CN103293128A - 狭缝光波导外延光栅fp腔级联型光学生化传感芯片 - Google Patents
狭缝光波导外延光栅fp腔级联型光学生化传感芯片 Download PDFInfo
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- CN103293128A CN103293128A CN2013101807507A CN201310180750A CN103293128A CN 103293128 A CN103293128 A CN 103293128A CN 2013101807507 A CN2013101807507 A CN 2013101807507A CN 201310180750 A CN201310180750 A CN 201310180750A CN 103293128 A CN103293128 A CN 103293128A
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Citations (8)
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US20050089257A1 (en) * | 2003-04-09 | 2005-04-28 | Barrios Carlos A. | Electro-optic modulator on rib waveguide |
CN101206127A (zh) * | 2007-11-02 | 2008-06-25 | 北京航空航天大学 | 一种基于狭缝波导的光学传感器 |
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CN101639576A (zh) * | 2008-07-31 | 2010-02-03 | 中国科学院半导体研究所 | 硅基级联谐振腔结构的低功耗电光调制器 |
CN101696933A (zh) * | 2009-10-26 | 2010-04-21 | 浙江大学 | 一种基于谐振干涉复合结构和游标效应的光波导传感器 |
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CN101871790A (zh) * | 2010-06-08 | 2010-10-27 | 浙江大学 | 基于宽带光源和级连光波导滤波器游标效应的光传感器 |
CN203385660U (zh) * | 2013-05-16 | 2014-01-08 | 成都谱视科技有限公司 | 狭缝光波导外延光栅fp腔级联型光学生化传感芯片 |
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Patent Citations (8)
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US20050089257A1 (en) * | 2003-04-09 | 2005-04-28 | Barrios Carlos A. | Electro-optic modulator on rib waveguide |
CN101206127A (zh) * | 2007-11-02 | 2008-06-25 | 北京航空航天大学 | 一种基于狭缝波导的光学传感器 |
CN101261223A (zh) * | 2008-04-15 | 2008-09-10 | 浙江大学 | 基于狭缝波导的光微环谐振传感器及其制作方法 |
CN101639576A (zh) * | 2008-07-31 | 2010-02-03 | 中国科学院半导体研究所 | 硅基级联谐振腔结构的低功耗电光调制器 |
CN101738679A (zh) * | 2008-11-21 | 2010-06-16 | 北京航空航天大学 | 一种基于狭缝波导的布拉格光栅滤波器 |
CN101696933A (zh) * | 2009-10-26 | 2010-04-21 | 浙江大学 | 一种基于谐振干涉复合结构和游标效应的光波导传感器 |
CN101871790A (zh) * | 2010-06-08 | 2010-10-27 | 浙江大学 | 基于宽带光源和级连光波导滤波器游标效应的光传感器 |
CN203385660U (zh) * | 2013-05-16 | 2014-01-08 | 成都谱视科技有限公司 | 狭缝光波导外延光栅fp腔级联型光学生化传感芯片 |
Non-Patent Citations (4)
Title |
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QIANFAN XU ET AL.: "Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material", 《OPTICS LETTERS》 * |
TOM CLAES ET AL.: "Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator", 《IEEE PHOTONICS JOURNAL》 * |
孙阳 等: "SOI 亚微米波导光栅的设计与制作", 《半导体光电》 * |
李育刚 等: "一种新型单晶硅SOI高温压力传感器", 《传感技术学报》 * |
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