CN103293740B - Display panels - Google Patents
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- CN103293740B CN103293740B CN201310106529.7A CN201310106529A CN103293740B CN 103293740 B CN103293740 B CN 103293740B CN 201310106529 A CN201310106529 A CN 201310106529A CN 103293740 B CN103293740 B CN 103293740B
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Abstract
A kind of display panels, display panels comprises upper substrate and infrabasal plate, upper substrate comprises contraposition subscript, contraposition subscript to comprise on one principal mark and some on this centered by principal mark with the upper auxiliary mark of the first spacing symmetry arrangement, infrabasal plate comprises contraposition subscript, contraposition subscript comprises the first contraposition subscript, this first contraposition subscript comprise one first time principal mark and some centered by this first time principal mark with first time auxiliary mark of the second spacing symmetry arrangement.
Description
Technical field
The present invention relates to a kind of display panels, particularly relate to a kind of display panels with alignment mark.
Background technology
Liquid crystal display comprises the advantages such as frivolous due to it, has now been widely used in the modernization information equipments such as TV, notebook, computing machine, mobile phone, personal digital assistant.
Usually, the display panels liquid crystal layer that comprises upper substrate, infrabasal plate and be sandwiched between two substrates.Each substrate comprises viewing area and surrounding zone.Each neighboring area comprises at least one alignment mark.In the manufacture process of liquid crystal display, before upper and lower two baseplate-laminatings, contraposition must be carried out by the alignment mark of upper and lower base plate to upper and lower base plate.But existing alignment mark is all fairly simple, when two baseplate-laminating generation contraposition deviations, be unfavorable for obtaining contraposition deviation information faster.
Summary of the invention
In view of this, be necessary to provide a kind of can the upper and lower two substrates of monitoring display panel contraposition and the display panels of contraposition deviation information can be obtained simultaneously.
A kind of display panels, this display panels comprises upper substrate and infrabasal plate, upper substrate and infrabasal plate deposit some retes respectively, one alignment mark is arranged on display panel, this alignment mark comprises contraposition subscript and contraposition subscript, contraposition subscript is arranged on this upper substrate, and this contraposition subscript to comprise on one centered by principal mark and some above principal marks with the upper auxiliary mark of the first spacing symmetry arrangement.Contraposition subscript, contraposition subscript is arranged on this infrabasal plate, contraposition subscript comprises the first contraposition subscript and the second contraposition subscript, first contraposition subscript and the second contraposition subscript comprise principal mark and some lower auxiliary marks respectively, lower be auxiliaryly marked with the second spacing symmetry arrangement centered by lower principal mark, and the first contraposition subscript and the second contraposition subscript are positioned at the different retes on this infrabasal plate.
Upper substrate comprises black-matrix layer and chromatic filter layer, and contraposition subscript is positioned at this black-matrix layer.Infrabasal plate comprises the first metal layer, insulation course, semiconductor layer, the second metal level and transparency conducting layer, and the first contraposition subscript is positioned at this first metal layer, and the second contraposition subscript is positioned at this second metal level.
Contraposition subscript is all arranged along parallel first direction with contraposition subscript, and the second spacing is less than this first spacing.
In display panels provided by the invention, utilize contraposition subscript and the first contraposition subscript to carry out contraposition, ensure that the contraposition assembling of upper and lower two substrates, can the deviation information of quick obtaining display panel by the observation of alignment mark.
With reference to the accompanying drawings, in conjunction with embodiment, the invention will be further described.
Accompanying drawing explanation
Fig. 1 is the vertical view of embodiment of the present invention display panels.
Fig. 2 is the part cross-sectional schematic of embodiment of the present invention display panels along V-V line direction in Fig. 1.
Fig. 3 is the close-up schematic view of embodiment one alignment mark.
Fig. 4 is the close-up schematic view of embodiment one Fig. 1 alignment mark skew.
Fig. 5 is the close-up schematic view of embodiment one Fig. 1 alignment mark skew.
Fig. 6 is the close-up schematic view of embodiment one Fig. 1 alignment mark skew.
Fig. 7 is the close-up schematic view of embodiment two alignment mark.
Primary clustering symbol description
Display panels 100
Viewing area 101
Surrounding zone 102
Alignment mark 30
Infrabasal plate 110
Second viewing area 111
Second week border area 112
Upper substrate 120
First viewing area 121
First surrounding zone 122
Black matrix" 127
Frame glue 128
Contraposition subscript 130
Upper principal mark 130a
Upper auxiliary mark 130b
Thin film transistor (TFT) 150
Gate 151
Insulation course 152
Channel region 153
Source-drain electrode 154
Passivation layer 155
Pixel electrode 156
Contraposition subscript 230
First contraposition subscript 231
Second contraposition subscript 232
First time principal mark 231a
First time auxiliary mark 231b
Second time principal mark 232a
Second time auxiliary mark 232b
Following embodiment will further illustrate the present invention in conjunction with above-mentioned accompanying drawing.
Embodiment
Please refer to Fig. 1 and Fig. 2, Fig. 1 is the vertical view of the embodiment of the present invention one display panels 100, and Fig. 2 is the part cross-sectional schematic along V-V line direction in Fig. 1.Display panels 100 is formed by frame glue 128 laminating by infrabasal plate 110 and upper substrate 120, and upper substrate 120 can be colored filter substrate, and infrabasal plate 110 can be array base palte.
In present embodiment, upper substrate 120 comprises the first viewing area 121 and be centered around the first surrounding zone 122 around the first viewing area 121.First viewing area 121 comprise some be intervally arranged colorized optical filtering color blocking R, G, B, and at colorized optical filtering color blocking R, black matrix" 127 between G, B.This first surrounding zone 122 is provided with multiple contraposition subscript 130.In one embodiment, this contraposition subscript 130 is formed in same layer with black matrix" 127 and material is identical, using as upper substrate 120 laminating manufacture process in contraposition reference.Black matrix" 127 has defined multiple picture element region on upper substrate 120.This colorized optical filtering color blocking R, G, B are formed in the picture element region that black matrix" 127 defines successively.
The second week border area 112 that infrabasal plate 110 comprises the second viewing area 111 and is centered around around the second viewing area 111.This second viewing area 111 comprises and somely correspond to each chromatic filter layer color blocking R of upper substrate 120, the thin film transistor (TFT) 150 of G, B.This second week border area 112 is provided with multiple contraposition subscripts 230 of corresponding contraposition subscript 130.Contraposition subscript 230 comprises spaced first contraposition subscript 231 and the second contraposition subscript 232.In present embodiment, contraposition subscript 230 is formed while manufacture thin film transistor (TFT) 150.Specifically, first on infrabasal plate 110, form the first metal layer and define the gate 151 of thin film transistor (TFT) 150 and the first contraposition subscript 231 of contraposition subscript 230, and then the insulation course 152 covering infrabasal plate 110, gate 151 and the first contraposition subscript 231 is formed, and then form semiconductor layer successively and define the channel region 153 of thin film transistor (TFT) 150, then form the second metal level and define the source-drain electrode 154 of thin film transistor (TFT) 150 and the second contraposition subscript 232 of contraposition subscript 230.Finally proceed deposition and the patterning of passivation layer 155 and pixel electrode 156.
In present embodiment, contraposition subscript 130 and contraposition subscript 230 are defined as alignment mark 30 jointly.When manufacturing display panels 100, by contraposition subscript 130 and contraposition subscript 230, the contraposition when fitting detects, and accurately can control the accurate location of relative position between upper substrate 120 and infrabasal plate 110.
The manufacture of alignment mark 30 of the present invention is complete in the manufacture process of upper substrate 120 and infrabasal plate 110 completely, does not increase extra step.
Fig. 3 is display panels 100 top partial view diagram enlarged drawing at an alignment mark 30 of surrounding zone 102 after laminating.Contraposition subscript 130 to comprise on one further with the upper auxiliary mark 130b of the first spacing W1 symmetry arrangement centered by principal mark 130a and some above principal mark 130a, and on those, auxiliary mark 130b extends arrangement along the X-direction in Fig. 3.
This first contraposition subscript 231 comprise first time principal mark 231a and some centered by first time principal mark 231a with first time auxiliary mark 231b of the second equidistant W2 symmetry arrangement.This first time auxiliary mark 231b extends arrangement in X direction.
This second contraposition subscript 232 comprise second time principal mark 232a and some centered by second time principal mark 232a with second time auxiliary mark 232b of the second equidistant W2 symmetry arrangement.Second time auxiliary mark 232b extends arrangement in X direction.In present embodiment, the first spacing W1 is slightly larger than the second spacing W2.In one embodiment, each auxiliary mark 130b in contraposition subscript 130 has identical width, and the first spacing W1 can be 0.5um.And each indicia patterns has identical width equally in contraposition subscript 230, and each alignment mark pattern width of width and contraposition subscript 130 is equal.Second spacing W2 can be 0.4um.
In present embodiment, upper principal mark 130a, first time principal mark 231a and second time principal mark 232a can be the first rectangular patterns of same size.Further, the width of upper principal mark 130a, first time principal mark 231a and second time principal mark 232a is equal, and when upper principal mark 130a, first time principal mark 231a and second time principal mark 232a align, they keep overlapping at Width (X-direction).This first time auxiliary mark 231b and second time auxiliary mark 232b can be the second rectangular patterns of same size equally.In order to identification clearer when contraposition detects not isolabeling, the area of upper principal mark 130a can be greater than the area of auxiliary mark 130b.The area of first time principal mark 231a can be greater than the area of first time auxiliary mark 231b.The area of second time principal mark 232a also can be greater than the area of second time auxiliary mark 232b.
As shown in Figure 3, when first time principal mark 231a, second time principal mark 232a and upper principal mark 130a are at X-direction complete matching, first time auxiliary mark 231b and second time auxiliary mark 232b is also at X-direction complete matching.Now go up auxiliary mark 130b mark auxiliary relative to first time 231b, second time auxiliary mark 232b offset 0.1um, 0.2um, 0.3um successively when upper principal mark 130a extends to X-direction both sides ...Particularly, to be close on the right side of principal mark 130a/first upper auxiliary mark 130b and first time auxiliary mark 231b or second time corresponding auxiliary mark 232b in left side to the right/offset by 0.1um left, to be close on upper substrate 120 on the right side of principal mark 130a/second upper auxiliary mark 130b and first time auxiliary mark 231b or second time corresponding auxiliary mark 232b in left side to the right/offset by 0.2um left, the like.
As shown in Figure 4, as first time principal mark 231a, second time principal mark 232a and upper principal mark 130a is when X-direction there occurs skew, first time principal mark 231a and second time principal mark 232a of such as contraposition subscript 230 aligns in X-direction, but with the upper principal mark 130a of contraposition subscript 130 there occurs skew in X-direction, by in observation discovery first time auxiliary mark 231b or second time auxiliary mark 232b on the right side of first time principal mark 231a the 2nd first time auxiliary mark 231b or second time auxiliary mark 232b just align in X-direction with the upper auxiliary 130b that marks of contraposition subscript 130, then can judge that contraposition infrabasal plate offset by 0.2um to the right, the like.
As shown in Figure 5, usually when panel attachment, controlled the contraposition of two substrates by the upper principal mark 130a controlling first time principal mark 231a in the first contraposition subscript 231 in contraposition subscript 230 and contraposition subscript 130.When above-mentioned both when fitting on principal mark 130a and first time principal mark 231a mark to overlap completely alignment, then illustrate that manufacture process of fitting does not invent skew.And then whether detect second time principal mark 232a and upper principal mark 130a in X-direction alignment, if alignment, illustrate that the first metal layer and bimetallic light shield skew or etching skew do not occur infrabasal plate 110 in manufacturing process yet.Otherwise, second time principal mark 232a and upper principal mark 130a does not align in X-direction, as shown in Fig. 5 oval frame line, but second second time auxiliary mark 232b on the right side of second time principal mark 232a aligns in X-direction with the upper auxiliary 130b that marks of contraposition subscript 130, then can judge the manufacture processing procedure generation contraposition skew of the first metal layer and the second metal level, and be offset by 0.2um to the right, the like.
As shown in Figure 6, even if there is skew when panel attachment, also can judge while calculating laminating offset dimensions and calculate the offset dimensions of the manufacturing process of the first metal layer and the second metal level.As shown in the figure, skew has been there is in first time principal mark 231a and upper principal mark 130a in X-direction, find that left side oval frame line is shown in first first time auxiliary mark 231b and upper auxiliary mark 130b on the right side of first time principal mark 231a and just aligns by observation, then can judge that the first contraposition subscript 231 offset by 0.1um to the right relative to contraposition subscript 130, that is occur when panel attachment that infrabasal plate 110 offset by 0.1um to the right relative to upper substrate 120.As shown in Figure 6, if first time principal mark 231a and second time principal mark 232a does not align in X-direction, but such as locating shown in right side oval frame line, second time auxiliary mark 232b in the 3rd, right side of second time principal mark 232a just aligns in the X direction with upper auxiliary mark 130b, can draw by calculating, the second contraposition subscript 232 offset by 0.3um to the right relative to contraposition subscript 130.And the first contraposition subscript 231 offset by 0.1um to the right relative to contraposition subscript 130 before, both subtract each other can show that the second contraposition subscript 232 offset by 0.2um to the right relative to the first contraposition subscript 231.Therefore, can calculate, panel has occurred that when fitting infrabasal plate 110 there occurs the light shield that the second metal level offset by 0.2um to the right relative to the first metal layer and offsets or etch skew while upper substrate 120 offset by 0.1um to the right simultaneously.
As shown in Figure 7, Fig. 7 is the alignment mark close-up schematic view of embodiment two.With embodiment one difference be, in the present embodiment, the upper auxiliary mark 130b of contraposition subscript 130 is arranged in the both sides of principal mark 130a, each auxiliary mark 130b spacing is to each other W1, but the spacing of first upper auxiliary mark 130b of upper principal mark 130a and its left and right sides is respectively W4 and W3, and wherein W3 and W4 is unequal.Equally, first time auxiliary mark 231b spacing is to each other W2, second time auxiliary mark 232b spacing to each other is also W2, and first first time auxiliary target spacing of first time principal mark 231a and its effect both sides is respectively W6 and W5, first second time auxiliary target spacing of second time principal mark 232a and its effect both sides is respectively W6 and W5, and wherein W6 and W5 is unequal.That is going up auxiliary mark 130b is the both sides being arranged in upper principal mark 130a with unsymmetric form, and first time auxiliary mark 231b and second time auxiliary mark 232b is arranged in first time principal mark 231a and second time principal mark 232 both sides with asymmetrical formation.It should be noted that the concrete distance for the ease of calculating skew fast, the difference of W3 and W5 is preferably equal with the difference of W4 and W6, and this difference also equals the difference of W1 and W2 simultaneously.
In alternative embodiments of the present invention, on this, principal mark 130a and upper auxiliary mark 130b is the rectangular patterns comprising same size, makes X mark at upper principal mark 130a place.Equally, lower first time principal mark 231a, second time principal mark 232a and first time auxiliary mark 231b and second time auxiliary mark 232b also can be the rectangular patterns of same size.
To sum up, the alignment mark 30 in the present invention not only can realize the contraposition monitoring in baseplate-laminating, simultaneously can also Timeliness coverage calculate the skew of manufacture process in infrabasal plate 110 and the concrete numerical value of skew.
Be understandable that, for the person of ordinary skill of the art, other various corresponding change and distortion can be made by technical conceive according to the present invention, and all these change the protection domain that all should belong to the claims in the present invention with distortion.
Claims (11)
1. a display panels, this display panels comprises upper substrate and infrabasal plate,
Upper substrate comprises the contraposition subscript along first direction arrangement, this contraposition subscript comprises principal mark and multiple upper auxiliary mark being positioned at principal mark both sides on this on one, described upper principal mark and adjacent one has the first spacing between auxiliary mark, and between adjacent two upper auxiliary marks, also there is this first spacing;
Infrabasal plate comprises contraposition subscript, this contraposition subscript comprises the first contraposition subscript of arranging along described first direction, this the first contraposition subscript comprises one first time principal mark and multiple first time auxiliary mark being positioned at these first time principal mark both sides, between described first time principal mark and adjacent one first time auxiliary mark, there is the second spacing, and between adjacent two first time auxiliary marks, also there is this second spacing, described first spacing and described second spacing unequal, described infrabasal plate also comprises the second contraposition subscript, this the second contraposition subscript comprise one second time principal mark and some be positioned at these second time principal mark both sides and with second spacing arrangement second time auxiliary mark.
2. display panels as claimed in claim 1, is characterized in that: described second time auxiliary is marked with symmetry arrangement centered by this second time principal mark.
3. display panels as claimed in claim 1, is characterized in that: the first described contraposition subscript and the second contraposition subscript are positioned at different rete.
4. display panels as claimed in claim 2, is characterized in that: described infrabasal plate comprises the first metal layer, insulation course and the second metal level further successively.
5. display panels as claimed in claim 4, is characterized in that: the first described contraposition subscript and the same layer of this first metal layer.
6. display panels as claimed in claim 4, is characterized in that: the second described contraposition subscript and the same layer of this second metal level.
7. display panels as claimed in claim 2, is characterized in that: described upper substrate comprises black-matrix layer and chromatic filter layer further.
8. display panels as claimed in claim 7, is characterized in that: described contraposition subscript and the same layer of this black matrix".
9. display panels as claimed in claim 1, is characterized in that: the second described spacing is less than this first spacing.
10. display panels as claimed in claim 1, is characterized in that: to be describedly auxiliaryly marked with on this symmetry arrangement centered by principal mark.
11. display panels as claimed in claim 1, is characterized in that: described first time auxiliary is marked with symmetry arrangement centered by this first time principal mark.
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| CN201310106529.7A CN103293740B (en) | 2013-03-29 | 2013-03-29 | Display panels |
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| CN201310106529.7A CN103293740B (en) | 2013-03-29 | 2013-03-29 | Display panels |
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| CN103293740B true CN103293740B (en) | 2016-04-27 |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698934B (en) * | 2013-12-31 | 2016-11-02 | 友达光电(厦门)有限公司 | Display floater |
| CN104297982B (en) * | 2014-11-05 | 2017-09-22 | 京东方科技集团股份有限公司 | Display panel and display device |
| CN105974638B (en) * | 2016-07-26 | 2019-06-28 | 京东方科技集团股份有限公司 | A kind of display base plate and display device |
| CN106773264A (en) * | 2017-01-22 | 2017-05-31 | 武汉华星光电技术有限公司 | A kind of liquid crystal display panel and display device |
| CN106647011A (en) | 2017-03-14 | 2017-05-10 | 京东方科技集团股份有限公司 | Display substrate, display panel, display device and manufacturing method for display substrate |
| CN106873223A (en) * | 2017-04-20 | 2017-06-20 | 武汉华星光电技术有限公司 | A kind of liquid crystal panel assembly |
| CN109935572B (en) * | 2017-12-18 | 2020-08-21 | 瀚宇彩晶股份有限公司 | Electronic device |
| CN108132558B (en) * | 2018-01-26 | 2020-08-25 | 福州京东方光电科技有限公司 | Alignment detection method and display device |
| CN108663852A (en) * | 2018-03-29 | 2018-10-16 | 上海中航光电子有限公司 | Display panel and display device |
| CN109254438B (en) * | 2018-10-11 | 2021-12-03 | Tcl华星光电技术有限公司 | Liquid crystal display panel and manufacturing method thereof |
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| JP4689797B2 (en) * | 2000-07-19 | 2011-05-25 | Ｎｅｃ液晶テクノロジー株式会社 | Liquid crystal display device manufacturing apparatus and manufacturing method thereof |
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| CN1131751A (en) * | 1994-11-28 | 1996-09-25 | 佳能株式会社 | Circuit assembly and process for production thereof |
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| CN101614897A (en) * | 2008-06-27 | 2009-12-30 | Nec液晶技术株式会社 | The display device and the manufacture method thereof of alignment mark, use alignment mark |
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