperature.
4. the manufacture method for mass spectrometric low power dissipation electron generator according to claim 3, it is characterized in that, described step S40 comprises:
Step S401, the first end of described catch is welded on described first support bar and described catch and described second support bar spaced a predetermined distance, wherein, the opening of described catch is between described first and second support bars;
Step S402, cleans described electronic generator and dries.
5. the manufacture method for mass spectrometric low power dissipation electron generator according to claim 4, it is characterized in that, described fixing glue is glue, and described base is ceramic base and described filament is rhenium tungsten filament, and described first and second support bars and described catch are stainless steel material and make.
6. one kind adopt according to any one of claim 1-5 for mass spectrometric low power dissipation electron generator manufacture method obtained by electronic generator.
7., for a testing apparatus for mass spectrometric low power dissipation electron generator, it is characterized in that, comprising:
Electronic generator according to claim 6;
First power supply, the two ends of described first power supply are connected with the first and second support bars of described electronic generator respectively;
Second source, one end of described second source is connected with the first or second support bar of described electronic generator;
Receive filament;
Ammeter;
3rd power supply,
Wherein, the first end of described ammeter is connected with the first end of described reception filament and the second end is connected with the first end of described 3rd power supply, the second end ground connection of described 3rd power supply; With
Vacuum chamber, described electronic generator and described reception filament are oppositely disposed in described vacuum chamber.
8. the testing apparatus for mass spectrometric low power dissipation electron generator according to claim 7, is characterized in that, described first power supply is adjustable direct voltage source, and described second source is-70V voltage source.
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