CN103314647B - With the method and apparatus of pulses generation pulse bremstrahlen adjustable between two energy levels - Google Patents

With the method and apparatus of pulses generation pulse bremstrahlen adjustable between two energy levels Download PDF

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CN103314647B
CN103314647B CN201180038971.XA CN201180038971A CN103314647B CN 103314647 B CN103314647 B CN 103314647B CN 201180038971 A CN201180038971 A CN 201180038971A CN 103314647 B CN103314647 B CN 103314647B
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charged particle
accelerating
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CN103314647A (en
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O·J·马斯列尼考夫
V·I·施韦杜诺夫
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
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Abstract

Be intended to for detection system with a method and apparatus for pulses generation pulse bremstrahlen adjustable between two energy levels, each energy level is had to the dose rate of independent adjustment.Described equipment is endowed partial radiation shielding and produces and clashes into the narrow beam of described deceleration target (12), and can accelerated particle efficiently.Described equipment is endowed the accelerating structure (7) using standing wave, and standing wave is by having low-voltage beam and the compact multiple beam klystron (22) focused on by permanent magnet feeding.From a pulse to another pulse, by the change of both amplitudes in the power stage rank of klystron (22) and accelerating structure (7) energy in same frequency adjustment belt charged particle accelerated beam (19).From a pulse to another pulse, adjust described dose rate by the voltage of the control electrode (10) of electron gun (8) with the change of the current both be injected in accelerating structure (7).

Description

With the method and apparatus of pulses generation pulse bremstrahlen adjustable between two energy levels
Technical field
The present invention relates to the acceleration equipment for detection system, acceleration equipment is based on the accelerator realizing pulse bremstrahlen adjustable between two energy levels with the adjustable beam of the energy of charged particle, adopt the pulsed of charged particle to occur and speed technology, the invention still further relates in order to such object builds linear accelerator.
Background technology
The linear accelerator producing pulsed charged particle beam is widely used in customs's detection system and checks van container.In such detector, charged particle beam is on the deceleration target being positioned at accelerator end.After leaving collimator, charged particle beam is by the narrow beam that is strictly calibrated on inspected object direction.Have passed through the beam portion of this object by one group of detector record.Signal from these detectors makes the image of this object content be rebuild.
The last age has seen the centralized development based on the non-intruding detection system at the adjustable accelerator of two electronics between energy level and intensity level.To the demand of such bremsstrahlung source by checking that the importance of some object is determined, as detected nuclear fission material (OgorodnikovS.; Petrunin, V.Processingofinterlacedimagesin4-10MeVdualenergycustoms systemformaterialrecognition.PhysicalReviewSpecialTopics – AcceleratorsandBeams5 (104701), 2002).
In fact all existing detection systems accelerator used, especially the widely used accelerator produced by the VarianMedicalSystems company of the U.S., (Whittum, D.H., Trail, M.E., Meddaugh, G.E., Stateoftheartinmedicalandindustriallinear-acceleratorsys tems, VacuumElectronicsConference, 2008.IVEC2008.IEEEInternational, PublicationDate:22-24April2008, pp.8-11), and the Tongfang prestige of the People's Republic of China (PRC) looks the accelerator (Ch.Tang of production, H.Chen, Y.Liu, X.Wang, Low-EnergyLinacsandtheirApplicationsinTsinghuaUniversity, ProceedingsofLINAC2006, Knoxville, TennesseeUSA, pp.256-258) adopt magnetron as microwave power supply, the important need that such accelerator forces can be met (compact, motor-driven, cheap).
But, except compact and lightweight, other demands that the accelerator adopted in detection system especially uses the accelerator of energy adjusting pulse to force are comprised: the charged particle beam that is low, that hit deceleration target of the background emission outside working region is narrow, the energy of the stability of pulsed dose rate and beam is high and possibility to each energy level adjusting agent dose rate independently.
Due to the length along accelerator or its part, realize the variable rate of acceleration of particle, the needs of energy adjustable gain, when designing the electron linear accelerator using energy adjusting, people run into many particular problems.
Therefore, at employing magnetron as in the accelerator of high frequency electric source, in order to adjust the energy of pulse accelerated beam, the amplitude of the high-voltage pulse that people must be applied to negative electrode by adjustment, the rank of adjustment accelerating field, namely adjusts the microwave power produced.The amplitude variations of high-voltage pulse causes the concussion frequency change produced by magnetron, so need the special measure of offset compensation, imbalance is exactly that the resonance frequency of the frequency of high-frequency signal and accelerator is inconsistent.In addition, if the amplitude variations of high-frequency signal is not along with the appropriate change (it is inevitable different with signal difference) in the magnetic field produced by magnetron, the operation of magnetron is just far from the best, reduces the sensitivity of detection method.Under the best circumstances, the excursion of microwave power significantly narrows, and then the excursion of accelerated beam also narrows.
At employing klystron as in the linear accelerator of microwave power supply, the energy of pulse accelerated beam is adjusted in order to the rank by adjustment accelerating field, realization is the amplitude by adjustment entrance low-intensity high-frequency signal by other adjustment of microwave power level of klystron, and when the amplitude of the microwave pulse applied to negative electrode is constant, this signal has constant frequency.If contrasted with magnetron, klystron provides the more high stability of the energy level variations of more wide region, pulse accelerated beam energy and pulse bremstrahlen dose rate.But, current list bundle klystron adopts solenoid to make charged particle beam in accelerator due to needs, and size is large and the quality had is large.Therefore they run under high voltages needs oil-insulation, so large and its cost is quite high based on the size of the electron accelerator of klystron.
There is the electron linear accelerator (RU, 2282955, C2) of the use energy adjusting pulse that can use with energy adjusting pattern.It comprises electron source, ultra-high frequency generator, power supply, control system, accelerating system, and this accelerating system comprises the section of gathering using standing wave and the accelerating sections using row ripple; Every section all comprises the constraint element having Electron Beam Drift pipe and be connected aperture (" window ") with electromagnetism.Accelerator comprises device and the UHF Power extraction device of microwave power, the former is connected to first unit (last unit of the contiguous section of gathering of this unit) of the accelerating sections that beam runs on its path, and the latter is connected to last unit of accelerating sections.Energy can be adjusted by the electric current of adjustment belt charged particle, and this process does not supposedly affect the amplitude of accelerating field in the section of gathering of accelerating system, and in accelerating sections, energy gain does not reduce because of the current loading of beam.The subject matter of the accelerator more than introduced is interdepending between dose rate and the energy of beam, and it is impossible to the energy level independence adjusting agent dose rate of beam that this makes when each individual impulse.
There is the electron linear accelerator (US, 7,208,889, B2) using energy adjusting, comprising:
-the power supply that generates electromagnetic waves;
The injector of-generating strap charged particle pulse;
-accelerating sections (first paragraph), is suitable for the pulse producing above-mentioned charged particle, for generation of above-mentioned electromagnetic wave and by the pulse of its energy transferring to above-mentioned particle;
-another accelerating sections (second segment), is suitable for producing the pulse of the above-mentioned charged particle of advancing from first paragraph and transfers energy to the pulse of above-mentioned particle;
-phase shifting devices, is placed between power supply and the second accelerating sections, be suitable for alternately moving above-mentioned electromagnetic phase place and with preset phase guide electromagnetic waves to the second accelerating sections.
But, the accelerating system with two sections of compositions of high frequency link separately of design like this, microwave power supply system and vacuum system two sections are all too complicated, easy break-down, and in every section, all need very complicated system for controlling and frequency adjustment.
There is the electron accelerator (US, 7,130,371, B2) adopting row ripple, for the adjustment of the pulse bremstrahlen energy between two ranks and to often kind of energy independently dose rate adjustment produce high frequency bremstrahlen.It comprises bremsstrahlung source, microwave power supply system, the modulator (providing electron gun to send beam current rank adjusting to each pulse) of control electrode of three electrodic electron rifles, high voltage power supply, cooling system, the controller being connected to accelerator, control panel and deceleration target.In this accelerator, bremsstrahlung source comprises injector, be suitable for from the first potential pulse and the second potential pulse produce electron beam and beams directed to accelerating sections, it is suitable for by the pulse of electromagnetic signal, beam pulse being formed and accelerating.
High voltage power supply comprises at least clock pulse generator, is suitable for being formed the electromagnetic signal pulse with first frequency and the electromagnetic signal pulse with second frequency; Reversing switch, is suitable for transmitting the electromagnetic signal pulse with first or second frequency; Exciter and klystron, for amplifying the amplitude of above-mentioned electromagnetic signal pulse.
High voltage power supply comprises the modulator of above-mentioned klystron, the modulator being suitable for the injector of the second pulse of the first pulse of the voltage producing above-mentioned first amplitude and the voltage of above-mentioned second amplitude and the device making the modulator of above-mentioned injector synchronous with the operation of the modulator of above-mentioned klystron.The emission spectrum of this accelerator is suitable for the identification of many kinds of substance.
The method (US, 7,130,371, B2) of the generation bremstrahlen of the said equipment and its enforcement can to the energy of each pulse adjustment accelerated beam and electric current.In such a device, the adjustment of beam energy is to the dependence of the frequency of electromagnetic signal based on the phase velocity of electromagnetic wave in accelerating structure (with row ripple).Along with the raising of electromagnetic signal frequency, the energy of electromagnetic phase velocity and following accelerated beam reduces.
The adjustment of the current level of accelerated beam is to dependence control electrode being sent into voltage based on the electric current of injector (injectors of three electrodic electron rifles).Along with raising control electrode being sent into voltage, the electric current of the beam injecting and accelerate increases.
Therefore, owing to adjusting the frequency of clock pulse generator and the voltage of the control electrode of feeding electron gun simultaneously, likely adjust the higher rank of the bremstrahlen energy produced when clashing into deceleration target by accelerated electron beam and realize bremstrahlen required dosage rate.The substantive characteristics of this method uses the accelerating structure of row ripple and is used as the klystron of high-frequency signal amplifier.
But, use the accelerating structure (US of row ripple, 7,130,371, B2) making to produce compact accelerator impossible, because the well-known equal energy in order to use the equal power supplied from microwave power supply (klystron, magnetron) to realize accelerated beam, using the length of the accelerating structure of row ripple to be about twice in the accelerating structure situation using standing wave.In addition, the accelerating structure of row ripple is used to need big and heavy solenoid to be installed in its surface with constraint and narrow beam.But solenoidal field intensity cannot adjust each pulse; So the said equipment does not allow to produce at high-energy and low-yieldly can focus on good beam equally.
Of the present invention is the bremstrahlen production method (WO2010/019228 using energy adjusting closest to analog and prototype; US, 2010/0038563, А 1), adopt following steps:
-send into the electric energy of first level and the electric energy of second level continuously from high voltage power supply to microwave power supply, the first and second ranks of electric energy are different;
-producing its first power level continuously by microwave power supply to occur in the second high-voltage power pulse that the first high-voltage power pulse of first frequency and its second power level different from the first power level occur in the second frequency different with first frequency, described frequency depends on the energy of the first and second ranks at least in part;
-the first and second pulses of above-mentioned high frequency power are sent into the resonator of accelerator; Can as comprising the first high frequency power pulse heel with the first constant power rank along with the pulse train of the second high frequency power pulse with the second constant power rank when sending into them, and two constant power ranks can be equal in this case;
-synchronous with the resonance frequency of accelerator at the first frequency sending into the first high frequency power pulse period chien shih first high-frequency impulse to accelerating structure;
-synchronous with the resonance frequency of accelerator at the second frequency sending into the second high frequency power pulse period chien shih second high-frequency impulse to accelerating structure;
-the resonator of charged particle injection accelerating structure; Likely sending into the first high frequency power impulse duration to accelerator with the first charged particle of the first pulse current injectingt of beam, and guiding the second charged particle during send into second electric current different from the first electric current of the second high frequency power impulse duration at beam to accelerator;
-make the charged particle of injection accelerate to the first energy level with the first resonance frequency of accelerating structure continuously by accelerator, then with the second energy level that the second resonance frequency of accelerating structure is accelerated, described frequency depends on the energy of the first and second ranks at least in part;
-bombard target continuously by the first and the second accelerating charged particles, produce bremstrahlen with the first and second energy levels.
Equipment (the WO2010/019228 producing bremstrahlen with adjustable energy is used when implementing this method; US, 2010/0038563, А 1), it comprises with lower component:
-accelerating structure, makes Accelerating electron;
-charged particle source, for making particle send into accelerating structure, as such source, people can use electron gun;
-high frequency power generator, selectively sends into the first and second high frequency power pulses to accelerating structure; The power of the second high frequency power pulse and frequency are different from power and the frequency of the first high frequency power pulse;
-at the first frequency sending into the first high frequency power pulse period chien shih power generator to the accelerating structure device (first device) synchronous with the first resonance frequency of accelerating structure, as having the form of controller;
-at the second frequency sending into the second high frequency power pulse period chien shih power generator to the accelerating structure device (second device) synchronous with the second resonance frequency of accelerating structure, as having the form of controller, its design is different from the design of the first controller;
-being positioned at the target of accelerating structure end, it causes bremstrahlen with the interaction accelerating electronics; The interaction of the first accelerating charged particles and target causes bremstrahlen at the first energy level, and the interaction of the second accelerating charged particles causes bremstrahlen at the second energy level, and it is different from the first energy level.
In addition, this equipment can be endowed the power supply being suitable for sending into electric power to above-mentioned power generator; This power supply can be suitable for selectively sending into the first and second at least different voltages to charged particle source, to send at least different (first and second) electric currents to accelerating structure.
When high frequency power generator has the form of magnetron, this equipment is endowed modulator, for selectively control magnetron operate in the first electrical power with produce the first high frequency power pulse and control magnetron operate in second electrical power different from the first electrical power to produce the second high frequency power pulse, and electric power source can separate with the modulator being connected to electron gun and install independently, and modulator can have the form of solid state modulator.
If high frequency power generator has the form of klystron, use the first automatic frequency control method to make the first frequency of the first high frequency power pulse synchronous with the first resonance frequency of accelerating structure, and use the second automatic frequency control method different from the first control method to make the second frequency of the second high frequency power pulse synchronous.
But said method (WO2010/019228; US, 2010/0038563, А 1) known basic embodiment use magnetron, the frequency that its produces can with pulse change, as the result sending into electrical power change, so people must install control or calibration equipment accurately to produce required frequency.Adopt these features of the equipment of magnetron automatically owing to adopting klystron as the modification of the equipment of power supply, the amendment that institute does not in this way add is just not all right.The design of klystron is not described.
Charged particle beam physical expert understand, in the method for all above-mentioned generation bremstrahlens and such generation equipment used, people should or the adjustment frequency of high frequency electric source or use there are two sources of different frequency, and this causes overcomplicated and reliability to reduce, and use traditional klystron along with the high voltage source using solenoid and voltage more than 100kV, result is nothing but that quality and size increase.
Summary of the invention
The object of the invention is the generation of convenient bremstrahlen and simplify with the design of the equipment of pulses generation pulse bremstrahlen adjustable between two energy levels, described equipment can be used in detection system, reduces its size and improves its reliability.
Or rather, the object of the invention is to develop following methods: due to identical energy level but different current level generating strap beam of charged particles pulsedly, with pulses generation pulse bremstrahlen adjustable between two energy levels, synchronous with the feeding of the described pulse of the electric current of described beam with the feeding of above-mentioned high frequency power pulse subsequently, adjust the possibility of the power level of above-mentioned pulse with the change of the rank of the electric current of described first and second charged particle beams simultaneously, but by sending into high frequency power pulse with different high frequency power levels equal frequencies, first beam of particle is accelerated to the first default energy level and the second beam of particle is accelerated to the second default energy level, achieve and adjust in the independence of the dose rate of each energy level, and the equipment of this generation bremstrahlen of development and implementation method.
With the possibility of adjusting agent dose rate rank, energy between (to independent pulse) two ranks adjusted to each default energy level produce the method for bremstrahlen by creating, dealt with this challenge, achieve following steps:
-clash into deceleration target by described first and second accelerating charged particles continuous beam under certain conditions alternately to produce bremstrahlen, now the fixing energy level of above-mentioned beam is different with electric current, but bremstrahlen dose rate is identical in both cases;
-used the electron gun comprising negative electrode, anode and control electrode to produce by the described first and second accelerating charged particles continuous beam alternately sent into, mode is alternately send into the potential pulse of various amplitude (described amplitude is different to some described fixing energy levels) to the negative electrode of described electron gun, described pulse is made shortly to be partitioned into feeding with interpulse, interval much shorter between these interval comparisons;
-adopt the accelerating structure using standing wave, described first and second charged particle continuous beam are accelerated to the first and second energy levels respectively, and but mode is advancing with the first and second charged particle beams described in the paired high frequency power pulsing effect of short internal Inter-pulse interval and same frequency different constant power ranks; Carry out arranging to provide following functions:
-make the feeding time of above-mentioned first high frequency power pulse send into the synchronous of time with the pulse of the electric current of described first charged particle beam;
-make the feeding time of above-mentioned second high frequency power pulse send into the synchronous of time with the pulse of the electric current of described second charged particle beam;
-feeding frequency synchronous of feeding frequency and the pairing of above-mentioned high frequency power pulse that make the current impulse of the charged particle formed by described electron gun right;
-simultaneously with the change of the current level of described first and second charged particle beams, by the change of the power level of above-mentioned high frequency power pulse, to the energy of each pulse adjustment belt beam of charged particles;
-produce bremstrahlen when charged particle clashes into the described deceleration target of the end placement being positioned at the minor diameter electronic conduit of described accelerating structure end;
-by adjusting the electric current of described first and second charged particle beams, adjust described bremstrahlen dose rate.
According to the present invention, expect to be affected in described accelerating structure by low intensive accelerating field (to be produced) advancing of described first and second charged particle beams by described electron gun, for the modulation of described particle rapidity, realize the particles aggregate bunchy of part; Then the advancing of beam after affecting pack by high level accelerating field, causes the focusing of acceleration, additional particles aggregate bunchy and particle flux; Then described flux is affected by the accelerating field that intensity is higher, and the flux then focusing on also the most described focusing accelerates to reach default speed.
Using adjustable energy and the possibility to each described fixing energy level adjusting agent dose rate between two energy levels to produce the equipment of pulse bremstrahlen by creating (to each pulse), having dealt with this challenge, having comprised:
-impart resonator and with use the form design of the accelerating structure of standing wave for charged particle accelerate accelerating structure;
-charged particle source, is suitable for generating strap beam of charged particles and described resonator to described accelerating structure is sent into pulsedly; In fact this source has, and (to each pulse) can adjust the form of the electron gun of electric current between two pre-set level, and described electron gun is endowed three electrodes: negative electrode, anode and control electrode;
-be positioned at the minor diameter electronic conduit of above-mentioned accelerating structure end;
-be positioned at the target of described electronic conduit end; Bremstrahlen is produced when the charged particle beam accelerated clashes into this target, equal to dose rate described in different beam, or rather, produce the bremstrahlen of the first energy level when the charged particle that the first bundle accelerates clashes into described target, produce the bremstrahlen of the second energy level (it is not equal to described first energy level) when the charged particle that the second bundle accelerates clashes into described target;
-high frequency power source system, comprising:
-imparting the pulsed multi beam amplifying klystrfon of focusing system adopting permanent magnet, but described klystron is suitable for having equal frequencies the amplification of the described first and second high frequency power pulses of different constant power rank and alternately send into the described resonator of described accelerating structure continuously;
-exciter, be suitable for described first high frequency power and described second high frequency power all continuously pulsed send into above-mentioned klystron and each pulse realized to the adjustment of described first and second high frequency power levels between two pre-set level, equal to the frequency of the concussion that two energy levels produce, wherein said first high frequency power and described second high frequency power have two different ranks;
-high voltage power supply, comprising:
-be suitable for the electric power source sending into the modulator form of electrical power to the negative electrode of above-mentioned klystron and above-mentioned electron gun, the rank of above-mentioned electrical power is identical and be also suitable for sending into above-mentioned electric pulse pair with interpulse short interval to described first and second energy, interval much shorter between described interpulse short interval comparison, therefore realize via above-mentioned potential pulse rank change to adjust described first and second bundle electric currents;
-source of electrical power is sent into the described control electrode of described electron gun, be suitable for the alternating electrical pulses sending into the various amplitude corresponding with the above-mentioned energy level of the above-mentioned particle beams to described control electrode, and be also suitable for sending into paired electric pulse with interpulse short interval, interval much shorter between described interpulse short interval comparison, realize via above-mentioned potential pulse rank change to adjust described first and second bundle electric currents;
Controller, realizes:
-make the feeding time synchronized of the current impulse of the feeding time of above-mentioned first high frequency power pulse and described first band charged particle;
-make the feeding time of above-mentioned second high frequency power pulse and the feeding time synchronized of the described second current impulse of restrainting;
-make the feeding frequency of the feeding frequency of the electric current paired pulse of the described first and second band charged particle produced by described electron gun and the paired high frequency power pulse to be produced by described exciter and will by the feeding Frequency Synchronization of the high frequency power pulse of described klystron;
-cooling system, realizes the cooling of above-mentioned accelerating structure, above-mentioned deceleration target, above-mentioned klystron and said modulator,
And, in addition, described equipment is endowed control system, issues for realizing the order changing the energy level side by side adjusting described high frequency power pulse with the described first and second current level of restrainting via to described controller, each pulse is realized to the energy level of the charged particle beam that adjustment is accelerated.
According to the present invention, expect that the described modulator negative electrode be endowed to described klystron and described electron gun all supplies the possibility of the electrical power of described first level, realize producing two band charged particle by described klystron to the amplification of two kinds of above-mentioned high frequency power pulses and by electron gun.
According to the present invention, also expect that described modulator is solid state modulator.
According to the present invention, also expect that above-mentioned exciter is endowed the electronic attenuator of synthesizer, solid-state microwave amplifier and use PIN diode.
In addition, according to the present invention, expect that described accelerating structure is endowed the unit (first module) for gathering in the low level of described accelerating field, for at another unit (second unit) accelerating higher than other rank of described first module middle rank and focus on, and the 3rd and other unit be used for accelerating higher than described second unit middle rank same levels of accelerating field described in other and focusing on; When sending into the particle beams from described first module to described second unit, between the units when 180 ° of phase shift, the selection of the spacing of the gap center of described Unit first and second must make being centrally located in the maximum neighbouring region of accelerating field in described second unit of the particle beams accelerated.
In addition, according to the present invention, the spacing L of the gap center of described Unit first and second of described accelerating structure is expected gfollow following formula:
wherein: β 0=v 0/ c, v 0for gathering the speed of porch charge particle flux of unit, λ is being the electromagnetic length of free space medium-high frequency power supply, and c is the light velocity, n=1,2,3
In addition, according to the present invention, be desirably in described accelerating structure, according to the inspiration of the peak swing of the first harmonic of the electric current restrainted described in the gap center of described second unit, select the high frequency voltage U of the accelerating field in the gap in described first module g:
wherein: U 0for the voltage supplied by electron source, n=1,2,3
In addition, according to the present invention, the wall being desirably in described accelerating structure there is the linkloop of installation, realize the control of the appropriate energy level of the charged particle beam of described accelerating field and acceleration.
In addition, according to the present invention, expect that above-mentioned accelerating structure and above-mentioned electron gun are positioned at the shielding that high osmosis magnetic shielding material makes inner.
In addition, according to the present invention, expect that ionization chamber is installed in the side of the deceleration target towards described bremsstrahlung beam.
In addition, according to the present invention, expect that the described ionization chamber placed in described electron gun, above-mentioned accelerating structure together with described deceleration target and above-mentioned shielding inside is shielded around to be formed and to guide described bremsstrahlung beam by partial radiation.
In addition, according to the present invention, expect that described high frequency power system is endowed waveguide, realize the described high frequency power pulse steering by above-mentioned klystron to above-mentioned accelerating structure, make the above-mentioned electron gun together with described deceleration target, above-mentioned accelerating structure and above-mentioned electronic conduit by above-mentioned radiation shield around, they are all arranged in the identical column compartment of isolating with environment and are endowed and are arranged in above-mentioned waveguide and to the permeable vacuum window of above-mentioned high-frequency impulse.
In addition, according to the present invention, expect that described pumping system is endowed the asepwirator pump being installed to above-mentioned waveguide, this asepwirator pump does not require power supply and realizes in above-mentioned column compartment, keeping condition of high vacuum degree and being connected to above-mentioned column compartment via the hole in the narrow wall of above-mentioned waveguide during the service life of described equipment.
In addition, according to the present invention, expect that the sputter ion pump being connected to described column compartment via the hole in the narrow wall of described waveguide is installed in above-mentioned waveguide, the electric current of wherein said sputter ion pump is the function of the vacuum degree of described column compartment inside.
Accompanying drawing explanation
Utilize and following to comprise/subsidiary figure, below by way of the equipment using generation bremstrahlen of the present invention, produce the present invention of the examples show of bremstrahlen according to method of the present invention:
Fig. 1 is the design of the embodiment of the present device producing bremstrahlen;
Fig. 2 is showing the figure of the equipment operating pattern of the generation bremstrahlen that Fig. 1 shows;
Fig. 3 is the energy spectrum realizing adjusting between two fixing energy levels the accelerating charged particles bundle obtained under the pattern of energy, is shown as beam average current I avand the relation between beam energy level E;
Fig. 4 is directed to the image of the identical beam of the different energy levels of the paired pulse of deceleration target continuously: a, a in Fig. 4 1, a 2it is the beam for low-lying level; B, b in Fig. 4 1, b 2the beam for high level: for contrasting the image of the scale grid of mesh spacing=1 millimeter.
Fig. 5 is general view/outward appearance that its design/layout is presented at the present device of the generation bremstrahlen on Fig. 1.
Some examples of the inventive method embodiment introduced are not exhaustive; They do not force restriction to embodiments of the invention, and within their claims of comprising in patent application.
Embodiment
According to the present invention, the method that (for each pulse) produces bremstrahlen with the adjustable energy level between two fixing energy levels can be implemented with the apparatus-form of the generation bremstrahlen shown in Fig. 1.
Described equipment (Fig. 1) comprises bremsstrahlung source 1, high frequency power source system 2, high voltage power supply 3, cooling system 4, controller 5 and control system 6.
Bremsstrahlung source 1 comprises:
-accelerating structure for accelerating charged particle beam, is endowed resonator and has the form of the accelerating structure 7 with standing wave;
-be suitable for generating strap charged particle and resonator pulsed to accelerating system 7 sends into the source of charged particle beam, there is the form of three electrodic electron rifles 8, being connected with accelerating structure 7 via ceramics insulator and comprising negative electrode 9, control cathode 10 and anode (not being presented on accompanying drawing), (for each pulse) can adjust the electric current between two fixing energy levels;
-accelerating structure 7 end install minor diameter electronic conduit 11;
-deceleration target 12, is positioned at electronic conduit 11 end and when clashing into deceleration target 12 via electronic conduit 11 from the accelerating charged particles bundle that accelerating structure 7 is sent into, can produces bremstrahlen.
Accelerating structure 7 and electron gun 8 are all placed within the shielding 14 that made by high osmosis magnetic shielding materials.
In addition, ionization chamber 15 is installed in the side of the deceleration target 12 towards bremsstrahlung beam 13.
In addition, inner in above-mentioned shielding 14, electron gun 8 is installed in the partial radiation with hole 17 with accelerating structure 7 and electronic conduit 11, deceleration target 12 and shields in the inner cavity of 16 together with ionization chamber 15, and hole 17 can be formed and guide bremsstrahlung beam 13.
According to the present invention, the wall of accelerating structure 7 has a linkloop 18, realize the control of the appropriate energy level of the charged particle beam 19 of accelerating field and the acceleration produced by accelerating structure 7.
In addition, according to the present invention, with deceleration target 12 electron gun 8 together, accelerating structure 7 and electronic conduit 11(they all by radiation shield 16 around) be arranged in the identical column compartment of isolating with environment, and there is a vacuum window 20.
In addition, according to the present invention, the accelerating structure 7 with standing wave is endowed the unit (first module) for gathering in the low level of described accelerating field, for higher than first module middle rank other rank accelerate and focus on another unit (second unit), and the 3rd and other unit be used for higher than second unit middle rank other accelerating field same levels accelerate and focus on.When sending into the particle beams from first module to second unit, between the units when 180 ° of phase shift, the selection of the distance between the gap center of Unit first and second must make being centrally located in the maximum neighbouring region of accelerating field in second unit of the particle beams accelerated.
In addition, according to the present invention, in accelerating structure 7 Unit first and second gap center between distance L gfollow following formula:
wherein: β 0=v 0/ c, v 0for gathering the speed of porch charge particle flux of unit, λ is being the electromagnetic length of free space medium-high frequency power supply, and c is the light velocity, n=1,2,3 ...
In addition, according to the present invention, in described accelerating structure 7, according to the inspiration of the peak swing of the first harmonic of the electric current restrainted described in the gap center of second unit, the high frequency voltage U of the accelerating field in the gap in first module is selected g:
wherein: U 0for the voltage supplied by electron source, n=1,2,3 ...
If necessary, the outer surface of accelerating structure 7 can install correcting coil 21.
In accelerating structure 7, rank change via the high frequency electric source sending into accelerating structure 7 adjusts the final energy of beam, 2.0 are not less than for the possible maximum of whole energy range accelerated beam and the ratio of possibility least energy, and on the target that slows down, the diameter of beam is not less than 2.0 millimeters.
According to the present invention, high frequency power source system 2 comprises pulse amplifying klystron 22 and exciter 23.Klystron 22 guides the high frequency electric source pulse of being amplified by klystron 22 via waveguide 24, ferrite decoupling device 25 and vacuum window 20 to accelerating structure 7.Waveguide 24 is endowed system 26 for supplying insulating gas and discharge sensor 27.Waveguide 24 and ferrite decoupling device 25 are all filled with insulating gas to prevent high frequency breakdown.When vacuum window 20 is discharged, the discharge sensor 27 of waveguide 24 or ferrite decoupling device 25 produces block signal, and stops the process being formed high-frequency signal by exciter 23.
But pulse amplifying klystron 22 is endowed the focusing system adopting permanent magnet (not being presented on accompanying drawing), and is suitable for amplification and alternately sends into continuously to the resonator of accelerating structure to have equal frequencies other the first and second high frequency powers pulse of different predetermined power levels.
As pulse amplifying klystron 22, people can use little multiple beam klystron, such as be similar to KIU – 147A(Multy-beamklystronswithreversepermanentmagnetfocusi ngsystemastheuniversalrfpowersourcesforthecompactelectro naccelerators, I.A.Frejdovich, P.V.Nevsky, V.P.Sakharovetal, inProceedingsofRuPAC2006, Novosibirsk, Russia, p.100), it also can use little modulator with subnormal voltage operation; Use multi beam electron gun to produce electron beam in such cases, then they are through the drift tube in the resonator of klystron and the magnetic field that produced by permanent magnet.Due to such design of klystron and exciter frequency control apparatus, so produce the quality of bremstrahlen device and size is all considerably reduced.
Pulse amplifying klystron 22, because the design of its multi beam is with subnormal voltage operation, is given the focusing system of permanent magnet and compact because employ, and can be encouraged the microwave field of accelerating structure.
But, even if produce magnetic field by solenoid, low pressure is used then to have the possibility of the solid state modulator of small-sized klystron 22 also to make the size of this device reduce significantly.
Multi beam pulse amplifying klystron 22 has high amplification coefficient, realizes the exciter 23 using low-power to export, can keep high frequency stability.Its power stage realizes precision adjustment as required for each pulse.
Exciter 23 be connected to klystron 22 and it be suitable for klystron 22 continuously pulsed send into the first high frequency power and the second high frequency power (two kinds of different stages of high frequency power), and its design realizes adjustment between two fixing ranks for each pulse that the source I by bremstrahlen 13 produces and sends into the first and second ranks of the high frequency electric source of klystron 22 entrance, and the frequency producing concussion is all equal for two energy levels.
In addition, according to the present invention, exciter 23 is endowed the electronic attenuator (not being presented on accompanying drawing) of synthesizer, solid-state microwave amplifier and use PIN diode.
In addition, according to the present invention, pumping system 28 is endowed the asepwirator pump (not being presented on accompanying drawing as separate units) be installed in waveguide 24, does not require power supply and realizes in above-mentioned column compartment, keeping condition of high vacuum degree and being connected to above-mentioned column compartment via the hole in the narrow wall of above-mentioned waveguide during the service life of described equipment.In addition, pumping system 28 is endowed sputter ion pump (not being presented on accompanying drawing as separate units), be installed in waveguide 24, and be connected to column compartment via the hole in the narrow wall of waveguide, to control vacuum degree and just in case to produce block signal when vacuum degree declines, because its electric current depends on the vacuum degree of column compartment inside.Vacuum chamber is bled primarily of asepwirator pump, and sputter ion pump is used to control vacuum degree.This makes this source can put into operation fast after longer-term storage, and ensure that the stability of parameter and the reliability service of this system,
Low voltage power supply system 3 comprises:
-with the power supply of modulator 29 form, the negative electrode 9 be suitable for klystron 22 and electron gun 8 sends into electric power, and for the first and second energy levels, the rank of this power supply is identical; And
-for controlling the power supply 30 of the electrode 10 of electron gun 8.
Modulator 29 is electrically connected to klystron 22 and is suitable for sending into paired electric pulse with short internally interpulse interval (the interval much shorter between described interpulse short interval comparison) to klystron 22, and can via the change of the potential pulse rank at negative electrode 9 place of electron gun 8, the electric current of adjustment first and second bundle.
In addition, according to the present invention, modulator 29 is solid state modulators, and the negative electrode 9 be suitable for klystron 22 and electron gun 8 sends into the first electrical power, realizes klystron 22 and produces two band charged particle to two kinds of above-mentioned high frequency power pulse amplifying and electron gun 8.
Send into the alternating electrical pulses that the electric power source 30 of control electrode 10 is suitable for sending into control electrode 10 various amplitude corresponding to the default energy level of the particle beams.Electric power source 30 is suitable for sending into paired electric pulse with short interpulse interval (the interval much shorter between described interpulse short interval comparison), can via the change of above-mentioned potential pulse rank, the electric current of adjustment first and second bundle.
Cooling system 4 comprises fluid cooler 31, array of temperature sensor 32 and liquid flow detector, and can cool accelerating structure 7, klystron 22, modulator 29 and deceleration target 12.
Controller 5 is electrically connected to the source 1 of bremstrahlen 13, high frequency power source system 2, high voltage power supply 3 and cooling system 4, and is suitable for making klystron 22 to send into accelerating structure 7 time synchronized that the current impulse of the first band charged particle sent into by time of the first high frequency power pulse and electron gun 8; Make to send into accelerating structure 7 time synchronized that the current impulse of the second bundle sent into by time of the second high frequency power pulse and electron gun 8; The feeding Frequency Synchronization of the high frequency power pulse that the feeding frequency of the paired high frequency electric source pulse that the feeding frequency of the paired pulse of the electric current of the first and second band charged particle that electron gun 8 is produced and exciter produce and klystron 22 amplify.
The operation of controller 5 be presented at energy is described, the above-mentioned parameter of feeding of power and current impulse synchronously produces (Fig. 2) on the equipment operating ideograph of bremstrahlen, wherein, τ is the duration of pulse, T 1the right interpulse interval of pulse, T 2interval between being pair (time between sending into).Change in voltage via the control electrode 10 sending into electron gun 8 achieves the adjustment of beam electronic current.
In addition, according to the present invention, this equipment is endowed control system 6, appropriately orders so that the energy level changing high frequency power pulse changes the current level of the first and second bundles simultaneously via sending to controller 5, each pulse is realized to the energy level of the charged particle beam that adjustment is accelerated.
For each pulse, to adjust the energy level of two pre-set level, the method that produces bremstrahlen is implemented as follows in the said equipment producing bremstrahlen.
Control system 6(Fig. 2) to give an order, instruction control unit 5 sends energy signal to high frequency power source system 2 and high voltage source 3.The energy signal sent by controller 5 arranges the amplitude of the high frequency power pulse produced by exciter 23, thus arranges the amplitude of accelerating field in accelerating structure 7, the energy accelerating bundle and the coboundary of bremstrahlen 13 frequency spectrum.
In addition, when each independent operation signal, the energy signal sent by controller 5 arranges the amplitude that the control electrode 10 to electron gun 8 is sent into, thus the amplitude of electron gun 8 electric current, accelerates the electric current of bundle and the dose rate of bremstrahlen 13.
The potential pulse (they are equal for all presetting energy level) produced by modulator 29 is sent into via the negative electrode 9 to electron gun 8, simultaneously supply the alternating electrical pulses of the various amplitude of the different energy levels produced by electric power source 30 to control electrode 10 and produce and there is identical energy level but alternately first and second bundles of the charged particle of different current level, and above-mentioned pulse is sent in couples with short internally interpulse interval, the interval much shorter between described interpulse short interval comparison.
Between the Formation period of the first and second bundles, the electrical power sent into klystron 22 remains unchanged.
Electron gun 8 is responsible for the first and second bundle of particle to inject the resonator with the accelerating structure 7 of standing wave.
The first and second high frequency power pulses of being amplified by klystron 22 are continuously fed into the resonator of accelerating structure 7 via being full of the waveguide 24 of insulating gas, ferrite decoupling device 25 and vacuum window 20, and to arrive after resonator at it, the above-mentioned pulse excitation accelerating field at this place.
The flux comprising the first and second band charged particle produced by electron gun 8 is subject to the impact of accelerating field, produces the modulation of particle rapidity, causes and the particle fraction in flux is gathered bunchy; Then the flux that part is gathered is subject to the impact of more high strength accelerating field, and cause acceleration, particle flux also focuses on by other particles aggregate bunchy; Then this flux is subject to the impact of more high strength accelerating field and focuses on, and the final flux focused on is accelerated to pre-set velocity.
In accelerating structure 7, the first and second band charged particle are accelerated to first and second respectively and preset energy level.This accelerating through to be produced by exciter 23 and is amplified by klystron 22 and have the advancing and realize of high frequency power pulsing effect first and second band charged particle of different high frequency power levels.Above-mentioned pulse is with short internally interpulse interval T 1the resonator of accelerating structure 7 is sent into, the interval T between this interval comparison with the form of paired pulse 2much shorter, latter case is as equaled 500 microseconds.
As shown in Figure 2, the time synchronized of the time sending into above-mentioned first high frequency power pulse from klystron 22 to accelerating structure 7 and the current impulse sending into the first band charged particle from electron gun 8; The time synchronized of the time sending into above-mentioned second high frequency power pulse from klystron 22 to accelerating structure 7 and the current impulse sending into the second band charged particle from electron gun 8; The feeding Frequency Synchronization that the right feeding frequency of the pulse of the electric current of the charged particle formed by electron gun 8 is right with the above-mentioned high frequency power pulse formed by exciter.During amplifying the first and second high frequency powers by klystron 22, the electrical power sent into above-mentioned klystron remains unchanged.
Change due to the first and second beam electronic current ranks produced with electron gun 8 side by side adjusts the power stage of exciter 23, the energy of rank change (for each pulse) the adjustment belt beam of charged particles of the accelerating field produced via accelerating structure 7.
Fig. 3 shows by the measurement result of magnetic spectrometer to accelerating charged particles Shu Nengpu, and (for each pulse) ENERGY E adjustable between two preset values is average current I avfunction.
In both cases, lowly to run with identical frequency with the accelerating structure 7 of high level, first pulse of the high frequency power produced by multi beam pulse amplifying klystron in time with the first impulsive synchronization of beam electronic current, and the second impulsive synchronization of the second output pulses and electric current.
The energy level of accelerating field is controlled by the linkloop 18 installed in one of accelerator module of accelerating structure 7.
Pulsed bremstrahlen 13, by presetting energy level and different predetermined current with difference with the continuous bombardments generation of the first and second bundle accelerating charged particles to deceleration target 12, makes the dose rate of bremstrahlen 13 equal with preset value.
The deceleration target 12 placed at minor diameter electronic conduit 11 end of the end being positioned at above-mentioned accelerating structure 7 produces bremstrahlen 13.
The electric current of the charged particle of the first and second bundles produced by electron gun 8 by adjustment realizes the preset dose rate of bremstrahlen 13.
Employ the dose rate of the chamber control bremstrahlen 13 that deceleration target 12 is installed below.
Utilize magnetic screen 14, the stray magnetic fields in electron gun 8 and accelerating structure 7 is lowered to the grade being no more than magnetic field of the earth grade, to guarantee the center of the electron beam hits deceleration target 12 accelerated.The position of bundle 19 on deceleration target 12 can use correcting coil 21 to adjust.
Fig. 4 shows the image of the first and second bundles before continuous and deceleration target 12 collide with the different energy level of paired pulse: a, a in Fig. 4 1, a 2it is the beam for low-lying level; B, b in Fig. 4 1, b 2the beam for high level: for contrasting the image of the scale grid of mesh spacing=1 millimeter.
Fig. 5 shows the general appearance of the present device for generation of bremstrahlen, and the display of its design/layout in FIG.
Therefore, according to the present invention, use the present device producing bremstrahlen, the method producing bremstrahlen can produce bremstrahlen with the adjustable energy between two default energy levels, and can to each default energy level adjusting agent dose rate independently.The size of this equipment is significantly reduced, and in the equipment situation being intended for use detection system, this is important, and the reliability of this equipment is modified.
At charged particle beam, physical professional it must be understood that, in framework of the present invention, the inventive method producing bremstrahlen and the present device producing bremstrahlen can both be improved and revise.
Commercial Application
Use the present device of generation bremstrahlen of the inventive method producing bremstrahlen to use in the detection system, and it can use known technology and known material and equipment manufacturing.

Claims (16)

1. for each pulse to adjust energy level between two default energy levels and to each default energy level adjusting agent dose rate level to produce a method for bremstrahlen, following characteristics can be comprised:
-pulsed bremstrahlen, by presetting energy level and different predetermined current with difference with the continuous bombardment generation of the first and second charged particle beams accelerated to deceleration target (12), makes the dose rate of bremstrahlen equal with preset value;
-used the electron gun comprising negative electrode (9), anode and control electrode (10) to produce by first and second charged particle beams with identical energy level but different current level alternately sent into, mode is send into potential pulse alternately to the negative electrode (9) of described electron gun, wherein potential pulse is identical to above-mentioned default energy level, and the alternating electrical pulses of various amplitude is sent into described control electrode, wherein said amplitude is different to fixing energy level, described pulse is made shortly to be partitioned into feeding with interpulse, interval much shorter between these interval comparisons;
-adopt the accelerating structure (7) using standing wave, first and second charged particle beams are accelerated to the first and second energy levels respectively, and mode is with short internal Inter-pulse interval and same frequency but different other the first high frequency power pulses of predetermined power levels and the second high frequency power pulse affect advancing of the first and second charged particle beams; Carry out arranging to provide following functions:
-make the feeding time of above-mentioned first high frequency power pulse send into the synchronous of time with the pulse of the electric current of described first charged particle beam;
-make the feeding time of above-mentioned second high frequency power pulse send into the synchronous of time with the pulse of the electric current of described second charged particle beam;
The feeding frequency of the right feeding frequency of-current impulse of charged particle that formed by electron gun (8) and the pairing of above-mentioned high frequency power pulse synchronous;
-by the change of the power level of the change of the current level with the first and second charged particle beams above-mentioned high frequency power pulse simultaneously, to the energy of each pulse adjustment belt beam of charged particles;
-produce bremstrahlen (13) when charged particle clashes into the described deceleration target of the end placement being positioned at the minor diameter electronic conduit of described accelerating structure end;
-by the electric current of adjustment first and second charged particle beam, adjust described bremstrahlen dose rate.
2. method according to claim 1, according to the method advancing by the first and second charged particle beams that produce of electron gun (8) be subject in above-mentioned accelerating structure that the first accelerating field affects, for the modulation of described particle rapidity, realize the particles aggregate bunchy of part; Then the advancing of beam after affecting pack by the second accelerating field, causes the focusing of acceleration, additional particles aggregate bunchy and described particle flux; Then described flux is affected by the 3rd accelerating field, and the flux then focusing on also the most described focusing accelerates to reach described default energy, and wherein the intensity of the second accelerating field is higher than the first accelerating field, and the intensity of the 3rd accelerating field is higher than the second accelerating field.
3., with the adjustable energy between two ranks and the equipment that can produce pulse bremstrahlen to each fixing energy level adjusting agent dose rate, comprising:
The source (1) of-bremstrahlen, comprising:
-impart resonator and with use the form design of the accelerating structure of standing wave for charged particle accelerate accelerating structure (7);
-charged particle source, is suitable for generating strap beam of charged particles and described resonator to described accelerating structure is sent into pulsedly; In fact this source has the form of the electron gun (8) that can adjust electric current between two pre-set level, and electron gun (8) is endowed three electrodes: negative electrode (9), anode and control electrode (10);
-be positioned at the minor diameter electronic conduit (11) of above-mentioned accelerating structure (7) end;
-be positioned at the deceleration target (12) of described electronic conduit (11) end; Bremstrahlen (13) is produced when the charged particle beam accelerated clashes into this target, equal to dose rate described in different beam, more accurately, the bremstrahlen (13) of the first energy level is produced when the first charged particle beam accelerated clashes into described target, produce the bremstrahlen (13) of the second energy level when the second charged particle beam accelerated clashes into described target, wherein said second energy level is not equal to described first energy level;
-high frequency power source system (2), comprising:
-impart the pulsed multi beam amplifying klystrfon (22) of focusing system adopting permanent magnet; But described klystron is suitable for having equal frequencies the amplification of other the first and second high frequency powers pulse of different predetermined power levels and the continuous described resonator alternately sending into described accelerating structure;
-exciter (23), be suitable for described first high frequency power and described second high frequency power all continuously pulsed send into above-mentioned klystron and realize the adjustment of the first and second high frequency power levels between two pre-set level, equal to the frequency of the concussion that two energy levels produce, wherein said first high frequency power and described second high frequency power have two different ranks;
-high voltage power supply (3), comprising:
-be suitable for the electric power source sending into modulator (29) form of electrical power to the negative electrode (9) of above-mentioned klystron (22) and above-mentioned electron gun (8), the rank of described electrical power is identical and be also suitable for sending into the first high frequency power pulse and the second high frequency power pulse with interpulse short interval, interval much shorter between described interpulse short interval comparison to the first and second energy;
-send into the source (31) of electrical power to the control electrode (10) of electron gun (8), be suitable for the alternating electrical pulses sending into the various amplitude corresponding with the above-mentioned energy level of the above-mentioned particle beams to described control electrode, and be also suitable for sending into paired electric pulse with interpulse short interval, interval much shorter between described interpulse short interval comparison, realizes the electric current adjusting the first and second charged particle beams via the change of above-mentioned potential pulse rank;
-controller (5), realizes:
-make the feeding time synchronized of the feeding time of above-mentioned first high frequency power pulse and the current impulse of described first charged particle beam;
-make the feeding time synchronized of the feeding time of above-mentioned second high frequency power pulse and the current impulse of described second charged particle beam;
-make the feeding frequency of the feeding frequency of the electric current paired pulse of the first and second charged particle beams produced by described electron gun and the paired high frequency power pulse to be produced by described exciter and will by the feeding Frequency Synchronization of the high frequency power pulse of described klystron;
-cooling system (4), realizes the cooling of above-mentioned accelerating structure (7), above-mentioned deceleration target (12), above-mentioned klystron (22) and said modulator (29);
And, in addition, described equipment is endowed control system (6), issuing for realizing the order changing the energy level side by side adjusting described high frequency power pulse with the current level of the first and second charged particle beams via to described controller (5), each pulse being realized to the energy level of the charged particle beam that adjustment is accelerated.
4. equipment according to claim 3, wherein, described modulator (29) can, to negative electrode (9) all supplied with electric power of klystron (22) and electron gun (8), realize producing two band charged particle by klystron (22) to the amplification of two kinds of above-mentioned high frequency power pulses and by electron gun.
5. equipment according to claim 4, wherein, described modulator (29) is solid state modulator.
6. equipment according to claim 3, wherein, above-mentioned exciter (23) is endowed the electronic attenuator of synthesizer, solid-state microwave amplifier and use PIN diode.
7. equipment according to claim 3, wherein, accelerating structure (7) is endowed the unit for gathering in the low level of described accelerating field, first module, for at another unit accelerating higher than other rank of described first module middle rank and focus on, second unit, and for higher than described second unit the middle rank same levels of accelerating field is accelerated and focused on described in other the 3rd and other unit; When sending into the particle beams from described first module to described second unit, between the units when 180 ° of phase shift, the selection of the distance between the gap center of Unit first and second must make being centrally located in the maximum neighbouring region of accelerating field in described second unit of the particle beams accelerated.
8. equipment according to claim 7, wherein, in described accelerating structure (7), according to the inspiration of the peak swing of the first harmonic of the electric current restrainted described in the gap center of described second unit, select the high frequency voltage U of the accelerating field in the gap in described first module g:
wherein: U 0for the voltage supplied by electron source, n=1,2,3....
9. equipment according to claim 7, wherein, the distance L between the gap center of Unit first and second of described accelerating structure gfollow following formula:
wherein: β 0=v 0/ c, v 0for gathering the speed of porch charge particle flux of unit, λ is being the electromagnetic length of free space medium-high frequency power source, and c is the light velocity, n=1,2,3....
10. equipment according to claim 7, wherein, the linkloop be positioned on the wall of accelerating structure (7) realizes the control of the appropriate energy level of the charged particle beam (19) of described accelerating field and acceleration.
11. equipment according to claim 3, wherein, above-mentioned accelerating structure (7) and above-mentioned electron gun (8) are positioned at shielding (14) inside that high osmosis magnetic shielding material is made.
12. equipment according to claim 3, ionization chamber (15) is installed in the side of the deceleration target (12) towards described bremsstrahlung beam (13).
13. equipment according to claim 12, wherein, be placed on together with deceleration target (12) and ionization chamber (15) shield (14) inner electron gun (8), above-mentioned accelerating structure (7) had hole (17) with formed and guide the partial radiation of described bremsstrahlung beam (13) shield (16) around.
14. equipment according to claim 13, wherein, high frequency power system (2) is endowed waveguide (24), realize the high frequency power pulse steering amplified by above-mentioned klystron (22) to above-mentioned accelerating structure (7), make the above-mentioned electron gun (8) together with described deceleration target (12), above-mentioned accelerating structure (7) and above-mentioned electronic conduit (11) by above-mentioned radiation shield (16) around, they are all arranged in the identical column compartment of isolating with environment and are endowed and are arranged in above-mentioned waveguide (24) and to the permeable vacuum window of above-mentioned high-frequency impulse (20).
15. equipment according to claim 14, wherein, pumping system (28) is endowed the asepwirator pump being installed to above-mentioned waveguide (24), and this asepwirator pump does not require power supply and realizes keeping condition of high vacuum degree during the service life of described equipment in above-mentioned column compartment and be connected to above-mentioned column compartment via the hole in the narrow wall of above-mentioned waveguide (24).
16. equipment according to claim 15, wherein, the sputter ion pump being connected to described column compartment via the hole in the narrow wall of described waveguide (24) is installed in above-mentioned waveguide (24), and the electric current of wherein said sputter ion pump is the function of the vacuum degree of described column compartment inside.
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