CN103317438B - Dynamic pressure floats off polishing disk dynamic pressure and floats off position accurate adjusting mechanism - Google Patents
Dynamic pressure floats off polishing disk dynamic pressure and floats off position accurate adjusting mechanism Download PDFInfo
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- CN103317438B CN103317438B CN201310247261.9A CN201310247261A CN103317438B CN 103317438 B CN103317438 B CN 103317438B CN 201310247261 A CN201310247261 A CN 201310247261A CN 103317438 B CN103317438 B CN 103317438B
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- shaft
- dynamic pressure
- floats
- shaft sleeve
- briquetting
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- 238000005498 polishing Methods 0.000 title claims abstract description 33
- 230000007246 mechanism Effects 0.000 title claims abstract description 18
- 238000007667 floating Methods 0.000 abstract description 8
- 230000008859 change Effects 0.000 abstract description 6
- 230000001737 promoting effect Effects 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A kind of dynamic pressure floats off polishing disk dynamic pressure and floats off position accurate adjusting mechanism, polishing disk is connected with main shaft lower end, guiding mechanism comprises frame, Jiggled device, L briquetting, limit shaft sleeve and spring, motor shaft is through the through hole of L briquetting, conflict in the top of L briquetting and thrust ball bearing, thrust ball bearing is sleeved on outside motor shaft, and thrust ball bearing bottom is arranged on the inwall of limit shaft sleeve, the bottom of motor shaft is positioned at limit shaft sleeve, motor shaft can be connected by key up or down with limit shaft sleeve, the bottom of limit shaft sleeve is positioned at splined shaft, limit shaft sleeve can be connected by key up or down with splined shaft, main shaft upper end is arranged in splined shaft, pocketed springs in splined shaft, the upper end of spring withstands on the lower end of limit shaft sleeve, the lower end of spring withstands on main shaft, L briquetting is connected with the motion end of Jiggled device, and Jiggled device, splined shaft are installed in frame.The present invention effectively avoids floating off positional cycle influence of change, promoting polishing precision.
Description
Technical field
The present invention relates to lapping device field, especially a kind of dynamic pressure floats off polishing disk.
Background technology
Dynamic pressure floats off the one that polishing is noncontact polishing.Plane noncontact burnishing device operation principle is: when the disk being along the circumferential direction shaped with several clinoplains rotates in a liquid, Hydrodynamic (Hydrodynamic Thrust Bearings operation principle) is produced by liquid wedge, make the workpiece in retaining ring float off disc surfaces, by the powder particle in flying height, polishing is carried out to workpiece.Without frictional heat and tool wear in process, standard flat can not change, and therefore, can repeat to obtain accurate surface of the work.The method is mainly used in the polishing of semiconductor chip and various ceramic material and optical glass optical flat, can carry out multi-disc processing simultaneously.Process 3 in this way " diameter silicon chip can obtain the flatness of 0.3 μm and the surface roughness of Ra1nm.
The Hydrodynamic that liquid wedge produces on the one hand makes workpiece float off in disc surfaces, on the other hand, this pressure also can periodically and intermittence act on surface of the work.If this Hydrodynamic continuous action, workpiece will fluctuate (vibration) with certain frequency, that is the position that floats off of the relatively main abrasive disk of workpiece can constantly change, even there is certain wild effect, this will have a negative impact to the machining accuracy of surface of the work, also can reduce polishing efficiency.If workpiece is rigidly attached on guiding mechanism, so this floats and can produce rigid shock to junction, thus affects the service life of mechanism.
Floating off the defect of polishing mode in order to make up existing dynamic pressure, floating off position in order to enable workpiece relative to the dynamic pressure of polishing disk and stablizing, need to design self-adaptative adjustment mechanism on original device basic, thus meet above-mentioned requirements.
Summary of the invention
Floating off in polishing because floating off the deficiency of positional cycle influence of change to polishing precision to overcome dynamic pressure in prior art, the invention provides and a kind ofly effectively avoid the dynamic pressure floating off positional cycle influence of change, promote polishing precision to float off polishing disk dynamic pressure floating off position accurate adjusting mechanism.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of dynamic pressure floats off polishing disk dynamic pressure and floats off position accurate adjusting mechanism, described polishing disk is connected with main shaft lower end, described guiding mechanism comprises frame, Jiggled device, L briquetting, limit shaft sleeve and spring, motor shaft is through the through hole of described L briquetting, conflict in the top of described L briquetting and thrust ball bearing, described thrust ball bearing is sleeved on outside described motor shaft, and described thrust ball bearing bottom is arranged on the inwall of described limit shaft sleeve, the bottom of described motor shaft is positioned at described limit shaft sleeve, described motor shaft can be connected by key up or down with described limit shaft sleeve, the bottom of described limit shaft sleeve is positioned at splined shaft, described limit shaft sleeve can be connected by key up or down with described splined shaft, described main shaft upper end is arranged in described splined shaft, pocketed springs in described splined shaft, the upper end of described spring withstands on the lower end of described limit shaft sleeve, the lower end of described spring withstands on described main shaft, described L briquetting is connected with the motion end of described Jiggled device, and described Jiggled device, splined shaft are installed in frame.
Further, described splined shaft inwall is provided with step, and described main shaft upper end and described step maintain an equal level, and described main shaft upper end is connected with locking nut, is provided with stop washer between described locking nut and described step.
Beneficial effect of the present invention is mainly manifested in: effectively avoid floating off positional cycle influence of change, promoting polishing precision.
Accompanying drawing explanation
Fig. 1 is the schematic appearance that dynamic pressure floats off position accurate adjusting mechanism.
Fig. 2 is the structural representation that dynamic pressure floats off position accurate adjusting mechanism.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described.
See figures.1.and.2, a kind of dynamic pressure floats off polishing disk dynamic pressure and floats off position accurate adjusting mechanism, described polishing disk 1 is connected with main shaft 2 lower end, described guiding mechanism comprises frame, Jiggled device 11, L briquetting 10, limit shaft sleeve 4 and spring 8, motor shaft 5 is through the through hole of described L briquetting 10, described L briquetting 10 is conflicted with the top of thrust ball bearing 7, described thrust ball bearing 7 is sleeved on outside described motor shaft 5, and described thrust ball bearing 7 bottom is arranged on the inwall of described limit shaft sleeve 4, the bottom of described motor shaft 5 is positioned at described limit shaft sleeve 4, described motor shaft 5 can be connected by key up or down with described limit shaft sleeve 4, the bottom of described limit shaft sleeve 4 is positioned at splined shaft 3, described limit shaft sleeve 4 can be connected by key up or down with described splined shaft 3, described main shaft 2 upper end is arranged in described splined shaft 3, pocketed springs 8 in described splined shaft 3, the upper end of described spring 8 withstands on the lower end of described limit shaft sleeve 4, the lower end of described spring 8 withstands on described main shaft 2, described L briquetting 10 is connected with the motion end of described Jiggled device 11, and described Jiggled device 11, splined shaft 3 are installed in frame.
Further, described splined shaft 3 inwall is provided with step, and described main shaft 2 upper end and described step maintain an equal level, and described main shaft 2 upper end is connected with locking nut 9, is provided with stop washer between described locking nut 9 and described step.
Dynamic pressure floats off polishing: motor 6 drive motors axle 5, thus drives spacing sliding sleeve 4, splined shaft 3 and main shaft 2.Polishing disk is connected by shaft coupling with main shaft 2, so motor can drive polishing disk by each bindiny mechanism.
Polishing disk dynamic pressure floats off position precision adjustment: be provided with Jiggled device 11 on the side of device, described lifter has coarse adjustment and accurate adjustment two kinds of modes, it can drive L briquetting 7 to move up and down, thus can indirectly promote thrust ball bearing 7 and spacing sliding sleeve 4 moves up and down.Can distance between the spacing sliding sleeve 4 of Indirect method and locking nut 9 by above-mentioned motion mode, so, the spring be positioned at wherein will produce distortion in various degree, thus obtain the pretightning force of different size.This pretightning force can accurately obtain as required.When polishing disk is subject to the impact of wedge shape liquid, polishing disk 1 can drive main shaft 2 upwards to float.Because spring 8 has pretightning force, so spring can produce resistant function, absorb the energy of the vibration of polishing disk 1 and main shaft 2, and make their Quick-return to desirable initial position, ensure that polishing disk dynamic pressure floats off stablizing of position.
Claims (2)
1. a dynamic pressure floats off polishing disk dynamic pressure and floats off position accurate adjusting mechanism, described polishing disk is connected with main shaft lower end, it is characterized in that: described guiding mechanism comprises frame, Jiggled device, L briquetting, limit shaft sleeve and spring, motor shaft is through the through hole of described L briquetting, conflict in the top of described L briquetting and thrust ball bearing, described thrust ball bearing is sleeved on outside described motor shaft, and described thrust ball bearing bottom is arranged on the inwall of described limit shaft sleeve, the bottom of described motor shaft is positioned at described limit shaft sleeve, described motor shaft can be connected by key up or down with described limit shaft sleeve, the bottom of described limit shaft sleeve is positioned at splined shaft, described limit shaft sleeve can be connected by key up or down with described splined shaft, described main shaft upper end is arranged in described splined shaft, pocketed springs in described splined shaft, the upper end of described spring withstands on the lower end of described limit shaft sleeve, the lower end of described spring withstands on described main shaft, described L briquetting is connected with the motion end of described Jiggled device, and described Jiggled device, splined shaft are installed in frame.
2. dynamic pressure as claimed in claim 1 floats off polishing disk dynamic pressure and floats off position accurate adjusting mechanism, it is characterized in that: described splined shaft inwall is provided with step, described main shaft upper end and described step maintain an equal level, described main shaft upper end is connected with locking nut, is provided with stop washer between described locking nut and described step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310247261.9A CN103317438B (en) | 2013-06-18 | 2013-06-18 | Dynamic pressure floats off polishing disk dynamic pressure and floats off position accurate adjusting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310247261.9A CN103317438B (en) | 2013-06-18 | 2013-06-18 | Dynamic pressure floats off polishing disk dynamic pressure and floats off position accurate adjusting mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103317438A CN103317438A (en) | 2013-09-25 |
| CN103317438B true CN103317438B (en) | 2015-08-19 |
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| CN201310247261.9A Expired - Fee Related CN103317438B (en) | 2013-06-18 | 2013-06-18 | Dynamic pressure floats off polishing disk dynamic pressure and floats off position accurate adjusting mechanism |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105397573B (en) * | 2015-12-09 | 2017-08-18 | 浙江工业大学 | The pressure suspension polishing device that surges based on hydraulic mechanism |
| CN105382697B (en) * | 2015-12-09 | 2017-11-07 | 浙江工业大学 | A kind of detection method of hydraulic pressure, buoyancy and floating distance |
| CN111283549B (en) * | 2020-03-24 | 2024-07-09 | 中国工程物理研究院激光聚变研究中心 | Planetary disc type ball mill |
| CN114603461B (en) * | 2020-12-09 | 2023-04-11 | 中国科学院大连化学物理研究所 | Constant-force floating polishing device |
| CN112548832B (en) * | 2020-12-24 | 2022-12-20 | 义乌市子鱼创意设计有限公司 | Water block polishing device for automobile engine |
| CN112935996B (en) * | 2021-01-29 | 2023-05-26 | 江西宏信光学科技有限公司 | High-precision polishing machine for optical lenses and upper grinding device thereof |
| CN112959170B (en) * | 2021-01-29 | 2023-05-02 | 鹤山市嘉米基光电科技有限公司 | High-precision polishing machine for optical lenses, damping mechanism of high-precision polishing machine and upper grinding device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0514275A1 (en) * | 1991-05-17 | 1992-11-19 | Aventis Pharma S.A. | Thiopyranopyrrole derivatives, their preparation and pharmaceutical compositions containing them |
| CN2181366Y (en) * | 1993-06-14 | 1994-11-02 | 郑州动力机械厂 | Grinding table fast rise-and-fall grinding mechanism with elastic pressure charging device |
| CN2319177Y (en) * | 1998-01-21 | 1999-05-19 | 蔡志伟 | Mill lifting device of grinder |
| US20070270081A1 (en) * | 2007-08-02 | 2007-11-22 | Epir Technologies, Inc. | Automated Chemical Polishing System Adapted for Soft Semiconductor Materials |
| CN201105406Y (en) * | 2007-09-06 | 2008-08-27 | 广东科达机电股份有限公司 | Planetary profile polishing grinding head |
| CN101708592A (en) * | 2009-11-05 | 2010-05-19 | 浙江工业大学 | Base disc used for suspension polishing |
| CN203317206U (en) * | 2013-06-18 | 2013-12-04 | 浙江工业大学 | Dynamic pressure floating separation position precise adjusting mechanism for dynamic pressure floating separation polishing disk |
-
2013
- 2013-06-18 CN CN201310247261.9A patent/CN103317438B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0514275A1 (en) * | 1991-05-17 | 1992-11-19 | Aventis Pharma S.A. | Thiopyranopyrrole derivatives, their preparation and pharmaceutical compositions containing them |
| CN2181366Y (en) * | 1993-06-14 | 1994-11-02 | 郑州动力机械厂 | Grinding table fast rise-and-fall grinding mechanism with elastic pressure charging device |
| CN2319177Y (en) * | 1998-01-21 | 1999-05-19 | 蔡志伟 | Mill lifting device of grinder |
| US20070270081A1 (en) * | 2007-08-02 | 2007-11-22 | Epir Technologies, Inc. | Automated Chemical Polishing System Adapted for Soft Semiconductor Materials |
| CN201105406Y (en) * | 2007-09-06 | 2008-08-27 | 广东科达机电股份有限公司 | Planetary profile polishing grinding head |
| CN101708592A (en) * | 2009-11-05 | 2010-05-19 | 浙江工业大学 | Base disc used for suspension polishing |
| CN203317206U (en) * | 2013-06-18 | 2013-12-04 | 浙江工业大学 | Dynamic pressure floating separation position precise adjusting mechanism for dynamic pressure floating separation polishing disk |
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| CN103317438A (en) | 2013-09-25 |
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Effective date of registration: 20191225 Address after: 314200 inner northeast building, 4880 Pingshan Avenue, Pinghu Economic Development Zone, Jiaxing City, Zhejiang Province Patentee after: Pinghu Lianxiang Electroplating Technology Co.,Ltd. Address before: 510000 unit 2414-2416, building, No. five, No. 371, Tianhe District, Guangdong, China Patentee before: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Effective date of registration: 20191225 Address after: 510000 unit 2414-2416, building, No. five, No. 371, Tianhe District, Guangdong, China Patentee after: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Address before: The city Zhaohui six districts Chao Wang Road Hangzhou City, Zhejiang province 310014 18 Patentee before: Zhejiang University of Technology |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150819 Termination date: 20200618 |