CN103308520B - Evaluation method for polycrystal battery technical level and slice source - Google Patents

Evaluation method for polycrystal battery technical level and slice source Download PDF

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CN103308520B
CN103308520B CN201310273090.7A CN201310273090A CN103308520B CN 103308520 B CN103308520 B CN 103308520B CN 201310273090 A CN201310273090 A CN 201310273090A CN 103308520 B CN103308520 B CN 103308520B
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carrier lifetime
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付少勇
熊震
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Trina Solar Co Ltd
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Changzhou Trina Solar Energy Co Ltd
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Abstract

本发明提出了一种电池工艺及多晶硅片片源的评价方法。该方法利用电致发光或光致发光提取硅片中的缺陷信息,从而获得可用于表征硅片质量的量化参数。进一步,本发明基于所述量化参数,并结合电池开路电压Voc测试,分离出电池工艺水平和多晶硅片片源对Voc的影响大小。

The invention proposes a battery technology and an evaluation method for polycrystalline silicon chip source. The method uses electroluminescence or photoluminescence to extract defect information in silicon wafers, thereby obtaining quantitative parameters that can be used to characterize the quality of silicon wafers. Further, the present invention is based on the quantitative parameters, combined with the open-circuit voltage V oc test of the battery, and separates the impact of the battery technology level and the polysilicon wafer source on V oc .

Description

一种多晶电池工艺水平及片源的评价方法A method for evaluating the process level and source of polycrystalline cells

技术领域technical field

本发明属于多晶太阳能电池领域,尤其涉及多晶太阳能电池的工艺水平和片源质量的评价方法。The invention belongs to the field of polycrystalline solar cells, in particular to an evaluation method for the technological level of polycrystalline solar cells and the quality of chip sources.

背景技术Background technique

在多晶硅太阳能电池领域中,多晶硅片质量和电池工艺对电池表现都有影响。因此,如何从电池性能(如Voc)中分别评估多晶硅片片源质量和电池工艺的影响,以便同时对片源和电池工艺水平进行监控,是业界一直致力于解决的问题。In the field of polycrystalline silicon solar cells, the quality of polycrystalline silicon wafers and cell technology have an impact on cell performance. Therefore, how to separately evaluate the influence of polysilicon wafer source quality and battery process from battery performance (such as V oc ), so as to simultaneously monitor wafer source and battery process level, is a problem that the industry has been working on solving.

发明内容Contents of the invention

本发明提出了一种电池工艺及多晶硅片片源的评价方法。该方法利用电致发光或光致发光提取硅片中的缺陷信息,从而获得可用于表征硅片质量的量化参数。进一步,本发明基于所述量化参数,并结合电池开路电压Voc测试,分离出电池工艺水平和多晶硅片片源对Voc的影响大小。The invention proposes a battery technology and an evaluation method for polycrystalline silicon chip sources. The method uses electroluminescence or photoluminescence to extract defect information in silicon wafers, thereby obtaining quantitative parameters that can be used to characterize the quality of silicon wafers. Further, the present invention is based on the quantitative parameters, combined with the open-circuit voltage V oc test of the battery, and separates the impact of the battery technology level and the polysilicon wafer source on V oc .

根据本发明的第一方面,提出一种提取量化参数用于表征多晶电池的硅片质量的方法,包括:获取多晶电池的电致发光EL图像或光致发光PL图像;处理所述EL或PL图像,以获得少子寿命图像;基于所述少子寿命图像计算所述多晶电池的少子寿命参数LT;以及使用所述少子寿命参数LT作为硅片质量的量化参数。According to the first aspect of the present invention, a method for extracting quantitative parameters for characterizing the quality of a silicon wafer of a polycrystalline cell is proposed, comprising: acquiring an electroluminescence EL image or a photoluminescence PL image of a polycrystalline cell; processing the EL or a PL image to obtain a minority carrier lifetime image; calculate the minority carrier lifetime parameter LT of the polycrystalline battery based on the minority carrier lifetime image; and use the minority carrier lifetime parameter LT as a quantitative parameter of silicon wafer quality.

上述方法中,通过以下方式处理所述EL图像或PL图像以得到少子寿命图像:对所述EL图像或PL图像进行最大值滤波;将滤波后的图像与原始图像相减;以及对相减后的图像进行可选的线性变换,并用掩模去除栅线部分。In the above method, the minority carrier lifetime image is obtained by processing the EL image or PL image in the following manner: performing maximum filtering on the EL image or PL image; subtracting the filtered image from the original image; The image is optionally linearly transformed, and the raster lines are removed with a mask.

上述方法中,所述最大值滤波的形式为:βi,j=Mi,j-max(Ri,j),其中Mi,j表示当前待考察的像素点(i,j)的亮度,max(Ri,j)表示当前待考察像素邻域中的最大值,Βi,j表示二者的差值。In the above method, the form of the maximum value filtering is: β i,j =M i,j -max(R i,j ), where M i,j represents the brightness of the pixel point (i,j) to be investigated currently , max(R i,j ) represents the maximum value in the neighborhood of the pixel to be investigated currently, and Β i,j represents the difference between the two.

上述方法中,所述少子寿命图像上各像素的亮度对应于硅片上该像素位置的少子寿命;所述少子寿命图像上各像素的亮度对应于硅片上该像素位置的永久缺陷信息。In the above method, the brightness of each pixel on the minority carrier lifetime image corresponds to the minority carrier lifetime of the pixel position on the silicon wafer; the brightness of each pixel on the minority carrier lifetime image corresponds to the permanent defect information of the pixel position on the silicon wafer.

上述方法中,基于所述少子寿命图像计算平均少子寿命,以得到所述少子寿命参数LT。In the above method, the average minority carrier lifetime is calculated based on the minority carrier lifetime image to obtain the minority carrier lifetime parameter LT.

根据本发明的第二方面,提出一种太阳能电池的在线多晶硅片片源质量监控方法,根据第一方面的方法,在线获得少子寿命参数LT;以及使用所述少子寿命参数LT作为硅片质量的量化参数,比较片源间的质量差异。According to the second aspect of the present invention, an online polysilicon wafer source quality monitoring method for solar cells is proposed. According to the method of the first aspect, the minority carrier lifetime parameter LT is obtained online; and the minority carrier lifetime parameter LT is used as an indicator of silicon wafer quality. Quantify parameters and compare the quality differences between film sources.

根据本发明的第三方面,提出一种评估多晶硅片片源质量对多晶电池开路电压的影响的方法,包括:选择批量的标准多晶硅片,在标准工艺下制作得到批量的标准多晶电池;对所述批量的标准多晶电池中每一个,使用第一方面的方法以获得相应的少子寿命参数LT作为硅片质量的量化参数;对所述批量的标准多晶电池中每一个,测量其相应的开路电压Voc;以及基于所述批量的标准多晶电池的少子寿命参数LT和开路电压Voc,拟合出一次解析式:Voc=k·LT+b,其中b为常数,系数k表征硅片片源质量对Voc的影响。According to the third aspect of the present invention, a method for evaluating the influence of polycrystalline silicon chip source quality on the open circuit voltage of polycrystalline cells is proposed, including: selecting batches of standard polycrystalline silicon chips, and producing batches of standard polycrystalline cells under standard processes; For each of the standard polycrystalline cells in the batch, use the method in the first aspect to obtain the corresponding minority carrier lifetime parameter LT as a quantitative parameter of silicon wafer quality; for each of the standard polycrystalline cells in the batch, measure its Corresponding open-circuit voltage V oc ; and based on the minority carrier lifetime parameter LT and open-circuit voltage V oc of the batch of standard polycrystalline cells, a primary analytical formula is fitted: V oc =k·LT+b, where b is a constant, and the coefficient k characterizes the impact of the quality of the silicon chip source on V oc .

上述方法中,在多个硅棒切片后等间选取,以选择所述批量的标准多晶硅片。In the above method, after a plurality of silicon rods are sliced, they are equally selected to select the batch of standard polysilicon wafers.

根据本发明的第四方面,提出一种评估太阳能电池的制作工艺对多晶电池开路电压的影响的方法,包括:根据第三方面的方法,获得标准片工艺下Voc与LT的关系式Voc=k·LT+b;测试以待评估工艺制作的批量多晶电池中每一个的开路电压Voc1;根据第一方面的方法,测试所述批量多晶电池中每一个的少子寿命参数LT1;计算LT1的平均值,将该平均值代入所述关系式Voc=k·LT+b,得到标准片工艺下的平均开路电压Voc0;以及以Voc1与Voc0之间的差值α表征待评估工艺与标准片工艺之间开路电压Voc的差。According to the fourth aspect of the present invention, a method for evaluating the influence of the manufacturing process of solar cells on the open circuit voltage of polycrystalline cells is proposed, including: according to the method of the third aspect, obtaining the relational expression V of V oc and LT under the standard sheet technology oc = k·LT+b; test the open circuit voltage V oc1 of each batch of polycrystalline cells manufactured by the process to be evaluated; according to the method of the first aspect, test the minority carrier lifetime parameter LT1 of each of the batch polycrystalline cells ; Calculate the average value of LT1, and substitute the average value into the relational formula V oc =k·LT+b to obtain the average open-circuit voltage V oc0 under the standard chip process; and the difference α between V oc1 and V oc0 Characterize the difference in open circuit voltage V oc between the process to be evaluated and the standard chip process.

根据本发明的第五方面,提出一种太阳能电池的在线工艺监控方法,包括:根据第四方面的方法在线获得差值α;以及基于所述差值α判定待评估工艺相比于标准片工艺的稳定性。。According to a fifth aspect of the present invention, an online process monitoring method for solar cells is proposed, comprising: obtaining the difference α online according to the method of the fourth aspect; and determining the process to be evaluated compared to the standard sheet process based on the difference α stability. .

附图说明Description of drawings

包括附图是为提供对本发明进一步的理解,它们被收录并构成本申请的一部分,附图示出了本发明的实施例,并与本说明书一起起到解释本发明原理的作用。附图中:The accompanying drawings are included to provide further understanding of the present invention, and they are incorporated and constitute a part of this application. The accompanying drawings illustrate embodiments of the present invention and together with the specification serve to explain the principle of the present invention. In the attached picture:

图1a示出根据本发明的实施例的多晶电池的电致发光(EL)图像。Figure 1a shows an electroluminescence (EL) image of a polycrystalline cell according to an embodiment of the present invention.

图1b示出根据本发明的实施例对图1a的图像进行处理后得到的少子寿命图。Fig. 1b shows a minority carrier lifetime diagram obtained after processing the image in Fig. 1a according to an embodiment of the present invention.

图2示出标准片的开路电压和少子寿命之间的关系。Figure 2 shows the relationship between the open circuit voltage and the minority carrier lifetime of a standard sheet.

具体实施方式Detailed ways

以下结合附图描述详细本发明,包括本发明所基于的技术原理,以及典型的实施方式。The present invention is described in detail below with reference to the accompanying drawings, including the technical principle on which the present invention is based, and typical implementations.

本申请所提出的发明可包括以下方面:The invention proposed by this application may include the following aspects:

1.图像获得1. Image acquisition

根据本发明,可获得多晶电池的电致发光(EL)或光致发光(PL)图像,二者图像类似。图1(a)示例给出了电致发光图像。图像的位深可为16位或更高。According to the invention, electroluminescence (EL) or photoluminescence (PL) images of polycrystalline cells can be obtained, both images being similar. Figure 1(a) exemplifies the electroluminescence image. Images can have a bit depth of 16 bits or higher.

2.图像处理2. Image processing

根据本发明的图像处理主要是EL/PL图像中永久缺陷的信息提取。PL或EL图像都是辐射复合的结果,因此其像素点亮度的应正比于过剩载流子Δn和本底掺杂浓度(p0或n0)。在注入浓度一定的情况下,Δn与像素点所在位置的少子寿命有关。多晶中的某些晶体结构缺陷尺度小、复合能力强,因而会带来Δn在空间尺度上的突变,因而像素点亮度会发生相应突变。而本底掺杂浓度由铸锭工艺的分凝和电池工艺的扩散造成,这两种工艺的特点都决定其不可能造成EL(PL)亮度的突变,而只会在大尺度上带来亮度不均。本发明的实施例示例地采用50×50最大值滤波,并与原始图像相减后,再经线性变换(此步骤可选,线性变化旨在基于假设的标定值将亮度差值转为少子寿命)并用掩膜去掉栅线部分,得到少子寿命图像(见图1b),并计算其平均少子寿命,得到少子寿命参数LT。最大值滤波的形式如下:Image processing according to the invention is mainly information extraction of permanent defects in EL/PL images. PL or EL images are the result of radiation recombination, so the brightness of the pixels should be proportional to the excess carrier Δn and background doping concentration (p 0 or n 0 ). In the case of a certain implantation concentration, Δn is related to the minority carrier lifetime at the location of the pixel. Some crystal structure defects in polycrystals are small in size and strong in recombination ability, which will bring about sudden changes in the spatial scale of Δn, and corresponding sudden changes in pixel brightness. The background doping concentration is caused by the segregation of the ingot process and the diffusion of the battery process. The characteristics of these two processes determine that it is impossible to cause a sudden change in the EL (PL) brightness, but only bring brightness on a large scale. uneven. The embodiment of the present invention exemplarily adopts 50×50 maximum value filtering, subtracts from the original image, and then undergoes linear transformation (this step is optional, the purpose of linear transformation is to convert the brightness difference into minority carrier lifetime based on the assumed calibration value ) and use a mask to remove the part of the grid lines to obtain the minority carrier lifetime image (see Figure 1b), and calculate the average minority carrier lifetime to obtain the minority carrier lifetime parameter LT. The form of maximum filtering is as follows:

βi,j=Mi,j-max(Ri,j)   (式1)β i,j =M i,j -max(R i,j ) (Formula 1)

上述式1中,Mi,j表示当前待考察的像素点(i,j)的亮度,max(Ri,j)表示当前待考察像素邻域中的最大值,Βi,j表示二者的差值。In the above formula 1, M i,j represents the brightness of the pixel point (i,j) to be investigated currently, max(R i,j ) represents the maximum value in the neighborhood of the pixel currently to be investigated, and Β i,j represents the difference.

通过上述处理,从EL/PL图像出提取出少子寿命参数LT,其可作为硅片质量的量化参数。Through the above processing, the minority carrier lifetime parameter LT is extracted from the EL/PL image, which can be used as a quantitative parameter of silicon wafer quality.

补充说明:少子寿命图像上的亮度值在原理上是正比于少子寿命的。本方法考察亮度偏离的相对值,因此不必标定具体二者的具体比值,直接以亮度值来表征少子寿命即可。Supplementary explanation: The brightness value on the minority carrier lifetime image is proportional to the minority carrier lifetime in principle. This method examines the relative value of the brightness deviation, so it is not necessary to calibrate the specific ratio of the two, and the minority carrier lifetime can be directly represented by the brightness value.

3.标准电池片测试和标准曲线获得3. Standard cell test and standard curve acquisition

根据本发明,可选取一组系统选择多晶硅片,例如50-100片,这些标准片具有不同的质量等级。选取方法可以是多个硅棒切片后等间隔选取,以保证硅片质量具有代表性。将硅片一次投入某一稳定工艺制成电池片。测试每一片电池的Voc和EL图像,并用步骤2的方法计算出其少子寿命参数LT。将对应的Voc和LT绘成散点图,可得如图2所示的一次关系,按一次关系拟合出其解析式According to the present invention, a group of systematically selected polysilicon wafers can be selected, for example, 50-100 wafers, and these standard wafers have different quality levels. The selection method can be to select multiple silicon rods at equal intervals after slicing to ensure that the quality of the silicon wafers is representative. Throw silicon wafers into a stable process to make cells. Test the V oc and EL images of each battery, and use the method in step 2 to calculate its minority carrier lifetime parameter LT. Draw the corresponding V oc and LT into a scatter diagram, and the primary relationship shown in Figure 2 can be obtained, and its analytical formula can be fitted according to the primary relationship

Voc=k·LT+b   (式2)V oc =k·LT+b (Formula 2)

上式中,b为常数,系数k表示以LT所表征的硅片质量对开路电压Voc的影响。由此,对于不同质量的硅片片源,在获知其少子寿命参数LT后,即可判断其质量优劣,且可判断质量差异对电池性能(Voc)的影响大小。In the above formula, b is a constant, and the coefficient k represents the influence of the quality of the silicon chip represented by LT on the open circuit voltage V oc . Therefore, for silicon wafer sources of different quality, after knowing the minority carrier lifetime parameter LT, the quality can be judged, and the influence of quality difference on battery performance (V oc ) can be judged.

4.任意批次多晶电池的工艺和片源评价4. Process and chip source evaluation of any batch of polycrystalline cells

根据本发明,可取未知工艺和片源的电池一批,测出电池的Voc1,并根据EL(PL)图像计算少子寿命参数LT1。计算LT1的平均值,将该平均值代入式2计算得Voc0,令α=Voc0-Voc1,则α为所测电池片与标准电池片之间因工艺造成Voc差异。监控α的大小,即可评价工艺的稳定性。例如,当α的大小超过一阈值时,则可认为待评价的未知工艺和标准工艺相比有较大偏差。According to the present invention, a batch of batteries with unknown technology and chip source can be taken, the V oc1 of the batteries can be measured, and the minority carrier lifetime parameter LT1 can be calculated according to the EL (PL) image. Calculate the average value of LT1, and substitute the average value into formula 2 to calculate V oc0 , let α=V oc0 -V oc1 , then α is the V oc difference between the measured cell and the standard cell due to the process. The stability of the process can be evaluated by monitoring the size of α. For example, when the magnitude of α exceeds a threshold, it can be considered that the unknown process to be evaluated has a large deviation compared with the standard process.

如上所述,少子寿命参数LT本身可代表硅片质量,因此,通过监控参数LT即可判断硅片质量的优劣。也可将两种片源间(待测硅片和基准硅片间)的LT差值△LT代入式2,求出片源间折合开压差值△VocAs mentioned above, the minority carrier lifetime parameter LT itself can represent the quality of the silicon wafer. Therefore, the quality of the silicon wafer can be judged by monitoring the parameter LT. It is also possible to substitute the LT difference △LT between the two chip sources (between the silicon wafer to be tested and the reference silicon wafer) into Equation 2 to obtain the equivalent opening voltage difference △V oc between the chip sources.

以上描述了本发明的多个方面。上述描述方式仅为便于表述本发明的技术原理和构思,而不应视为对本发明范围的限制。例如,以上描述了对多晶电池的工艺和片源均进行评价的方案,但本领域技术人员应理解,本发明应涵盖单独对工艺进行评价,和单独对片源质量进行评价的实施方式。The foregoing describes various aspects of the invention. The above description is only for expressing the technical principles and concepts of the present invention, and should not be regarded as limiting the scope of the present invention. For example, the above describes the scheme of evaluating both the process and the chip source of polycrystalline cells, but those skilled in the art should understand that the present invention should cover the embodiment of evaluating the process alone and the quality of the chip source alone.

实施例1:Example 1:

实施例1旨在提取出量化参数用于表征多晶电池的硅片质量。实施例1可包括:Embodiment 1 aims to extract quantitative parameters for characterizing the quality of silicon wafers of polycrystalline cells. Example 1 may include:

1)获取太阳能电池的EL/PL图像;1) Obtain the EL/PL image of the solar cell;

2)对EL/PL图像进行处理,以提取少子寿命参数LT,作为表征多晶电池的硅片质量的量化参数。2) The EL/PL image is processed to extract the minority carrier lifetime parameter LT, which is used as a quantitative parameter to characterize the quality of the silicon wafer of the polycrystalline cell.

进一步,基于少子寿命参数LT,可判断硅片片源的优劣,可在线监控硅片片源的质量。Further, based on the minority carrier lifetime parameter LT, the quality of the silicon wafer source can be judged, and the quality of the silicon wafer source can be monitored online.

实施例2:Example 2:

实施例2旨在评价多晶硅片质量对太阳能电池的开路电压的影响。实施例1可包括:Example 2 aims to evaluate the influence of the quality of the polycrystalline silicon wafer on the open circuit voltage of the solar cell. Example 1 may include:

1)挑选一定批量硅片,在一定工艺下一次制成电池片。1) Select a certain batch of silicon wafers, and make cells in a certain process.

2)测试电池Voc和EL,并计算其少子寿命参数LT。2) Test battery V oc and EL, and calculate its minority carrier lifetime parameter LT.

3)由图2中标准片源Voc和LT曲线可知,用步骤2算出的LT与Voc线性相关。因此,可按一次关系拟合Voc和少子寿命LT关系,得到单位LT对电池Voc的影响(式2中的k)。3) It can be seen from the standard film source V oc and LT curves in Figure 2 that the LT calculated in step 2 is linearly related to V oc . Therefore, the relationship between V oc and minority carrier lifetime LT can be fitted according to the first-order relationship to obtain the influence of unit LT on battery V oc (k in Equation 2).

实施例3:Example 3:

实施例3旨在评价电池制作工艺对太阳能电池的开路电压的影响。实施例3可包括:Example 3 aims to evaluate the influence of the cell manufacturing process on the open circuit voltage of the solar cell. Example 3 may include:

1)在已知标准片开路电压-寿命关系的前提下(如图2中拟合曲线公式),1) On the premise that the relationship between the open circuit voltage and life of the standard chip is known (as shown in the fitting curve formula in Figure 2),

测试一组未知硅片片源和电池工艺的多晶电池片,得到每片电池的Voc1及LT1。Test a group of polycrystalline solar cells with unknown silicon source and cell technology, and get V oc1 and LT1 of each cell.

2)计算LT1的平均值,将该平均值代入公式2,计算出标准片工艺下的平均Voc02) Calculate the average value of LT1, substitute the average value into formula 2, and calculate the average V oc0 under the standard chip process.

3)Voc1与Voc0的差值α即被测电池与标准片工艺间Voc的差。3) The difference α between V oc1 and V oc0 is the difference of V oc between the tested battery and the standard sheet process.

进一步,基于差值α,可在线监控太阳能电池的制作工艺的稳定性。Further, based on the difference α, the stability of the manufacturing process of the solar cell can be monitored online.

发明的效果The effect of the invention

本发明利用电池片的EL(PL)图像提取出量化参数用于表征多晶电池的硅片质量。进一步,基于所提取的量化参数,并结合Voc测试,本发明可快速地判定电池工艺和多晶硅片片源的优劣。两种测试方法测试时间都小于1秒,可制作成在线方式监控电池工艺稳定性和多晶片源质量优劣。The invention uses the EL (PL) image of the cell to extract quantitative parameters to characterize the quality of the silicon sheet of the polycrystalline cell. Further, based on the extracted quantitative parameters and combined with the V oc test, the present invention can quickly determine the pros and cons of the battery technology and polysilicon wafer source. The test time of the two test methods is less than 1 second, and can be made into an online mode to monitor the stability of the battery process and the quality of the multi-chip source.

Claims (10)

1.一种提取量化参数用于表征多晶电池的硅片质量的方法,包括:1. A method for extracting quantitative parameters for characterizing the quality of silicon wafers of polycrystalline cells, comprising: 获取多晶电池的电致发光EL图像或光致发光PL图像;Obtain electroluminescence EL images or photoluminescence PL images of polycrystalline cells; 处理所述EL或PL图像,以获得少子寿命图像,其中对所述EL或PL图像的处理包括:对所述EL图像或PL图像进行最大值滤波,将滤波后的图像与原始图像相减,对相减后的图像进行可选的线性变换,并用掩模去除栅线部分;processing the EL or PL image to obtain a minority carrier lifetime image, wherein the processing of the EL or PL image includes: performing maximum filtering on the EL image or PL image, subtracting the filtered image from the original image, An optional linear transformation is performed on the subtracted image and a mask is used to remove the raster lines; 基于所述少子寿命图像计算所述多晶电池的少子寿命参数LT;以及calculating a minority carrier lifetime parameter LT of the polycrystalline battery based on the minority carrier lifetime image; and 使用所述少子寿命参数LT作为硅片质量的量化参数。The minority carrier lifetime parameter LT is used as a quantitative parameter of silicon wafer quality. 2.如权利要求1所述的方法,其特征在于,所述最大值滤波的形式为:2. The method according to claim 1, wherein the form of the maximum value filter is: βi,j=Mi,j-max(Ri,j),β i,j = M i,j -max(R i,j ), 其中Mi,j表示当前待考察的像素点(i,j)的亮度,max(Ri,j)表示当前待考察像素邻域中的最大值,Βi,j表示二者的差值。Among them, M i,j represents the brightness of the pixel point (i,j) to be investigated currently, max(R i,j ) represents the maximum value in the neighborhood of the pixel to be investigated currently, and Β i,j represents the difference between the two. 3.如权利要求1所述的方法,其特征在于,所述少子寿命图像上各像素的亮度对应于硅片上该像素位置的少子寿命。3. The method according to claim 1, wherein the brightness of each pixel on the minority carrier lifetime image corresponds to the minority carrier lifetime of the pixel position on the silicon wafer. 4.如权利要求1所述的方法,其特征在于,所述少子寿命图像上各像素的亮度对应于硅片上该像素位置的永久缺陷信息。4. The method according to claim 1, wherein the brightness of each pixel on the minority carrier lifetime image corresponds to the permanent defect information of the pixel position on the silicon wafer. 5.如权利要求1所述的方法,其特征在于,基于所述少子寿命图像计算平均少子寿命,以得到所述少子寿命参数LT。5. The method according to claim 1, wherein the average minority carrier lifetime is calculated based on the minority carrier lifetime image to obtain the minority carrier lifetime parameter LT. 6.一种太阳能电池的在线多晶硅片片源质量监控方法,包括:6. A method for monitoring the quality of an online polysilicon wafer source for solar cells, comprising: 根据权利要求1-5中任一项所述的方法,在线获得少子寿命参数LT;以及According to the method according to any one of claims 1-5, the minority carrier lifetime parameter LT is obtained online; and 使用所述少子寿命参数LT作为硅片质量的量化参数,比较片源间的质量差异。The minority carrier lifetime parameter LT is used as a quantitative parameter of silicon wafer quality to compare quality differences among wafer sources. 7.一种评估多晶硅片片源质量对多晶电池开路电压的影响的方法,包括:7. A method for evaluating the influence of polycrystalline silicon chip source quality on the open circuit voltage of polycrystalline cells, comprising: 选择批量的标准多晶硅片,在标准工艺下制作得到批量的标准多晶电池;Select batches of standard polycrystalline silicon wafers, and manufacture batches of standard polycrystalline cells under standard processes; 对所述批量的标准多晶电池中每一个,使用权利要求1-5中任一项的方法以获得相应的少子寿命参数LT作为硅片质量的量化参数;For each of the standard polycrystalline cells in the batch, use the method of any one of claims 1-5 to obtain the corresponding minority carrier lifetime parameter LT as a quantitative parameter of silicon wafer quality; 对所述批量的标准多晶电池中每一个,测量其相应的开路电压Voc;以及For each of the batch of standard polycrystalline cells, measuring its corresponding open circuit voltage V oc ; and 基于所述批量的标准多晶电池的少子寿命参数LT和开路电压Voc,拟合出一次解析式:Based on the minority carrier lifetime parameter LT and the open circuit voltage V oc of the batch of standard polycrystalline cells, a primary analytical formula is fitted: Voc=k·LT+bV oc =k·LT+b 其中b为常数,系数k表征硅片片源质量对Voc的影响。Among them, b is a constant, and the coefficient k represents the influence of the quality of the silicon chip source on V oc . 8.如权利要求7所述的方法,其特征在于,在多个硅棒切片后等间选取,以选择所述批量的标准多晶硅片,所述批量的多晶硅片具有两个或更多个质量等级。8. The method according to claim 7, characterized in that, after a plurality of silicon rods are sliced, they are equally selected to select the batch of standard polysilicon wafers, and the batches of polysilicon wafers have two or more quality grade. 9.一种评估太阳能电池的制作工艺对多晶电池开路电压的影响的方法,包括:9. A method for evaluating the influence of a manufacturing process of a solar cell on the open circuit voltage of a polycrystalline cell, comprising: 根据权利要求7或8所述的方法,获得标准片工艺下Voc与LT的关系式Voc=k·LT+b;According to the method described in claim 7 or 8, obtain the relational expression V oc =k·LT+b of V oc and LT under the standard sheet technology; 测试以待评估工艺制作的批量多晶电池中每一个的开路电压Voc1Test the open circuit voltage V oc1 of each of the batch polycrystalline cells fabricated by the process to be evaluated; 根据权利要求1-5中任一项所述的方法,测试所述批量多晶电池中每一个的少子寿命参数LT1;According to the method according to any one of claims 1-5, testing the minority carrier lifetime parameter LT1 of each of the batch polycrystalline cells; 计算LT1的平均值,将该平均值代入所述关系式Voc=k·LT+b,得到标准片工艺下的平均开路电压Voc0;以及Calculate the average value of LT1, and substitute the average value into the relational formula V oc =k·LT+b to obtain the average open circuit voltage V oc0 under the standard chip process; and 以Voc1与Voc0之间的差值α表征待评估工艺与标准片工艺之间开路电压Voc的差。The difference α between V oc1 and V oc0 is used to represent the difference in open circuit voltage V oc between the process to be evaluated and the standard chip process. 10.一种太阳能电池的在线工艺监控方法,包括:10. An online process monitoring method for solar cells, comprising: 根据权利要求9所述的方法在线获得差值α;以及Obtaining the difference α online according to the method according to claim 9; and 基于所述差值α判定待评估工艺相比于标准片工艺的稳定性。Based on the difference α, the stability of the process to be evaluated compared to the standard sheet process is judged.
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