CN103305810A - Equipment for preparing thin films and spraying patterns by spraying and burning - Google Patents
Equipment for preparing thin films and spraying patterns by spraying and burning Download PDFInfo
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- CN103305810A CN103305810A CN2013102405277A CN201310240527A CN103305810A CN 103305810 A CN103305810 A CN 103305810A CN 2013102405277 A CN2013102405277 A CN 2013102405277A CN 201310240527 A CN201310240527 A CN 201310240527A CN 103305810 A CN103305810 A CN 103305810A
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Abstract
The invention discloses equipment for preparing thin films and spraying patterns by spraying and burning. The equipment comprises an outer cover, a lower platform, a substrate, a spraying and burning device and an air extracting device, wherein a settling chamber is arranged in the outer cover; the lower platform is arranged at the center of the bottom part of the outer cover; the substrate is arranged on the lower platform; the spraying and burning device is arranged above the substrate; the outer cover is provided with an air extracting hole communicated with the inner part of the outer cover; the extracting device is connected with the air extracting hole and is arranged outside the outer cover; the substrate is movably arranged on the lower platform by a moving device; the spraying and burning device is movably arranged above the substrate by a movable adjusting device; the outer cover is externally provided with a moving-speed control device; the moving speed control device controls the moving speed of the moving device and the movable adjusting device. The equipment disclosed by the invention has the advantages that the quality of the prepared thin films is good; the thickness uniformity can meet the requirement of high accuracy; the thin films can be prepared on the substrate with lower heat resistance; the patterns also can be formed on the substrate by spraying.
Description
Technical field
The present invention relates to a kind of equipment for preparing film and spray patterns, relate in particular to a kind of equipment that utilizes the spray burning method to prepare film and spray patterns.
Background technology
The method of film preparation has a variety of, such as sol-gel method, chemical vapour deposition, the chemical processes such as metal organic salt deposition, also comprise rheotaxy, sputter, the physical methods such as evaporation, also a kind of spray heating decomposition commonly used prepares film now, this method is used equipment as shown in Figure 1, when preparing film in this way, after compressed air atomizer 101 atomizings of the solution for preparing, under the drive of current-carrying gas, be placed with in the container that is heated substrate 103 by nozzle 102 spirts, make atomization mass volatilization desolventizing and after nichrome wire 104 bakings go on foot to decompose and be deposited on film forming on the substrate, obtain the film of bright and clean at substrate.
Aforesaid method is in the process of preparation film, there is following problems: because the process of spraying film forming is for carrying out gradually from level to level, therefore cause the last uneven film thickness that forms even, middle portion usually occurs and reached thickness requirement, and the thickness of film periphery does not reach requirement, and therefore above-mentioned spraying pyrolysis device can't be prepared the film of even thickness.
Chinese invention patent " equipment for producing thin film with flame atomizing thermal decomposition ", application number is 200710304423.2, Granted publication number is CN100585001C, a kind of equipment for producing thin film with flame atomizing thermal decomposition is disclosed, this equipment can directly spray the material for preparing film with flame mode, be ejected on the substrate, to prepare easily and fast the film of even thickness, the spraying pyrolysis device that has solved prior art can't be prepared the problem of the film of even thickness.But, above-mentioned equipment for producing thin film with flame atomizing thermal decomposition, flame-thrower nozzle and substrate can only relatively move in system of coordinates in Y-direction formation, and the film gauge uniformity that causes above-mentioned equipment to be prepared can't satisfy high-precision requirement; Above-mentioned equipment can only at preferably substrate (such as pottery, metal and glass) preparation of heat-resisting degree film, in case at the lower substrate of heat-resisting degree (such as plastics and paper) preparation film, can cause substrate to burn, can't prepare; Above-mentioned equipment can't form pattern in the substrate spraying.In addition, above-mentioned equipment is by flame-thrower nozzle ejection fuel combustion, the thin-film material that will spray from fog nozzle is ejected on the substrate film forming after the thermal-flame of flame-out port decomposes, and causes thin-film material to decompose not thorough, has affected the quality of the film of preparing.
Summary of the invention
Technical problem for above-mentioned existence, the objective of the invention is: proposed the equipment that a kind of spray burning prepares film and spray patterns, the film quality that this equipment is prepared is good, the thickness evenness precision is high, and can prepare film at the lower substrate of heat-resisting degree, this equipment can form pattern in the substrate spraying again.
Technical solution of the present invention is achieved in that a kind of spray burning prepares the equipment of film and spray patterns, comprise outer cover, lower platform, substrate, spray burning device and air extractor, described outer cover inside is the sediment chamber, described lower platform is arranged on the outer cover bottom center, described substrate is arranged on the lower platform, described spray burning device is arranged on the substrate top, have the aspirating hole that communicates with outer cover inside on the described outer cover, described air extractor links to each other with aspirating hole, described air extractor is arranged on outside the outer cover, and described substrate movably is arranged on the lower platform by running gear; Described spray burning device movably is arranged on the substrate top by device for moving and adjusting; Described outer cover is provided with control device outward; Travel direction and the translational speed of described control device control running gear and device for moving and adjusting.
Preferably, described running gear is mobile platform.
Preferably, described mobile platform is transport tape or slide unit.
Preferably, described device for moving and adjusting comprises and moves horizontally setting device and vertical device for moving and adjusting; The described setting device control spray burning device that moves horizontally moves horizontally in the sediment chamber; Described vertical device for moving and adjusting control spray burning device vertical motion in the sediment chamber.
Preferably, the described setting device that moves horizontally comprises vertical rack, horizontal guide rail and slide unit; Described vertical rack is provided with two, is symmetricly set in the sediment chamber; Be provided with horizontal guide rail between described two vertical racks; Described horizontal guide rail is provided with can be along the slide unit of horizontal guide rail move left and right; Described slide unit is connected with the spray burning device by vertical device for moving and adjusting.
Preferably, described spray burning device comprises flame-thrower nozzle, flammable liquid precursor feed-pipe, flammable liquid precursor feedway, compression combustion-supporting gas inlet pipe, compression combustion-supporting gas feedway, combustion-supporting gas gonosome inlet pipe, combustion-supporting property gas supply device, inflammable gas inlet pipe and inflammable gas feedway; Described flammable liquid precursor feedway is connected with flammable liquid precursor feed-pipe, passes into flammable liquid precursor in flammable liquid precursor feed-pipe; Described flammable liquid precursor feed-pipe is connected with flame-thrower nozzle; Described compression combustion-supporting gas feedway is connected with compression combustion-supporting gas inlet pipe, passes into the compression combustion-supporting gas in compression combustion-supporting gas inlet pipe; Described compression combustion-supporting gas inlet pipe is connected with flame-thrower nozzle; The air outlet of described compression combustion-supporting gas inlet pipe distributes in the form of a ring around the spout of flammable liquid precursor feed-pipe; Described combustion-supporting property gas supply device is connected with combustion-supporting property gas feed pipe, passes into combustion-supporting property gas in combustion-supporting property gas feed pipe; Described inflammable gas feedway is connected with the inflammable gas feed-pipe, passes into inflammable gas in the inflammable gas feed-pipe; Described combustion-supporting property gas inlet pipe is connected with the inflammable gas inlet pipe, forms pipe connecting; Described pipe connecting is connected with flame-thrower nozzle; Described pipe connecting is divided into two-way at least in flame-thrower nozzle; Described two-way flame-out port converges at the spout of flammable liquid precursor feed-pipe; Described flammable liquid precursor feedway, compression combustion-supporting gas feedway, combustion-supporting property gas supply device and inflammable gas feedway are arranged on outside the outer cover.
Preferably, described spray burning device comprises flame-thrower nozzle, heating atomization device, flammable liquid precursor feed-pipe, flammable liquid precursor feedway, combustion-supporting property gas inlet pipe, combustion-supporting property gas supply device, inflammable gas inlet pipe and inflammable gas feedway; Described flammable liquid precursor feedway is connected with flammable liquid precursor feed-pipe, passes into flammable liquid precursor in flammable liquid precursor feed-pipe; Described flammable liquid precursor feed-pipe is connected with flame-thrower nozzle by the heating atomization device; Described combustion-supporting property gas supply device is connected with combustion-supporting property gas feed pipe, passes into combustion-supporting property gas in combustion-supporting property gas feed pipe; Described inflammable gas feedway is connected with the inflammable gas feed-pipe, passes into inflammable gas in the inflammable gas feed-pipe; Described combustion-supporting property gas inlet pipe is connected with the inflammable gas inlet pipe, forms pipe connecting; Described pipe connecting is connected with flame-thrower nozzle; Described pipe connecting is divided into two-way at least in flame-thrower nozzle; Described two-way flame-out port converges at the spout of flammable liquid precursor feed-pipe; Described flammable liquid precursor feedway, combustion-supporting property gas supply device and inflammable gas feedway are arranged on outside the outer cover.
Preferably, described spray burning device also comprises protective gas inlet pipe and protective gas feedway; Described protective gas feedway is connected with the protective gas inlet pipe, passes into protective gas in the protective gas inlet pipe; Described protective gas inlet pipe is connected with flame-thrower nozzle; The air outlet of described protective gas inlet pipe distributes in the form of a ring around the spout of flammable liquid precursor feed-pipe; Described protective gas feedway is arranged on outside the outer cover.
Preferably, described flammable liquid precursor feed-pipe, compression combustion-supporting gas inlet pipe, combustion-supporting gas inlet pipe, inflammable gas inlet pipe and protective gas inlet pipe are provided with current velocity controller.
Preferably, described protective gas is rare gas element.
Because the utilization of technique scheme, the present invention compared with prior art has following advantages:
Spray burning of the present invention prepares the equipment of film and spray patterns, and spray burning device and substrate can relatively move in system of coordinates in the formation of XYZ direction, so that the film gauge uniformity of preparing can satisfy high-precision requirement; Can be at preferably substrate (such as pottery, metal and glass) preparation of heat-resisting degree film, even at the lower substrate of heat-resisting degree (such as plastics and paper) preparation film, also can not cause substrate to burn; Can also form pattern in the substrate spraying; Simultaneously, when the preparation film, when combustion-supporting property gas and inflammable gas mixture combustion, light the flammable liquid precursor of spout, form thermal-flame, flammable liquid precursor is decomposed through combustion high temperature, so that flammable liquid precursor complete decomposition, improved the quality of the film of preparing.
Description of drawings
Below in conjunction with accompanying drawing technical solution of the present invention is described further:
Accompanying drawing 1 prepares the structural representation of the equipment of film for the spraying thermolysis of prior art;
Accompanying drawing 2 prepares the structural representation of the equipment of film and spray patterns for the spray burning of the embodiment of the invention one;
Accompanying drawing 3 prepares the structural representation of spray burning device of the equipment of film and spray patterns for the spray burning of the embodiment of the invention one;
Accompanying drawing 4 prepares the structural representation of the equipment of film and spray patterns for the spray burning of the embodiment of the invention two;
Accompanying drawing 5 prepares the structural representation of spray burning device of the equipment of film and spray patterns for the spray burning of the embodiment of the invention two;
Wherein: 101, Compressed Air Nebulizer; 102, nozzle; 103, substrate; 104, nichrome wire; 1, outer cover; 2, lower platform; 3, substrate; 4, air extractor; 5, aspirating hole; 6, control device; 7, mobile platform; 8, vertical device for moving and adjusting; 9, support; 10, horizontal guide rail; 11, slide unit; 12, flame-thrower nozzle; 13, heating atomization device; 14, flammable liquid precursor feed-pipe; 15, flammable liquid precursor feedway; 16, combustion-supporting gas gonosome inlet pipe; 17, combustion-supporting property gas supply device; 18, inflammable gas inlet pipe; 19, inflammable gas feedway; 20, pipe connecting; 21, protective gas inlet pipe; 22, protective gas feedway; 23, current velocity controller; 24, compression combustion-supporting gas inlet pipe; 25, compression combustion-supporting gas feedway.
Embodiment
Below in conjunction with accompanying drawing the present invention is described.
Embodiment 1:
Such as accompanying drawing 2, of the present invention a kind of spray burning shown in 3 prepares the equipment of film and spray patterns, comprise outer cover 1, lower platform 2, substrate 3, spray burning device and air extractor 4, the inside of described outer cover 1 is the sediment chamber, described lower platform 2 is arranged on outer cover 1 bottom center, described substrate 3 is arranged on the lower platform 2, described spray burning device is arranged on substrate 3 tops, have the aspirating hole 5 that communicates with outer cover 1 inside on the described outer cover 1, described air extractor 4 links to each other with aspirating hole 5, described air extractor 4 is arranged on outside the outer cover, and described substrate 3 movably is arranged on the lower platform 2 by running gear; Described spray burning device movably is arranged on substrate 3 tops by device for moving and adjusting; The described outer cover 1 outer control device 6 that is provided with; Travel direction and the translational speed of described control device 6 control running gears and device for moving and adjusting; Described running gear is mobile platform 7; Described device for moving and adjusting comprises and moves horizontally setting device and vertical device for moving and adjusting 8; The described setting device control spray burning device that moves horizontally moves horizontally in the sediment chamber; Described vertical device for moving and adjusting 8 control spray burning devices vertical motion in the sediment chamber; The described setting device that moves horizontally comprises vertical rack 9, horizontal guide rail 10 and slide unit 11; Described vertical rack 9 is provided with two, is symmetricly set in the sediment chamber; 9 of described two vertical racks are provided with horizontal guide rail 10; Described horizontal guide rail 10 is provided with can be along the slide unit 11 of horizontal guide rail 10 move left and right; Described slide unit 11 is connected with the spray burning device by vertical device for moving and adjusting 8; Described spray burning device comprises flame-thrower nozzle 12, heating atomization device 13, flammable liquid precursor feed-pipe 14, flammable liquid precursor feedway 15, combustion-supporting property gas gonosome inlet pipe 16, combustion-supporting property gas supply device 17, inflammable gas inlet pipe 18 and inflammable gas feedway 19; Described flammable liquid precursor feedway 15 is connected with flammable liquid precursor feed-pipe 14, passes into flammable liquid precursor in flammable liquid precursor feed-pipe 14; Described flammable liquid precursor feed-pipe 14 is connected with flame-thrower nozzle 12 by heating atomization device 13; Described combustion-supporting property gas supply device 17 is connected with combustion-supporting property gas feed pipe 16, passes into combustion-supporting property gas in combustion-supporting property gas feed pipe 16; Described inflammable gas feedway 19 is connected with inflammable gas feed-pipe 18, passes into inflammable gas in inflammable gas feed-pipe 18; Described combustion-supporting property gas inlet pipe 16 is connected with inflammable gas inlet pipe 18, forms pipe connecting 20; Described pipe connecting 20 is connected with flame-thrower nozzle 12; Described pipe connecting 20 is divided into two-way at least in flame-thrower nozzle 12; Described two-way flame-out port converges at the spout of flammable liquid precursor feed-pipe 14; Described flammable liquid precursor feedway 15, combustion-supporting property gas supply device 17 and inflammable gas feedway 19 are arranged on outside the outer cover 1; Described spray burning device also comprises protective gas inlet pipe 21 and protective gas feedway 22; Described protective gas feedway 22 is connected with protective gas inlet pipe 21, passes into protective gas in protective gas inlet pipe 21; Described protective gas inlet pipe 21 is connected with flame-thrower nozzle 12; The air outlet of described protective gas inlet pipe 21 distributes in the form of a ring around the spout of flammable liquid precursor feed-pipe 14; Described protective gas feedway 22 is arranged on outside the outer cover 1; Described flammable liquid precursor feed-pipe 14, combustion-supporting gas inlet pipe 16, inflammable gas inlet pipe 18 and protective gas inlet pipe 21 are provided with current velocity controller 23.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and is general, and described mobile platform 7 is transport tape or slide unit.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and is general, and described pipe connecting 20 is divided into four the tunnel in flame-thrower nozzle 12.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and described protective gas is rare gas element.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and described protective gas is rare gas element.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and further, described protective gas is any one of hydrogen, argon gas, nitrogen or its mixture.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and described current velocity controller 23 is variable valve.
Embodiment 2:
Such as accompanying drawing 4, of the present invention a kind of spray burning shown in 5 prepares the equipment of film and spray patterns, comprise outer cover 1, lower platform 2, substrate 3, spray burning device and air extractor 4, the inside of described outer cover 1 is the sediment chamber, described lower platform 2 is arranged on outer cover 1 bottom center, described substrate 3 is arranged on the lower platform 2, described spray burning device is arranged on substrate 3 tops, have the aspirating hole 5 that communicates with outer cover 1 inside on the described outer cover 1, described air extractor 4 links to each other with aspirating hole 5, described air extractor 4 is arranged on outside the outer cover, and described substrate 3 movably is arranged on the lower platform 2 by running gear; Described spray burning device movably is arranged on substrate 3 tops by device for moving and adjusting; The described outer cover 1 outer control device 6 that is provided with; Travel direction and the translational speed of described control device 6 control running gears and device for moving and adjusting; Described running gear is mobile platform 7; Described device for moving and adjusting comprises and moves horizontally setting device and vertical device for moving and adjusting 8; The described setting device control spray burning device that moves horizontally moves horizontally in the sediment chamber; Described vertical device for moving and adjusting 8 control spray burning devices vertical motion in the sediment chamber; The described setting device that moves horizontally comprises vertical rack 9, horizontal guide rail 10 and slide unit 11; Described vertical rack 9 is provided with two, is symmetricly set in the sediment chamber; 9 of described two vertical racks are provided with horizontal guide rail 10; Described horizontal guide rail 10 is provided with can be along the slide unit 11 of horizontal guide rail 10 move left and right; Described slide unit 11 is connected with the spray burning device by vertical device for moving and adjusting 8; Described spray burning device comprises flame-thrower nozzle 12, flammable liquid precursor feed-pipe 14, flammable liquid precursor feedway 15, compression combustion-supporting gas inlet pipe 24, compression combustion-supporting gas feedway 25, combustion-supporting property gas gonosome inlet pipe 16, combustion-supporting property gas supply device 17, inflammable gas inlet pipe 18 and inflammable gas feedway 19; Described flammable liquid precursor feedway 15 is connected with flammable liquid precursor feed-pipe 14, passes into flammable liquid precursor in flammable liquid precursor feed-pipe 14; Described flammable liquid precursor feed-pipe 14 is connected with flame-thrower nozzle 12; Described compression combustion-supporting gas feedway 25 is connected with compression combustion-supporting gas inlet pipe 24, passes into the compression combustion-supporting gas in compression combustion-supporting gas inlet pipe 24; Described compression combustion-supporting gas inlet pipe 24 is connected with flame-thrower nozzle 12; The air outlet of described compression combustion-supporting gas inlet pipe 24 distributes in the form of a ring around the spout of flammable liquid precursor feed-pipe 14; Described combustion-supporting property gas supply device 17 is connected with combustion-supporting property gas feed pipe 16, passes into combustion-supporting property gas in combustion-supporting property gas feed pipe 16; Described inflammable gas feedway 19 is connected with inflammable gas feed-pipe 18, passes into inflammable gas in inflammable gas feed-pipe 18; Described combustion-supporting property gas inlet pipe 16 is connected with inflammable gas inlet pipe 18, forms pipe connecting 20; Described pipe connecting 20 is connected with flame-thrower nozzle 12; Described pipe connecting 20 is divided into two-way at least in flame-thrower nozzle 12; Described two-way flame-out port converges at the spout of flammable liquid precursor feed-pipe 14; Described flammable liquid precursor feedway 14, compression combustion-supporting gas feedway 25, combustion-supporting property gas supply device 17 and inflammable gas feedway 19 are arranged on outside the outer cover 1; Described spray burning device also comprises protective gas inlet pipe 21 and protective gas feedway 22; Described protective gas feedway 22 is connected with protective gas inlet pipe 21, passes into protective gas in protective gas inlet pipe 21; Described protective gas inlet pipe 21 is connected with flame-thrower nozzle 12; The air outlet of described protective gas inlet pipe 21 distributes in the form of a ring around the spout of flammable liquid precursor feed-pipe 14; Described protective gas feedway 22 is arranged on outside the outer cover 1; Described flammable liquid precursor feed-pipe 14, combustion-supporting gas inlet pipe 16, inflammable gas inlet pipe 18 and protective gas inlet pipe 21 are provided with current velocity controller 23.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and is general, and described mobile platform 7 is transport tape or slide unit.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and is general, and described pipe connecting 20 is divided into four the tunnel in flame-thrower nozzle 12.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and described protective gas is rare gas element.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and further, described protective gas is any one of hydrogen, argon gas, nitrogen or its mixture.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and described current velocity controller 23 is variable valve.
When spray burning of the present invention prepares the equipment use of film and spray patterns, when the combustion-supporting property gas of spray burning device ejection and inflammable gas mixture combustion, light the flammable liquid precursor of spout, form thermal-flame, flammable liquid precursor is decomposed through combustion high temperature, so that flammable liquid precursor complete decomposition, improved the quality of the film of preparing.In preparation process, the spray burning device moves with vertical device for moving and adjusting 8 by moving horizontally setting device, substrate 3 moves by mobile platform 7, so that spray burning device and substrate 3 can be in system of coordinates the XYZ direction form and relatively move so that the film gauge uniformity of preparing can satisfy high-precision requirement; Can form pattern in substrate 3 sprayings; Relative moving speed is very fast, the heat that substrate 3 receives is just less, temperature variation is less, not only can heat-resisting degree preferably substrate 3(such as pottery, metal and glass) prepare film, even at heat-resisting degree lower substrate 3(such as plastics and paper) the preparation film, can not cause substrate 3 to burn yet.
Above-mentioned spray burning prepares the equipment of film and spray patterns, described protective gas can play the effect of heat radiation and cooling, so that flammable liquid precursor temperature behind pyrolytic decomposition reduces, prevent substrate and burn because of the flammable liquid precursor excess Temperature of ejection; If the reductibility material is arranged in the thin-film material that sprays in the nozzle, protective gas can also play the effect that prevents its oxidation.
Above-mentioned spray burning prepares the equipment of film and spray patterns, and control device 6 is controlled mobile platforms 7, moved horizontally travel direction and the translational speed of setting device and vertical device for moving and adjusting 8.Control device 6 can be divided into first control device and second control device, travel direction and the translational speed of first control device control mobile platform 7, and second control device control moves horizontally setting device and vertically travel direction and the translational speed of device for moving and adjusting 8, and control can guarantee the high precision of the film gauge uniformity prepared more like this.
Above-described embodiment only is explanation technical conceive of the present invention and characteristics; its purpose is to allow the personage that is familiar with technique can understand content of the present invention and is implemented; can not limit protection scope of the present invention with this; all equivalences that spirit is done according to the present invention change or modify, and all should be encompassed in protection scope of the present invention.
Claims (10)
1. a spray burning prepares the equipment of film and spray patterns, comprise outer cover, lower platform, substrate, spray burning device and air extractor, described outer cover inside is the sediment chamber, described lower platform is arranged on the outer cover bottom center, described substrate is arranged on the lower platform, described spray burning device is arranged on the substrate top, have the aspirating hole that communicates with outer cover inside on the described outer cover, described air extractor links to each other with aspirating hole, described air extractor is arranged on outside the outer cover, it is characterized in that: described substrate movably is arranged on the lower platform by running gear; Described spray burning device movably is arranged on the substrate top by device for moving and adjusting; Described outer cover is provided with control device outward; Travel direction and the translational speed of described control device control running gear and device for moving and adjusting.
2. spray burning according to claim 1 prepares the equipment of film and spray patterns, it is characterized in that: described running gear is mobile platform.
3. spray burning according to claim 2 prepares the equipment of film and spray patterns, it is characterized in that: described mobile platform is transport tape or slide unit.
4. spray burning according to claim 3 prepares the equipment of film and spray patterns, it is characterized in that: described device for moving and adjusting comprises and moves horizontally setting device and vertical device for moving and adjusting; The described setting device control spray burning device that moves horizontally moves horizontally in the sediment chamber; Described vertical device for moving and adjusting control spray burning device vertical motion in the sediment chamber.
5. spray burning according to claim 4 prepares the equipment of film and spray patterns, it is characterized in that: the described setting device that moves horizontally comprises vertical rack, horizontal guide rail and slide unit; Described vertical rack is provided with two, is symmetricly set in the sediment chamber; Be provided with horizontal guide rail between described two vertical racks; Described horizontal guide rail is provided with can be along the slide unit of horizontal guide rail move left and right; Described slide unit is connected with the spray burning device by vertical device for moving and adjusting.
6. one of according to claim 1～5 described spray burning prepares the equipment of film and spray patterns, it is characterized in that: described spray burning device comprises flame-thrower nozzle, flammable liquid precursor feed-pipe, flammable liquid precursor feedway, compression combustion-supporting gas inlet pipe, compression combustion-supporting gas feedway, combustion-supporting property gas gonosome inlet pipe, combustion-supporting property gas supply device, inflammable gas inlet pipe and inflammable gas feedway; Described flammable liquid precursor feedway is connected with flammable liquid precursor feed-pipe, passes into flammable liquid precursor in flammable liquid precursor feed-pipe; Described flammable liquid precursor feed-pipe is connected with flame-thrower nozzle; Described compression combustion-supporting gas feedway is connected with compression combustion-supporting gas inlet pipe, passes into the compression combustion-supporting gas in compression combustion-supporting gas inlet pipe; Described compression combustion-supporting gas inlet pipe is connected with flame-thrower nozzle; The air outlet of described compression combustion-supporting gas inlet pipe distributes in the form of a ring around the spout of flammable liquid precursor feed-pipe; Described combustion-supporting property gas supply device is connected with combustion-supporting property gas feed pipe, passes into combustion-supporting property gas in combustion-supporting property gas feed pipe; Described inflammable gas feedway is connected with the inflammable gas feed-pipe, passes into inflammable gas in the inflammable gas feed-pipe; Described combustion-supporting property gas inlet pipe is connected with the inflammable gas inlet pipe, forms pipe connecting; Described pipe connecting is connected with flame-thrower nozzle; Described pipe connecting is divided into two-way at least in flame-thrower nozzle; Described two-way flame-out port converges at the spout of flammable liquid precursor feed-pipe; Described flammable liquid precursor feedway, compression combustion-supporting gas feedway, combustion-supporting property gas supply device and inflammable gas feedway are arranged on outside the outer cover.
7. one of according to claim 1～5 described spray burning prepares the equipment of film and spray patterns, and it is characterized in that: described spray burning device comprises flame-thrower nozzle, heating atomization device, flammable liquid precursor feed-pipe, flammable liquid precursor feedway, combustion-supporting property gas inlet pipe, combustion-supporting property gas supply device, inflammable gas inlet pipe and inflammable gas feedway; Described flammable liquid precursor feedway is connected with flammable liquid precursor feed-pipe, passes into flammable liquid precursor in flammable liquid precursor feed-pipe; Described flammable liquid precursor feed-pipe is connected with flame-thrower nozzle by the heating atomization device; Described combustion-supporting property gas supply device is connected with combustion-supporting property gas feed pipe, passes into combustion-supporting property gas in combustion-supporting property gas feed pipe; Described inflammable gas feedway is connected with the inflammable gas feed-pipe, passes into inflammable gas in the inflammable gas feed-pipe; Described combustion-supporting property gas inlet pipe is connected with the inflammable gas inlet pipe, forms pipe connecting; Described pipe connecting is connected with flame-thrower nozzle; Described pipe connecting is divided into two-way at least in flame-thrower nozzle; Described two-way flame-out port converges at the spout of flammable liquid precursor feed-pipe; Described flammable liquid precursor feedway, combustion-supporting property gas supply device and inflammable gas feedway are arranged on outside the outer cover.
8. spray burning according to claim 7 prepares the equipment of film and spray patterns, it is characterized in that: described spray burning device also comprises protective gas inlet pipe and protective gas feedway; Described protective gas feedway is connected with the protective gas inlet pipe, passes into protective gas in the protective gas inlet pipe; Described protective gas inlet pipe is connected with flame-thrower nozzle; The air outlet of described protective gas inlet pipe distributes in the form of a ring around the spout of flammable liquid precursor feed-pipe; Described protective gas feedway is arranged on outside the outer cover.
9. spray burning according to claim 8 prepares the equipment of film and spray patterns, it is characterized in that: described flammable liquid precursor feed-pipe, compression combustion-supporting gas inlet pipe, combustion-supporting gas inlet pipe, inflammable gas inlet pipe and protective gas inlet pipe are provided with current velocity controller.
According to claim 8 or 9 described spray burnings prepare the equipment of film and spray patterns, it is characterized in that: described protective gas is rare gas element.
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| CN201310240527.7A CN103305810B (en) | 2013-06-18 | 2013-06-18 | The equipment of film and spray patterns is prepared in a kind of spray burning |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310240527.7A CN103305810B (en) | 2013-06-18 | 2013-06-18 | The equipment of film and spray patterns is prepared in a kind of spray burning |
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| CN103305810A true CN103305810A (en) | 2013-09-18 |
| CN103305810B CN103305810B (en) | 2015-10-28 |
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| CN101142139A (en) * | 2005-02-11 | 2008-03-12 | Eth苏黎世公司 | Antimicrobial and antifungal powders made by flame spray pyrolysis |
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| CN103305810B (en) | 2015-10-28 |
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Inventor after: Bao Zhihao Inventor after: Li Xiaodong Inventor after: Liu Hang Inventor after: Zeng Chaoyang Inventor after: Guo Yimin Inventor after: Zhang Weiping Inventor after: Wang Dong Inventor after: Yao Li Inventor before: Bao Zhihao Inventor before: Li Xiaodong |
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Effective date of registration: 20190203 Address after: 214135 Tian'an Wisdom City 3-104, 228 Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province Patentee after: Jiangsu mynard micro nano technology Co. Ltd. Address before: 215000 Suzhou Yuhao Nanomaterials Co., Ltd., Room 217, 218 A4 Building, Xinghu Street, Suzhou Industrial Park, Jiangsu Province Patentee before: Suzhou Yuhao Nano Materials Co., Ltd. |
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